Gas supply system and gas supply method

By setting up a pressure reducer, heating unit and detection unit in the gas supply system, switching the output pipeline according to the pressure range and controlling heating, the problem of unstable gas output pressure is solved, and the stability of gas output pressure and the automatic control of the system is realized. Effect.

CN118705539BActive Publication Date: 2024-12-10SUZHOU CASINSTRUMENTS SEMICONDUCTOR MATERIAL CO LTD
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Patent Information

Application Number
CN202411214960.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-08-30
Publication Date
2024-12-10
Estimated Expiration
2044-08-30

AI Technical Summary

Technical Problem

When the existing gas supply system uses liquid/solids to generate and supply gas, it is difficult to ensure that the pressure value of the output gas is within the required range, resulting in unstable pressure.

Method used

A gas supply system is designed, by setting a pressure reducer, heating unit and detection unit, different output pipeline selection and heating control are performed according to the pressure range of the gas to ensure the stable pressure of the gas output.

Benefits of technology

The stability of gas output pressure is achieved, the pressure in the tank is avoided too high, and the degree of automation and control effect of the system is improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention discloses a gas supply system and a gas supply method. The gas supply system according to the present invention includes a tank body, in which gas to be supplied is stored; a gas supply port is connected to the tank body to supply the gas to be supplied to the outside; the first end of the first pipeline is connected to the tank body, and the second end of the first pipeline is connected to the gas supply port; the pressure reducer is arranged on the first pipeline and is located between the first end of the first pipeline and the gas supply port; the first end of the second pipeline is connected to the tank body, and the second end of the second pipeline is connected to the gas supply port; the heating unit is located on the tank body to heat the inside of the tank body; the detection unit detects the pressure value of the gas to be supplied in the first pipeline between the first end of the first pipeline and the pressure reducer; when the pressure value is in different pressure intervals, different gas supply schemes are adopted. According to the gas supply system and the gas supply method disclosed in the present invention, it is possible to ensure that the output pressure value of the supplied gas is stable within the required range.
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Description

Technical Field

[0001] The present invention relates to the technical field of gas supply, and in particular to a gas supply system and a gas supply method. Background Art

[0002] Gas supply refers to the delivery of gas from storage tanks, cylinders or pipelines to equipment that needs to use gas. Gas supply usually involves gas storage equipment, delivery pipelines, compressors, filters, pressure regulators, flow meters, valves and other components to ensure that the gas can be safely and effectively delivered to the target location. Gas supply systems are widely used in industrial production, laboratory research, health care, food processing and other fields.

[0003] For gas supply, it is very important to ensure the pressure value of the supplied gas. However, in existing gas supply systems, especially in equipment that uses liquid / solid to generate and supply gas, it is usually difficult to ensure that the pressure value of the output gas is within the required range.

[0004] Therefore, there is an urgent need for a new gas supply system and a new gas supply method that can overcome the above problems. Summary of the invention

[0005] In view of the above problems, an object of the present invention is to provide a gas supply system and a gas supply method, in particular, a method for controlling the output pressure of ammonia from a tank truck, so as to ensure that the output pressure value of the supplied gas is stable within a required range.

[0006] According to one aspect of the present invention, there is provided a gas supply system, comprising:

[0007] a tank body, wherein the gas to be supplied is stored in the tank body;

[0008] A gas supply port, the gas supply port being in communication with the tank body so as to supply the gas to be supplied to the outside;

[0009] a first pipe, wherein a first end of the first pipe is connected to the tank body, and a second end of the first pipe is connected to the air supply port;

[0010] a pressure reducer, the pressure reducer being arranged on the first pipeline and being located between the first end of the first pipeline and the air supply port;

[0011] a second pipe, wherein a first end of the second pipe is connected to the tank body, and a second end of the second pipe is connected to the air supply port;

[0012] a heating unit, the heating unit being located on the tank body to heat the interior of the tank body; and

[0013] a detection unit, the detection unit detecting a pressure value of the gas to be supplied in the first pipeline between the first end of the first pipeline and the pressure reducer,

[0014] Wherein, when the pressure value is in the first pressure interval, the gas to be supplied is decompressed by the pressure reducer and then output from the gas supply port;

[0015] When the pressure value is within a second pressure range, the gas to be supplied is output from the gas supply port via the second pipeline;

[0016] When the pressure value is in a third pressure interval, the gas to be supplied is output from the gas supply port via the second pipeline, and the heating unit is turned on to heat the interior of the tank;

[0017] The pressure value in the first pressure interval is greater than the pressure value in the second pressure interval; the pressure value in the second pressure interval is greater than the pressure value in the third pressure interval.

[0018] Optionally, the first end of the second pipeline is connected to the first pipeline, and the connecting position is located on the first pipeline between the first end of the first pipeline and the pressure reducer;

[0019] The second end of the second pipeline is connected to the first pipeline, and the connecting position is located on the first pipeline between the pressure reducer and the air supply port;

[0020] The second pipeline is provided with a second valve.

[0021] Optionally, the detection unit is connected to the second valve via an actuator;

[0022] When the pressure value is within a first pressure interval, the actuator closes the second valve;

[0023] When the pressure value is in a second pressure interval, the actuator opens the second valve;

[0024] When the pressure value is in a third pressure interval, the actuator opens the second valve.

[0025] Optionally, the gas supply system further comprises:

[0026] Heat source;

[0027] A liquid inlet pipeline, the liquid inlet pipeline is respectively connected to the heat source and the heating unit, and the liquid inlet pipeline is also provided with a liquid inlet valve;

[0028] A liquid return pipe, the liquid return pipe is connected to the heat source and the heating unit respectively, and a liquid return valve is also provided on the liquid return pipe;

[0029] a circulation pump, wherein the circulation pump is arranged on the liquid inlet pipe and / or the liquid return pipe,

[0030] Wherein, the detection unit is connected to the liquid inlet valve, the liquid return valve and the circulation pump respectively via an actuator;

[0031] When the pressure value is in the third pressure interval, the actuator opens the liquid inlet valve, the liquid return valve and the circulation pump; driven by the circulation pump, the heat source transports the heated liquid to the heating unit via the liquid inlet pipe, and the cooled liquid is transported back to the heat source via the liquid return pipe for reheating.

[0032] Optionally, solid material and / or liquid material is placed in the tank;

[0033] The gas to be supplied is obtained after the solid material is sublimated; and the gas to be supplied is obtained after the liquid material is evaporated.

[0034] Optionally, the tank body comprises a tank of a tank truck, and liquid ammonia is placed in the tank of the tank truck.

[0035] According to another aspect of the present invention, there is provided a gas supply method, comprising:

[0036] Obtaining a pressure value of the gas to be supplied in the first pipeline between the first end of the first pipeline and the pressure reducer;

[0037] When the pressure value is within the first pressure range, the gas to be supplied is decompressed by the pressure reducer and then output from the gas supply port;

[0038] When the pressure value is within a second pressure interval, the gas to be supplied is output from the gas supply port via a second pipeline;

[0039] When the pressure value is in the third pressure interval, the gas to be supplied is output from the gas supply port via the second pipeline, and the heating unit is turned on to heat the interior of the tank.

[0040] Wherein, the tank stores gas to be supplied;

[0041] The first end of the first pipe is connected to the tank body, and the second end of the first pipe is connected to the air supply port;

[0042] The pressure reducer is arranged on the first pipeline and is located between the first end of the first pipeline and the air supply port;

[0043] The first end of the second pipe is connected to the tank body, and the second end of the second pipe is connected to the air supply port;

[0044] The pressure value in the first pressure interval is greater than the pressure value in the second pressure interval; the pressure value in the second pressure interval is greater than the pressure value in the third pressure interval.

[0045] Optionally, the first pressure interval is a pressure value greater than or equal to 9 Bar;

[0046] The second pressure range is a pressure value less than 9 Bar and greater than or equal to 7 Bar;

[0047] The third pressure interval is a pressure value less than 7 Bar.

[0048] Optionally, when the pressure value is in the third pressure interval, the heating unit is turned on to heat the interior of the tank body, and after the pressure value is in the second pressure interval, the heating of the interior of the tank body is stopped.

[0049] Optionally, turning on the heating unit to heat the interior of the tank body includes:

[0050] supplying a heating liquid to the heating unit to heat the interior of the tank,

[0051] Wherein, the temperature of the heated liquid is between 50 and 70 degrees Celsius.

[0052] The gas supply system and gas supply method provided by the present invention are provided with different output pipelines. When the pressure value is in different pressure ranges, different gas supply schemes are adopted to ensure that the output pressure value of the supplied gas is stable within the required range.

[0053] Furthermore, by connecting the first pipeline and the second pipeline and controlling the second valve, switching of different gas supply schemes is achieved, and the structure is simple and the control is convenient.

[0054] Furthermore, according to the pressure detection result of the detection unit, the gas supply scheme is automatically switched, with a high degree of automation and good control effect.

[0055] Furthermore, according to the pressure detection result, the heating can be turned on / off to adapt to the fluctuation of gas consumption and to maintain the stability of the pressure in the tank to prevent the pressure in the tank from being too high.

[0056] Furthermore, the heating is performed by heating the liquid, and the temperature of the heating liquid is between 50 and 70 degrees Celsius, which ensures the heating effect while preventing excessive pressure in the tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0057] The above and other objects, features and advantages of the present invention will become more apparent through the following description of the embodiments of the present invention with reference to the accompanying drawings, in which:

[0058] Figure 1 A schematic structural diagram of a gas supply system according to a first embodiment of the present invention is shown;

[0059] Figure 2 A schematic diagram of a gas supply system according to a second embodiment of the present invention is shown;

[0060] Figure 3 A method flow chart of a gas supply method according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0061] Various embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. In each of the accompanying drawings, identical elements are represented by identical or similar reference numerals. For the sake of clarity, the various parts in the accompanying drawings are not drawn to scale. In addition, some well-known parts may not be shown in the drawings.

[0062] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. Many specific details of the present invention, such as the structure, materials, dimensions, processing technology and techniques of the components are described below to provide a clearer understanding of the present invention. However, as those skilled in the art will appreciate, the present invention may be implemented without following these specific details.

[0063] It should be understood that when describing the structure of a component, when a layer or a region is referred to as being "on" or "over" another layer or another region, it may mean that it is directly on the other layer or another region, or that other layers or regions are included between it and the other layer or another region. Moreover, if the component is turned over, the layer or a region will be "below" or "beneath" another layer or another region.

[0064] Figure 1 FIG. 2 shows a schematic diagram of the structure of a gas supply system according to Embodiment 1 of the present invention. Figure 1 As shown, the gas supply system according to the first embodiment of the present invention includes a tank body 100 , a gas supply port 200 , a first pipeline 300 , a pressure reducer 400 , a second pipeline 500 , a heating unit 600 and a detection unit 700 .

[0065] Specifically, the gas to be supplied is stored in the tank 100. The tank 100 is usually made of metal or alloy material, and has a certain thickness and strength to withstand the pressure of the internal gas. The tank 100 can contain solids, liquids and gases.

[0066] The gas supply port 200 is communicated with the tank body 100 to supply the gas to be supplied to the outside.

[0067] A first end of the first pipe 300 is connected to the tank body 100 , and a second end of the first pipe 300 is connected to the air supply port 200 .

[0068] The pressure reducer 400 is disposed on the first pipeline 300 and is located between the first end of the first pipeline 300 and the gas supply port 200. The pressure reducer 400 is a device for reducing gas pressure and is generally used in a gas supply system. The main function of the pressure reducer 400 is to reduce the gas pressure of high-pressure gas to a required low pressure level to meet specific process requirements or equipment working requirements. Optionally, the pressure reducer 400 is composed of an adjustable valve and a pressure sensor, which can monitor and adjust the pressure of the gas to ensure that the required pressure is stably output within a set range.

[0069] A first end of the second pipe 500 is connected to the tank body 100 , and a second end of the second pipe 500 is connected to the air supply port 200 .

[0070] The heating unit 600 is located on the can body 100 to heat the interior of the can body 100 .

[0071] The detection unit 700 detects a pressure value of the gas to be supplied in the first pipeline between the first end of the first pipeline 300 and the pressure reducer 400 .

[0072] When the pressure value is in the first pressure range, the gas to be supplied is decompressed by the pressure reducer 400 and then output from the gas supply port 200;

[0073] When the pressure value is in the second pressure interval, the gas to be supplied is output from the gas supply port 200 via the second pipeline 500;

[0074] When the pressure value is in the third pressure interval, the gas to be supplied is output from the gas supply port 200 via the second pipeline 500, and the heating unit 600 is turned on to heat the interior of the tank body 100;

[0075] The pressure value in the first pressure interval is greater than the pressure value in the second pressure interval; the pressure value in the second pressure interval is greater than the pressure value in the third pressure interval.

[0076] Optionally, solid material and / or liquid material are placed in the tank body 100. The solid material is sublimated to obtain the gas to be supplied; the liquid material is evaporated to obtain the gas to be supplied.

[0077] Figure 2 FIG. 2 shows a schematic diagram of a gas supply system according to a second embodiment of the present invention. Figure 2 As shown, the gas supply system according to the second embodiment of the present invention is, for example, a system for controlling the output pressure of ammonia gas from a tank truck. The tank body 100, for example, includes a tank of a tank truck, in which liquid ammonia is placed.

[0078] Specifically, in the production of GaN-LED (Gallium Nitride-Light Emitting Diode) or GaN (Gallium Nitride) power devices by MOCVD (Metal Organic Chemical Vapor Deposition), a large amount of ammonia is usually required. Ammonia is often transported and stored by tank trucks. During the evaporation of ammonia, a heating liquid (usually ethylene glycol at 50°C to 70°C or a mixture of ethylene glycol and water) needs to be introduced for heating, otherwise the temperature of the liquid ammonia will become lower and lower, causing the pressure of the volatilized ammonia to become lower and lower. The commonly used method is to continuously introduce heating liquid into the tank truck to heat the liquid ammonia, and then use a pressure reducer to reduce the pressure of the ammonia. The biggest disadvantage of this method is that heating liquid is continuously introduced into the tank truck to heat the liquid ammonia. If the tank truck uses very little gas or even stops using gas at this time, the pressure in the tank truck will become higher and higher until the equilibrium pressure of the liquid ammonia is reached. If the heating liquid for heating the liquid ammonia reaches 70°C, the pressure of the liquid ammonia will exceed 30 Bar, and the tank truck is in danger of exploding. In addition, since the pressure in the tank truck is unstable, a pressure reducer needs to be added at the back of the tank truck. During the pressure reduction process, the pressure reducer may undergo a phase change due to gas expansion and return to a liquid state, resulting in unstable pressure.

[0079] like Figure 2 As shown, the first end of the second pipeline 500 is connected to the first pipeline 300, and the communication position is located on the first pipeline 300 between the first end of the first pipeline 300 and the pressure reducer 400. The second end of the second pipeline 500 is connected to the first pipeline 300, and the communication position is located on the first pipeline 300 between the pressure reducer 400 and the air supply port 200. The second pipeline 500 is provided with a second valve 803.

[0080] The detection unit 700 is connected to the second valve 803 via an actuator (not shown in the figure). When the pressure value is in the first pressure range, the actuator closes the second valve 803; when the pressure value is in the second pressure range, the actuator opens the second valve 803; when the pressure value is in the third pressure range, the actuator opens the second valve 803.

[0081] Optionally, the liquid inlet pipeline 603 is respectively connected to the heat source 601 and the heating unit 600 , and a liquid inlet valve 604 is also provided on the liquid inlet pipeline 603 .

[0082] The liquid return pipe 606 is connected to the heat source 601 and the heating unit 600 respectively, and a liquid return valve 605 is also provided on the liquid return pipe 606 .

[0083] The circulation pump 602 is arranged on the liquid inlet pipe 603 and / or the liquid return pipe 606. The detection unit 700 is connected to the liquid inlet valve 604, the liquid return valve 605 and the circulation pump 602 respectively via the actuator.

[0084] When the pressure value is in the third pressure interval, the actuator opens the liquid inlet valve 604, the liquid return valve 605 and the circulation pump 602; driven by the circulation pump 602, the heat source 601 transports the heated liquid to the heating unit 600 via the liquid inlet pipe 603, and the cooled liquid is transported back to the heat source 601 via the liquid return pipe 606 for reheating.

[0085] Figure 3 FIG. 2 shows a method flow chart of a gas supply method according to an embodiment of the present invention. Figure 3 As shown, the gas supply method according to an embodiment of the present invention comprises the following steps:

[0086] In step S101, a pressure value of the gas to be supplied in the first pipeline between the first end of the first pipeline and the pressure reducer is obtained;

[0087] In step S102, when the pressure value is in the first pressure range, the gas to be supplied is decompressed by the pressure reducer and then output from the gas supply port;

[0088] In step S103, when the pressure value is in the second pressure interval, the gas to be supplied is output from the gas supply port via the second pipeline;

[0089] In step S104, when the pressure value is in the third pressure interval, the gas to be supplied is output from the gas supply port via the second pipeline, and the heating unit is turned on to heat the interior of the tank.

[0090] The tank body stores gas to be supplied. The first end of the first pipe is connected to the tank body, and the second end of the first pipe is connected to the gas supply port. The pressure reducer is arranged on the first pipe and is located between the first end of the first pipe and the gas supply port. The first end of the second pipe is connected to the tank body, and the second end of the second pipe is connected to the gas supply port. The pressure value in the first pressure interval is greater than the pressure value in the second pressure interval; the pressure value in the second pressure interval is greater than the pressure value in the third pressure interval.

[0091] Optionally, the first pressure interval is a pressure value greater than or equal to 9 Bar; the second pressure interval is a pressure value less than 9 Bar and greater than or equal to 7 Bar; and the third pressure interval is a pressure value less than 7 Bar.

[0092] Optionally, when the pressure value is in the third pressure interval, the heating unit is turned on to heat the interior of the tank body, and after the pressure value is in the second pressure interval, the heating of the interior of the tank body is stopped.

[0093] Optionally, turning on the heating unit to heat the interior of the tank body includes: providing a heating liquid to the heating unit to heat the interior of the tank body, wherein the temperature of the heating liquid is between 50 and 70 degrees Celsius.

[0094] Combine the following Figure 2 and Figure 3 , taking a specific embodiment as an example, the solution of the present application is described. In this specific embodiment, the system / method for controlling the ammonia output pressure of the tank truck mainly relies on the (ammonia) pressure reducer 400, the second valve (pressure reducer bypass valve) 803 and the detection unit 700. Among them, the detection unit 700 includes an ammonia pressure probe with three contacts.

[0095] like Figure 2 As shown, the tank body 100 is a liquid ammonia tank truck, a high-pressure valve 801 is further provided on the first pipeline 300, and a low-pressure valve 804 is further provided on the pipeline connected to the gas supply port 200. The liquid inlet valve 604 is, for example, a heating liquid water inlet valve, and the liquid return valve 605 is, for example, a heating liquid water return valve. The circulation pump 602 is, for example, a heating liquid circulation pump. The heat source 601 is, for example, a boiler for heating liquid.

[0096] The detection unit 700 includes an ammonia pressure gauge having three alarm points (control points). Figure 2 The solid line in the middle is the gas pipeline. Figure 2 The middle dotted line indicates that the ammonia pressure gauge can control the second valve 803, the liquid inlet valve 604, the liquid return valve 605 and the circulating pump 602. The gas outlet of the tank truck is connected to an ammonia pressure gauge, which has three control points: a maximum pressure control point, a high pressure control point and a low pressure control point. Optionally, the range where the pressure value is greater than the maximum pressure control point is the first pressure interval; the range between the maximum pressure control point and the low pressure control point is the second pressure interval; the range where the pressure value is lower than the low pressure control point is the third pressure interval.

[0097] When the pressure of the tank truck is greater than or equal to (or only greater than) the maximum pressure control point, the bypass valve of the pressure reducer is closed. At this time, ammonia is sent out through the pressure reducer, and the pressure output of the pressure reducer is between the low pressure control point and the high pressure control point.

[0098] When the pressure of the tank truck is lower than the maximum pressure control point, the pressure reducer bypass valve is opened, and the gas in the tank truck is directly sent to the outside without passing through the pressure reducer, that is, sent to the outside through the second pipeline 500.

[0099] When the pressure of the tank truck is lower than the low-pressure control point, heating liquid is introduced into the tank truck to increase the pressure. Furthermore, when the pressure of the tank truck is higher than the high-pressure control point, the heating liquid is stopped from being introduced into the tank truck until the pressure inside the tank truck is lower than the low-pressure control point. Specifically, when the pressure of the tank truck is lower than the low-pressure control point, the heating liquid inlet valve, the heating liquid return valve and the heating liquid circulation pump are opened to introduce heating liquid into the tank truck, thereby increasing the pressure of the tank truck; when the pressure of the tank truck is higher than the high-pressure control point, the heating liquid inlet valve, the heating liquid return valve and the heating liquid circulation pump are closed to stop introducing heating liquid into the tank truck until the pressure inside the tank truck is lower than the low-pressure control point. The heating liquid is generally ethylene glycol or a mixture of ethylene glycol and water, and automotive antifreeze can also be used. The temperature of the heating liquid is constant in the range of 50~70℃.

[0100] More specifically, the pressure at the highest pressure control point is 9Bar, the pressure at the high pressure control point is 8Bar, and the pressure at the low pressure control point is 7Bar. That is, when the pressure of the tank truck is greater than or equal to 9Bar, the bypass valve of the pressure reducer is closed, and the ammonia gas is sent out through the pressure reducer, and the pressure output of the pressure reducer is 7~8Bar; when the pressure of the tank truck is less than 9Bar, the bypass valve of the pressure reducer is opened, and the gas in the tank truck is directly sent out without passing through the pressure reducer; when the pressure of the tank truck is lower than 7Bar, heating liquid is introduced into the tank truck to increase the pressure; when the pressure of the tank truck is higher than 8Bar, the heating liquid is stopped until the pressure inside the tank truck is lower than 7Bar.

[0101] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0102] According to the embodiments of the present invention as described above, these embodiments do not describe all the details in detail, nor do they limit the invention to the specific embodiments described. Obviously, many modifications and changes can be made based on the above description. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can make good use of the present invention and the modified use based on the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A gas supply system, include: A tank body, wherein the tank body stores a gas to be supplied; the gas to be supplied is ammonia; A gas supply port, the gas supply port being in communication with the tank body so as to supply the gas to be supplied to the outside; a first pipe, wherein a first end of the first pipe is connected to the tank body, and a second end of the first pipe is connected to the air supply port; a pressure reducer, the pressure reducer being arranged on the first pipeline and being located between the first end of the first pipeline and the air supply port; a second pipeline, wherein a first end of the second pipeline is connected to the tank body, and a second end of the second pipeline is connected to the air supply port; a first end of the second pipeline is connected to the first pipeline, and a connecting position is located on the first pipeline between the first end of the first pipeline and the pressure reducer; a second end of the second pipeline is connected to the first pipeline, and a connecting position is located on the first pipeline between the pressure reducer and the air supply port; A heating unit, the heating unit is located on the tank body to heat the interior of the tank body; as well as a detection unit, the detection unit detecting a pressure value of the gas to be supplied in the first pipeline between the first end of the first pipeline and the pressure reducer, Wherein, a second valve is arranged on the second pipeline; the detection unit is connected to the second valve via an actuator; When the pressure value is within the first pressure range, the actuator closes the second valve, and the gas to be supplied is decompressed by the pressure reducer and then output from the gas supply port; When the pressure value is within a second pressure range, the actuator opens the second valve, and the gas to be supplied is output from the gas supply port via the second pipeline; When the pressure value is in the third pressure interval, the actuator opens the second valve, the gas to be supplied is output from the gas supply port via the second pipeline, and the heating unit is turned on to heat the interior of the tank; The pressure value in the first pressure interval is greater than the pressure value in the second pressure interval; the pressure value in the second pressure interval is greater than the pressure value in the third pressure interval.

2. The gas supply system according to claim 1, in, The gas supply system further comprises: Heat source; A liquid inlet pipeline, the liquid inlet pipeline is respectively connected to the heat source and the heating unit, and the liquid inlet pipeline is also provided with a liquid inlet valve; A liquid return pipe, the liquid return pipe is connected to the heat source and the heating unit respectively, and a liquid return valve is also provided on the liquid return pipe; a circulation pump, wherein the circulation pump is arranged on the liquid inlet pipe and / or the liquid return pipe, Wherein, the detection unit is connected to the liquid inlet valve, the liquid return valve and the circulation pump respectively via an actuator; When the pressure value is in the third pressure interval, the actuator opens the liquid inlet valve, the liquid return valve and the circulation pump; driven by the circulation pump, the heat source transports the heated liquid to the heating unit via the liquid inlet pipe, and the cooled liquid is transported back to the heat source via the liquid return pipe for reheating.

3. The gas supply system according to claim 1, in, Solid material and / or liquid material are placed in the tank; The gas to be supplied is obtained after the solid material is sublimated; and the gas to be supplied is obtained after the liquid material is evaporated.

4. The gas supply system according to claim 1, in, The tank body comprises a tank of a tank truck, and liquid ammonia is placed in the tank of the tank truck.

5. A gas supply method, include: Acquire, by a detection unit, a pressure value of the gas to be supplied in the first pipeline between the first end of the first pipeline and the pressure reducer; When the pressure value is within the first pressure range, the gas to be supplied is decompressed by the pressure reducer and then output from the gas supply port; When the pressure value is within a second pressure interval, the gas to be supplied is output from the gas supply port via a second pipeline; When the pressure value is in the third pressure interval, the gas to be supplied is output from the gas supply port via the second pipeline, and the heating unit is turned on to heat the interior of the tank. Wherein, the tank stores gas to be supplied; the gas to be supplied is ammonia; The first end of the first pipe is connected to the tank body, and the second end of the first pipe is connected to the air supply port; The pressure reducer is arranged on the first pipeline and is located between the first end of the first pipeline and the air supply port; The first end of the second pipeline is connected to the tank body, and the second end of the second pipeline is connected to the air supply port; the first end of the second pipeline is connected to the first pipeline, and the communication position is located on the first pipeline between the first end of the first pipeline and the pressure reducer; the second end of the second pipeline is connected to the first pipeline, and the communication position is located on the first pipeline between the pressure reducer and the air supply port; The second pipeline is provided with a second valve; the detection unit is connected to the second valve via an actuator; When the pressure value is within a first pressure interval, the actuator closes the second valve; When the pressure value is in a second pressure interval, the actuator opens the second valve; When the pressure value is in a third pressure interval, the actuator opens the second valve; The pressure value in the first pressure interval is greater than the pressure value in the second pressure interval; the pressure value in the second pressure interval is greater than the pressure value in the third pressure interval.

6. The gas supply method according to claim 5, in, The first pressure range is a pressure value greater than or equal to 9 Bar; The second pressure range is a pressure value less than 9 Bar and greater than or equal to 7 Bar; The third pressure interval is a pressure value less than 7 Bar.

7. The gas supply method according to claim 5, in, When the pressure value is in the third pressure interval, the heating unit is turned on to heat the interior of the tank body, and after the pressure value is in the second pressure interval, the heating of the interior of the tank body is stopped.

8. The gas supply method according to claim 5, in, The step of turning on the heating unit to heat the interior of the tank comprises: supplying a heating liquid to the heating unit to heat the interior of the tank, Wherein, the temperature of the heated liquid is between 50 and 70 degrees Celsius.