A high-precision in-situ performance detection device for high-power laser systems

Abstract

The present invention discloses a high-precision in-situ performance detection device for a high-power laser system, which relates to the field of high-power laser systems, including a vibration wide-temperature in-situ platform and an integrated multifunctional detection platform. The vibration wide-temperature in-situ platform includes a vibration platform and a wide-temperature platform installed on the vibration platform. The high-power laser system to be tested is fixed in the wide-temperature platform. The integrated multifunctional detection platform includes an adjustment frame and an integrated platform arranged on the adjustment frame. A beam entry device, a beam detector, a power energy detection device, an optical axis position detection device, and a visible laser adjustment device are arranged above the integrated platform. The present invention adopts a high-precision in-situ performance detection device for a high-power laser system with the above structure, and realizes in-situ detection of multiple performance parameters of a high-power laser system through an in-situ installation platform that can adjust vibration and temperature and simulates real environment scenes.

Description

Technical Field

[0001] The present invention relates to the technical field of laser system detection, and in particular to a high-precision in-situ performance detection device for a high-power laser system. Background Art

[0002] High-power lasers have the characteristics of high energy density, large irradiation depth, and strong destructiveness to target materials. They are widely used in industry, medicine, military and other fields. With the continuous development of modern science and technology and the continuous improvement of application needs, the requirements for the performance parameters of high-power laser systems have become more and more stringent. Indicators such as beam quality, spot shape, wavelength accuracy, and power stability not only need to meet the requirements in the laboratory, but also need to meet the application technology requirements under more stringent actual environmental conditions. This poses a challenge to the in-situ detection of high-power laser systems.

[0003] In-situ detection refers to the real-time monitoring and detection of the system in actual application scenarios during actual use to ensure the normal operation of the system and timely detection of problems, so as to truly reflect the performance parameters of the system. It is quite challenging to perform in-situ detection of the entire high-power laser system, because the system generally needs to be disassembled or installed and tested under controlled laboratory conditions, which is difficult to adapt to the requirements of the real environment. In addition, performance testing for the use environment also faces difficulties, especially performance evaluation under high vibration and wide temperature ranges. Therefore, to fully understand the performance status of high-power laser systems, it is necessary to develop more comprehensive and intelligent detection methods and devices to ensure their stable and reliable application in various practical fields. Summary of the invention

[0004] The purpose of the present invention is to provide a high-precision in-situ performance detection device for a high-power laser system, which can realize in-situ detection of multiple performance parameters of the high-power laser system through an in-situ installation platform that simulates real environmental scenes with adjustable vibration and temperature.

[0005] To achieve the above-mentioned purpose, the present invention provides a high-precision in-situ performance detection device for a high-power laser system, comprising a vibration wide-temperature in-situ platform and an integrated multifunctional detection platform, the vibration wide-temperature in-situ platform comprising a vibration platform and a wide-temperature platform installed on the vibration platform, the high-power laser system to be tested is fixed in the wide-temperature platform, the integrated multifunctional detection platform comprises an adjustment frame and an integrated platform arranged on the adjustment frame, and a light beam entry device, a light beam detector, a power energy detection device, an optical axis position detection device, and a visible laser adjustment device are arranged above the integrated platform.

[0006] Preferably, a first light outlet is provided on a side of the wide temperature platform facing the integrated multifunctional detection platform, and an optical lens with high transmittance and low absorption rate is provided on the first light outlet.

[0007] Preferably, the adjustment frame includes a one-dimensional translation stage, a height adjustment stage, a rotation displacement stage, and a pitch adjustment stage which are arranged in sequence from bottom to top, and the integrated platform is fixed on the upper surface of the pitch adjustment stage.

[0008] Preferably, the optical axis of the light beam entering the device coincides with the optical axis of the wide temperature platform, a first light inlet is arranged on the left side of the light beam entering the device, a power detection light outlet, an optical axis detection light outlet, and an adjustment and calibration light outlet are arranged on the front face of the light beam entering the device from left to right, three reflecting and transmitting mirrors are arranged in the light beam entering the device, and the reflecting optical axes of the three reflecting and transmitting mirrors are perpendicular to the power detection light outlet, the optical axis detection light outlet, and the adjustment and calibration light outlet respectively.

[0009] Preferably, a plurality of detachable attenuation plates are provided on the right side of the interior of the light beam entering the device, and a second light outlet is provided on the right side of the light beam entering the device, and the attenuated laser emitted from the second light outlet enters the light beam detector.

[0010] Preferably, the reflected light emitted from the power detection light output port enters the incident power energy detection device.

[0011] Preferably, the reflected light emitted from the optical axis detection light outlet is incident on the optical axis position detection device, the optical axis position detection device is arranged on the mounting base, a beam reduction assembly is arranged on the side of the optical axis position detection device close to the light beam entering the device, two beam splitters are arranged side by side in the optical axis detection device, and the reflected light of the beam splitters is respectively emitted to the position detector and the angle detector, and the position detector and the angle detector are arranged side by side on the side of the optical axis position detection device.

[0012] Preferably, the reflected light emitted from the adjustment and calibration light outlet enters the visible laser adjustment device, and the visible laser adjustment device adopts a low-power visible collimated laser.

[0013] Therefore, the present invention adopts a high-precision in-situ performance detection device for a high-power laser system with the above structure to ensure the performance detection of the high-power laser system in an actual application environment. The detection platform has high precision, the device is simple and reliable, and can quickly detect the performance indicators of the system in an actual environment.

[0014] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of an embodiment of a high-precision in-situ performance detection device for a high-power laser system according to the present invention;

[0016] Figure 2 It is a schematic diagram of the side structure of a vibration wide-temperature in-situ platform according to an embodiment of the present invention;

[0017] Figure 3It is a schematic diagram of the cross-sectional structure of a vibration wide-temperature in-situ platform according to an embodiment of the present invention;

[0018] Figure 4 A top view of an integrated multifunctional detection platform according to an embodiment of the present invention;

[0019] Figure 5 A schematic diagram of the structure of an adjustment frame according to an embodiment of the present invention;

[0020] Figure 6 It is a schematic diagram of the structure of a light beam entering device according to an embodiment of the present invention;

[0021] Figure 7 A top view of the internal structure of the light beam entry device according to an embodiment of the present invention;

[0022] Figure 8 Schematic diagram of the structure of an optical axis position detection device according to an embodiment of the present invention.

[0023] Reference numerals

[0024] 1. Vibration wide temperature in-situ platform; 2. Integrated multifunctional detection platform; 3. Vibration platform; 4. Wide temperature platform; 4-1. First light output port; 5. High-power laser system to be tested; 6. Adjustment frame; 6-1. One-dimensional translation stage; 6-2. Height adjustment stage; 6-3. Rotational displacement stage; 6-4. Pitch adjustment stage; 7. Light beam entry device; 7-1. First light input port; 7-2. Power detection light output port; 7-3. Optical axis detection light output port; 7-4. Adjustment and calibration light output port; 7-5. Reflection and transmission mirror; 7-6. Attenuation plate; 7-7. Second light output port; 8. Power energy detection device; 9. Optical axis position detection device; 9-1. Beam reduction assembly; 9-2. Spectrometer; 9-3. Position detector; 9-4. Angle detector; 9-5. Mounting base; 10. Visible laser adjustment device; 11. Light beam detector; 12. Integrated platform. DETAILED DESCRIPTION

[0025] The technical solution of the present invention is further described below through the accompanying drawings and embodiments.

[0026] Example

[0027] like Figure 1 As shown, a high-precision in-situ performance detection device for a high-power laser system includes a vibration wide-temperature in-situ platform 1 and an integrated multifunctional detection platform 2. Figure 2 and Figure 3As shown, the vibration wide temperature in-situ platform 1 includes a vibration platform 3 and a wide temperature platform 4 installed on the vibration platform 3. The high-power laser system 5 to be tested does not need to be disassembled and can be directly installed in the wide temperature platform 4 through the auxiliary positioning screw holes. The vibration platform 3 and the wide temperature platform 4 constitute an in-situ platform that can simulate complex environments, and can be adjusted according to the requirements of different environments to set different vibration levels and temperature conditions.

[0028] A sufficient installation space is reserved in the wide temperature platform 4 to ensure that a large volume of high-power laser devices can be detected. A first light outlet 4-1 is provided on the side of the wide temperature platform 4 facing the integrated multifunctional detection platform 2, and an optical lens with high transmittance and low absorption is provided on the first light outlet 4-1 to facilitate the transmission of light emitted by the high-power laser system 5 to be tested.

[0029] like Figure 4 As shown, the integrated multifunctional detection platform 2 includes an adjustment frame 6 and an integrated platform 12 arranged on the adjustment frame 6, and a light beam entry device 7, a light beam detector 11, a power energy detection device 8, an optical axis position detection device 9, and a visible laser adjustment device 10 are arranged above the integrated platform 12, and the above devices are adjusted to the same center height.

[0030] like Figure 5 As shown, the adjustment frame 6 includes a one-dimensional translation stage 6-1, a height adjustment stage 6-2, a rotation displacement stage 6-3, and a pitch adjustment stage 6-4, which are arranged in sequence from bottom to top, and the integrated platform 12 is fixed on the upper surface of the pitch adjustment stage 6-4. The one-dimensional translation stage 6-1 provides power for horizontal movement, the height adjustment stage 6-2 provides power for vertical movement, the rotation displacement stage 6-3 can rotate horizontally, and the pitch adjustment stage 6-4 can change the pitch angle of the integrated platform 12. The adjustment frame 6 realizes the three-dimensional motion adjustment of the integrated platform 12, which is convenient for adjusting the optical path of the light beam entering the device 7.

[0031] like Figure 6 As shown, the optical axis of the light beam entering device 7 coincides with the optical axis of the wide temperature platform 4. The left side of the light beam entering device 7 is provided with a first light inlet 7-1, which adopts a large aperture of 200 mm. The front end of the light beam entering device 7 is provided with a power detection light outlet 7-2, an optical axis detection light outlet 7-3, and an adjustment and calibration light outlet 7-4 from left to right. Figure 7 As shown, three reflection and transmission mirrors 7-5 are arranged in the light beam entry device 7, and the reflection optical axes of the three reflection and transmission mirrors 7-5 are perpendicular to the power detection light outlet 7-2, the optical axis detection light outlet 7-3 and the adjustment and calibration light outlet 7-4 in sequence. The reflection and transmission mirrors 7-5 have high reflectivity and low transmittance, so as to prevent high-power laser from damaging the detection equipment at the end of the optical path.

[0032] The reflected light emitted from the power detection light output port 7-2 enters the power energy detection device 8. The power energy detection device 8 adopts a power meter or an energy detector and has a high power detection or energy detection function. A beam expander can be added to ensure that a large light spot enters the device to prevent damage to the device caused by excessive power density.

[0033] The reflected light emitted from the optical axis detection light outlet 7-3 enters the optical axis position detection device 9. The optical axis position detection device 9 is arranged on the mounting base 9-5. A beam reduction component 9-1 is arranged on the side of the optical axis position detection device 9 close to the light beam entry device 7. The beam reduction component 9-1 is used to reduce the light spot to be measured to a light spot size smaller than that of the device. The beam reduction component 9-1 is coaxially matched with the optical axis position detection device 9, and has the function of continuously adjustable beam reduction ratio, and the wave aberration of the transmitted light beam is better than 1 / 30λ, and is detachable.

[0034] like Figure 8 As shown, two beam splitters 9-2 are arranged side by side in the optical axis detection device. The reflected light of the beam splitter 9-2 is directed to the position detector 9-3 and the angle detector 9-4 respectively. The position detector 9-3 and the angle detector 9-4 are arranged side by side on the side of the optical axis position detection device 9, and are used to detect the position and angle of the light beam respectively.

[0035] The reflected light emitted from the adjustment and calibration light outlet 7-4 enters the visible laser adjustment device 10. The visible laser adjustment device 10 adopts a low-power visible collimated laser to emit the collimated laser. The collimated laser and the laser to be measured are reflected back and forth in the light beam entry device 7. The angle and position of the platform are adjusted by adjusting the frame 6, and finally the laser to be measured and the collimated laser are ensured to coincide. The consistency of the optical axis of the laser to be measured and the integrated multifunctional detection platform 2 can be quickly and accurately adjusted, and the defect that the light beam to be measured cannot be adjusted when it is invisible is avoided.

[0036] A plurality of detachable attenuation sheets 7-6 are also provided on the right side of the interior of the light beam entry device 7. A second light outlet 7-7 is provided on the right side of the light beam entry device 7. The attenuated laser emitted from the second light outlet 7-7 enters the light beam detector 11. The attenuation sheets 7-6 can be removed according to the power of the light beam to be measured. The light beam detector 11 uses a detector capable of testing information such as the shape and quality of the light beam to be measured, such as an M2 instrument.

[0037] Therefore, the present invention adopts a high-precision in-situ performance detection device for a high-power laser system with the above structure to ensure the performance detection of the high-power laser system in an actual application environment. The detection platform has high precision, the device is simple and reliable, it can adapt to laser beams of different spot sizes, and the calibration work is fast and accurate, and it can quickly detect the performance indicators of the high-power laser system in an actual environment.

[0038] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that they can still modify or replace the technical solution of the present invention with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of the present invention.

Claims

1. A high-precision in-situ performance detection device for a high-power laser system, characterized in that: It includes a vibration wide-temperature in-situ platform and an integrated multifunctional detection platform. The vibration wide-temperature in-situ platform includes a vibration platform and a wide-temperature platform installed on the vibration platform. The high-power laser system to be tested is fixed in the wide-temperature platform. The integrated multifunctional detection platform includes an adjustment frame and an integrated platform arranged on the adjustment frame. A beam entry device, a beam detector, a power energy detection device, an optical axis position detection device, and a visible laser adjustment device are arranged above the integrated platform. The optical axis of the light beam entering the device coincides with the optical axis of the wide temperature platform, a first light inlet is arranged on the left side of the light beam entering the device, a power detection light outlet, an optical axis detection light outlet, and an adjustment and calibration light outlet are arranged on the front face of the light beam entering the device from left to right, three reflection and transmission mirrors are arranged in the light beam entering the device, and the reflection optical axes of the three reflection and transmission mirrors are perpendicular to the power detection light outlet, the optical axis detection light outlet, and the adjustment and calibration light outlet in sequence; The reflected light emitted from the optical axis detection light outlet is incident on the optical axis position detection device. The optical axis position detection device is arranged on the mounting base. A beam reduction assembly is arranged on the side of the optical axis position detection device close to the light beam entering the device. Two beam splitters are arranged side by side in the optical axis position detection device. The reflected light of the beam splitters is respectively emitted to the position detector and the angle detector. The position detector and the angle detector are arranged side by side on the side of the optical axis position detection device.

2. A high-precision in-situ performance detection device for a high-power laser system according to claim 1, characterized in that: A first light outlet is arranged on one side of the wide temperature platform facing the integrated multifunctional detection platform, and an optical lens with high transmittance and low absorption rate is arranged on the first light outlet.

3. The high-precision in-situ performance detection device for a high-power laser system according to claim 1, characterized in that: The adjustment frame comprises a one-dimensional translation stage, a height adjustment stage, a rotation displacement stage and a pitch adjustment stage which are arranged in sequence from bottom to top, and the integrated platform is fixed on the upper surface of the pitch adjustment stage.

4. The high-precision in-situ performance detection device for a high-power laser system according to claim 1, characterized in that: A plurality of detachable attenuation sheets are also arranged on the right side of the interior of the light beam entering device. A second light outlet is arranged on the right side of the light beam entering device. The attenuated laser emitted from the second light outlet enters the light beam detector.

5. The high-precision in-situ performance detection device for a high-power laser system according to claim 1, characterized in that: The reflected light emitted from the power detection light output port enters the incident power energy detection device.

6. The high-precision in-situ performance detection device for a high-power laser system according to claim 1, characterized in that: The reflected light emitted from the adjustment and calibration light outlet enters the visible laser adjustment device, and the visible laser adjustment device adopts a low-power visible collimation laser.

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