A multi-point measurement optical film thickness gauge

Abstract

The present invention discloses a multi-point measurement type optical film thickness gauge, including a base, a movable plate, a magnetic sheet, a spring, a dust suction mechanism and an intermittent transmission mechanism, wherein a fixed cover is fixedly connected to the base, and a detection head is installed in the fixed cover, a support seat is fixedly arranged on the upper surface of the base, and one end of the support seat extends below the fixed cover, and a movable cover spliced ​​with the fixed cover is arranged above the other end of the support seat, a groove is arranged on the lower surface of the support seat, and sliding grooves are arranged on both sides of the groove, and two ends of the sliding blocks are respectively slidably connected to the two sliding grooves, the sliding block is coaxially penetrated by the limiting shaft, and the inner end of the limiting shaft is coaxially fixed with a driving block, and the threaded upper protrusion of the lower end of the driving block is penetrated by a screw rod, and one end of the screw rod is connected to the groove with a bearing. The invention can not only ensure the effect of dust suction, but also can uniformly detect optical films at multiple points, thereby improving the accuracy of measurement.

Description

Technical Field

[0001] The invention relates to the technical field of film thickness measurement, in particular to a multi-point measurement type optical film thickness gauge. Background Art

[0002] Optical film is a kind of optical medium material composed of thin layered media, which transmits light beams through interfaces. It is widely used in modern optics and optoelectronics. The reflective film, anti-reflective film, polarizing film, interference filter and spectroscope produced by it are all optical thin film devices for manufacturing various optical instruments.

[0003] In the production and manufacturing of optical films, it is necessary to measure the thickness of the optical film. By measuring the thickness of the optical film, its performance can be measured;

[0004] There are still some problems in the use of existing optical film thickness gauges, specifically:

[0005] 1. The existing optical film thickness gauge cannot perform multi-point uniform measurement when in use. The main reason is that the existing optical film thickness gauge needs to fix the optical film when in use, and then push the support member carrying the optical film to move to the bottom of the detection head for detection. Generally, it is only measured once. Measuring once will cause the measurement data to be inaccurate. In the prior art, the measurement position can only be adjusted by changing the moving distance of the support member, which makes it possible to measure only the position in a certain straight line direction on the optical film. Although this method is also a multi-point measurement, it cannot uniformly measure the optical film on the support member, which will cause errors in the measurement data;

[0006] 2. When using the existing optical film thickness gauge, the surface of the optical film is generally dusted first, but the dust removal effect is not good. The main reason is that the existing dust removal method is to blow the fan to the surface of the optical film, so that the dust on the upper surface is blown to the outside. However, after the optical film moves out of the blowing range of the fan, the dust blown to the outside falls, which will still cause dust to accumulate on the optical film. In addition, the dust removal method of the fan is also likely to cause dust to fly in the environment, which is more unfavorable for dust removal on the surface of the optical film.

[0007] Therefore, a multi-point measurement optical film thickness gauge is needed to solve the above problems. Summary of the invention

[0008] The object of the present invention is to provide a multi-point measurement optical film thickness gauge to solve the problems mentioned in the above background technology that the existing optical film thickness gauge is not convenient for multi-point uniform measurement and cannot improve the effect of removing dust from the surface of the optical film.

[0009] To achieve the above object, the present invention provides the following technical solutions:

[0010] A multi-point measurement optical film thickness gauge comprises a base, a movable disk, a magnetic sheet, a spring, a dust suction mechanism and an intermittent transmission mechanism, wherein a fixed cover is fixedly connected to the base, and a detection head is installed in the fixed cover, a support seat is fixedly arranged on the upper surface of the base, and one end of the support seat extends to the bottom of the fixed cover, and a movable cover spliced ​​with the fixed cover is arranged above the other end of the support seat, a groove is arranged on the lower surface of the support seat, and sliding grooves are arranged on both sides of the groove, and two ends of the sliding grooves are respectively slidably connected to the two sliding grooves, the sliding block is coaxially penetrated by a limiting shaft, and a driving block is coaxially fixed to the inner end of the limiting shaft, a screw rod is threaded on the protrusion at the lower end of the driving block, and one end of the screw rod is connected to the groove with a bearing, and the other end of the screw rod is connected to the front end of the support seat with a servo motor with a bearing, and the servo motor is fixedly installed on the upper surface of the base, a driving part of the dust suction mechanism is arranged on the upper surface of the base, and the dust suction part of the dust suction mechanism is located on the supporting platform, and suction cups are evenly distributed on the upper surface of the supporting platform.

[0011] Furthermore, the shaft end bearing on the lower surface of the support platform passes through the interior of the movable disk, and the movable disk is connected to the upper end of the support frame through an intermittent transmission mechanism, and the lower end of the support frame is fixedly connected to the lower surface of the sliding block, and a driving part of the intermittent transmission mechanism is arranged in the groove on the lower surface of the base, and the driving part of the intermittent transmission mechanism is triggered by the movement of the driving block.

[0012] By adopting the above technical solution, the intermittent transmission mechanism can be triggered by the driving block to realize intermittent movement of the optical film, so that the detection head can stably detect multiple points of the optical film.

[0013] Furthermore, the dust suction mechanism includes a triangular plate, a dust suction hole, a bottle cavity, a dust collection bottle, a dust collection tube, a dust collection box, a piston assembly, a spring and a dust guide tube. The driving part of the dust suction mechanism is a triangular plate, and the triangular plate is fixedly connected to the upper surface of the support seat. The dust suction holes are evenly arranged on the ring side of the support table, and the support table is a hollow structure, which is convenient for the dust suction holes to pass through the inside and outside of the support table. The bottle cavity is arranged at a corner of the movable plate, and the lower end of the bottle cavity is an inverted frustum structure, and the bottle cavity passes through the upper and lower surfaces of the movable plate, and the interior of the bottle cavity is provided with a A dust collecting bottle, and the lower end of the dust collecting bottle is through-connected to one end of the dust guiding tube, the other end of the dust guiding tube is through-connected to one side of the dust collecting box, and the dust collecting box is fixedly connected to the lower surface of the movable plate, the other side of the movable plate is through-connected to one end of the dust collecting tube, and the other end of the dust collecting tube is through-connected to the lower end of the support platform, a piston sealing part of a piston assembly 1 is arranged inside the dust collecting box, and an extension part of the piston assembly 1 movably passes through the dust collecting box, a spring 1 is arranged between the piston sealing part and the inner side of the dust collecting box, and the spring 1 is movably nested in the outer side of the extension part.

[0014] By adopting the above technical scheme, when the servo motor is started and the screw rotates, the driving block will move along the direction of the screw, and drive the supporting plate to move synchronously through the limit shaft, the sliding block and the supporting frame, and at the same time drive the moving plate to move synchronously. During the movement of the moving plate, the J-shaped extension of the piston assembly 1 will move on the outer edge of the triangular plate, and then the matching spring 1 will make the piston assembly 1 move in the dust collecting box. When the piston assembly 1 moves in the dust collecting box, suction will be generated at the dust suction hole, and then the dust on the surface of the optical film will be adsorbed into the interior of the support platform and sucked into the dust collecting box through the dust collecting pipe. After that, the air containing dust will enter the dust collecting bottle through the dust guiding pipe. Since the dust collecting bottle is filled with liquid water, the air containing dust will filter out the dust through the liquid water, so that the dust will gather in the liquid water, avoiding the air from carrying dust to the outside again, so that when the fixed cover and the movable cover are on, no dust will fall on the optical film.

[0015] Furthermore, the upper end of the dust collecting bottle is evenly provided with through holes penetrating the inner and outer sides thereof, and the bottle cap of the dust collecting bottle is arranged at the lower end thereof, and the dust collecting bottle is threadedly connected with the bottle cap, and the bottle cap of the dust collecting bottle is connected with the dust guiding pipe.

[0016] By adopting the above technical solution, the air that has filtered out the dust can be discharged from the through hole to avoid increasing the air pressure in the dust collecting bottle. In addition, through the bottle cap, after the dust collecting bottle collects a certain amount of dust, the liquid water containing more dust can be poured out and replaced with new liquid water to avoid affecting the dust filtering effect.

[0017] Furthermore, both the dust guide pipe and the dust collecting pipe are provided with a one-way valve, so that the dust guide pipe can only transport the gas in the dust collecting box to the dust collecting bottle in one direction, and can only transport the external gas to the dust collecting box through the dust collecting pipe.

[0018] By adopting the above technical solution, the dust-containing air can be conveyed in the direction from the dust collecting pipe to the dust guiding pipe only, and the dust-containing air cannot flow in the reverse direction.

[0019] Furthermore, the intermittent transmission mechanism includes an embedded groove, a driving air pipe, a winding rod, a support plate, an inclined block, a toothed bar, a transmission gear, a piston assembly 2, a piston assembly 3, a through pipe and an air pressure chamber. The driving part of the intermittent transmission mechanism is the piston assembly 2, and there are two air pressure chambers, and the two air pressure chambers are both arranged inside the support seat. The two air pressure chambers are symmetrically arranged about the dust collecting bottle axis, and the two air pressure chambers are both penetrated into the groove on the lower surface of the support seat through the through pipe. The piston sealing part of the piston assembly 2 is arranged in each of the through pipes, and the extension part of the piston assembly 2 penetrates into the groove on the lower surface of the support seat, and the symmetry axes of the two piston assemblies 2 The cam is collinear with the axis of the driving block, one end of the driving air pipe is connected to the air pressure chamber, and the other end of the driving air pipe is connected to one side of the supporting disk, the interior of the supporting disk is provided with a piston sealing portion of the piston assembly three, and the extension portion of the piston assembly three movably passes through the supporting disk and is connected to the movable disk, the embedded groove is provided on both sides of the left and right sides of the supporting seat, and a winding rod is provided in each embedded groove, the driving air pipe is wound around the corresponding winding rod, the inclined block is provided on the upper surface of the supporting seat, the transmission gear key is connected to the shaft end of the lower surface of the supporting platform, and the transmission gear is meshed with the toothed bar, and the toothed bar movably passes through the two sides of the movable disk.

[0020] By adopting the above technical scheme, the distance that the sliding block moves is limited by the length of the sliding groove, so that the magnetic sheet on the sliding block is adsorbed by the magnetic sheet on the sliding groove, and the sliding block and the supporting plate connected to it can no longer move. At this time, the rotation of the screw rod will continue to carry the driving block to move, and the driving block carries the limiting shaft to move relative to the sliding block, and the spring 2 is gradually stretched. In the process of continued movement of the driving block, the piston assembly 2 will be intermittently squeezed, so that the piston assembly 2 will intermittently move into the through pipe, and then the gas in the air pressure chamber will be intermittently transported to the supporting plate through the driving air pipe, so that the piston assembly 3 drives the moving plate to move intermittently. In the process of intermittent advancement of the moving plate, the toothed bar will be gradually squeezed by the inclined block, so that the toothed bar moves relative to the moving plate, so that the toothed bar drives the transmission gear to rotate, thereby driving the supporting table to rotate, so that the detection head can perform uniform multi-point detection, thereby improving the measurement accuracy.

[0021] Furthermore, the driving block is in a pagoda shape, and the distance between two sides of the tip of the driving block is smaller than the minimum distance between the two piston assemblies.

[0022] The adoption of the above technical solution can facilitate the drive block to intermittently squeeze the piston assembly 2 during the movement.

[0023] Furthermore, the second spring is arranged between the sliding block and the driving block, and the second spring is movably sleeved on the outside of the limiting shaft. The magnetic sheet is arranged at the inner end of the sliding groove and the inward side of the sliding block, and the relative surfaces of the corresponding magnetic sheets are respectively N level and S level.

[0024] The adoption of the above technical solution can ensure that the sliding block is relatively stably connected to the inner end of the sliding groove, so that when the driving block moves in the direction of the sliding block, the spring 2 can be squeezed before the driving block and the sliding block can move synchronously, ensuring that all components can be restored to their original state for subsequent measurement.

[0025] Furthermore, the limiting shaft is a T-shaped structure, and the maximum diameter of its end portion is larger than the diameter of the hole reserved on the sliding block through which it passes.

[0026] By adopting the above technical solution, the moving distance of the driving block can be easily limited by the T-shaped limiting shaft, thereby ensuring that the relative moving distance of the driving block and the sliding block is subject to a certain limit.

[0027] Furthermore, two inclined blocks are provided, and the two inclined blocks are arranged parallel to each other, and the distance between the two inclined blocks is consistent with the length of the tooth bar.

[0028] The adoption of the above technical solution can facilitate the inclined block to stably extrude the tooth bar and facilitate the subsequent restoration of the tooth bar to its initial state.

[0029] Compared with the prior art, the invention has the following beneficial effects: the multi-point measurement optical film thickness gauge can not only ensure the dust collection effect, but also can uniformly detect the optical film at multiple points, thereby improving the measurement accuracy:

[0030] 1. After the fixed cover and the movable cover are connected, the device for measuring the thickness of the optical film is in a relatively closed environment. At this time, when the optical film moves toward the detection head, the suction hole can be driven by the triangle plate to generate suction, thereby sucking the optical film and the dusty air around it into the dust collecting bottle, and the dust is absorbed by liquid water, thereby preventing the dust from flying and falling onto the optical film again, thus ensuring the dust collection effect;

[0031] 2. When the optical film moves toward the detection head, the optical film will rotate and move intermittently along with the support platform, so that the detection head can evenly detect the optical film at multiple points, thereby ensuring the accuracy of the measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic diagram of the main structure of the present invention;

[0033] Figure 2 For the present invention Figure 1 A schematic diagram of the enlarged structure of point A;

[0034] Figure 3 This is a schematic diagram of the connection structure between the base and the support base of the present invention;

[0035] Figure 4 For the present invention Figure 3 Schematic diagram showing the separation of local structures;

[0036] Figure 5 It is a schematic diagram of a partial cross-section explosion structure of the present invention;

[0037] Figure 6 For the present invention Figure 5 Another perspective structural diagram;

[0038] Figure 7 For the present invention Figure 3 A schematic diagram of a partial cross-sectional structure;

[0039] Figure 8 For the present invention Figure 7 The schematic diagram of the enlarged structure of point C in the middle;

[0040] Fig. 9 For the present invention Figure 7 The enlarged structural diagram of point D in the middle;

[0041] Fig.10 It is a schematic diagram of the structure of the present invention in a partial cross-section and viewed from above.

[0042] In the figure: 1. base; 2. fixed cover; 3. movable cover; 4. support seat; 5. sliding groove; 6. embedded groove; 7. driving air pipe; 8. support frame; 9. moving plate; 10. winding rod; 11. servo motor; 12. lead screw; 13. support plate; 14. inclined block; 15. triangle plate; 16. support table; 17. suction cup; 18. dust suction hole; 19. bottle cavity; 20. toothed bar; 21. dust collecting bottle; 22. dust collecting pipe; 23. dust collecting box; 24. piston assembly one; 25. spring one; 26. transmission gear; 27. detection head; 28. limit shaft; 29. ​​sliding block; 30. driving block; 31. piston assembly two; 32. piston assembly three; 33. through pipe; 34. air pressure cavity; 35. magnetic sheet; 36. spring two; 37. dust guiding pipe. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0044] See also Figure 1-10 , the present invention provides a technical solution:

[0045] Embodiment 1:

[0046] In order to solve the problem of poor dust removal effect of previous optical film thickness gauges, the following technical solutions are now provided. Specifically,

[0047] A multi-point measurement optical film thickness gauge, including a base 1, a movable disk 9, a magnetic sheet 35, a spring 36, a dust suction mechanism and an intermittent transmission mechanism, wherein a fixed cover 2 is fixedly connected to the base 1, and a detection head 27 is installed in the fixed cover 2, a support seat 4 is fixedly arranged on the upper surface of the base 1, and one end of the support seat 4 extends below the fixed cover 2, and a movable cover 3 spliced ​​with the fixed cover 2 is arranged above the other end of the support seat 4, a groove is arranged on the lower surface of the support seat 4, and sliding grooves 5 are arranged on both sides of the groove, and two sliding grooves 5 are respectively slidably connected to the two ends of a sliding block 29, the sliding block 29 is coaxially penetrated by a limiting shaft 28, and a driving block 30 is coaxially fixed to the inner end of the limiting shaft 28, and the driving block 30 The raised thread at the lower end penetrates a screw rod 12, and a bearing at one end of the screw rod 12 is connected to the groove, and a bearing at the other end of the screw rod 12 penetrates to the front end of the support seat 4 and is connected to the servo motor 11, and the servo motor 11 is fixedly installed on the upper surface of the base 1, and a driving part of a dust suction mechanism is arranged on the upper surface of the base 1, and the dust suction part of the dust suction mechanism is located on the support platform 16, and suction cups 17 are evenly distributed on the upper surface of the support platform 16, and the dust suction mechanism includes a triangular plate 15, a dust suction hole 18, a bottle cavity 19, a dust collecting bottle 21, a dust collecting tube 22, a dust collecting box 23, a piston assembly 24, a spring 25 and a dust guide tube 37, and the driving part of the dust suction mechanism is a triangular plate 15, and the triangular plate 15 is fixedly connected to the upper surface of the support seat 4. The dust suction holes 18 are evenly arranged on the ring side of the support platform 16, and the support platform 16 is a hollow structure, so that the dust suction holes 18 pass through the inside and outside of the support platform 16. The bottle cavity 19 is arranged at a corner of the movable plate 9, and the lower end of the bottle cavity 19 is an inverted truncated cone structure, and the bottle cavity 19 passes through the upper and lower surfaces of the movable plate 9. A dust collecting bottle 21 matching its shape is arranged inside the bottle cavity 19, and the lower end of the dust collecting bottle 21 is connected to one end of the dust guide pipe 37, and the other end of the dust guide pipe 37 is connected to one side of the dust collecting box 23, and the dust collecting box 23 is fixedly connected to the lower surface of the movable plate 9, and the other side of the movable plate 9 is connected to one end of the dust collecting pipe 22, and the other end of the dust collecting pipe 22 is connected to the lower end of the support platform 16. A piston sealing part of a piston assembly 24 is arranged inside 23, and an extension part of the piston assembly 24 movably penetrates the dust collecting box 23, a spring 25 is arranged between the piston sealing part and the inner side of the dust collecting box 23, and the spring 25 is movably nested in the outer side of the extension part, the upper end of the dust collecting bottle 21 is evenly provided with through holes penetrating the inner and outer sides thereof, and the bottle cap of the dust collecting bottle 21 is arranged at its lower end, and the dust collecting bottle 21 is threadedly connected with its bottle cap, the bottle cap of the dust collecting bottle 21 is connected with the dust guiding pipe 37, and the dust guiding pipe 37 and the dust collecting pipe 22 are both provided with a one-way valve, so that the dust guiding pipe 37 can only transport the gas in the dust collecting box 23 to the dust collecting bottle 21 in one direction, and can only transport the external gas to the dust collecting box 23 through the dust collecting pipe 22.

[0048] During use, as the movable disk 9 moves forward, the J-shaped extension of the piston assembly 24 slides on the edge of the triangular plate 15, causing the piston sealing portion of the piston assembly 24 to slide in the dust box 23, so that the dust suction hole 18 generates suction through the dust collecting pipe 22, thereby sucking in the dust on the surface of the optical film. The dust sucked into the dust box 23 will be transported to the dust collecting bottle 21 through the dust guiding pipe 37 during the process in which the piston sealing portion of the piston assembly 24 slides reversely in the dust collecting box 23, and will be adsorbed by the liquid water in the dust collecting bottle 21, and the gas will be discharged through the through hole at the upper end of the dust collecting bottle 21.

[0049] Embodiment 2:

[0050] To solve the problem that the previous optical film thickness gauge cannot measure multiple points uniformly, specifically,

[0051] The shaft end bearing on the lower surface of the support table 16 penetrates into the interior of the movable plate 9, and the movable plate 9 is connected to the upper end of the support frame 8 through an intermittent transmission mechanism, and the lower end of the support frame 8 is fixedly connected to the lower surface of the sliding block 29. The driving part of the intermittent transmission mechanism is arranged in the groove on the lower surface of the base 1, and the driving part of the intermittent transmission mechanism is triggered by the movement of the driving block 30. The intermittent transmission mechanism includes an embedded groove 6, a driving air pipe 7, a winding rod 10, a support plate 13, an inclined block 14, a toothed bar 20, a transmission gear 26, a piston assembly 2 31, a piston assembly 3 32, a through pipe 33 and an air pressure chamber 34, and the driving part of the intermittent transmission mechanism The piston assembly 2 31 has two air pressure chambers 34, and the two air pressure chambers 34 are both arranged inside the support seat 4. The two air pressure chambers 34 are arranged symmetrically about the dust collecting bottle 21 axis, and the two air pressure chambers 34 are penetrated into the groove on the lower surface of the support seat 4 through the through pipe 33. A piston sealing part of the piston assembly 2 31 is arranged in each through pipe 33, and the extension part of the piston assembly 2 31 penetrates into the groove on the lower surface of the support seat 4, and the symmetry axis of the two piston assemblies 2 31 is collinear with the axis of the driving block 30, and one end of the driving air pipe 7 is penetrated and connected to the air pressure chamber 34, and the other end of the driving air pipe 7 is penetrated and connected to the support On one side of the disk 13, a piston sealing portion of a piston assembly 32 is arranged inside the support disk 13, and an extension portion of the piston assembly 32 movably penetrates the support disk 13 and is connected to the movable disk 9. The embedded groove 6 is arranged on both sides of the left and right sides of the support seat 4, and a winding rod 10 is arranged in each embedded groove 6. The driving air pipe 7 is wound around the corresponding winding rod 10. The inclined block 14 is arranged on the upper surface of the support seat 4, and the transmission gear 26 is keyed to the shaft end of the lower surface of the support platform 16, and the transmission gear 26 is meshed with the toothed bar 20. The toothed bar 20 movably penetrates the two sides of the movable disk 9. The driving block 30 is pagoda-shaped, and the driving block 30 is the most The distance on both sides of the tip is less than the minimum distance between the two piston assemblies 231. The spring 236 is arranged between the sliding block 29 and the driving block 30, and the spring 236 is movably sleeved on the outside of the limiting shaft 28. The magnetic sheet 35 is arranged at the inner end of the sliding groove 5 and the inner side of the sliding block 29, and the corresponding relative surfaces of the magnetic sheets 35 are respectively N grade and S grade. The limiting shaft 28 is a T-shaped structure, and the maximum diameter of its end is larger than the diameter of the reserved hole on the sliding block 29. There are two inclined blocks 14, and the two inclined blocks 14 are arranged parallel to each other, and the distance between the two inclined blocks 14 is consistent with the length of the tooth bar 20.

[0052] When in use, the servo motor 11 is started and operated to drive the screw 12 to rotate, so that the driving block 30 moves along the axial direction of the screw 12, and the sliding block 29 is driven to move through the limit shaft 28 and the spring 2 36, and then the support plate 13 and the movable plate 9 are driven to move synchronously through the support frame 8;

[0053] When the sliding block 29 slides to the limit, that is, the magnetic piece 35 on the sliding block 29 is attracted to the magnetic piece 35 in the sliding groove 5, at this time, the sliding block 29 can no longer move, and the screw rod 12 continues to rotate, thereby continuing to drive the driving block 30 to move forward. At this time, the driving block 30 will intermittently squeeze the piston assembly 2 31, so that the piston assembly 2 31 gradually moves into the through pipe 33, so that the gas in the air pressure chamber 34 intermittently enters the support disk 13 through the driving air pipe 7, so that the piston assembly 3 32 connected to the support disk 13 drives the moving disk 9 to move intermittently, thereby reserving sufficient time for the detection head 27 to detect the thickness of the optical film. During the intermittent movement of the moving disk 9, the gear 20 is gradually squeezed by the inclined block 14, so that the support table 16 can rotate intermittently, which can facilitate the detection head 27 to evenly detect the thickness of the optical film at multiple points.

[0054] The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0055] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A multi-point measurement optical film thickness gauge, comprising a base (1), a movable plate (9), a magnetic sheet (35), a second spring (36), a dust suction mechanism and an intermittent transmission mechanism, characterized in that: The base (1) is fixedly connected to a fixed cover (2), and a detection head (27) is installed in the fixed cover (2); a support seat (4) is fixedly arranged on the upper surface of the base (1), and one end of the support seat (4) extends below the fixed cover (2), and a movable cover (3) spliced ​​with the fixed cover (2) is arranged above the other end of the support seat (4); a groove is arranged on the lower surface of the support seat (4), and sliding grooves (5) are arranged on both sides of the groove, and two ends of the sliding blocks (29) are respectively slidably connected to the two sliding grooves (5); the sliding block (29) is coaxially penetrated by the limiting shaft (28), and the inner end of the limiting shaft (28) is coaxially fixed with a driving block (30), and the protruding upper screw at the lower end of the driving block (30) is screwed A screw rod (12) is passed through the groove, and a bearing at one end of the screw rod (12) is connected to the groove, and a bearing at the other end of the screw rod (12) passes through the front end of the support seat (4) and is connected to the servo motor (11), and the servo motor (11) is fixedly mounted on the upper surface of the base (1), the upper surface of the base (1) is provided with a driving part of a dust suction mechanism, and the dust suction part of the dust suction mechanism is located on the support platform (16), and suction cups (17) are evenly distributed on the upper surface of the support platform (16), the dust suction mechanism comprises a triangular plate (15), a dust suction hole (18), a bottle cavity (19), a dust collection bottle (21), a dust collection pipe (22), a dust collection box (23), a piston assembly (24), a spring (25) and a dust guide pipe (37), and the dust suction mechanism The driving part is a triangular plate (15), and the triangular plate (15) is fixedly connected to the upper surface of the support seat (4); the dust suction holes (18) are evenly arranged on the ring side of the support platform (16), and the support platform (16) is a hollow structure, so that the dust suction holes (18) pass through the inside and outside of the support platform (16); the bottle cavity (19) is arranged at a corner of the movable plate (9), and the lower end of the bottle cavity (19) is an inverted truncated cone structure, and the bottle cavity (19) passes through the upper and lower surfaces of the movable plate (9); a dust collecting bottle (21) matching the shape of the bottle cavity (19) is arranged inside the bottle cavity (19), and the lower end of the dust collecting bottle (21) is connected to one end of the dust guide pipe (37), and the other end of the dust guide pipe (37) is connected to one side of the dust collecting box (23), and the dust collecting bottle (21) is connected to the inner side of the dust collecting box (23). The dust box (23) is fixedly connected to the lower surface of the movable plate (9); one end of the dust collecting tube (22) is connected through the other side of the movable plate (9); and the other end of the dust collecting tube (22) is connected through the lower end of the support platform (16); a piston sealing portion of a piston assembly (24) is arranged inside the dust box (23); and an extension portion of the piston assembly (24) movably penetrates the dust box (23); a spring (25) is arranged between the piston sealing portion and the inner side of the dust box (23); and the spring (25) is movably nested on the outer side of the extension portion; the shaft end bearing on the lower surface of the support platform (16) penetrates into the interior of the movable plate (9); and the movable plate (9) is connected to the upper end of the support frame (8) through an intermittent transmission mechanism.The lower end of the support frame (8) is fixedly connected to the lower surface of the sliding block (29), a driving part of the intermittent transmission mechanism is arranged in a groove on the lower surface of the base (1), and the driving part of the intermittent transmission mechanism is triggered by the movement of the driving block (30), the intermittent transmission mechanism comprises an embedded groove (6), a driving air pipe (7), a winding rod (10), a supporting plate (13), an inclined block (14), a toothed bar (20), a transmission gear (26), a piston assembly 2 (31), a piston assembly 3 (32), a through pipe (33) and an air pressure chamber (34), the driving part of the intermittent transmission mechanism is the piston assembly 2 (3 1), two air pressure chambers (34) are provided, and the two air pressure chambers (34) are both provided inside the support seat (4), the two air pressure chambers (34) are symmetrically arranged about the dust collecting bottle (21) axis, and the two air pressure chambers (34) are both penetrated into the groove on the lower surface of the support seat (4) through the through pipe (33), each of the through pipes (33) is provided with a piston sealing portion of the second piston assembly (31), and the extension portion of the second piston assembly (31) penetrates into the groove on the lower surface of the support seat (4), and the symmetry axes of the two second piston assemblies (31) are collinear with the axis of the driving block (30), the One end of the driving air pipe (7) is connected to the air pressure chamber (34), and the other end of the driving air pipe (7) is connected to one side of the support plate (13). The piston sealing part of the piston assembly (32) is arranged inside the support plate (13), and the extension part of the piston assembly (32) movably passes through the connection between the support plate (13) and the movable plate (9). The embedded groove (6) is arranged on both the left and right sides of the support seat (4), and a winding rod (10) is arranged in each embedded groove (6). The driving air pipe (7) is wound around the corresponding winding rod (10). The inclined block (14) is arranged at The upper surface of the support seat (4), the transmission gear (26) is key-connected to the shaft end of the lower surface of the support platform (16), and the transmission gear (26) is meshed with the toothed bar (20), and the toothed bar (20) is movably arranged to penetrate the two sides of the movable plate (9), the second spring (36) is arranged between the sliding block (29) and the driving block (30), and the second spring (36) is movably sleeved on the outer side of the limit shaft (28), and the magnetic sheet (35) is arranged at the inner end of the sliding groove (5) and the inner side of the sliding block (29), and the opposite surfaces of the magnetic sheets (35) corresponding to each other are N level and S level respectively.

2. The multi-point measurement optical film thickness gauge according to claim 1, characterized in that: The upper end of the dust collecting bottle (21) is evenly provided with through holes penetrating both the inner and outer sides thereof, and a bottle cap of the dust collecting bottle (21) is provided at the lower end thereof, and the dust collecting bottle (21) is threadedly connected to the bottle cap, and the bottle cap of the dust collecting bottle (21) is connected to the dust guide pipe (37).

3. The multi-point measurement optical film thickness gauge according to claim 2, characterized in that: Both the dust guide pipe (37) and the dust collection pipe (22) are provided with a one-way valve, so that the dust guide pipe (37) can only transport the gas in the dust collection box (23) to the dust collection bottle (21) in one direction, and can only transport external gas to the dust collection box (23) through the dust collection pipe (22).

4. The multi-point measurement optical film thickness gauge according to claim 3, characterized in that: The driving block (30) is in the shape of a pagoda, and the distance between two sides of the tip of the driving block (30) is smaller than the minimum distance between the two piston assemblies (31).

5. The multi-point measurement optical film thickness gauge according to claim 4, characterized in that: The limiting shaft (28) is a T-shaped structure, and the maximum diameter of its end portion is greater than the diameter of the reserved hole on the sliding block (29) through which it passes.

6. The multi-point measurement optical film thickness gauge according to claim 5, characterized in that: Two inclined blocks (14) are provided, and the two inclined blocks (14) are arranged parallel to each other, and the distance between the two inclined blocks (14) matches the length of the tooth bar (20).

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