A mask substrate surface micro-nano defect detection device and detection method

Abstract

The present invention relates to the field of photolithography mask plate detection, and discloses a mask substrate surface micro-nano defect detection device and a detection method thereof, including a conveying unit, a feeding clamping unit, a detection unit and a material unloading unit. The present invention, by providing a conveying unit, drives the adjusting roller to rotate through a driving motor, changes the position of the transposition slide groove on the adjusting roller, drives the vertical plate, the positioning slider and the carrying plate to move left and right synchronously, wherein the carrying plate can move at the feeding clamping unit, the detection unit and the unloading unit, thereby achieving automatic feeding clamping, detection and unloading operations, making the operation simpler, and will not cause greater damage to the mask substrate, the operation is safer, and is suitable for wide promotion and use.

Description

Technical Field

[0001] The invention belongs to the field of photolithography mask plate detection, and in particular, relates to a mask substrate surface micro-nano defect detection device and a detection method thereof. Background Art

[0002] If there are defects on the surface of the mask substrate during the processing, defects will occur during the mask exposure process, and they will need to be discovered in the later detection process, resulting in product rework or even scrapping, extending the product production cycle and reducing the yield rate. Therefore, it is necessary to detect and control the surface defects of the mask substrate. Since the mask plate is an important carrier for manufacturing chips, the size of the mask plate is relatively small, and the existing mask substrate detection equipment is more troublesome to install and disassemble the mask plate, so the mask plate may be scratched during operation, causing damage to the mask plate, and causing waste, which increases the unqualified rate of products.

[0003] In view of this, the present invention is proposed. Summary of the invention

[0004] In order to solve the above technical problems, the basic concept of the technical solution adopted by the present invention is:

[0005] A device for detecting micro-nano defects on the surface of a mask substrate comprises a conveying unit, a feeding clamping unit, a detection unit and a feeding unit.

[0006] The conveying unit includes an operating table, an adjusting roller is rotatably installed inside the operating table, a driving motor is installed on the rotating center of the adjusting roller, a transposition chute is provided on the adjusting roller, the transposition chute is an annular groove, a shifting slider is slidably provided on the transposition chute, a vertical plate is installed on the shifting slider, a positioning slider is installed on the vertical plate, a bearing plate is installed on the positioning slider, a detection groove is provided on the bearing plate, and a sealing plate is rotatably installed at the bottom of the detection groove;

[0007] The feed clamping unit comprises a feed barrel, a feed cavity is provided inside the feed barrel, a plurality of pairs of mask substrates are filled inside the feed cavity, a shield plate is movably inserted at the bottom of the feed barrel, guide plates are installed on both sides of the operating table, the guide plate is composed of a top platform, a slope and an unlocking platform, the unlocking platform is placed on both sides of the top platform, and the top platform is placed at the center of the guide plate, the two sides of the slope are connected to the top platform and the unlocking platform, a push rod is inserted on the bearing plate, a clamping plate is installed at one end of the push rod, and the clamping plate is located in the detection slot, and the other end of the push rod is slidably connected to the guide plate;

[0008] The detection unit includes a detector, and the detector is placed above the operating table;

[0009] The unloading unit includes a swing arm, which is connected to the rotation center of the sealing plate, a clamping sleeve is fixedly installed on the bottom of the supporting plate, a push rod is slidably arranged inside the clamping sleeve, the end of the push rod is slidably connected to the side wall of the swing arm, and a compression spring is clamped between the push rod and the clamping sleeve, a positioning seat is installed on the operating table, and a fixing rod is installed on the positioning seat, the fixing rod corresponds to the swing arm, an inclined plate is installed at the end of the operating table, and a collection box is connected to the end of the inclined plate.

[0010] As a preferred embodiment of the present invention, enclosures are installed on both sides of the operating table, a mounting bracket is welded on the operating table, the mounting bracket is interconnected with the driving motor housing, the driving motor output shaft is connected with a reducer, and the reducer is installed on the operating table, the output end on the other side of the reducer is interconnected with the rotation center of the adjusting roller, a sliding rod is installed at the bottom of the shift slider, the sliding rod is slidably set in the shifting groove, a guide rod is movably arranged on the vertical plate, a fixed seat is installed at the end of the guide rod, and the fixed seat is welded to the inner wall of the operating table.

[0011] As a preferred embodiment of the present invention, connecting seats are movably installed on both sides of the sealing plate, the connecting seats are welded to the bottom of the supporting plate, the size of the sealing plate is adapted to the size of the detection slot, the size of the detection slot is larger than the size of the mask substrate, and the positioning slider is slidably arranged in the positioning slot opened on the surface of the operating table.

[0012] As a preferred embodiment of the present invention, a baffle is installed on the push rod, and an extrusion spring is sleeved on the push rod. One end of the extrusion spring is clamped on the baffle, and the other end is clamped on the side wall of the bearing plate. A guide seat is installed at the end of the push rod, and a roller is installed on the guide seat, and the roller and the guide plate are slidably connected.

[0013] As a preferred embodiment of the present invention, a first bracket is installed on the side wall of the feed barrel, and the first bracket and the operating table are interconnected, the cross-sectional area of ​​the feed chamber is adapted to the cross-sectional area of ​​the mask substrate, a gap is left at the bottom of the feed barrel and the surface of the supporting plate, and the height of the gap is smaller than the thickness of the mask substrate.

[0014] As a preferred embodiment of the present invention, a T-shaped plate is installed on the side wall of the baffle, and three plug rods are movably inserted and inserted on the T-shaped plate. One end of each plug rod is interconnected with the side wall of the feed barrel, and a limiting plate is installed on the other end of the plug rod. A return spring is sleeved on the plug rod, and one end of the return spring is clamped on the side wall of the T-shaped plate, and the other end of the return spring is clamped on the side wall of the feed barrel.

[0015] As a preferred embodiment of the present invention, a ring is sleeved on the outer wall of the detector, a locking bolt is screwed on the ring, the end of the locking bolt is fitted with the detector housing, a second bracket is installed on the side wall of the ring, and the second bracket and the operating table are connected to each other, and reinforcing ribs are installed on the second bracket.

[0016] As a preferred embodiment of the present invention, a pressure plate is slidably arranged inside the ferrule, one end of the pressure plate is connected to the push rod, a compression spring is arranged between the other end of the pressure plate and the inner wall of the ferrule, and the compression direction of the compression spring is the same as the moving direction of the push rod, a ball is installed at the end of the push rod, and the ball is in contact with the swing arm, and the ferrule is in an inclined state.

[0017] As a preferred embodiment of the present invention, an electric control valve is installed on the inclined plate, a reversing plate is installed at the output end of the electric control valve, and a partition is installed on the upper opening of the collecting box.

[0018] As a preferred embodiment of the present invention, the detection method of the mask substrate surface micro-nano defect detection device comprises the following steps:

[0019] Step 1: Fill a certain number of mask substrates into the feed barrel, then start the drive motor, drive the adjusting roller to rotate through the drive motor, the position of the transposition slide on the adjusting roller changes, and drives the vertical plate, the positioning slider and the carrying plate to move left and right synchronously;

[0020] Step 2: After the carrier plate moves to the bottom of the feed tube, the carrier plate pushes the shield plate to move, and the mask substrate inside the feed tube falls into the detection groove opened on the carrier plate. As the carrier plate moves, the ejector slides along the guide plate and slides to the top platform through the slope. At this time, the ejector moves inward as a whole to clamp the mask substrate for easy detection;

[0021] Step 3: When the carrier plate moves to the bottom of the detection unit, the detection operation is completed by the detector;

[0022] Step 4: When the carrier plate continues to move, the top rod is guided to the unlocking platform through the guiding effect of the slope, and the clamp is automatically unlocked. As the carrier plate continues to move, the fixed rod and the swing arm are squeezed, pushing the swing arm to rotate, and then driving the coaxially connected sealing plate to rotate, and the inspected mask substrate is transported to the inclined plate to complete the unloading operation.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] By providing a conveying unit, the adjusting roller is driven to rotate by a driving motor, and the position of the transposition slide groove on the adjusting roller changes, driving the vertical plate, the positioning slider and the carrying plate to move left and right synchronously, wherein the carrying plate can move at the feeding clamping unit, the detection unit and the unloading unit, thereby achieving automatic feeding clamping, detection and unloading operations, making the operation simpler.

[0025] By providing a feed clamping unit, when the carrying plate moves to the bottom of the feed barrel, the carrying plate pushes the baffle to move, and the mask substrate inside the feed barrel falls into the detection groove opened on the carrying plate, so that the purpose of automatic loading can be achieved, and as the carrying plate moves, the baffle is reclosed to ensure that the mask substrate inside does not fall, and during the movement of the carrying plate, the push rod slides along the guide plate and slides to the top platform through the slope. At this time, the push rod moves inward as a whole to clamp the mask substrate, which is convenient for subsequent detection, and the operation is simpler and safer.

[0026] By providing a material unloading unit, when the carrying plate continues to move, the top rod is guided to the unlocking platform through the guiding effect of the slope, and the clamping plate is automatically unlocked. As the carrying plate continues to move, the fixed rod and the swing arm are squeezed to push the swing arm to rotate, thereby driving the coaxially connected sealing plate to rotate, and the mask substrate that has been inspected is transported to the inclined plate, completing the automatic unloading operation, which is simpler to operate.

[0027] The specific implementation modes of the present invention are further described in detail below in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In the attached picture:

[0029] Figure 1 A schematic diagram of the three-dimensional structure of a device for detecting micro-nano defects on the surface of a mask substrate;

[0030] Figure 2 It is a schematic diagram of the front structure of a device for detecting micro-nano defects on the surface of a mask substrate;

[0031] Figure 3 It is a schematic diagram of the lateral structure of a device for detecting micro-nano defects on the surface of a mask substrate;

[0032] Figure 4 It is a cross-sectional view of an operating table of a device for detecting micro-nano defects on the surface of a mask substrate;

[0033] Figure 5 It is a cross-sectional view of a feed barrel of a device for detecting micro-nano defects on the surface of a mask substrate;

[0034] Figure 6 It is a schematic diagram of the partial structure of a device for detecting micro-nano defects on the surface of a mask substrate;

[0035] Figure 7 A device for detecting micro-nano defects on the surface of a mask substrate Figure 6 Enlarged view of point A in the middle;

[0036] Figure 8 It is a cross-sectional view of a ferrule of a device for detecting micro-nano defects on the surface of a mask substrate;

[0037] Fig. 9 It is a side view of a device for detecting micro-nano defects on the surface of a mask substrate.

[0038] In the figure:

[0039] 100, conveying unit; 101, operating table; 1011, enclosure; 1012, positioning chute; 102, driving motor; 1021, mounting bracket; 1022, reducer; 103, adjusting roller; 1031, transposition chute; 1032, slide bar; 104, vertical plate; 1041, shifting slide block; 1042, positioning slide block; 1043, guide rod; 1044, fixing seat; 105, bearing plate; 1051, detection slot; 1052, sealing plate; 1053, connecting seat;

[0040] 200, feed clamping unit; 201, feed barrel; 2011, first bracket; 2012, feed chamber; 202, shield; 2021, T-shaped plate; 203, plug rod; 2031, limit plate; 2032, return spring; 204, ejector rod; 2041, clamping plate; 2042, extrusion spring; 2043, baffle; 205, guide seat; 2051, roller; 206, guide plate; 2061, ejector platform; 2062, ramp; 2063, unlocking platform;

[0041] 300, detection unit; 301, detector; 302, second bracket; 3021, collar; 3022, locking bolt; 3023, reinforcing rib;

[0042] 400, unloading unit; 401, swing arm; 4011, fixing rod; 4012, positioning seat; 402, ferrule; 4021, push rod; 4022, rolling ball; 4023, pressing plate; 4024, compression spring; 403, inclined plate; 4031, electric control valve; 4032, reversing plate; 404, collecting box; 4041, partition;

[0043] 500. Mask substrate. DETAILED DESCRIPTION

[0044] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. The following embodiments are used to illustrate the present invention.

[0045] Embodiment 1:

[0046] like Figures 1 to 9 As shown, a device for detecting micro-nano defects on the surface of a mask substrate comprises a conveying unit 100, a feeding clamping unit 200, a detecting unit 300 and a discharging unit 400. The conveying unit 100 comprises an operating table 101. An adjusting roller 103 is rotatably installed inside the operating table 101. A driving motor 102 is installed at the rotating center of the adjusting roller 103. A transposition chute 1031 is provided on the adjusting roller 103. The transposition chute 1031 is an annular groove. A shifting slider 1041 is slidably arranged on the transposition chute 1031. A vertical plate 104 is installed on the shifting slider 1041. A positioning slider 1042 is installed on the plate 104, and a carrying plate 105 is installed on the positioning slider 1042. A detection groove 1051 is opened on the carrying plate 105, and a sealing plate 1052 is rotatably installed at the bottom of the detection groove 1051; the adjusting roller is driven to rotate by a driving motor, and the position of the transposition slide groove on the adjusting roller changes, driving the vertical plate, the positioning slider and the carrying plate to move left and right synchronously, wherein the carrying plate can move at the feeding clamping unit, the detection unit and the unloading unit, thereby achieving automatic feeding clamping, detection and unloading operations, making the operation simpler.

[0047] The feed clamping unit 200 includes a feed barrel 201, a feed chamber 2012 is provided inside the feed barrel 201, and a plurality of mask substrates 500 are filled inside the feed chamber 2012. A shield plate 202 is movably inserted at the bottom of the feed barrel 201, and guide plates 206 are installed on both sides of the operating table 101. The guide plate 206 consists of a top platform 2061, a slope 2062 and an unlocking platform 2063. The unlocking platform 2063 is placed on both sides of the top platform 2061, and the top platform 2061 is placed at the center of the guide plate 206. Both sides of the slope 2062 are connected to the top platform 2061 and the unlocking platform 2063. A top rod 204 is inserted on the carrier plate 105, and one end of the top rod 204 is A clamping plate 2041 is installed, and the clamping plate 2041 is located in the detection groove 1051, and the other end of the push rod 204 is slidably connected to the guide plate 206; when the carrying plate moves to the bottom of the feed barrel, the carrying plate pushes the shield plate to move, and the mask substrate inside the feed barrel falls into the detection groove opened on the carrying plate, which can achieve the purpose of automatic loading, and as the carrying plate moves, the shield plate is closed again to ensure that the mask substrate inside will not fall, and during the movement of the carrying plate, the push rod slides along the guide plate and slides to the top platform through the slope. At this time, the push rod moves inward as a whole to clamp the mask substrate, which is convenient for subsequent detection, and the operation is simpler and safer.

[0048] The detection unit 300 includes a detector 301 , which is placed above the operating table 101 ; the detector 301 is a device specifically used to detect the mask substrate 500 , and the working principle of the device is the prior art, which will not be described in detail here.

[0049] The unloading unit 400 includes a swing arm 401, which is connected to the rotation center of the sealing plate 1052. A sleeve 402 is fixedly installed at the bottom of the supporting plate 105. A push rod 4021 is slidably arranged inside the sleeve 402. The end of the push rod 4021 is slidably connected to the side wall of the swing arm 401, and a compression spring 4024 is clamped between the push rod 4021 and the sleeve 402. A positioning seat 4012 is installed on the operating table 101, and a fixing rod 4011 is installed on the positioning seat 4012, and the fixing rod 4011 corresponds to the swing arm 401. An inclined plate 403 is installed at the end of the operating table 101, and a collection box 404 is connected to the end of the inclined plate 403. When the carrying plate continues to move, the top rod is guided to the unlocking platform through the guiding effect of the slope, and the clamping plate is automatically unlocked. As the carrying plate continues to move, the fixed rod and the swing arm are squeezed, pushing the swing arm to rotate, and then driving the coaxially connected sealing plate to rotate, and the inspected mask substrate is transported to the inclined plate, completing the automatic unloading operation, which is simpler to operate.

[0050] like Figure 4 As shown, in a specific embodiment, enclosures 1011 are installed on both sides of the operating table 101, and a mounting bracket 1021 is welded on the operating table 101. The mounting bracket 1021 is interconnected with the housing of the driving motor 102, and the output shaft of the driving motor 102 is connected with a reducer 1022, and the reducer 1022 is installed on the operating table 101, and the output end of the reducer 1022 on the other side is interconnected with the rotation center of the adjusting roller 103, and a sliding rod 1032 is installed at the bottom of the shift slider 1041, and the sliding rod 1032 is slidably set in the shifting slide groove 1031, and a guide rod 1043 is movably set on the vertical plate 104, and a fixed seat 1044 is installed at the end of the guide rod 1043, and the fixed seat 1044 is welded to the inner wall of the operating table 101. Then the operator starts the driving motor 102, and the driving motor 102 drives the reducer 1022 connected to the output shaft to move. Through the deceleration operation of the reducer 1022, the connected adjusting roller 103 can be driven to start rotating synchronously. A transposition slide groove 1031 is provided on the adjusting roller 103. At this time, the position of the transposition slide groove 1031 changes synchronously, and a slide bar 1032 and a shift slider 1041 slide on the transposition slide groove 1031, and the vertical plate 104 on which the shift slider 1041 is installed slides in the guide rod 1043, and then the vertical plate 104 is limited. Therefore, after the position of the transposition slide groove 1031 changes at this time, it drives the slide bar 1032 and the vertical plate 104 to move back and forth horizontally, and the vertical plate 104 drives the supporting plate 105 to move back and forth left and right.

[0051] like Figure 5 and Figure 8As shown, further, connecting seats 1053 are movably installed on both sides of the sealing plate 1052, and the connecting seats 1053 are welded to the bottom of the supporting plate 105. The size of the sealing plate 1052 is adapted to the size of the detection groove 1051, and the size of the detection groove 1051 is larger than the size of the mask substrate 500. The positioning slider 1042 is slidably set in the positioning groove 1012 opened on the surface of the operating table 101, and the mask substrate 500 can be completely placed in the detection groove 1051, which is convenient for subsequent detection operations.

[0052] Embodiment 2:

[0053] The difference between the above embodiment and this embodiment is that: Figure 2 , Figure 3 , Figure 4 , Fig. 9 and Fig. 9 As shown, in a specific embodiment, a first bracket 2011 is installed on the side wall of the feed barrel 201, and the first bracket 2011 and the operating table 101 are connected to each other, the cross-sectional area of ​​the feed cavity 2012 is adapted to the cross-sectional area of ​​the mask substrate 500, and a gap is left between the bottom of the feed barrel 201 and the surface of the carrier plate 105, and the height of the gap is less than the thickness of the mask substrate 500. When the detection slot 1051 on the carrier plate 105 is aligned with the feed cavity 2012, the mask substrate 500 inside starts to fall, and the mask substrate 500 at the bottom falls into the detection slot 1051. When the carrier plate 105 moves, the mask substrate 500 that has not fallen into the detection slot 1051 slides on the carrier plate 105, and when the carrier plate 105 slides, the return spring 2032 controls the movement of the shield plate 202, and the shield plate 202 at this time holds the mask substrate 500 at the bottom again to ensure that the mask substrate 500 will not fall.

[0054] like Figure 5 As shown, further, a T-shaped plate 2021 is installed on the side wall of the baffle 202, and three plug rods 203 are movably inserted and inserted on the T-shaped plate 2021. One end of each plug rod 203 is interconnected with the side wall of the feed barrel 201, and a limiting plate 2031 is installed on the other end of the plug rod 203. A return spring 2032 is sleeved on the plug rod 203, and one end of the return spring 2032 is clamped on the side wall of the T-shaped plate 2021, and the other end of the return spring 2032 is clamped on the side wall of the feed barrel 201. When the supporting plate 105 moves to the feed barrel 201, the supporting plate 105 can push the baffle 202 to move to both sides. During the movement of the baffle 202, the T-shaped plate 2021 on the surface slides on the insertion rod 203, and the limiting plate 2031 on the insertion rod 203 serves the purpose of limiting. During the movement of the T-shaped plate 2021, the reset spring 2032 can be stretched, and the reset operation can be facilitated by the reset spring 2032 in the later stage.

[0055] like Figure 6 and Figure 7 As shown, a baffle 2043 is installed on the push rod 204, and an extrusion spring 2042 is sleeved on the push rod 204. One end of the extrusion spring 2042 is clamped on the baffle 2043, and the other end is clamped on the side wall of the supporting plate 105. A guide seat 205 is installed at the end of the push rod 204, and a roller 2051 is installed on the guide seat 205, and the roller 2051 and the guide plate 206 are slidably connected. The push rod 204 and the roller 2051 on the side wall of the supporting plate 105 slide on the guide plate 206. First, the roller 2051 slides on the unlocking platform 2063. Through the guiding effect of the slope 2062, the roller 2051 moves to the top platform 2061. At this time, the push rod 204 moves inward as a whole. The push rod 204 drives the baffle 2043 to move, and then the extrusion spring 2042 can be squeezed. The extrusion spring 2042 is used to facilitate later resetting. The clamping plate 2041 at the end of the push rod 204 moves inward, and then the internal mask substrate 500 can be clamped, which is convenient for subsequent detection by the detection unit 300.

[0056] Embodiment 3:

[0057] The difference between the above embodiment and this embodiment is that: Figure 2 , Figure 3 and Figure 4 As shown, a ring 3021 is sleeved on the outer wall of the detector 301, and a locking bolt 3022 is screwed on the ring 3021. The end of the locking bolt 3022 is fitted with the outer shell of the detector 301. A second bracket 302 is installed on the side wall of the ring 3021, and the second bracket 302 and the operating table 101 are connected to each other. A reinforcing rib 3023 is installed on the second bracket 302. The detector 301 is placed in the ring 3021 and locked by the locking bolt 3022, thereby achieving the purpose of installing the detector 301.

[0058] like Figure 8As shown, in a specific embodiment, a pressure plate 4023 is slidably provided inside the sleeve 402, one end of the pressure plate 4023 is connected to the push rod 4021, a compression spring 4024 is provided between the other end of the pressure plate 4023 and the inner wall of the sleeve 402, and the compression direction of the compression spring 4024 is the same as the moving direction of the push rod 4021, a ball 4022 is installed at the end of the push rod 4021, and the ball 4022 is in contact with the swing arm 401, and the sleeve 402 is in an inclined state. As the carrier plate 105 continues to move, the swing arm 401 at the bottom of the carrier plate 105 contacts the fixed rod 4011, and the swing arm 401 can rotate through the fixed rod 4011, and the swing arm 401 drives the coaxially connected sealing plate 1052 to start rotating, and the sealing plate 1052 becomes inclined. At this time, the internal mask substrate 500 moves along the inclined sealing plate 1052 to the inclined plate 403. After the swing arm 401 rotates, it can squeeze the push rod 4021 on the back, and the push rod 4021 drives the pressure plate 4023 to slide inside the ferrule 402, thereby compressing the compression spring 4024, and the compression spring 4024 is used to facilitate the reset operation later.

[0059] like Figure 2 , Figure 3 , Figure 4 and Figure 6 As shown, further, an electric control valve 4031 is installed on the inclined plate 403, a reversing plate 4032 is installed at the output end of the electric control valve 4031, and a partition 4041 is installed on the collection box 404. When the mask substrate 500 falls onto the inclined plate 403, the controller sends a signal to the electric control valve 4031 indicating whether the current mask substrate 500 is a qualified product. At this time, the electric control valve 4031 can control the swing of the reversing plate 4032. After the reversing plate 4032 swings, it can control the falling mask substrate 500 to slide into different chambers, wherein the partition 4041 is mainly used to separate different chambers for the storage of different products.

[0060] The present invention also discloses a method for detecting micro-nano defects on the surface of a mask substrate, the steps of which are as follows:

[0061] Step 1: A certain number of mask substrates 500 are filled into the feeding cylinder 201, and then the driving motor 102 is started, and the adjusting roller 103 is driven to rotate by the driving motor 102, and the position of the transposition slide groove 1031 on the adjusting roller 103 changes, driving the vertical plate 104, the positioning slide block 1042 and the carrying plate 105 to move left and right synchronously;

[0062] Step 2: After the carrier plate 105 moves to the bottom of the feed barrel 201, the carrier plate 105 pushes the shield plate 202 to move, and the mask substrate 500 inside the feed barrel 201 falls into the detection groove 1051 opened on the carrier plate 105. As the carrier plate 105 moves, the ejector rod 204 slides along the guide plate 206 and slides onto the top platform 2061 through the slope 2062. At this time, the ejector rod 204 moves inward as a whole to clamp the mask substrate 500 for easy detection;

[0063] Step 3: When the carrier plate 105 moves to the bottom of the detection unit 300, the detection operation is completed through the detector 301;

[0064] Step 4: When the supporting plate 105 continues to move, the top rod 204 is guided to the unlocking platform 2063 by the guiding action of the slope 2062, and the clamp 2041 is automatically unlocked. As the supporting plate 105 continues to move, the fixed rod 4011 and the swing arm 401 are squeezed to push the swing arm 401 to rotate, thereby driving the coaxially connected sealing plate 1052 to rotate, and the mask substrate 500 that has been inspected is transported to the inclined plate 403 to complete the unloading operation.

[0065] The implementation principle of a mask substrate surface micro-nano defect detection device and detection method of this embodiment is as follows:

[0066] The operator first needs to fill a certain number of mask substrates 500 into the feeding cylinder 201 . At this time, all the mask substrates 500 are workpieces to be inspected.

[0067] Then the operator starts the driving motor 102, and the driving motor 102 drives the reducer 1022 connected to the output shaft to move. Through the deceleration operation of the reducer 1022, the connected adjusting roller 103 can be driven to start rotating synchronously. A transposition chute 1031 is provided on the adjusting roller 103. At this time, the position of the transposition chute 1031 changes synchronously, and a slide bar 1032 and a shift slider 1041 slide on the transposition chute 1031, and the vertical plate 104 on which the shift slider 1041 is installed slides in the guide rod 1043, and then the vertical plate 104 is limited. Therefore, after the position of the transposition chute 1031 changes at this time, it drives the slide bar 1032 and the vertical plate 104 to move back and forth horizontally, and the vertical plate 104 drives the supporting plate 105 to move back and forth left and right, thereby completing the purpose of automatic loading, clamping, detection and unloading.

[0068] When the supporting plate 105 moves to the feed barrel 201, the supporting plate 105 can push the baffle 202 to move to both sides. During the movement of the baffle 202, the T-shaped plate 2021 on the surface slides on the insertion rod 203, and the limiting plate 2031 on the insertion rod 203 serves the purpose of limiting. During the movement of the T-shaped plate 2021, the reset spring 2032 can be stretched, and the reset operation can be facilitated by the reset spring 2032 in the later stage.

[0069] When the detection groove 1051 on the supporting plate 105 is aligned with the feed chamber 2012, the internal mask substrate 500 begins to fall, and the mask substrate 500 at the bottom falls into the detection groove 1051. When the supporting plate 105 moves, the mask substrate 500 that has not fallen into the detection groove 1051 slides on the supporting plate 105. When the supporting plate 105 slides, the return spring 2032 controls the movement of the baffle 202. At this time, the baffle 202 holds the mask substrate 500 at the bottom again to ensure that the mask substrate 500 will not fall.

[0070] When the carrier plate 105 receives the mask substrate 500, the carrier plate 105 moves to the next workstation, and the top rod 204 and the roller 2051 on the side wall of the carrier plate 105 slide on the guide plate 206. First, the roller 2051 slides on the unlocking platform 2063. Through the guiding effect of the slope 2062, the roller 2051 moves to the top platform 2061. At this time, the top rod 204 moves inward as a whole, and the top rod 204 drives the baffle 2043 to move, and then the extrusion spring 2042 can be squeezed. The extrusion spring 2042 is used to facilitate later resetting, and the clamping plate 2041 at the end of the top rod 204 moves inward, and then the internal mask substrate 500 can be clamped, which is convenient for subsequent detection by the detection unit 300.

[0071] When the mask substrate 500 moves to the bottom of the detector 301, the detector 301 completes the detection operation, wherein the detection principle of the detector 301 is the prior art and will not be described in detail herein. The detector 301 sends a detection signal to the controller.

[0072] After the detection is completed, the carrier plate 105 continues to move, and finally, guided by the slope 2062 , the push rod 204 moves back to the unlocking platform 2063 , and the clamping plate 2041 stops clamping the mask substrate 500 .

[0073] As the carrier plate 105 continues to move, the swing arm 401 at the bottom of the carrier plate 105 contacts the fixed rod 4011, and the fixed rod 4011 can make the swing arm 401 rotate, and the swing arm 401 drives the coaxially connected sealing plate 1052 to start rotating, and the sealing plate 1052 becomes inclined. At this time, the internal mask substrate 500 moves along the inclined sealing plate 1052 to the inclined plate 403. After the swing arm 401 rotates, it can squeeze the push rod 4021 on the back, and the push rod 4021 drives the pressure plate 4023 to slide inside the sleeve 402, thereby compressing the compression spring 4024, and the compression spring 4024 is used to facilitate the subsequent resetting operation.

[0074] When the mask substrate 500 falls onto the inclined plate 403, the controller sends a signal to the electric control valve 4031 indicating whether the current mask substrate 500 is a qualified product. At this time, the electric control valve 4031 can control the swing of the reversing plate 4032. After the reversing plate 4032 swings, it can control the falling mask substrate 500 to slide into different chambers, wherein the partition 4041 is mainly used to separate different chambers for the storage of different products.

Claims

1. A mask substrate surface micro-nano defect detection device, comprising a conveying unit (100), a feeding clamping unit (200), a detection unit (300) and a material unloading unit (400), characterized in that: The conveying unit (100) comprises an operating table (101), an adjusting roller (103) is rotatably mounted inside the operating table (101), a driving motor (102) is mounted on the rotation center of the adjusting roller (103), a transposition slide groove (1031) is provided on the adjusting roller (103), the transposition slide groove (1031) is an annular groove, a shifting slider (1041) is slidably mounted on the transposition slide groove (1031), a vertical plate (104) is mounted on the shifting slider (1041), a positioning slider (1042) is mounted on the vertical plate (104), a bearing plate (105) is mounted on the positioning slider (1042), a detection groove (1051) is provided on the bearing plate (105), and a sealing plate (1052) is rotatably mounted on the bottom of the detection groove (1051); The feed clamping unit (200) comprises a feed barrel (201), a feed cavity (2012) is provided inside the feed barrel (201), a plurality of pairs of mask substrates (500) are filled inside the feed cavity (2012), a shield plate (202) is movably inserted at the bottom of the feed barrel (201), guide plates (206) are installed on both sides of the operating table (101), the guide plates (206) are composed of a top table (2061), a slope (2062) and an unlocking table (2063), and the unlocking table (2063) are placed on both sides of the top platform (2061), and the top platform (2061) is placed at the center of the guide plate (206), the two sides of the slope (2062) are connected to the top platform (2061) and the unlocking platform (2063), the support plate (105) is plugged with a top rod (204), one end of the top rod (204) is installed with a clamping plate (2041), and the clamping plate (2041) is located in the detection groove (1051), and the other end of the top rod (204) is slidably connected to the guide plate (206); The detection unit (300) comprises a detector (301), and the detector (301) is placed above the operating table (101); The unloading unit (400) includes a swing arm (401), and the swing arm (401) is connected to the rotation center of the sealing plate (1052). A sleeve (402) is fixedly installed at the bottom of the supporting plate (105), and a push rod (4021) is slidably arranged inside the sleeve (402). The end of the push rod (4021) is slidably connected to the side wall of the swing arm (401), and a compression spring (4024) is clamped between the push rod (4021) and the sleeve (402). A positioning seat (4012) is installed on the operating table (101), and a fixing rod (4011) is installed on the positioning seat (4012), and the fixing rod (4011) corresponds to the swing arm (401). An inclined plate (403) is installed at the end of the operating table (101), and a collection box (404) is connected to the end of the inclined plate (403).

2. The device for detecting micro-nano defects on the surface of a mask substrate according to claim 1, characterized in that: Enclosures (1011) are installed on both sides of the operating table (101); a mounting bracket (1021) is welded on the operating table (101); the mounting bracket (1021) is connected to the housing of the driving motor (102); the output shaft of the driving motor (102) is connected to a reducer (1022), and the reducer (1022) is installed on the operating table (101); the output end of the reducer (1022) is connected to the rotation center of the adjusting roller (103); a sliding rod (1032) is installed at the bottom of the shifting slider (1041); the sliding rod (1032) is slidably arranged in the shifting slide groove (1031); a guide rod (1043) is movably arranged on the vertical plate (104); a fixing seat (1044) is installed at the end of the guide rod (1043); and the fixing seat (1044) is welded to the inner wall of the operating table (101).

3. The device for detecting micro-nano defects on the surface of a mask substrate according to claim 1, characterized in that: Connecting seats (1053) are movably mounted on both sides of the sealing plate (1052); the connecting seats (1053) are welded to the bottom of the carrier plate (105); the size of the sealing plate (1052) matches the size of the detection slot (1051); the size of the detection slot (1051) is larger than the size of the mask substrate (500); and the positioning slide block (1042) is slidably arranged in a positioning slide groove (1012) provided on the surface of the operating table (101).

4. The device for detecting micro-nano defects on the surface of a mask substrate according to claim 1, characterized in that: A baffle (2043) is installed on the push rod (204), and a compression spring (2042) is sleeved on the push rod (204), one end of the compression spring (2042) is clamped on the baffle (2043), and the other end is clamped on the side wall of the bearing plate (105), and a guide seat (205) is installed at the end of the push rod (204), and a roller (2051) is installed on the guide seat (205), and the roller (2051) and the guide plate (206) are slidably connected.

5. The device for detecting micro-nano defects on the surface of a mask substrate according to claim 1, characterized in that: A first bracket (2011) is installed on the side wall of the feed barrel (201), and the first bracket (2011) and the operating table (101) are connected to each other. The cross-sectional area of ​​the feed chamber (2012) is adapted to the cross-sectional area of ​​the mask substrate (500). A gap is left between the bottom of the feed barrel (201) and the surface of the carrier plate (105), and the height of the gap is less than the thickness of the mask substrate (500).

6. The device for detecting micro-nano defects on the surface of a mask substrate according to claim 1, characterized in that: A T-shaped plate (2021) is installed on the side wall of the baffle (202), and three plug rods (203) are movably inserted through the T-shaped plate (2021), one end of each plug rod (203) is connected to the side wall of the feed barrel (201), and a limiting plate (2031) is installed on the other end of the plug rod (203). A return spring (2032) is sleeved on the plug rod (203), one end of the return spring (2032) is clamped on the side wall of the T-shaped plate (2021), and the other end of the return spring (2032) is clamped on the side wall of the feed barrel (201).

7. The device for detecting micro-nano defects on the surface of a mask substrate according to claim 1, characterized in that: The outer wall of the detector (301) is sleeved with a ring (3021), and a locking bolt (3022) is screwed on the ring (3021). The end of the locking bolt (3022) is in contact with the outer shell of the detector (301). A second bracket (302) is installed on the side wall of the ring (3021), and the second bracket (302) and the operating table (101) are connected to each other. A reinforcing rib (3023) is installed on the second bracket (302).

8. The device for detecting micro-nano defects on the surface of a mask substrate according to claim 1, characterized in that: A pressure plate (4023) is slidably arranged inside the sleeve (402), one end of the pressure plate (4023) is connected to the push rod (4021), a compression spring (4024) is arranged between the other end of the pressure plate (4023) and the inner wall of the sleeve (402), and the compression direction of the compression spring (4024) is the same as the moving direction of the push rod (4021), a rolling ball (4022) is installed at the end of the push rod (4021), and the rolling ball (4022) is in contact with the swing arm (401), and the sleeve (402) is in an inclined state.

9. The device for detecting micro-nano defects on the surface of a mask substrate according to claim 1, characterized in that: An electric control valve (4031) is installed on the inclined plate (403), a reversing plate (4032) is installed at the output end of the electric control valve (4031), and a partition (4041) is installed on the upper opening of the collection box (404).

10. A method for detecting micro-nano defects on the surface of a mask substrate, characterized in that: A detection method for a mask substrate surface micro-nano defect detection device applied to any of claims 1 to 9, the steps of the detection method for a mask substrate surface micro-nano defect detection device are as follows: Step 1: A certain number of mask substrates (500) are filled into the feed cylinder (201), and then the drive motor (102) is started, and the drive motor (102) drives the adjustment roller (103) to rotate, and the position of the transposition slide groove (1031) on the adjustment roller (103) changes, driving the vertical plate (104), the positioning slide block (1042) and the carrier plate (105) to move left and right synchronously; Step 2: After the carrier plate (105) moves to the bottom of the feed barrel (201), the carrier plate (105) pushes the shield plate (202) to move, and the mask substrate (500) inside the feed barrel (201) falls into the detection groove (1051) provided on the carrier plate (105). As the carrier plate (105) moves, the push rod (204) slides along the guide plate (206) and slides onto the top platform (2061) through the slope (2062). At this time, the push rod (204) moves inward as a whole to clamp the mask substrate (500) for easy detection. Step 3: When the carrier plate (105) moves to the bottom of the detection unit (300), the detection operation is completed through the detector (301); Step 4: When the supporting plate (105) continues to move, the top rod (204) is guided to the unlocking platform (2063) by the guiding action of the slope (2062), and the clamping plate (2041) is automatically unlocked. As the supporting plate (105) continues to move, the fixed rod (4011) and the swing arm (401) are squeezed, pushing the swing arm (401) to rotate, thereby driving the coaxially connected sealing plate (1052) to rotate, and the mask substrate (500) that has been inspected is transported to the inclined plate (403), completing the unloading operation.

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