A loading chamber and epitaxial growth device

Abstract

The present application provides a loading chamber and an epitaxial growth device. The loading chamber of the present application includes a chamber body, a cover plate and at least one switch door assembly. The chamber body includes a bottom plate and a side wall connected to the bottom plate. The bottom plate and the side wall form a receiving chamber. One end of the cover plate is hinged to the first side plate in the side wall. The cover plate is used to close the receiving chamber. The switch door assembly includes a first transmission member and a first driving member. The first end of the first transmission member is connected to the cover plate to drive the cover plate to rotate so that the cover plate closes or opens the receiving chamber. The first driving member is connected to the second end of the first transmission member to control the movement of the first transmission member so that the first transmission member drives the cover plate to rotate. The second side plate adjacent to the first side plate in the side wall is provided with a strip hole, and the first transmission member is inserted into the strip hole. The loading chamber and epitaxial growth device of the present application can automatically control the opening and closing of the cover plate without manual operation.

Description

Technical Field

[0001] The present application relates to the field of semiconductor production technology, and in particular to a loading chamber and epitaxial growth equipment. Background Art

[0002] The working process of the epitaxial growth equipment is to send the wafer into the reaction chamber for epitaxial reaction, then send out the wafer that has completed the reaction and send in a new wafer to continue the epitaxial reaction. In the related technology, the wafers in the crystal box are usually placed on the tray of the loading chamber manually, and then the tray and the wafers are sent into the reaction chamber for epitaxial reaction. After the wafer completes the epitaxial reaction, the wafer that has completed the reaction is sent back to the loading chamber, and the wafer is taken out from the loading chamber and stored in the crystal box. At the same time, the new wafer is placed in the loading chamber and continues to be sent to the reaction chamber for epitaxial reaction; in this process, the sealed chamber of the loading chamber and the reaction chamber needs to be opened to replace the wafer. After the wafer is replaced, it needs to be purged with argon gas, and the loading chamber and the reaction chamber are evacuated to a vacuum environment again.

[0003] However, the current loading chamber requires manual pushing and pulling of the cover to change its position. Manually pushing and pulling the cover is not only very inconvenient to operate, but also may cause the operator to forget to lock it, which affects the working efficiency of the equipment and poses certain safety hazards. Summary of the invention

[0004] The main technical problem solved by the present application is to provide a loading chamber and an epitaxial growth device, which can automatically control the opening and closing of a cover plate without manual operation.

[0005] In order to solve the above technical problems, the first technical solution adopted by the present application provides a loading chamber, the loading chamber comprising: a chamber body, the chamber body comprising a bottom plate and a side wall connected to the bottom plate, the bottom plate and the side wall forming a receiving chamber, the receiving chamber being used to place an extension tray; a cover plate, the cover plate being arranged on a side of the side wall away from the bottom plate, one end of the cover plate being hinged to a first side plate in the side wall, the cover plate being used to close the receiving chamber; at least one switch door assembly, the switch door assembly comprising a first transmission member and a first driving member, the first end of the first transmission member being connected to the cover plate to drive the cover plate to rotate so that the cover plate closes or opens the receiving chamber; the first driving member being connected to the second end of the first transmission member to control the movement of the first transmission member so that the first transmission member drives the cover plate to rotate; wherein a second side plate in the side wall adjacent to the first side plate is provided with a strip hole, the strip hole extending from an end of the second side plate close to the cover plate to an end of the second side plate close to the bottom plate, the first transmission member being inserted into the strip hole.

[0006] Wherein, the first end of the first transmission member is hinged to the side of the cover plate facing the bottom plate, the fixed end of the first driving member is fixedly connected to the second side plate, the output end of the first driving member is inserted into the strip hole, and the output end of the first driving member is hinged to the second end of the first transmission member; and / or, there are two switch door assemblies, and the two switch door assemblies are respectively arranged corresponding to the two second side plates adjacent to the first side plate in the side wall, and the first driving members of the two switch door assemblies are started and stopped synchronously to simultaneously control the movement of the correspondingly connected first transmission members; and / or, the first driving member includes a driving cylinder, and both ends of the driving cylinder are provided with an interlocking mechanism including a pilot-operated one-way valve.

[0007] Wherein, the loading chamber also includes a locking door assembly; the locking door assembly includes a first locking member and a second locking member, the first locking member is arranged on the cover plate, and the second locking member is arranged on the side wall, when the cover plate is close to the side wall and closes the accommodating cavity, the first locking member is engaged with the second locking member.

[0008] wherein a receiving groove is provided on the other side plate of the side wall which is different from the first side plate, and the receiving groove extends from one end of the other side plate close to the cover plate to one end of the other side plate close to the bottom plate; the first engaging member comprises a connecting portion and a first engaging portion, the connecting portion extends from a side of the cover plate toward the bottom plate in a direction away from the cover plate, and the first engaging portion is provided at one end of the connecting portion away from the cover plate, and when the cover plate approaches the side wall and closes the receiving cavity, the first engaging portion is received in the receiving groove; the second engaging member comprises a second transmission member, a second driving member and a second engaging portion, The second transmission member is accommodated in the accommodating groove, the middle part of the second transmission member is hinged to the groove wall of the accommodating groove, the first end of the second transmission member is provided with the second clamping part, the fixed end of the second driving member is fixedly connected to the other side plates, the output end of the second driving member is inserted into the accommodating groove, and the output end of the second driving member is hinged to the second end of the second transmission member; when the output end of the second driving member drives the second end of the second transmission member to move, it drives the first end of the second transmission member to rotate around the middle part of the second transmission member, so that the second clamping part is engaged with or separated from the first clamping part.

[0009] Wherein, two door lock assemblies are provided, and the other side panels are two second side panels adjacent to the first side panels in the side wall, and the two door lock assemblies are respectively arranged corresponding to the two second side panels, and the second driving members of the two door lock assemblies are started and stopped synchronously to simultaneously control the movement of the correspondingly connected second transmission members; and / or, one door lock assembly is provided, and the other side panel is a third side panel in the side wall opposite to the first side panel; and / or, the door lock assembly also includes a detection sensor, which is electrically connected to the second driving member, and the detection sensor is used to control the output end of the second driving member to drive the second end of the second transmission member to move.

[0010] Among them, the bottom plate is provided with an air inlet and an exhaust port, both of which are connected to the accommodating cavity; and / or, a material removal port is opened on the side wall, and the material removal port is used for an external robot to reach into the accommodating cavity to take and place the extension tray.

[0011] The cover plate includes a stacked substrate, a transparent plate and a pressure plate, the first end of the substrate is hinged to the first side plate, an observation port is opened in the middle of the substrate, the edge of the transparent plate is placed on the substrate and covers the observation port, the pressure plate is annular, and covers the edge of the transparent plate and at least part of the substrate; sealing rings are provided between the transparent plate and the substrate, and between the transparent plate and the pressure plate, and the sealing rings form gaps between the transparent plate and the substrate and the pressure plate.

[0012] Wherein, the substrate is provided with a receiving portion around the observation port, the receiving portion includes a first recessed portion and a second recessed portion, the surface of the substrate facing the pressing plate on one side is recessed to form the first recessed portion, and the bottom surface of the first recessed portion close to the observation port is recessed to form the second recessed portion; the side surface of the transparent plate protrudes outward to form an overlapping portion, and the bottom surface of the overlapping portion is placed on the bottom surface of the second recessed portion; the bottom surface of the second recessed portion is provided with a first sealing groove, and a first sealing ring is arranged in the first sealing groove; the side wall of the second recessed portion is provided with a second sealing groove, and a second sealing ring is arranged in the second sealing groove; the inner wall of the pressing plate extends inward to form a pressing portion, the bottom surface of the pressing plate is placed on the bottom surface of the first recessed portion, and the pressing portion covers at least a portion of the upper surface of the overlapping portion; the bottom surface of the pressing portion is provided with a third sealing groove, and a third sealing ring is arranged in the third sealing groove.

[0013] Wherein, a photoelectric detection mechanism is installed on the transparent plate, and the photoelectric detection mechanism is used to detect whether there is a wafer on the epitaxial tray; and / or, a handle is provided at the second end of the substrate.

[0014] In order to solve the above technical problems, the second technical solution adopted in the present application is to provide an epitaxial growth device, wherein the epitaxial growth device includes any one of the above-mentioned loading chambers.

[0015] Different from the prior art, the beneficial effects of the present application are as follows: in the loading chamber and epitaxial growth equipment provided by the present application, the loading chamber includes a chamber body, a cover plate and at least one switch door assembly, the chamber body includes a bottom plate and a side wall connected to the bottom plate, the bottom plate and the side wall form a receiving chamber, the receiving chamber is used to place the epitaxial tray, the cover plate is arranged on the side of the side wall away from the bottom plate, one end of the cover plate is hinged to the first side plate in the side wall, the cover plate is used to close the receiving chamber, the switch door assembly includes a first transmission member and a first driving member, the first end of the first transmission member is connected to the cover plate to drive the cover plate to rotate, so that the cover plate closes or opens the receiving chamber; the first driving member is connected to the second end of the first transmission member, and is used to control the movement of the first transmission member so that the first transmission member drives the cover plate to rotate; wherein, a second side plate adjacent to the first side plate in the side wall is provided with a strip hole, the strip hole extends from one end of the second side plate close to the cover plate to one end of the second side plate close to the bottom plate, and the first transmission member is inserted into the strip hole. By setting at least one switch door assembly, the switch door assembly includes a first transmission member and a first driving member, the first driving member is connected to the second end of the first transmission member, the first end of the first transmission member is connected to the cover plate, and the first driving member is used to control the movement of the first transmission member, so that the first transmission member drives the cover plate to rotate, so that the cover plate closes or opens the accommodating chamber; and a strip hole for accommodating the first transmission member is opened on the second side plate adjacent to the first side plate connected to the cover plate, because the position of the first transmission member is different when the cover plate closes the accommodating chamber and when the cover plate opens the accommodating chamber, the strip hole has space for accommodating the first transmission member in different positions, so that the control stability of the switch door assembly is guaranteed. Therefore, the loading chamber and epitaxial growth equipment of the present application can automatically control the opening and closing of the cover plate through the first driving member, without manual operation, reducing the safety hazards caused by human operation during the operation of the equipment, high working efficiency and safety, and good equipment stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0017] Figure 1 It is a schematic diagram of the structure of the cover of the loading chamber provided in an embodiment of the present application being closed;

[0018] Figure 2 yes Figure 1 A schematic cross-sectional structure diagram of a loading chamber;

[0019] Figure 3 yes Figure 1 A schematic diagram of the structure of the loading chamber after removing the cover plate;

[0020] Figure 4 It is a schematic diagram of the structure of the cover of the loading chamber provided in an embodiment of the present application being opened;

[0021] Figure 5 yes Figure 4 A schematic cross-sectional structure diagram of a loading chamber;

[0022] Figure 6 yes Figure 1 A schematic diagram of the structure of the cover plate;

[0023] Figure 7 yes Figure 6 A schematic cross-sectional view of a cover plate;

[0024] Figure 8 yes Figure 7 A partial schematic diagram of .

[0025] Explanation of reference numerals: 10, chamber body; 100, bottom plate; 101, side wall; 1011, first side plate; 1012, second side plate; 1013, third side plate; 102, accommodating cavity; 103, strip hole; 104, accommodating groove; 105, material taking port; 106, air inlet; 107, exhaust port; 12, cover plate; 120, substrate; 1201, first recessed portion; 1202, second recessed portion; 1203, first sealing groove; 1204, second sealing groove; 121, transparent plate; 1210, overlapping portion; 122, pressing plate; 1220, pressing portion ; 1221, third sealing groove; 123, observation port; 124, sealing ring; 1241, first sealing ring; 1242, second sealing ring; 1243, third sealing ring; 125, photoelectric detection mechanism; 126, handle; 14, door switch assembly; 140, first transmission member; 141, first drive member; 16, door lock assembly; 161, first engaging member; 1610, connecting part; 1611, first engaging part; 162, second engaging member; 1620, second transmission member; 1621, second drive member; 1622, second engaging part; 18, extension tray. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0027] It should be noted that when an element is referred to as being "disposed on" another element, it may be directly on the other element or there may be another element centered thereon. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be another element centered thereon at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art to which the present application belongs. The terms used herein in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0029] See also Figures 1 to 5 ,in, Figure 1 1 is a schematic diagram of a structure in which the cover plate 12 of the loading chamber provided in an embodiment of the present application is closed. Figure 2 yes Figure 1 A schematic diagram of the cross-sectional structure of the loading chamber, Figure 3 yes Figure 1 A schematic diagram of the structure of the loading chamber after removing the cover plate 12, Figure 4 is a schematic diagram of the structure of the cover of the loading chamber provided in the embodiment of the present application being opened, Figure 5 yes Figure 4 A schematic diagram of the cross-sectional structure of a loading chamber. The embodiment of the present application provides a loading chamber, the loading chamber comprising a chamber body 10 and a cover plate 12; the chamber body 10 comprises a bottom plate 100 and a side wall 101 connected to the bottom plate 100, the bottom plate 100 and the side wall 101 form a receiving cavity 102, the receiving cavity 102 is used to place an epitaxial tray 18, the epitaxial tray 18 is used to carry wafers to be subjected to epitaxial reaction or wafers after reaction; the cover plate 12 is arranged on a side of the side wall 101 away from the bottom plate 100, one end of the cover plate 12 is hinged to the corresponding first side plate 1011 in the side wall 101, and the cover plate 12 is used to close the receiving cavity 102.

[0030] The loading chamber further includes at least one switch door assembly 14, which includes a first transmission member 140 and a first driving member 141. The first driving member 141 is connected to the second end of the first transmission member 140, and the first end of the first transmission member 140 is connected to the cover plate 12. The first driving member 141 is used to control the movement of the first transmission member 140 so that the first transmission member 140 drives the cover plate 12 to rotate. After the cover plate 12 rotates, it has a first position of closing the accommodating cavity 102 and a second position of opening the accommodating cavity 102. Among them, the second side plate 1012 adjacent to the first side plate 1011 in the side wall 101 is provided with a strip hole 103, and the strip hole 103 extends from one end of the second side plate 1012 close to the cover plate 12 to one end of the second side plate 1012 close to the bottom plate 100, and the first transmission member 140 is inserted into the strip hole 103. It can be understood that the first transmission member 140 can extend out of the strip hole 103 or retract into the strip hole 103 under the drive of the first driving member 141. Figure 1 and Figure 2 As shown, when the cover plate 12 is in the first position, the cover plate 12 is in contact with the side wall 101 of the chamber body 10, and the first transmission member 140 is accommodated in a position where the strip hole 103 is away from the first side plate 1011. As the cover plate 12 rotates to the second position, as shown in FIG. Figure 4 and Figure 5 As shown, the first transmission member 140 connected to the cover plate 12 is close to the first side plate 1011 , and the portion of the first transmission member 140 that does not extend out of the strip hole 103 is accommodated in the position of the strip hole 103 close to the first side plate 1011 .

[0031] In the embodiment of the present application, at least one switch door assembly 14 is provided, and the switch door assembly 14 includes a first transmission member 140 and a first driving member 141. The first driving member 141 is connected to the second end of the first transmission member 140, and the first end of the first transmission member 140 is connected to the cover plate 12. The first driving member 141 is used to control the movement of the first transmission member 140, so that the first transmission member 140 drives the cover plate 12 to rotate, so that the cover plate 12 closes or opens the accommodating chamber 102; therefore, the loading chamber of the present application can automatically control the opening and closing of the cover plate 12 through the first driving member 141, without manual operation, reducing the safety hazards caused by human operation during equipment operation, and having high working efficiency and safety. A strip hole 103 for accommodating the first transmission member 140 is opened on the second side plate 1012 adjacent to the first side plate 1011 connected to the cover plate 12. Since the positions of the first transmission member 140 are different when the cover plate 12 closes the accommodating cavity 102 and when the cover plate 12 opens the accommodating cavity 102, the strip hole 103 has space for accommodating the first transmission member 140 in different positions, thereby ensuring the control stability of the opening and closing door assembly 14.

[0032] Specifically, the first end of the first transmission member 140 is hinged to the side of the cover plate 12 facing the bottom plate 100, the fixed end of the first driving member 141 is fixedly connected to the second side plate 1012, the output end of the first driving member 141 is inserted into the strip hole 103, and the output end of the first driving member 141 is hinged to the second end of the first transmission member 140. As an embodiment, the first transmission member 140 can be a supporting connecting rod, one end of the supporting connecting rod is hinged to the cover plate 12, and the other end is hinged to the output end of the first driving member 141, such as Figure 2 As shown, when the cover plate 12 is in the first position, all or most of the supporting connecting rods are inserted into the strip-shaped holes 103. As the cover plate 12 rotates to the second position, as shown in FIG. Figure 4 and Figure 5 As shown, although the output end of the first driving member 141 pushes the supporting connecting rod to extend out of the strip hole 103 , a portion of the supporting connecting rod is still inserted into the strip hole 103 .

[0033] In one embodiment, two switch door assemblies 14 are provided, and the two switch door assemblies 14 are respectively provided corresponding to the two second side plates 1012 adjacent to the first side plate 1011 in the side wall 101, and the first driving members 141 of the two switch door assemblies 14 are started and stopped synchronously, so as to simultaneously control the movement of the correspondingly connected first transmission members 140. Figure 4 As shown, the loading chamber is provided with two switch door assemblies 14, and the two switch door assemblies 14 are axially symmetrically arranged on two second side plates 1012 adjacent to the first side plate 1011. The two switch door assemblies 14 cooperate to open or close the cover plate 12 at the same time, which has a better control effect.

[0034] It is understandable that the first driving member 141 can be a cylinder or a hydraulic cylinder. For example, if the mass of the cover plate 12 is large, a large thrust or pull is required to close or open it. At this time, the first driving member 141 can be a hydraulic cylinder that can output heavy loads. If the mass of the cover plate 12 is small, too much thrust or pull is not required. At this time, the first driving member 141 can be a cylinder that outputs light loads. In one embodiment, the first driving member 141 includes a driving cylinder, and an interlocking mechanism including a pilot check valve is provided at both ends of the driving cylinder (not shown). By selecting an interlocking mechanism including a pilot check valve, the driving cylinder can still maintain the state before the failure when the equipment fails and the power and gas are cut off, driving the first transmission member 140 to automatically stop at the original position, and the cover plate 12 will not fall suddenly to cause danger, so that the loading chamber of the present application has better safety performance.

[0035] In one embodiment, the loading chamber further includes a door lock assembly 16; the door lock assembly 16 includes a first engaging member 161 and a second engaging member 162, wherein the first engaging member 161 is disposed on the cover plate 12, and the second engaging member 162 is disposed on the side wall 101, and when the cover plate 12 is close to the side wall 101 and closes the accommodating chamber 102, the first engaging member 161 engages with the second engaging member 162. As an implementable embodiment, the door lock assembly 16 can be engaged by means of a protrusion and a groove structure that cooperate with each other, wherein the first engaging member 161 is one of the protrusion and the groove, and the second engaging member 162 is the other of the protrusion and the groove, and the size of the protrusion can be slightly smaller than the size of the groove, so as to facilitate the insertion of the protrusion structure into the groove. Of course, the first engaging member 161 and the second engaging member 162 are not limited to the structure of the protrusion and the groove, and other engaging structures can also be adopted. By providing a door lock assembly 16 including a first engaging member 161 and a second engaging member 162 , when the cover plate 12 closes the accommodating cavity 102 , the first engaging member 161 engages with the second engaging member 162 , thereby preventing the cover plate 12 from moving and keeping the accommodating cavity 102 in a sealed state.

[0036] Furthermore, a receiving groove 104 is provided on the other side plate in the side wall 101 which is different from the first side plate 1011. The receiving groove 104 extends from one end of the other side plate close to the cover plate 12 to one end of the other side plate close to the bottom plate 100. The first engaging member 161 includes a connecting portion 1610 and a first engaging portion 1611. The connecting portion 1610 extends from the side of the cover plate 12 toward the bottom plate 100 in a direction away from the cover plate 12. The end of the connecting portion 1610 away from the cover plate 12 is provided with the first engaging portion 1611. When the cover plate 12 is close to the side wall 101 and closes the receiving cavity 102, the first engaging portion 1611 is received in the receiving groove 104. The second engaging member 162 includes a second transmission member 1620, a second driving member 1621 and a second engaging member 1622. Part 1622, the second transmission member 1620 is accommodated in the accommodating groove 104, the middle part of the second transmission member 1620 is hinged to the groove wall of the accommodating groove 104, the first end of the second transmission member 1620 is provided with a second clamping part 1622, the fixed end of the second driving member 1621 is fixedly connected to the other side plate, the output end of the second driving member 1621 is inserted into the accommodating groove 104, and the output end of the second driving member 1621 is hinged to the second end of the second transmission member 1620; when the output end of the second driving member 1621 drives the second end of the second transmission member 1620 to move, it drives the first end of the second transmission member 1620 to rotate around the middle part of the second transmission member 1620, so that the second clamping part 1622 is engaged with or separated from the first clamping part 1611. It can be understood that when the cover plate 12 is close to the side wall 101 and closes the accommodating cavity 102, the first clamping part 1611 is inserted into the accommodating groove 104, such as Figure 2As shown, the second end of the second transmission member 1620 is driven to move upward by the output end of the second driving member 1621, thereby driving the first end of the second transmission member 1620 to rotate downward around the middle of the second transmission member 1620, so that the second engaging portion 1622 located at the first end of the second transmission member 1620 is engaged with the first engaging portion 1611; when the cover plate 12 wants to open the accommodating chamber 102, it is necessary to unlock the door lock assembly 16 first. At this time, the second end of the second transmission member 1620 is driven to move downward by the output end of the second driving member 1621, thereby driving the first end of the second transmission member 1620 to rotate upward around the middle of the second transmission member 1620, so that the second engaging portion 1622 located at the first end of the second transmission member 1620 is separated from the first engaging portion 1611, thereby releasing the cover plate 12. After that, the switch door assembly 14 can drive the cover plate 12 to rotate to open the accommodating chamber 102.

[0037] In one embodiment, two door lock assemblies 16 are provided, and the other side panels are two second side panels 1012 adjacent to the first side panel 1011 in the side wall 101. The two door lock assemblies 16 are respectively provided corresponding to the two second side panels 1012, and the second driving members 1621 of the two door lock assemblies 16 are started and stopped synchronously, so as to simultaneously control the movement of the correspondingly connected second transmission members 1620. Figure 4 As shown, the loading chamber is provided with two locking door assemblies 16, and the two locking door assemblies 16 are axially symmetrically arranged on two second side plates 1012 adjacent to the first side plate 1011. The two locking door assemblies 16 cooperate to simultaneously lock or release the cover plate 12, which has a better control effect.

[0038] In another embodiment, the locking door assembly 16 is provided with one, and the other side plate is a third side plate 1013 in the side wall 101 opposite to the first side plate 1011. It can be understood that the loading chamber can also be provided with only one locking door assembly 16, and the locking door assembly 16 is provided on the third side plate 1013 opposite to the first side plate 1011. Compared with the solution of two locking door assemblies 16, one locking door assembly 16 can effectively save costs while ensuring the control effect.

[0039] In one embodiment, the door lock assembly 16 further includes a detection sensor (not shown), which is electrically connected to the second driving member 1621, and the detection sensor is used to control the output end of the second driving member 1621 to drive the second end of the second transmission member 1620 to move. The door lock assembly 16 of the present application can automatically control the position of the second transmission member 1620 according to the detection result of the detection sensor, without manual operation, thereby reducing the safety hazards caused by human operation during the operation of the device, and has the advantage of high safety.

[0040] In one embodiment, a material extraction port 105 is provided on the side wall 101, and the material extraction port 105 is used for an external robot to reach into the accommodating chamber 102 to take and place the epitaxial tray 18. The epitaxial tray 18 is arranged in the accommodating chamber 102, and by providing the material extraction port 105 on the side wall 101 of the loading chamber, an external robot can reach into the accommodating chamber 102 through the material extraction port 105 to take and place the epitaxial tray 18, and transfer the wafers on the epitaxial tray 18 through the material extraction port 105.

[0041] In one embodiment, the bottom plate 100 is provided with an air inlet 106 and an air outlet 107, and both the air inlet 106 and the air outlet 107 are connected to the accommodating chamber 102. It can be understood that the air inlet 106 is used to purge inert gas into the accommodating chamber 102 to purify the chamber, and can purge inert gas to the epitaxial tray 18 and the wafers on the epitaxial tray 18 to clean the wafers; the air outlet 107 is used to pump the accommodating chamber 102 into a negative pressure and exhaust the air in the accommodating chamber 102.

[0042] Please combine Figures 6 to 8 ,in, Figure 6 yes Figure 1 The structural diagram of the cover plate in FIG. Figure 7 yes Figure 6 A schematic cross-sectional view of the cover plate. Figure 8 yes Figure 7In one embodiment, the cover plate 12 includes a stacked substrate 120, a transparent plate 121 and a pressing plate 122, the first end of the substrate 120 is hinged to the first side plate 1011, an observation port 123 is provided in the middle of the substrate 120, the edge of the transparent plate 121 is placed on the substrate 120 and covers the observation port 123, the pressing plate 122 is annular, and covers the edge of the transparent plate 121 and at least part of the substrate 120; sealing rings 124 are provided between the transparent plate 121 and the substrate 120, and between the transparent plate 121 and the pressing plate 122, and the sealing rings 124 form intervals between the transparent plate 121 and the substrate 120 and the pressing plate 122. The cover plate 12 may specifically include a substrate 120 located at the lower layer, a pressure plate 122 located at the upper layer, and a transparent plate 121 located between the substrate 120 and the pressure plate 122; specifically, an observation port 123 is opened in the middle of the substrate 120, and then a sealing ring 124 is arranged on the substrate 120 along the periphery of the observation port 123, and then the transparent plate 121 is pressed on the sealing ring 124 on the substrate 120. Since the size of the transparent plate 121 is larger than the size of the observation port 123 opened on the substrate 120, the edge position of the transparent plate 121 is pressed on the sealing ring 124 at this time, and the middle position of the transparent plate 121 completely covers the observation port 123; then a sealing ring 124 is arranged on the edge position area of ​​the transparent plate 121. A circle of sealing ring 124 is formed, and the annular pressure plate 122 is pressed on the sealing ring 124 on the transparent plate 121. Since the size of the outer ring edge of the pressure plate 122 is larger than the size of the transparent plate 121, and the size of the inner ring edge of the pressure plate 122 is smaller than the size of the transparent plate 121, the outer ring edge of the pressure plate 122 is directly pressed on the substrate 120, and the inner ring edge of the pressure plate 122 is pressed on the sealing ring 124 on the transparent plate 121. Then, the outer ring edge of the pressure plate 122 is fixedly connected to the substrate 120 in direct contact, and the structural installation of the cover plate 12 is completed. The structure of the cover plate 12 can use the transparent plate 121 and the observation port 123 to realize direct observation of the interior of the loading chamber.

[0043] It can be understood that the transparent plate 121 can be a plate with high transparency such as a quartz plate or a glass plate, while the substrate 120 and the pressure plate 122 are metal plates. In this case, the sealing ring 124 arranged between the substrate 120 and the transparent plate 121 and the sealing ring 124 arranged between the transparent plate 121 and the pressure plate 122, in addition to the sealing function, can also prevent the transparent plate 121 made of brittle material from coming into direct contact with the substrate 120 and the pressure plate 122 made of metal plates and causing them to break, and play a buffering role between the substrate 120 and the transparent plate 121 and between the transparent plate 121 and the pressure plate 122.

[0044] Specifically, the substrate 120 is provided with a receiving portion around the observation port 123, and the receiving portion includes a first recessed portion 1201 and a second recessed portion 1202. The surface of the substrate 120 facing the pressing plate 122 is recessed to form the first recessed portion 1201, and the bottom surface of the first recessed portion 1201 near the observation port 123 is recessed to form the second recessed portion 1202; the side surface of the transparent plate 121 protrudes outward to form a lap portion 1210, and the bottom surface of the lap portion 1210 is placed on the bottom surface of the second recessed portion 1202; the bottom surface of the second recessed portion 1202 is provided with a first sealing groove 1201. 3. A first sealing ring 1241 is disposed in the first sealing groove 1203; a second sealing groove 1204 is formed on the side wall 101 of the second recessed portion 1202, and a second sealing ring 1242 is disposed in the second sealing groove 1204; the inner wall of the pressing plate 122 extends inward to form a pressing portion 1220, the bottom surface of the pressing plate 122 is placed on the bottom surface of the first recessed portion 1201, and the pressing portion 1220 covers at least part of the upper surface of the overlapping portion 1210; a third sealing groove 1221 is formed on the bottom surface of the pressing portion 1220, and a third sealing ring 1243 is disposed in the third sealing groove 1221. Figure 7 and Figure 8As shown, an observation port 123 is provided in the middle of the substrate 120, and a receiving portion is provided on the substrate 120 along the periphery of the observation port 123, the receiving portion comprising a first recessed portion 1201 provided around the observation port 123 and a second recessed portion 1202 located between the first recessed portion 1201 and the observation port 123, the recessed depth of the second recessed portion 1202 being greater than the first recessed portion 1201; the side surface of the transparent plate 121 protrudes outward to form a lap portion 1210, the bottom surface of the lap portion 1210 is placed on the bottom surface of the second recessed portion 1202, and at this time, the side surface of the lap portion 1210 faces the side wall where the second recessed portion 1202 and the first recessed portion 1201 are connected. 101, by opening a first sealing groove 1203 on the bottom surface of the second recessed portion 1202, embedding a first sealing ring 1241 in the first sealing groove 1203, and opening a second sealing groove 1204 on the side wall 101 of the second recessed portion 1202, embedding a second sealing ring 1242 in the second sealing groove 1204, the bottom surface of the overlapping portion 1210 of the transparent plate 121 is pressed on the first sealing ring 1241, and the side surface of the receiving portion is against the second sealing ring 1242, so that the transparent plate 121 is prevented from directly contacting the substrate 120, and the first sealing ring 1241 and the second sealing ring 1242 play a buffering role between the substrate 120 and the transparent plate 121. In addition, the bottom surface of the pressing plate 122 is placed on the bottom surface of the first recessed portion 1201, the pressing plate 122 and the substrate 120 are directly in contact and fixedly connected through the first recessed portion 1201, and the inner wall of the annular pressing plate 122 extends inwardly to form a pressing portion 1220, and the pressing portion 1220 covers at least part of the overlapping portion 1210 of the transparent plate 121, thereby limiting the transparent plate 121 between the substrate 120 and the pressing plate 122. A third sealing groove 1221 is formed on the bottom surface of the pressing portion 1220 of the pressing plate 122, and a third sealing ring 1243 is embedded in the third sealing groove 1221. The third sealing ring 1243 is pressed on the upper surface of the overlapping portion 1210 of the transparent plate 121, so that the pressing portion 1220 of the pressing plate 122 does not directly contact the upper surface of the overlapping portion 1210 of the transparent plate 121, and the third sealing ring 1243 plays a buffering role between the transparent plate 121 and the pressing plate 122.

[0045] In one embodiment, a photoelectric detection mechanism 125 is installed on the transparent plate 121, and the photoelectric detection mechanism 125 is used to detect whether there is a wafer on the epitaxial tray 18. By setting the photoelectric detection mechanism 125 on the transparent plate 121, it is possible to detect whether there is a wafer on the epitaxial tray 18, and then control the external robot to select to pick up or transport the wafer on the epitaxial tray 18 according to the detection result, so as to prevent the wafer from being picked up by mistake or failing to be picked up.

[0046] In one embodiment, a handle 126 is disposed at the second end of the base plate 120. By disposing the handle 126 at the second end of the base plate 120, it is convenient to manually open and close the cover plate 12 when needed.

[0047] The embodiment of the present application also provides an epitaxial growth device (not shown), including a reaction chamber, a transfer chamber and a loading chamber, wherein the loading chamber is the loading chamber described in any of the above embodiments. The epitaxial growth device may be a silicon carbide epitaxial device, wherein the wafer to be reacted in the loading chamber is transferred to the reaction chamber by a robot in the transfer chamber, so that the wafer is epitaxially grown in the reaction chamber by a vapor phase growth technique, and the wafer after the reaction is completed is then transferred to the loading chamber by a robot in the transfer chamber.

[0048] In an embodiment of the present application, in the loading chamber of the epitaxial growth equipment, at least one switch door assembly 14 is set, and the switch door assembly 14 includes a first transmission member 140 and a first driving member 141. The first driving member 141 is connected to the second end of the first transmission member 140, and the first end of the first transmission member 140 is connected to the cover plate 12. The first driving member 141 is used to control the movement of the first transmission member 140 so that the first transmission member 140 drives the cover plate 12 to rotate, so that the cover plate 12 closes or opens the accommodating chamber 102; therefore, the loading chamber of the epitaxial growth equipment of the present application can automatically control the opening and closing of the cover plate 12 through the first driving member 141, without manual operation, reducing the safety hazards caused by human operation during the operation of the equipment, and having high working efficiency and safety. A strip hole 103 for accommodating the first transmission member 140 is opened on the second side plate 1012 adjacent to the first side plate 1011 connected to the cover plate 12. Since the positions of the first transmission member 140 are different when the cover plate 12 closes the accommodating cavity 102 and when the cover plate 12 opens the accommodating cavity 102, the strip hole 103 has space for accommodating the first transmission member 140 in different positions, thereby ensuring the control stability of the opening and closing door assembly 14.

[0049] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0050] Those skilled in the art should recognize that the above embodiments are only used to illustrate the present application and are not used as limitations on the present application. As long as they are within the spirit of the present application, appropriate changes and modifications to the above embodiments are within the scope of protection required by the present application.

Claims

1. A loading chamber, characterized in that: The loading chamber comprises: A chamber body, the chamber body comprising a bottom plate and a side wall connected to the bottom plate, the bottom plate and the side wall forming a receiving cavity, and the receiving cavity is used to place an epitaxial tray; A cover plate, the cover plate is arranged on a side of the side wall away from the bottom plate, one end of the cover plate is hinged to the first side plate in the side wall, and the cover plate is used to close the accommodating cavity; at least one switch door assembly, the switch door assembly comprising a first transmission member and a first driving member, the first end of the first transmission member being connected to the cover plate to drive the cover plate to rotate so that the cover plate closes or opens the accommodating cavity; the first driving member being connected to the second end of the first transmission member to control the movement of the first transmission member so that the first transmission member drives the cover plate to rotate; Among them, a second side plate adjacent to the first side plate in the side wall is provided with a strip hole, the strip hole extends from an end of the second side plate close to the cover plate to an end of the second side plate close to the bottom plate, and the first transmission member is inserted into the strip hole; the first end of the first transmission member is hinged to the side of the cover plate facing the bottom plate, the fixed end of the first driving member is fixedly connected to the second side plate, the output end of the first driving member is inserted into the strip hole, and the output end of the first driving member is hinged to the second end of the first transmission member.

2. The loading chamber according to claim 1, characterized in that: The switch door assemblies are provided with two, and the two switch door assemblies are respectively provided corresponding to the two second side panels adjacent to the first side panel in the side wall, and the first driving members of the two switch door assemblies are started and stopped synchronously, so as to simultaneously control the movement of the correspondingly connected first transmission members; and / or, The first driving member comprises a driving cylinder, and both ends of the driving cylinder are provided with an interlocking mechanism comprising a pilot-operated one-way valve.

3. The loading chamber according to claim 1, characterized in that: The loading chamber also includes a locking door assembly; The door lock assembly includes a first engaging member and a second engaging member, wherein the first engaging member is disposed on the cover plate, and the second engaging member is disposed on the side wall. When the cover plate is close to the side wall and closes the accommodating cavity, the first engaging member engages with the second engaging member.

4. The loading chamber according to claim 3, characterized in that: A receiving groove is formed on another side plate of the side wall that is different from the first side plate, and the receiving groove extends from an end of the other side plate close to the cover plate to an end of the other side plate close to the bottom plate; The first engaging member includes a connecting portion and a first engaging portion, wherein the connecting portion extends from a side of the cover plate toward the bottom plate in a direction away from the cover plate, and the first engaging portion is disposed at one end of the connecting portion away from the cover plate, and when the cover plate is close to the side wall and closes the accommodating cavity, the first engaging portion is accommodated in the accommodating groove; The second engaging member includes a second transmission member, a second driving member and a second engaging portion, the second transmission member is accommodated in the accommodating groove, the middle portion of the second transmission member is hinged to the groove wall of the accommodating groove, the first end of the second transmission member is provided with the second engaging portion, the fixed end of the second driving member is fixedly connected to the other side plate, the output end of the second driving member is inserted into the accommodating groove, and the output end of the second driving member is hinged to the second end of the second transmission member; When the output end of the second driving member drives the second end of the second transmission member to move, the first end of the second transmission member is driven to rotate around the middle of the second transmission member, so that the second engaging portion is engaged with or separated from the first engaging portion.

5. The loading chamber according to claim 4, characterized in that: The door lock assembly is provided with two, the other side panels are two second side panels in the side wall adjacent to the first side panel, the two door lock assemblies are respectively provided corresponding to the two second side panels, the second driving members of the two door lock assemblies are started and stopped synchronously, so as to simultaneously control the movement of the correspondingly connected second transmission members; and / or, The door lock assembly is provided with one, the other side panel is a third side panel in the side wall opposite to the first side panel; and / or, The door lock assembly also includes a detection sensor, which is electrically connected to the second drive member. The detection sensor is used to control the output end of the second drive member to drive the second end of the second transmission member to move.

6. The loading chamber according to claim 1, characterized in that: The bottom plate is provided with an air inlet and an air outlet, and the air inlet and the air outlet are both connected to the accommodating cavity; and / or, The side wall is provided with a material taking opening, and the material taking opening is used for an external robot to extend into the accommodating cavity to take and place the extension tray.

7. The loading chamber according to claim 1, characterized in that: The cover plate includes a stacked substrate, a transparent plate and a pressure plate, the first end of the substrate is hinged to the first side plate, an observation port is opened in the middle of the substrate, the edge of the transparent plate is placed on the substrate and covers the observation port, the pressure plate is annular, and covers the edge of the transparent plate and at least part of the substrate; sealing rings are provided between the transparent plate and the substrate, and between the transparent plate and the pressure plate, and the sealing rings form gaps between the transparent plate and the substrate and the pressure plate.

8. The loading chamber according to claim 7, characterized in that: The substrate is provided with a receiving portion around the observation port, the receiving portion includes a first recessed portion and a second recessed portion, the surface of the substrate facing the pressing plate is recessed to form the first recessed portion, and the bottom surface of a portion of the first recessed portion close to the observation port is recessed to form the second recessed portion; The side surface of the transparent plate protrudes outward to form an overlap portion, and the bottom surface of the overlap portion is placed on the bottom surface of the second recessed portion; the bottom surface of the second recessed portion is provided with a first sealing groove, and a first sealing ring is arranged in the first sealing groove; the side wall of the second recessed portion is provided with a second sealing groove, and a second sealing ring is arranged in the second sealing groove; The inner wall of the pressing plate extends inward to form a pressing portion, the bottom surface of the pressing plate is placed on the bottom surface of the first recessed portion, and the pressing portion covers at least a portion of the upper surface of the overlapping portion; a third sealing groove is opened on the bottom surface of the pressing portion, and a third sealing ring is arranged in the third sealing groove.

9. The loading chamber according to claim 7, characterized in that: A photoelectric detection mechanism is mounted on the transparent plate, and the photoelectric detection mechanism is used to detect whether there is a wafer on the epitaxial tray; and / or, A handle is provided at the second end of the base plate.

10. An epitaxial growth device, characterized in that: The epitaxial growth equipment comprises the loading chamber according to any one of claims 1-9.

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