Vacuum interconnection system

Abstract

The invention provides a vacuum interconnection system which comprises a transfer cavity, a plurality of sub-cavities, a plurality of transmission pipelines, a transmission component and a transmission trolley, each transmission pipeline is communicated with the corresponding sub-cavity and the transfer cavity, the transmission component is installed on the transmission pipeline, and the transmission trolley is arranged in the transmission pipeline. And the transmission part is used for driving the transmission trolley to move and enter the transfer cavity and the sub-cavities. The transfer cavities are communicated through the conveying pipeline, the conveying trolley is driven by the conveying component to move in the conveying pipeline, so that samples on the conveying trolley are conveyed into the corresponding cavities, the whole conveying process is convenient and simple, and the system is simple in structure and high in reliability.

Description

Technical Field

[0001] The present application belongs to the technical field of vacuum interconnection equipment, and specifically, relates to a vacuum interconnection system. Background Art

[0002] Traditional integrated circuit micro-nano manufacturing is usually carried out in a clean room mode. In the future, atomic-level manufacturing of integrated circuits involves ultra-thin two-dimensional channel materials, which are very sensitive to their surface and interface states and must be carried out under vacuum. Under normal atmospheric pressure, it only takes a few nanoseconds for the surface of the material to adsorb various gas molecules and change its properties; in an ultra-high vacuum environment, the adsorption time can be extended to several hours, which will be sufficient time to process and manufacture ultra-thin two-dimensional channel materials. Therefore, vacuum interconnection equipment is of great significance to the future manufacturing of integrated circuits.

[0003] In vacuum interconnected equipment, how to transfer samples between different devices is extremely important. Summary of the invention

[0004] The technical problem solved by this application is: how to realize the movement of samples in a vacuum interconnected system.

[0005] The present application discloses a vacuum interconnection system, which comprises:

[0006] Transfer chamber;

[0007] A number of sub-cavities;

[0008] A plurality of transmission pipelines, each of which is connected to the sub-cavity and the transfer cavity;

[0009] A transmission component, wherein the transmission component is installed on the transmission pipeline;

[0010] A transfer trolley is disposed in the transfer pipe, and the transfer component is used to drive the transfer trolley to move and enter the transfer cavity and the sub-cavity.

[0011] Optionally, the vacuum interconnection system further comprises a sample transfer mechanism, which is installed in the transfer chamber and the sub-chamber, and is used to transfer the sample to the transfer trolley or to remove the sample from the transfer trolley.

[0012] Optionally, the sample transfer mechanism comprises a sampling frame and a moving component, wherein the sampling frame and the moving component are used to drive the sampling frame.

[0013] Optionally, the transmission component includes a guide rail and a rack drive assembly, the transmission trolley is carried on the guide rail, and the rack drive assembly is used to drive the transmission trolley to move along the guide rail.

[0014] Optionally, the rack drive assembly includes a rack and a plurality of drive gears, the drive gears are arranged in sequence and arranged in intervals and pass through the transmission pipe, the rack is connected to the transmission trolley and the rack is meshed with the drive gears.

[0015] Optionally, the transport trolley includes a base, a roller and a sample carrying platform, the sample carrying platform is arranged on the base, and the roller is carried by the guide rail.

[0016] Optionally, the side walls of the transfer cavity and the sub-cavity are both provided with transmission windows, and the transmission windows are sealedly connected to the transmission pipeline.

[0017] Optionally, the transfer chamber has a plurality of transmission windows, and the plurality of transmission windows are arranged around a side wall of the transfer chamber.

[0018] The vacuum interconnection system provided by the present application has the following technical effects:

[0019] The various transfer cavities are connected by transmission pipelines, and the transmission trolley is driven to move in the transmission pipeline by the transmission components, so that the samples on the transmission trolley are transported to the corresponding cavities. The overall transmission process is convenient and simple, and the system structure is simple and reliable. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a schematic diagram of a three-dimensional structure of a vacuum interconnection system according to one or more embodiments;

[0021] Figure 2 is a partial structural schematic diagram of a vacuum interconnection system according to one or more embodiments;

[0022] Figure 3 A partial structural exploded diagram of a vacuum interconnection system according to one or more embodiments.

[0023] The corresponding relationship between the reference numerals and the component names is as follows:

[0024] 10-transfer chamber, 11-transmission window, 12-valve, 20-transmission pipeline, 30-transmission component, 31-guide rail, 32-rack, 33-driving gear, 40-transmission trolley, 41-base, 42-roller, 43-sample carrier, 50-sample transfer mechanism, 51-sampling frame, 52-moving component, 60-sub-chamber. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0026] Before describing the various embodiments of the present application in detail, the technical concept of the present application is briefly described first: it is of great significance to realize the transmission of samples in vacuum interconnection equipment. For this purpose, the present application provides a vacuum interconnection system, which uses a transmission pipeline to connect the transfer cavity and each sub-cavity, and drives the transmission trolley to move in the transmission pipeline through the transmission component, so that the sample on the transmission trolley is transported to the corresponding transfer cavity and each sub-cavity. The overall transmission process is convenient and simple, and the system structure is simple and reliable. The specific principle of the vacuum interconnection system of the present application is described below in combination with more embodiments.

[0027] Specifically, Figure 1 and Figure 2 As shown, the vacuum interconnection system includes a transfer chamber 10, a plurality of sub-chambers 60, a plurality of transmission pipes 20, a transmission component 30, and a transmission trolley 40. The transmission pipe 20 connects two transfer chambers 10, the transmission component 30 is installed in the transmission pipe 20, the transmission trolley 40 is arranged in the transmission pipe 20, and the transmission component 30 is used to drive the transmission trolley 40 to move. Among them, the number of transfer chambers 10 is multiple, and each transfer chamber 10 can be connected in sequence, or one transfer chamber 10 can be connected to multiple transfer chambers 10 at the same time. The samples can be transferred between each transfer chamber 10 through the transmission component 30 and the transmission trolley 40.

[0028] In one or more embodiments, Figure 2 and Figure 3 As shown, the transmission component 30 includes a guide rail 31 and a rack drive assembly, the transmission trolley 40 is carried on the guide rail 31, and the rack drive assembly is used to drive the transmission trolley 40 to move along the guide rail 31. There are two guide rails 31. Exemplarily, the rack drive assembly includes a rack 32 and a plurality of drive gears 33, each of which is arranged in sequence and penetrates the transmission pipeline, and the rack 32 is connected to the transmission trolley 40 and the rack 32 is meshed with the drive gear 33. The rack 32 is located between the two guide rails 31.

[0029] Exemplarily, the length of the rack 32 is greater than twice the distance between two adjacent driving gears 33 , so as to ensure that the rack 32 is meshed with at least two driving gears 33 and ensure the stability of the movement of the rack 32 .

[0030] Exemplarily, the guide rail 31 and the rack 32 extend into the transfer cavity 10 , which makes it convenient to directly transfer the transfer cart 40 into each transfer cavity 10 .

[0031] In one or more embodiments, Figure 3 As shown, the transport trolley 40 includes a base 41, rollers 42 and a sample carrier 43, the sample carrier 43 is arranged on the base 41, and the rollers 42 are carried on the guide rails 31. Exemplarily, the guide rails 31 are cylindrical guide rails, the rollers 42 are carried on the guide rails 31 on both sides, the racks 32 are connected to the bottom of the base 41, and the racks 32 drive the transport trolley 40 to move forward or backward when rotating, thereby realizing sample transmission.

[0032] In one or more embodiments, the vacuum interconnection system further includes a sample transfer mechanism 50 , which is installed in the transfer chamber 10 , and is used to transfer the sample to the transfer cart 40 or to remove the sample from the transfer cart 40 .

[0033] Exemplarily, the sample transfer mechanism 50 includes a sampling frame 51 and a moving component 52, wherein the sampling frame 51 and the moving component 52 are installed in the transfer chamber 10 and are used to drive the sampling frame 51. The moving component 52 is driven by a cylinder, and the moving component 52 drives the sampling frame 51 to move up and down, thereby transferring the sample on the sampling head to the sample carrier 43 of the transport trolley 40, or removing the sample from the sample carrier 43 of the transport trolley 40, thereby realizing the transfer of the sample. The sample transfer mechanism 50 transfers the sample in the vertical direction, and the transport trolley 40 transfers the sample in the horizontal direction, thereby realizing the transfer of the sample in multiple dimensions.

[0034] In one or more embodiments, the side walls of the transfer chamber 10 and the sub-chamber 60 are provided with a transmission window 11, and the transmission window 11 is sealed and connected to the transmission pipeline 20. The transmission window 11 is not provided with a valve, and the transmission component 30 can pass through the transmission window 11 and extend into the transfer chamber 10 and each sub-chamber 60, and the transmission trolley 40 can pass through the transmission window 11.

[0035] Exemplarily, the number of each transmission window 11 on the transfer chamber 10 is multiple, and the multiple transmission windows 11 are arranged around the side wall of the transfer chamber 10. By setting multiple transmission windows 11, the transfer chamber 10 can be connected with multiple sub-chambers 60, or the transfer chamber 10 can be switched to connect to different sub-chambers 60, or the transfer chamber 10 can be connected to different devices through the transmission window 11, so as to achieve the expansion and adjustment of the vacuum interconnection system. For example, the transfer chamber 10 located in the middle is connected to four different sub-chambers 60 and two different devices. Exemplarily, the transmission windows 11 that are not needed can be sealed with valves 12.

[0036] The vacuum interconnection system provided in this embodiment utilizes a transmission pipeline to connect the transfer chamber and each sub-chamber, and drives the transmission cart to move in the transmission pipeline through the transmission component, so that the samples on the transmission cart are transported to the corresponding chamber. The overall transmission process is convenient and simple, and the system structure is simple and reliable.

[0037] The specific implementation methods of the present application are described in detail above. Although some embodiments have been shown and described, those skilled in the art should understand that these embodiments can be modified and improved without departing from the principles and spirit of the present application whose scope is defined by the claims and their equivalents. These modifications and improvements should also be within the scope of protection of the present application.

Claims

1. A vacuum interconnection system, characterized in that: The vacuum interconnection system comprises: Transfer chamber; A number of sub-cavities; A plurality of transmission pipelines, each of which is connected to the sub-cavity and the transfer cavity; A transmission component, wherein the transmission component is installed on the transmission pipeline; A transfer trolley is disposed in the transfer pipe, and the transfer component is used to drive the transfer trolley to move and enter the transfer cavity and the sub-cavity.

2. The vacuum interconnection system according to claim 1, characterized in that: The vacuum interconnection system further comprises a sample transfer mechanism, which is installed in the transfer chamber and the sub-chamber, and is used to transfer the sample to the transfer trolley or to take the sample from the transfer trolley.

3. The vacuum interconnection system according to claim 2, characterized in that: The sample transfer mechanism comprises a sampling frame and a moving component, wherein the sampling frame and the moving component are used to drive the sampling frame.

4. The vacuum interconnection system according to claim 1, characterized in that: The transmission component includes a guide rail and a rack drive assembly. The transmission trolley is carried on the guide rail. The rack drive assembly is used to drive the transmission trolley to move along the guide rail.

5. The vacuum interconnection system according to claim 4, characterized in that: The rack drive assembly includes a rack and a plurality of driving gears, each of which is arranged in sequence and spaced apart and penetrates the transmission pipe, the rack is connected to the transmission trolley and the rack is meshed with the driving gears.

6. The vacuum interconnection system according to claim 4, characterized in that: The transport trolley comprises a base, rollers and a sample carrying platform, wherein the sample carrying platform is arranged on the base, and the rollers are carried on the guide rails.

7. The vacuum interconnection system according to claim 1, characterized in that: The side walls of the transfer cavity and the sub-cavity are both provided with transmission windows, and the transmission windows are sealed and connected to the transmission pipeline.

8. The vacuum interconnection system according to claim 7, characterized in that: The transfer chamber has a plurality of transmission windows, and the plurality of transmission windows are arranged around the side wall of the transfer chamber.

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