Valve cylinder control device and design method

Abstract

The invention relates to the technical field of valve air cylinder control, in particular to a valve air cylinder control device and a design method.The valve air cylinder control device comprises a control valve body, two sealing rings, two poking springs, two supporting supports, two exhaust channels, a transverse pushing air cylinder and a rising air cylinder; and sealing rings are arranged on the right sides of the air hole A and the air hole B. In this way, the problems that in the prior art, due to mechanical structure defects in design, inaccurate model selection of springs and the like, too small air pressure adjusting ranges of an air inlet and an air outlet and the like, the two air cylinders always move at the same time are solved; and the actual performance of opening and closing the door is that the sealing door plate is rubbed when being separated from and pressed to the sealing surface, so that particulate matters are separated out to damage the vacuum environment and pollute wafer products.

Description

Technical Field

[0001] The present invention relates to the technical field of valve cylinder control, and in particular to a valve cylinder control device and a design method. Background Art

[0002] At present, for vacuum isolation valves in the semiconductor field, in particular, an L-type switching action is realized, that is, when closing the door, the upward push cylinder is first used to push the sealing door plate to rise vertically, and after the door plate rises to the designed position, the horizontal push cylinder is used to push the sealing door plate to move horizontally and press against the sealing surface, thereby finally realizing the chamber sealing; when opening the door, the horizontal push cylinder is first used to pull back the sealing door plate to move horizontally away from the sealing surface, and after the sealing door plate is separated from the designed position, the upward push cylinder is used to pull back the sealing door plate to drop vertically, thereby realizing the L-type opening and closing action.

[0003] However, due to mechanical structural defects in the design, inaccurate selection of springs, and too small air pressure adjustment range at the air inlet and exhaust ports, the existing valve control devices always cause the two cylinders to move at the same time. The actual manifestation on the door opening and closing is that the sealing door panel will rub against the sealing surface when it is separated and pressed against the sealing surface, which will cause particulate matter to precipitate, destroy the vacuum environment and contaminate the wafer products. Summary of the invention

[0004] The purpose of the present invention is to provide a valve cylinder control device and a design method, aiming to solve the technical problem in the prior art that due to mechanical structural defects in the design, inaccurate selection of springs, etc., and too small air pressure adjustment range of the air inlet and exhaust ports, two cylinders always move at the same time. The actual manifestation on the opening and closing door is that the sealing door panel will rub against the sealing surface when it is separated and pressed against the sealing surface, which will cause the precipitation of particulate matter to destroy the vacuum environment and contaminate the wafer products.

[0005] To achieve the above-mentioned purpose, the present invention adopts a valve cylinder control device, including a control valve body, two sealing rings, two push springs, two support seats, two exhaust channels, a horizontal push cylinder and a rising cylinder, the control valve body is provided with air hole A, air hole B, air hole C and air hole D, the air hole A and the air hole B are both provided with the sealing ring on the right side, the sealing ring is provided with the corresponding push spring on the right side, and the push spring is connected to the corresponding support seat on the right side, the control valve body also has a first chamber and a second chamber, the first chamber and the second chamber are respectively connected to the air hole C and the air hole D, the exhaust channel is arranged on the corresponding support seat, the S end of the rising cylinder is connected to the air hole A and the gas channel M of the vacuum isolation door, and the R end of the horizontal push cylinder is connected to the air hole B and the gas channel N of the vacuum isolation door.

[0006] Wherein, the support base is provided with a central through hole, and the central through hole is used to connect and install the corresponding exhaust channel.

[0007] Wherein, each of the exhaust passages is provided with a rounded corner structure.

[0008] Wherein, each of the exhaust passages is provided with a polygonal force-applying portion.

[0009] The present invention also provides a design method for a valve cylinder control device, which is used to design the valve cylinder control device as described above.

[0010] The specific method is as follows:

[0011] The cross-sectional area of ​​the piston A of the ascending cylinder is set to S1. When M is ventilated, when the piston A of the ascending cylinder starts to move upward, the gas pressure is P1, and the system gravity and other resistance is F1;

[0012] The preload of the toggle spring in the first chamber at the initial installation position is set to F S1 , the left surface area of ​​the torsion spring in the first chamber is S2, when the torsion spring in the first chamber is pushed, the air pressure is P2, the moving distance of the torsion spring in the first chamber is x1, and the elastic coefficient of the torsion spring in the first chamber is k1;

[0013] The preload of the toggle spring in the second chamber at the initial installation position is set to F S2 , the left surface area of ​​the torsion spring in the second chamber is S3, when the torsion spring in the second chamber is pushed, the air pressure is P3, the moving distance of the torsion spring in the second chamber is x2, and the elastic coefficient of the torsion spring in the second chamber is k2.

[0014] Among them, the pressures P1 and P2 should satisfy the following formula:

[0015] Formula 1: P1*S1≥F1;

[0016] Formula 2: P2*S2≥F S1 -k1*x1;

[0017] Formula 3: P3*S3≥F S2 -k2*x2;

[0018] According to equations 1 and 2, the gas pressure range of M can be obtained as:

[0019]

[0020] The gas pressure range of N is:

[0021]

[0022] In order to adjust the gas pressure, throttle valves are provided before the gas passages M and N of the vacuum isolation door and after the two exhaust passages.

[0023] A valve cylinder control device and design method of the present invention, when used specifically, when gas enters the rising cylinder from the solenoid valve island through M, due to the low initial air pressure, it is not enough to push the piston A in the rising cylinder to move upward. As the gas enters, the cylinder pressure gradually increases; when the upward pressure on the piston A due to the air pressure is greater than the gravity of the device and the static friction in the entire system (the air pressure range is 0.3MPa to 0.7MPa at this time), the piston A starts to move upward, pushing the sealing door plate to move upward, and the gas at the E end of the rising cylinder is discharged from the air hole D. At this time, the right end of the sealing ring in the second chamber is separated from the support support, and the gas is further discharged from the air hole through the corresponding central through hole of the support support to the corresponding exhaust channel, and then discharged into the atmosphere;

[0024] When piston A rises to the mechanical limit point P1, piston A stops due to the limit and completes the vertical movement. At this time, the gas still rushes in, causing the pressure of the cavity to continue to increase, that is, the pressure of the air hole A continues to increase. When the air pressure increases to a level sufficient to push the sealing ring in the second chamber to compress the corresponding torsion spring, the sealing ring separates from the inner wall of the first chamber, so that the air hole A is connected to the first chamber, and the gas begins to enter the first chamber from the air hole A, and then enters the P end of the horizontal thrust cylinder through the air hole. As the gas continues to The air pressure at the P end increases. When the air pressure increases to the point where the piston B of the push cylinder moves to the right, the push cylinder drives the sealing door plate to the right and approaches the sealing surface. At this time, the air pressure at the R end increases because the piston B moves to the right. However, since the air pressure at the air hole D is much greater than the pressure at the air hole B, the corresponding sealing ring cannot be compressed. The gas will be discharged from N to the solenoid valve island and then to the atmosphere. When the designed stroke point P2 is reached, the sealing door plate is close to the sealing surface, the horizontal movement stops, and the sealing action is completed, i.e., L-type sealing.

[0025] When the gas enters the horizontal thrust cylinder from the solenoid valve island through N, due to the low initial air pressure, it is not enough to push the piston B of the horizontal thrust cylinder to move to the left. As the gas enters, the cylinder pressure gradually increases. When the leftward pressure on the piston B due to the air pressure is greater than the static friction in the entire system (the air pressure range is 0.3MPa~0.7MPa at this time), the piston B starts to move to the left, driving the sealing door plate to start to separate from the sealing surface, and the gas at the P end of the horizontal thrust cylinder is discharged from the air hole C. At this time, because the sealing ring in the first chamber is separated from the first chamber, the air hole C is connected to the air hole A, and the gas is further slowly discharged from M to the solenoid valve island, and then discharged into the atmosphere;

[0026] Because the stroke of the horizontal thrust cylinder is only 2mm, the whole process lasts within milliseconds, and because as long as the gas from the air hole A is discharged a little, the air pressure is reduced a little, so that the torsion spring in the first chamber immediately pushes the corresponding sealing ring to the wall of the first chamber, so that the air hole A and the air hole C are not conductive, the sealing ring and the torsion spring in the first chamber return to the initial state, and the right end of the sealing ring is separated from the corresponding support seat. At this time, the gas at the P end of the horizontal thrust cylinder is connected to the corresponding exhaust channel from the air hole C through the corresponding central through hole of the support seat; the pressure at the S end of piston A can also maintain piston A at the P1 position; when piston B moves to the mechanical limit point P4, piston B stops due to the limit, and the sealing plate is completely separated from the sealing surface, and the sealing plate moves horizontally. The movement is completed, and the gas still rushes in, causing the pressure of the cavity to continue to increase, that is, the pressure of the air hole B continues to increase; when the air pressure increases to a level sufficient to push the sealing ring in the second chamber to compress the corresponding torsion spring, the sealing ring in the second chamber breaks away from the inner wall of the second chamber, so that the air hole B is connected to the second chamber, and the gas begins to enter the second chamber from the air hole B, and then enters the E end of the rising cylinder through the air hole D; as the gas continues to enter, the air pressure at the E end increases, and when the air pressure increases to a level that can push the piston A of the rising cylinder to move downward, the rising cylinder drives the sealing door plate to move downward; at this time, the gas at the S end will continue to be discharged from M to the solenoid valve island, and then discharged into the atmosphere; when the designed stroke point P3 is reached, the sealing door plate is completely lowered, and the unsealing action is completed, that is, L-type unsealing;

[0027] In this way, the technical problem in the prior art that due to mechanical structural defects in design, inaccurate selection of springs, etc., and too small air pressure adjustment range at the air inlet and exhaust ports, the two cylinders always move at the same time is solved. The actual manifestation on the opening and closing door is that the sealing door panel will rub against the sealing surface when it is separated and pressed against the sealing surface, which will cause particle precipitation, destroying the vacuum environment and contaminating the wafer products. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 It is a structural schematic diagram of the valve cylinder control device of the present invention.

[0030] Figure 2It is a structural sectional view of the valve cylinder control device of the present invention.

[0031] Figure 3 It is a structural schematic diagram of the connection between the horizontal thrust cylinder and the lifting cylinder of the present invention.

[0032] Figure 4 It is a schematic diagram of the L-shaped sealing logic when the gas passage M of the vacuum isolation door of the present invention is inflated.

[0033] Figure 5 It is a schematic diagram of the L-shaped unsealing logic when the gas channel N of the vacuum isolation door of the present invention is inflated.

[0034] 1- control valve body, 2- sealing ring, 3- spring, 4- support seat, 5- exhaust channel, 6- horizontal push cylinder, 7- rising cylinder, 8- air hole A, 9- air hole B, 10- air hole C, 11- air hole D, 12- first chamber, 13- second chamber, 14- center through hole, 15- chamfered structure, 16- polygonal force applying part, 17- piston A, 18- piston B. DETAILED DESCRIPTION

[0035] Embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, but should not be construed as limiting the present invention.

[0036] See also Figure 1 to Figure 5 ,in Figure 1 is a schematic structural diagram of the valve cylinder control device of the present invention, Figure 2 is a structural sectional view of the valve cylinder control device of the present invention, Figure 3 It is a schematic diagram of the structure of the connection between the horizontal thrust cylinder and the lifting cylinder of the present invention. Figure 4 This is a schematic diagram of the L-shaped sealing logic when the gas channel M of the vacuum isolation door of the present invention is inflated. Figure 5 It is a logical schematic diagram of L-type unsealing when the gas channel N of the vacuum isolation door of the present invention is inflated.

[0037] The present invention provides a valve cylinder control device, comprising a control valve body 1, two sealing rings 2, two torsion springs 3, two supporting seats 4, two exhaust passages 5, a horizontal push cylinder 6 and a rising cylinder 7, wherein the control valve body 1 is provided with an air hole A8, an air hole B9, an air hole C10 and an air hole D11, the air hole A8 and the air hole B9 are both provided with the sealing ring 2 on the right side, the sealing ring 2 is provided with the corresponding torsion spring 3 on the right side, and the corresponding supporting seat 4 is connected to the right side of the torsion spring 3, the control valve body 1 also has a first chamber 12 and a second chamber 13, the first chamber 12 and the second chamber 13 are respectively connected with the air hole C10 and the air hole D11, the exhaust passage 5 is provided on the corresponding supporting seat 4, the S end of the rising cylinder 7 is connected with the air hole A8 and the gas passage M of the vacuum isolation door, and the R end of the horizontal push cylinder 6 is connected with the air hole B9 and the gas passage N of the vacuum isolation door;

[0038] The support bracket 4 is provided with a central through hole 14, and the central through hole 14 is used to connect and install the corresponding exhaust channel 5;

[0039] Each of the exhaust passages 5 is provided with a rounded corner structure 15;

[0040] Each of the exhaust passages 5 is provided with a polygonal force-applying portion 16;

[0041] With respect to this specific embodiment, during specific use, when gas enters the rising cylinder 7 from the solenoid valve island through M, due to the low initial air pressure, it is not enough to push the piston A17 in the rising cylinder 7 to move upward. As the gas enters, the cylinder pressure gradually increases; when the upward pressure exerted by the air pressure on the piston A17 is greater than the gravity of the device and the static friction in the entire system (the air pressure range is 0.3MPa to 0.7MPa at this time), the piston A17 starts to move upward, pushing the sealing door plate upward, and the gas at the E end of the rising cylinder 7 is discharged from the air hole D11. At this time, the right end of the sealing ring 2 in the second chamber 13 is separated from the support bracket 4, and the gas is further discharged from the air hole through the corresponding central through hole 14 of the support bracket 4 to the corresponding exhaust channel 5, and then discharged into the atmosphere;

[0042] When the piston A17 rises to the mechanical limit point P1, the piston A17 stops due to the limit and completes the vertical movement. At this time, the gas still rushes in, causing the pressure of the cavity to continue to increase, that is, the pressure of the air hole A8 continues to increase. When the air pressure increases to a level sufficient to push the sealing ring 2 in the second chamber 13 to compress the corresponding torsion spring 3, the sealing ring 2 separates from the inner wall of the first chamber 12, so that the air hole A8 is connected to the first chamber 12, and the gas begins to enter the first chamber 12 from the air hole A8, and then enters the P end of the horizontal thrust cylinder 6 through the air hole. As the gas continues to enter, the air pressure at the P end increases. When the air pressure increases to the point where the piston B18 of the push cylinder 6 moves to the right, the push cylinder 6 drives the sealing door plate to the right and approaches the sealing surface. At this time, the air pressure at the R end increases because the piston B18 moves to the right. However, since the air pressure of the air hole D11 is much greater than the pressure of the air hole B9, the corresponding sealing ring 2 cannot be compressed, and the gas will be discharged from N to the solenoid valve island and then discharged into the atmosphere. When the designed stroke point P2 is reached, the sealing door plate is close to the sealing surface, the horizontal movement stops, and the sealing action is completed, i.e., L-type sealing.

[0043] When the gas enters the horizontal thrust cylinder 6 from the solenoid valve island through N, due to the low initial air pressure, it is not enough to push the piston B18 of the horizontal thrust cylinder 6 to move to the left. As the gas enters, the cylinder pressure gradually increases. When the leftward pressure on the piston B18 caused by the air pressure is greater than the static friction in the entire system (the air pressure range is 0.3MPa~0.7MPa at this time), the piston B18 starts to move to the left, driving the sealing door plate to start to separate from the sealing surface, and the gas at the P end of the horizontal thrust cylinder 6 is discharged from the air hole C10. At this time, because the sealing ring 2 in the first chamber 12 is separated from the first chamber 12, the air hole C10 is connected to the air hole A8, and the gas is further slowly discharged from M to the solenoid valve island, and then discharged into the atmosphere;

[0044] Because the stroke of the horizontal thrust cylinder 6 is only 2mm, the whole process lasts within milliseconds, and because as long as the gas from the air hole A8 is discharged a little, the air pressure is reduced a little, so that the spring 3 in the first chamber 12 immediately pushes the corresponding sealing ring 2 to the wall of the first chamber 12, so that the air hole A8 and the air hole C10 are not conductive, the sealing ring 2 and the spring 3 in the first chamber 12 return to the initial state, and the right end of the sealing ring 2 is separated from the corresponding support seat 4. At this time, the gas at the P end of the horizontal thrust cylinder 6 is connected to the corresponding exhaust channel 5 from the air hole C10 through the corresponding central through hole 14 of the support seat 4; the pressure at the S end of the piston A17 can also maintain the piston A17 at the P1 position; when the piston B18 moves to the mechanical limit point P4, the piston B18 stops due to the limit, and the sealing plate is completely separated from the sealing surface, and the seal is After the horizontal movement of the sealing plate is completed, the gas still rushes in, causing the pressure of the cavity to continue to increase, that is, the pressure of the air hole B9 continues to increase; when the air pressure increases to a level sufficient to push the sealing ring 2 in the second chamber 13 to compress the corresponding torsion spring 3, the sealing ring 2 in the second chamber 13 separates from the inner wall of the second chamber 13, so that the air hole B9 is connected to the second chamber 13, and the gas begins to enter the second chamber 13 from the air hole B9, and then enters the E end of the rising cylinder 7 through the air hole D11; as the gas continues to enter, the air pressure at the E end increases, and when the air pressure increases to a level that can push the piston A17 of the rising cylinder 7 to move downward, the rising cylinder 7 drives the sealing door plate to move downward; at this time, the gas at the S end will continue to be discharged from M to the solenoid valve island, and then discharged into the atmosphere; when the designed stroke point P3 is reached, the sealing door plate is completely lowered, and the unsealing action is completed, that is, L-type unsealing;

[0045] In this way, the technical problem in the prior art that due to mechanical structural defects in design, inaccurate selection of springs, etc., and too small air pressure adjustment range at the air inlet and exhaust ports, the two cylinders always move at the same time is solved. The actual manifestation on the opening and closing door is that the sealing door panel will rub against the sealing surface when it is separated and pressed against the sealing surface, which will cause particle precipitation, destroying the vacuum environment and contaminating the wafer products.

[0046] In order to make the sealed door panel achieve true L-shaped switching action, in addition to the above-mentioned mechanical structure to ensure that the entire cylinder system will not make mistakes in the action logic, the gas pressure regulation is also indispensable.

[0047] Therefore, the present invention also provides a design method of a valve cylinder control device, which is used to design the valve cylinder control device as described above.

[0048] The specific method is as follows:

[0049] The cross-sectional area of ​​the piston A17 of the ascending cylinder 7 is set to S1. When M is ventilated, when the piston A17 of the ascending cylinder 7 starts to move upward, the gas pressure is P1, and the system gravity and other resistance is F1;

[0050] The preload of the torsion spring 3 in the first chamber 12 at the initial installation position is set to F S1 , the left surface area of ​​the torsion spring 3 in the first chamber 12 is S2, when the torsion spring 3 in the first chamber 12 is pushed, the air pressure is P2, the moving distance of the torsion spring 3 in the first chamber 12 is x1, and the elastic coefficient of the torsion spring 3 in the first chamber 12 is k1;

[0051] The preload of the toggle spring 3 in the second chamber 13 at the initial installation position is set to F S2 , the left surface area of ​​the torsion spring 3 in the second chamber 13 is S3, when the torsion spring 3 in the second chamber 13 is pushed, the air pressure is P3, the moving distance of the torsion spring 3 in the second chamber 13 is x2, and the elastic coefficient of the torsion spring 3 in the second chamber 13 is k2.

[0052] Among them, the pressures P1 and P2 should satisfy the following formula:

[0053] Formula 1: P1*S1≥F1;

[0054] Formula 2: P2*S2≥F S1 -k1*x1;

[0055] Formula 3: P3*S3≥F S2 -k2*x2;

[0056] According to equations 1 and 2, the gas pressure range of M can be obtained as:

[0057]

[0058] The gas pressure range of N is:

[0059]

[0060] At the same time, in order to adjust the gas pressure, a throttle valve is added before the gas passages M and N of the vacuum isolation door and after the two exhaust passages 5;

[0061] Its functions are:

[0062] 1. The throttle valve at M adjusts the M intake pressure to make the gas pressure meet The sealing door plate can perform an L-shaped sealing action; the greater the air pressure, the faster the piston A17 of the rising cylinder 7 drives the sealing plate upward;

[0063] 2. The throttle valve at N adjusts the intake pressure at M to make the gas pressure meet The sealing door plate can perform an L-shaped unsealing action; the greater the air pressure, the faster the piston B18 of the horizontal push cylinder 6 drives the sealing plate to separate from the sealing surface;

[0064] 3. The throttle valve behind the exhaust passage 5 connected to the first chamber 12 adjusts the exhaust speed at the E end when the piston A17 of the ascending cylinder 7 ascends. The faster the exhaust, the faster the piston A17 rises, and the faster the sealing door plate rises;

[0065] 4. The throttle valve behind the exhaust passage 5 connected to the second chamber 13 adjusts the exhaust speed at the S end when the piston A17 of the ascending cylinder 7 descends. The faster the exhaust, the faster the piston A17 descends, and the faster the sealing door panel descends;

[0066] 5. These 4-way throttle valves can adjust the exhaust and intake speeds separately.

[0067] What is disclosed above is only a preferred embodiment of the present invention, and it certainly cannot be used to limit the scope of rights of the present invention. Ordinary technicians in this field can understand that all or part of the processes of the above embodiment and equivalent changes made according to the claims of the present invention still fall within the scope of the invention.

Claims

1. A valve cylinder control device, characterized in that: It includes a control valve body, two sealing rings, two push springs, two support seats, two exhaust channels, a horizontal thrust cylinder and a rising cylinder. The control valve body is provided with air hole A, air hole B, air hole C and air hole D. The air hole A and the air hole B are both provided with the sealing rings on the right side. The corresponding push springs are provided on the right side of the sealing rings. The corresponding support seats are connected to the right side of the push springs. The control valve body also has a first chamber and a second chamber. The first chamber and the second chamber are respectively connected to the air hole C and the air hole D. The exhaust channel is arranged on the corresponding support seat. The S end of the rising cylinder is connected to the air hole A and the gas channel M of the vacuum isolation door, and the R end of the horizontal thrust cylinder is connected to the air hole B and the gas channel N of the vacuum isolation door.

2. The valve cylinder control device and design method according to claim 1, characterized in that: The support bracket is provided with a central through hole, and the central through hole is used to connect and install the corresponding exhaust channel.

3. The valve cylinder control device and design method according to claim 2, characterized in that: Each of the exhaust passages is provided with a rounded corner structure.

4. The valve cylinder control device and design method according to claim 3, characterized in that: Each of the exhaust passages is provided with a polygonal force-applying portion.

5. A method for designing a valve cylinder control device, used for designing the valve cylinder control device as claimed in claim 4, characterized in that: The specific method is as follows: The cross-sectional area of ​​the piston A of the ascending cylinder is set to S1. When M is ventilated, when the piston A of the ascending cylinder starts to move upward, the gas pressure is P1, and the system gravity and other resistance is F1; The preload of the toggle spring in the first chamber at the initial installation position is set to F S1 , the left surface area of ​​the torsion spring in the first chamber is S2, when the torsion spring in the first chamber is pushed, the air pressure is P2, the moving distance of the torsion spring in the first chamber is x1, and the elastic coefficient of the torsion spring in the first chamber is k1; The preload of the toggle spring in the second chamber at the initial installation position is set to F S2 , the left surface area of ​​the torsion spring in the second chamber is S3, when the torsion spring in the second chamber is pushed, the air pressure is P3, the moving distance of the torsion spring in the second chamber is x2, and the elastic coefficient of the torsion spring in the second chamber is k2.

6. The design method of the valve cylinder control device according to claim 5, characterized in that: The pressures P1 and P2 should satisfy the following formula: Formula 1: P1*S1≥F1; Formula 2: P2*S2≥F S1 -k1*x1; Formula 3: P3*S3≥F S2 -k2*x2; According to equations 1 and 2, the gas pressure range of M can be obtained as: The gas pressure range of N is:

7. The design method of the valve cylinder control device according to claim 6, characterized in that: In order to adjust the gas pressure, a throttle valve is provided before the gas passages M and N of the vacuum isolation door and after the two exhaust passages.

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