Temperature control device and temperature control method of clean room air conditioning system and clean room air conditioning system

Abstract

The invention discloses a temperature control device and method of a clean room air conditioning system and the clean room air conditioning system.The temperature control device of the clean room air conditioning system comprises a dry-type coil pipe arranged at the air return position of a clean room and used for adjusting the temperature of return air so as to adjust the temperature in the clean room; the phase change energy storage device is arranged on the air outlet side of the dry type coil pipe and used for absorbing or releasing heat of return air through a phase change material when the return air temperature fluctuates, and the stability of the return air temperature is maintained. The problem that in the prior art, return air fluctuation of a clean room air conditioning system affects clean room process production is solved, the temperature stability of the clean room is improved, then the stability of the clean room process production is guaranteed, and the qualification rate of the process production is increased.

Description

Technical Field

[0001] The present invention relates to the technical field of air conditioning, and in particular to a temperature control device and a temperature control method for a clean room air conditioning system, and a clean room air conditioning system. Background Art

[0002] The cleanliness requirements of semiconductor cleanrooms are very strict, and the production environment must be dust-free and sterile. Due to the high requirements for the control of temperature and humidity ratio, the energy consumption of the air conditioning system in the semiconductor cleanroom is very large. The semiconductor cleanroom air conditioning system includes a fresh air unit, fresh air duct, fan filter unit (FFU), dry coil (DCC), pressure sensor, temperature sensor, etc. The dry coil is a device used to provide cooling or heat to the indoor return air. The dry coil is mainly used to eliminate indoor sensible heat to control the indoor temperature.

[0003] In order to maintain the temperature in the semiconductor clean room constant within a certain range, a large amount of cooling capacity is required at the return air, and the temperature of the return air is processed to be close to the temperature required in the semiconductor clean room. The return air of the semiconductor clean room air conditioner is closely related to the operation of the process equipment. When the process equipment is overloaded or the load demand increases, the dry coil adjustment adaptability is poor, resulting in overheating of the return air temperature in a short period of time, resulting in temperature fluctuations in a small range. When there are many devices and they are frequently turned on and off, the problem of temperature fluctuations in a small range is more obvious. The small fluctuations in the return air temperature in a short period of time will eventually lead to temperature fluctuations in the semiconductor clean room, affecting the qualified rate of process production.

[0004] With regard to the problem in the related art that the return air fluctuation of the clean room air conditioning system affects the clean room process production, no effective solution has been proposed yet. Summary of the invention

[0005] The present invention provides a temperature control device and a temperature control method for a clean room air conditioning system, and a clean room air conditioning system, so as to at least solve the problem in the prior art that the return air fluctuation of the clean room air conditioning system affects the process production of the clean room.

[0006] In order to solve the above technical problems, according to one aspect of an embodiment of the present invention, a temperature control device of a clean room air-conditioning system is provided, including: a dry coil, arranged at the return air of the clean room, for adjusting the return air temperature, and then adjusting the temperature in the clean room; a phase change energy storage device, arranged on the air outlet side of the dry coil, for absorbing or releasing the heat of the return air through phase change materials when the return air temperature fluctuates, so as to maintain the stability of the return air temperature.

[0007] Furthermore, the phase change energy storage device includes: an energy storage structure, wherein the phase change material is provided therein for absorbing or releasing heat of return air; wherein the phase change temperature of the phase change material is set corresponding to a preset target temperature of the clean room.

[0008] Furthermore, the phase change energy storage device also includes: a heat conductive material connected to the energy storage structure, for conducting the heat of the energy storage structure to the fresh air unit of the clean room air conditioning system, or conducting the heat of the fresh air unit to the energy storage structure.

[0009] Furthermore, the phase change energy storage device also includes: a heat conduction pipe, in which a heat conduction medium is arranged, one end of the heat conduction pipe is connected to the heat conduction medium inlet of the phase change energy storage device, and the other end is connected to the heat conduction medium outlet of the phase change energy storage device, and the heat conduction pipe passes through the fresh air inlet and the fresh air outlet of the fresh air unit, and is used to heat the heat conduction medium through the fresh air inlet, or cool the heat conduction medium through the fresh air outlet.

[0010] Furthermore, the phase change energy storage device also includes: a heat transfer medium storage box, which is arranged on the heat transfer pipe and is used to store the heat transfer medium; a temperature detection device, which is arranged in the heat transfer medium storage box and is used to detect the temperature of the heat transfer medium; and a circulation pump, which is arranged on the heat transfer pipe and is used to accelerate the flow of the heat transfer medium.

[0011] Furthermore, the phase change energy storage device also includes: a first control valve, located at the fresh air inlet section where the heat pipe passes through the fresh air unit, and is used to control the fresh air inlet to heat the heat transfer medium; a second control valve, located at the fresh air outlet section where the heat pipe passes through the fresh air unit, and is used to control the fresh air outlet to cool the heat transfer medium; a controller, connected to the temperature detection device, the first control valve and the second control valve, and is used to control the switching of the first control valve and the second control valve according to the preset target temperature of the clean room and the temperature of the heat transfer medium.

[0012] According to another aspect of an embodiment of the present invention, a temperature control method for a clean room air conditioning system is provided, which is applied to a temperature control device of a clean room air conditioning system as described above, and the method comprises: obtaining a preset target temperature of the clean room; detecting the temperature of a heat transfer medium in a heat transfer medium storage box; and controlling a heat transfer pipe to perform heat exchange according to the preset target temperature and the temperature of the heat transfer medium.

[0013] Further, controlling the heat transfer pipe for heat exchange according to the preset target temperature and the temperature of the heat transfer medium includes: determining the magnitude relationship between the preset target temperature and the temperature of the heat transfer medium; and controlling the heat transfer pipe for heat exchange according to the magnitude relationship between the preset target temperature and the temperature of the heat transfer medium.

[0014] Furthermore, the heat transfer pipe is controlled to perform heat exchange according to the relationship between the preset target temperature and the temperature of the heat transfer medium, including: when the preset target temperature is greater than the temperature of the heat transfer medium, the first control valve is controlled to be closed and the second control valve is controlled to be opened; when the preset target temperature is less than or equal to the temperature of the heat transfer medium, the first control valve is controlled to be opened and the second control valve is controlled to be closed.

[0015] According to another aspect of the embodiments of the present invention, a clean room air conditioning system is provided, comprising the temperature control device of the clean room air conditioning system as described above.

[0016] According to another aspect of an embodiment of the present invention, there is provided a storage medium comprising computer executable instructions, wherein the computer executable instructions are used to execute the temperature control method of the clean room air conditioning system as described above when executed by a computer processor.

[0017] In the present invention, a return air phase change rectification temperature control scheme is provided, and a phase change energy storage device is set behind the dry coil at the return air, which is used to absorb or release the heat of the return air through the phase change material when the return air temperature fluctuates, so as to maintain the stability of the return air temperature. The above scheme stabilizes the fluctuation of the return air temperature in a small range, reduces the impact of the return air temperature fluctuation, realizes the return air temperature steady flow, avoids the overheating and fluctuation of the return air temperature when the process equipment is overloaded or the load demand increases, and avoids the overheated return air directly blowing to the fan filter unit partition, and the sudden reduction of the load when the equipment is shut down causes the return air temperature to drop, stabilizes the fan filter unit partition air intake, improves the temperature regulation ability of the clean room air conditioning system, improves the temperature stability of the clean room, and thus ensures the stability of the clean room process production and improves the qualified rate of the process production. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic diagram of an optional structure of a temperature control device of a clean room air conditioning system according to an embodiment of the present invention;

[0019] Figure 2 is a schematic diagram of an optional structure of a phase change energy storage device according to an embodiment of the present invention;

[0020] Figure 3 is an optional flow chart of a temperature control method for a clean room air conditioning system according to an embodiment of the present invention;

[0021] Figure 4 is another optional flow chart of the temperature control method of the clean room air conditioning system according to an embodiment of the present invention.

[0022] Description of reference numerals:

[0023] 1. Clean room; 2. Return air duct; 3. Dry coil; 4. Phase change energy storage device; 5. Energy storage structure; 6. Heat conductive material; 7. First control valve; 8. Second control valve; 9. Heat conductive medium storage box; 10. Circulation pump; 11. Controller; 12. Fresh air unit; 13. Heat conductive medium inlet; 14. Heat conductive medium outlet. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] The terms used in the embodiments of the present invention are only for the purpose of describing specific embodiments, and are not intended to limit the present invention. The singular forms "a", "said" and "the" used in the embodiments of the present invention and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings, and "multiple" generally includes at least two.

[0026] It should be understood that the term "and / or" used in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0027] It should be understood that although the terms first, second, third, etc. may be used to describe controllers in embodiments of the present invention, these controllers should not be limited to these terms. These terms are only used to distinguish controllers connected to different devices. For example, without departing from the scope of embodiments of the present invention, a first controller may also be referred to as a second controller, and similarly, a second controller may also be referred to as a first controller.

[0028] As used herein, the words "if" and "if" may be interpreted as "at the time of" or "when" or "in response to determining" or "in response to detecting", depending on the context. Similarly, the phrases "if it is determined" or "if (stated condition or event) is detected" may be interpreted as "when it is determined" or "in response to determining" or "when detecting (stated condition or event)" or "in response to detecting (stated condition or event)", depending on the context.

[0029] It should also be noted that the term "includes", "comprising" or any other variation thereof is intended to cover non-exclusive inclusion, so that a commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprising a ..." do not exclude the existence of other identical elements in the commodity or device including the elements.

[0030] The optional embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0031] Example 1

[0032] In a preferred embodiment 1 of the present invention, a temperature control device for a clean room air conditioning system is provided. Specifically, Figure 1 An optional structural schematic diagram of the temperature control device of the clean room air conditioning system is shown, such as Figure 1 As shown, the temperature control device of the clean room air conditioning system includes:

[0033] The dry coil 3 is arranged at the return air of the clean room 1 and is used to adjust the return air temperature and thus adjust the temperature in the clean room 1;

[0034] The phase change energy storage device 4 is arranged on the air outlet side of the dry coil 3, and is used to absorb or release the heat of the return air through the phase change material when the return air temperature fluctuates, so as to maintain the stability of the return air temperature.

[0035] In the above embodiment, a return air phase change rectification temperature control scheme is provided, and a phase change energy storage device is set behind the dry coil at the return air, which is used to absorb or release the heat of the return air through the phase change material when the return air temperature fluctuates, so as to maintain the stability of the return air temperature. The above scheme stabilizes the fluctuation of the return air temperature in a small range, reduces the impact of the return air temperature fluctuation, and realizes the return air temperature steady flow, avoids the overheating and fluctuation of the return air temperature when the process equipment is overloaded or the load demand increases, and avoids the overheated return air directly blowing to the fan filter unit partition, and the sudden reduction of the load when the equipment is shut down causes the return air temperature to drop, stabilizes the fan filter unit partition air intake, improves the temperature regulation ability of the clean room air conditioning system, improves the temperature stability of the clean room, and thus ensures the stability of the clean room process production and improves the qualified rate of the process production.

[0036] Preferably, the phase change energy storage device comprises: an energy storage structure 5, wherein the energy storage structure 5 has a phase change material (PCM) for absorbing or releasing the heat of the return air; wherein the phase change temperature of the phase change material is set corresponding to the preset target temperature of the clean room. Phase change material is a type of material that can absorb, store or release a large amount of heat when the temperature changes. PCM is mainly composed of two different materials, one is a matrix material and the other is a phase change substance. The matrix material is usually a material with good thermal conductivity and structural strength, which is used to fix and support the phase change substance. Common matrix materials include metals, ceramics, polymers, etc. Phase change substances refer to substances that can undergo phase changes within a specific temperature range. The phase change can be a melting phase change from solid to liquid, or a solidification phase change from liquid to solid. During the phase change process, the phase change material can absorb or release a large amount of latent heat, thereby realizing the storage and release of thermal energy. In order to stabilize the temperature in the clean room, the phase change temperature of the phase change material is set corresponding to the preset target temperature of the clean room to ensure that the return air temperature of the clean room is stable at the preset target temperature.

[0037] Small fluctuations in the return air temperature are processed by the phase change energy storage device 4 to reduce fluctuations in the return air temperature. If the temperature of the return air after passing through the dry coil 3 is higher than the temperature T1 required in the clean room, the phase change energy storage device 4 will absorb excess heat until the temperature T1 required in the clean room is reached. If the temperature of the return air after passing through the dry coil 3 is lower than the temperature T1 required in the clean room, the phase change energy storage device 4 will release heat so that the outlet air can maintain the temperature T1 required in the clean room, ensuring stable and efficient operation of the air conditioning system.

[0038] The structure of the phase change energy storage device is as follows Figure 2 As shown, the arrow is the direction of return air. The energy storage structure 5 can be in the form of energy storage balls. The heat conductive material 6 is connected to the energy storage structure 5. The heat conductive material 6 can be in the form of a heat pipe. The heat conductive pipe can improve the thermal conductivity efficiency, and the heat of the energy storage structure can be transferred to the fresh air unit of the clean room air conditioning system, or the heat of the fresh air unit can be transferred to the energy storage structure. When the return air temperature changes, the excess cold or heat is absorbed by the energy storage balls. At the same time, in order to maintain the phase change temperature of the energy storage balls, the energy stored in the energy storage balls is transferred to the fresh air group in time for energy recovery or release by setting a heat conductive pipe.

[0039] like Figure 2 As shown, the phase change energy storage device is provided with a heat transfer medium inlet 13 and a heat transfer medium outlet 14. The phase change energy storage device also includes: a heat transfer pipe, in which a heat transfer medium is provided, one end of the heat transfer pipe is connected to the heat transfer medium inlet of the phase change energy storage device, and the other end is connected to the heat transfer medium outlet of the phase change energy storage device, and the heat transfer pipe passes through the fresh air inlet and the fresh air outlet of the fresh air unit, and is used to heat the heat transfer medium through the fresh air inlet, or cool the heat transfer medium through the fresh air outlet. Figure 1 As shown, the heat exchange point between the heat pipe and the fresh air unit includes two sets of parallel pipes, one for heat exchange with the fresh air inlet of the fresh air unit, and the other for heat exchange with the fresh air outlet of the fresh air unit. The fresh air inlet and the fresh air outlet can also be replaced with the preheating section and the reheating section of the fresh air unit. The preheating section needs to absorb heat, and the reheating section needs to release heat. Therefore, the waste heat is indirectly transferred to the preheating section and the reheating section of the fresh air unit through phase change energy storage, and the energy of overheating fluctuation is recovered to solve the problem of "cold and hot offset" in the fresh air processing process. The energy recovered by the phase change energy storage device is used to provide the required energy for the fresh air unit, reducing the heating and cooling capacity of the fresh air unit. While ensuring that the energy absorbed or released by the phase change energy storage device is effectively processed and the temperature of the clean room is maintained stable, the energy efficiency of the fresh air unit is improved.

[0040] The phase change energy storage device also includes: a first control valve 7, located at the fresh air inlet section where the heat transfer pipe passes through the fresh air unit, used to control the fresh air inlet to heat the heat transfer medium; a second control valve 8, located at the fresh air outlet section where the heat transfer pipe passes through the fresh air unit, used to control the fresh air outlet to cool the heat transfer medium. The controller 11, PLC, is connected to the temperature detection device, the first control valve 7 and the second control valve 8, and is used to control the switch of the first control valve 7 and the second control valve 8 according to the preset target temperature of the clean room and the temperature of the heat transfer medium. The PLC is also connected to the circulation pump, such as Figure 1 As shown, the switch of the circulating pump 10 is controlled. The first control valve 7 and the second control valve 8 control the heat transfer pipe to pass through the fresh air inlet or fresh air outlet of the fresh air unit to achieve heat absorption and heat release of the heat transfer medium and adjust the temperature of the clean room.

[0041] In addition, the phase change energy storage device also includes: a heat transfer medium storage box 9, which is arranged on the heat transfer pipe and is used to store the heat transfer medium; a temperature detection device, which is arranged in the heat transfer medium storage box and is used to detect the temperature of the heat transfer medium; a circulation pump 10, which is arranged on the heat transfer pipe and is used to accelerate the flow of the heat transfer medium. The heat transfer medium can be water, the heat transfer medium storage box can be a water tank, and the circulation pump can be a water pump. The water tank and the water pump bring the energy buffered and stored by the phase change energy storage device to the fresh air unit through the flow of water for recovery, and restore the state of the phase change energy storage device before buffering treatment. The heat transfer medium storage box can maintain the temperature range of the PCM processing phase change, ensuring that when the indoor temperature of the clean room changes suddenly, it can respond quickly and offset too much or too little heat.

[0042] The temperature control device of the clean room air conditioning system in the present invention is equipped with a PCM energy storage device behind the dry coil at the return air, which stabilizes the small-range fluctuation of the return air temperature and reduces the impact of overheating fluctuation of the return air temperature. And the waste heat is indirectly transferred to the preheating section and reheating section of the fresh air unit through phase change energy storage, recovering the energy of overheating fluctuation, solving the problem of "cold and hot offset" in the fresh air processing process, and processing the waste heat in the process of small-range temperature fluctuation.

[0043] Example 2

[0044] In a preferred embodiment 2 of the present invention, a temperature control method for a clean room air conditioning system is provided, which is applied to the temperature control device for the clean room air conditioning system in the above embodiment 1. Specifically, Figure 3 An optional flow chart of the method is shown as follows: Figure 3 As shown, the method includes the following steps S302-S306:

[0045] S302: Obtaining a preset target temperature of the clean room;

[0046] S304: Detecting the temperature of the heat-conducting medium in the heat-conducting medium storage box;

[0047] S306: Controlling the heat transfer pipe to perform heat exchange according to the preset target temperature and the temperature of the heat transfer medium.

[0048] In the above embodiment, a return air phase change rectification temperature control scheme is provided, and a phase change energy storage device is set behind the dry coil at the return air, which is used to absorb or release the heat of the return air through the phase change material when the return air temperature fluctuates, so as to maintain the stability of the return air temperature. The above scheme stabilizes the fluctuation of the return air temperature in a small range, reduces the impact of the return air temperature fluctuation, and realizes the return air temperature steady flow, avoids the overheating and fluctuation of the return air temperature when the process equipment is overloaded or the load demand increases, and avoids the overheated return air directly blowing to the fan filter unit partition, and the sudden reduction of the load when the equipment is shut down causes the return air temperature to drop, stabilizes the fan filter unit partition air intake, improves the temperature regulation ability of the clean room air conditioning system, improves the temperature stability of the clean room, and thus ensures the stability of the clean room process production and improves the qualified rate of the process production.

[0049] In a preferred embodiment of the present invention, the heat transfer pipe is controlled to exchange heat according to the preset target temperature and the temperature of the heat transfer medium, including: judging the relationship between the preset target temperature and the temperature of the heat transfer medium; controlling the heat transfer pipe to exchange heat according to the relationship between the preset target temperature and the temperature of the heat transfer medium. According to the preset target temperature and the temperature of the heat transfer medium, it is determined whether the phase change energy storage device needs to absorb or release heat, and then the connection method of the heat transfer pipe is determined to achieve heat absorption or heat release.

[0050] Specifically, the heat transfer pipe is controlled to perform heat exchange according to the relationship between the preset target temperature and the temperature of the heat transfer medium, including: when the preset target temperature is greater than the temperature of the heat transfer medium, the first control valve is controlled to be closed and the second control valve is controlled to be opened; when the preset target temperature is less than or equal to the temperature of the heat transfer medium, the first control valve is controlled to be opened and the second control valve is controlled to be closed.

[0051] Set the indoor temperature of the clean room to T1, select a PCM with a suitable phase change temperature according to the required range of indoor temperature, and install it on the air outlet side of the dry fan coil. If the process equipment suddenly increases in the room, the load of the room will increase instantly. The increased load will be reflected in the sudden increase in the return air temperature. At this time, the PCM will absorb the sudden increase in load; conversely, the same is true when shutting down the equipment. The PCM releases heat to maintain the sudden decrease in load. Compare whether the temperature T2 in the water tank is less than or equal to T1, and control the switch of the control valve according to the comparison result to maintain the temperature range of the PCM processing phase change, so as to ensure that when the indoor temperature changes suddenly, it can quickly respond and offset excessive or insufficient heat.

[0052] Specifically, when the temperature T2 in the water tank is less than or equal to T1, the first control valve is opened and the second control valve is closed; at this time, the PCM temperature is lower than the indoor temperature, and external heat is required to ensure the indoor temperature stability. The first control valve is opened and the second control valve is closed, and the inlet air temperature of the fresh air unit is used to heat the water in the water tank, thereby increasing the PCM temperature.

[0053] When the temperature T2 in the water tank is greater than T1, the first control valve is closed and the second control valve is opened. At this time, the PCM temperature is higher than the indoor temperature, and heat needs to be provided to the outside to ensure the indoor temperature is stable. The first control valve is closed and the second control valve is opened. The outlet temperature of the fresh air from the fresh air unit is used to reduce the water temperature in the water tank, thereby reducing the PCM temperature.

[0054] In a preferred embodiment 2 of the present invention, another temperature control method for a clean room air conditioning system is provided. Specifically, Figure 4 An optional flow chart of the method is shown as follows: Figure 4 As shown, the method includes the following steps S401-S405:

[0055] S401: system operation;

[0056] S402: Setting the clean room temperature T1;

[0057] S403: Check whether the temperature T2 is less than or equal to T1, compare whether the temperature T2 in the water tank is less than or equal to T1, and control the switch of the control valve according to the comparison result to maintain the temperature range of the PCM processing phase change, so as to ensure that when the indoor temperature changes suddenly, it can react quickly and offset the excessive or insufficient heat;

[0058] S404: Open the electric valve M1 and close the electric valve M2; when the temperature T2 in the water tank is less than or equal to T1, open the first control valve and close the second control valve; at this time, the PCM temperature is lower than the indoor temperature, and external heat is required to ensure the indoor temperature is stable. Open the first control valve and close the second control valve, and use the inlet air temperature of the fresh air unit to heat the water in the water tank, thereby increasing the temperature of the PCM;

[0059] S405: Close the electric valve M1 and open the electric valve M2; when the temperature T2 in the water tank is greater than T1, close the first control valve and open the second control valve. At this time, the PCM temperature is higher than the indoor temperature, and heat needs to be provided to the outside to ensure the indoor temperature is stable. Close the first control valve and open the second control valve to use the outlet temperature of the fresh air from the fresh air unit to reduce the water temperature in the water tank, thereby reducing the temperature of the PCM.

[0060] Example 3

[0061] Based on the temperature control device of the clean room air conditioning system provided in the above embodiment 1, a clean room air conditioning system is further provided in a preferred embodiment 3 of the present invention, including the temperature control device of the clean room air conditioning system as described above.

[0062] In the above embodiment, a return air phase change rectification temperature control scheme is provided, and a phase change energy storage device is set behind the dry coil at the return air, which is used to absorb or release the heat of the return air through the phase change material when the return air temperature fluctuates, so as to maintain the stability of the return air temperature. The above scheme stabilizes the fluctuation of the return air temperature in a small range, reduces the impact of the return air temperature fluctuation, and realizes the return air temperature steady flow, avoids the overheating and fluctuation of the return air temperature when the process equipment is overloaded or the load demand increases, and avoids the overheated return air directly blowing to the fan filter unit partition, and the sudden reduction of the load when the equipment is shut down causes the return air temperature to drop, stabilizes the fan filter unit partition air intake, improves the temperature regulation ability of the clean room air conditioning system, improves the temperature stability of the clean room, and thus ensures the stability of the clean room process production and improves the qualified rate of the process production.

[0063] Example 4

[0064] Based on the temperature control method for the clean room air conditioning system provided in the above-mentioned embodiment 2, a storage medium containing computer executable instructions is also provided in a preferred embodiment 4 of the present invention. When the computer executable instructions are executed by a computer processor, they are used to execute the temperature control method for the clean room air conditioning system as described above.

[0065] In the above embodiment, a return air phase change rectification temperature control scheme is provided, and a phase change energy storage device is set behind the dry coil at the return air, which is used to absorb or release the heat of the return air through the phase change material when the return air temperature fluctuates, so as to maintain the stability of the return air temperature. The above scheme stabilizes the fluctuation of the return air temperature in a small range, reduces the impact of the return air temperature fluctuation, and realizes the return air temperature steady flow, avoids the overheating and fluctuation of the return air temperature when the process equipment is overloaded or the load demand increases, and avoids the overheated return air directly blowing to the fan filter unit partition, and the sudden reduction of the load when the equipment is shut down causes the return air temperature to drop, stabilizes the fan filter unit partition air intake, improves the temperature regulation ability of the clean room air conditioning system, improves the temperature stability of the clean room, and thus ensures the stability of the clean room process production and improves the qualified rate of the process production.

[0066] The serial numbers of the above embodiments of the present invention are only for description and do not represent the advantages or disadvantages of the embodiments.

[0067] In the above embodiments of the present invention, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0068] In the several embodiments provided in this application, it should be understood that the disclosed technical content can be implemented in other ways. Among them, the device embodiments described above are only schematic. For example, the division of the units can be a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of units or modules, which can be electrical or other forms.

[0069] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple units. Some or all of the units may be selected according to actual needs to achieve the purpose of the present embodiment.

[0070] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0071] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including a number of instructions for a computer device (which can be a personal computer, a server or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), mobile hard disk, magnetic disk or optical disk and other media that can store program codes.

[0072] Those skilled in the art will readily appreciate other embodiments of the present invention after considering the specification and practicing the invention disclosed herein. This application is intended to cover any variations, uses or adaptations of the present invention that follow the general principles of the present invention and include common knowledge or customary techniques in the art that are not invented by the present invention. The specification and examples are to be considered exemplary only, and the true scope and spirit of the present invention are indicated by the following claims.

[0073] It should be understood that the present invention is not limited to the exact construction that has been described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the present invention is limited only by the appended claims.

Claims

1. A temperature control device for a clean room air conditioning system, characterized in that: include: Dry coils are installed at the return air of the clean room to adjust the return air temperature and thus the temperature in the clean room; The phase change energy storage device is arranged on the air outlet side of the dry coil, and is used to absorb or release the heat of the return air through the phase change material when the return air temperature fluctuates, so as to maintain the stability of the return air temperature.

2. The temperature control device of the clean room air conditioning system according to claim 1, characterized in that: The phase change energy storage device comprises: An energy storage structure having the phase change material therein for absorbing or releasing the heat of the return air; wherein the phase change temperature of the phase change material is set corresponding to the preset target temperature of the clean room.

3. The temperature control device of the clean room air conditioning system according to claim 1, characterized in that: The phase change energy storage device also includes: The heat-conducting material is connected to the energy storage structure and is used to transfer the heat of the energy storage structure to the fresh air unit of the clean room air conditioning system, or to transfer the heat of the fresh air unit to the energy storage structure.

4. The temperature control device of the clean room air conditioning system according to claim 3, characterized in that: The phase change energy storage device also includes: A heat conducting pipe, wherein a heat conducting medium is arranged in the heat conducting pipe, one end of the heat conducting pipe is connected to the heat conducting medium inlet of the phase change energy storage device, and the other end is connected to the heat conducting medium outlet of the phase change energy storage device, and the heat conducting pipe passes through the fresh air inlet and the fresh air outlet of the fresh air unit, and is used to heat the heat conducting medium through the fresh air inlet, or cool the heat conducting medium through the fresh air outlet.

5. The temperature control device of the clean room air conditioning system according to claim 4, characterized in that: The phase change energy storage device also includes: A heat transfer medium storage box, arranged on the heat transfer pipe, for storing the heat transfer medium; A temperature detection device, disposed in the heat-conducting medium storage box, for detecting the temperature of the heat-conducting medium; A circulation pump is arranged on the heat conducting pipe and is used to accelerate the flow of the heat conducting medium.

6. The temperature control device of the clean room air conditioning system according to claim 5, characterized in that: The phase change energy storage device also includes: A first control valve, located at the fresh air inlet section where the heat transfer pipe passes through the fresh air unit, and used to control the fresh air inlet to heat the heat transfer medium; A second control valve, located at the fresh air outlet section where the heat transfer pipe passes through the fresh air unit, and used to control the fresh air outlet to cool the heat transfer medium; A controller is connected to the temperature detection device, the first control valve and the second control valve, and is used to control the opening and closing of the first control valve and the second control valve according to the preset target temperature of the clean room and the temperature of the heat transfer medium.

7. A temperature control method for a clean room air conditioning system, applied to a temperature control device for a clean room air conditioning system as claimed in any one of claims 1 to 6, characterized in that: The method comprises: Get the preset target temperature of the clean room; Detecting the temperature of the heat-conducting medium in the heat-conducting medium storage box; The heat transfer pipe is controlled to perform heat exchange according to the preset target temperature and the temperature of the heat transfer medium.

8. The method according to claim 7, characterized in that Controlling the heat transfer pipe to perform heat exchange according to the preset target temperature and the temperature of the heat transfer medium includes: Determining the magnitude relationship between the preset target temperature and the temperature of the heat transfer medium; The heat transfer pipe is controlled to perform heat exchange according to the relationship between the preset target temperature and the temperature of the heat transfer medium.

9. The method according to claim 8, characterized in that Controlling the heat transfer pipe to exchange heat according to the relationship between the preset target temperature and the temperature of the heat transfer medium includes: When the preset target temperature is greater than the temperature of the heat transfer medium, the first control valve is controlled to be closed and the second control valve is controlled to be opened; When the preset target temperature is less than or equal to the temperature of the heat transfer medium, the first control valve is controlled to be opened and the second control valve is controlled to be closed.

10. A clean room air conditioning system, characterized in that: A temperature control device for a clean room air conditioning system comprising the temperature control device of any one of claims 1 to 6.

11. A storage medium containing computer executable instructions, characterized in that: When the computer executable instructions are executed by a computer processor, they are used to execute the temperature control method for the clean room air conditioning system according to any one of claims 7 to 9.

Images