Test seat

Abstract

The invention relates to a test seat, which comprises a base provided with a first surface, a second surface and a through hole, a conductive elastic sheet positioned on the first surface and a plurality of elastic metal pieces provided with first contact ends facing the conductive elastic sheet, and the first contact ends comprise convex blocks suitable for being embedded into the conductive elastic sheet. The base is covered with the conductive elastic sheet, so that the elastic metal pieces are prevented from being contaminated easily, particularly, when the elastic metal pieces are squeezed to enable the protruding blocks to sink into the conductive elastic sheet, the resistance value is low and even superior to that of the elastic metal pieces when the protruding blocks are not squeezed, and in addition, when the protruding blocks sink into the conductive elastic sheet, the resistance value of the protruding blocks is even superior to that of the elastic metal pieces when the protruding blocks are not squeezed. And meanwhile, the surface of the bump can be cleaned, and the elastic metal pieces can be more stably contacted with the conductive elastic sheet.

Description

[0001] Information about divisional applications

[0002] This application is a divisional application of the Chinese patent application with application number 2023110255684, application date August 15, 2023, and invention name “Test Seat”. Technical Field

[0003] The present invention relates to semiconductor testing technology, and in particular to a test socket. Background Art

[0004] In semiconductor package testing, a test socket with multiple probes is usually used to place the object to be tested, such as a semiconductor package or chip. After each probe is electrically connected to the semiconductor package or chip, a test signal is transmitted to the semiconductor package or chip through each probe to achieve the purpose of testing.

[0005] As test conditions become increasingly stringent, the signal quality requirements during the test process are getting higher and higher. Therefore, the transmission path between the probe and the object under test plays a very important role in the test interface. Therefore, how to shorten the transmission path or improve the contact between the contact interfaces has become one of the issues to be solved in the industry.

[0006] like Figure 1 FIG. 1 is a schematic diagram of a conventional test socket for testing an object under test. As shown in the figure, a test socket 100 includes a base 101 having a plurality of through holes 102 and probes 103 disposed in each of the through holes 102. The test socket 100 is disposed on a test device 104 to receive a test signal from the test device 104. The test device 104 may be, for example, a printed circuit board (PCB). During the test, an object under test 9 having a plurality of conductive blocks 91 (e.g., solder balls) is placed on the base 101, and force is applied downward to the object under test 9, so that the conductive blocks 91 of the object under test 9 are in direct electrical contact with the probe heads of the probes 103. The test signal can be transmitted to the object under test 9 through each of the probes 103 and each of the conductive blocks 91 to perform the test on the object under test 9.

[0007] However, during the test process, the probe head of the probe 103 is often a spherical or needle-shaped structure, and the probe 103 of the test socket 100 and the conductive block 91 of the object to be tested 9 are both solid hard metals, so the probe head and the conductive block 91 are connected in a point contact manner, so there are problems of poor contact and poor stability between the two, which will lead to a higher contact resistance at the interface (i.e., the contact between the probe head and the conductive block 91). As the contact resistance increases, it will cause a serious electrothermal effect when the current of the test signal passes through the contact between the probe head and the conductive block 91, and the high temperature generated by the electrothermal effect will affect the elastic force of the probe 103, causing the elastic force of the probe 103 to decrease. Thereafter, the contact between the probe 103 and the object to be tested 9 is unstable. In addition, when the existing probe 103 is tested, the probe head is driven by the elastic force of the internal spring to push the conductive block 91 of the object to be tested 9, which will cause the probe head to wear and produce metal debris, resulting in the dirtiness of the probe head and the increase of the aforementioned contact resistance. It may even cause a short circuit between the conductive block 91 or the probe head and damage the object to be tested 9. Therefore, special cleaning items must be used to clean the probe head frequently to avoid the aforementioned adverse reactions. Moreover, when the aforementioned probe head wear causes the probe 103 to be damaged, the unusable probe 103 must be replaced, but many probes 103 are arranged in the test socket 100, and it is quite difficult and time-consuming to find the damaged one among the many probes 103, which is very inconvenient.

[0008] In view of the above problems, how to provide a test socket, especially one that can provide good contact stability between the probe and the object to be tested, while effectively reducing the contact resistance and avoiding the resulting electrothermal effect, has become a goal that people in this technical field are eager to pursue. Summary of the invention

[0009] In order to solve the problems of the above-mentioned prior art, the present invention discloses a test socket, comprising: a base, having a first surface, a second surface opposite to the first surface, and a plurality of through holes connecting the first surface and the second surface; a conductive elastic sheet, located above the first surface of the base; and a plurality of elastic metal parts, respectively arranged in each of the plurality of through holes, wherein each of the elastic metal parts has a first contact end facing the conductive elastic sheet, and the first contact end includes a protrusion suitable for being immersed in the conductive elastic sheet.

[0010] In one embodiment, the protrusion of each of the elastic metal members is suitable for piercing through the surface of the conductive elastic sheet to be immersed in the interior of the conductive elastic sheet.

[0011] In a specific embodiment, the number of the protrusions of each of the elastic metal parts is multiple and they are pointed.

[0012] In another embodiment, the protrusion of each of the elastic metal members presses against the conductive elastic sheet and sinks into the conductive elastic sheet, so that the conductive elastic sheet covers the protrusion.

[0013] In another embodiment, each of the elastic metal members is a spring probe, a vertical probe or a micro-electromechanical probe.

[0014] In another embodiment, the conductive elastic sheet is disposed on a frame of the base so as to have a spacing distance between the conductive elastic sheet and the protrusion of each elastic metal member.

[0015] In another embodiment, the length of the bump is greater than or equal to 0.01 mm and less than the thickness of the conductive elastic sheet.

[0016] In another embodiment, each of the elastic metal parts further includes an elastic body disposed in each of the through holes, a metal block rotatably disposed on the elastic body and connected to the first contact end, and a second contact end connected to the metal block and extending toward the second surface.

[0017] In another embodiment, the base is a metal base, and the conductive elastic sheet includes a plurality of conductive elastic regions corresponding to each of the elastic metal parts and a plurality of conductive particles distributed in each of the conductive elastic regions, wherein the width of each of the conductive elastic regions is greater than the aperture of each of the through holes, so that each of the conductive elastic regions contacts the base.

[0018] In another embodiment, the thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 2 mm.

[0019] In another embodiment, the thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 0.4 mm.

[0020] In another embodiment, the conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate.

[0021] In another embodiment, the particle size of each of the conductive particles is greater than or equal to 0.005 mm and less than or equal to 0.1 mm.

[0022] In another embodiment, the proportion of the plurality of conductive particles in the conductive elastic sheet is greater than or equal to 30% and less than or equal to 90%.

[0023] In another embodiment, the test seat further includes another conductive elastic sheet located below the second surface of the base.

[0024] In another embodiment, the conductive elastic sheet has a first contact surface and a second contact surface relative to each other, and the conductive elastic sheet is arranged on the base with the first contact surface facing the first surface, and the second contact surface has a plurality of convex pads protruding from the second contact surface at locations corresponding to each of the elastic metal parts.

[0025] In another embodiment, the conductive elastic sheet covers the first surface of the base to seal each of the through holes.

[0026] In another embodiment, the base also includes a frame arranged on the peripheral side of the conductive elastic sheet and having a fluid inlet and a fluid outlet. The conductive elastic sheet is arranged on the first surface of the base, and the frame and the upper side surface of the conductive elastic sheet form a fluid space connected to the fluid inlet and the fluid outlet for fluid to enter.

[0027] In another embodiment, the conductive elastic sheet includes a substrate having a plurality of conductive elastic regions and a plurality of conductive particles distributed in each of the conductive elastic regions, and at least one of the conductive elastic regions corresponds to at least two of the elastic metal pieces.

[0028] In another embodiment, the present invention further includes a conductive member, and the conductive elastic sheet includes a substrate having multiple conductive elastic regions corresponding to each of the elastic metal members and multiple conductive particles distributed in each of the conductive elastic regions, wherein the conductive member electrically connects at least two of the conductive elastic regions.

[0029] In another embodiment, the elastic metal member is a ground probe or a power probe.

[0030] In another embodiment, a support body is provided on the peripheral side of the conductive elastic sheet, and the conductive elastic sheet is arranged on the base through the support body, so that there is a gap between the conductive elastic sheet and the first surface or the second surface, so that the two ends of each of the elastic metal parts can protrude from the first surface and the second surface of the base respectively and contact the conductive elastic sheet.

[0031] In another embodiment, when the protrusion of each of the elastic metal parts pierces the lower surface of the conductive elastic sheet and sinks into the conductive elastic sheet, the distance between the top of the protrusion and the upper surface of the conductive elastic sheet is less than 0.35 mm, or the distance between the top of the protrusion and the upper surface of the conductive elastic sheet accounts for less than 85% of the thickness of the conductive elastic sheet.

[0032] The present invention also discloses a test seat, comprising: a base having a first surface, a second surface opposite to the first surface, and a plurality of through holes connecting the first surface and the second surface; a plurality of elastic metal parts, respectively disposed in each of the plurality of through holes; and a conductive elastic sheet, located above the base and the plurality of elastic metal parts, and having a thickness less than or equal to 2 mm.

[0033] In one embodiment, the thickness of the conductive elastic sheet is less than or equal to 0.4 mm.

[0034] In another embodiment, each of the elastic metal parts has a first contact end facing the conductive elastic sheet, and the first contact end includes a protrusion suitable for piercing the surface of the conductive elastic sheet so that the protrusion can be immersed in the interior of the conductive elastic sheet.

[0035] In another embodiment, the number of the protrusions is multiple and they are pointed.

[0036] In another embodiment, the length of the bump is greater than or equal to 0.01 mm and less than the thickness of the conductive elastic sheet.

[0037] In another embodiment, the base is a metal base, and the conductive elastic sheet includes a plurality of conductive elastic regions corresponding to each of the elastic metal parts and a plurality of conductive particles distributed in each of the conductive elastic regions, wherein the width of each of the conductive elastic regions is greater than the aperture of each of the through holes, so that each of the conductive elastic regions contacts the base.

[0038] In another embodiment, the thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 0.4 mm.

[0039] In another embodiment, the conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate.

[0040] In another embodiment, the base also includes a frame arranged on the peripheral side of the conductive elastic sheet and having a fluid inlet and a fluid outlet. The conductive elastic sheet is arranged on the first surface of the base to seal each of the through holes, and the frame and the upper side surface of the conductive elastic sheet form a fluid space connected to the fluid inlet and the fluid outlet for fluid to enter.

[0041] In another embodiment, the test seat also includes a conductive member, and the conductive elastic sheet includes a substrate having multiple conductive elastic areas corresponding to each of the elastic metal members and multiple conductive particles distributed in each of the conductive elastic areas, wherein the conductive member electrically connects at least two of the conductive elastic areas.

[0042] The present invention also discloses a test seat, comprising: a base; a conductive elastic sheet located on the base; and a plurality of elastic metal parts arranged in the base, wherein when the elastic metal parts are immersed in the conductive elastic sheet, the contact resistance between the elastic metal parts and the conductive elastic sheet is smaller than the contact resistance of the elastic metal parts touching the conductive block of the component to be tested.

[0043] In one embodiment, the base includes a first surface and a second surface opposite to each other and a plurality of through holes connecting the first surface and the second surface, and the first surface is used for the conductive elastic sheet to be disposed, and each of the through holes is used for the elastic metal piece to be disposed.

[0044] In another embodiment, each of the elastic metal members has a first contact end facing the conductive elastic sheet, and the first contact end includes a protrusion suitable for being immersed in the conductive elastic sheet.

[0045] In another embodiment, the protrusion of each of the elastic metal members is suitable for piercing through the surface of the conductive elastic sheet to be immersed in the interior of the conductive elastic sheet.

[0046] In another embodiment, the number of the protrusions of each of the elastic metal members is multiple and they are pointed.

[0047] In another embodiment, the length of the bump is greater than or equal to 0.01 mm and less than the thickness of the conductive elastic sheet.

[0048] In another embodiment, the conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate.

[0049] In another embodiment, the base also includes a frame arranged on the peripheral side of the conductive elastic sheet and having a fluid inlet and a fluid outlet. The conductive elastic sheet is arranged on the first surface of the base to seal each of the through holes, and the frame and the upper side surface of the conductive elastic sheet form a fluid space connected to the fluid inlet and the fluid outlet for fluid to enter.

[0050] In yet another embodiment, the thickness of the conductive elastic sheet is less than or equal to 0.4 mm.

[0051] As can be seen from the above, the test socket of the present invention achieves the purpose of reducing the contact resistance by making the protrusion of the first contact end of each elastic metal part sink into the conductive elastic sheet, thereby increasing the contact area between the first contact end and the conductive elastic sheet, and when the protrusion is covered by the conductive elastic sheet, it can make each elastic metal part less likely to shake, thereby having the effect of stable contact; in addition, when the protrusion penetrates into the conductive elastic sheet, it can directly contact each conductive particle, so that the purpose of quickly reducing the resistance and cleaning the surface of the first contact end can be achieved; in addition, by sealing each through hole through the conductive elastic sheet, it can prevent debris from entering the through hole and causing each elastic metal part to be dirty. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] Figure 1 An architectural diagram of the existing test socket for testing the DUT.

[0053] Figure 2 It is a three-dimensional exploded view of the test socket of the present invention.

[0054] Figure 3 It is a three-dimensional structural diagram of the test socket of the present invention.

[0055] Figure 4 for Figure 3 Section view of the AA section line.

[0056] Figure 5 The figure is a test schematic diagram of placing an object to be tested on a test socket of the present invention.

[0057] Figure 6 for Figure 5 A partial enlarged view of the middle area S.

[0058] Figure 7 It is a schematic structural diagram of a conductive elastic sheet with a convex pad in a test socket of the present invention.

[0059] Figure 8 It is a schematic diagram of the use state of the conductive elastic sheet with convex pads in the test socket of the present invention.

[0060] Fig. 9 It is a schematic structural diagram of a test seat of the present invention having a frame seat.

[0061] FIG. 10A to FIG. 10B It is a structural schematic diagram of a test socket of the present invention having a frame.

[0062] Fig.11 This is a structural diagram of the test socket of the present invention applied to a wafer.

[0063] Fig.12 It is a structural diagram of the test socket of the present invention applied to four-terminal measurement (Kelvin contact).

[0064] FIG. 13A to FIG. 13B The structure diagram of the test socket of the present invention is to arrange the conductive member on the conductive elastic sheet.

[0065] FIG. 14A to FIG. 14C Structural diagrams of elastic metal parts of different designs for the test socket of the present invention.

[0066] FIG. 15A to FIG. 15B The figure is a relationship diagram between the resistance of the probe of the existing test socket and the conductive block of the object to be tested and the elastic force of the elastic metal part.

[0067] FIG. 16A to FIG. 16B The figure is a relationship diagram between the elastic metal piece of the test socket of the present invention, the resistance value of the conductive block of the object to be tested, and the elastic force of the elastic metal piece.

[0068] FIG. 17A to FIG. 17B They are relationship diagrams between the resistance value of the probe of the existing test socket and the elastic metal piece of the test socket of the present invention without surface treatment and the elastic force of the elastic metal piece.

[0069] Fig.18 The figure is a resistance change diagram of the probe of the existing test socket and the elastic metal piece of the test socket of the present invention after multiple tests.

[0070] FIG. 19A to FIG. 19BThe diagrams are respectively the relationship between the resistance value of the probe of the existing test socket and the elastic force of the elastic metal part when it is used for the first time and after 300 tests.

[0071] FIG. 20A to FIG. 20B They are the relationship diagrams between the resistance and elastic force of the elastic metal piece of the test socket of the present invention when it is used for the first time and after 300 tests.

[0072] FIG. 21A to FIG. 21B They are respectively the elastic force and temperature variation trend diagrams of the probe of the existing test socket and the elastic metal piece of the test socket of the present invention when a current of 6A is passed through them.

[0073] Fig.22A FIG. 22C is a graph showing the elastic force and temperature change trends of the old and new probes of the existing test socket and the used elastic metal parts of the test socket of the present invention when a current of 3A is passed through them.

[0074] Main component symbols

[0075] 1 Test socket

[0076] 11,11' Base

[0077] 111 First Surface

[0078] 112 Second Surface

[0079] 113 Through Hole

[0080] 1311 Bump

[0081] 114 frame

[0082] 115,115' Fluid inlet

[0083] 116,116' Fluid Outlet

[0084] 117 Frame

[0085] 118 Fluid Space

[0086] 119 Sealing cover

[0087] 12,12',12" conductive elastic sheet

[0088] 121 First contact surface

[0089] 122 Second contact surface

[0090] 123,123' base plate

[0091] 124 Conductive particles

[0092] 125 Support

[0093] 126 convex pad

[0094] 13,13' Elastic Metal Parts

[0095] 131,131' first contact end

[0096] 132,132' Second contact end

[0097] 133 Subject

[0098] 135,135' Elastic parts

[0099] 136 Elastomer

[0100] 137 Metal Block

[0101] 14 Conductive parts

[0102] 2,2' Analyte

[0103] 21 Conductive block

[0104] 22 Conductive pad

[0105] 4 Test setup

[0106] 5. Test Wafer

[0107] 9 Object to be tested

[0108] 91 Conductive block

[0109] 100 Test socket

[0110] 101 Base

[0111] 102 Via holes

[0112] 103 Probe

[0113] 104 Test Equipment

[0114] AA Hatch

[0115] D Width

[0116] d Aperture

[0117] F Force

[0118] G Clearance

[0119] H Separation distance

[0120] L Length

[0121] R Conductive elastic region

[0122] S Zone

[0123] T Thickness

[0124] t distance. DETAILED DESCRIPTION

[0125] The technical content of the present invention is described below by using specific embodiments, and those skilled in the art can easily understand the advantages and effects of the present invention from the contents disclosed in this specification. However, the present invention can also be implemented or applied by other different specific embodiments.

[0126] Figure 2 is a three-dimensional exploded view of the test socket of the present invention, Figure 3 is a three-dimensional structural diagram of the test socket of the present invention, Figure 4 for Figure 3 As shown in the figure, the test seat 1 of the present invention includes a base 11, a conductive elastic sheet 12 located above the base 11, and a plurality of elastic metal pieces 13 extending toward the conductive elastic sheet 12 and arranged in the base 11. In a specific embodiment, the test seat 1 of the present invention can be a probe seat or a probe card, and can be arranged on a test device 4 so that each of the elastic metal pieces 13 receives a test signal from the test device 4, wherein the elastic metal piece 13 can be a probe. The detailed description of the test seat 1 of the present invention is as follows.

[0127] The base 11 is provided for the object to be tested 2 (for example Figure 5 Specifically, the base 11 includes a first surface 111, a second surface 112 opposite to the first surface 111, and a plurality of through holes 113 connecting the first surface 111 and the second surface 112, and is disposed on a test device 4 providing a test signal through the second surface 112. Furthermore, a semiconductor package, chip or wafer to be tested object 2 may be disposed above the first surface 111 of the base 11. In one embodiment, the base 11 is disposed from the peripheral side of the first surface 111 toward the second surface 112 (as shown in FIG. Figure 2 In addition, the base 11 can be a base body made of metal material. In a specific embodiment, the base 11 can be a coaxial test base that can be used for high-frequency testing.

[0128] The conductive elastic sheet 12 may be a thin sheet with excellent mechanical properties (such as ductility and toughness), which is located on the first surface 111 of the base 11. Specifically, the conductive elastic sheet 12 includes a first contact surface 121 and a second contact surface 122 relative to each other, and the conductive elastic sheet 12 may be a soft sheet structure made of a conductive medium, wherein when the conductive medium is squeezed, a conductive path can be formed along the squeezing direction, so that the circuit is connected up and down to achieve the purpose of testing; in addition, the conductive elastic sheet 12 can be attached to the first surface 111, that is, the conductive elastic sheet 12 can cover the first surface 111 of the base 11 and seal each through hole 113, thereby preventing metal debris, dust or liquid from falling into each through hole 113, not only so that each through hole 113 and the elastic metal part 13 therein can be kept clean, but also the contact between the elastic metal part 13 and oxygen can be reduced, thereby reducing the problem of metal oxidation of the elastic metal part 13.

[0129] In a specific embodiment, if Figures 2 to 4 As shown, the conductive elastic sheet 12 may include a substrate 123 having a plurality of conductive elastic regions R defined corresponding to the plurality of elastic metal parts 13, and a plurality of conductive particles 124 distributed in each of the conductive elastic regions R. Accordingly, the conductive elastic sheet 12 has the conductive particles 124 distributed only in each of the conductive elastic regions R, and the area of ​​the substrate 123 that is not the conductive elastic region R does not have the conductive particles 124. That is, the conductive elastic sheet 12 has a plurality of conductive elastic pads (Bump Pads) formed by the conductive elastic regions R having the conductive particles distributed therein. Therefore, a conductive path is formed between the first contact surface 121 and the second contact surface 122 of the conductive elastic sheet 12 only at each conductive elastic region R (or each conductive elastic pad), which can avoid the short circuit between the conductive paths formed in adjacent conductive elastic pads, or the problem of the current in a conductive path overflowing to another conductive path.

[0130] Each of the elastic metal parts 13 has a first contact end 131 and a second contact end 132 and is disposed in each of the through holes 113. Each of the elastic metal parts 13 can displace its first contact end 131 toward the first surface 111 of the base 11 based on internal elastic force, or move toward the direction in the through hole 113 under the extrusion force. In a specific embodiment, the elastic metal part 13 of the present invention can be a probe such as a spring probe, a vertical probe, or a micro-electromechanical probe, or other components with elastic extension that can provide a stroke for packaging and testing the object 2 to be tested, but is not limited thereto.

[0131] In particular, the first contact end 131 of each elastic metal member 13 faces the conductive elastic sheet 12 and includes a protrusion 1311 suitable for being immersed in the conductive elastic sheet 12. The present invention achieves a lower contact resistance by increasing the contact area between the protrusion 1311 and the conductive elastic sheet 12. Compared with the direct electrical connection of the first contact end 131 to the object to be tested 2, a better contact resistance can be provided. That is, when the protrusion 1311 of the elastic metal member 13 is immersed in the conductive elastic sheet 12, the contact resistance between the protrusion 1311 and the conductive elastic sheet 12 can be smaller than the contact resistance when the first contact end 131 directly contacts the object to be tested 2.

[0132] It has been verified through experiments that when the elastic metal piece 13 directly contacts the object to be tested 2, its actual resistance is approximately 37.7 milliohms (mΩ). In addition, if the conductive elastic sheet 12 of the test socket 1 of the present invention has a thickness of 0.2 mm, after the protrusion 1311 of the elastic metal piece 13 is immersed in the conductive elastic sheet 12, its contact resistance can have a performance of 30.4 milliohms (mΩ). It is obvious that the design of the present invention can provide a better test environment.

[0133] In addition, the protrusion 1311 of the first contact end 131 is suitable for being immersed in the conductive elastic sheet 12, which includes two types. The first type is that after the first contact end 131 squeezes the conductive elastic sheet 12 with the protrusion 1311, the conductive elastic sheet 12 is deformed so that the protrusion 1311 is completely or partially covered by the conductive elastic sheet 12. The second type is that the protrusion 1311 directly pierces the conductive elastic sheet 12 and embeds into the conductive elastic sheet 12. More specifically, for the first type of non-embedded type, the protrusion 1311 of the first contact end 131 does not pierce the surface of the conductive elastic sheet 12, but sinks into the surface of the conductive elastic sheet 12 to achieve the result of being immersed in the interior of the conductive elastic sheet 12, that is, the conductive elastic sheet 12 covers all or part of the protrusion 1311, thereby increasing the contact area between the elastic metal part 13 and the conductive elastic sheet 12; in addition, for the second type of embedded type, the first contact end 131 pierces the surface of the conductive elastic sheet 12 with the protrusion 1311 (such as Figure 4 The elastic metal member 13 and the conductive elastic sheet 12 can also increase the contact area between the elastic metal member 13 and the conductive elastic sheet 12.

[0134] Figure 5 A test schematic diagram of placing an object to be tested on a test socket of the present invention, and Figure 6 for Figure 5 Please refer to the enlarged view of the middle area S. Figure 4 .like Figure 4 As shown, when the first contact surface 121 and the second contact surface 122 of the conductive elastic sheet 12 in the conductive elastic region are not pressed, the conductive particles 124 may not be electrically connected to each other; Figures 5 and 6As shown, when the object under test 2 is squeezed by the applied force F, due to the elasticity of the conductive elastic sheet 12, not only the conductive block 21 of the object under test 2 can be sunk into the conductive elastic sheet 12, but also the bump 1311 of the elastic metal member 13 can be sunk into the conductive elastic sheet 12. When the conductive block 21 and the bump 1311 are squeezed up and down, the distance between each conductive particle 124 in the squeezing direction gradually decreases, and then they contact each other, that is, a conductive path electrically connected between the first contact surface 121 and the second contact surface 122 is provided in each conductive elastic region R along the squeezing direction. Accordingly, during the test process of the object under test 2, when the current formed by the test signal passes through the conductive path formed in each conductive elastic region R, it will not overflow to the conductive path in other conductive elastic regions R. Even if the conductive blocks 21 of the object under test 2 are densely packed, or the object under test 2 is miniaturized as the semiconductor process evolves, the purpose of ensuring that the test signal is transmitted in its conductive path can still be achieved, and the conductive paths do not interfere with each other.

[0135] In practical applications, such as Figures 4 to 6 As shown, the initial state of the test socket 1 of the present invention (such as Figure 4 ), the protrusion 1311 of each elastic metal piece 13 is not immersed in the conductive elastic sheet 12, that is, each elastic metal piece 13 and the conductive elastic sheet 12 are in a state of separation or only contact with each other. When testing, the base 11 can receive a test signal from the test device 4. Specifically, after the object to be tested 2 having a plurality of conductive blocks 21 (such as solder balls) is placed on the base 11 and the conductive elastic sheet 12, each conductive block 21 is arranged relative to the corresponding elastic metal piece 13. When the object to be tested 2 is pressed downward against the conductive elastic sheet 12 by the applied force F, the object to be tested 2 and each elastic metal piece 13 squeeze the conductive elastic pad (that is, the conductive elastic area R with conductive particles distributed therein) of the conductive elastic sheet 12 up and down. At this time, each elastic metal piece 13 is immersed in the conductive elastic sheet 12 with the protrusion 1311, so that a conductive path is formed between the corresponding conductive block 21 in the conductive elastic sheet 12 and the elastic metal piece 13 (as shown in FIG. 1 ). Figure 6 As shown), accordingly, the corresponding conductive block 21 and the elastic metal member 13 are electrically connected through the conductive path, and the test signal is transmitted to the object under test 2 through the elastic metal member 13, the conductive elastic sheet 12 and the conductive block 21 to test the object under test 2. Since the elastic metal member 13 is immersed in the conductive elastic sheet 21 with the protrusion 1311, a larger contact area can be obtained, which can reduce the contact resistance. In addition, since the conductive elastic sheet 13 is designed with a conductive elastic pad, the problem of mutual interference between the conductive paths formed in the adjacent conductive elastic pads can be avoided.

[0136] After the test is completed, the object to be tested 2 is removed, and the conductive elastic sheet 12 is not squeezed by the force F. Since the conductive elastic sheet 12 is elastic, the bump 1311 of the first contact end 131 will be pushed out. During the test, the bump 1311 may cause surface oxidation and increase the contact resistance. Therefore, during the immersion and push-out process, the surface of the bump 1311 and the conductive elastic sheet 12 rub against each other, and the oxidized surface can be removed. This not only ensures the stability of the contact resistance, but also has the effect of cleaning the bump 1311. Therefore, even if the bump 1311 is not electroplated or otherwise treated, the stability of the contact resistance can still be maintained. In addition, the conductive elastic sheet 12 is arranged on the elastic metal member 131, so as to avoid the situation that the bump 1311 of the elastic metal member 13 directly presses against the conductive block 21 of the object 2 to be tested and is worn. That is, the conductive elastic sheet 12 can also provide the bump 1311 with a buffering and protective function, thereby reducing the possibility of damage to the elastic metal member 13. Preferably, when the conductive elastic sheet 12 is damaged, only the conductive elastic sheet 12 needs to be replaced to restore the test performance of the test seat of the present invention. In this way, the procedure of finding the damaged probe from many probes in the existing test seat when the probe is damaged can be reduced, thereby achieving the purpose of saving time and cost. In addition, even if the conductive elastic sheet 12 is squeezed or pierced by the bump 1311 of the elastic metal member 13 during the test process, since the conductive elastic sheet 12 has elasticity, after the bump 1311 is pushed out, it can return to a state where it is not squeezed, or the pierced position can be slightly restored. Therefore, even if the conductive elastic sheet 12 is pierced by the bump 1311, it can still have a good service life.

[0137] In particular, the second embedding type mentioned above (the bump 1311 of the elastic metal part 13 pierces the surface of the conductive elastic sheet 12 and enters the inside of the conductive elastic sheet 12) will have the following characteristics. First, the first contact end 131 directly electrically contacts the conductive particles 124 in the conductive elastic sheet 12 with the bump 1311, which can achieve the effect of rapid electrical conduction, and because the bump 1311 is embedded (inserted) into the conductive elastic sheet 12 and contacts with more conductive particles 124, the contact resistance can be effectively reduced; second, when each elastic metal part 13 pierces the surface of the conductive elastic sheet 12 with the bump 1311, it is inserted into the inside of the conductive elastic sheet 12, so that the bump 1311 of each elastic metal part 13 is completely covered by the conductive elastic sheet 12 and is not easy to shake, and it will have the effect of maintaining stability and stable contact during the test process, that is, each elastic metal part 13 is not easy to be displaced relative to the conductive block 21 of the object 2 to be tested (that is, accurate alignment), which can avoid the current In some test environments, the probe may be displaced and damaged due to the small contact area between the probe and the object to be tested. Third, the bump 1311 of the elastic metal part 13 will be inserted into the conductive elastic sheet 12 during the test, and will be pushed out by the elastic force of the conductive elastic sheet 12 at the end of the test. Therefore, the elastic metal part 13 increases the friction with the conductive elastic sheet 12 during the insertion and removal process, which will provide a cleaning effect. In particular, the surface uncleanness of the bump 1311 caused by oxidation or other aging will be improved through the friction between the two, and due to the aforementioned cleaning effect, the surface of the bump 1311 is kept as new at all times, so the bump 1311 of the elastic metal part 13 does not require additional surface processing maintenance, which can reduce costs.

[0138] In one embodiment, the thickness T of the conductive elastic sheet 12 (i.e., the substrate 123) is greater than or equal to 0.15 mm and less than or equal to 2 mm. In short, if the thickness of the conductive elastic sheet 12 is insufficient, it is easy to be pierced. If the thickness of the conductive elastic sheet 12 is too thick, the overall resistance will increase due to the excessively long conduction path. In another embodiment, preferably, 0.150 mm≦thickness T≦1.5 mm, and according to experimental results, when the thickness T of the conductive elastic sheet 12≦0.4 mm, a good conductive effect can be obtained without significantly increasing the contact resistance. In addition, the conductive elastic sheet 12 can adjust the contact resistance by adjusting the thickness T and the immersion depth of the elastic metal piece 13. For example, when the thickness T of the conductive elastic sheet 12 is increased, the contact resistance can be maintained within the desired range by increasing the depth of the elastic metal piece 13 entering the conductive elastic sheet 12.

[0139] Another example Figure 6As shown, when the protrusion 1311 of each elastic metal part 13 pierces the lower surface of the conductive elastic sheet 12 and sinks into the conductive elastic sheet 12, the distance t between the top of the protrusion 1311 and the upper surface of the conductive elastic sheet can be less than 0.35 mm, or the distance t between the top of the protrusion 1311 and the upper surface of the conductive elastic sheet 12 accounts for less than 85% of the thickness T of the conductive elastic sheet 12. Accordingly, even if the thickness of the conductive elastic sheet 12 changes, a good contact resistance can still be maintained by adjusting the degree to which the protrusion 1311 is embedded in the conductive elastic sheet 12.

[0140] In another specific embodiment, the particle size of each conductive particle 124 can be greater than or equal to 0.005 mm and less than or equal to 0.1 mm. That is, if the particle size is too small, there will be too many gap layers between the particles and the resistance will be too high. If the particle size is too large, the elastic metal part 13 will be easily worn and the contact area will be reduced. In addition, the percentage of the multiple conductive particles 124 in the conductive elastic sheet 12 is preferably greater than or equal to 30% and less than or equal to 90%. In other words, if the particle density is too low, the resistance will be higher. If the particle density is too high, it means that there are fewer colloid components in the conductive elastic sheet 12 and the durability of the conductive elastic sheet 12 will also decrease.

[0141] Figure 7 It is a schematic diagram of the structure of the conductive elastic sheet with convex pads in the test socket of the present invention, Figure 8 Schematic diagram of the conductive elastic sheet with convex pads in the test socket of the present invention in use. Figure 7 As shown, the conductive elastic sheet 12" is disposed on the base 11 with the first contact surface 121 facing the first surface 111, and the second contact surface 122 has a plurality of convex pads 126 protruding from the second contact surface 122 corresponding to each elastic metal member 13. Figure 8 As shown, a test object 2' having a plurality of conductive pads 22 can be placed on a conductive elastic sheet 12" by having each conductive pad 22 corresponding to each convex pad 126. In addition, in another embodiment, when the conductive pads 22 of the test object are recessed structures (not shown), each convex pad 126 enters into the corresponding recessed conductive pad 22, thereby forming a conductive path during the test process of the test object 2'.

[0142] Fig. 9 As shown in the figure, in one embodiment, the conductive elastic sheet 12 is disposed on a frame 114 of the base 11, with a spacing distance H between the protrusions 1311 of each elastic metal member 13, and a gap is maintained with the first surface 111, wherein the conductive elastic sheet 12 can float and move in the vertical direction, compared with Figure 4The bumps 1311 of the middle elastic metal member 13 just touch the surface of the conductive elastic sheet 12 or have penetrated into the conductive elastic sheet 12. In this embodiment, each bump 1311 will contact the conductive elastic sheet 12 only during testing, and the bump 1311 will penetrate into the conductive elastic sheet 12 each time the pressure test is performed, that is, the bump 1311 will not always exist in the conductive elastic sheet 12 when no test is performed. Furthermore, the position of the bump 1311 penetrating the conductive elastic sheet 12 each time may also be different, and the same area will not be repeatedly pierced. Therefore, this embodiment can provide time for the conductive elastic sheet 12 to recover, which helps to extend the service life of the conductive elastic sheet 12.

[0143] Fig. 10A and Fig. 10B FIG. 1 is a schematic diagram of the structure of the test socket of the present invention having a frame. Fig. 10A As shown, the base 11 of the test socket 1 further includes a frame 117 disposed on the periphery of the substrate 123 of the conductive elastic sheet 12 . Specifically, the frame 117 is disposed (for example, fixed by glue) on the first surface 111 of the base 11 , and the conductive elastic sheet 12 can be surrounded by the frame 117 . In detail, the conductive elastic sheet 12 is disposed on the first surface 111 of the base 11 and seals each through hole 113. A space for fluid to enter is formed between the frame 117 and the upper surface of the substrate 123 of the conductive elastic sheet 12 (i.e., the second contact surface 122 of the conductive elastic sheet 12). That is, when the object to be tested 2 is placed on the conductive elastic sheet 12, a fluid space 118 is formed between the bottom surface of the object to be tested 2 and the second contact surface 122 of the conductive elastic sheet 12. During the testing process of the object to be tested 2, a non-conductive fluid such as liquid or gas is introduced into the fluid space 118. The fluid flows in the fluid space 118 (as shown by the arrows in the figure) to dissipate heat from the object to be tested 2, so as to achieve the purpose of cooling the object to be tested 2. That is, by providing a fluid inlet 115 and a fluid outlet 116 in communication with the fluid space 118 on the frame 117, the fluid can enter the fluid space 118.

[0144] In addition, if Fig. 10BAs shown, a sealing cover 119 having a fluid inlet 115' and a fluid outlet 116' can be arranged above the frame 117 so that the fluid flows from the fluid inlet 115' into the fluid space 118 (as shown by the arrow in the figure) and is discharged from the fluid outlet 116' to achieve the above-mentioned heat dissipation and temperature reduction purposes. In practical applications, the sealing cover 119 can be a part of a heat conduction device of a semiconductor sorting machine, for example. When the fluid flows into the fluid space 118, the conductive elastic sheet 12 seals each through hole 113, thereby preventing the fluid from flowing into each through hole 113. After the test is completed, the fluid can be removed by pumping out the liquid, injecting air flow or other electronically controlled methods. This can not only clean the fluid space 118, but also prevent metal debris or dust from falling into each through hole 113 during the test and affecting the resistance value of each elastic metal piece 13. In addition, the conductive elastic sheet 12 can prevent the fluid (such as cooling liquid) from entering the through hole 113 during the test and affecting the high-frequency electrical properties of each elastic metal piece 13.

[0145] Fig.11 The schematic diagram of the test socket of the present invention applied to a wafer. As shown in the figure, a conductive elastic sheet 12 and a conductive elastic sheet 12' are respectively provided on the first surface 111 and the second surface 112 of the base 11', wherein a support body 125 is provided on the peripheral side of the substrate 123' of the conductive elastic sheet 12', and the conductive elastic sheet 12' is provided on the base 11' by the support body 125, so that the conductive elastic sheet 12' forms a tent-like structure, and there is a gap G between the substrate 123' and the second surface 112, so that the second contact end 132' of each elastic metal piece 13' protrudes out of the second surface 112 of the base 11' and contacts the conductive elastic sheet 12'. In this embodiment, the elastic metal piece 13' can be a vertical probe (Cobra probe). It should be noted that the conductive elastic sheet 12' can be disposed on the second surface 112 of the base 11', but the present invention is not limited thereto. That is, the conductive elastic sheet 12' can be disposed on the first surface 111 of the base 11'. The structural design is similar and will not be described again.

[0146] For example, when the test seat of the present invention is applied to wafer testing, the test seat 1' can be a probe card and is used to test the wafer 5, wherein the test seat 1' comprises a base 11' having a plurality of through holes, each elastic metal member 13' is disposed in each through hole of the base 11' and comprises a first contact end 131' and a second contact end 132' protruding from the upper opening and the lower opening of each through hole, and an elastic member 135' disposed in each through hole and respectively pushing against the first contact end 131' and the second contact end 132', thereby The test seat 1' can be provided with a conductive elastic sheet 12 on the first surface 111 of the base 11' for the object to be tested 2 to be placed thereon. In addition, the conductive elastic sheet 12' having a support 125 can be provided on the second surface 112 of the base 11' so that the second contact surface of the conductive elastic body 12' (the one facing upward in the figure) will not contact the second surface 112 of the base 11'. During testing, the first contact surface of the conductive elastic body 12' (the one facing downward in the figure) will contact the surface of the test wafer 5 for testing.

[0147] Fig.12 The structure diagram of the test socket of the present invention applied to four-terminal measurement (Kelvin contact). Fig.12 As shown, one conductive elastic region R can correspond to a plurality of elastic metal parts 13' according to the needs. For example, when applied to the four-end measurement (Kelvin contact) technology, one conductive elastic region R can correspond to two elastic metal parts 13', that is, two elastic metal parts 13' share one conductive elastic region R, so that a conductive block 21 of the object to be tested 2 can be connected to the plurality of elastic metal parts 13' through the conductive elastic region R to perform the test procedure.

[0148] FIG. 13A to FIG. 13B This is a structural diagram of the test socket of the present invention, in which a conductive member is arranged on a conductive elastic sheet. Fig.13AAs shown, the test socket 1 of the present invention further includes a conductive member 14 (the first contact surface 121 is taken as an example in the figure) corresponding to at least two elastic metal members 13 and disposed on the first contact surface 121 or the second contact surface 122 of the conductive elastic sheet 12. The conductive member 14 can be used to electrically connect adjacent elastic metal members. Specifically, when the elastic metal member 13 is a grounding probe, the adjacent grounding probe can be electrically connected through the conductive member 14, or when the elastic metal member 13 is a power probe, the adjacent power probe can be electrically connected through the conductive member 14, wherein In one embodiment, as shown in the figure, the conductive member 14 is disposed on the first contact surface 121 of the conductive elastic sheet 12; in another embodiment, the conductive member 14 may also be disposed on the second contact surface 122 of the conductive elastic sheet 12, that is, between the elastic metal member 13 and the conductive elastic sheet 12. In this embodiment, since the conductive member 14 is located between the elastic metal member 13 and the conductive elastic sheet 12, a hollow portion (not shown) is provided at the corresponding position of the elastic metal member 13 so that the elastic metal member 13 can contact the conductive elastic sheet 12 through the hollow portion. In addition, Fig. 13B As shown, the test seat 1 of the present invention also includes another conductive elastic sheet 12 located under the second surface 112 of the base 11 and a conductive member 14 corresponding to at least two elastic metal members 13 and located on the lower surface of the other conductive elastic sheet 12, wherein the conductive member 14 can be used as a conductive circuit or grounding. In summary, by arranging the conductive member 14 on the conductive elastic sheet 12, a plurality of conductive blocks 21 of the object to be tested 2 are connected or grounded through a conductive circuit, and further, when providing a high current power signal, it can also be used as a shunt function. In addition, the conductive elastic sheet 12 can strengthen the contact with the first surface 111 or the second surface 112 of the base 11 by increasing the area or position of the conductive elastic area, and can also provide a grounding function.

[0149] Furthermore, if Fig. 13B As shown, the base 11 is a metal base, and the width of each conductive elastic area of ​​the conductive elastic sheet 12 is greater than the aperture of each through hole 113, so that each conductive elastic area can contact the base 11, that is, the aperture d of the through hole 113 (as shown by the aperture of the second surface 112) is smaller than the width D of each conductive elastic area R of the conductive elastic sheet 12. In other words, d is smaller than D. Accordingly, each elastic metal member 13 can be electrically connected to the metal base 11 through each conductive elastic pad, thereby improving the grounding probability of each elastic metal member 13. Therefore, the conductive member 14 can also be omitted.

[0150] FIG. 14A to FIG. 14C The structural diagram of the elastic metal parts of the test seat of the present invention with different designs. Fig.14A As shown, the protrusion 1311 of each elastic metal member 13 may be a pointed structure. In one embodiment, the length L of the protrusion 1311 is greater than or equal to 0.01 mm and less than the thickness T of the conductive elastic sheet (eg, Figure 4 In other words, the protrusion 1311 of the first contact end 131 only needs to be able to pierce the conductive elastic sheet and enter the interior thereof without penetrating the conductive elastic sheet, and the length L is not limited thereto. That is, the moving stroke of the first contact end 131 of the elastic metal member 13 (or the elastic force that pushes the first contact end 131 to move) can be controlled so that the protrusion 1311 penetrates the conductive elastic sheet by at least 0.01 mm during the test, thereby achieving the goal of reducing the contact resistance between the elastic metal member 13 and the conductive elastic sheet.

[0151] like Fig. 14B As shown, in one embodiment, the elastic metal member 13 includes a main body 133 having a tube hole, a first contact end 131 and a second contact end 132 respectively disposed at two ends of the tube hole, and an elastic body 135 (such as a spring) located in the tube hole and respectively pushing against the first contact end 131 and the second contact end 132. In one embodiment, the first contact end 131 of the elastic metal member 13 of the present invention has a rough or concave-convex surface, which can provide a larger contact area to achieve the purpose of reducing the contact resistance. Specifically, the first contact end 131 has a plurality of protrusions 1311. In a specific embodiment, each protrusion 1311 is a pointed structure, and the first contact end 131 as a whole can be a crown-shaped structure, so that the elastic metal member 13 can penetrate into the conductive elastic sheet through each pointed structure. Accordingly, after the first contact end 131 having a crown shape penetrates into the conductive elastic sheet with each protrusion 1311, it has the function of aggregating conductive particles (please refer to Figure 6 ) effect, that is, the conductive electrons can be confined within the range surrounded by the crown structure, so that the conductive path can have a better conductive effect when forming a conductive path.

[0152] like Fig. 14C As shown, in another embodiment, each of the elastic metal parts 13' further includes an elastic body 136 for being disposed in the through hole 113 and a metal block 137 rotatably disposed on the elastic body 136, the metal block 137 extending toward the first surface 111 of the base 11 to connect the first contact end 131', and extending toward the second surface 112 of the base 11 to connect the second contact end 132'. In another embodiment, the elastic metal part 13' can also be as follows Figure 8 The structure used in the probe card has been described above and will not be repeated here.

[0153] The following experiments are used to illustrate the effectiveness of the test socket of the present invention. Figures 2 to 4 As shown) the above-mentioned effect is compared with the existing test socket (such as Figure 1 In the test process, the present invention and the existing test socket use the same elastic metal piece (such as a probe) and are tested in the same experimental environment and conditions. The relevant description is as follows.

[0154] FIG. 15A to FIG. 15B The figure is a relationship diagram between the resistance of the probe of the existing test socket and the conductive block of the object to be tested and the elastic force of the elastic metal part. FIG. 16A to FIG. 16B The figure is a relationship diagram between the elastic metal piece of the test socket of the present invention, the resistance value of the conductive block of the object to be tested, and the elastic force of the elastic metal piece. Fig.15A As shown, the probe of the existing test socket has a spring force of 20.7 gf and a resistance of 43.2 mΩ in the initial use. Fig. 15B As shown in FIG. 1 , after a period of use, the spring force of the probe of the existing test socket drops to 20.4 gf, and the resistance value increases to 155.6 milliohms (mΩ); on the contrary, Fig.16A As shown, the probe (ie, the elastic metal piece) of the test socket of the present invention has an elastic force of 21.4 gf and a resistance of 35.1 milliohms (mΩ) at the initial stage of use. Fig. 16B As shown in the figure, after a period of use, the elastic force of the probe of the present invention can still be maintained at 21.5gf, and its resistance is further reduced to 33.6 milliohms (mΩ). It is obvious that the same probe can be used in the framework of the present invention to maintain the elastic force of the probe, and in terms of resistance performance, in addition to ensuring that the resistance will not double as in the existing test results, it can also achieve the effect of reducing the resistance. In addition, by Fig. 16B It can be seen from the resistance performance that in the resistance range of 0.4mm-0.6mm, the line of this embodiment is smooth without any unstable phenomenon of jitter change, which further confirms that the present invention can provide good contact stability even at a low stroke.

[0155] Furthermore, by Fig.15A It can be seen that the resistance of the existing test socket can only be slowly reduced to 50 milliohms (mΩ) as the probe head travels. Fig. 15B As shown in the figure, after a period of use, it can no longer drop to 50 milliohms (mΩ); on the contrary, Fig.16A and Fig. 16B As shown, the test socket and the conductive block of the object to be tested of the present invention can immediately reduce the resistance to below 50 milliohms (mΩ) after being pressed, and can still maintain the above characteristics even after being used for a period of time.

[0156] FIG. 17A to FIG. 17B The figure shows the relationship between the resistance of the probe of the conventional test socket and the elastic metal part of the test socket of the present invention without surface treatment and the elastic force of the elastic metal part. The figure shows the performance of the probe head without surface treatment such as electroplating. It is worth noting that Fig.17A As shown in FIG. 1 , the resistance of the probe of the existing test socket is as high as 2081.5 milliohms (mΩ). Fig. 17BAs shown, the probe (i.e., the elastic metal part) of the test socket of the present invention can still be maintained at about 50 milliohms (mΩ), i.e., 48.4 milliohms (mΩ). It can be seen from this that the probe head (the bump at the first contact end) of the probe (elastic metal part) of the present invention can be better than the existing design without surface treatment, so it helps to reduce manufacturing costs.

[0157] Fig.18 The resistance value variation diagram of the probe of the existing test socket and the elastic metal piece of the test socket of the present invention after multiple tests is shown. FIG. 19A to FIG. 19B The following are the relationship diagrams between the resistance value of the probe of the existing test socket and the elastic force of the elastic metal part when it is used for the first time and after 300 tests. FIG. 20A to FIG. 20B The following are the relationship diagrams of the resistance and elastic force of the elastic metal part of the test socket of the present invention when it is used for the first time and after 300 tests. Fig.18 As shown, the change trend of the resistance of the probe after multiple uses is explained. After several uses, the resistance of the probe in the existing test socket increases significantly, and as can be seen from the figure, its resistance is more unstable. On the contrary, the probe of the test socket of the present invention can still maintain the resistance at the best performance level even after multiple tests, that is, even after multiple uses, the probe of the present invention can still maintain the resistance performance of a new probe.

[0158] Furthermore, if Fig.19A As shown in FIG. 1 , when the existing probe is used for the first time, its resistance and elastic force have normal performance, such as Fig.19B As shown in FIG. 1 , after being used 300 times, the resistance of the existing probe exceeds 800 milliohms (mΩ) and is no longer usable; on the contrary, if Fig. 20A and Fig. 20B As shown, the probe of the present invention still maintains a state close to the initial state and has a good resistance value even after being used 300 times.

[0159] FIG. 21A to FIG. 21B The following are the trend diagrams of the elastic force and temperature change of the probe of the existing test socket and the elastic metal part of the test socket of the present invention when a current of 6A is passed through the probe. The diagrams illustrate the change of the elastic force and temperature of the probe when a continuous current of 6A is passed through the probe. Fig.21A As shown in FIG. 1 , after the current of 6A is passed through the probe of the existing test socket, its temperature rises to 101.6°C, which is already over 100°C, and its elastic force drops to nearly 0g; in contrast, Fig. 21B As shown, the elasticity of the probe of the test socket of the present invention can be maintained at an elastic force of about 25g. In addition, the temperature is only 61.7°C, which is about 40°C lower than the temperature of the existing probe. It can be seen that the test socket of the present invention still has good performance even when used in a large current test environment.

[0160] FIG. 22A to FIG. 22CThe following is a graph showing the elastic force and temperature change trends of the old and new probes of the existing test socket and the used elastic metal parts of the test socket of the present invention when a current of 3A is passed through them. Specifically, the resistance of the existing probe before use is measured to be 37.5 milliohms (mΩ). After a considerable number of tests, the resistance of the existing probe will rise to 171.2 milliohms (mΩ). The present invention uses a probe that has been used many times (i.e., the elastic metal part), and its resistance is 37.7 milliohms (mΩ). The experiment is conducted under the above conditions with a current of 3A. Fig.22A As shown in FIG. 1 , the existing test socket with the new probe, even if the existing probe is not used, when the current of 3A is passed, the elastic force can be maintained but the temperature reaches 24.6°C; in addition, Fig. 22B As shown in the figure, the existing test socket with old probes has a resistance value of 171.2 milliohms (mΩ) as the number of times or time of use increases. When a current of 3A is passed, not only the elastic force is affected, but also the temperature rises by more than 80°C, reaching 89.680°C. On the contrary, if Fig. 22C As shown, even if the probe of the test socket of the present invention has been used many times, its resistance is still maintained at 37.7 milliohms (mΩ), and when a current of 3A is passed, it can still maintain good elastic performance, and the temperature only rises to 25.8°C. Therefore, the probe of the present invention (i.e., the elastic metal part) can still maintain the performance of a new probe under the prior art even after being used many times, which proves that the test socket of the present invention can indeed achieve good performance.

[0161] The above embodiments are only illustrative and are not intended to limit the present invention. Any person skilled in the art may modify and change the above embodiments without violating the spirit and scope of the present invention. Therefore, the scope of protection of the present invention is defined by the claims attached to the present invention, and as long as it does not affect the effect and implementation purpose of the present invention, it should be included in the disclosed technical content.

Claims

1. A test socket, comprising: A metal base having a first surface, a second surface opposite to the first surface, and a plurality of through holes connecting the first surface and the second surface; A plurality of elastic metal parts are respectively disposed in each of the plurality of through holes and form a coaxial structure with the metal base; as well as The conductive elastic sheet is located above the first surface of the metal base and is suitable for contacting each of the elastic metal pieces.

2. The test socket according to claim 1, wherein: The conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate.

3. The test socket according to claim 1, wherein: Each of the elastic metal pieces has a protrusion, and the protrusion of each of the elastic metal pieces is suitable for piercing the surface of the conductive elastic sheet to be immersed in the interior of the conductive elastic sheet.

4. The test socket according to claim 3, wherein: The conductive elastic sheet is arranged on a frame seat of the metal base, so as to have a spacing distance between the conductive elastic sheet and the protrusion of each elastic metal piece.

5. The test socket according to claim 1, wherein: The elastic metal piece is a grounding probe and is electrically connected to the metal base.

6. The test socket according to claim 1, wherein: The test seat also includes a conductive member, and the conductive elastic sheet includes a substrate having a plurality of conductive elastic regions respectively corresponding to the elastic metal members and a plurality of conductive particles distributed in the conductive elastic regions, wherein the conductive member electrically connects at least two of the conductive elastic regions.

7. The test socket according to claim 6, wherein: The width of each conductive elastic region is greater than the aperture of each through hole, so that each conductive elastic region contacts the metal base.

8. The test socket according to claim 1, wherein: The metal base also includes a frame arranged on the peripheral side of the conductive elastic sheet and having a fluid inlet and a fluid outlet. The frame and the upper side of the conductive elastic sheet define a fluid space connected with the fluid inlet and the fluid outlet and suitable for fluid flow.

9. A test socket, comprising: A metal base having a first surface, a second surface opposite to the first surface, and a plurality of through holes connecting the first surface and the second surface; A plurality of elastic metal pieces are respectively disposed in each of the plurality of through holes, wherein some of the elastic metal pieces are signal elastic metal pieces and have a distance from the inner side wall of the through hole, and some of the elastic metal pieces are grounding elastic metal pieces and are electrically connected to the metal base; as well as The conductive elastic sheet is located above the first surface of the metal base and is suitable for contacting each of the elastic metal pieces.

10. The test socket according to claim 9, wherein: The conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate.

11. The test socket according to claim 9, wherein: Each of the elastic metal pieces has a protrusion, and the protrusion of each of the elastic metal pieces is suitable for piercing the surface of the conductive elastic sheet to be immersed in the interior of the conductive elastic sheet.

12. The test socket according to claim 11, wherein: The conductive elastic sheet is arranged on a frame seat of the metal base, so as to have a spacing distance between the conductive elastic sheet and the protrusion of each elastic metal piece.

13. The test socket according to claim 9, wherein: The test seat also includes a conductive member, and the conductive elastic sheet includes a substrate having a plurality of conductive elastic regions respectively corresponding to the elastic metal members and a plurality of conductive particles distributed in the conductive elastic regions, wherein the conductive member electrically connects at least two of the conductive elastic regions.

14. The test socket according to claim 13, wherein: The width of each conductive elastic region is greater than the aperture of each through hole, so that each conductive elastic region contacts the metal base.

15. The test socket according to claim 9, wherein: The metal base also includes a frame arranged on the peripheral side of the conductive elastic sheet and having a fluid inlet and a fluid outlet. The frame and the upper side of the conductive elastic sheet define a fluid space connected with the fluid inlet and the fluid outlet and suitable for fluid flow.

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