Hairbrush pre-cleaning device and substrate cleaning equipment

Abstract

The invention provides a brush pre-cleaning device and substrate cleaning equipment, the brush pre-cleaning device comprises a first cleaning part and a second cleaning part, the second cleaning part is detachably connected in the first cleaning part, and the second cleaning part made of the same material as a target substrate material can be selected according to needs to be installed in the first cleaning part. When the brush is in the non-working time, a driving mechanism used for driving the brush to rotate drives the brush to move into the first cleaning piece and abut against the second cleaning piece, the driving mechanism drives the brush to rotate relative to the second cleaning piece, and meanwhile a water injection flow channel formed in the first cleaning piece injects cleaning water to the brush. The first cleaning part is used for cleaning dust on the brush, the second cleaning part is used for flushing dust cleaned from the brush, the cleaning speed of the brush is increased, rapid cleaning of the brush is achieved, and the pre-cleaning time of the brush is shortened.

Description

Technical Field

[0001] The present application belongs to the technical field of semiconductor substrate cleaning, and more specifically, relates to a brush pre-cleaning device and a substrate cleaning equipment. Background Art

[0002] In the chip manufacturing process, the cleanliness of the substrate surface has a great impact on the performance of the chip. If the substrate surface is contaminated or the cleanliness of the substrate surface does not meet the preset requirements, it will have a significant impact on the chip quality. Therefore, in the chip manufacturing process, cleaning the basic surface is very important.

[0003] At present, when cleaning substrates, non-metallic brushes are mostly used to clean substrates. During the cleaning process, the brush itself will be contaminated by the substrate, and after multiple uses, the cleanliness of the brush itself will decrease, causing secondary contamination to the substrate. In order to avoid secondary contamination of the substrate caused by the decrease in the cleanliness of the brush itself, the brush needs to be replaced with a new one after a period of use, and the cleanliness of the newly replaced brush itself is also difficult to be directly used for substrate cleaning.

[0004] At present, after cleaning one substrate and before cleaning the next substrate, it is necessary to use a defective substrate to rub a brush that has been used many times or a new brush, and at the same time pre-clean the brush with a large amount of clean water. The problems caused by this are: the above cleaning method causes the pre-cleaning time of the brush to be relatively long, which leads to a long cleaning time of the substrate, and the above cleaning method can only wash away the dust that is slightly attached to the surface of the brush, and the cleaning effect is poor, which cannot meet the cleaning requirements of the brush. Summary of the invention

[0005] The purpose of the embodiments of the present application is to provide a brush pre-cleaning device and a collective cleaning device to solve the technical problems of the prior art in brush cleaning that are time-consuming and have poor cleaning effects.

[0006] To achieve the above-mentioned object, the first aspect of the present application is to provide a brush pre-cleaning device, which is used to pre-clean the target brush when the target brush is not in working time, comprising:

[0007] A first cleaning member, having a cleaning cavity and a water injection channel formed therein, wherein the water injection channel is communicated with the cleaning cavity;

[0008] a second cleaning member, detachably connected to the cleaning chamber, the second cleaning member being used to abut against the first cleaning surface of the target brush;

[0009] When the target brush rotates relative to the second cleaning member, the water injection channel injects cleaning water into the target brush to clean the target brush.

[0010] Optionally, a second cleaning surface is provided on the second cleaning member, the second cleaning surface abuts against the first cleaning surface, and the length of the second cleaning surface is greater than the diameter of the target brush.

[0011] Optionally, a preset motion path is provided on the second cleaning surface, and the preset motion path is arc-shaped. When the target brush rotates relative to the second cleaning surface, the axis of the target brush moves along the preset motion path.

[0012] Optionally, the brush pre-cleaning device further comprises:

[0013] A connecting piece, wherein a slot is provided on the side wall of the cleaning chamber, and the connecting piece is detachably connected to the slot;

[0014] The second cleaning member is connected to the connecting member.

[0015] Optionally, a drain port is provided on the first cleaning member, and the drain port is communicated with the cleaning chamber for discharging the cleaning water.

[0016] Optionally, the brush pre-cleaning device further comprises:

[0017] A water injection pipe is communicated with the water injection channel and is used to inject the clean water into the water injection channel.

[0018] Optionally, a first connecting seat is provided on the first cleaning member, a pipe clamping groove is provided on the first connecting seat, the pipe clamping groove is communicated with the water injection channel, and along the radial direction of the water injection pipe, the water injection pipe portion is clamped in the pipe clamping groove.

[0019] Optionally, the water injection channel, the water injection pipe and the first connecting seat are symmetrically arranged with respect to the first cleaning member.

[0020] Optionally, the first cleaning member is further provided with a second connecting seat, and the second connecting seat is used to fix the first cleaning member on the target substrate cleaning device.

[0021] The beneficial effect of a pre-cleaning device for a brush provided in the present application is that, compared with the prior art, the pre-cleaning device for a brush provided in the present application comprises a first cleaning member and a second cleaning member, the second cleaning member being detachably connected to the first cleaning member, and a second cleaning member made of the same material as the target substrate can be selected as needed to be installed in the first cleaning member, when the brush is not in working time, a driving mechanism for driving the brush to rotate drives the brush to move into the first cleaning member and abut against the second cleaning member, and the driving mechanism drives the brush to rotate relative to the second cleaning member, and at the same time, a water injection channel arranged on the first cleaning member injects cleaning water into the brush to rinse the dust cleaned from the brush by the second cleaning member, thereby increasing the cleaning speed of the brush, realizing rapid cleaning of the brush, and reducing the pre-cleaning time of the brush.

[0022] In a second aspect, the present application provides a substrate cleaning device, comprising:

[0023] A brush pre-cleaning device, wherein the brush pre-cleaning device is any one of the brush pre-cleaning devices described above.

[0024] The beneficial effect of a substrate cleaning device provided by the present application is that: compared with the prior art, the substrate cleaning device provided by the present application includes the brush pre-cleaning device provided by any one of the above items, and the brush pre-cleaning device includes a first cleaning member and a second cleaning member, the second cleaning member is detachably connected to the first cleaning member, and a second cleaning member made of the same material as the target substrate can be selected as needed to be installed in the first cleaning member, when the brush is not in working time, the driving mechanism for driving the brush to rotate drives the brush to move into the first cleaning member and abut against the second cleaning member, and the driving mechanism drives the brush to rotate relative to the second cleaning member, and at the same time, the water injection channel arranged on the first cleaning member injects cleaning water into the brush to rinse the dust cleaned from the brush by the second cleaning member, thereby increasing the cleaning speed of the brush, realizing rapid cleaning of the brush, and reducing the pre-cleaning time of the brush. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0026] Figure 1 A three-dimensional diagram of a brush pre-cleaning device provided in an embodiment of the present application;

[0027] Figure 2 A front view of a brush pre-cleaning device provided in an embodiment of the present application;

[0028] Figure 3 A top view of a brush pre-cleaning device provided in an embodiment of the present application;

[0029] Figure 4 A partial cross-sectional view of a brush pre-cleaning device provided in an embodiment of the present application;

[0030] Figure 5 A schematic diagram of a preset motion path in this application;

[0031] Figure 6 This is another schematic diagram of a preset motion path in this application;

[0032] Figure 7 This is another schematic diagram of a preset motion path in this application.

[0033] Among them, the reference numerals in the figure are:

[0034] 10. First cleaning member; 11. Cleaning chamber; 12. Water injection channel; 13. Drain port; 14. Slot; 15. Connecting member; 20. Second cleaning member; 21. Second cleaning surface; 211. Preset motion path; 30. Target brush; 31. First cleaning surface; 40. Water injection pipe; 50. First connecting seat; 51. Pipe slot; 52. Clamp; 53. Threaded connecting hole; 60. Second connecting seat; 61. Waist-shaped hole. DETAILED DESCRIPTION

[0035] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0036] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0037] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0038] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0039] Please also read Figures 1 to 7 Now, a brush pre-cleaning device provided in an embodiment of the present application is described.

[0040] A first aspect of the present application is to provide a brush pre-cleaning device for pre-cleaning a target brush 30 when the target brush 30 is not in working time.

[0041] The brush pre-cleaning device comprises a first cleaning member 10 and a second cleaning member 20 .

[0042] See also Figures 1 to 4 Preferably, the first cleaning member 10 can be a tubular structure, the interior of the first cleaning member 10 is hollow, and a cleaning cavity 11 and a water injection channel 12 are provided at the top of the first cleaning member 10, wherein the cleaning cavity 11 extends along the axial direction of the first cleaning member 10, the water injection channel 12 extends along the radial direction of the first cleaning member 10 and penetrates the wall thickness of the first cleaning member 10, and the water injection channel 12 is connected with the cleaning cavity 11 for injecting clean water into the cleaning cavity 11. The first cleaning member 10 is also provided with a drain port 13, which is located below the cleaning cavity 11 in the vertical direction, and is connected with the cleaning cavity 11, and is used to discharge the clean water in the first cleaning member 10.

[0043] The second cleaning member 20 is detachably connected to the cleaning chamber 11 , and is used to abut against the upper first cleaning surface 31 of the target brush 30 , wherein the first cleaning surface 31 is used to clean the substrate.

[0044] It should be noted that the material of the second cleaning member 20 is the same as the material of the substrate to be cleaned. For example, when the material of the substrate to be cleaned is glass, the material of the second cleaning member 20 is also glass.

[0045] The second cleaning member 20 is detachably connected to the cleaning chamber 11 , so that the operator can easily replace the second cleaning member 20 made of different materials, so that the material of the second cleaning member 20 is consistent with the material of the substrate to be cleaned.

[0046] The target brush 30 is connected to a driving mechanism including a rotary motor. The target brush 30 is connected to the rotary motor and driven to rotate by the rotary motor. When the target brush 30 rotates relative to the second cleaning member 20 , the water injection channel 12 injects cleaning water into the target brush 30 to clean the target brush 30 .

[0047] Compared with the prior art, the pre-cleaning device for the brush provided in the present application includes a first cleaning member 10 and a second cleaning member 20. The second cleaning member 20 is detachably connected to the first cleaning member 10. The second cleaning member 20 made of the same material as the target substrate can be selected as needed to be installed in the first cleaning member 10. When the target brush 30 is not in working time, the driving mechanism for driving the target brush 30 to rotate drives the target brush 30 to move into the first cleaning member 10 and abut against the second cleaning member 20, and the driving mechanism drives the target brush 30 to rotate relative to the second cleaning member 20. At the same time, the water injection channel 12 arranged on the first cleaning member 10 injects cleaning water into the target brush 30 to rinse the dust cleaned from the target brush 30 by the second cleaning member, thereby improving the cleaning speed of the target brush 30, realizing rapid cleaning of the target brush 30, and reducing the pre-cleaning time of the target brush 30.

[0048] In one embodiment of the present application, the second cleaning member 20 may be a columnar structure or a plate-like structure. When the second cleaning member 20 is a columnar structure, the cross-sectional shape of the second cleaning member 20 may be a triangle, a quadrilateral, a pentagon, a hexagon or a circle. Of course, the cross-sectional shape of the second cleaning member 20 may also be other polygons, which will not be described one by one here. For the sake of convenience, the cross-sectional shape of the second cleaning member 20 is a circle as an example for description in the present application.

[0049] A second cleaning surface 21 is provided on the top of the second cleaning member 20, and the second cleaning surface 21 abuts against the first cleaning surface 31, so that when the target brush 30 rotates relative to the second cleaning member 20, the second cleaning surface 21 is used to clean the first cleaning surface 31. The length dimension of the second cleaning surface 21 is greater than the diameter dimension of the target brush 30. When the target brush 30 rotates relative to the second cleaning member 20, the length dimension of the second cleaning surface 21 is set to be greater than the diameter dimension of the target brush 30, so as to ensure that the second cleaning member 20 can clean every part of the first cleaning surface 31 at the lower end of the target brush 30.

[0050] In one embodiment of the present application, when the cross-sectional shape of the second cleaning member 20 is circular, the second cleaning surface 21 may be a curved surface structure at the top of the second cleaning member 20 .

[0051] See also Figure 2 and Figure 3In another embodiment of the present application, the second cleaning surface 21 is a planar structure arranged on the top of the second cleaning member 20, and the length direction of the second cleaning surface 21 is parallel to the axial direction of the second cleaning member 20, and the width direction of the second cleaning surface 21 is parallel to the radial direction of the second cleaning member 20.

[0052] See also Figures 5 to 7 In one embodiment of the present application, when the second cleaning surface 21 is a planar structure, a preset motion path 211 is provided on the second cleaning surface, and the preset motion path 211 is an arc. Figure 5 and Figure 6 As shown, when the diameter of the preset motion path 211 is less than or equal to the width dimension of the second cleaning surface 21, the preset motion path 211 is circular on the second cleaning surface 21. Figure 7 As shown, when the diameter of the preset motion path 211 is greater than the dimension of the second cleaning surface 21 in the width direction, the preset motion path 211 is an arc symmetrically arranged along the width direction of the second cleaning surface 21 .

[0053] When the target brush 30 rotates relative to the second cleaning surface, the axis of the target brush 30 moves along the preset motion path 211 to ensure that the first cleaning surface 31 and the target brush 30 rotation axis coincide with each other and the area with zero linear velocity can also be cleaned by the second cleaning surface 21 .

[0054] It should be noted that the driving mechanism for driving the target brush 30 to rotate also includes a driving arm, such as a robotic arm, for driving the target brush 30 to move along a preset path. The driving arm can also be used to drive the target brush 30 into and out of the cleaning chamber 11.

[0055] In one embodiment of the present application, a slot 14 is provided on the inner wall of the first cleaning member 10 , a detachable connecting member 15 is installed in the slot 14 , and one axial end of the second cleaning member 20 is connected to the connecting member 15 .

[0056] Specifically, in the present application, the card slot 14 is arranged on the inner wall of the cleaning chamber 11 and extends in the vertical direction. The number of the card slots 14 is two. The two card slots 10 are symmetrically arranged about the first cleaning member 10. A connecting member 15 is detachably connected in each card slot 14, and the cross-sectional shape of the card slot 14 is the same as the cross-sectional shape of the connecting member 15. The connecting member 15 is adapted to the corresponding card slot 14. The two axial ends of the second cleaning member 20 are respectively connected to the two connecting members 15. The card slot 14 has a first opening and a second opening, wherein the first opening is located on the side wall at the top of the first cleaning member 10, and the second opening is located on the inner wall of the cleaning chamber 11, and the second openings on the two card slots 14 are arranged opposite to each other, and the bottom wall of the card slot 14 corresponding to the first opening abuts against the bottom wall of the connecting member 15 to limit the position of the connecting member 15. By arranging the first opening of the slot 14 on the top wall of the first cleaning member 10, the connecting member 15 can be installed in the slot 14 along the vertical direction, or removed from the slot 14 along the vertical direction, thereby facilitating replacement of the second cleaning member 20 made of different materials.

[0057] See also Figure 1 and Figure 3 In one embodiment of the present application, the brush pre-cleaning device also includes a water injection pipe 40.

[0058] One end of the water injection pipe 40 is connected to the water injection channel 12, or one end of the water injection pipe 40 is inserted into the inlet end of the water injection channel 12, and the other end of the water injection pipe 40 is connected to a water outlet mechanism, such as a water tank, a water storage tank or a booster pump, to inject clean water into the water injection channel 12.

[0059] There are multiple water injection channels 12 , which are evenly spaced apart along the circumference of the first cleaning member 10 , and each water injection channel 12 is connected to a water injection pipe 40 .

[0060] Preferably, in the present application, the number of water injection channels 12 is two, and the two water injection channels 12 are symmetrically arranged about the first cleaning member 10. In order to fix the water injection pipe 40, a first connecting seat 50 is provided on the top of the first cleaning member 10, and the number of the first connecting seat 50 is also two, and the two first connecting seats 50 are symmetrically arranged about the first cleaning member 10. The first connecting seat 50 is provided with a pipe groove 51, which is connected to the water injection channel 12. Along the radial direction of the water injection pipe 40, the water injection pipe 40 is partially clamped in the pipe groove 51 to fix the water injection pipe 40.

[0061] See also Figure 2 In another embodiment of the present application, the brush pre-cleaning device also includes a clamping plate 52, and a threaded connection hole 53 is provided on the first connecting seat 50. The bolt passes through the clamping plate 52 and is threadedly connected to the threaded connection hole 53, so that the first connecting seat 50 and the clamping plate 52 jointly fix the water injection pipe 40 in the slot 51.

[0062] In another embodiment of the present application, the first cleaning member 10 is further provided with a second connecting seat 60, and the second connecting seat 60 is used to fix the first cleaning member 10 on the target substrate cleaning device.

[0063] Specifically, the second connecting seat 60 is arranged at the bottom of the first cleaning member 10, the second connecting seat 60 is a plate-like structure, and the corners of the second connecting seat 60 are provided with waist-shaped holes 61 for installing bolts. The second connecting seat 60 is connected to the target substrate cleaning equipment by bolts, so that the brush pre-cleaning device can pre-clean the target brush 30 in the target substrate cleaning equipment during non-working hours.

[0064] In a second aspect, the present application provides a substrate cleaning device, comprising: a brush pre-cleaning device, which is the brush pre-cleaning device provided by any one of the above embodiments.

[0065] Compared with the prior art, the substrate cleaning equipment provided in the present application includes the brush pre-cleaning device provided by any one of the above items, and the brush pre-cleaning device includes a first cleaning member and a second cleaning member, the second cleaning member is detachably connected to the first cleaning member, and a second cleaning member made of the same material as the target substrate can be selected as needed to be installed in the first cleaning member. When the brush is not working, a driving mechanism for driving the brush to rotate drives the brush to move into the first cleaning member and abut against the second cleaning member, and the driving mechanism drives the brush to rotate relative to the second cleaning member. At the same time, a water injection channel arranged on the first cleaning member injects cleaning water into the brush to flush the dust cleaned from the brush by the second cleaning member, thereby increasing the cleaning speed of the brush, realizing rapid cleaning of the brush, and reducing the pre-cleaning time of the brush.

[0066] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A brush pre-cleaning device, used to pre-clean the target brush when the target brush is not in working time, It is characterized in that include: A first cleaning member, having a cleaning cavity and a water injection channel formed therein, wherein the water injection channel is communicated with the cleaning cavity; a second cleaning member, detachably connected to the cleaning chamber, the second cleaning member being used to abut against the first cleaning surface of the target brush; When the target brush rotates relative to the second cleaning member, the water injection channel injects cleaning water into the target brush to clean the target brush.

2. The brush pre-cleaning device according to claim 1, It is characterized in that The second cleaning member is provided with a second cleaning surface, the second cleaning surface abuts against the first cleaning surface, and the length of the second cleaning surface is greater than the diameter of the target brush.

3. The brush pre-cleaning device according to claim 2, It is characterized in that A preset motion path is provided on the second cleaning surface, and the preset motion path is arc-shaped. When the target brush rotates relative to the second cleaning surface, the axis of the target brush moves along the preset motion path.

4. The brush pre-cleaning device according to claim 3, It is characterized in that Also includes: A connecting piece, wherein a slot is provided on the side wall of the cleaning chamber, and the connecting piece is detachably connected to the slot; The second cleaning member is connected to the connecting member.

5. The brush pre-cleaning device according to claim 1 or 4, It is characterized in that The first cleaning member is provided with a drain port, which is communicated with the cleaning chamber and is used for discharging the cleaning water.

6. The brush pre-cleaning device according to claim 5, It is characterized in that Also includes: A water injection pipe is communicated with the water injection channel and is used to inject the clean water into the water injection channel.

7. The brush pre-cleaning device according to claim 6, It is characterized in that The first cleaning member is provided with a first connecting seat, the first connecting seat is provided with a pipe clamping groove, the pipe clamping groove is communicated with the water injection channel, and along the radial direction of the water injection pipe, the water injection pipe part is clamped in the pipe clamping groove.

8. The brush pre-cleaning device according to claim 7, It is characterized in that The water injection channel, the water injection pipe and the first connecting seat are symmetrically arranged with respect to the first cleaning member.

9. The brush pre-cleaning device according to claim 8, It is characterized in that The first cleaning member is further provided with a second connecting seat, and the second connecting seat is used to fix the first cleaning member on the target substrate cleaning device.

10. A substrate cleaning device, It is characterized in that include: A brush pre-cleaning device, wherein the brush pre-cleaning device is the brush pre-cleaning device according to any one of claims 1-9.

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