Vacuum coating clamp

Abstract

The invention belongs to the technical field of vacuum coating, and discloses a vacuum coating clamp which comprises four clamping mechanisms, each clamping mechanism comprises a clamping plate, an elastic cushion is fixedly connected to the clamping plate, a first rack is fixedly connected to the side, away from the elastic cushion, of the clamping plate, and a second rack is fixedly connected to the side, away from the elastic cushion, of the clamping plate. The side, away from the elastic cushion, of the clamping plate is fixedly connected with a sliding rod and a first spring, and the bottom of the first rack is meshed with a gear. Through cooperation of structures such as a first rack and a gear, a workpiece can be conveniently supported, after a clamping shell drives an elastic cushion on a clamping plate to abut against the side face of the workpiece, the clamping shell continues to move, the side face of the workpiece can extrude the clamping plate at the moment, the clamping plate drives the first rack to move in the direction close to the clamping shell, and therefore the clamping plate is clamped. The first rack moves to drive the gear meshed with the first rack to rotate, and the gear rotates to drive the supporting plate to rotate in the direction close to the clamping plate.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum coating, in particular to a vacuum coating fixture. Background Art

[0002] Vacuum coating technology is to evaporate or sputter the material to be deposited under high vacuum conditions, so that its atoms or molecules are scattered in a vacuum state and deposited on the surface of the workpiece to form a uniform and dense film layer. This technology is widely used in semiconductor devices, optical components, decorative materials, functional coatings and other fields. It can significantly improve the performance and aesthetics of materials. As a revolutionary breakthrough in the field of modern material surface treatment, its core lies in the use of vacuum environment to achieve high-purity and high-precision thin film deposition process. However, the fixation and positioning of the workpiece during the vacuum coating process is the key to ensuring the uniformity of the coating layer and the quality of the workpiece, so a vacuum coating fixture is needed.

[0003] Most of the existing vacuum coating fixtures are fixed structures and cannot clamp workpieces of different specifications. At the same time, most fixtures will block the top and bottom of the workpiece when clamping the workpiece, causing this part of the workpiece to be blocked by the fixture during the coating process, resulting in a thin coating layer or no coating layer in some areas of the workpiece, affecting the overall quality and performance. Some fixtures with less blocking will lack support for the bottom of the workpiece, causing the workpiece to easily slip during vacuum coating and have poor stability, thereby causing wear on the workpiece and affecting the coating effect. Therefore, a vacuum coating fixture is proposed, which has the effects of improving clamping stability, reducing the blocking of the workpiece by the fixture and increasing the scope of application of the fixture. Summary of the invention

[0004] In order to solve the problem that most of the above-mentioned background technologies are fixed structures and cannot clamp workpieces of different specifications, and most of the clamps will block the top and bottom of the workpiece when clamping the workpiece, resulting in this part of the workpiece being blocked by the clamp during the coating process, making the coating layer thin or absent in some areas of the workpiece, affecting the overall quality and performance, and some clamps with less blocking will lack support for the bottom of the workpiece, which will cause the workpiece to easily slip during vacuum coating and have poor stability, thereby causing wear on the workpiece and affecting the coating effect. The present invention provides a vacuum coating clamp.

[0005] To achieve the above object, the present invention provides the following technical solution: a vacuum coating fixture, comprising four clamping mechanisms, wherein a placing mechanism is arranged on the clamping mechanism, a shell mechanism is arranged on the clamping mechanism, a base mechanism is arranged below the shell mechanism, the clamping mechanism is located inside the shell mechanism, and the placing mechanism is located between the four clamping mechanisms;

[0006] The clamping mechanism includes a clamping plate, an elastic pad is fixedly connected to the clamping plate, a first rack is fixedly connected to the side of the clamping plate away from the elastic pad, a sliding rod and a first spring are fixedly connected to the side of the clamping plate away from the elastic pad, a gear is meshed at the bottom of the first rack, a support plate is fixedly connected to the gear, a second rack is meshed at the side of the gear away from the clamping plate, a limiting groove is provided on the second rack, and a groove is provided on the top of the second rack.

[0007] Preferably, the slide rod is located inside the first spring, the slide rod is located above the first rack, the end of the first rack away from the clamping plate is rotatably connected to the groove, the support plate has an arc shape, and the limit groove is located below the groove.

[0008] Preferably, the placement mechanism includes a placement table, a limiting rod is fixedly connected to the bottom of the placement table, a second spring is fixedly connected to the bottom of the placement table, four connecting plates are fixedly connected to the bottom of the placement table, and a workpiece is arranged on the top of the placement table.

[0009] Preferably, the limiting rod is located inside the second spring, and the four connecting plates are evenly distributed below the placement table.

[0010] Preferably, the size of the connecting plate is matched with the size of the limiting groove, the connecting plate is slidably connected to the limiting groove, the workpiece is located between four clamping plates, and the elastic pad is located on a side of the clamping plate close to the workpiece.

[0011] Preferably, the shell mechanism comprises a clamping shell, a slider is fixedly connected to the bottom of the clamping shell, a threaded groove is provided at the bottom of the slider, limiting blocks are fixedly connected to both sides of the slider, and a first sliding groove is provided inside the clamping shell.

[0012] Preferably, the gear is rotationally connected to the inner wall of the clamping shell, the slide rod is slidingly connected to the inner wall of the clamping shell, the clamping plate is elastically connected to the clamping shell via a first spring, the end of the support plate away from the gear is located on the side of the clamping shell close to the clamping plate, the second rack and the connecting plate are both rotationally connected to the first slide groove, and the clamping plate is located on the side of the clamping shell close to the workpiece.

[0013] Preferably, the base mechanism includes a base shell, four second slide grooves are evenly opened on the top of the base shell, a motor is fixedly connected to the inside of the base shell, a worm is rotatably connected to the motor, a turbine is meshed on the side of the worm, a turntable is fixedly connected to the top of the turbine, and a threaded block is fixedly connected to the top of the turntable.

[0014] Preferably, the turntable and the turbine are both rotatably connected to the inner wall of the base shell, the worm is rotatably connected to the inner wall of the base shell, and the motor and the worm are both located below the turntable.

[0015] Preferably, the slider is threadedly connected to the threaded block through a threaded groove, the slider is slidably connected to the second slide groove through a limit block, the bottom of the limit rod passes through the top of the base shell and extends to the interior of the turbine, and the placement platform is elastically connected to the top of the base shell through a second spring.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] The present invention facilitates the support of the workpiece by arranging the cooperation of structures such as the first rack and the gear. When the clamping shell drives the elastic pad on the clamping plate to abut against the side of the workpiece, the clamping shell continues to move. At this time, the side of the workpiece will squeeze the clamping plate, so that the clamping plate drives the first rack to move in the direction close to the clamping shell and squeezes the first spring. The movement of the first rack drives the gear meshing with it to rotate, and the rotation of the gear drives the support plate to rotate in the direction close to the clamping plate. When the clamping plate and the clamping shell abut against each other, the end of the support plate away from the gear rotates to the bottom of the workpiece to support the bottom of the workpiece, thereby preventing the workpiece from slipping during vacuum coating and improving the stability of the device in clamping the workpiece. Arranging the elastic pad on the clamping plate can prevent the device from causing wear to the workpiece during the process of clamping the workpiece.

[0018] The present invention solves the problem of a large shielding area when the fixture clamps the workpiece by arranging the coordination of structures such as a gear and a second rack. When the gear is rotated by the first rack, it drives the second rack meshing therewith downward, and the downward movement of the second rack drives the connecting plate downward, thereby driving the placement table downward and separating from the workpiece, thereby preventing the placement table from shielding a large area of ​​the bottom of the workpiece. At the same time, when the clamping plate clamps the workpiece, it only contacts the side of the workpiece, and will not affect the top coating of the workpiece. The end of the support plate away from the gear is an arc surface, so its contact area with the bottom support of the workpiece is also extremely small, thereby reducing the shielding area of ​​the device on the workpiece, thereby reducing the impact of the device on the coating.

[0019] The present invention facilitates clamping of workpieces of different specifications by arranging the coordination of structures such as clamping plates and clamping shells. The motor is started to rotate the worm, which drives the turbine meshing with it and the turntable on its top to rotate. The rotation of the turntable drives the threaded block on its top to rotate, so that four sliding blocks threadedly connected to the threaded block move in the direction of approaching each other inside the second slide groove, thereby driving the four clamping shells to move in the direction of approaching the workpiece, and finally the workpiece is clamped between the clamping plates on the four clamping shells, thereby improving the application range of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure of the present invention;

[0021] Figure 2 It is a schematic diagram of the cross-sectional structure of the base mechanism of the present invention;

[0022] Figure 3 For the present invention Figure 2 The enlarged structural diagram at A in the middle;

[0023] Figure 4 It is a schematic diagram of the structural relationship between the limit block and the second slide groove of the present invention;

[0024] Figure 5 It is a schematic diagram of the structural relationship between the thread groove and the thread block of the present invention;

[0025] Figure 6 This is a schematic diagram of the structure of the turntable of the present invention when viewed from above;

[0026] Figure 7 It is a schematic diagram of the structural relationship between the connecting plate and the limiting groove of the present invention;

[0027] Figure 8 It is a schematic diagram of the three-dimensional structure of the shell mechanism of the present invention.

[0028] In the figure: 1. Clamping mechanism; 101. Clamping plate; 102. Elastic pad; 103. First rack; 104. Sliding rod; 105. First spring; 106. Gear; 107. Support plate; 108. Second rack; 109. Limiting groove; 110. Groove; 2. Placing mechanism; 201. Placing table; 202. Limiting rod; 203. Second spring; 204. Connecting plate; 205. Workpiece; 3. Shell mechanism; 301. Clamping shell; 302. Sliding block; 303. Threaded groove; 304. Limiting block; 305. First slide groove; 4. Base mechanism; 401. Base shell; 402. Second slide groove; 403. Motor; 404. Worm; 405. Turbine; 406. Turntable; 407. Threaded block. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] like Figures 1 to 8As shown, the present invention provides a vacuum coating fixture, comprising four clamping mechanisms 1, a placing mechanism 2 is arranged on the clamping mechanism 1, a shell mechanism 3 is arranged on the clamping mechanism 1, a base mechanism 4 is arranged below the shell mechanism 3, the clamping mechanism 1 is located inside the shell mechanism 3, and the placing mechanism 2 is located between the four clamping mechanisms 1;

[0031] The clamping mechanism 1 includes a clamping plate 101, to which an elastic pad 102 is fixedly connected, a first rack 103 is fixedly connected on the side of the clamping plate 101 away from the elastic pad 102, a sliding rod 104 and a first spring 105 are fixedly connected on the side of the clamping plate 101 away from the elastic pad 102, a gear 106 is meshed at the bottom of the first rack 103, a support plate 107 is fixedly connected to the gear 106, a second rack 108 is meshed on the side of the gear 106 away from the clamping plate 101, a limiting groove 109 is provided on the second rack 108, and a groove 110 is provided on the top of the second rack 108.

[0032] The slide bar 104 is located inside the first spring 105, and the slide bar 104 is located above the first rack 103. The end of the first rack 103 away from the clamping plate 101 is rotatably connected to the groove 110. The shape of the support plate 107 is arc-shaped, the limit groove 109 is located below the groove 110, and the end of the support plate 107 away from the gear 106 is an arc surface.

[0033] The above scheme is adopted: by setting the cooperation of the first rack 103 and the gear 106 and other structures, it is convenient to support the workpiece 205. When the clamping shell 301 drives the elastic pad 102 on the clamping plate 101 to abut against the side of the workpiece 205, the clamping shell 301 continues to move. At this time, the side of the workpiece 205 will squeeze the clamping plate 101, so that the clamping plate 101 drives the first rack 103 to move in the direction close to the clamping shell 301 and squeeze the first spring 105. The movement of the first rack 103 will drive the gear 106 meshing with it to rotate. The rotation of the gear 106 will drive the support plate 107 to rotate towards the clamping plate 101. When the clamping plate 101 is in contact with the clamping shell 301, the end of the support plate 107 away from the gear 106 rotates to the bottom of the workpiece 205 to support the bottom of the workpiece 205, thereby preventing the workpiece 205 from slipping during vacuum coating and improving the stability of the device in clamping the workpiece 205. The elastic pad 102 is arranged on the clamping plate 101 to prevent the workpiece 205 from being worn during the process of the device clamping the workpiece 205.

[0034] like Figures 1 to 7As shown, the placement mechanism 2 includes a placement table 201, a limiting rod 202 is fixedly connected to the bottom of the placement table 201, a second spring 203 is fixedly connected to the bottom of the placement table 201, four connecting plates 204 are fixedly connected to the bottom of the placement table 201, a workpiece 205 is arranged on the top of the placement table 201, the limiting rod 202 is located inside the second spring 203, and the four connecting plates 204 are evenly distributed below the placement table 201.

[0035] The size of the connecting plate 204 matches that of the limiting groove 109 , and the connecting plate 204 is slidably connected to the limiting groove 109 . The workpiece 205 is located between the four clamping plates 101 , and the elastic pad 102 is located on one side of the clamping plate 101 close to the workpiece 205 .

[0036] The above scheme is adopted: by setting the coordination of the gear 106 and the second rack 108 and other structures, the problem of a large shielding area when the fixture clamps the workpiece 205 is solved. When the gear 106 is rotated by the first rack 103, it will drive the second rack 108 meshing with it to move downward. The downward movement of the second rack 108 will drive the connecting plate 204 downward, thereby driving the placement table 201 downward and separating from the workpiece 205, avoiding the placement table 201 from shielding a large area of ​​the bottom of the workpiece 205. At the same time, when the clamping plate 101 clamps the workpiece 205, it only contacts the workpiece 204. 5, will not affect the top coating of the workpiece 205, and the end of the support plate 107 away from the gear 106 is an arc surface, so its contact area with the bottom support of the workpiece 205 is also very small, reducing the shielding area of ​​the device on the workpiece 205, thereby reducing the impact of the device on the coating, wherein the support plate 107 will also rotate to the bottom of the workpiece 205, and the placement table 201 has been moved down to separate from the workpiece 205. During this period, the workpiece 205 will be clamped by the four clamping plates 101 under the action of the elastic force of the first spring 105, and the workpiece 205 will not slide.

[0037] like Figures 1 to 6 As shown, the shell mechanism 3 includes a clamping shell 301, a slider 302 is fixedly connected to the bottom of the clamping shell 301, a threaded groove 303 is provided at the bottom of the slider 302, and limited blocks 304 are fixedly connected to both sides of the slider 302. A first slide groove 305 is provided inside the clamping shell 301, the gear 106 is rotatably connected to the inner wall of the clamping shell 301, the slide rod 104 is slidably connected to the inner wall of the clamping shell 301, the clamping plate 101 is elastically connected to the clamping shell 301 through the first spring 105, the end of the support plate 107 away from the gear 106 is located on the side of the clamping shell 301 close to the clamping plate 101, the second rack 108 and the connecting plate 204 are both rotatably connected to the first slide groove 305, and the clamping plate 101 is located on the side of the clamping shell 301 close to the workpiece 205.

[0038] The base mechanism 4 includes a base shell 401, four second slide grooves 402 are evenly opened on the top of the base shell 401, a motor 403 is fixedly connected to the inside of the base shell 401, a worm 404 is rotatably connected to the motor 403, a turbine 405 is meshed on the side of the worm 404, a turntable 406 is fixedly connected to the top of the turbine 405, a threaded block 407 is fixedly connected to the top of the turntable 406, the turntable 406 and the turbine 405 are both rotatably connected to the inner wall of the base shell 401, the worm 404 is rotatably connected to the inner wall of the base shell 401, and the motor 403 and the worm 404 are both located below the turntable 406.

[0039] The slider 302 is threadedly connected to the threaded block 407 through the threaded groove 303, and the slider 302 is slidingly connected to the second slide groove 402 through the limit block 304. The bottom of the limit rod 202 passes through the top of the base shell 401 and extends to the inside of the turbine 405. The placement table 201 is elastically connected to the top of the base shell 401 through the second spring 203.

[0040] The above scheme is adopted: by setting the cooperation of the clamping plate 101 and the clamping shell 301 and other structures, it is convenient to clamp the workpieces 205 of different specifications, and the motor 403 is started to rotate the worm 404, which will drive the turbine 405 meshing with it and the rotating disk 406 on the top to rotate, and the rotating disk 406 will drive the threaded block 407 on the top to rotate, so that the four sliders 302 threadedly connected with the threaded block 407 move in the direction of approaching each other inside the second slide groove 402. The four clamping shells 301 move toward the workpiece 205, and finally the workpiece 205 is clamped between the clamping plates 101 on the four clamping shells 301, thereby improving the application range of the device. In the process of the four clamping shells 301 approaching each other, the connecting plate 204 slides between the limiting groove 109, passes through the limiting groove 109 and the first sliding groove 305 and extends to the side of the clamping shell 301 away from the clamping plate 101, and will not affect the movement of the clamping shell 301.

[0041] The working principle and use process of the present invention are as follows: first, a workpiece 205 to be vacuum coated is placed on the placement table 201, and then the motor 403 is started to rotate the worm 404. The rotation of the worm 404 drives the turbine 405 meshing therewith and the turntable 406 on the top thereof to rotate. The rotation of the turntable 406 drives the threaded block 407 on the top thereof to rotate, so that the four sliders 302 threadedly connected with the threaded block 407 move in the direction of approaching each other inside the second slide groove 402, thereby driving the four clamping shells 301 to move in the direction of approaching the workpiece 205;

[0042] After the clamping shell 301 drives the elastic pad 102 on the clamping plate 101 to abut against the side of the workpiece 205, the clamping shell 301 continues to move. At this time, the side of the workpiece 205 will squeeze the clamping plate 101, so that the clamping plate 101 drives the first rack 103 to move in the direction close to the clamping shell 301 and squeeze the first spring 105. The movement of the first rack 103 drives the gear 106 meshing therewith to rotate, and the rotation of the gear 106 drives the support plate 107 to rotate in the direction close to the clamping plate 101. When the clamping plate 101 and the clamping shell 301 abut against each other, the end of the support plate 107 away from the gear 106 rotates to the bottom of the workpiece 205 to support the workpiece 205. At the same time, the rotation of the gear 106 drives the second rack 108 meshing therewith to move downward, and the downward movement of the second rack 108 drives the connecting plate 204 downward, thereby driving the placement table 201 downward and separating from the workpiece 205, and squeezing the second spring 203.

[0043] At this time, the workpiece 205 is clamped between the four clamping plates 101 , and the bottom of the workpiece 205 is supported by the four supporting plates 107 . Finally, the workpiece 205 can be vacuum coated.

[0044] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0045] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum coating fixture, comprising four clamping mechanisms (1), characterized in that: The clamping mechanism (1) is provided with a placement mechanism (2), the clamping mechanism (1) is provided with a shell mechanism (3), a base mechanism (4) is provided below the shell mechanism (3), the clamping mechanism (1) is located inside the shell mechanism (3), and the placement mechanism (2) is located between the four clamping mechanisms (1); The clamping mechanism (1) comprises a clamping plate (101), an elastic pad (102) is fixedly connected to the clamping plate (101), a first rack (103) is fixedly connected to the side of the clamping plate (101) away from the elastic pad (102), a sliding rod (104) and a first spring (105) are fixedly connected to the side of the clamping plate (101) away from the elastic pad (102), a gear (106) is meshed at the bottom of the first rack (103), a supporting plate (107) is fixedly connected to the gear (106), a second rack (108) is meshed at the side of the gear (106) away from the clamping plate (101), a limiting groove (109) is provided on the second rack (108), and a groove (110) is provided at the top of the second rack (108).

2. The vacuum coating fixture according to claim 1, characterized in that: The slide bar (104) is located inside the first spring (105), and the slide bar (104) is located above the first rack (103). The end of the first rack (103) away from the clamping plate (101) is rotatably connected to the groove (110). The support plate (107) has an arc shape, and the limiting groove (109) is located below the groove (110).

3. The vacuum coating fixture according to claim 1, characterized in that: The placement mechanism (2) comprises a placement table (201), the bottom of the placement table (201) is fixedly connected to a limit rod (202), the bottom of the placement table (201) is fixedly connected to a second spring (203), the bottom of the placement table (201) is fixedly connected to four connecting plates (204), and the top of the placement table (201) is provided with a workpiece (205).

4. The vacuum coating fixture according to claim 3, characterized in that: The limiting rod (202) is located inside the second spring (203), and the four connecting plates (204) are evenly distributed below the placement platform (201).

5. The vacuum coating fixture according to claim 3, characterized in that: The size of the connecting plate (204) is matched with the size of the limiting groove (109); the connecting plate (204) and the limiting groove (109) are slidably connected; the workpiece (205) is located between the four clamping plates (101); and the elastic pad (102) is located on a side of the clamping plate (101) close to the workpiece (205).

6. The vacuum coating fixture according to claim 3, characterized in that: The housing mechanism (3) comprises a clamping housing (301), a slider (302) being fixedly connected to the bottom of the clamping housing (301), a threaded groove (303) being provided at the bottom of the slider (302), both sides of the slider (302) being fixedly connected to limit blocks (304), and a first sliding groove (305) being provided inside the clamping housing (301).

7. The vacuum coating fixture according to claim 6, characterized in that: The gear (106) is rotationally connected to the inner wall of the clamping shell (301), the sliding rod (104) is slidingly connected to the inner wall of the clamping shell (301), the clamping plate (101) is elastically connected to the clamping shell (301) via a first spring (105), the end of the support plate (107) away from the gear (106) is located on a side of the clamping shell (301) close to the clamping plate (101), the second rack (108) and the connecting plate (204) are both rotationally connected to the first sliding groove (305), and the clamping plate (101) is located on a side of the clamping shell (301) close to the workpiece (205).

8. The vacuum coating fixture according to claim 6, characterized in that: The base mechanism (4) comprises a base shell (401), four second slide grooves (402) are evenly arranged on the top of the base shell (401), a motor (403) is fixedly connected inside the base shell (401), a worm (404) is rotatably connected to the motor (403), a turbine (405) is meshed on the side of the worm (404), a turntable (406) is fixedly connected to the top of the turbine (405), and a threaded block (407) is fixedly connected to the top of the turntable (406).

9. The vacuum coating fixture according to claim 8, characterized in that: The turntable (406) and the turbine (405) are both rotatably connected to the inner wall of the base shell (401), the worm (404) is rotatably connected to the inner wall of the base shell (401), and the motor (403) and the worm (404) are both located below the turntable (406).

10. The vacuum coating fixture according to claim 8, characterized in that: The slider (302) is threadedly connected to the threaded block (407) via the threaded groove (303), the slider (302) is slidably connected to the second slide groove (402) via the limit block (304), the bottom of the limit rod (202) passes through the top of the base shell (401) and extends to the inside of the turbine (405), and the placement platform (201) is elastically connected to the top of the base shell (401) via the second spring (203).

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