Flaky array ion wave high-speed jet flow cooler

Abstract

The invention provides a sheet-shaped array ion wave high-speed jet flow cooling effect device, and the device comprises a jet flow ion wind vibration film which is used for forming a high-speed ion wave jet flow; the piezoelectric ceramic oscillators are arranged below the two ends of the jet ion wind vibration film, are formed by connecting piezoelectric ceramic pieces in series and are used for generating vibration energy with different intensities; the piezoelectric ceramic oscillator enables jet ion wind to vibrate the film to form reciprocating motion, and air on the surface of the film is promoted to flow directionally; the array ion wind jet flow holes are formed in the jet flow ion wind vibration film and comprise densely distributed array type through holes, and the through holes are perpendicular to the plane of the jet flow ion wind vibration film; the through hole is of a V-shaped structure, the sectional area of the end close to the piezoelectric ceramic oscillator is larger than that of the end away from the piezoelectric ceramic oscillator, and directional flow is formed in the through hole through differential pressure. According to the invention, the intensity and jet velocity of ionic wind can be greatly improved, and the heat dissipation efficiency is effectively improved.

Description

Technical Field

[0001] The invention relates to the field of ion wind technology, and in particular to a sheet array ion wave high-speed jet cooling device. Background Art

[0002] At present, ionic wind has been used in the field of combustion support, for example, reference 1: Ganguly B N. Hydrocarbon combustion enhancement by applied electric field and plasma kinetics [J]. Plasma Physics and Controlled Fusion, 2007, 49 (12B): B239-B246, reference 2: Volkov EN, Kornilov VN, de Goey LP H. Experimental evaluation of DC electric field effect on the thermoacoustic behaviour of flat premixed flames [J]. Proceedings of the Combustion Institute, 2013, 34 (1): 955-962, reference 3: Starikovsaia S M. Plasma assisted ignition and combustion [J]. Journal of Physics D: Applied Physics, 2006, 39 (16): R265-R299, and reference 4: Kuhl J, Seeger T, Zigan L, et al. On the effect of ionic wind on structure and temperature oflaminar premixed flamesinfluenced by electric fields[J].Combustion and Flame,2017,176:391-399, etc. Ion wind pushes the active particles generated by gas discharge to the preheating zone of the flame, accelerating the chemical reaction and increasing the stability of the flame. Incomplete combustion of fuel will not only waste resources, but also produce harmful substances and cause environmental pollution. Plasma combustion-supporting is a new type of combustion-supporting technology. During the gas discharge process, a large number of highly active particles such as active free radicals and excited state components will be ionized, and these active particles can greatly promote the combustion of fuel.

[0003] Although ion wind can indeed play a good auxiliary role in the field of plasma combustion, the plasma wind formed by the existing DC and AC electric field capillary generators has the following two problems in practical applications: ① The main function of ion wind combustion is to transport oxygen and charged particles to the combustion zone, so it is very important to quickly and directional transport of high-concentration active particles generated by gas discharge to the combustion zone. ② How to determine the optimal electrode scheme and operating conditions to fully mix the fuel and oxygen and improve the combustion efficiency. This is an urgent problem to be solved in the existing ion wind combustion.

[0004] In addition, with the continuous evolution of Moore's Law, the density of electronic devices per unit area in integrated circuits continues to increase, and the heat dissipation of electronic devices has become one of the key issues restricting the development of integrated circuits. Due to the fluid properties of ion wind, inventors have conducted research on ion wind heat dissipation in recent years. Existing ion wind heat dissipation uses ion wind to generate local turbulence, and strengthens the local heat dissipation effect by regulating the boundary layer fluid morphology; or uses ion wind to generate eddy current sources, thereby strengthening the local cooling effect. These ion winds are basically parallel winds acting on the surface of the device, and the structure is basically needle electrode, needle-ring electrode, wire electrode, which has poor uniformity, slow flow rate, and is easy to form electrical interference.

[0005] In the field of heat dissipation, ion wind has more advantages than traditional mechanical fans due to its low power consumption, fast response, low noise, strong heat dissipation, etc. However, the charged particles of ion wind in existing ion wind heat dissipation will cause insulation problems and electromagnetic interference problems, which in turn affect the use of electronic equipment. Summary of the invention

[0006] In view of the defects in the prior art, the object of the present invention is to provide a sheet array ion wave high-speed jet cooling device.

[0007] According to one aspect of the present invention, there is provided a sheet array ion wave high-speed jet cooling device, comprising:

[0008] The jet ion wind vibrates the film to form a high-speed ion wave jet;

[0009] A piezoelectric ceramic oscillator is disposed below both ends of the jet ion wind vibration film and is formed by piezoelectric ceramic sheets connected in series to generate vibration energy of different intensities; the piezoelectric ceramic oscillator causes the jet ion wind vibration film to form a reciprocating motion, thereby promoting a directional flow of air on the surface of the film;

[0010] An array ion wind jet hole is arranged on the jet ion wind vibration film, and includes a dense array of through holes, wherein the through holes are perpendicular to the plane of the jet ion wind vibration film; the through holes are V-shaped structures, and the cross-sectional area of ​​one end close to the piezoelectric ceramic oscillator is larger than the cross-sectional area of ​​the end away from the piezoelectric ceramic oscillator, and a directional flow is formed in the through holes by using a pressure difference.

[0011] Optionally, the jet ion wind vibration film includes an anode, a flexible substrate and a cathode arranged in sequence from bottom to top, and after voltage is applied, the cathode emits electrons to the anode to form a directional high-speed ion wave jet; the cathode and the anode are both prepared from a multi-layer composite metal surface, and the metal forming the anode and the cathode includes at least one of chromium, copper, titanium, platinum and gold.

[0012] Optionally, the flexible substrate is a composite film, and the dielectric constant of the composite film is greater than 3.0.

[0013] Optionally, the thickness of the jet ion wind vibration film is several hundred microns.

[0014] Optionally, the through holes are arranged in the jet ion wind vibration film to form a grid or a twill pattern, and the distance between two adjacent through holes is several microns to several hundred microns.

[0015] Optionally, the diameter of the through hole at one end close to the piezoelectric ceramic oscillator is from dozens of microns to several tens of microns, and the diameter of the through hole at one end away from the piezoelectric ceramic oscillator is several microns.

[0016] Optionally, the jet velocity is increased and the pressure is increased by increasing the frequency of the piezoelectric ceramic oscillator.

[0017] Optionally, the cooling effect device includes one or more of the following options:

[0018] - a temperature sensor, arranged below one end of the jet ion wind vibration film;

[0019] - A pressure sensor is arranged below the other end of the jet ion wind vibration film;

[0020] - A power module is arranged below one end of the jet ion wind vibration film.

[0021] Optionally, the cooling effect device further includes an information interaction and processing module, and the information interaction and processing module is arranged below the other end of the jet ion wind vibration film.

[0022] Optionally, the cooling effect device is manufactured using a non-silicon MEMS multi-element integrated manufacturing process.

[0023] Compared with the prior art, the present invention has at least one of the following beneficial effects:

[0024] The sheet array ion wave high-speed jet cooling effect device provided by the present invention integrates the piezoelectric film fan and the array jet ion wind generator by arranging a jet ion wind vibration film, a piezoelectric ceramic oscillator and an array ion wind jet hole, thereby greatly improving the intensity and jet speed of the ion wind, thereby promoting combustion; since a multi-polar array jet is formed by using a plurality of densely distributed array through holes, it has the ability of self-neutralization, and uses a high-speed jet perpendicular to the device, and the jet direction is away from the device surface, there is a negative pressure between the radiator and the device, and the charged particles will not be deposited on the surface of the cooling and heat dissipation device. Therefore, it will not cause insulation and electromagnetic interference problems to the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Other features, objects and advantages of the present invention will become more apparent from the detailed description of non-limiting embodiments made with reference to the following drawings:

[0026] Figure 1 It is a schematic diagram of the overall structure of a sheet array ion wave high-speed jet cooling device in one embodiment of the present invention;

[0027] Figure 2 It is a schematic diagram of the structure of the jet ion wind vibrating film in one embodiment of the present invention;

[0028] Figure 3 Schematic diagram of the working principle of the array ion wind jet holes in one embodiment of the present invention;

[0029] Figure 4 3D schematic diagram of a jet ion wind vibrating film in one embodiment of the present invention;

[0030] In the figure: 1- piezoelectric ceramic oscillator, 2- array ion wind jet hole, 3- jet ion wind vibration film, 4- anode, 5- flexible substrate, 6- cathode, 7- temperature sensor, 8- pressure sensor, 9- information interaction and processing module, 10- power module. DETAILED DESCRIPTION

[0031] The present invention is described in detail below in conjunction with specific embodiments. The following embodiments will help those skilled in the art to further understand the present invention, but are not intended to limit the present invention in any form. It should be noted that, for those of ordinary skill in the art, several variations and improvements may be made without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0032] Reference Figure 1-4The sheet array ion wave high-speed jet cooling device provided by one embodiment of the present invention comprises a jet ion wind vibration film 3, a piezoelectric ceramic oscillator 1 and an array ion wind jet hole 2, wherein: the jet ion wind vibration film 3 is used to form a high-speed ion wave jet; the piezoelectric ceramic oscillator 1 is arranged below the two ends of the jet ion wind vibration film 3, and is formed by connecting piezoelectric ceramic sheets in series to generate vibration energy of different intensities; the piezoelectric ceramic oscillator 1 causes the jet ion wind vibration film 3 to form a reciprocating motion, which promotes the air on the surface of the film to be fixed The air flow is directional, and the direction of the air flow is consistent with the direction of the ion wave jet; the array ion wind jet hole 2 is arranged on the jet ion wind vibration film 3, including a dense array of through holes, and the through holes are perpendicular to the plane of the jet ion wind vibration film 3; the through holes are V-shaped, and the cross-sectional area at one end close to the piezoelectric ceramic oscillator 1 is larger than the cross-sectional area at one end away from the piezoelectric ceramic oscillator 1, and the pressure difference is used to form a directional flow in the through hole, and the direction of the directional flow is from the large hole end to the small hole end, that is, from bottom to top along the height direction of the jet ion wind vibration film 3.

[0033] In some embodiments, the jet ion wind vibration film 3 (jet ion wind generator) includes an anode 4, a flexible substrate 5 and a cathode 6 arranged in sequence from bottom to top. After voltage is applied, the cathode 6 emits electrons to the anode 4 to form a directional high-speed jet ion wind (high-speed ion wave jet), which can form a high-speed ion wave jet like a bullet; the cathode 6 and the anode 4 are both made of a multi-layer composite metal surface preparation (MEMS process), and the metal forming the anode 4 and the cathode 6 includes at least one of chromium, copper, titanium, platinum and gold, and the thickness of each film layer is between a few nanometers and hundreds of nanometers. The flexible substrate 5 adopts a composite film, and adopts a material with a high elastic modulus and a high dielectric constant. The dielectric constant of the composite film is greater than 3.0, such as polyimide (dielectric constant is 3.4) and other materials, which can prevent breakdown between the two layers of metal when high frequency and high voltage are applied. The flexible substrate 5 has the characteristics of flattening and high elasticity.

[0034] The sheet array ion wave high-speed jet cooler in the above embodiment is formed of corrosion-resistant, pressure-resistant and high-temperature resistant materials. It can be used in the intercooler of a turbocharger to help combustion and reduce temperature. It can also be used for efficient heat dissipation of chips. It has the characteristics of being able to work in extreme environments such as high temperature, high pressure, corrosion and radiation.

[0035] In the above embodiment, the piezoelectric film fan (vibrating film fan) includes a piezoelectric ceramic oscillator 1 and a jet ion wind vibrating film 3, which forms a directional air flow through the air pressure difference at both ends of the V-shaped structural hole; and the jet ion wind vibrating film 3 itself is a jet ion wind generator, which can form a directional high-speed jet ion wind. Specifically, the piezoelectric ceramic piece can generate self-excited mechanical vibration after voltage is applied, and the series connection can further enhance the mechanical vibration energy. The more piezoelectric ceramic pieces are connected in series, the higher the mechanical vibration energy that can be generated. Therefore, the piezoelectric ceramic oscillator 1 can generate vibration energy of different intensities, so that the jet ion wind vibrates the film 3 (mesh film) to form a reciprocating motion, thereby promoting the directional flow of air on the surface of the film; the array ion wind jet hole 2 is a dense mesh structure, perpendicular to the direction of the jet ion wind vibrating film 3, the through hole is large at the top and small at the bottom, forming a V-shaped structure, using the pressure difference (pressure difference caused by the different sizes of the V-shape), the large hole end and the small hole end have different pressures per unit area, and the small hole end cannot form a backflow due to the high pressure, so a unidirectional jet (directional flow) pointing from the large hole end to the small hole end can be formed, and the array ion wind jet hole 2 is both a guide hole of the piezoelectric film fan and a jet hole of the array ion wave wind.

[0036] In the above embodiment, the sheet array ion wave high-speed jet cooling effect device generates two directional flows, one is the directional flow of jet ion wind (i.e., high-speed ion wave jet), which is formed by the cathode 6 emitting electrons to the anode 4 after voltage is applied; the other is the directional flow formed by the piezoelectric film fan (generated by the through-hole array using the pressure difference to form a directional flow), which is generated by the piezoelectric ceramic vibrating and driving the jet ion wind film. The two directional flows (the film fan and the jet ion wind generated by vibration energy) have independent working systems and are also complex. The film fan forms the wind film, which is also the jet ion wind film. Secondly, due to the gradient conical structure of the film, their flow directions are also the same.

[0037] In some embodiments, the thickness of the jet ion wind vibration film 3 is several hundred microns, generally around 250 microns. The V-shaped structure can form directional jets and directional air flows. The smaller the size, the higher the density of the holes and the better the effect. Preferably, the diameter of the through hole close to the end of the piezoelectric ceramic oscillator 1 is a dozen microns to several dozen microns, and the diameter away from the end of the piezoelectric ceramic oscillator 1 is a few microns. The through holes are arranged in the jet ion wind vibration film 3 to form a standard field-shaped grid or twill shape. Of course, other shapes can also be designed according to actual conditions. The shape of the interval can be circular, triangular, square, etc., and the spacing between two adjacent through holes is a few microns to hundreds of microns. As a result, the jet ion wind vibration film 3 forms a high-density mesh film structure.

[0038] In the above embodiment, the series connection of the piezoelectric ceramic sheets is to screw any one of the legs of the two piezoelectric ceramic sheets together and connect the remaining two legs to the circuit. When connected in series, because the polarization directions of the upper and lower piezoelectric ceramic sheets are relative, when the double crystal sheet is subjected to a force, the total charge output doubles. The film structure produces a reciprocating motion under the impetus of the piezoelectric ceramic oscillator 1, and due to the existence of the unidirectional flow of the V-shaped hole, it can form a breathing effect. The jet velocity can be increased by increasing the frequency of the piezoelectric ceramic oscillator 1 and the air pressure at both ends of the air flow and the film can be increased.

[0039] In some embodiments, the cooling effect device further includes a temperature sensor 7, a pressure sensor 8, a power module 10, etc.: the temperature sensor 7 is arranged below one end of the jet ion wind vibration film 3, and is used to test the temperature of the heat dissipation end and adjust the working frequency in time, wherein the heat dissipation end refers to the chip at the bottom of the cooling effect device, with the pin 1 of the cooling effect device as a reference, the upper end is the jet ion wind vibration film 3, and the lower end is the chip and other devices that need heat dissipation; the pressure sensor 8 is arranged below the other end of the jet ion wind vibration film 3, and is used to detect the pressure difference between the two ends of the film to determine the jet speed; the power module 10 is arranged below one end of the jet ion wind vibration film 3. In addition, the cooling effect device also includes an information interaction and processing module 9, which is arranged below the other end of the jet ion wind vibration film 3. The information interaction and processing module 9 transmits the working parameters and working status of the cooling effect device to an interactive display platform such as a mobile phone through wired or wireless means to realize remote monitoring, early warning and other functions. In addition, the information interaction and processing module 9 provides a reasonable operation model for the ion wind jet generator and the air flow generator according to the data measured by each sensor through data analysis and processing. The power module 10 transmits matching power supply parameters to the ion wind jet generator and the air flow generator according to the operation model.

[0040] The cooling effect device in the above embodiment is manufactured by adopting a non-silicon MEMS multi-element integrated manufacturing process, and the jet holes are manufactured in a large-scale one-time manner through the MEMS process to form a thin film flat sheet array jet plasma structure.

[0041] When plasma assists combustion, there is a flame below and active particles that assist combustion above. The sheet array ion wave high-speed jet cooling device in the above embodiment can form a directional jet ion wave wind (ion wind) like a bullet through the joint action of the piezoelectric film fan and the jet ion wind vibration film 3, which can enhance the contact between the ion wave wind and the flame with more oxygen and charged particles to improve the combustion efficiency. The ion wave wind can quickly deliver active particles and fresh air into the combustion zone, accelerate chemical reactions, increase the exhaust gas temperature, and expand the area range of the highest temperature, thereby promoting combustion and reducing the emission of harmful gases. The effect of the ion wave wind is particularly obvious in the low-pressure section, which can enhance the mixing of fuel and air to promote combustion.

[0042] The traditional plasma jet is a single jet of a hard capillary. On the one hand, the ion wind is generated by the charged particles ionized from the gas under the acceleration of the electric field, so the ion wind will carry a large number of charged particles. When using ion wind cooling, in the existing ion wind heat dissipation method, some charged particles will be deposited on the cooling object. If the cooling object is an electronic device, it will destroy the insulation performance of the device, so it is necessary to eliminate the influence of the charged particles. In response to this problem, the above embodiment uses a plurality of densely distributed array through holes to form a multi-polar array jet. Through the form of multi-polar discharge, the charged particles generated by this discharge structure can be self-neutralized, which greatly weakens the charge of the ion wind. It uses a high-speed jet perpendicular to the device, and the jet direction is facing away from the device surface. There is a negative pressure between the radiator and the device, and the charged particles will not be deposited on the surface of the cooling and heat dissipation device. Therefore, it will not cause insulation and electromagnetic interference problems to the device. On the other hand, the existing ion wind generator has a weak wind speed because it has no acceleration structure. To solve this problem, the above embodiment uses a structural design of superimposing two functional devices to optimize the structure of the heat dissipation device and further increase the wind speed. Through the combined effect of the piezoelectric film fan and the jet ion wind vibrating film 3, the intensity of the ion wind and the jet speed can be greatly improved, and integrated cooling can be achieved by optimizing the device structure.

[0043] The sheet array ion wave high-speed jet cooler in the above embodiment integrates the piezoelectric film fan and the array jet ion wind generator through a non-silicon MEMS film preparation process to form a flattened, highly elastic, high-density mesh film array plasma wave ejector (i.e., an ion wave type plane film flat array ion wave ejector), which greatly reduces the thickness of the device, increases the density and flow rate of the ion wind per unit area, improves the heat dissipation efficiency, and forms a 1+1>2 effect. It is a flexible film type cooler device with the characteristics of being light, small, soft, thin, low power consumption, low cost, high combustion support, high heat dissipation, and able to work in extreme environments. It can be used in turbocharged intercoolers to play a role in combustion support and cooling, and can also be used for efficient heat dissipation of chips.

[0044] The above describes the specific embodiments of the present invention. It should be understood that the present invention is not limited to the above specific embodiments, and those skilled in the art can make various modifications or variations within the scope of the claims, which does not affect the essence of the present invention. The above preferred features can be used in any combination without conflicting with each other.

Claims

1. A sheet array ion wave high-speed jet cooling device, characterized in that: include: The jet ion wind vibrates the film to form a high-speed ion wave jet; A piezoelectric ceramic oscillator is disposed below both ends of the jet ion wind vibration film and is formed by piezoelectric ceramic sheets connected in series to generate vibration energy of different intensities; the piezoelectric ceramic oscillator causes the jet ion wind vibration film to form a reciprocating motion, thereby promoting a directional flow of air on the surface of the film; An array ion wind jet hole is arranged on the jet ion wind vibration film, and includes a dense array of through holes, wherein the through holes are perpendicular to the plane of the jet ion wind vibration film; the through holes are V-shaped structures, and the cross-sectional area of ​​one end close to the piezoelectric ceramic oscillator is larger than the cross-sectional area of ​​the end away from the piezoelectric ceramic oscillator, and a directional flow is formed in the through holes by using a pressure difference.

2. The sheet array ion wave high-speed jet cooling device according to claim 1 is characterized in that: The jet ion wind vibration film includes an anode, a flexible substrate and a cathode arranged in sequence from bottom to top. After voltage is applied, the cathode emits electrons to the anode to form a directional high-speed ion wave jet; the cathode and the anode are both prepared from a multi-layer composite metal surface, and the metal forming the anode and the cathode includes at least one of chromium, copper, titanium, platinum and gold.

3. The sheet array ion wave high-speed jet cooling device according to claim 2 is characterized in that: The flexible substrate is a composite film, and the dielectric constant of the composite film is greater than 3.

0.

4. The sheet array ion wave high-speed jet cooling device according to claim 1 is characterized in that: The thickness of the jet ion wind vibration film is several hundred microns.

5. The sheet array ion wave high-speed jet cooling device according to claim 1 is characterized in that: The through holes are arranged in the jet ion wind vibration film to form a grid or a diagonal pattern, and the distance between two adjacent through holes is several microns to several hundred microns.

6. The sheet array ion wave high-speed jet cooling device according to claim 1 is characterized in that: The diameter of the through hole at one end close to the piezoelectric ceramic oscillator is from tens of micrometers to several tens of micrometers, and the diameter of the through hole at one end away from the piezoelectric ceramic oscillator is several micrometers.

7. The sheet array ion wave high-speed jet cooling device according to claim 1 is characterized in that: By increasing the frequency of the piezoelectric ceramic oscillator, the jet velocity is increased and the pressure is increased.

8. The sheet array ion wave high-speed jet cooling device according to claim 1 is characterized in that: Include one or more of the following options: - a temperature sensor, arranged below one end of the jet ion wind vibration film; - A pressure sensor is arranged below the other end of the jet ion wind vibration film; - A power module is arranged below one end of the jet ion wind vibration film.

9. The sheet array ion wave high-speed jet cooling device according to claim 8 is characterized in that: It also includes an information interaction and processing module, which is arranged below the other end of the jet ion wind vibration film.

10. The sheet array ion wave high-speed jet cooling device according to any one of claims 1 to 9, characterized in that: The cooling effect device is prepared by adopting a non-silicon MEMS multi-element integrated manufacturing process.

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