Die assembly of wafer electroplating sealing gasket

Abstract

The invention discloses a die assembly for electroplating a sealing gasket on a wafer. The die assembly comprises a rack; the driving assembly and the two die holders are respectively an upper die holder and a lower die holder, a die cavity is formed in a parting surface, and the driving assembly drives the two die holders to split, close and close; the air exhaust assembly comprises an air pump and a sealing cover; the air pump is provided with a first air outlet end and a second air outlet end; and air injection runners distributed in the circumferential direction of the corresponding mold cavities are arranged in the two mold bases, and in the mold closing state, the air injection runners are communicated between the output ends of the filtering units and the mold cavities. According to the die assembly for the wafer electroplating sealing gasket, after air extracted by the air pump from the sealing cavity is filtered through the filtering unit, clean air flows into the air injection flow channel, so that air flows are sprayed out of the two die cavities to blow a semi-finished rubber ring, cleaning of the cavity walls of the die cavities and the semi-finished rubber ring is achieved, impurities are prevented from being mixed into a product, and the production efficiency is improved. And the gas residual quantity in the mold cavity is reduced, so that the forming quality of a final product is improved.

Description

Technical Field

[0001] The invention relates to the technical field of rubber sealing ring molding, in particular to a mold assembly for a wafer electroplating sealing gasket. Background Art

[0002] Wafer electroplating is an important step in semiconductor manufacturing. It places extremely high demands on sealing gaskets to ensure uniform distribution of the plating solution, prevent leakage, and protect the wafer from contamination. Therefore, sealing rubber rings are usually used as sealing gaskets in the wafer electroplating process.

[0003] At present, the rubber ring is usually made by vacuum forming. Fig. 27 As shown, a semi-finished rubber mold obtained by extrusion, calendering or other molding methods is prepared, placed in the mold cavity of the lower mold base, and the upper mold base is moved close to the lower mold base so that the parting surfaces of the upper mold base and the lower mold base are close to form a gap, and then air is pumped to discharge the air inside the mold, and then the mold is heated to soften and melt the rubber, and then the mold is closed to form a closed cavity. Under the action of pressure and temperature, the rubber is molded into the shape of the cavity, and then the mold is separated to obtain a molded rubber product sealing ring.

[0004] When using the above method and device, since the shape and structure of the semi-finished rubber ring are not compatible with the mold cavity of the lower mold base, usually, Fig. 27 As shown, after placing a semi-finished rubber ring in the mold cavity of the lower mold base and bringing the upper mold base and the lower mold base closer together, the bottom of the semi-finished rubber ring and the bottom of the cavity wall of the lower mold base, as well as the top of the semi-finished rubber ring and the top of the wall of the upper mold base cavity, form a two-part cavity. Due to the existence of the above two parts of the cavity, the air is not completely evacuated, and bubbles remain inside the rubber sealing ring finally formed, affecting the quality of the product; not only that, because the semi-finished rubber ring is not completely compatible with the mold cavity, after the semi-finished rubber ring is placed, due to the different placement positions, its axis is deviated, and there is an angle with the axis of the mold cavity. Since rubber has a certain viscosity when it softens and melts, it affects its filling in the cavity, which ultimately affects the product quality; in addition, when there are fine dust particles and impurities remaining inside the mold cavity and on the semi-finished rubber ring, it is not easy to be found, resulting in dust particles and impurities being mixed into the rubber product after the final product is formed, further reducing the product quality.

[0005] Therefore, it is necessary to improve the mold base of the sealing gasket for wafer electroplating in the prior art. Summary of the invention

[0006] The purpose of the present invention is to overcome the defects in the prior art and provide a mold assembly for wafer electroplating sealing gaskets.

[0007] In order to achieve the above technical effects, the technical solution of the present invention is: a mold assembly for wafer electroplating sealing gasket, comprising: frame; A driving assembly and two horizontal mold bases, the two mold bases are respectively an upper mold base and a lower mold base, and an annular mold cavity is arranged on the parting surface of the two mold bases. The driving assembly drives the two mold bases to separate, close and close the molds. In the separated mold state, the lower mold base is located at the lower side of the upper mold base. In the closed mold state, the mold cavities of the two mold bases are directly opposite and closely arranged to limit the semi-finished product rubber ring. In the closed mold state, the mold cavities of the two mold bases are combined to form a mold cavity; An air extraction component, the air extraction component includes an air pump and a sealing cover, the sealing cover is connected to the output end of the driving component, the sealing cover and the lower mold base in the mold clamping and mold closing states form a sealed cavity, the mold cavity is located inside the sealed cavity, and the air inlet end of the air pump is connected to the sealed cavity; The air extraction component further includes a filter unit, the air pump has a first air outlet end connected to the input end of the filter unit and a second air outlet end connected to the outside, the first air outlet end and the second air outlet end are respectively provided with a first air outlet valve and a second air outlet valve; Both of the two mold bases are built with jet flow channels distributed along the circumference of the corresponding mold cavities. In the mold closing state, the jet flow channels are connected between the output end of the filter unit and the mold cavity.

[0008] Preferably, in order to ensure uniform jet range, the jet channels are equally spaced along the circumference of the corresponding mold cavity, the jet channels of the lower mold base are connected to the bottom of the corresponding mold cavity, and the jet channels of the upper mold base are connected to the top of the corresponding mold cavity.

[0009] Preferably, in order to achieve the connection between the output end of the filter unit and the corresponding jet channels of the two mold bases, the two mold bases are each provided with a docking hole which is connected with their own mold cavity through the jet channel and is coaxial with the mold cavity. One of the holes connected with the output end of the filter unit is provided with a positioning tube protruding from the corresponding parting surface on its inner side, and an air hole connected with the corresponding jet channel is provided on the side wall of the positioning tube. In the closed mold state and the mold closing state, the two ends of the positioning tube are respectively sealed and connected with the circumferential inner walls of the two docking holes.

[0010] Preferably, in order to adjust the position of the semi-finished rubber ring so that its axis line basically coincides with the axis line of the mold cavity while cleaning the semi-finished rubber ring and the inner wall of the mold base cavity, and at the same time, enhance the cleaning effect, it also includes an adjustment component, the adjustment component is used to adjust the size of the airflow ejected from the end of the jet flow channel away from the docking hole, so that the semi-finished rubber ring limited between the two mold base cavities can move, in the active state, the axis line of the semi-finished rubber ring is obliquely intersected with the axis line of the cavity, and the axis line of the semi-finished rubber ring revolves around the axis line of the cavity as the center line.

[0011] Preferably, in order to adjust the gas force ejected from the jet flow channel so that the axis line of the semi-finished rubber ring can revolve around the axis line of the cavity, the jet flow channel includes an adjusting section and a fixed section, the adjusting section is in the shape of a straight strip, one end of which is connected to the docking hole, and the other end is sealed with a sealing cover, the sealing cover is sealed with an adjusting rod with the same length direction as the adjusting section, and there is a jet gap between the circumferential outer edge of the adjusting rod and the circumferential inner wall of the adjusting section, one end of the fixed section is connected to the mold cavity, and the other end is connected to the jet gap, the adjusting assembly includes a power unit and two transmission units corresponding to the two mold bases one by one, and the power unit drives the adjusting rod to perform periodic axial reciprocating motion through each transmission unit.

[0012] Preferably, in order to realize the axial reciprocating movement of the adjusting rod, the transmission unit includes a transmission ring which rotates in the mold base with the axis of the mold cavity as the center line, the adjusting rod, the docking hole and the jet flow channel are all located on the inner side of the transmission ring, and the cross-section of the circumferential inner wall of the transmission ring includes arc segments which are connected in sequence and the centers are all on the axis of the mold cavity, the central angles corresponding to the arc segments are the same, and along the circumference of the transmission ring, the radius corresponding to the arc segments first increases and then decreases, and the cross-section of the circumferential inner wall of the transmission ring is an axially symmetrical figure, the adjusting rod is connected with a compression spring, and the compression spring is used to make the adjusting rod tend to move away from the mold cavity, and the power unit drives the transmission ring to rotate at a uniform speed.

[0013] Preferably, in order to drive the transmission to rotate around its own axis, the transmission unit also includes a driving wheel, a synchronous belt and a driven wheel, the driving wheel is connected to the driven wheel through the synchronous belt, the driven wheel is located on the side of the corresponding mold base facing away from its own parting surface and is connected to the transmission ring coaxially, and the power unit drives the driving wheel to rotate around its own axis.

[0014] Preferably, in order to facilitate the rotation of the driving wheel, the power unit includes a power motor, the output shaft of the power motor extends in the vertical direction and is fixed with a power rod, the axis of the power rod is parallel to the axis of the output shaft of the power motor and there is a gap between them, the power rod is fixedly penetrated through the driving wheel of the transmission unit corresponding to one of the mold bases, and the driving wheel of the other transmission unit is provided with a socket for the power rod to be sealed and penetrated.

[0015] Preferably, in order to facilitate adjustment of the rotational position of the two driving wheels before mold closing, the outer diameters of the driving wheel and the driven wheel are consistent, and alignment marks are provided between the opposite surfaces of the two driving wheels in the transmission units corresponding to the two mold bases.

[0016] Preferably, in order to facilitate material discharge and material removal, the driving component can simultaneously drive the upper mold base and the lower mold base to close the mold and drive the sealing cover to rise and fall, so that in the closed mold state and the closed mold state, the sealing cover can be enclosed with the upper mold base to form a sealed cavity. The driving component includes a lifting unit and a translation unit, and the lifting unit and the translation unit are both arranged on the frame. The output end of the lifting unit is connected to the upper mold base, and the output of the translation unit is connected to the lower mold base. The upper mold base is located in the sealing cover and is connected to the sealing cover through a tension spring.

[0017] To sum up, compared with the prior art, the mold assembly of the wafer electroplating sealing gasket of the present invention filters the air extracted from the sealing cavity by the air pump through the filter unit, and the clean air flows into the jet channel, so that air flows out of the two mold cavities to blow the semi-finished rubber ring, thereby cleaning the mold cavity wall and the semi-finished rubber ring, avoiding impurities from mixing into the product, and reducing the amount of residual gas in the mold cavity, thereby improving the molding quality of the final product. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the structure of the present invention in the mold splitting state; Figure 2 yes Figure 1 Explosion diagram of Figure 3 It is a schematic diagram of the structure of the present invention in the mold closing state; Figure 4 yes Figure 3 A schematic cross-sectional structure diagram of ; Figure 5 yes Figure 3 A schematic diagram of the cross-sectional structure from another angle; Figure 6 yes Figure 5 A magnified view of part A; Figure 7 yes Figure 5 A magnified view of part B; Figure 8 It is a schematic diagram of the structure of the present invention in a closed mold state; Fig. 9 yes Figure 8 A schematic cross-sectional structure diagram of ; Fig.10 yes Fig. 9 Enlarged view of part C; Fig.11 It is a schematic diagram of the connection structure between the frame and the drive assembly of the present invention; Fig.12 It is a schematic diagram of the connection structure between the lower die base and the transmission unit of the present invention; Fig.13 yes Fig.12 A top view of Fig.14 yes Fig.12 Explosion diagram of Fig.15 yes Fig.12 Schematic diagram of the explosion from another perspective; Fig.16 It is a structural diagram of the lower die base; Fig.17 yes Fig.16 Explosion diagram of Fig.18 yes Fig.16 Schematic diagram of the explosion from another perspective; Fig.19 It is an exploded schematic diagram of the connection structure between the lower die base and the transmission unit; Fig. 20 yes Fig.19 A magnified view of the D portion; Fig.21 This is an exploded schematic diagram of the connection structure between the lower die base and the transmission unit from another perspective; Fig. 22 It is a schematic diagram of the connection structure between the upper die base and the power assembly of the present invention; Fig.23 yes Fig. 22 Explosion diagram of Fig.24 yes Fig. 22 Schematic diagram of the explosion from another perspective; Fig.25 It is a structural schematic diagram of the upper die base of the present invention; Fig.26 yes Fig.25 Explosion diagram of Fig. 27 It is a cross-sectional schematic diagram of the rubber ring prepared by the prior art process; In the figure: 1, frame; 11, bottom plate; 12, fixed frame; 13, slide bar; 14, guide sleeve; 2, drive assembly; 21, lifting unit; 22, translation unit; 3, mold base; 31, upper mold base; 311, upper mold base plate; 3111, upper positioning plate; 3112, upper positioning strip; 3113, positioning tube; 3114, air vent; 312, inflation tube; 3121, inflation valve; 313, tension spring; 314, guide rod; 315, upper bolt; 316, first upper nut; 317, second upper nut ;32, lower die seat;321, lower die base plate;3211, lower positioning plate;3212, lower positioning strip;322, support roller;323, sealing groove;324, sealing frame;325, calibration piece;326, guide column;327, guide sleeve;328, lower bolt;329, lower nut;33, mold cavity;34, jet flow channel;341, adjustment section;3411, jet gap;342, fixed section;35, docking blind hole;36, docking through hole;37, sealing cover;38, adjustment rod;38 1. Compression spring; 382. Roller frame; 383. Adjusting roller; 39. Fixed convex plate; 391. Positioning groove; 4. Air extraction assembly; 41. Air pump; 411. First air outlet; 412. Second air outlet; 413. First air outlet valve; 414. Second air outlet valve; 415. Air extraction pipe; 42. Sealing cover; 421. Inner flange; 43. Filter unit; 431. Filter barrel; 4311. Inner convex ring; 4312. Outer flange; 4313. Fixed shaft; 4314. Bump; 432. Barrel cover; 4 321, positioning convex plate; 4322, pressing frame; 433, filter frame; 4331, outer convex ring; 434, locking arm; 44, clean air pipe; 5, power unit; 51, power motor; 52, power rod; 53, power disk; 6, transmission unit; 61, transmission ring; 611, arc segment; 612, transmission pipe; 613, groove; 614, connecting ring; 62, driving wheel; 621, alignment mark; 622, jack; 63, synchronous belt; 64, driven wheel; 641, convex key; 65, bearing; 71, top template; 72, bottom template; 73, fixed disk; 74, fixed convex column; 741, positioning groove; 75, assembly blind hole; 76, jet convex ring; 761, jet groove; 8, semi-finished rubber ring. DETAILED DESCRIPTION

[0019] The specific implementation of the present invention is further described below in conjunction with the accompanying drawings and embodiments. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention.

[0020] like Figure 1-Figure 26 As shown, the mold assembly of the wafer electroplating sealing gasket of the present invention comprises: Rack 1; A drive assembly 2 and two horizontal mold bases 3, the two mold bases 3 are respectively an upper mold base 31 and a lower mold base 32, and an annular mold cavity 33 is arranged on the parting surface of the two mold bases 3. The drive assembly 2 drives the two mold bases 3 to separate, close and close the molds. In the separated mold state, the lower mold base 32 is located at the lower side of the upper mold base 31. In the closed mold state, the mold cavities 33 of the two mold bases 3 are directly opposite and closely arranged to limit the semi-finished rubber ring 8. In the closed mold state, the mold cavities 33 of the two mold bases 3 are combined to form a cavity; The air extraction component 4 includes an air pump 41 and a sealing cover 42. The sealing cover 42 is connected to the output end of the driving component 2. The sealing cover 42 and the lower mold base 32 in the mold clamping and mold closing states enclose a sealed cavity. The mold cavity is located inside the sealed cavity. The air inlet end of the air pump 41 is connected to the sealed cavity. The vacuum assembly 4 also includes a filter unit 43, the air pump 41 has a first air outlet end 411 connected to the input end of the filter unit 43 and a second air outlet end 412 connected to the outside, the first air outlet end 411 and the second air outlet end 412 are respectively provided with a first air outlet valve 413 and a second air outlet valve 414; both mold bases 3 are built-in with jet channels 34 distributed circumferentially along the corresponding mold cavities 33, and in the mold closing state, the jet channels 34 are connected between the output end of the filter unit 43 and the mold cavity.

[0021] When the device is used, first, the positions of the two mold bases 3 are controlled by the driving assembly 2 so that the two mold bases 3 are in a mold separation state, such as Figure 1 As shown, in this state, the lower die base 32 is located at the lower side of the upper die base 31, and the semi-finished rubber ring 8 is placed in the mold cavity 33 of the lower die base 32, and then the relative position of the lower die base 32 and the upper die base 31 is adjusted by the driving component 2, so that the two are in a closed mold state. At the same time, the driving component 2 adjusts the position of the lower die base 32 and the sealing cover 42, so that the lower die base 32 and the sealing cover 42 enclose the mold cavity to form a sealed cavity surrounding the mold cavity, as shown in FIG. Figure 8-Figure 10As shown, there is a gap between the parting surface of the lower mold base 32 and the upper mold base 31, and the semi-finished rubber ring 8 is limited to the upper mold base 31 and the lower mold base 32. After the sealed cavity is enclosed, the second air outlet valve 414 is closed, the first air outlet valve 413 is opened, and the air pump 41 is started. The air pump 41 extracts the air in the sealed cavity, so that the air passes through the filter unit 43. The filter unit 43 is used to filter impurities in the air, so that the clean air is output to the jet flow channel 34 of the lower mold base 32 and the upper mold base 31. After the clean air passes through the jet flow channel 34 at a high speed, it is ejected from the position where the jet flow channel 34 is connected to the mold cavity 33. The ejected clean air acts on the mold. The inner wall of the cavity 33 and the semi-finished rubber ring 8 are cleaned, and at the same time, the semi-finished rubber ring 8 is blown so that there is a gap between the top of the semi-finished rubber ring 8 and the top of the cavity 33 of the upper mold base 31 and the bottom of the semi-finished rubber ring 8 and the bottom wall of the cavity 33 of the lower mold base 32, which facilitates the high-speed flow of air. After the impurities are blown out, they are sucked in by the air pump 41, filtered through the filter unit 43, and then enter the jet flow channel 34, forming a circulating flow of air.

[0022] Therefore, after adopting the above method, the air can be filtered and purified by the filter unit 43 during the circulation process, so that the clean air acts on the cavity wall of the mold cavity 33 and the semi-finished rubber ring 8 to achieve cleaning, and at the same time blows the semi-finished rubber ring 8 so that the air at the top of the mold cavity 33 of the upper mold base 31 and the bottom of the mold cavity 33 of the lower mold base 32 can flow out, reducing the amount of residual air during the final mold closing, which is beneficial to improving the quality of the final rubber sealing ring product. After the above method is continuously operated for a period of time, the first air outlet valve 413 is closed and the second air outlet valve 414 is opened, so that the air in the sealing cavity is continuously drawn away by the air pump 41 and discharged to the outside, and then the upper mold base 31 and the lower mold base 32 are heated, and the drive assembly 2 drives the upper mold base 31 and the lower mold base 32 to adjust to the following positions: Figure 3-Figure 7 The mold closing state shown in the figure makes the semi-finished rubber ring 8 soften and melt, and the material is filled in the cavity formed by the upper mold base 31 cavity 33 and the lower mold base 32 cavity 33, and finally formed. Because the residual air is reduced before molding, and the dust and impurities on the cavity 33 and the semi-finished rubber ring 8 can be automatically removed, the molding quality of the final product is improved. After the molding is completed, the drive assembly 2 adjusts the upper mold base 31 and the lower mold base 32 to the following position: Figure 1 The mold separation state shown is convenient for taking out the molded product.

[0023] A further improvement is that the driving assembly 2 includes a lifting unit 21 and a translation unit 22, both of which are arranged on the frame 1, the output end of the lifting unit 21 is connected to the upper die base 31, the output end of the translation unit 22 is connected to the lower die base 32, and the upper die base 31 is located in the sealing cover 42 and is connected to the sealing cover 42 through a tension spring 313. With the above structure, the lower die base 32 is driven to move in the horizontal direction by the translation unit 22, and the upper die base 31 and the sealing cover 42 are driven to move in the vertical direction by the lifting unit 21. The cooperation between the two facilitates the discharge of the semi-finished rubber ring 8 and the removal of the final product. Specifically, as Fig.11 As shown, the frame 1 of the present invention includes a horizontal base plate 11, which is a roughly rectangular plate-shaped structure. A fixing frame 12 is fixedly arranged above the base plate 11. Two sliding rods 13 are also fixed on the base plate 11, which are distributed side by side along its width direction and extend along its length direction. The lower die seat 32 is slidably sleeved outside the two sliding rods 13. A guide sleeve 14 extending in the vertical direction is fixed just above the fixing frame 12. The translation unit 22 is a translation cylinder, whose cylinder barrel is fixed above the base plate 11, and the piston rod is connected to the lower die seat 32 to drive the lower die seat 32 to slide along the length direction of the base plate 11. The lifting unit 21 is a lifting cylinder, whose cylinder barrel is fixed on the fixing frame 12, and the piston rod is fixedly connected to the upper die seat 31, as shown in FIG. Fig. 22 and Fig.23 As shown, a guide rod 314 is fixed on the upper mold base 31, which corresponds to the guide sleeve 14 one by one and is slidably arranged on the inner side of the guide sleeve 14. Through the sliding cooperation of the guide rod 314 and the guide sleeve 14, the upper mold base 31 can stably move in the vertical direction when the lifting cylinder is running; the tension spring 313 is sleeved on the outside of the guide rod 314 one by one, the bottom end of the tension spring 313 is connected to the upper mold base 31, and the top end is connected to the inner top wall of the sealing cover 42. The guide rod 314 is sealingly slidably arranged on the top of the sealing cover 42, so that when the lifting cylinder is running, it can drive the sealing cover 42 and the upper mold base 31 to move up and down at the same time. When the bottom of the sealing cover 42 abuts against the lower mold base 32, the lifting cylinder continues to operate, so that the length of the tension spring 313 can be further increased. The elastic force of the tension spring 313 is used to increase the pressure between the sealing cover 42 and the lower mold base 32 to ensure the sealing.

[0024] The specific structure of the filtering unit 43 is as follows: Figure 5 , Figure 6 and Fig.11As shown, the filter unit 43 includes a filter barrel 431 with an open top, an outer flange 4312 is fixed to the top circumferential outer edge of the filter barrel 431, an inner convex ring 4311 coaxial with the centerline is fixed to the circumferential inner wall, a filter rack 433 is arranged on the inner side of the inner convex ring 4311, and the filter rack 433 is a barrel-shaped structure for placing a filter element, an outer convex ring 4331 is fixed to the top circumferential outer edge of the filter rack 433, the bottom surface of the outer convex ring 4331 is in contact with the top surface of the inner convex ring 4311, and the circumferential outer edge of the outer convex ring 4331 is in contact with the circumferential inner wall of the filter barrel 431. The filter barrel 431 is sealed and connected to the wall, and the outer diameter of the filter rack 433 is consistent with the inner diameter of the inner convex ring 4311, which is convenient for the filter rack 433 to seal and penetrate the inner side of the inner convex ring 4311. The bottom of the filter barrel 431 is provided with an air outlet located below the inner convex ring 4311, and the air outlet is connected with the jet flow channel 34 of the lower mold base 32 and the upper mold base 31 through the clean air pipe 44. The top cover of the filter barrel 431 is provided with a barrel cover 432, and the top of the filter barrel 431 is provided with an air inlet located above the inner convex ring 4311, and the air inlet is connected to the first air outlet end 411 of the air pump 41. The top cover of the filter barrel 431 is provided with a barrel cover 432. In order to achieve precise docking between the barrel cover 432 and the filter barrel 431, a positioning convex plate 4321 is provided below the barrel cover 432. The positioning convex plate 4321 is disc-shaped, and its circumferential outer edge is sealedly connected to the circumferential inner part of the top of the filter barrel 431. A clamping frame 4322 is also provided below the positioning convex plate 4321. There is a gap between the clamping frame 4322 and the circumferential inner wall of the filter barrel 431, and the outer convex ring 4331 is clamped between the clamping frame 4322 and the inner convex ring 4311. The top surface of the outer flange 4312 is also fixed with four fixed shafts 4313 extending in the vertical direction and distributed in a circular array with the axis line of the outer flange 4312 as the center line. A protrusion 4314 is fixed to the top of the fixed shaft 4313. A locking arm 434 is provided on the outer sleeve of the fixed shaft 4313. The locking arm 434 rotates on the fixed shaft 4313 with the axis line of the fixed shaft 4313 as the center line. The movable path of the locking arm 434 includes a locking position and a disassembly position. In the locking position, the locking arm 434 is located directly above the top opening of the filter barrel 431 to lock the barrel cover 432 to the outer flange 4312. In the disassembly position, the locking arm 434 is located on the upper side of the top opening of the filter barrel 431.

[0025] After adopting the above structure, the locking arm 434 is rotated to Figure 6 and Fig.11In the locking position shown, the locking arm 434 locks the barrel cover 432 on the outer flange 4312. While fixing the barrel cover 432, the position of the filter rack 433 can also be tightened through the pressing frame 4322 below the barrel cover 432. After a period of use, the locking arm 434 is rotated to the disassembly position, so that the locking arm 434 is rotated to the upper side of the top opening of the filter barrel 431, so that it is convenient to remove the barrel cover 432, take out the filter rack 433, replace the filter element in the filter rack 433, and then install the filter rack 433 with the filter element on the inner convex ring 4311, cover the barrel cover 432, and rotate the locking arm 434 to the locking position to fix the barrel cover 432 and the filter rack 433. In this way, it is convenient to replace the filter element and facilitate the long-term operation of the filter unit 43. When the filter unit 43 is in operation, gas containing impurities enters the filter barrel 431 from the air inlet, passes through the filter element in the filter frame 433, and after the impurities are filtered out, the clean air can be discharged from the air outlet at the bottom of the filter barrel 431, and discharged into the mold cavity 33 of the upper mold base 31 and the lower mold base 32 through the clean air pipe 44, so as to clean the mold cavity 33 and the semi-finished rubber ring 8, and blow the semi-finished rubber ring 8.

[0026] A further improvement is that the jet flow channels 34 are evenly spaced along the circumference of the corresponding mold cavity 33, the jet flow channels 34 of the lower mold base 32 are connected to the bottom of the corresponding mold cavity 33, and the jet flow channels 34 of the upper mold base 31 are connected to the top of the corresponding mold cavity 33. With the above design, it can be ensured that when the high-speed airflow is discharged from the jet flow channels 34, the action range is uniform, and the mold cavity 33 and the semi-finished rubber ring 8 can be affected by the clean airflow along the circumference, thereby ensuring the cleaning effect.

[0027] As a further improvement, both mold bases 3 are provided with docking holes which are connected with their own mold cavities 33 through jet channels 34 and are coaxial with the mold cavities 33; one of the holes which is connected with the output end of the filter unit 43 is provided with a positioning tube 3113 which protrudes from the corresponding parting surface on its inner side; the side wall of the positioning tube 3113 is provided with an air vent 3114 which is connected with the corresponding jet channel 34; in the closed mold state and the clamped mold state, the two ends of the positioning tube 3113 are respectively sealed and connected with the circumferential inner walls of the two docking holes. Specifically, of the two docking holes, the docking through hole 36 is arranged on the upper mold base 31, and the docking through hole 36 is coaxially located on the inner side of the mold cavity 33 of the upper mold base 31. The docking blind hole 35 is arranged on the lower mold base 32. The positioning tube 3113 is a circular tube, and the circumferential outer edge is sealed and connected with the circumferential inner wall of the docking through hole 36, and the bottom end protrudes from the parting surface of the upper mold base 31. The air vent 3114 is arranged on the side wall of the positioning tube 3113, and the aperture is smaller than the inner diameter of the positioning tube 3113. The docking blind hole 35 is coaxially located on the inner side of the mold cavity 33 of the lower mold base 32, and the inner diameter of the docking blind hole 35 is consistent with that of the docking through hole 36. In the mold closing state and the mold closing state, the docking blind hole 35 and the docking through hole 36 are coaxial, and an inflation tube 312 is fixed on the upper mold base 31, which slides along the vertical direction and penetrates the fixed frame 12. An inflation valve 3121 is provided on the inflation tube 312. The bottom end of the inflation tube 312 is connected to the top of the docking through hole 36, and the top end is connected to the end of the clean air tube 44 away from the filter unit 43; the input end of the air pump 41 is connected to the exhaust pipe 415, and the end of the exhaust pipe 415 away from the air pump 41 is connected to the sealing cover 42 and connected to the inner cavity of the sealing cover 42. The exhaust pipe 415 and the clean air pipe 44 are both hoses.

[0028] When the device is running, the inflation valve 3121 is opened. When the upper mold base 31 and the lower mold base 32 are in the mold closing state, the sealing cover 42 and the upper mold base 31 are enclosed to form a sealed cavity, the exhaust pipe 415 is connected to the sealed cavity, the second air outlet valve 414 is closed, the first air outlet valve 413 and the inflation valve 3121 are opened, and after the air pump 41 is started, the air in the sealed cavity can be extracted through the exhaust pipe 415. After the air is filtered by the filter unit 43, clean air is formed. After the clean air passes through the clean air pipe 44 and the inflation pipe 312 in turn, it enters the positioning pipe 3113 of the upper mold base 31 and is divided into two parts. One part continues to flow downward to the bottom of the positioning pipe 3113, and then enters the jet flow channel 34 of the lower mold base 32 to blow the semi-finished rubber ring 8 from the bottom, and the remaining part flows out from the air vent 3114 with a smaller aperture and enters the jet flow channel 34 of the upper mold base 31 to blow the semi-finished rubber ring 8 from the top. It should be noted that since the aperture of the air hole 3114 is smaller than the inner diameter of the positioning tube 3113, and the sum of the cross-sectional areas of the air holes 3114 is smaller than the cross-sectional area of ​​the circumferential inner wall of the positioning tube 3113, the clean airflow entering the jet channel 34 in the lower mold base 32 is greater than the clean airflow entering the jet channel 34 in the upper mold base 31, and the airflow ejected from the jet channel 34 of the lower mold base 32 is always stronger than the airflow ejected from the jet channel 34 of the upper mold base 31.

[0029] A further improvement is that it also includes an adjustment component, which is used to adjust the size of the airflow ejected from the end of the jet flow channel 34 away from the docking hole, so that the semi-finished rubber ring 8 limited between the mold cavities 33 of the two mold bases 3 can move. In the active state, the axis of the semi-finished rubber ring 8 is obliquely intersected with the axis of the cavity, and the axis of the semi-finished rubber ring 8 revolves around the axis of the cavity as the center line. By adjusting the components, the size of the airflow ejected from the corresponding connection between the jet flow channel 34 and the mold cavity 33 is continuously changed, thereby continuously changing the comprehensive force size of the semi-finished rubber ring 8 at various locations along the circumferential direction. Some positions are subjected to a larger upward force, thereby being able to overcome the influence of gravity of the part, move upward, and separate from the cavity wall of the lower mold base 32 cavity 33, forming a gap for airflow to pass through, while the upward force exerted on some positions is insufficient to overcome the influence of gravity corresponding to the part, so that the part still maintains contact with the cavity wall of the lower mold base 32 cavity 33, causing the axis of the semi-finished rubber ring 8 to tilt. In this state, the strength of the airflow ejected from the jet flow channel 34 at various locations is continuously changed, thereby continuously changing the position where the semi-finished rubber ring 8 separates from the cavity wall of the lower mold base 32 cavity 33, causing the axis of the semi-finished rubber ring 8 to revolve around the axis of the cavity as the center line.

[0030] During the operation of the air pump 41, the greater the power consumption of the air pump 41, the smaller the inclination of the axis of the semi-finished rubber ring 8 relative to the horizontal plane, and the smaller the angle between the axis of the semi-finished rubber ring 8 and the axis of the mold cavity 33. Based on the above situation, when the air pump 41 is in operation, it first maintains a constant power to ensure that the sum of the air volumes entering the upper mold base 31 and the lower mold base 32 is constant, and then intermittently reduces the power and keeps the reduced power fixed, so that the sum of the airflows entering the upper mold base 31 and the lower mold base 32 gradually decreases and eventually reaches zero. According to the amount of gas introduced into the upper die seat 31 and the lower die seat 32, the axis of the semi-finished rubber ring 8 rotates with the axis of the mold cavity 33 as the center line, and the angle between the axis of the semi-finished rubber ring 8 and the axis of the mold cavity 33 gradually decreases until the axis of the semi-finished rubber ring 8 coincides with the axis of the mold cavity 33. In this way, under the influence of the clean airflow, the semi-finished rubber ring 8 moves while its axis gradually tends to the axis of the mold cavity 33, so that the position of the semi-finished rubber ring 8 can be adjusted, so that the axis of the semi-finished rubber ring 8 coincides with the axis of the mold cavity 33, so that when the upper die seat 31 and the lower die seat 32 are heated, the rubber material of the semi-finished rubber ring 8 can fill the cavity formed by the combination of the two mold cavities 33, and the filling degree is uniform, thereby improving the quality of the final rubber ring.

[0031] A further improvement is that the jet flow channel 34 includes an adjusting section 341 and a fixed section 342. The adjusting section 341 is in the shape of a straight strip, one end of which is connected to the docking hole, and the other end is sealed with a sealing cover 37. The sealing cover 37 is sealed with an adjusting rod 38 with the same length direction as the adjusting section 341. There is a jet gap 3411 between the circumferential outer edge of the adjusting rod 38 and the circumferential inner wall of the adjusting section 341. One end of the fixed section 342 is connected to the mold cavity 33, and the other end is connected to the jet gap 3411. The adjusting component includes a power unit 5 and two transmission units 6 corresponding to the two mold bases 3 one by one. The power unit 5 drives the adjusting rod 38 to perform periodic axial reciprocating motion through each transmission unit 6.

[0032] Specifically, Figure 7 , Fig.17 and Fig.26As shown, the clean airflow output by the filter unit 43 is discharged from the positioning tube 3113, enters the adjustment section 341 of the jet flow channel 34, and then is discharged from the fixed section 342 to enter the mold cavity 33. The end of the adjustment section 341 away from the docking hole is sealed and penetrates the adjustment rod 38. The jet gap 3411 is formed by the adjustment rod 38 and the circumferential inner wall of the adjustment section 341. The power unit 5 acts on the transmission unit 6 to change the length of the adjustment rod 38 extending into the adjustment section 341, thereby changing the length of the jet gap 3411. Since the cross-sectional size of the jet gap 3411 is smaller than the cross-sectional size of other positions of the adjustment section 341, as the length of the jet gap 3411 changes, the resistance of the airflow through the adjustment section 341 changes, thereby adjusting the amount of clean air passing through each jet flow channel 34, so as to change the airflow force acting on the semi-finished rubber ring 8, so as to realize the movement of the semi-finished rubber ring 8 with the axis center line revolving around the axis center line of the mold cavity 33 as the center line.

[0033] A further improvement is that the transmission unit 6 includes a transmission ring 61 which rotates in the mold base 3 with the axis of the mold cavity 33 as the center line, the adjusting rod 38, the docking hole and the jet flow channel 34 are all located on the inner side of the transmission ring 61, and the cross-section of the circumferential inner wall of the transmission ring 61 includes arc segments 611 which are connected in sequence and the centers are all on the axis of the mold cavity 33. The central angles corresponding to the arc segments 611 are the same. Along the circumference of the transmission ring 61, the radii corresponding to the arc segments 611 first increase and then decrease. The cross-section of the circumferential inner wall of the transmission ring 61 is an axially symmetrical figure. The adjusting rod 38 is connected to a compression spring 381, and the compression spring 381 is used to make the adjusting rod 38 tend to move away from the mold cavity 33, and the power unit 5 drives the transmission ring 61 to rotate at a constant speed.

[0034] The specific structure of the transmission ring 61 is as follows: Fig.17 , Fig.19 and Fig.21As shown, the cross section of the circumferential inner wall of the transmission ring 61 is composed of eight arc segments 611 connected in sequence end to end. Correspondingly, the upper die base 31 and the lower die base 32 are both provided with eight jet flow channels 34 distributed in a circular array. The eight arc segments 611 on the cross section of the circumferential inner wall of the transmission ring 61 are cocentric and the center of the circle is on the axial line of the mold cavity 33. The eight arc segments 611 are arranged in mirror symmetry, and the corresponding central angles are consistent. Specifically, the eight arc segments 611 include a first arc segment 611, a second arc segment 611, a third arc segment 611, and a fourth arc segment 611 with increasing diameters in sequence. 1 and the fifth arc segment 611, the first arc segment 611 and the fifth arc segment 611 are arranged opposite to each other, the second arc segment 611, the third arc segment 611 and the fourth arc segment 611 are symmetrically arranged with two and are sequentially connected between the first arc segment 611 and the fifth arc segment 611; the compression spring 381 is sleeved outside the adjusting rod 38, and a roller frame 382 is provided at one end of the adjusting rod 38 adjacent to the circumferential inner wall of the transmission ring 61, and an adjusting roller 383 is rotated on the roller frame 382, ​​the axial direction of the adjusting roller 383 is parallel to the axial direction of the mold cavity 33, and the adjusting roller 383 abuts against one of the arc segments 611. The elastic force generated by the compression spring 381 acts on the roller frame 382, ​​so that the wheel surface of the adjusting roller 383 contacts the circumferential inner wall of the transmission ring 61, thereby reducing the friction between the adjusting rod 38 and the transmission ring 61; the power unit 5 acts on the transmission unit 6, so that the transmission ring 61 rotates around its own axis, and the eight arc segments 611 rotate around the axis of the mold cavity 33 as the center line, and contact the adjusting rollers 383 on the eight adjusting rods 38 in turn. The adjusting rod 38 contacting the first arc segment 611 has a short length extending into the corresponding adjusting segment 341 and a short length of the jet gap 3411. Correspondingly, the clean airflow ejected from the jet flow channel 34 is large; and correspondingly, the adjusting rod 38 contacting the fifth arc segment 611 has a long length extending into the corresponding adjusting segment 341 and a long length of the jet gap 3411. Correspondingly, the clean airflow ejected from the jet flow channel 34 is small.

[0035] In the present invention, in the mold closing state and the mold closing state, the eight jet flow channels 34 on the upper mold base 31 are arranged one by one directly above the eight jet flow channels 34 on the lower mold base 32, and in the two transmission rings 61 corresponding to the upper mold base 31 and the lower mold base 32, the first arc segment 611 of the transmission ring 61 corresponding to the upper mold base 31 is located directly above the fifth arc segment 611 of the transmission ring 61 corresponding to the lower mold base 32, and the fifth arc segment 611 of the transmission ring 61 corresponding to the upper mold base 31 is located directly above the first arc segment 611 of the transmission ring 61 corresponding to the lower mold base 32, so as to ensure that the jet gap 34 on the upper mold base 31 is the same as the upper mold base 31 at the same horizontal position. The sum of the length of 411 and the length of the jet gap 3411 on the lower die base 32 is a constant value. When the length of the jet gap 3411 on the upper die base 31 decreases, the airflow ejected from the jet channel 34 of the upper die base 31 increases, and the corresponding airflow ejected from the jet channel 34 of the lower die base 32 decreases, and the upward force on the corresponding position of the semi-finished rubber ring 8 decreases. Conversely, when the length of the jet gap 3411 on the upper die base 31 increases, the airflow ejected from the jet channel 34 of the upper die base 31 weakens, and the corresponding airflow ejected from the jet channel 34 of the lower die base 32 increases, and the upward force on the corresponding position of the semi-finished rubber ring 8 increases.

[0036] A further improvement is that the transmission unit 6 further includes a driving wheel 62, a synchronous belt 63 and a driven wheel 64, the driving wheel 62 is connected to the driven wheel 64 through the synchronous belt 63, the driven wheel 64 is located on the side of the corresponding mold base 3 facing away from its own parting surface and is connected to the transmission ring 61 coaxially, and the power unit 5 drives the driving wheel 62 to rotate around its own axis. The power unit 5 can drive the driving wheel 62 to rotate, so that the driving wheel 62 acts on the driven wheel 64 through the synchronous belt 63, and then drives the transmission ring 61 coaxially connected to the driven wheel 64 to rotate, acting on the adjustment rod 38, changing the length of the jet gap 3411, and then changing the airflow intensity sprayed from the jet flow channel 34 into the mold cavity 33.

[0037] A further improvement is that the power unit 5 includes a power motor 51, the output shaft of the power motor 51 extends in the vertical direction and is fixed with a power rod 52, the axis of the power rod 52 is parallel to the axis of the output shaft of the power motor 51 and there is a gap between them, the power rod 52 is fixedly penetrated through the driving wheel 62 of the transmission unit 6 corresponding to one of the mold bases 3, and the driving wheel 62 of the other transmission unit 6 is provided with a socket 622 for the power rod 52 to pass through in a sealed manner. After adopting the above structure, when the device is adjusted from the mold separation state to the mold closing state or the mold closing state, the position on the driving wheel 62 is adjusted so that the sockets 622 on the two driving wheels 62 are coaxial, and the lifting unit 21 drives the upper mold base 31 to descend, so that the power rod 52 in the power unit 5 seals and passes through the socket 622, thereby completing the transmission connection between the power unit 5 and the two transmission units 6. After the power motor 51 drives the power rod 52 to rotate about the axis of the driving wheel 62, the driving wheels 62 in the two transmission units 6 can be driven to rotate, and the synchronous rotation of the two transmission rings 61 is realized by relying on the synchronous belt 63 and the driven wheel 64 connected by the transmission.

[0038] A further improvement is that the outer diameters of the driving wheel 62 and the driven wheel 64 are consistent, and an alignment mark 621 is provided between the opposite surfaces of the two driving wheels 62 in the transmission units 6 corresponding to the two mold bases 3 . After adopting the above improvements, when the translation unit 22 drives the lower mold base 32 to move to the bottom of the upper mold base 31, the position on the driving wheel 62 is adjusted so that the alignment marks 621 on the two driving wheels 62 are aligned, so that after the upper mold base 31 is lowered, the power rod 52 in the power unit 5 can be accurately inserted into the socket 622, and the outer diameters of the driving wheel 62 and the driven wheel 64 are consistent, which can ensure that the rotation speeds of the two are consistent. When the two driving wheels 62 are aligned, on the two transmission rings 61, the line connecting the midpoint of the first arc segment 611 of the upper transmission ring 61 and the midpoint of the fifth arc segment 611, and the line connecting the midpoint of the first arc segment 611 of the lower transmission ring 61 and the midpoint of the fifth arc segment 611 are parallel to each other and in opposite directions, thereby ensuring that the sum of the length of the jet gap 3411 on the upper mold base 31 and the length of the jet gap 3411 on the lower mold base 32 is a constant value.

[0039] The lower die base 32 and the connection structure between the lower die base 32 and the corresponding transmission unit 6 are as shown in FIG. Figure 12-15As shown, the lower mold base 32 includes a bottom mold plate 72 and a top mold plate 71 arranged directly above the bottom mold plate 72. Both are square plate structures and are fixedly connected at the four corners by threaded lower bolts 328 and lower nuts 329. A circular mold cavity 33 is arranged on the top surface of the top mold plate 71. A horizontal lower mold base plate 321 is arranged below the bottom mold plate 72. The lower mold base plate 321 is slidably sleeved outside the sliding rod 13 and is fixedly connected to the piston rod of the translation cylinder. The lower mold base plate 321 is driven by the translation cylinder to slide along the sliding rod 13, thereby realizing the translation of the lower mold base 32. A supporting roller 322 is also arranged below the lower mold base 32. The wheel surface of the supporting roller 322 is in contact with the bottom plate 11. The support of the lower mold base plate 321 is realized by the supporting roller 322, thereby reducing the stress deformation of the sliding rod 13.

[0040] Four guide columns 326 extending in the vertical direction and arranged at adjacent corners are fixed between the top template 71 and the bottom template 72. The top and bottom ends of the four guide columns 326 protrude from the top surface of the top template 71 and the bottom surface of the bottom template 72 respectively. Four guide sleeves 327 are also arranged on the lower mold base plate 321. The bottom ends of the four guide columns 326 are plugged into and matched with the four guide sleeves 327 in a one-to-one correspondence to accurately place the top template 71 and the bottom template 72 on the lower mold base plate 321.

[0041] The bottom surface of the top template 71 and the top surface of the bottom template 72 are provided with facing assembly blind holes 75, the inner diameter of the assembly blind hole 75 is consistent with the outer diameter of the transmission ring 61, and the transmission ring 61 rotates around its own axis between the cavities formed by the two assembly blind holes 75. The top surface of the top template 71 is provided with a first upper through hole, and the bottom surface of the bottom template 72 is provided with a first lower through hole. The first upper through hole and the first lower through hole are respectively connected to the two assembly blind holes 75. The bottom of the transmission ring 61 is fixed with a coaxial centerline. The bottom of the connecting ring 614 is fitted with the bottom of the assembly blind hole 75 and a transmission tube 612 is fixed on the coaxial centerline. A groove 613 extending in the vertical direction is provided on the side wall of the transmission tube 612. The inner bottom walls of the two assembly blind holes 75 are also coaxially connected with an air injection convex ring 76. The air injection convex ring 76 has eight air injection grooves 761 distributed in a circular array on a side facing away from the bottom wall of the assembly blind hole 75. The two air injection grooves 761 facing each other are combined to form an air injection groove 613 for the lower die seat 32. The lower mold base 32 further includes a fixing plate 73 coaxially located inside the jet convex ring 76 and having a gap with the jet convex ring 76. The fixing plate 73 is used to cover the first lower through hole so that it is enclosed with the top mold plate 71 and the bottom mold plate 72 to form a docking blind hole 35. The bottom surface of the fixing plate 73 is coaxially fixedly connected to the lower mold base 32. A fixed boss 74 is connected, and four positioning grooves 741 extending in the vertical direction are distributed in a circular array on the circumferential outer edge of the fixed boss 74; the circumferential outer edge of the fixed boss 74 is sealed with the circumferential inner wall of the transmission tube 612; on the bottom template 72, a sealing cover 37 is fixed on the end of the air jet groove 761 away from the fixed plate 73, and the circumferential outer edge of the sealing cover 37 is used to seal with the end of the adjustment section 341 composed of the two opposite air jet grooves 761 and for the adjustment rod 38 to pass through in a sealed manner.

[0042] A lower positioning plate 3211 is also fixed on the top surface of the lower mold base plate 321. Four lower positioning strips 3212 extending in the vertical direction and distributed in a circular array are fixed on the lower positioning plate 3211. The lower positioning strips 3212 are matched and plugged with the positioning grooves 741 in a one-to-one correspondence. In the transmission unit 6 below, the driven wheel 64 is a cylindrical structure, and its circumferential inner wall is sealed with the transmission tube 612 and a convex key 641 extending in the vertical direction is provided on the circumferential inner wall. The convex key 641 is matched with the groove 613 on the outer wall of the transmission tube 612.

[0043] Two bearings 65 are arranged on the top surface of the lower mold base plate 321. The outer rings of the two bearings 65 are fixed to the top surface of the lower mold base plate 321, and the inner rings are fixedly connected to the driving wheel 62 and the driven wheel 64 coaxially, respectively, to support the stable rotation of the driving wheel 62 and the driven wheel 64 in the lower transmission unit 6. A closed-loop sealing groove 323 is arranged on the top surface of the lower mold base plate 321. An elastic sealing frame 324 is arranged inside the sealing groove 323. The material of the sealing frame 324 is preferably rubber. The sealing frame 324 protrudes from the notch of the sealing groove 323. The projection of the top mold plate 71 on the horizontal plane is located inside the projection of the sealing frame 324 on the horizontal plane. An inner flange 421 is arranged on the circumferential inner wall of the bottom of the sealing cover 42. In the closed mold state and the mold closing state, the inner flange 421 covers the notch of the sealing groove 323 and abuts against the sealing frame 324 to ensure that the sealing cavity is isolated from the outside. After adopting the above structure, when the lower mold base 32 is connected to the transmission unit 6, the transmission ring 61 is placed between the top mold plate 71 and the bottom mold plate 72, so that the connecting ring 614 on the transmission ring 61 fits with the inner bottom wall of the blind hole 75 of the bottom mold plate 72, and the transmission tube 612 on the connecting ring 614 is sealed and penetrated through the first lower through hole, and then the fixed plate 73 is placed on the connecting ring 614, and the fixed boss 74 is sealed and penetrated through the transmission tube 612, and the top mold plate 71 and the bottom mold plate 72 can be fixedly connected by the lower bolt 328 and the lower nut 329, and then, the position of the fixed plate 73 and the transmission tube 612 is adjusted, and the guide column 326 is aligned with the guide sleeve 327, and the bottom mold plate 72 is placed to complete the plug-in fit of the groove 613 and the convex key 641, and the plug-in fit of the positioning groove 741 and the lower positioning strip 3212. The horizontal positions of the top mold plate 71 and the bottom mold plate 72 are fixed by the guide column 326, and the position of the fixed plate 73 can be fixed by the lower positioning bar 3212 and the positioning groove 741. After the air pump 41 is running, the clean airflow enters the gap between the fixed plate 73 and the jet convex ring 76 through the first upper through hole, and then enters the adjustment section 341 composed of the jet groove 761, and then enters the mold cavity 33 through the fixed section 342 on the top mold plate 71, and acts on the bottom of the semi-finished rubber ring 8.

[0044] The structure of the upper die base 31 is similar to that of the lower die base 32. Figure 22-Figure 26As shown, the upper mold base 31 includes a horizontally arranged bottom mold base 72 and a top mold base 71 horizontally attached to the bottom mold base 72, both of which are square plate structures, fixedly connected at the four corners by upper bolts 315 and first upper nuts 316 connected by threads, and a circular mold cavity 33 is arranged on the bottom surface of the bottom mold base 72; a horizontal upper mold base plate 311 is arranged above the top mold base plate 71, and the upper mold base plate 311 is fixedly connected to the bottom end of the piston rod of the lifting cylinder and the bottom end of the guide rod 314, so that after the lifting cylinder is operated, the upper mold base 31 is smoothly moved in the vertical direction through the slidingly matched guide rod 314 and guide sleeve 14; the inflation tube 312 seals and penetrates the upper mold base plate 311; the tension spring 313 is sleeved on the outside of the guide rod 314, and its bottom end and top end are respectively connected to the top mold base 71 and the inner top wall of the sealing cover 42, so that when the top mold base 71 is lifted and moved, the sealing cover 42 can be lifted and moved with the top mold base 71 without contacting the lower mold base 32.

[0045] Four guide holes extending in the vertical direction and arranged adjacent to the four corners are fixed between the top mold plate 71 and the bottom mold plate 72. The four guide holes correspond one by one and are adapted to the tops of the four guide columns 326 to ensure precise mold joining and closing operations between the upper mold base 31 and the lower mold base 32. The bottom surface of the top template 71 and the top surface of the bottom template 72 are provided with opposite assembly blind holes 75, the inner diameter of the assembly blind hole 75 is consistent with the outer diameter of the transmission ring 61, and the transmission ring 61 rotates around its own axis between the cavities formed by the two assembly blind holes 75. The top surface of the top template 71 is provided with a first upper through hole, and the bottom surface of the bottom template 72 is provided with a first lower through hole. The first upper through hole and the first lower through hole are respectively connected to the two assembly blind holes 75. A coaxial connecting ring 614 is fixed to the top of the transmission ring 61. The top surface of the connecting ring 614 is fitted with the bottom of the assembly blind hole 75 and a transmission tube 612 is fixed coaxially. The side wall of the transmission tube 612 is provided with a groove 613 extending in the vertical direction.

[0046] An air jet convex ring 76 is also coaxially connected to the inner bottom wall of the two assembly blind holes 75. Eight air jet grooves 761 are distributed in a circular array on the side of the air jet convex ring 76 facing away from the bottom wall of the assembly blind hole 75. The two opposite air jet grooves 761 are combined to form an adjustment section 341 of the air jet channel 34 of the lower mold base 32, and the fixed section 342 is a fixed air jet channel formed between the top of the mold cavity 33 of the bottom mold plate 72 and the bottom of the air jet groove 761 of the top mold plate 71. The lower die base 32 also includes a fixed plate 73 whose coaxial centerline is located on the inner side of the jet convex ring 76 and there is a gap with the jet convex ring 76. The fixed plate 73 and the connecting ring 614 are concentric rings, and a tubular fixed boss 74 extending upward is fixed on the top of the fixed plate 73. The top of the fixed boss 74 protrudes above the top template 71, so that the fixed plate 73, the top template 71 and the bottom template 72 are surrounded by a docking through hole 36; four positioning grooves 741 extending in the vertical direction are distributed in an annular array on the circumferential outer edge of the fixed boss 74; the circumferential outer edge of the fixed boss 74 is sealed and fitted with the circumferential inner wall of the transmission tube 612; on the top template 71, a sealing cover 37 is fixed on the end of the jet groove 761 away from the fixed plate 73, and the circumferential outer edge of the sealing cover 37 is used to seal with the end of the adjustment section 341 composed of the two opposite jet grooves 761 and for the adjustment rod 38 to pass through in a sealed manner.

[0047] The bottom surface of the upper mold base plate 311 is also fixed with an upper positioning plate 3111, and an upper bolt 315 is passed through the upper positioning plate 3111 and is threadedly connected with a second upper nut 317 to fix the relative positions of the upper mold base plate 311, the top mold plate 71 and the bottom mold plate 72. Four upper positioning bars 3112 extending in the vertical direction and distributed in a circular array are fixed on the upper positioning plate 3111. The upper positioning bars 3112 are matched and plugged with the positioning grooves 741 in a one-to-one correspondence; a positioning tube 3113 fixed to the bottom surface of the upper mold base plate 311 and having an outer diameter consistent with the inner diameter 36 of the docking through hole is also arranged between the four upper positioning bars 3112. In the upper transmission unit 6, the driven wheel 64 is a cylindrical structure, and its circumferential inner wall is sealed with the transmission tube 612 and a convex key 641 extending in the vertical direction is arranged on the circumferential inner wall, and the convex key 641 is matched with the groove 613 on the outer wall of the transmission tube 612. Two bearings 65 are provided on the bottom surface of the upper mold base plate 311. The outer rings of the two bearings 65 are fixed to the bottom surface of the upper mold base plate 311, and the inner rings are fixedly connected to the driving wheel 62 and the driven wheel 64 coaxially to ensure that the driving wheel 62 and the driven wheel 64 in the lower transmission unit 6 can rotate stably around their respective axis lines.

[0048] In the power unit 5, the power motor 51 is fixed on the top surface of the upper mold base plate 311 and is set downward. The output shaft is coaxially fixedly connected with a power disk 53 that is attached to the bottom surface of the upper mold base plate 311 and located on the inner side of the bearing 65. Four power rods 52 extending downward and distributed in a circular array are fixed on the bottom surface of the power disk 53. In the transmission unit 6 located above, the driving wheel 62 is provided with sockets 622 corresponding to the four power rods 52 one by one, and the power rods 52 are fixedly penetrated through the inner side of the sockets 622; in the transmission unit 6 located below, the driving wheel 62 is provided with sockets 622 for the four power rods 52 to pass through in a sealed manner one by one; arrow-shaped alignment marks 621 are provided on the opposite surfaces of the two driving wheels 62, and a calibration piece 325 is also provided on the upper mold base plate 311. The top of the calibration piece 325 is flush with the top surface of the driving wheel 62 in the transmission unit 6 below and is adjacent to the driving wheel 62.

[0049] After adopting the above structure, when the upper mold base 31 is connected to the transmission unit 6, the transmission ring 61 is placed between the top mold plate 71 and the bottom mold plate 72, so that the connecting ring 614 on the transmission ring 61 fits with the inner bottom wall of the blind hole 75 of the top mold plate 71, and the transmission tube 612 on the connecting ring 614 is sealed and penetrated through the second upper through hole, and then the fixing plate 73 is placed on the connecting ring 614, and the fixing boss 74 is sealed and penetrated through the transmission tube 612, and the upper bolt 315, the first upper nut 316 and the second upper nut 317 can fix the relative positions of the top mold plate 71, the bottom mold plate 72 and the upper mold base plate 311, and at the same time, the positioning tube 3113 is sealed and penetrated through the inner side of the docking through hole 36; during the assembly process, by adjusting the angle of the fixing plate 73 and the transmission tube 612, the top mold plate 71 is close to the upper mold base plate 311, so that the groove 613 is plugged into and matched with the convex key 641, and the positioning groove 741 is plugged into and matched with the upper positioning strip 3112. Further, in order to ensure the strength of the connection structure between the upper die base 31 and the transmission unit 6 and prevent the fixed disk 73 from falling, after the groove 613 and the convex key 641 and the positioning groove 741 and the upper positioning strip 3112 are plugged in, the corresponding welding and fixing operation can be performed at the plugging position. Before closing and closing the mold, adjust the position of the driving wheel 62 on the lower transmission unit 6 so that the arrow-shaped alignment mark 621 on the driving wheel 62 points to the calibration piece 325, and the power motor 51 controls the rotation of the power disk 53, and acts on the driving wheel 62 of the upper transmission unit 6 through the power rod 52, adjust the orientation of the alignment mark 621 on the driving wheel 62 so that it points to the same direction as the lower driving wheel 62, and then, after the lower die base 32 is moved to the lower part of the upper die base 31 by the translation unit 22, the four power rods 52 are located directly above the four jacks 622 on the lower driving wheel 62, and the sum of the length of the jet gap 3411 on the upper die base 31 and the length of the jet gap 3411 on the lower die base 32 is a constant value. Afterwards, the lifting unit 21 drives the upper mold base 31 to descend, so that the four power rods 52 can be respectively inserted into the four insertion holes 622. In this state, when the power motor 51 drives the four power rods 52 to rotate, the four power rods 52 act on the inner walls of the four insertion holes 622, thereby driving the driving wheels 62 in the two transmission units 6 to rotate synchronously, and then driving the two transmission rings 61 to rotate synchronously, adjusting the strength of the airflow ejected from each jet flow channel 34 to blow the semi-finished rubber ring 8, and driving the semi-finished rubber ring 8 to revolve around the axial center line of the mold cavity 33 as the center line.

[0050] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A mold assembly for wafer electroplating sealing gasket, include: Rack(1); A drive assembly (2) and two horizontal mold bases (3), the two mold bases (3) being an upper mold base (31) and a lower mold base (32), respectively; an annular mold cavity (33) is provided on the parting surfaces of the two mold bases (3); the drive assembly (2) drives the two mold bases (3) to separate, close and close the molds; in the separated mold state, the lower mold base (32) is located at the lower side of the upper mold base (31); in the closed mold state, the mold cavities (33) of the two mold bases (3) are directly opposite to and closely adjacent to the semi-finished rubber ring (8) for limiting the position of the semi-finished product; in the closed mold state, the mold cavities (33) of the two mold bases (3) are combined to form a mold cavity; An air extraction component (4), the air extraction component (4) comprising an air pump (41) and a sealing cover (42), the sealing cover (42) being connected to an output end of the driving component (2), the sealing cover (42) and the lower mold base (32) in a mold clamping and mold closing state enclosing a sealed cavity, the mold cavity being located inside the sealed cavity, and an air inlet end of the air pump (41) being in communication with the sealed cavity; Features: The air extraction component (4) further comprises a filter unit (43); the air pump (41) comprises a first air outlet end (411) connected to an input end of the filter unit (43) and a second air outlet end (412) connected to the outside; the first air outlet end (411) and the second air outlet end (412) are respectively provided with a first air outlet valve (413) and a second air outlet valve (414); Both mold bases (3) are built with jet flow channels (34) distributed along the circumference of the corresponding mold cavities (33); in a mold closing state, the jet flow channels (34) are connected between the output end of the filter unit (43) and the mold cavity.

2. The mold assembly for wafer electroplating sealing gasket according to claim 1, Features: The jet flow channels (34) are distributed at equal intervals along the circumference of the corresponding mold cavity (33); the jet flow channels (34) of the lower mold base (32) are connected to the bottom of the corresponding mold cavity (33); and the jet flow channels (34) of the upper mold base (31) are connected to the top of the corresponding mold cavity (33).

3. The mold assembly for wafer electroplating sealing gasket according to claim 2, Features: The two mold bases (3) are both provided with a docking hole which is connected to the mold cavity (33) through the jet flow channel (34) and is coaxial with the mold cavity (33). The docking holes of the two mold bases (3) are respectively a docking blind hole (35) and a docking through hole (36). One of the docking holes which is connected to the output end of the filter unit (43) is provided with a positioning tube (3113) protruding from the corresponding parting surface on its inner side. The side wall of the positioning tube (3113) is provided with an air vent (3114) which is connected to the corresponding jet flow channel (34). In the closed mold state and the clamped mold state, the two ends of the positioning tube (3113) are respectively sealed and connected to the circumferential inner walls of the two docking holes.

4. The mold assembly for wafer electroplating sealing gasket according to claim 3, Features: It also includes an adjustment component, which is used to adjust the size of the airflow ejected from the end of the jet flow channel (34) away from the docking hole, so that the semi-finished rubber ring (8) limited between the two mold cavities (33) of the mold base (3) can move. In the active state, the axis of the semi-finished rubber ring (8) is inclined to intersect with the axis of the cavity, and the axis of the semi-finished rubber ring (8) revolves around the axis of the cavity as the center line.

5. The mold assembly for wafer electroplating sealing gasket according to claim 4, Features: The jet flow channel (34) comprises an adjusting section (341) and a fixed section (342); the adjusting section (341) is in the shape of a straight strip, one end of which is in communication with the docking hole, and the other end of which is sealed with a sealing cover (37); the sealing cover (37) is sealed with an adjusting rod (38) having the same length direction as the adjusting section (341); a jet gap (3411) exists between the circumferential outer edge of the adjusting rod (38) and the circumferential inner wall of the adjusting section (341); one end of the fixed section (342) is in communication with the mold cavity (33), and the other end is in communication with the jet gap (3411); the adjusting assembly comprises a power unit (5) and two transmission units (6) corresponding to the two mold bases (3); the power unit (5) drives the adjusting rod (38) to perform periodic axial reciprocating motion through the transmission units (6).

6. The mold assembly for wafer electroplating sealing gasket according to claim 5, Features: The transmission unit (6) comprises a transmission ring (61) which rotates in the mold base (3) with the axis of the mold cavity (33) as the center line. The adjustment rod (38), the docking hole and the jet flow channel (34) are all located on the inner side of the transmission ring (61). The cross section of the circumferential inner wall of the transmission ring (61) comprises arc segments (611) which are connected in sequence and the centers of which are all located on the axis of the mold cavity (33). The central angles of the corresponding arc segments (611) are the same. Along the circumference of the transmission ring (61), the radii corresponding to the arc segments (611) first increase and then decrease. The cross section of the circumferential inner wall of the transmission ring (61) is an axisymmetric figure. The adjustment rod (38) is connected to a compression spring (381). The compression spring (381) is used to make the adjustment rod (38) have a tendency to move away from the mold cavity (33). The power unit (5) drives the transmission ring (61) to rotate at a constant speed.

7. The mold assembly for wafer electroplating sealing gasket according to claim 6, Features: The transmission unit (6) further comprises a driving wheel (62), a synchronous belt (63) and a driven wheel (64); the driving wheel (62) is connected to the driven wheel (64) via the synchronous belt (63); the driven wheel (64) is located on a side of the corresponding mold base (3) facing away from its own parting surface and is connected to the transmission ring (61) coaxially; the power unit (5) drives the driving wheel (62) to rotate around its own axis.

8. The mold assembly for wafer electroplating sealing gasket according to claim 7, Features: The power unit (5) comprises a power motor (51), the output shaft of the power motor (51) extends in a vertical direction and is fixed with a power rod (52), the axis of the power rod (52) is parallel to the axis of the output shaft of the power motor (51) and there is a gap between them, the power rod (52) is fixedly inserted through a driving wheel (62) of a transmission unit (6) corresponding to one of the mold bases (3), and the driving wheel (62) of the other transmission unit (6) is provided with a plug hole (622) for the power rod (52) to be sealed and inserted.

9. The mold assembly for wafer electroplating sealing gasket according to claim 7, Features: The driving wheel (62) and the driven wheel (64) have the same outer diameter, and in the transmission units (6) corresponding to the two mold bases (3), an alignment mark (621) is provided between the opposing surfaces of the two driving wheels (62).

10. The mold assembly for wafer electroplating sealing gasket according to any one of claims 1 to 9, Features: The driving assembly (2) comprises a lifting unit (21) and a translation unit (22); the lifting unit (21) and the translation unit (22) are both arranged on the frame (1); the output end of the lifting unit (21) is connected to the upper die base (31); the output end of the translation unit (22) is connected to the lower die base (32); the upper die base (31) is located in the sealing cover (42) and is connected to the sealing cover (42) via a tension spring (313).

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