Test device

Abstract

The invention provides test equipment which is used for being matched with a probe testing machine for testing. The test equipment comprises a base, a turnover arm, a floating module and a test head. The overturning arm is rotatably arranged on the base. The floating module comprises a body, a moving assembly and a buffering module. The body is fixed to the turnover arm. The moving assembly is fixed to the body. The buffer module is arranged on the body. The test head is fixedly connected to the moving assembly and the buffer module, and the moving assembly is clamped between the test head and the body.

Description

Technical Field

[0001] The present application relates to semiconductor testing devices. Background Art

[0002] After the semiconductor is prepared, it must be electrically tested by semiconductor testing equipment. Taking the wafer as an example, the semiconductor testing equipment will perform electrical tests on each die on the wafer and decide the subsequent packaging process based on the test results.

[0003] The aforementioned semiconductor testing equipment mainly transfers the test head to the top of the probe tester and uses the test head to test the object to be tested in the probe tester. The common way to transfer the test head is to transfer it to the top of the probe tester in a flipping manner through the base and simultaneously engage it with the probe card in the probe tester before performing subsequent probe testing. However, when the test head is engaged with the probe card while flipping, since the flipping displacement path of the test head is not a linear path, the needle may slip when the test head engages with the probe card, which is not only not conducive to alignment, but may also cause damage to the probe card, and thus needs to be improved. Summary of the invention

[0004] The present application provides a test device for testing in conjunction with a needle tester. The test device includes a base, a flip arm, a floating module and a test head. The flip arm can be rotatably arranged on the base. The floating module includes a body, a moving component and a buffer module. The body is fixed to the flip arm. The moving component is fixed to the body. The buffer module is arranged on the body. The test head is fixedly connected to the moving component and the buffer module, and the moving component is clamped between the test head and the body.

[0005] Thus, when the test head of the test equipment and the probe card of the probe tester perform docking before testing, the test head can be pressed vertically down along the floating direction to the probe card for docking, thereby avoiding the needle slippage phenomenon that may be caused by the test head performing docking along a non-linear path. In addition, the floating module of some embodiments of the present application is able to provide floating capability when the test head is pressed vertically down along the floating direction to the probe card, thereby reducing damage to the probe card.

[0006] In some embodiments, the aforementioned buffer module includes a fixed column, a first elastic member and two plates. The fixed column is passed through the main body, the first elastic member is inserted into one end of the fixed column and one end is against the main body, and the aforementioned two plates are fixed at the opposite ends of the fixed column and against the other end of the first elastic member.

[0007] In some embodiments, the aforementioned moving component includes a linear guide and a linear sliding member. The linear guide is fixed to the main body. The linear sliding member can slide through the linear guide along the floating direction and is parallel to the fixed column. The flip arm rotates around an axial direction perpendicular to the floating direction.

[0008] In some embodiments, the aforementioned floating module further includes a support member fixedly connected between the two plates in parallel with the linear sliding member.

[0009] In some embodiments, the aforementioned floating module further includes a locking device capable of displacing through the support member and the linear guide member.

[0010] In some embodiments, the aforementioned floating module further includes a roller assembly, the roller assembly includes a rolling element, and the roller assembly is disposed on the supporting element and faces the main body with the rolling element.

[0011] In some embodiments, the aforementioned floating module further includes a second elastic member, which is sleeved on the other end of the fixing column, and the two ends of the second elastic member are respectively against the body and one of the plates.

[0012] In some embodiments, the aforementioned main body further includes a first groove, and the first elastic member is accommodated in the first groove.

[0013] In some embodiments, the aforementioned main body further includes a second groove, and the second elastic member is accommodated in the second groove.

[0014] In some embodiments, the length of the first elastic member is greater than the length of the second elastic member.

[0015] In some embodiments, the aforementioned floating module further includes two stoppers, which are respectively fixed to the sides of the two plates facing each other.

[0016] In some embodiments, the aforementioned main body includes a first part and a second part, the first part is vertically connected to the second part, the first part is connected to the flip arm, and the second part is connected to the moving component.

[0017] The above summary is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present application will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the multiple drawings represent the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in the present application and should not be regarded as limiting the scope of the present application.

[0019] Figure 1 It is a schematic diagram of an embodiment of the testing equipment of the present application and a probe testing machine.

[0020] Figure 2This is a schematic diagram of an embodiment of the testing device of the present application used in conjunction with a probe tester.

[0021] Figure 3 for Figure 2 A partial enlarged schematic diagram of the selected area 3 in the middle circle.

[0022] Figure 4 It is a schematic diagram of the partial structural decomposition of an embodiment of the testing device of the present application.

[0023] Figure 5 For along Figure 2 Sectional view drawn along the 5-5 cutting line.

[0024] Figure 6 for Figure 5 A partial enlarged schematic diagram of the selected area 6 in the middle circle.

[0025] Figure 7 For along Figure 2 Sectional view drawn by the 7-7 cutting line.

[0026] Figure 8 for Figure 7 A partial enlarged schematic diagram of the selected area 8 in the middle circle.

[0027] Fig. 9 For along Figure 2 Sectional view drawn by the 9-9 cutting line.

[0028] Fig.10 for Fig. 9 A partial enlarged schematic diagram of the circled area 10.

[0029] Fig.11 For along Figure 2 Sectional view drawn along the 11-11 cutting line.

[0030] Fig.12 for Fig.11 A partial enlarged schematic diagram of the selected area 12 in the middle circle.

[0031] Description of reference numerals:

[0032] A: Test equipment;

[0033] B: Needle test machine;

[0034] 10: base;

[0035] 11: rotating shaft;

[0036] 20: flip arm;

[0037] 21: first body segment;

[0038] 22: second body segment;

[0039] 30: floating module;

[0040] 31: Ontology;

[0041] 311: Part I;

[0042] 312: Part II;

[0043] 3121: container;

[0044] 3122: first groove;

[0045] 3123: second groove;

[0046] 32: mobile components;

[0047] 321: Linear guide;

[0048] 3211: External surface;

[0049] 3212: Slot;

[0050] 322: Linear slide;

[0051] 33: Buffer module;

[0052] 331: fixed column;

[0053] 332: first elastic member;

[0054] 333: Plate;

[0055] 3331: bezel;

[0056] 334: second elastic member;

[0057] 335: roller assembly;

[0058] 3351: rolling parts;

[0059] 336: stopper;

[0060] 35: support member;

[0061] 36: locking device;

[0062] 37: outer cover;

[0063] 40: test head;

[0064] 50: bearing platform;

[0065] D1: axial;

[0066] D2: floating direction;

[0067] D3: Horizontal direction. DETAILED DESCRIPTION

[0068] See also Figure 1 and Figure 2 , Figure 1 A schematic diagram of an embodiment of the test equipment of the present application and a probe tester; Figure 2 This is a schematic diagram of an embodiment of the testing device of the present application used in conjunction with a probe tester.

[0069] The test device A of the present application is used to cooperate with the prober B for testing. The test device A includes a base 10, a flip arm 20, a floating module 30 and a test head 40. The prober B includes a carrier 50. The carrier 50 is used to accommodate a probe card and a device under test (DUT). The test device A of the present application is used to transfer the test head 40 to the prober B so as to test the DUT in the prober B through the test head 40.

[0070] See also Figure 1 , Figure 2 And cooperate Figures 3 to 6 , Figure 3 for Figure 2 A partial enlarged schematic diagram of the selected area 3 in the middle circle; Figure 4 A schematic diagram of a partial structural decomposition of an embodiment of the testing device of the present application; Figure 5 For along Figure 2 The cross-sectional view drawn by the 5-5 cutting line; Figure 6 for Figure 5 A partial enlarged schematic diagram of the selected area 6 in the middle circle.

[0071] The flip arm 20 is rotatably disposed on the base 10 around the axial direction D1. The floating module 30 includes a body 31, a moving assembly 32, and a buffer module 33. The body 31 of the floating module 30 is fixed to the flip arm 20. The moving assembly 32 is fixed to the body 31. The buffer module 33 is disposed on the body 31. The test head 40 is fixedly connected to the moving assembly 32 and the buffer module 33, and the moving assembly 32 is sandwiched between the test head 40 and the body 31.

[0072] Thus, when the test head 40 of the test device A and the probe card of the probe tester B are docking before testing, the test head 40 can first be flipped over to the top of the probe tester B and then vertically pressed down along the floating direction D2 to the probe card for docking, thereby avoiding the needle slippage phenomenon that may be caused by the test head 40 performing docking along a non-linear path. In addition, the floating module 30 of some embodiments of the present application is able to provide floating capability during the process of the test head 40 being vertically pressed down along the floating direction D2 to the probe card, thereby generating a buffering effect and reducing damage to the probe card.

[0073] See also Figure 2 , Figure 2In the embodiment, the base 10 of the test device A is connected to the test head 40 via two floating modules 30, but the present application is not limited thereto. In other embodiments, the number of floating modules 30 can be changed depending on the volume or weight of the test head 40 to accommodate the load required by different test heads 40.

[0074] See also Figure 2 In some embodiments, the base 10 has a rotating shaft 11 , and the rotating shaft 11 extends along the axial direction D1 . In these embodiments, the rotating shaft 11 can rotate around the axial direction D1 .

[0075] See also Figures 1 to 3 In these embodiments, one end of the flip arm 20 is fixedly connected to the rotating shaft 11 of the base 10 and is driven by the rotating shaft 11 to flip around the axial direction D1. In some embodiments, the flip arm 20 is L-shaped, but the present application is not limited thereto. The flip arm 20 may have different appearances depending on the position or arrangement of the needle measuring machine B to which it is matched. Here, the flip arm 20 includes a first body section 21 and a second body section 22 connected to each other, and the flip arm 20 is connected to the rotating shaft 11 by the first body section 21.

[0076] See also Figures 4 to 6 In some embodiments, the body 31 of the floating module 30 is a single body structure and includes a first portion 311 and a second portion 312 connected to each other, and the first portion 311 and the second portion 312 are vertically connected. In these embodiments, the body 31 is connected to the second segment 22 of the flip arm 20 with the first portion 311, and is connected to the moving assembly 32 with the second portion 312. Here, the first portion 311 of the body 31 can be stably attached to the flip arm 20.

[0077] See also Figure 5 , Figure 6 and Fig. 9 , Fig.10 , Fig. 9 For along Figure 2 The cross-sectional view drawn by the 9-9 cutting line; Fig.10 for Fig. 9 A partial enlarged schematic diagram of the circled portion 10. In some embodiments, the moving assembly 32 includes a linear guide 321 and a linear slide 322. The linear guide 321 is fixed to the body 31, and the linear slide 322 is slidably disposed in the linear guide 321 along the floating direction D2. In this way, the body 31 can be guided by the moving assembly 32 to stably and smoothly move along the floating direction D2.

[0078] In some embodiments, the linear guide 321 is a linear slider. In these embodiments, the linear guide 321 is fixed to one side of the second portion 312 of the body 31 and includes an outer surface 3211 and a sleeve groove 3212. The second portion 312 of the body 31 has a groove 3121. The appearance of the groove 3121 roughly corresponds to the shape of the outer surface 3211 of the linear guide 321. Here, the linear guide 321 is accommodated in the groove 3121 and its outer surface 3211 is abutted against the groove 3121 before being fixedly combined. Thus, the groove 3121 of the body 31 corresponding to the outer surface 3211 of the linear guide 321 can improve the combination stability between the body 31 and the linear guide 321, and ensure the stable combination of the body 31 and the linear guide 321. In some embodiments, the number of the linear guide 321 and the number of the linear slider 322 are two, but the present application is not limited thereto. In other embodiments, the number of the linear guides 321 and the linear slides 322 may be changed according to the size or weight of the test head 40 to accommodate the load required by different test heads 40 .

[0079] See also Figure 5 , Figure 6 and Fig. 9 , Fig.10 In some embodiments, the linear slide 322 is a linear slide rail. In these embodiments, the linear slide 322 can be slidably inserted into the sleeve groove 3212 of the linear guide 321, and can be displaced along the floating direction D2 along the sleeve groove 3212 of the linear guide 321. Here, since the linear slide 322 is fixedly connected to the test head 40, the test head 40 can stably generate displacement along the floating direction D2 through the cooperation between the linear slide 322 and the linear guide 321, so that the test head 40 can perform a straight up and down docking operation along the floating direction D2 and maintain the floating ability during the docking process.

[0080] It is worth noting that the linear guide 321 and the linear slide 322 are a combination of a linear slider and a linear rail, but the present application is not limited thereto. In other embodiments, the linear guide 321 and the linear slide 322 may also be a combination of a sleeve and a column.

[0081] See also Figure 4 And cooperate Figure 7 and Figure 8 , Figure 7 For along Figure 2 Sectional view drawn by the 7-7 cutting line; Figure 8 for Figure 7A partial enlarged schematic diagram of the circled area 8. The buffer module 33 is used to support the test head 40 and provide elastic buffering force to the test head 40. The specific structural configuration of the buffer module 33 is described below. In some embodiments, the buffer module 33 includes a fixed column 331, a first elastic member 332 and two plates 333. The fixed column 331 is inserted into the body 31, the first elastic member 332 is inserted into one end of the fixed column 331 and one end is against the body 31, and each plate 333 is fixed to the opposite ends of the fixed column 331 and is against the other end of the first elastic member 332. In this way, the body 31 has the ability of elastic displacement through the buffer module 33.

[0082] In some embodiments, the fixing column 331 of the buffer module 33 is disposed through the body 31 along the floating direction D2 at both ends thereof. In these embodiments, the second portion 312 of the body 31 includes a first groove 3122, which is extended and opened along the floating direction D2, wherein the fixing column 331 passes through the body 31 through the first groove 3122, and the first elastic member 332 is inserted into the portion of the fixing column 331 passing through the first groove 3122 and is accommodated in the first groove 3122. Here, both ends of the first elastic member 332 are respectively abutted against the first groove 3122 and the plate 333 of the body 31. Thus, since the plate 333 is fixedly connected to the test head 40, when the test head 40 is fixedly connected to the plate 333, the first elastic member 332 is able to provide an elastic supporting force to the test head 40 through the plate 333, thereby ensuring that the test head 40 does not directly contact the probe card and providing a buffering effect during the bonding process.

[0083] See also Figure 7 and Figure 8 In some embodiments, a probe tower (POGO Tower) (not shown) can be provided on the side of the test head 40 facing the probe machine B. In these embodiments, the first groove 3122 for accommodating the first elastic member 332 is located at an end of the body 31 away from the probe machine B or the probe tower in the floating direction D2, thereby allowing the first elastic member 332 to provide a supporting force for the test head 40 in the opposite direction to its gravity direction.

[0084] See also Figure 7 and Figure 8 In some embodiments, the other end of the body 31 in the floating direction D2 includes a second groove 3123, and the buffer module 33 also includes a second elastic member 334, which is sleeved on the other end of the fixing column 331 and accommodated in the second groove 3123. In this way, when the flip arm 20 drives the test head 40 to flip, the first elastic member 332 and the second elastic member 334 can simultaneously support and stabilize the test head 40, thereby reducing the shaking phenomenon caused by the continuous change of the gravity direction during the flipping process of the test head 40.

[0085] In some embodiments, the length between two ends of the first elastic member 332 is greater than the length between two ends of the second elastic member 334 , so that the main supporting force of the test head 40 is fully provided by the first elastic member 332 having a longer length.

[0086] See also Figure 4 and Figure 6 In some embodiments, the floating module 30 further includes a support member 35, which is fixedly connected between the two plates 333 in parallel with the linear slide 322. In these embodiments, the test head 40 and the support member 35 are respectively fixedly connected to the opposite sides of the plate 333, whereby the weight of the test head 40 borne by the fixed column 331 and the linear slide 322 can be shared by the support member 35, so as to prevent the fixed column 331 or the linear slide 322 from being deformed due to the force, thereby increasing the load value of the torque force generated by the floating module 30 on the test head 40 and improving safety. In some embodiments, the number of the support members 35 is described as two, but the present application is not limited thereto. In other embodiments, the number of the support members 35 can be changed according to the required load.

[0087] See also Figure 4 In some embodiments, the side of the plate 333 away from the test head 40 includes a groove 3331, and the shape of the groove 3331 corresponds to the appearance shape of the support member 35. In these embodiments, the support member 35 is embedded in the groove 3331, thereby improving the combination stability between the plate 333 and the support member 35.

[0088] See also Figure 4 , Fig. 9 and Fig.10 In some embodiments, the floating module 30 further includes a locking device 36, which is displaceably disposed through the support member 35 and the linear guide member 321. In these embodiments, the locking device 36 extends along a horizontal direction D3 perpendicular to the axial direction D1 and the floating direction D2, and the locking device 36 can be displaced along the horizontal direction D3. Here, when the test head 40 does not need to be displaced along the floating direction D2, the locking device 36 passes through the support member 35 and is displaced along the horizontal direction D3 to insert into the linear guide member 321. In this way, the locking device 36 limits the relative displacement between the linear guide member 321 and the support member 35, and the test head 40 fixedly connected to the support member 35 is also limited in displacement, thereby locking the test head 40, so that the test head 40 does not apply its gravity to the buffer module 33 when not in use, thereby extending the service life of the buffer module 33.

[0089] When the test head 40 needs to be displaced along the floating direction D2, the locking device 36 is displaced along the horizontal direction D3 to a position disengaged from the linear guide 321, whereby the test head 40 fixedly connected to the support member 35 through the plate 333 can be linearly displaced relative to the linear guide 321 and restored to the use state.

[0090] In some embodiments, the locking device 36 may be a bolt, and the position of the locking device 36 in the horizontal direction D3 may be changed by rotating the locking device 36 , thereby improving the convenience of use.

[0091] See also Figure 4 And cooperate Fig.11 and Fig.12 , Fig.11 For along Figure 2 The cross-sectional view drawn by the 11-11 cutting line; Fig.12 for Fig.11 A partial enlarged schematic diagram of the circled area 12. In some embodiments, the buffer module 33 further includes a roller assembly 335, the roller assembly 335 includes a rolling element 3351, and the roller assembly 335 is disposed on the support member 35 and faces the body 31 with the rolling element 3351. In these embodiments, the roller assembly 335 is disposed on a side of the support member 35 facing the body 31, and the rolling element 3351 is rotatably pressed against the body 31 around the axial direction D1. Thus, since the rolling member 3351 is arranged on the support member 35 connected to the plate 333, and the test head 40 is connected to the plate 333, the support member 35, the plate 333 and the test head 40 can be regarded as a rigid body. Here, the rolling member 3351 increases the contact area of ​​the rigid body contact body 31 composed of the support member 35, the plate 333 and the test head 40, and can share the gravity of the test head 40 together with the support member 35, the plate 333 and the linear sliding member 322, so as to prevent the test head 40 from slipping due to the influence of gravity, thereby ensuring the safety of the test head 40.

[0092] See also Figure 4 and Figure 8 In some embodiments, the buffer module 33 further includes at least two stoppers 336, each of which is fixed to one side of each plate 333 facing each other. In these embodiments, each stopper 336 maintains a distance from the body 31, whereby when the first elastic member 332 used to support the weight of the test head 40 suffers from elastic fatigue, preload change, or misuse of applicable specifications, the distance between each stopper 336 and the body 31 changes, and the operator can judge the supporting condition of the first elastic member 332 by the change of the distance between the stopper 336 and the body 31, thereby avoiding the test head 40 or the probe card from being damaged due to insufficient support of the floating module 30 on the test head 40.

[0093] In some embodiments, the number of the stoppers 336 is not limited to the aforementioned embodiment, and the number of the stoppers 336 can be changed accordingly to adapt to the overall volume of the floating module 30. Figure 8In some embodiments shown, the number of the stoppers 336 is four, and two stoppers 336 are respectively provided on the side of each plate 333 facing each other. The stoppers 336 on each plate 333 are spaced apart from each other, thereby providing a more convenient basis for observation and judgment by increasing the number of the stoppers 336.

[0094] See also Figure 4 In some embodiments, the floating module 30 further includes an outer cover 37, which is a shell having a roughly U-shaped cross section, and is disposed on a side of the support member 35 away from the test head 40. In these embodiments, the outer cover 37 abuts against a side of each support member 35 away from the test head 40 and a part of the body 31, thereby further improving the supporting force of each support member 35.

[0095] Although the present disclosure has been disclosed in some embodiments as above, it is not intended to limit the present disclosure. Any person with ordinary knowledge in the relevant technical field may make some changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the scope of patent protection of this application shall be determined by the scope of the patent application attached to this specification.

Claims

1. A test device for testing with a probe tester, characterized in that: include: Pedestal; A flip arm is rotatably disposed on the base; Floating modules, including: A body, fixed to the flip arm; A moving component fixed to the body; and A buffer module is disposed on the main body; and The test head is fixedly connected to the moving component and the buffer module, and the moving component is clamped between the test head and the body.

2. The test device according to claim 1, wherein: The buffer module includes a fixed column, a first elastic member and two plates. The fixed column is inserted into the main body. The first elastic member is inserted into one end of the fixed column and one end is against the main body. The two plates are fixed to the opposite ends of the fixed column and are against the other end of the first elastic member.

3. The test device according to claim 2, wherein: The moving assembly comprises a linear guide and a linear slide. The linear guide is fixed to the body. The linear slide can slide through the linear guide along a floating direction and is parallel to the fixed column. The flip arm rotates around an axial direction perpendicular to the floating direction.

4. The test device according to claim 3, wherein: The floating module also includes a support member fixedly connected between the two plates in parallel with the linear sliding member.

5. The test device according to claim 4, wherein: The floating module also includes a locking device that can be displaceably disposed through the support member and the linear guide member.

6. The test device according to claim 4, wherein: The floating module also includes a roller assembly, which includes a rolling element. The roller assembly is disposed on the support element and faces the body with the rolling element.

7. The testing device according to claim 3, wherein: The floating module also includes a second elastic member, which is sleeved on the other end of the fixing column. The two ends of the second elastic member are respectively against the body and one of the plates.

8. The testing device according to claim 3, wherein: The body also includes a first groove, and the first elastic member is accommodated in the first groove.

9. The test device according to claim 7, wherein: The body also includes a second groove, and the second elastic member is accommodated in the second groove.

10. The testing device according to claim 7, wherein: The length of the first elastic member is greater than the length of the second elastic member.

11. The test device according to claim 2, wherein: The floating module also includes two stoppers, which are respectively fixed to the two plates on one side facing each other.

12. The test device according to claim 1, wherein: The body comprises a first part and a second part, the first part is vertically connected with the second part, the first part is connected to the flip arm, and the second part is connected to the moving component.

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