Magnetic material PVD tray storage device

Abstract

The invention relates to the technical field of PVD material tray storage, in particular to a magnetic material PVD material tray storage device which comprises a rack, a conveying assembly and a lifting assembly, the conveying assembly and the lifting assembly are arranged on the rack, the rack is arranged between stacking equipment and a production line, and a material tray bracket is arranged on the lifting assembly and used for bearing material trays. The lifting assembly is used for driving the material tray bracket to ascend and descend, and the conveying assembly is used for conveying the material tray into or out of the material tray bracket. The machining method has the effect of improving the machining efficiency.

Description

Technical Field

[0001] The present application relates to the technical field of PVD tray storage, and in particular to a magnetic material PVD tray storage device. Background Art

[0002] At present, physical vapor deposition (PVD) technology refers to the technology of using physical methods under vacuum conditions to vaporize the surface of the material source (solid or liquid) into gaseous atoms or molecules, or partially ionize it into ions, and deposit a thin film with certain special functions on the surface of the substrate through a low-pressure gas (or plasma) process.

[0003] NdFeB magnetic material PVD flat sputtering coating production line refers to an industrial production equipment used to manufacture NdFeB magnetic materials. It uses physical vapor deposition (PVD) technology for coating, heating the raw materials to evaporate them and form a thin film layer on the surface of the material. This production line usually adopts an automated process flow, which can produce NdFeB magnetic materials in large quantities and efficiently, and is widely used in electronics, machinery manufacturing and other fields.

[0004] At the front end of the production line, a material stacking device is usually set up to load the materials to be processed into the PVD tray (hereinafter referred to as the tray). After the tray is filled, the tray is sent to the production line for sputtering coating.

[0005] Regarding the above-mentioned related technologies: when the production line is in operation, the material tray that has completed loading at the material coding equipment needs to be temporarily stopped, and a new material tray can be sent into the production line only after the material processing in the production line is completed and sent away, which makes the overall processing process not coherent enough, resulting in reduced processing efficiency.

[0006] Therefore, there is an urgent need to set up a magnetic material PVD material tray storage device between the coding equipment and the production line. Summary of the invention

[0007] In order to improve processing efficiency, the present application provides a magnetic material PVD tray storage device.

[0008] The present application provides a magnetic material PVD tray storage device, which adopts the following technical solution: A magnetic material PVD tray storage device includes a frame and a conveying assembly and a lifting assembly arranged on the frame, the frame is arranged between the material coding equipment and the production line, the lifting assembly is provided with a tray bracket, the tray bracket is used to support the tray, the lifting assembly is used to drive the tray bracket to rise and fall, and the conveying assembly is used to send the tray into or out of the tray bracket.

[0009] By adopting the above technical solution, when the material tray enters the frame from the material coding device, the conveying component can drive the material tray to move, so that the material tray is completely moved to the material tray bracket, so that the material tray can be stored on the material tray bracket. At this time, the lifting component can drive the material tray to rise through the material tray bracket, so as to facilitate the storage of the material tray. When the material tray needs to be sent to the production line, the lifting component drives the material tray to descend through the material tray bracket, so that the conveying component drives the material tray to move, so that it is separated from the material tray bracket and moved to the production line, so that when the production line processes the material, the overall processing process can be carried out continuously, which improves the processing efficiency to a certain extent.

[0010] Optionally, the conveying assembly includes a first driving member and a first roller, the first driving member is arranged on the frame, a plurality of first rollers are provided, the plurality of first rollers are arranged parallel to each other, the plurality of first rollers are rotatably connected to the frame and connected to the first driving member, the material tray respectively contacts with the plurality of first rollers, and the first roller is used to drive the material tray to move.

[0011] By adopting the above technical solution, the first driving member is used to drive the first roller to rotate, so that when the material tray collides with the first roller, the multiple first rollers cooperate with each other to push the material tray to move onto the material tray bracket, or push the material tray out of the material tray bracket.

[0012] Optionally, the conveying assembly includes a first sensor, which is disposed on the frame, electrically connected to the first driving member, and is used to detect the position of the material tray.

[0013] By adopting the above technical solution, when the first sensor detects that the material tray enters the frame, the first driving member can drive the first roller to rotate, so that when the material tray collides with the first roller, the first roller can drive the material tray to move into the frame; when the first sensor detects that the material tray has completely entered the frame, the first driving member stops driving the first roller to rotate, and the first roller no longer drives the material tray to move. At this time, the material tray is located on the material tray bracket, thereby completing the storage of the material tray.

[0014] Optionally, the conveying assembly includes a plurality of guide wheels, and the plurality of guide wheels are respectively arranged on the frame and close to the first roller, and the plurality of guide wheels are evenly distributed on both sides of the material tray and in contact with the material tray.

[0015] By adopting the above technical solution, the guide wheel can guide the material tray, so that on the one hand, the material tray is not easily offset when moving, and on the other hand, it is convenient for the first roller to drive the material tray to move.

[0016] Optionally, it also includes a power assembly arranged on the frame, the lifting assembly is arranged along the height direction of the frame and connected to the power assembly, a plurality of material tray brackets are provided, and the plurality of material tray brackets are evenly spaced along the height direction of the frame on the lifting assembly, and the material tray bracket is staggered with the first roller.

[0017] By adopting the above technical solution, the power assembly can drive the lifting assembly to move, and the material tray bracket and the first roller are staggered, so that the lifting assembly can drive the material tray bracket to move, so that the material tray bracket moves to the side of the first roller close to the bottom of the frame, or moves to the side of the first roller close to the top of the frame.

[0018] When the trays need to be stored on the tray bracket, first transfer multiple tray brackets to the side of the first roller close to the bottom of the frame, then transfer the trays to the designated position through the first roller, and then drive the tray bracket to move to the end close to the top of the frame through the lifting assembly, so that the tray bracket drives the tray to move, and at this time the tray is separated from the first roller and stored on the tray bracket. Repeat the above operation, multiple trays can be stored on the tray bracket, which is conducive to further improving the processing efficiency.

[0019] Optionally, the lifting assembly includes two sets of sprocket chain components, the two sets of sprocket chain components are symmetrically arranged on the frame and are respectively connected to the power assembly, and connecting parts are respectively provided at both ends of the tray bracket, and the tray bracket is respectively connected to the two sets of sprocket chain components through the connecting parts.

[0020] By adopting the above technical solution, the power component can drive the two sets of sprocket chain components to rotate synchronously, thereby facilitating the synchronous lifting and lowering of the material tray bracket through the two sets of sprocket chain components.

[0021] Optionally, a plurality of second sensors are provided on the frame, and the second sensors are electrically connected to the power assembly. The plurality of second sensors are divided into two groups, one group of second sensors is provided on both sides of the top of the frame, and the other group of second sensors is provided at the bottom of the frame, and the second sensors are used to detect the position of the tray bracket.

[0022] By adopting the above technical solution, the second sensor arranged at the top of the frame can detect the distance between the material tray holder and the top of the frame, and the second sensor arranged at the bottom of the frame can detect the distance between the material tray and the bottom of the frame, thereby reducing the possibility of excessive movement of the material tray holder driven by the power component through the lifting component, which is beneficial to improving the safety of the power component and the lifting component during operation.

[0023] Optionally, a third sensor is provided on the frame, the third sensor is provided close to the first roller and is electrically connected to the power assembly, and the third sensor is used to detect the position of the material tray bracket to the first roller.

[0024] By adopting the above technical solution, when multiple tray holders are transferred to the side of the first roller close to the bottom of the frame, the power assembly drives the multiple tray holders to move to the top of the frame through the lifting assembly, so that the third sensor detects the position of the tray holder closest to the top of the frame. At this time, the power assembly is located at the origin position, and the power assembly stops working, which helps to reduce the possibility of gaps in the process of the lifting assembly driving the tray holder to rise or fall, thereby facilitating multiple trays to continuously enter the tray holder for storage.

[0025] Optionally, there are multiple conveying components, and the multiple conveying components are divided into two groups. The material tray is located between the two groups of conveying components. The conveying component includes a second driving member and a second roller. The second driving member is arranged on the frame, and the second roller is rotatably connected to the frame along the height direction of the frame. The second roller is connected to the second driving member, and the circumferential side wall of the second roller is in contact with the material tray.

[0026] By adopting the above technical solution, the second roller is located on both sides of the material tray, so that the second roller is not easy to interfere with the lifting and lowering of the material tray bracket, and the second roller is in contact with the material tray, so that when the second driving member drives the second roller to rotate, the second roller can drive the material tray to move, thereby facilitating the movement of the material trays stored on different material tray brackets.

[0027] Optionally, the conveying assembly also includes a telescopic cylinder, the second driving member is arranged at the telescopic end of the telescopic cylinder, the second roller is rotatably connected to the telescopic end of the telescopic cylinder, and the telescopic cylinder is used to drive the second driving member and the second roller to approach or move away from the material tray.

[0028] By adopting the above technical solution, when it is necessary to send the material tray into or out of the material tray bracket, the telescopic cylinder can drive the second driving member and the second roller to move in the direction close to the material tray, so that the second roller contacts the material tray, so that the second roller drives the material tray to move; when it is not necessary to drive the material tray to move, the telescopic cylinder contracts, driving the second driving member and the second roller to move in the direction away from the material tray, so that the second roller no longer contacts the material tray, which helps to reduce the possibility of the second roller interfering with the lifting and lowering of the material tray.

[0029] In summary, the present application includes at least one of the following beneficial technical effects: 1. Through the cooperation of the first driving member, the first roller, the tray bracket and the first sensor, after the tray enters the frame, the first roller can drive the tray to move, so that the tray can be moved to the tray bracket for storage, and the first roller can drive the tray bracket to transfer to the production line, so that the overall processing process can be carried out continuously, which improves the processing efficiency to a certain extent; 2. Through the cooperation of the power assembly, the sprocket chain component, the connecting piece, the tray bracket and the second sensor, multiple trays can be stored on tray brackets at different layers, which is conducive to further improving the processing efficiency; 3. Through the cooperation between the telescopic cylinder, the second driving member and the second roller, the second roller is not likely to interfere with the lifting and lowering of the tray bracket, and the second roller can drive the trays stored on the tray brackets at different layers. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the overall structure of a magnetic material PVD tray storage device according to Example 1 of the present application.

[0031] Figure 2 This is a schematic diagram of the internal structure of a magnetic material PVD tray storage device according to Example 1 of the present application.

[0032] Figure 3 It is a schematic diagram of the overall structure of a magnetic material PVD tray storage device according to Example 2 of the present application.

[0033] Description of reference numerals: 1. Frame; 11. Laser sensor; 12. U-shaped through-beam switch; 2. Conveying assembly; 21. First driving member; 22. First roller; 23. Through-beam photoelectric sensor; 231. First through-beam photoelectric sensor; 232. Second through-beam photoelectric sensor; 233. Third through-beam photoelectric sensor; 234. Fourth through-beam photoelectric sensor; 24. Guide wheel; 25. Telescopic cylinder; 26. Second driving member; 27. Second roller; 3. Power assembly; 31. Servo motor; 32. Reducer; 321. Connecting shaft; 33. Commutator; 34. Chain coupling; 4. Lifting assembly; 41. Transmission shaft; 42. Transmission sprocket; 43. Transmission chain; 5. Tray; 6. Tray bracket; 61. Connecting member. DETAILED DESCRIPTION

[0034] The following is combined with Figure 1-3 This application is described in further detail.

[0035] Unless otherwise defined, the words "first", "second" and similar terms used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "an" do not indicate a quantity limitation, but rather indicate the presence of at least one. Words such as "connected" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship also changes accordingly.

[0036] An embodiment of the present application discloses a magnetic material PVD tray storage device.

[0037] Example 1 Reference Figure 1 The magnetic material PVD tray storage device includes a frame 1 and a conveying assembly 2, a power assembly 3 and a lifting assembly 4 arranged on the frame 1. Among them, the frame 1 is arranged between the material coding equipment and the production line, the conveying assembly 2 is used to drive the material tray 5 to move, and the power assembly 3 is used to provide power for the lifting and lowering of the lifting assembly 4. A tray bracket 6 is arranged on the lifting assembly 4, and the tray bracket 6 is used to carry the tray 5, so that the tray 5 from the material coding equipment and the production line can be driven by the conveying assembly 2 to the tray bracket 6 for storage, so that when the production line processes the material, the overall processing process can be carried out continuously, which is conducive to improving the processing efficiency.

[0038] Reference Figure 1 and Figure 2 The conveying assembly 2 includes a first driving member 21 and a first roller 22. A plurality of first rollers 22 are provided, and the plurality of first rollers 22 are parallel to each other and rotatably connected to the frame 1 along the horizontal direction. The first rollers 22 in this embodiment are double-chain rollers, and adjacent first rollers 22 are connected by chains.

[0039] The first driving member 21 is fixedly connected to the frame 1 and arranged close to the first roller 22, and the output end of the first driving member 21 is connected to a first roller 22 through a chain. The first driving member 21 in this embodiment is a variable frequency motor, so that the first driving member 21 can drive multiple first rollers 22 to rotate synchronously.

[0040] The conveying assembly 2 further includes a first sensor. In this embodiment, the first sensor is a through-beam photoelectric sensor 23 , and four groups of through-beam photoelectric sensors 23 are provided. The four groups of through-beam photoelectric sensors 23 are electrically connected to the first driving member 21 respectively.

[0041] The four groups of through-beam photoelectric sensors 23 are defined as a first through-beam photoelectric sensor 231 , a second through-beam photoelectric sensor 232 , a third through-beam photoelectric sensor 233 and a fourth through-beam photoelectric sensor 234 .

[0042] The first through-beam photoelectric sensor 231, the second through-beam photoelectric sensor 232, the third through-beam photoelectric sensor 233 and the fourth through-beam photoelectric sensor 234 are respectively fixedly mounted on the frame 1 in a direction perpendicular to the axis of the first roller 22 and are arranged close to the first roller 22. The second through-beam photoelectric sensor 232 and the first through-beam photoelectric sensor 231 are arranged in sequence along the direction of the frame 1 close to the coding device, and the third through-beam photoelectric sensor 233 and the fourth through-beam photoelectric sensor 234 are arranged in sequence along the direction of the frame 1 close to the production line.

[0043] In this embodiment, when the first through-beam photoelectric sensor 231 and the third through-beam photoelectric sensor 233 are working, the second through-beam photoelectric sensor 232 and the fourth through-beam photoelectric sensor 234 are not working, and vice versa.

[0044] When the tray 5 enters the frame 1 from the coding device and is detected by the first through-beam photoelectric sensor 231, the first driving member 21 decelerates, and at this time, the end of the tray 5 entering the frame 1 contacts the first roller 22, and the first roller 22 drives the tray 5 to move into the frame 1, and the moving speed gradually decreases. When the third through-beam photoelectric sensor 233 detects the tray 5, the first driving member 21 stops running, causing the first roller 22 to stop rotating, thereby causing the tray 5 to stop moving, and at this time, the tray 5 reaches the specified position.

[0045] When the tray 5 enters the frame 1 from the production line and is detected by the fourth through-beam photoelectric sensor 234, the first drive member 21 decelerates, and at this time, the end of the tray 5 entering the frame 1 contacts the first roller 22, and the first roller 22 drives the tray 5 to move into the frame 1, and the moving speed gradually decreases. When the second through-beam photoelectric sensor 232 detects the tray 5, the first drive member 21 stops running, causing the first roller 22 to stop rotating, thereby causing the tray 5 to stop moving, and at this time the tray 5 reaches the specified position.

[0046] The conveying assembly 2 includes a plurality of guide wheels 24, which are respectively fixedly mounted on the frame 1 and arranged near the first roller 22. The plurality of guide wheels 24 can be divided into two groups, one group of guide wheels 24 is arranged near one end of the first roller 22, and the other group of guide wheels 24 is arranged near the other end of the first roller 22, and the two groups of guide wheels 24 are symmetrically arranged.

[0047] When the material tray 5 enters the frame 1, the guide wheel 24 contacts the side wall of the material tray 5, so that the guide wheel 24 can guide the material tray 5, thereby making it easier for the first roller 22 to drive the material tray 5 to move, and on the other hand, when the first roller 22 drives the material tray 5 to move, the relative position of the material tray 5 is not easily shifted.

[0048] Reference Figure 2 The power assembly 3 is arranged on the top of the frame 1. The power assembly 3 in this embodiment includes a servo motor 31, a reducer 32, a commutator 33 and a chain coupling 34. The reducer 32 is fixedly mounted on the top of the frame 1, and the servo motor 31 is connected to the reducer 32.

[0049] There are two commutators 33, which are respectively mounted on the top of the frame 1 and symmetrically distributed on both sides of the reducer 32. The two ends of the reducer 32 are respectively connected to connecting shafts 321, which are connected to the commutator 33 through a chain coupling 34.

[0050] Reference Figure 2 The lifting assembly 4 is arranged along the height direction of the frame 1 and connected to the power assembly 3. The lifting assembly 4 includes two sets of sprocket chain components, and the two sets of sprocket chain components are symmetrically arranged on the frame 1. The sprocket chain components in this embodiment include a transmission shaft 41, a transmission sprocket 42 and a transmission chain 43.

[0051] In one set of sprocket chain components, two transmission shafts 41 are provided, six transmission sprockets 42 are provided, and three transmission chains 43 are provided. Among them, the two transmission shafts 41 are arranged horizontally, one transmission shaft 41 is rotatably mounted on the top of the frame 1, and the other transmission shaft 41 is rotatably mounted on the bottom of the frame 1, and the transmission shaft 41 located at the top of the frame 1 is connected to the output shaft end of the commutator 33 through the chain coupling 34.

[0052] The six transmission sprockets 42 can be divided into two groups. One group of transmission sprockets 42 is arranged on one transmission shaft 41 . The two groups of transmission sprockets 42 are symmetrically arranged, and the transmission sprockets 42 in the same group are evenly spaced along the axial direction of the transmission shaft 41 .

[0053] The transmission chain 43 is arranged along the height direction of the frame 1 , and one transmission chain 43 is respectively engaged with two transmission sprockets 42 , so that the transmission sprocket 42 can drive the transmission chain 43 to rotate.

[0054] When the servo motor 31 is working, the servo motor 31 can drive the commutator 33 to work through the reducer 32, the connecting shaft 321, and the chain coupling 34 in sequence, so that the direction of the output shaft end of the commutator 33 is opposite, and the commutator 33 drives the transmission shaft 41 to rotate, and the transmission shaft 41 drives the transmission chain 43 to rotate through the transmission sprocket 42, thereby causing the transmission chain 43 to move upward or downward.

[0055] Reference Figure 2 A plurality of tray brackets 6 are provided, and both ends of each tray bracket 6 are fixedly connected with connecting pieces 61, each tray bracket 6 is connected and fixed to the transmission chain 43 via the connecting piece 61, and the plurality of tray brackets 6 are arranged at equal intervals along the height direction of the frame 1.

[0056] The tray brackets 6 in this embodiment can be divided into eight layers, and each layer is provided with three tray brackets 6, and the three tray brackets 6 are located on the same plane. When the tray 5 needs to be stored on the tray bracket 6, the tray brackets 6 on the same layer can support the tray 5 together, which is conducive to improving the stability of the tray 5 after storage.

[0057] In this embodiment, the drive sprocket 42 is staggered with the first roller 22, so that the material tray bracket 6 is staggered with the first roller 22, and the drive sprocket 42 can drive the material tray bracket 6 to drop to the bottom of the first roller 22, or drive the material tray bracket 6 to rise to the top of the first roller 22.

[0058] Reference Figure 2 A plurality of second sensors are fixedly connected to the frame 1 . In this embodiment, the second sensors are laser sensors 11 , and the plurality of laser sensors 11 are divided into two groups. The two groups of laser sensors 11 are electrically connected to the servo motor 31 , respectively.

[0059] A set of laser sensors 11 is fixedly connected to both sides of the top of the frame 1, and is used to detect the distance between the tray bracket 6 closest to the top of the frame 1 and the top of the frame 1. Another set of laser sensors 11 is fixedly connected to the bottom of the frame 1, and is used to detect the distance between the tray bracket 6 closest to the bottom of the frame 1 and the bottom of the frame 1.

[0060] The two groups of laser sensors 11 cooperate with each other, which is beneficial to reduce the possibility of damage to the tray bracket 6, the transmission chain 43 or the tray 5 after the transmission chain 43 drives the tray bracket 6 to rise and fall to the specified position and then continues to drive the tray bracket 6 to move, thereby helping to improve the safety of the power component 3 and the lifting component 4 during operation.

[0061] Reference Figure 1 and Figure 2The frame 1 is fixedly connected with a third sensor, and the third sensor in this embodiment is a U-shaped beam switch 12, which is arranged close to the first roller 22. The U-shaped beam switch 12 is electrically connected to the servo motor 31.

[0062] When the transmission chain 43 drives the multiple tray brackets 6 to move to the bottom of the first roller 22, and the laser sensor 11 at the bottom of the frame 1 detects the tray bracket 6, the tray bracket 6 is at the lowest position. Then the transmission chain 43 is driven to run in the reverse direction, so that the transmission chain 43 drives the tray bracket 6 to move to the top of the frame 1, and when the U-shaped beam switch 12 detects the tray bracket 6 closest to the top of the frame 1, the transmission chain 43 stops working. At this time, the servo motor 31 is at the origin position, which is conducive to reducing the possibility of gaps in the process of the lifting component 4 driving the tray bracket 6 to rise or fall, and thus facilitates multiple trays 5 to be continuously stored on the tray bracket 6.

[0063] The implementation principle of Example 1 is as follows: when the tray 5 needs to be stored on the tray bracket 6, the servo motor 31 is first started, and the servo motor 31 drives the transmission chain 43 to rotate through the reducer 32, the connecting shaft 321, the chain coupling 34, the commutator 33, the transmission shaft 41 and the transmission sprocket 42 in sequence, so that the transmission chain 43 drives the tray bracket 6 to move to the bottom of the first roller 22, and the laser sensor 11 at the bottom of the frame 1 detects the tray bracket 6. Then the servo motor 31 is reversed, so that the transmission chain 43 drives the tray bracket 6 to move to the top of the frame 1, and when the U-shaped beam switch 12 detects the tray bracket 6, the servo motor 31 is stopped. At this time, the servo motor 31 is at the origin position.

[0064] Next, the first driving member 21 works to drive the first roller 22 to rotate, and then the tray 5 is sent into the frame 1. After the first through-beam photoelectric sensor 231 detects the tray 5, the first driving member 21 slows down, and the tray 5 contacts the first roller 22. The first roller 22 drives the tray 5 to move into the frame 1, and the moving speed gradually decreases. After the third through-beam photoelectric sensor 233 detects the tray 5, the first driving member 21 stops running, so that the tray 5 stops moving. At this time, the tray 5 is located above the tray bracket 6. The servo motor 31 is started again to drive the transmission chain 43 to move toward the top of the frame 1. The transmission chain 43 drives the tray bracket 6 to move, so that the tray bracket 6 drives the tray 5 to separate from the first roller 22, and the storage of the tray 5 is completed. At this time, the tray bracket 6 of the next layer reaches the specified position, and the above process is repeated, so that a tray 5 is stored on the tray bracket 6 of each layer, thereby completing the storage of the tray 5.

[0065] Finally, when it is necessary to take out the tray 5 stored on the tray bracket 6, the servo motor 31 is started to move the transmission chain 43 downward so that the tray 5 on the tray bracket 6 contacts the first roller 22. At the same time, the first driving member 21 is started, and the first driving member 21 drives the first roller 22 to rotate, so that the first roller 22 drives the tray 5 to move out of the frame 1, so as to take out the tray 5. When the tray 5 on one layer of the tray bracket 6 is taken out, the corresponding tray bracket 6 moves to the bottom of the first roller 22 so that the tray 5 on the next layer of the tray bracket 6 contacts the first roller 22. The above process is repeated so that all the trays 5 stored on the tray bracket 6 can be taken out.

[0066] Example 2 The difference between Example 2 and Example 1 is that the conveying assembly 2 includes a telescopic cylinder 25 , a second driving member 26 and a second roller 27 .

[0067] Reference Figure 3 The telescopic cylinder 25 is fixedly connected to the frame 1. A plurality of telescopic cylinders 25 are provided. In the present embodiment, eight telescopic cylinders 25 are provided. The eight telescopic cylinders 25 are divided into two groups. The two groups of telescopic cylinders 25 correspond to each other and are staggered with the transmission chain 43.

[0068] The second driving member 26 is fixedly connected to the telescopic end of the telescopic cylinder 25, and the number of the second driving members 26 is equal to the number of the telescopic cylinders 25 and is arranged one-to-one with the telescopic cylinders 25. In this embodiment, the second driving member 26 is a motor.

[0069] The second roller 27 is rotatably connected to the telescopic cylinder 25 along the height direction of the frame 1, and the number of the second rollers 27 is equal to the number of the telescopic cylinders 25 and is arranged one-to-one with the telescopic cylinders 25. One end of the second roller 27 is connected to the output end of the second driving member 26, so that the second driving member 26 can drive the second roller 27 to rotate.

[0070] When the telescopic cylinder 25 drives the second driving member 26 and the second roller 27 to move so that the two opposite second rollers 27 approach each other, the two opposite second rollers 27 can clamp the material tray 5 on the material tray bracket 6 to drive the material tray 5 to move in the frame 1.

[0071] When the telescopic cylinder 25 drives the second driving member 26 and the second roller 27 to move so that the two opposite second rollers 27 move away from each other, the second rollers 27 no longer interfere with the material tray 5 on the material tray bracket 6, so that the second rollers 27 are not likely to interfere with the lifting and lowering of the material tray bracket 6.

[0072] The implementation principle of Example 2 is: when the material tray 5 needs to be stored on the material tray holder 6, the telescopic cylinder 25 is started to drive the second driving member 26 and the second roller 27 to move in the direction close to the material tray 5, so that the second roller 27 contacts the material tray 5, and at the same time the second driving member 26 is started, and the second driving member 26 drives the second roller 27 to rotate, so that the second roller 27 drives the material tray 5 to move, thereby facilitating the transfer of the material tray 5 to the material tray holder 6 for storage.

[0073] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A magnetic material PVD tray storage device, characterized in that: The invention comprises a frame (1) and a conveying assembly (2) and a lifting assembly (4) arranged on the frame (1); the frame (1) is arranged between a material coding device and a production line; a material tray bracket (6) is arranged on the lifting assembly (4); the material tray bracket (6) is used to support a material tray (5); the lifting assembly (4) is used to drive the material tray bracket (6) to be raised or lowered; and the conveying assembly (2) is used to send the material tray (5) into or out of the material tray bracket (6).

2. The magnetic material PVD tray storage device according to claim 1, characterized in that: The conveying assembly (2) comprises a first driving member (21) and a first roller (22); the first driving member (21) is arranged on the frame (1); a plurality of first rollers (22) are provided; the plurality of first rollers (22) are arranged parallel to each other; the plurality of first rollers (22) are rotatably connected to the frame (1) and are connected to the first driving member (21); the material tray (5) respectively contacts the plurality of first rollers (22); and the first rollers (22) are used to drive the material tray (5) to move.

3. The magnetic material PVD tray storage device according to claim 2, characterized in that: The conveying assembly (2) comprises a first sensor, the first sensor is arranged on the frame (1), the first sensor is electrically connected to the first driving member (21), and the first sensor is used to detect the position of the material tray (5).

4. The magnetic material PVD tray storage device according to claim 2, characterized in that: The conveying assembly (2) comprises a plurality of guide wheels (24), the plurality of guide wheels (24) being respectively arranged on the frame (1) and arranged close to the first roller (22), and the plurality of guide wheels (24) being evenly distributed on both sides of the material tray (5) and in contact with the material tray (5).

5. The magnetic material PVD tray storage device according to claim 2, characterized in that: It also includes a power assembly (3) arranged on the frame (1), the lifting assembly (4) being arranged along the height direction of the frame (1) and connected to the power assembly (3), a plurality of material tray brackets (6) being arranged, the plurality of material tray brackets (6) being evenly spaced along the height direction of the frame (1) on the lifting assembly (4), and the material tray brackets (6) being staggered with the first roller (22).

6. The magnetic material PVD tray storage device according to claim 5, characterized in that: The lifting assembly (4) comprises two sets of sprocket chain components, the two sets of sprocket chain components are symmetrically arranged on the frame (1) and are respectively connected to the power assembly (3), and connecting pieces (61) are respectively arranged at both ends of the material tray bracket (6), and the material tray bracket (6) is respectively connected to the two sets of sprocket chain components through the connecting pieces (61).

7. The magnetic material PVD tray storage device according to claim 5, characterized in that: A plurality of second sensors are arranged on the frame (1), the second sensors being electrically connected to the power assembly (3), and the plurality of second sensors being divided into two groups, one group of second sensors being arranged on both sides of the top of the frame (1), and the other group of second sensors being arranged at the bottom of the frame (1), and the second sensors being used to detect the position of the material tray bracket (6).

8. The magnetic material PVD tray storage device according to claim 5, characterized in that: The frame (1) is provided with a third sensor, the third sensor being arranged close to the first roller (22) and electrically connected to the power assembly (3), the third sensor being used to detect the position of the material tray bracket (6) to the first roller (22).

9. The magnetic material PVD tray storage device according to claim 1, characterized in that: The conveying components (2) are provided in plurality, and the plurality of conveying components (2) are divided into two groups. The material tray (5) is located between the two groups of conveying components (2). The conveying components (2) include a second driving member (26) and a second roller (27). The second driving member (26) is provided on the frame (1). The second roller (27) is rotatably connected to the frame (1) along the height direction of the frame (1). The second roller (27) is connected to the second driving member (26). The circumferential side wall of the second roller (27) contacts the material tray (5).

10. The magnetic material PVD tray storage device according to claim 9, characterized in that: The conveying assembly (2) further comprises a telescopic cylinder (25), the second driving member (26) being arranged at the telescopic end of the telescopic cylinder (25), the second roller (27) being rotatably connected to the telescopic end of the telescopic cylinder (25), and the telescopic cylinder (25) being used to drive the second driving member (26) and the second roller (27) to approach or move away from the material tray (5).

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