A phosphorus trifluoride automatic filling device

Abstract

The invention discloses an automatic filling device for phosphorus trifluoride, comprising a conveying pipe, an outer covering pipe, an outer shell, a feed end, a discharge end, an infusion pipe, a filling structure, a filter element shell, and further comprising: a reversing guide structure, comprising a first flip guide plate, a second flip plate, and a flip member, each of which is provided with a movable conductive member, and a relay pipe is connected between the two movable conductive members; a leakage point detection structure, comprising a first leakage point detector and a second leakage point detector; a reciprocating recoil component, comprising a swing member and a guide seat; a multi-baffle filter element structure, comprising a first feed filter cartridge, a first closing plate, a first filter ring plate, a second feed filter cartridge, an outer ring baffle, a second closing plate, a second filter ring plate, a retention rack, and a discharge slide pipe; an outer bottom extraction structure, comprising a fixed seat, an elastic tube, and a quick connector. The invention improves the filtering steps at the front end of the transmission pipeline and the filling stage, thereby improving the safety and quality of the filling.

Description

Technical Field

[0001] The invention relates to an automatic filling device, in particular to an automatic filling device for phosphorus trifluoride. Background Art

[0002] Phosphorus trifluoride can be used as a fluorinating agent. Phosphorus trifluoride can perform ion transfer and is used in the fields of electronics industry, battery manufacturing, polymer materials and catalysts. In semiconductor manufacturing, phosphorus trifluoride becomes plasma gas under the action of microwaves and is doped into semiconductors to significantly improve semiconductor performance. In the field of polymer materials, phosphorus trifluoride can be used as a reactant to synthesize fluorinated organic dithiophosphates, terephthalate esters and other polymer materials with excellent anti-corrosion properties. Phosphorus trifluoride is a gas at room temperature and needs to be condensed into a liquid at low temperature before filling. Automatic filling is mostly used during filling. Two issues need to be considered during the filling process. On the one hand, whether the pipeline used for filling is safe, and on the other hand, whether the purity of the filled phosphorus trifluoride meets the requirements.

[0003] Traditional phosphorus trifluoride filter elements all use corrosion-resistant filter membranes to filter phosphorus trifluoride liquids in an osmotic filtering manner. However, the accuracy of such filter membranes is difficult to control. If the filter membrane is set finer, the front end load of the filter membrane is too large and it is easy to get clogged. If the filter membrane is set coarser, small particles will leak through. Therefore, the prior art sets the filter membrane to multiple channels, from coarse to fine, to form a multi-layer filter layer, thereby filtering out particles layer by layer to improve the purity of phosphorus trifluoride. Although this can improve the purity, the repeated and dense filter layers will not only affect the filtration efficiency, but also in the recoil stage, the multi-layer filter cloth will also hinder the recoil efficiency. The front-end filter cloth is subjected to extremely poor recoil effect, and often the front-end filter cloth cannot be Backflush cleanly; when traditional phosphorus trifluoride is filled, a casing is usually installed on the outside of the pipeline, and an inert gas is passed through the casing, so that even if a leak occurs, it can be diluted by the inert gas and blocked by the casing, but it is difficult for workers to detect the location of the leak when inspecting the leak. Existing technicians will install gas sensors, liquid sensors and other sensor detection structures in the pipeline, but the pipeline is very long. If the spacing is large, it is difficult to capture the correct point. If the spacing is small, the overall cost is very high, and the entire filling pipeline needs to be disassembled and evacuated during maintenance, resulting in stagnation of filling. The cylinder cannot be fully filled and capped, and it is difficult to reopen it for filling. Summary of the invention

[0004] The invention provides an automatic phosphorus trifluoride filling device, which can not only protect pipelines, but also conduct phosphorus trifluoride liquid to other pipelines after leakage occurs in the pipeline. At the same time, a special pipeline structure and an external pipeline detection structure are used to deal with long pipelines, thereby reducing the number of pipeline detection structures, improving the detection sensitivity, and forming multi-stage and interval filtering. After filtering, the entire filter element will automatically vibrate due to the loss of external pressure. The force after vibration will make the filter membrane automatically return the material and concentrate the return material to the bottom of the filter element. After a single filtration, the filter membrane or the filter plate is cleaned immediately, thereby improving the service life and filtration quality of the filter membrane or the filter plate, and effectively solving the above problems.

[0005] The present invention is achieved in that:

[0006] A phosphorus trifluoride automatic filling device, comprising a delivery pipe for conveying phosphorus trifluoride liquid, an outer sheathed tube is sleeved on the outer side of the delivery pipe, the gap between the outer sheathed tube and the delivery pipe is filled with an inert gas, the end of the delivery pipe is connected to a feed end of an outer shell, a discharge end is arranged on a side of the outer shell away from the feed end, the feed end is connected to a liquid infusion tube, the discharge end is connected to a filling structure, a filter element housing is further arranged inside the outer shell, and the phosphorus trifluoride automatic filling device also includes:

[0007] The reversing guide structure comprises a first flip guide plate and a second flip plate arranged inside the delivery pipe, wherein the first flip guide plate and the second flip plate are arranged in opposite directions and symmetrically with each other, and the tops of the first flip guide plate and the second flip plate are connected with a flip member penetrating the delivery pipe and the outer covering pipe, and the flip members are both provided with movable conducting members, and a relay pipe is connected between the two movable conducting members;

[0008] The anti-leakage detection structure comprises a sealing sleeve sleeved on the outside of the delivery pipe, and tension sensors are arranged on the two flipping members, and the tension sensors are attached to the outer side of the sealing sleeve and are electrically connected to the power end of the flipping member. When the tension sensor detects that the tension of the sealing sleeve is changed, it is judged that the delivery pipe is leaking, and then the flipping member is rotated to communicate with the movable conductive member, so that the phosphorus trifluoride liquid continues to be transmitted along the relay pipe;

[0009] A leakage point detection structure, wherein the outer covering tube is composed of a semi-arc segment and an eccentric segment, the semi-arc segment is located at the upper end of the conveying tube, and the eccentric segment is located at the lower end of the conveying tube, the leakage point detection structure comprises a first leakage point detector slidably arranged on the outer side of the semi-arc segment, and a second leakage point detector is slidably arranged on the outer side of the eccentric segment, when the phosphorus trifluoride liquid leaks, it will splash onto the semi-arc segment or the eccentric segment and cause vibration to the semi-arc segment or the eccentric segment, and be detected by the first leakage point detector or the second leakage point detector;

[0010] A reciprocating recoil assembly, wherein a plurality of bosses are arranged on the inner side of the outer shell, and the reciprocating recoil assembly comprises a swinging member fixedly connected to the boss, wherein one end of the swinging member away from the boss is connected to the filter element housing, and a plurality of guide seats slidingly matched with the inner wall of the outer shell are fixedly connected to the outer side of the filter element housing, and when fluid is introduced into the filter element housing, the filter element housing is squeezed by the swinging member on the side of the fluid flow direction, and when the fluid flow is cut off, the filter element housing swings left and right under the action of the swinging member;

[0011] A multi-baffle filter element structure is arranged in the filter element housing, the filter element housing is a diamond-shaped structure, the multi-baffle filter element structure comprises a first feed filter cartridge movably connected to the feed end, the first feed filter cartridge is connected to the first closing plate, the first closing plate is fixedly connected to the outer side of the first closing plate with a first filter ring plate, the rear side of the first closing plate is connected to the second feed filter cartridge, the outer side of the middle position of the second feed filter cartridge is connected to an outer ring baffle, the end of the second feed filter cartridge is connected to the second closing plate, the outer side of the second closing plate is fixedly connected to the second filter ring plate, the filter element housing is in communication with the discharge end, a retention frame is further arranged at the inner side of the short symmetry axis of the diamond-shaped structure, some particles of the fluid flow through the middle position of the diamond-shaped structure and adhere to the retention frame, and the other end of the filter element housing is movably connected to the discharge end through a discharge slide pipe;

[0012] An outsole pull-out structure, wherein a plurality of horizontal connecting frames are spaced apart at the lower end of the diamond-shaped structure, wherein the outsole pull-out structure comprises a fixing seat fixed to the inner bottom of the outer shell, wherein a plurality of elastic tubes are arranged at the upper end of the fixing seat, and a plurality of quick connectors are arranged at the lower end of the fixing seat, and the quick connectors are connected to the suction structure.

[0013] As a further improvement, the first flip guide plate and the second flip plate have the same structural size, and the first flip guide plate includes a circular plate with a diameter equal to the inner diameter of the conveying pipe. The circular plate is hollow, and a liquid inlet groove is provided on one side of the circular plate. The top of the circular plate is connected to the flip part through a matching sleeve.

[0014] As a further improvement, the flip member includes a reversing catheter inserted into the matching sleeve, a sealing head is provided on the top of the reversing catheter, and a rotating motor is provided on the top of the sealing head. When the rotating motor rotates, it drives the reversing catheter to rotate.

[0015] As a further improvement, a first detection plate is provided on the inner side of the eccentric section, and the phosphorus trifluoride liquid leaking from the leakage point will splash onto the inner wall of the semi-arc segment or the first detection plate, and the first leakage point detector or the second leakage point detector will detect the impact force exerted on the semi-arc segment or the first detection plate after sliding to the leakage position, and the first leakage point detector and the second leakage point detector are connected by two arc arms.

[0016] As a further improvement, the second leakage point detector includes a sliding frame slidably connected to the outer side of the eccentric segment, and a vibration sensor is provided on the side of the sliding frame close to the eccentric segment and is attached to the outer wall of the semi-arc segment. The first detection plate is an arc-shaped structure, and the interior of the arc-shaped structure is hollow.

[0017] As a further improvement, the rocking member includes a stabilizing head connected to the boss, and the stabilizing head is slidably sleeved on a limiting cavity tube in the direction of one side of the filter element housing. A spring is also sleeved on the outer side of the stabilizing head, one end of the spring is connected to the boss, and the other end of the boss is fixed to the limiting cavity tube.

[0018] As a further improvement, the retention frame includes a first retention member arranged on the left side of the outer ring baffle and a second retention member arranged on the right side of the outer ring baffle. The first retention member has the same structure as the second retention member, and the proportion of the first retention member is 1.5 times that of the second retention member.

[0019] As a further improvement, the first retention member includes a plurality of sets of inner oblique shafts and outer oblique shafts fixedly connected to the bottom of the inner part of the filter element housing, and the inner oblique shafts and the outer oblique shafts form an X-shaped structure.

[0020] As a further improvement, the fixing seat comprises a mounting seat fixed to the inner bottom of the outer shell, an angular limiting seat is arranged above the mounting seat, and the limiting seat is located at the bottom of the filter element shell.

[0021] As a further improvement, the elastic tube includes a butt joint connected to the quick connector, a corrugated tube is connected to the top of the butt joint, and the top of the corrugated tube is connected to a connecting tube plugged into the transverse connecting frame.

[0022] The beneficial effects of the present invention are:

[0023] The present invention improves the safety and quality of filling by improving the filtering steps in the transmission pipeline and the front end of the filling stage, as follows:

[0024] When filtering, the existing filters will improve the accuracy of fluid filtration by gradually increasing the number and accuracy of filter plates or filter membranes. Although this can improve the accuracy of filtration, during the recoil processing stage, the impact force of the recoil structure at the end is already very small when it impacts the front end, resulting in the filter plate or filter membrane at the end being cleaned relatively cleanly, while the recoil effect of the filter plates or filter membranes at the front end and the middle section is extremely poor, and the utilization efficiency after cleaning is low. Therefore, the present invention divides the filtration area into a first feed filter cartridge, a first filter ring plate, a second feed filter cartridge, and a second filter ring plate through a multi-baffle filter element structure, so that the phosphorus trifluoride flowing into the filter can be filtered through at least four layers of filter layers with gradually increasing accuracy, and the single filtration area is smaller than the area of ​​the existing filter layer, thereby achieving multiple and small-area filtration, less impact on the recoil medium during the recoil stage, and better recoil effect.

[0025] The existing backwashing method generally involves passing water for backwashing. However, since the filter in this case is horizontal, if water is passed for backwashing, when water remains in the filter, passing phosphorus trifluoride will easily lead to a violent reaction. Therefore, the present invention provides a reciprocating backwashing component based on the multi-baffle filter element structure. When phosphorus trifluoride is flushed into the filter element housing, the entire filter element housing will be pushed in the direction of fluid flow, so that the swing member on the right side is squeezed. When the supply source of phosphorus trifluoride is closed, the filter element housing loses pressure, the swing member will begin to reset, and start to swing left and right, driving the entire filter element housing to swing left and right. At this time, the residual phosphorus trifluoride is drawn out at the feed end, so that under the action of the external suction force and the left and right swinging force of the filter element housing, the particles blocked on the multi-baffle filter element structure will fall to the bottom of the filter element housing. Both the front filter end and the rear filter end can be subjected to a uniform swinging effect, so that the backwashing effect at each position can be formed, thereby improving the practical effect of the present invention.

[0026] After the multi-baffle filter element structure is recoiled, the particles will fall to the bottom of the filter element housing. At this time, it is difficult to extract the particles shaken down from the bottom by conventional air blowing, and the particles will be blocked by the closing plate or the outer ring baffle. Therefore, the present invention provides an outer bottom extraction structure on the basis of the multi-baffle filter element structure, so that the particles at the bottom of the filter element housing can be sucked into the fixed seat through the elastic tube, and transferred to the outside through the quick connector. Moreover, due to the elastic setting of the elastic tube, it can be deformed according to the displacement of the filter element housing, so as to realize dynamic extraction and extract the particles at the bottom of the inclined filter element housing. Compared with the traditional recoil, the inclined bottom suction method has better effect.

[0027] In the existing corrosive gas transmission pipeline, inert gas is usually used to reduce or avoid pipeline leakage or reduce the hidden dangers caused by pipeline leakage. However, in fact, the length of the entire pipeline is very long. Once a leak occurs, not only is it difficult to find the leak point, but it is also necessary to suspend filling and extract all the gas in the pipeline before testing. The whole step is time-consuming and very cumbersome. Therefore, the present invention uses a reversing guide structure. After the leak occurs, it is different from the existing valve closing pipeline method. The first flip guide plate is flipped in the opposite direction and flows directly into the flip member. After the flip member is input into the relay pipe, it is output from the second flip plate. There is no need to set up extra pipelines and valves. The pipeline and the closure itself can be directly used as an external guide structure, so there is no need to stop the machine for repair. After the leak point of the pipeline is detected, the flow route of the phosphorus trifluoride liquid can be immediately switched to flow along the relay pipe, so that the purpose of maintenance without stopping the machine can be achieved, and it can cope with corrosive fluids without the need to apply a special anti-corrosion structure.

[0028] When detecting whether it is leakproof, in order to realize rapid detection of the entire area of ​​the entire pipeline and to be able to quickly and accurately determine whether a leak occurs, the present invention, through the provision of a leakproof detection structure, first sets a sealing sleeve with a certain elasticity on the outside of the entire pipeline, and tests the tension of the sealing sleeve through a tension sensor. When the sealing sleeve is corroded and disintegrated, its tension will change, so that it can be determined in real time that the pipeline has leaked, and then the leakage point can be detected and the pipeline can be switched in time.

[0029] After it is determined that a pipeline leaks, it is unrealistic to rely on manual inspection step by step due to the long length of the entire pipeline. Therefore, the prior art often sets some detection structures at intervals. However, such a multi-section setting will result in multiple sets of detection structures being set on several meters of pipelines, the detection cost is very high, and the detection data is very redundant. Therefore, the present invention sets a leakage point detection structure, and sets a first leakage point detector and a second leakage point detector by sliding on the outer side of the outer sheathing tube. The liquid splashed by the leakage point will continuously flush the inner wall of the outer sheathing tube, so that the sliding first leakage point detector and the second leakage point detector can detect the vibration of the outer sheathing tube corresponding to the leakage point position, so that the leakage point of the long-distance pipeline can be accurately and quickly determined, and there is no need to set multiple detection structures for a single section, and only one needs to be set. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0031] Figure 1 It is a structural schematic diagram of the present invention.

[0032] Figure 2 It is a structural schematic diagram of the connection between the outer shell of the present invention and the delivery tube and the infusion tube.

[0033] Figure 3 The present invention Figure 2 Schematic diagram of the structure.

[0034] Figure 4 The present invention Figure 3 Cross-section view of AA.

[0035] Figure 5 The present invention Figure 3 Isometric section view of the middle AA.

[0036] Figure 6 It is a structural schematic diagram of the multi-baffle filter element structure of the present invention.

[0037] Figure 7 It is a structural schematic diagram of the swing member of the present invention.

[0038] Figure 8 It is a structural schematic diagram of the outsole extraction structure of the present invention.

[0039] Fig. 9 It is a three-dimensional structural schematic diagram of the delivery pipe and the outer covering pipe of the present invention (first viewing angle).

[0040] Fig.10 It is a three-dimensional structural schematic diagram of the delivery pipe and the outer covering pipe of the present invention (second viewing angle).

[0041] Fig.11 The present invention Fig.10 Top view of the .

[0042] Fig.12 The present invention Fig.11 Cross-section view at the middle BB.

[0043] Fig.13 The present invention Fig.12 Schematic diagram of the left view structure.

[0044] Fig.14 It is a structural schematic diagram of the reversing guide structure of the present invention.

[0045] Fig.15 It is a structural schematic diagram of the leakage point detection structure of the present invention.

[0046] In the figure:

[0047] Outer shell 1, feed end 101, discharge end 102, boss 103, filter element shell 2, horizontal connecting frame 201, mounting frame 202, reciprocating recoil assembly 3, rocking member 301, stabilizing head 3011, limiting cavity tube 3012, spring 3013, guide seat 302, multi-baffle filter element structure 4, first feed filter cartridge 401, first closing plate 402, first filter ring plate 403, second feed filter cartridge 404, outer ring baffle 405, second closing plate 406, second filter ring plate 407, retention frame 408, first retention piece 4081, inner oblique shaft 40801, outer oblique shaft 40802, second retention piece 4082, discharge slide pipe 409, outer bottom extraction structure 5, fixing seat 501, mounting seat 5011, limiting seat 5012, elastic tube 502 , butt pipe 5021, bellows 5022, connecting pipe 5023, conveying pipe 10, outer covering pipe 20, semi-arc segment 21, eccentric segment 22, first flip guide plate 31, circular plate 311, liquid inlet groove 312, matching sleeve 313, flip part 32, reversing catheter 321, plugging head 322, rotating motor 323, movable conductive part 33, relay pipe 34, main body 341, fixing rod 342, second flip plate 35, leak detection structure 40, closing sleeve 41, tension sensor 42, leakage point detection structure 50, first leakage point detector 51, second leakage point detector 52, sliding frame 521, vibration sensor 522, first detection plate 53, arc arm 54, filling structure 90, filling pipe 91, flow sensor 92, quantitative valve 93. DETAILED DESCRIPTION

[0048] In order to make the embodiments of the present invention, all belong to the scope of protection of the present invention. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents the selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work belong to the scope of protection of the present invention.

[0049] In the description of the present invention, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as referring to the purpose, technical solutions and advantages of the methods. To be more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work indicate or imply relative importance or implicitly indicate the number of indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0050] Reference Figure 1 to Figure 15As shown, a phosphorus trifluoride automatic filling device comprises a delivery pipe 10 for conveying phosphorus trifluoride liquid, an outer sheathed tube 20 is sleeved on the outer side of the delivery pipe 10, the gap between the outer sheathed tube 20 and the delivery pipe 10 is filled with an inert gas, the end of the delivery pipe 10 is connected to a feed end 101 of an outer shell 1, a discharge end 102 is arranged on the side of the outer shell 1 away from the feed end, the feed end 101 is connected to the infusion tube, the discharge end 102 is connected to the filling structure 90, a filter element housing 2 is also arranged inside the outer shell 1, and the phosphorus trifluoride automatic filling device also comprises: a reversing guide structure, comprising a first flip guide plate 3 arranged on the inner side of the delivery pipe 10 1 and the second flip plate 35, the first flip guide plate 31 and the second flip plate 35 are arranged in opposite directions and symmetrically with each other, the tops of the first flip guide plate 31 and the second flip plate 35 are connected with a flip member 32 that penetrates the conveying tube 10 and the outer covering tube 20, the flip members 32 are each provided with a movable conductive member 33, and a relay tube 34 is connected between the two movable conductive members 33; the leak-proof detection structure 40 comprises a sealing sleeve 41 sleeved on the outer side of the conveying tube 10, the two flip members 32 are each provided with a tension sensor 42, the tension sensor 42 is attached to the outer side of the sealing sleeve 41 and is electrically connected to the power end of the flip member 32, when the tension sensor 42 detects that the sealing sleeve 41 is closed, the tension sensor 42 is electrically connected to the power end of the flip member 32, and the tension sensor 42 is electrically connected to the power end of the flip member 32. When the tension of the closed sleeve 41 changes, it is determined that the delivery pipe 10 has leaked, and then the flip member 32 is rotated to communicate with the movable conductive member 33, so that the phosphorus trifluoride liquid continues to be transmitted along the relay pipe 34; a leakage point detection structure 50, the outer coating tube 20 is composed of a semi-arc segment 21 and an eccentric segment 22, the semi-arc segment 21 is located at the upper end of the delivery pipe 10, and the eccentric segment 22 is located at the lower end of the delivery pipe 10, the leakage point detection structure 50 includes a first leakage point detector 51 slidably arranged on the outer side of the semi-arc segment 21, and a second leakage point detector 52 is slidably arranged on the outer side of the eccentric segment 22. When the phosphorus trifluoride liquid leaks, it will splash onto the semi-arc segment 21 or the eccentric segment 22 and The semi-arc segment 21 or the eccentric segment 22 causes vibration, which is detected by the first leakage point detector 51 or the second leakage point detector 52; a reciprocating recoil assembly 3, wherein a plurality of groups of bosses 103 are arranged on the inner side of the outer shell 1, and the reciprocating recoil assembly 3 comprises a rocking member 301 fixedly connected to the boss 103, and one end of the rocking member 301 away from the boss 103 is connected to the filter element housing 2, and a plurality of groups of guide seats 302 slidingly matched with the inner wall of the outer shell 1 are fixedly connected to the outer side of the filter element housing 2, and when fluid is passed into the filter element housing 2, the filter element housing 2 is squeezed toward the rocking member 301 on the side of the fluid flow direction, and when the fluid is cut off, the filter element housing 2 swings left and right under the action of the rocking member 301;The multi-baffle filter element structure 4 is arranged in the filter element housing 2. The filter element housing 2 is a diamond-shaped structure. The multi-baffle filter element structure 4 includes a first feed filter cartridge 401 movably connected to the feed end 101. The first feed filter cartridge 401 is connected to the first closing plate 402. The outer side of the first closing plate 402 is fixedly connected with a first filter ring plate 403. The rear side of the first closing plate 402 is connected to a second feed filter cartridge 404. The outer side of the middle position of the second feed filter cartridge 404 is connected to an outer ring baffle 405. The end of the second feed filter cartridge 404 is connected to a second closing plate 406. The outer side of the second closing plate 406 is fixedly connected with a second filter ring plate 407. The filter element housing 2 is connected to the discharge end 102, and a retention frame 408 is also arranged at the inner side of the short symmetry axis of the diamond structure. After the fluid flows through the middle position of the diamond structure, some particles adhere to the retention frame 408, and the other end of the filter element housing 2 is movably connected to the discharge end 102 through a discharge slide pipe 409; the outer bottom extraction structure 5, the lower end of the diamond structure is spaced with a plurality of horizontal connecting frames 201, the outer bottom extraction structure 5 includes a fixed seat 501 fixed to the inner bottom of the outer shell 1, the upper end of the fixed seat 501 is provided with a plurality of elastic tubes 502, and the lower end of the fixed seat 501 is provided with a plurality of quick connectors, and the quick connectors are connected to the suction structure.;

[0051] During filling, the quantitative valve 93 is opened, and the filtered phosphorus trifluoride liquid is poured into the cylinder through the filling pipe 91, and the filling amount is constantly monitored by the flow sensor 92.

[0052] When filtering, the existing filters will improve the accuracy of fluid filtration by gradually increasing the number and accuracy of filter plates or filter membranes. Although this can improve the accuracy of filtration, during the recoil treatment stage, the impact force of the recoil structure at the end is already very small when it impacts the front end, resulting in the filter plate or filter membrane at the end being cleaned relatively cleanly, while the recoil effect of the filter plates or filter membranes at the front end and the middle section is extremely poor, and the utilization efficiency after cleaning is low. Therefore, the present invention divides the filtration area into a first feed filter cartridge 401, a first filter ring plate 403, a second feed filter cartridge 404, and a second filter ring plate 407 through the multi-baffle filter element structure 4 set up, so that the phosphorus trifluoride flowing into the filter can be filtered by at least four layers of filter layers with gradually increasing accuracy, and the single filtration area is smaller than the area of ​​the existing filter layer, thereby achieving multiple and small-area filtration, less impact on the recoil medium during the recoil stage, and better recoil effect.

[0053] In the position of the second feed filter cartridge 404, the particles in the phosphorus trifluoride will be intercepted by the retention frame 408. Therefore, the length of the second feed filter cartridge 404 in this embodiment is twice that of the first feed filter cartridge 401, and the two ends of the outer ring baffle 405 extend to the vertices of the short symmetry axis of the filter element housing 2 respectively. The length of the second feed filter cartridge 404 needs to be set longer, which is twice that of the first feed filter cartridge 401. Therefore, the length of the single-section second feed filter cartridge 404 separated by the outer ring baffle 405 is actually equal to that of the first feed filter cartridge 401, and plays a similar filtering role during filtration.

[0054] During the filtering and retention process of the retention frame 408, it is divided into two parts, respectively on the left and right sides of the outer ring baffle 405. Specifically, the retention frame 408 includes a first retention member 4081 arranged on the left side of the outer ring baffle 405 and a second retention member 4082 arranged on the right side of the outer ring baffle 405. The first retention member 4081 and the second retention member 4082 have the same structure, and the proportion of the first retention member 4081 is 1.5 times that of the second retention member 4082. Although the setting positions are different, the structural composition is the same, and because the area where the first retention member 4081 is located contacts phosphorus trifluoride earlier, the setting proportion of the first retention member 4081 is greater than that of the second retention member 4082.

[0055] When the first retention member 4081 retains particles, the first retention member 4081 includes a plurality of groups of inner inclined shafts 40801 and outer inclined shafts 40802 fixedly connected to the bottom of the filter element housing 2, and the inner inclined shafts 40801 and the outer inclined shafts 40802 form an X-shaped structure, which is a net-like structure composed of the inner inclined shafts 40801 and the outer inclined shafts 40802, so that the particles are retained therein, and after being vibrated by the reciprocating recoil component 3, the particles can fall downward, thereby achieving the effect of retaining particles and quickly recovering the particles.

[0056] The existing backwashing method generally uses water to backwash. However, since the filter of this case is horizontal, if water is used for backwashing, when water remains in the filter, the introduction of phosphorus trifluoride will easily lead to a violent reaction. Therefore, the present invention provides a reciprocating backwashing assembly 3 on the basis of the multi-baffle filter element structure 4. When phosphorus trifluoride is flushed into the filter element housing 2, the entire filter element housing 2 is pushed in the direction of fluid flow, so that the swing member 301 on the right is squeezed. When the supply source of phosphorus trifluoride is closed, the filter element housing 2 loses pressure. The rocking member 301 starts to reset and start to swing left and right, driving the entire filter element housing 2 to swing left and right. At this time, the residual phosphorus trifluoride is sucked out at the position of the feed end 101. Therefore, under the action of the external suction force and the left and right swinging force of the filter element housing 2, the particles blocked on the multi-baffle filter element structure 4 will fall to the bottom of the filter element housing 2. Both the front filter end and the rear filter end can be evenly swung, so that the recoil effect at each position can be formed, thereby improving the practical effect of the present invention.

[0057] When the rocking member 301 swings, it needs to be reset after the phosphorus trifluoride liquid introduced loses pressure. At the same time, it also needs a continuous rocking force when it drives the filter housing 2 to shake. However, if the filter housing 2 is supported and buffered only by the spring, it is not enough to support the solid weight of the filter. Therefore, the rocking member 301 of this embodiment includes a stabilizing head 3011 connected to the boss 103. The stabilizing head 3011 is slidably sleeved with a limiting cavity tube 3012 in the direction of one side of the filter housing 2. The outer side of the stabilizing head 3011 is also sleeved with A spring 3013, one end of which is connected to the boss 103, and the other end of which is fixed to the limiting cavity 3012. The rocking member 301 is connected to the limiting cavity 3012 through the cooperation between the limiting cavity 3012 and the stabilizing head 3011, and then the spring 3013 is loaded to the outside of the stabilizing head 3011, with the sliding cooperation between the limiting cavity 3012 and the stabilizing head 3011 as the supporting end, and the cooperation between the spring 3013 and the stabilizing head 3011 as the displacement end, thereby achieving both stable support and the effect of providing reciprocating support force.

[0058] In order to make the connection between the filter element housing 2 and the rocking member 301 more stable, mounting frames 202 are respectively provided at both ends of the filter element housing 2, and the mounting frames 202 are fixedly connected to the limiting cavity tube 3012, so that when the rocking member 301 moves, the filter element housing 2 is driven to move through the mounting frames 202.

[0059] In order to ensure that the filter element housing 2 can always follow a fixed path when it slides, and not easily affect the cooperation between the limiting cavity tube 3012 and the stabilizing head 3011, and the spring 3013 and the stabilizing head 3011, the inner wall of the outer shell 1 of this embodiment is provided with a plurality of dovetail grooves, and the guide seat 302 is a dovetail type, and the guide seat 302 is engaged with the dovetail grooves. By providing a dovetail groove on the inner wall of the outer shell 1 and then setting the guide seat 302 to a dovetail type, the filter element housing 2 can always remain in a straight line when moving, making it more stable when moving.

[0060] After the multi-baffle filter element structure 4 is backflushed, the particles will fall to the bottom of the filter element housing 2. At this time, it is difficult to extract the particles shaken off the bottom by conventional air blowing, and the particles will be blocked by the closing plate or the outer ring baffle. Therefore, this embodiment is provided with an outer bottom extraction structure 5 on the basis of the multi-baffle filter element structure 4, so that the particles at the bottom of the filter element housing 2 can be sucked into the fixed seat 501 through the elastic tube 502, and transferred to the outside through the quick connector. Moreover, due to the elastic setting of the elastic tube 502, it can be deformed according to the displacement of the filter element housing 2, so as to realize dynamic extraction and extract the particles at the bottom of the inclined filter element housing 2. Compared with the traditional backflushing, the inclined bottom suction method is more effective.

[0061] In order to better adapt and limit the diamond structure of the filter element housing 2, the fixed seat 501 of this embodiment includes a mounting seat 5011 fixed to the bottom of the inner part of the outer shell 1, and an angular limiting seat 5012 is arranged above the mounting seat 5011. The limiting seat 5012 is located at the bottom of the filter element housing 2. The two ends of the limiting seat 5012 can limit the sliding filter element housing 2, so as to rigidly limit the filter element housing 2.

[0062] The elastic tube 502 will be slightly deformed during the movement of the filter element housing 2, but it itself is fixed. Therefore, the elastic tube 502 includes a butt joint 5021 connected to the quick connector, and a bellows 5022 is connected to the top of the butt joint 5021. The top of the bellows 5022 is connected to a connecting tube 5023 plugged into the horizontal connecting frame 201. The position of the butt joint 5021 remains unchanged, while the bellows 5022 will continue to twist as the position of the filter element housing 2 changes, so that even for a filter element housing 2 with mobility, the particles settled at the bottom can be sucked away.

[0063] Since the liquid transmitted by the delivery pipe assembly is phosphorus trifluoride liquid, special attention must be paid to corrosion prevention when setting up the electrical structure, both inside the delivery pipe 10 and in the gap between the delivery pipe 10 and the outer sheathing pipe 20, and hydraulic structures must not be used to avoid contamination.

[0064] In the existing corrosive gas transmission pipeline, inert gas is usually used to reduce or avoid pipeline leakage or reduce the hidden dangers caused by pipeline leakage. However, in fact, the length of the entire pipeline is very long. Once a leak occurs, not only is it difficult to find the leak point, but it is also necessary to suspend filling and extract all the gas in the pipeline before testing. The whole step is time-consuming and very cumbersome. Therefore, the present invention uses a reversing guide structure. After the leak occurs, it is different from the existing valve closing pipeline method. The first flip guide plate 31 is flipped in the opposite direction and flows into the flip member 32. After the flip member 32 is input into the relay pipe 34, it is output from the second flip plate 35. There is no need to set up extra pipelines and valves. The pipeline and the closure itself can be directly used as an external guide structure, so there is no need to stop the machine for repair. After the leak point of the pipeline is detected, the flow route of the phosphorus trifluoride liquid can be immediately switched to flow along the relay pipe 34, so that the purpose of maintenance without stopping the machine can be achieved, and it can cope with corrosive fluids without the need to apply a special anti-corrosion structure.

[0065] The difference between the first flip guide plate 31 and the second flip plate 35 compared to a normal baffle plate is that the first flip guide plate 31 and the second flip plate 35 have the same structure and size, and the first flip guide plate 31 comprises a circular plate 311 with the same diameter as the inner diameter of the delivery pipe 10, and the circular plate 311 is hollow, and a liquid inlet groove 312 is provided on one side of the circular plate 311, and the top of the circular plate 311 is connected to the flip member 32 through a matching sleeve 313, and the first flip guide plate 31 and the second flip plate 35 are directly used as pipelines. After the movable guide member 33 is opened, the liquid flows directly through the first flip guide plate 31, and then flows out from the second flip plate 32 after passing through the relay pipe 34, without the need to set up a separate pipeline, thereby reducing the use of accessories, thereby achieving the purpose of reducing leakage points.

[0066] The flip member 32 is not only a power structure for flipping and driving the first flip guide plate 31 and the second flip plate 35, but also a way to transmit phosphorus trifluoride liquid. The flip member 32 of this embodiment includes a reversing conduit 321 inserted into the matching sleeve 313, and a plugging head 322 is provided on the top of the reversing conduit 321. A rotating motor 323 is provided on the top of the plugging head 322. When the rotating motor 323 rotates, it drives the reversing conduit 321 to rotate. By rotating the reversing conduit 321, the on-off state of the reversing conduit 321 and the relay tube 34 can be switched, and the plugging head 322 can protect the phosphorus trifluoride from being immersed in the rotating motor 323, so that the switching of the pipeline can be achieved without the need for a valve.

[0067] In order to fix the relay tube 34 and prevent the relay tube 34 from obstructing the use of the leakage detection structure 50 and also prevent the relay tube 34 from being suspended in the air, the relay tube 34 is an I-shaped structure, and the relay tube 34 includes a main body 341 for transmitting phosphorus trifluoride liquid, and the two ends of the main body 341 are respectively provided with fixing sleeves 342 connected to two reversing guide tubes 321, and the mounting end of the rotating motor 323 is fixed to the top of the main body 341, so that the main body 341 and the rotating motor 323 can be fixed.

[0068] The movable conductive member 33 is a structure for connecting the main pipe body 341 and the reversing pipe 321. A convection hole is opened at the upper end of the outer side surface of the reversing pipe 321 in this embodiment. The movable conductive member 33 is a three-way pipe. The lower end of the movable conductive member 33 is communicated with the reversing pipe 321, and the side of the movable conductive member 33 is communicated with the main pipe body 341. The upper end of the movable conductive member 33 is closed by the plugging head 322. By opening a hole in the reversing pipe 321, when the flip member 32 flips the reversing pipe 321, the convection hole of the reversing pipe 321 is connected to the movable conductive member 33, thereby realizing the switching of the flow direction of the phosphorus trifluoride liquid.

[0069] When detecting whether it is leakproof, in order to realize rapid detection of the entire area of ​​the entire pipeline and to be able to quickly and accurately determine whether a leak occurs, the present invention sets a leak detection structure 40, firstly sets a sealing sleeve 41 with a certain elasticity on the outside of the entire pipeline, and tests the tension of the sealing sleeve 41 through a tension sensor 42. When the sealing sleeve 41 is corroded and disintegrated, its tension will change, so that it can be determined in real time that the pipeline has leaked, and then the leakage point can be detected and the pipeline can be switched in time.

[0070] Among them, the tension sensors 42 used in this embodiment are all treated with anti-corrosion coatings and can be briefly immersed in phosphorus trifluoride liquid. Adjustment and debugging are required after each pipeline repair. In this embodiment, the tension sensor 42 is fixed to the outside of the reversing catheter 321. When the reversing catheter 321 is not reversed, the tension sensor 42 is attached to the outer side of the sealing sleeve 41.

[0071] After it is determined that a pipeline leaks, it is unrealistic to rely on manual inspection step by step due to the long length of the entire pipeline. Therefore, the prior art often sets some detection structures at intervals. However, such a multi-section setting will result in multiple sets of detection structures being set on several meters of pipelines, the detection cost is very high, and the detection data is very redundant. Therefore, the present invention sets a leakage point detection structure 50, and sets a first leakage point detector 51 and a second leakage point detector 52 by sliding on the outer side of the outer sheathing tube 20. The liquid splashed by the leakage point will continuously wash onto the inner wall of the outer sheathing tube 20, so that the sliding first leakage point detector 51 and the second leakage point detector 52 can detect the vibration of the outer sheathing tube 20 corresponding to the leakage point position, so that the leakage point of the long-distance pipeline can be accurately and quickly determined, and there is no need to set multiple detection structures for a single section, and only one needs to be set.

[0072] When setting the outer sheath tube 20, the outer sheath tube 20 cannot adopt a traditional pipeline structure. If the outer sheath tube 20 is set too small, it can accommodate less inert gas and less leaked liquid. If the outer sheath tube 20 is set too large, the vibration generated by the detected liquid when it touches the inner wall of the outer sheath tube 20 is small, and it is difficult to be detected by the first leak detector 51 and the second leak detector 52. Therefore, the present invention sets the outer sheath tube 20 as a semi-arc segment 21 and an eccentric segment 22. The design of the semi-arc segment 21 allows the upper part of the conveying pipe 10 to be quickly and accurately located when leaking, and the eccentric segment 22 of the lower part can provide a certain volume for the leaking solution.

[0073] Although the volume of the entire pipeline gap is increased by providing the eccentric section 22, it is also easy to make the leakage at the lower end difficult to detect. Therefore, the second leakage detector 52 of the present invention is provided with a first detection plate 53 with a higher height on the inner side of the eccentric section 22. When the lower half of the conveying pipe 10 leaks, it will splash on the first detection plate 53, thereby compensating for the outward expansion space of the eccentric section 22, so that the second leakage detector 52 can achieve the same detection effect as the first leakage detector 51.

[0074] In order to synchronize the first leakage detector 51 and the second leakage detector 52, the first leakage detector 51 and the second leakage detector 52 are connected by two arc arms 54, so that when the first leakage detector 51 or the second leakage detector 52 is actuated, the other structure can be driven to move. In this embodiment, the first leakage detector 51 and the second leakage detector 52 are driven manually, or they can be operated by adding an electric drive structure.

[0075] The structure of the second leakage point detector 52 is the same as that of the first leakage point detector 51. During the leakage point detector detection process, the second leakage point detector 52 includes a sliding frame 521 that is slidably connected to the outer side of the eccentric segment 22. A vibration sensor 522 that is attached to the outer wall of the semi-arc segment 21 is provided on the side of the sliding frame 521 close to the eccentric segment 22. The vibration of the semi-arc segment 21 and the eccentric segment 22 is detected by the vibration sensor 522 to form a vibration curve. The specific position of the leakage point can be obtained by taking the peak value combined with the travel time and displacement, and the leakage point can be quickly located.

[0076] In order to ensure that the setting of the first detection plate 53 does not affect the detection of the second leakage detector 52, the first detection plate 53 is an arc-shaped structure, and the interior of the arc-shaped structure is hollow. The vibration can be accurately transmitted to the position of the vibration sensor 522 through the hollow setting of the arc-shaped structure, and the detection data will not be affected by the addition of the first detection plate 53.

[0077] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A phosphorus trifluoride automatic filling device, characterized in that: The invention comprises a delivery pipe (10) for delivering phosphorus trifluoride liquid, wherein an outer sheath pipe (20) is sleeved on the outer side of the delivery pipe (10), and the gap between the outer sheath pipe (20) and the delivery pipe (10) is filled with an inert gas. The end of the delivery pipe (10) is connected to a feed end (101) of an outer shell (1), and a discharge end (102) is provided on a side of the outer shell (1) away from the feed end, wherein the feed end (101) is connected to a liquid infusion pipe, and the discharge end (102) is connected to a filling structure (90). A filter element housing (2) is also provided inside the outer shell (1). The phosphorus trifluoride automatic filling device further comprises: The reversing flow guide structure comprises a first flip guide plate (31) and a second flip plate (35) arranged inside the delivery pipe (10); the first flip guide plate (31) and the second flip plate (35) are arranged in opposite directions and are symmetrical to each other; the tops of the first flip guide plate (31) and the second flip plate (35) are connected with a flip member (32) penetrating the delivery pipe (10) and the outer covering pipe (20); the flip members (32) are each provided with a movable conductive member (33); and a relay pipe (34) is connected between the two movable conductive members (33); The anti-leakage detection structure (40) comprises a sealing sleeve (41) sleeved on the outside of the delivery tube (10), and tension sensors (42) are provided on the two flipping members (32). The tension sensors (42) are attached to the outer side of the sealing sleeve (41) and are electrically connected to the power end of the flipping member (32). When the tension sensor (42) detects that the tension of the sealing sleeve (41) has changed, it is determined that the delivery tube (10) has leaked, and the flipping member (32) is rotated to communicate with the movable conductive member (33), so that the phosphorus trifluoride liquid continues to be transmitted along the relay tube (34); A leakage point detection structure (50), wherein the outer covering tube (20) is composed of a semi-arc segment (21) and an eccentric segment (22), wherein the semi-arc segment (21) is located at the upper end of the conveying tube (10), and the eccentric segment (22) is located at the lower end of the conveying tube (10), wherein the leakage point detection structure (50) comprises a first leakage point detector (51) slidably arranged on the outside of the semi-arc segment (21), and a second leakage point detector (52) is slidably arranged on the outside of the eccentric segment (22), and when the phosphorus trifluoride liquid leaks, it will splash onto the semi-arc segment (21) or the eccentric segment (22) and cause vibration to the semi-arc segment (21) or the eccentric segment (22), and be detected by the first leakage point detector (51) or the second leakage point detector (52); A reciprocating recoil assembly (3), wherein a plurality of groups of bosses (103) are arranged on the inner side of the outer shell (1), the reciprocating recoil assembly (3) comprises a swinging member (301) fixedly connected to the boss (103), one end of the swinging member (301) away from the boss (103) being connected to the filter element housing (2), and a plurality of groups of guide seats (302) slidingly engaged with the inner wall of the outer shell (1) being fixedly connected to the outer side of the filter element housing (2), when fluid is passed into the filter element housing (2), the filter element housing (2) is squeezed by the swinging member (301) on the side of the fluid flow direction, and when the fluid flow is cut off, the filter element housing (2) swings left and right under the action of the swinging member (301); The multi-baffle filter element structure (4) is arranged in the filter element housing (2), the filter element housing (2) is a diamond-shaped structure, and the multi-baffle filter element structure (4) comprises a first feed filter cartridge (401) movably connected to the feed end (101), the first feed filter cartridge (401) is connected to a first closing plate (402), a first filter ring plate (403) is fixedly connected to the outer side of the first closing plate (402), a second feed filter cartridge (404) is connected to the rear side of the first closing plate (402), and an outer filter ring plate (403) is connected to the outer side of the middle portion of the second feed filter cartridge (404). annular baffle (405), the end of the second feed filter cartridge (404) is connected to a second closing plate (406), the outer side of the second closing plate (406) is fixedly connected to a second filter ring plate (407), the filter element housing (2) is in communication with the discharge end (102), a retention frame (408) is also provided at the inner side of the short symmetry axis of the rhombus structure, some particles of the fluid adhere to the retention frame (408) after flowing through the middle part of the rhombus structure, and the other end of the filter element housing (2) is movably connected to the discharge end (102) via a discharge slide pipe (409); An outer sole extraction structure (5), wherein a plurality of transverse connecting frames (201) are spaced apart at the lower end of the diamond-shaped structure, the outer sole extraction structure (5) comprises a fixing seat (501) fixedly connected to the inner bottom of the outer shell (1), a plurality of elastic tubes (502) are arranged at the upper end of the fixing seat (501), and a plurality of quick connectors are arranged at the lower end of the fixing seat (501), and the quick connectors are connected to the suction structure.

2. The automatic filling device for phosphorus trifluoride according to claim 1, characterized in that: The first flip guide plate (31) and the second flip plate (35) have the same structure and size. The first flip guide plate (31) comprises a circular plate (311) having a diameter equal to the inner diameter of the delivery pipe (10). The circular plate (311) is hollow. A liquid inlet groove (312) is provided on one side of the circular plate (311). The top of the circular plate (311) is in communication with the flip member (32) via a matching sleeve (313).

3. The automatic filling device for phosphorus trifluoride according to claim 2, characterized in that: The flip member (32) comprises a reversing conduit (321) inserted into a matching sleeve (313), a plugging head (322) is arranged at the top of the reversing conduit (321), and a rotating motor (323) is arranged at the top of the plugging head (322), and when the rotating motor (323) rotates, it drives the reversing conduit (321) to rotate.

4. The automatic filling device for phosphorus trifluoride according to claim 1, characterized in that: A first detection plate (53) is arranged on the inner side of the eccentric section (22); the phosphorus trifluoride liquid leaking from the leakage point will splash onto the inner wall of the semi-arc section (21) or the first detection plate (53); and the first leakage point detector (51) or the second leakage point detector (52) will detect the impact force exerted on the semi-arc section (21) or the first detection plate (53) after sliding to the leakage position; the first leakage point detector (51) and the second leakage point detector (52) are connected via two arc-shaped arms (54).

5. The automatic filling device for phosphorus trifluoride according to claim 4, characterized in that: The second leakage point detector (52) comprises a sliding frame (521) slidably connected to the outer side of the eccentric section (22); a vibration sensor (522) is provided on a side of the sliding frame (521) close to the eccentric section (22) and is attached to the outer side wall of the semi-arc section (21); the first detection plate (53) is an arc-shaped structure, and the interior of the arc-shaped structure is hollow.

6. The automatic filling device for phosphorus trifluoride according to claim 1, characterized in that: The rocking member (301) comprises a stabilizing head (3011) connected to the boss (103); the stabilizing head (3011) is slidably sleeved with a limiting cavity tube (3012) in a direction toward one side of the filter element housing (2); a spring (3013) is sleeved on the outer side of the stabilizing head (3011); one end of the spring (3013) is connected to the boss (103), and the other end of the boss (103) is fixedly connected to the limiting cavity tube (3012).

7. The automatic filling device for phosphorus trifluoride according to claim 1, characterized in that: The retention frame (408) includes a first retention member (4081) arranged on the left side of the outer ring baffle (405) and a second retention member (4082) arranged on the right side of the outer ring baffle (405), the first retention member (4081) and the second retention member (4082) having the same structure, and the proportion of the first retention member (4081) is 1.5 times that of the second retention member (4082).

8. The automatic filling device for phosphorus trifluoride according to claim 7, characterized in that: The first retention member (4081) comprises a plurality of sets of inner oblique shafts (40801) and outer oblique shafts (40802) fixedly connected to the inner bottom of the filter element housing (2), wherein the inner oblique shafts (40801) and the outer oblique shafts (40802) form an X-shaped structure.

9. The automatic filling device for phosphorus trifluoride according to claim 1, characterized in that: The fixing seat (501) comprises a mounting seat (5011) fixed to the inner bottom of the outer shell (1), an angular limiting seat (5012) is arranged above the mounting seat (5011), and the limiting seat (5012) is located at the bottom of the filter element shell (2).

10. The automatic filling device for phosphorus trifluoride according to claim 9, characterized in that: The elastic tube (502) comprises a butt joint (5021) connected to the quick connector, the top of the butt joint (5021) is connected to a bellows (5022), and the top of the bellows (5022) is connected to a connecting tube (5023) plugged into the transverse connecting frame (201).

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