FA automatic cleaning machine and cleaning method

Abstract

The present invention proposes an FA automatic cleaning machine and cleaning method, which belongs to the field of chip cleaning technology; it includes a base, two linear rails are arranged at one end of the base away from the ground; a gantry is arranged across the two linear rails and is slidably connected with the two linear rails; a first linear drive device is arranged on one side of the gantry, used to drive the gantry to reciprocate along the axial extension direction of the two linear rails; two hanging basket grabbing mechanisms are symmetrically arranged on the gantry, used to grab the hanging basket; three cleaning units are arranged sequentially and at intervals between the two linear rails, and are arranged at intervals along the axial extension direction of the two linear rails, used to clean the contents of the hanging basket placed therein; it is used to change the grabbing state of the two hanging basket grabbing mechanisms, so that the hanging basket enters the interior of the cleaning unit, or to reset the two hanging basket grabbing mechanisms and re-grab the hanging basket. This scheme can automatically perform continuous cleaning, and is provided with auxiliary functions such as vibration and heating, which can eliminate bubbles and improve the cleaning effect.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor device cleaning equipment, and in particular to an FA automatic cleaning machine and a cleaning method. Background Art

[0002] During the preparation of chips, electronic assemblies, power devices or packaged devices, welding processes are often used. After the operation is completed, there will be residual substances such as flux, which usually require FA cleaning. Cleaning is not only beneficial to improving the service life of the product, but also beneficial to improving the quality of subsequent wire binding and molding processes of discrete devices or power LED devices.

[0003] However, during the FA cleaning process, multiple cleanings are required, and the time and solvent used for each cleaning are not exactly the same. The existing method is to manually transfer the cleaning basket containing FA chips multiple times, which has a very low work efficiency. Therefore, it is very necessary to provide an FA automatic cleaning machine and cleaning method to avoid the shortcomings of frequent manual handling and improve the cleaning efficiency. Summary of the invention

[0004] In view of this, the present invention proposes an automatic FA cleaning machine and a cleaning method which can automatically and continuously clean a FA chip to be cleaned for multiple times without the need for frequent manual handling and have high cleaning efficiency.

[0005] In one aspect, the present invention provides an FA automatic cleaning machine, comprising:

[0006] A base, fixedly arranged relative to the ground;

[0007] Two linear rails are arranged at one end of the base away from the ground and are arranged horizontally and at intervals along the length extension direction of the base;

[0008] The gantry is straddled on two linear rails and is slidably connected to the two linear rails;

[0009] A first linear drive device is arranged at one side of the gantry, and a movable end of the first linear drive device is fixedly connected to the gantry, and is used to drive the gantry to reciprocate along the axial extension direction of the two linear rails;

[0010] Two hanging basket grabbing mechanisms are symmetrically arranged on the gantry and are used to grab the hanging baskets;

[0011] Three cleaning units are arranged between the two linear rails and are arranged at intervals along the axial extension direction of the two linear rails. They are used to release the hanging basket from the hanging basket grabbing mechanism and clean the placed hanging basket; they are used to change the grabbing state of the two hanging basket grabbing mechanisms to allow the hanging basket to enter the interior of the cleaning unit, or to reset the two hanging basket grabbing mechanisms to re-grasp the hanging basket.

[0012] On the basis of the above technical scheme, preferably, the two hanging basket grabbing mechanisms each include a first connecting rod, a second connecting rod and a third connecting rod connected end to end; a first guide rod and a second guide rod are arranged on the gantry, the first connecting rod is extended in the vertical direction and is slidably connected to the first guide rod, and a return spring is also arranged on the first guide rod; the third connecting rod is parallel to the first connecting rod and is arranged at intervals, the third connecting rod is slidably connected to the second guide rod, and the central axis of the first guide rod is arranged parallel to the central axis of the second guide rod; a clamping portion is arranged on the side of the third connecting rod close to the hanging basket, the clamping portion extends outward in the direction close to the hanging basket, and a clamping groove is arranged on the clamping portion; the second connecting rod is arranged between the first connecting rod and the third connecting rod, and is fixedly connected to the ends of the first connecting rod and the third connecting rod away from the ground respectively; a hook is arranged on the side of the first connecting rod close to the hanging basket, one end of the hook is fixedly connected to the end of the first connecting rod, and the other end of the hook extends outward horizontally along the extension direction of the two linear tracks; a lifting lug is arranged directly above the hanging basket, the lifting lug is extended along the crossbeam direction of the gantry, and the hook and the lifting lug are abutted.

[0013] Preferably, the cleaning units are a first cleaning unit, a second cleaning unit and a third cleaning unit which are arranged in sequence; each cleaning unit includes a cleaning tank; a tray is arranged in the cleaning tank; a first opening is arranged at the top of the cleaning tank, a hanging basket unloading device is symmetrically arranged at the edge of the first opening, a follower device is arranged across adjacent cleaning tanks, and the follower device is respectively connected to the trays of adjacent cleaning units; a second linear drive device is also arranged in the cleaning tank of the second cleaning unit; a plurality of third guide rods are arranged in each cleaning tank, the plurality of third guide rods are extended along the axial direction of the first opening, and the plurality of third guide rods are also slidably connected to the side surface of the tray; the movable end of the second linear drive device drives the follower device or the hanging basket unloading device to move synchronously.

[0014] Further preferably, the follow-up devices include a base, a fourth guide rod, a sixth connecting rod, a plurality of seventh connecting rods, a plurality of eighth connecting rods and a first blocking portion, the base is arranged across the first opening portions of the cleaning tanks of two adjacent cleaning units, the fourth guide rod is inserted through the base and extends vertically upward in a direction away from the base; a sixth connecting rod is arranged at one end of the fourth guide rod away from the ground, and the sixth connecting rod is arranged parallel to the base; two seventh connecting rods are arranged at the ends of the sixth connecting rod and extend toward the inside of two adjacent cleaning tanks, and a support ear is arranged on the side of the tray close to the hanging basket unloading device, and a support ear is arranged on the support ear There is a through hole, and the ends of a pair of seventh connecting rods away from the sixth connecting rod are inserted into the through holes of the support ears of the tray located on the second cleaning unit, and are fixedly connected to the movable end of the second linear drive device; one end of the other pair of seventh connecting rods passes through the support ears of the tray of the first cleaning unit or the third cleaning unit and is fixedly connected to the eighth connecting rod, and the other end of the eighth connecting rod is away from the seventh connecting rod and extends horizontally outward; the end of the eighth connecting rod away from the seventh connecting rod is fixedly provided with a first blocking part, the first blocking part is located on the travel trajectory of the hanging basket unloading device on the cleaning tank, and selectively resists the hanging basket unloading device.

[0015] Further preferably, the hanging basket unloading device includes two first pressure arms, two fourth connecting rods, two fifth connecting rods, a second pressure arm and a wedge block, each first pressure arm and each fourth connecting rod is arranged in a cleaning tank, and the fourth connecting rod in the cleaning tank of the second cleaning unit is fixedly connected to the movable end of the second linear drive device; the extension direction of each fourth connecting rod is parallel to the axial direction of the first opening portion, and the end of each fourth connecting rod away from the first opening portion is fixedly provided with a first pressure arm, and the first pressure arm extends in a direction away from the fourth connecting rod; the end of each fourth connecting rod close to the first opening portion is provided with a fifth connecting rod, and each fifth connecting rod is located outside the first opening portion and extends horizontally outward, the second pressure arm is straddled at the end of the two fifth connecting rods away from the cleaning tank, and a wedge block is provided on the second pressure arm, the cross-sectional area of ​​the end of the wedge block close to the ground is smaller than the cross-sectional area of ​​the end away from the ground, and the size of the wedge block is adapted to the size of the clamping groove of the clamping portion.

[0016] Still further preferably, at the end position of the fourth connecting rod in the cleaning groove of the first blocking part, the first blocking part selectively abuts against the end of the fourth connecting rod; a second blocking part is provided in the cleaning groove of the first cleaning unit or the third cleaning unit, the second blocking part is located between the ends of the two first pressure arms away from the fourth connecting rod, and the second blocking part overlaps with the projection part of the two first pressure arms in the vertical direction; the fourth connecting rod is magnetically connected to the first blocking part; the second blocking part is magnetically connected to the two first pressure arms.

[0017] Still further preferably, the cleaning media in the three cleaning units are clean water, cleaning liquid and clean water respectively.

[0018] Still further preferably, a circulating pump is provided at the bottom of the second cleaning unit, and a plurality of nozzles are arranged in an array at the first opening of the cleaning tank of the second cleaning unit, for spraying the cleaning liquid onto the surface of the FA chip to be cleaned; a plurality of telescopic card plates are also provided in the cleaning tank of the second cleaning unit, and the plurality of telescopic card plates are arranged at intervals along the axial direction of the first opening, and the fixed ends of the plurality of telescopic card plates are fixedly connected to the inner surface of the cleaning tank of the second cleaning unit, and the movable end of the telescopic card plate is slidably connected to the fixed end, and a reset spring is provided between the movable end and the fixed end, and the movable end of the telescopic card plate selectively collides with or resets the surface of the hanging basket.

[0019] Still further preferably, a heater is also provided inside the second cleaning unit, the heater is sealed and connected to the second cleaning unit, and the input end of the heater extends outward through the second cleaning unit; a first bow-shaped stopper is provided on the gantry, and a second bow-shaped stopper is symmetrically provided on the outside of the second cleaning unit, the second bow-shaped stopper is slidingly connected to the second cleaning unit, and a return spring is provided between the second bow-shaped stopper and the second cleaning unit; a conductive terminal is provided on the side of the second bow-shaped stopper close to the cleaning tank, the first bow-shaped stopper abuts against the surface of the second bow-shaped stopper, so that the second bow-shaped stopper moves horizontally toward the second cleaning tank, the conductive terminal abuts against and is electrically connected to the input end of the heater inside the second cleaning unit, thereby driving the heater to work and heating the cleaning medium in the cleaning tank of the second cleaning unit.

[0020] Preferably, the hanging basket is a hollow rectangular structure, and a second opening is provided at the end of the hanging basket away from the ground; a lifting ear is provided at the edge of the second opening; and a plurality of windows are provided on the end surface of the hanging basket in the non-opening direction, and the windows are used to discharge the cleaning liquid from the hanging basket.

[0021] On the other hand, the present invention provides a method for automatic FA cleaning, comprising the following steps:

[0022] S1: equipped with the above-mentioned FA automatic cleaning machine;

[0023] S2: Inject cleaning medium into the cleaning tanks of the three cleaning units in advance;

[0024] S3: placing the FA chip to be cleaned on the cleaning fixture and placing it in the hanging basket of the gantry at the starting position;

[0025] S4: The first linear drive device drives the gantry to move horizontally along the two linear tracks to reach the first cleaning unit, and starts the second linear drive device at the second cleaning unit. The movable end of the second linear drive device drives the follower device to move. The eighth connecting rod of the follower device located in the first cleaning unit drives the hanging basket unloading device at the first cleaning unit to move vertically downward, so that the second pressure arm and the wedge block at the first cleaning unit also move vertically downward, abut against the clamping part of the third connecting rod of the hanging basket grabbing mechanism, and push the hanging basket grabbing mechanism to move along the axial direction of the first guide rod and the second guide rod on the gantry. The first connecting rod also squeezes the reset spring on the first guide rod. , so that the hook on the hanging basket grabbing mechanism is separated from the lifting ear on the hanging basket, and the hanging basket is unloaded; the unloaded hanging basket falls on the tray of the first cleaning unit, and further moves downward as the movable end of the second linear drive device drives the follower device, and the third guide rod limits the vertical movement direction of the tray; it is immersed in the cleaning tank of the first cleaning unit to a certain depth to complete the first cleaning; then the second linear drive device is reset upward, the position of the hanging basket rises with the tray, the clamping part of the third connecting rod of the hanging basket grabbing mechanism is separated from the wedge block, and the compressed reset spring drives the first connecting rod to reset, the hook is again against the lifting ear on the hanging basket, and the hanging basket grabbing mechanism grabs the hanging basket again;

[0026] S5: Then the first linear drive device drives the gantry to move to the second cleaning unit. Under the action of the second linear drive device, the follower device and the basket unloading device at the second cleaning unit are actuated, and the basket grabbing mechanism on the gantry unloads the basket to the tray of the second cleaning unit again. The basket moves along the third guide rod in the cleaning tank of the second cleaning unit. During the movement, on the first aspect, the second cleaning unit is provided with a circulation pump, and a plurality of nozzles are arranged in an array at the first opening of the cleaning tank of the second cleaning unit. The cleaning medium in the basket soaks the FA chip to be cleaned, and the plurality of nozzles spray the cleaning medium onto the surface of the FA chip to be cleaned.

[0027] On the second aspect, when the tray moves along the third guide rod, it will abut against the telescopic card plate in the cleaning tank. The fixed ends of several telescopic card plates are fixedly connected to the inner surface of the cleaning tank of the second cleaning unit. The movable ends of the telescopic card plates are slidably connected to the fixed ends, and a reset spring is arranged between the movable ends and the fixed ends. The tray contacts the movable ends of the telescopic card plates. The movable ends of the telescopic card plates have a wedge-shaped or curved surface. When contacting the surface of the tray, they will intermittently pass through the windows hollowed out on the surface of the hanging basket. The movable ends of the telescopic card plates will be continuously compressed and reset, forming a periodic impact effect on the hanging basket, which is used to eliminate the foam on the surface of the FA chip.

[0028] In the third aspect, a group of first arched blocks are arranged on the second cleaning unit, and a second arched block is symmetrically arranged on the outer side of the second cleaning unit, and the second arched block is slidably connected to the second cleaning unit; a conductive terminal is arranged on the side of the second arched block close to the cleaning tank, and the first arched block abuts against the surface of the second arched block, so that the second arched block moves horizontally toward the second cleaning tank, and the conductive terminal abuts against and is electrically connected to the input end of the heater inside the second cleaning unit, driving the heater to work and heating the cleaning medium in the cleaning tank of the second cleaning unit; the second cleaning of the FA chip in the hanging basket is achieved by reciprocatingly lifting and lowering the tray at the second cleaning unit; after the second cleaning is completed, the second linear drive device is reset, the hook abuts against the ear on the hanging basket again, and the hanging basket grabbing mechanism grabs the hanging basket again;

[0029] S6: After the second cleaning is completed, the first linear drive device drives the gantry to move horizontally along the two linear tracks to the third cleaning unit for the third cleaning. The third cleaning process is the same as the first situation described in step S4. After the third cleaning is completed, the second linear drive device is reset, the hook is again held against the ear on the hanging basket, and the hanging basket grabbing mechanism grabs the hanging basket again.

[0030] S7: The first linear drive device drives the gantry to move horizontally along the two linear tracks, so that the gantry reaches the end position, and the hanging basket can be manually removed.

[0031] The FA automatic cleaning machine and cleaning method provided by the present invention have the following beneficial effects compared with the prior art:

[0032] (1) This solution can automatically perform continuous cleaning. The three cleaning units can continuously perform three different cleaning processes, which improves the cleaning quality and cleaning efficiency. In addition, the cleaning process does not require human intervention, and the automation is greatly improved. The first and third cleaning units are rinsed with clean water, and the second cleaning unit uses cleaning liquid, combined with auxiliary actions such as heating, vibration impact, and cleaning liquid spraying to improve the cleaning effect of the cleaning liquid and eliminate bubbles generated between the FA chip in the cleaning tank and the placement fixture during the cleaning process.

[0033] (2) The basket grabbing mechanism on the gantry cooperates with the basket unloading device and the follow-up device at each cleaning unit to realize the grabbing, unloading and cleaning process of the corresponding basket. The first blocking part and the second blocking part can limit the travel of the tray and the basket unloading device, and accurately realize the function of basket unloading and cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0035] Figure 1 A three-dimensional diagram of an automatic FA cleaning machine and a cleaning method according to the present invention;

[0036] Figure 2 for Figure 1 A partial enlarged schematic diagram of part A;

[0037] Figure 3 for Figure 1 A partial enlarged schematic diagram of part B after the cleaning tank is removed;

[0038] Figure 4 for Figure 1 A partial enlarged schematic diagram of the C portion after the cleaning tank is removed;

[0039] Figure 5 It is a left view of an automatic FA cleaning machine and a cleaning method of the present invention;

[0040] Figure 6 It is a top view of an automatic FA cleaning machine and a cleaning method of the present invention;

[0041] Figure 7 for Figure 6 DD front section view;

[0042] Figure 8 for Figure 6 EE front section view;

[0043] Fig. 9 It is a half-section front view of a telescopic cardboard of an FA automatic cleaning machine and a cleaning method of the present invention.

[0044] Reference numerals: 1, base; 2, linear track; 3, gantry; 4, first linear drive device; 5, hanging basket grabbing mechanism; 6, cleaning unit; 100, hanging basket; 101, lifting lug;

[0045] 51, first connecting rod; 52, second connecting rod; 53, third connecting rod; 31, first guide rod; 32, second guide rod; 54, hook; 55, clamping part;

[0046] 61. first cleaning unit; 62. second cleaning unit; 63. third cleaning unit; 600. cleaning tank; 200. first opening; 300. hanging basket unloading device; 400. follower device; 64. second linear drive device; 65. third guide rod; 10. support ear;

[0047] 401, base; 402, fourth guide rod; 403, sixth connecting rod; 404, seventh connecting rod; 405, eighth connecting rod; 406, first blocking portion;

[0048] 301, first pressure arm; 302, fourth connecting rod; 303, fifth connecting rod; 304, second pressure arm; 305, wedge block; 500, second blocking portion; 700, telescopic card plate; 800, heater; 33, first bow-shaped block; 900, second bow-shaped block. DETAILED DESCRIPTION

[0049] The following will be combined with the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0050] During the FA cleaning process, multiple cleanings are required, and the time and solvent used for each cleaning are not exactly the same. The existing method is to manually transfer the cleaning basket containing the FA chips multiple times, which is very inefficient. Figure 1 , Figure 5 and Figure 7 As shown, on the one hand, the present invention provides a FA automatic cleaning machine, comprising:

[0051] The base 1 is fixed relative to the ground and is the installation base of other components.

[0052] The two linear rails 2 are arranged at one end of the base 1 away from the ground, and are arranged horizontally and spaced apart along the length extension direction of the base 1.

[0053] The gantry 3 is straddled on the two linear rails 2 and is slidably connected with the two linear rails 2; the gantry 3 is used to drive the hanging basket to move together.

[0054] The first linear drive device 4 is disposed on one side of the gantry 3, and the movable end of the first linear drive device 4 is fixedly connected to the gantry 3, and is used to drive the gantry 3 to reciprocate along the axial extension direction of the two linear rails 2. In one embodiment, the first linear drive device 4 is in the form of a synchronous belt driven by a motor, and the outer surface of the gantry 3 is fixedly connected to the synchronous belt. While following the movement of the synchronous belt, the posture of the gantry is limited by the two linear rails 2.

[0055] Two hanging basket grabbing mechanisms 5 are symmetrically arranged on the gantry 3 for grabbing the hanging basket 100; Figure 2 As shown, the hanging basket 100 is a hollow rectangular parallelepiped structure, and a second opening is provided at one end of the hanging basket 100 away from the ground; a lifting lug 101 is provided at the edge of the second opening; the lifting lug extends to the top of the opening and extends along the radial direction of the second opening. A plurality of windows are provided on the end surface of the hanging basket 100 in the non-opening direction, and the windows are used to discharge the cleaning liquid from the hanging basket 100 during the cleaning process.

[0056] Three cleaning units 6 are arranged between the two linear rails 2 and are arranged at intervals along the axial extension direction of the two linear rails 2. They are used to release the hanging basket 100 from the two hanging basket grabbing mechanisms 5 and clean the placed hanging basket 100; they are used to change the grabbing state of the two hanging basket grabbing mechanisms 5 so that the hanging basket 100 enters the interior of the cleaning unit 6, or to reset the two hanging basket grabbing mechanisms 5, re-grab the hanging basket 100, and move it to the next cleaning position or end cleaning.

[0057] Likewise Figure 2 As shown, the two hanging basket grabbing mechanisms 5 each include a first connecting rod 51, a second connecting rod 52 and a third connecting rod 53 connected end to end; a first guide rod 31 and a second guide rod 32 are provided on the gantry 3, the first connecting rod 51 extends in the vertical direction and is slidably connected to the first guide rod 31, and a return spring is also provided on the first guide rod 31; the third connecting rod 53 is parallel to the first connecting rod 51 and is arranged at intervals, the third connecting rod 53 is slidably connected to the second guide rod 32, and the central axis of the first guide rod 31 is arranged parallel to the central axis of the second guide rod 32; the third connecting rod 53 is provided with a clamping portion 55 on one side close to the hanging basket 100, and the clamping portion 55 faces The first connecting rod 51 and the third connecting rod 53 are arranged between the first connecting rod 51 and the third connecting rod 53, and are respectively fixedly connected to the ends of the first connecting rod 51 and the third connecting rod 53 away from the ground; a hook 54 is arranged on the side of the first connecting rod 51 close to the hanging basket 100, one end of the hook 54 is fixedly connected to the end of the first connecting rod 51, and the other end of the hook 54 extends horizontally outward along the extension direction of the two linear rails 2; a lifting lug 101 is arranged directly above the hanging basket 100, and the lifting lug 101 is extended along the crossbeam direction of the gantry 3, and the hook 54 abuts against the lifting lug 101. When the two hanging basket grabbing mechanisms 5 are in the initial position, they can abut on the end surface of the lifting lug 101 close to the ground to realize a symmetrical grabbing function. When the two hanging basket grabbing mechanisms 5 are away from each other, they will be horizontally separated from the lifting lug 101, so that the hanging basket 100 is unloaded from the gantry 3.

[0058] Combination Figure 1 , Figure 3 , Figure 6As shown, the three cleaning units 6 include a first cleaning unit 61, a second cleaning unit 62 and a third cleaning unit 63 which are arranged in sequence; the three cleaning units 6 all include a cleaning tank 600; a tray 601 is arranged in the cleaning tank 600; a first opening portion 200 is arranged at the top of the cleaning tank 600, and a hanging basket unloading device 300 is symmetrically arranged at the edge of the first opening portion 200, and a follower device 400 is arranged between adjacent cleaning tanks 600, and the follower device 400 is respectively connected to the trays 601 of the three adjacent cleaning units 6; a second linear drive device 64 is also arranged in the cleaning tank 600 of the second cleaning unit 62; a plurality of third guide rods 65 are arranged in each cleaning tank 600, and the plurality of third guide rods 65 are extended along the axial direction of the first opening portion 200, and the plurality of third guide rods 65 are also slidably connected to the side surface of the tray 601; the movable end of the second linear drive device 64 drives the follower device 400 or the hanging basket unloading device 300 to move synchronously. The three cleaning units share two sets of second linear drive devices 64 to adjust the state of the two hanging basket grabbing mechanisms 5 and the follower device 400 on the gantry 3, and smoothly achieve the purpose of unloading the hanging basket on the gantry and adjusting the depth of the hanging basket on the tray 601 immersed in the cleaning tank 600. Similar to the hanging basket, there is also a hollow window on the tray to facilitate the discharge of the cleaning liquid. In order to improve the cleaning effect, the cleaning media in the three cleaning units 6 are clean water, cleaning liquid and clean water respectively, realizing the process of primary rinsing, cleaning liquid cleaning and secondary rinsing. The second linear drive device 64 in this embodiment can be a linear motion mechanism such as a rodless electric cylinder.

[0059] like Figure 1 , Figure 4 and Figure 5As shown, specifically, the follower device 400 includes a base 401, a fourth guide rod 402, a sixth connecting rod 403, a plurality of seventh connecting rods 404, a plurality of eighth connecting rods 405 and a first blocking portion 406. The base 401 is arranged across the first opening 200 of the cleaning tank 600 of two adjacent cleaning units 6. The fourth guide rod 402 is inserted into the base 401 and extends vertically upward in a direction away from the base 401. The end of the fourth guide rod 402 away from the ground is provided with a sixth connecting rod 403, and the sixth connecting rod 403 is arranged parallel to the base 401. The two seventh connecting rods 404 are arranged at the ends of the sixth connecting rod 403 and extend toward the inside of the two adjacent cleaning tanks 600. The tray 601 is provided with a support ear 10 on the side close to the hanging basket unloading device 300. , a through hole is provided on the lug 10, and the end of a pair of seventh connecting rods 404 away from the sixth connecting rod 403 is inserted into the through hole of the lug 10 of the tray 601 located in the second cleaning unit 62, and is fixedly connected to the movable end of the second linear drive device 64; one end of the other pair of seventh connecting rods 404 passes through the lug of the tray 601 of the first cleaning unit 61 or the third cleaning unit 63 and is fixedly connected to the eighth connecting rod 405, and the other end of the eighth connecting rod 405 is away from the seventh connecting rod 404 and extends horizontally outward; the end of the eighth connecting rod 405 away from the seventh connecting rod 404 is fixedly provided with a first blocking portion 406, and the first blocking portion 406 is located on the travel track of the hanging basket unloading device 300 on the cleaning tank 600, and selectively abuts against the hanging basket unloading device 300. The function of the follower device 400 is to drive the trays 601 in the three cleaning units to slide along the third guide rod 65 at the same time under the drive of the second linear drive device 64 when the gantry reaches the designated position of each cleaning unit 6. That is, while the second linear drive device 64 drives the tray of the second cleaning unit 62 to move up and down, the trays of the first cleaning unit and the third cleaning unit are moved synchronously through the follower device 400, eliminating the disadvantage of setting up multiple second linear drive devices 64 and simplifying the structure of the equipment.

[0060] like Figure 1 and Figure 5As shown, specifically, the hanging basket unloading device 300 includes two first pressure arms 301, two fourth connecting rods 302, two fifth connecting rods 303, a second pressure arm 304 and a wedge block 305, each first pressure arm 301 and each fourth connecting rod 302 are arranged in the cleaning tank 600, and the fourth connecting rod 302 in the cleaning tank 600 of the second cleaning unit 62 is fixedly connected to the movable end of the second linear drive device 64; the extension direction of each fourth connecting rod 302 is parallel to the axial direction of the first opening portion 200, and the end of each fourth connecting rod 302 away from the first opening portion 200 is fixedly provided with a first The pressure arm 301 extends in a direction away from the fourth connecting rod 302; a fifth connecting rod 303 is arranged at one end of each fourth connecting rod 302 close to the first opening 200, and each fifth connecting rod 303 is located outside the first opening 200 and extends horizontally outward. The second pressure arm 304 is straddled between the ends of the two fifth connecting rods 303 away from the cleaning tank 600, and a wedge block 305 is arranged on the second pressure arm 304. The cross-sectional area of ​​the end of the wedge block 305 close to the ground is smaller than the cross-sectional area of ​​the end away from the ground, and the size of the wedge block 305 is adapted to the size of the card slot of the card connection portion 55. There is a height difference between the initial height position of the wedge block 305 and the clamping portion 55, and the basket unloading device 300 will not interfere with the gantry during normal operation. When the gantry reaches the designated cleaning position, the movable end of the second linear drive device 64 drives the basket unloading device 300 at the second cleaning tank 62 to move vertically downward, and the wedge block 305 is abutted in the clamping groove of the clamping portion 55. As the wedge block 305 moves further, the end of the wedge block away from the ground pushes the third connecting rod 53 where the clamping portion 55 is located horizontally outward, and the third connecting rod then drives the second connecting rod and the first connecting rod to translate outward, thereby separating the hook 54 from the lifting ear 101. On the contrary, when the basket needs to be reloaded on the gantry 3, it is only necessary to reset the wedge block 305, and the hook 54 can automatically grab the lifting ear 101 under the action of the reset spring of the first guide rod 31.

[0061] Likewise Figure 1 and Figure 5As shown, the first blocking portion 406 extends in a direction away from the eighth connecting rod 405 to the end position of the fourth connecting rod 302 in the cleaning tank 600 of the first cleaning unit 61 or the third cleaning unit 63, and the first blocking portion 406 selectively abuts against the end of the fourth connecting rod 302; a second blocking portion 500 is provided in the cleaning tank 600 of the first cleaning unit 61 or the third cleaning unit 63, and the second blocking portion 500 is located between the ends of the two first pressing arms 301 away from the fourth connecting rod 302, and the second blocking portion 500 overlaps with the projection of the two first pressing arms 301 in the vertical direction; the fourth connecting rod 302 is magnetically connected to the first blocking portion 406; the second blocking portion 500 is magnetically connected to the two first pressing arms 301. Different positions of the two first pressing arms abut against the first blocking portion 406 or the second blocking portion 500, respectively, to form a follow-up or limit function.

[0062] like Figure 6 , Figure 8 and Fig. 9 As shown, a circulating pump is arranged at the bottom of the second cleaning unit 62, and a plurality of nozzles with tapered ends are arranged in an array at the first opening 200 of the cleaning tank 600 of the second cleaning unit 62, which are used to spray the cleaning liquid onto the surface of the FA chip to be cleaned; a plurality of telescopic card plates 700 are also arranged in the cleaning tank 600 of the second cleaning unit 62, and the plurality of telescopic card plates 700 are arranged at intervals along the axial direction of the first opening 200, and the fixed ends of the plurality of telescopic card plates 700 are fixedly connected to the inner surface of the cleaning tank 600 of the second cleaning unit 62, and the movable end of the telescopic card plate 700 is slidably connected to the fixed end, and a reset spring is arranged between the movable end and the fixed end, and the movable end of the telescopic card plate 700 selectively collides or resets with the surface of the hanging basket 100. The circulating pump can realize the circulating spraying of the cleaning liquid, and the cleaning liquid can be sprayed on the surface of the FA chip to be cleaned, thereby increasing the chip surface area in contact with the cleaning liquid. The movable end of the telescopic card plate 700 is squeezed and reset, which can produce an impact effect, which is conducive to eliminating the foam on the chip surface and further improving the cleaning effect.

[0063] like Figure 6 and Figure 8As shown, a heater 800 is also provided inside the second cleaning unit 62, and the heater 80 is sealed and connected to the second cleaning unit 62, and the input end of the heater 800 extends outward through the second cleaning unit 62; a first bow-shaped stopper 33 is provided on the gantry 3, and a second bow-shaped stopper 900 is symmetrically provided on the outer side of the second cleaning unit 62, and the second bow-shaped stopper 900 is slidably connected to the second cleaning unit 62, and a return spring is provided between the second bow-shaped stopper 900 and the second cleaning unit 62; a conductive terminal is provided on the side of the second bow-shaped stopper 900 close to the cleaning tank 600, and the first bow-shaped stopper 33 abuts on the surface of the second bow-shaped stopper 900, so that the second bow-shaped stopper 900 moves horizontally toward the second cleaning tank 600, and the conductive terminal abuts and is electrically connected to the input end of the heater 800 inside the second cleaning unit 62, so as to drive the heater 800 to work and heat the cleaning medium in the cleaning tank 600 of the second cleaning unit 62. The heater 800 can heat the cleaning liquid at the second cleaning unit 600. Only when the first bow-shaped stopper 33 is directly opposite to the second bow-shaped stopper 900, that is, when the gantry reaches the middle position of the second cleaning unit, the first bow-shaped stopper 33 and the second bow-shaped stopper 900 have the best contact effect, the distance between the second bow-shaped stopper 900 and the cleaning groove 600 of the second cleaning unit 62 is the shortest, and the contact between the conductive terminal and the heater 800 is the most reliable. By heating the cleaning liquid to a certain temperature, the cleaning effect can be further improved.

[0064] Of course, each cleaning tank can also be selectively equipped with an ultrasonic cleaning device or a position detection device to better realize the ultrasonic vibration and the precise positioning function of the gantry, which will not be elaborated here.

[0065] On the other hand, the present invention provides a method for automatic FA cleaning, comprising the following steps:

[0066] S1: equipped with the above-mentioned FA automatic cleaning machine;

[0067] S2: Inject cleaning medium into the cleaning tanks 600 of the three cleaning units 6 in advance;

[0068] S3: placing the FA chip to be cleaned on the cleaning fixture and placing it in the hanging basket 100 of the gantry 3 located at the starting position;

[0069] S4: The first linear drive device 4 drives the gantry 3 to move horizontally along the two linear rails 2 to reach the first cleaning unit 61, and starts the second linear drive device 64 at the second cleaning unit 62. The movable end of the second linear drive device 64 drives the follower device 400 to move. The eighth connecting rod 405 of the follower device 400 located in the first cleaning unit 61 drives the hanging basket unloading device 300 at the first cleaning unit 61 to move vertically downward, so that the second pressing arm 304 and the wedge block 305 at the first cleaning unit 61 also move vertically downward, and abut against the clamping part 55 of the third connecting rod 53 of the hanging basket grabbing mechanism 5, and push the hanging basket grabbing mechanism 5 to move along the axial direction of the first guide rod 31 and the second guide rod 32 on the gantry 3. The first connecting rod 51 also squeezes the reset spring on the first guide rod 31 to make the hanging basket grab The hook 54 on the mechanism 5 is separated from the ear 101 on the hanging basket 100, so that the hanging basket 100 is unloaded; the unloaded hanging basket 100 falls on the tray 601 of the first cleaning unit 61, and further moves downward with the movable end of the second linear drive device 64 driving the follower device 400, and the third guide rod 65 limits the vertical movement direction of the tray 601; it is immersed in the cleaning tank 600 of the first cleaning unit 61 to a certain depth to complete the first cleaning; then the second linear drive device 64 is reset upward, and the position of the hanging basket 100 rises with the tray, and the clamping part 55 of the third connecting rod 53 of the hanging basket grabbing mechanism 5 is separated from the wedge block 305, and the compressed reset spring drives the first connecting rod 51 to reset, and the hook 54 is again against the ear 101 on the hanging basket 100, and the hanging basket grabbing mechanism 5 grabs the hanging basket 100 again;

[0070] S5: Then the first linear drive device 4 drives the gantry 3 to move to the second cleaning unit 62. Under the action of the second linear drive device 64, the follower device 400 and the basket unloading device 300 at the second cleaning unit 62 are actuated, and the basket grabbing mechanism 5 on the gantry 3 unloads the basket 100 onto the tray 601 of the second cleaning unit 62 again. The basket 100 moves along the third guide rod 65 in the cleaning tank 600 of the second cleaning unit 62. During the movement, on the first aspect, the second cleaning unit 62 is provided with a circulation pump, and a plurality of nozzles are arranged in an array at the first opening 200 of the cleaning tank 600 of the second cleaning unit 62. The cleaning medium in the basket 100 soaks the FA chip to be cleaned, and the plurality of nozzles spray the cleaning medium onto the surface of the FA chip to be cleaned.

[0071] Secondly, when the tray 601 moves along the third guide rod 65, it will be pressed against the telescopic card plate 700 in the cleaning tank 600. The fixed ends of several telescopic card plates 700 are fixedly connected to the inner surface of the cleaning tank 600 of the second cleaning unit 62. The movable ends of the telescopic card plates 700 are slidably connected to the fixed ends, and a reset spring is arranged between the movable ends and the fixed ends. The tray 601 contacts the movable ends of the telescopic card plates 700. The movable ends of the telescopic card plates 700 have a wedge-shaped or curved surface. When contacting the surface of the tray 601, they will intermittently pass through the window hollowed out on the surface of the hanging basket 100. The movable ends of the telescopic card plates 700 will be continuously compressed and reset, forming a periodic impact effect on the hanging basket 100, which is used to eliminate the foam on the surface of the FA chip.

[0072] In the third aspect, a group of first arched blocks 33 are arranged on the second cleaning unit 62, and a second arched block 900 is symmetrically arranged on the outer side of the second cleaning unit 62, and the second arched block 900 is slidably connected to the second cleaning unit 62; a conductive terminal is arranged on the side of the second arched block 900 close to the cleaning tank 600, and the first arched block 33 abuts on the surface of the second arched block 900, so that the second arched block 900 moves horizontally toward the second cleaning tank 600, and the conductive terminal abuts and is electrically connected to the input end of the heater 800 inside the second cleaning unit 62, driving the heater 80 to work and heat the cleaning medium in the cleaning tank 600 of the second cleaning unit 62; by reciprocatingly lifting and lowering the tray 601 at the second cleaning unit 62, the second cleaning of the FA chip in the hanging basket 100 is achieved; after the second cleaning is completed, the second linear drive device 64 is reset, the hook 54 abuts against the ear 101 on the hanging basket 100 again, and the hanging basket grabbing mechanism 5 grabs the hanging basket 100 again;

[0073] S6: After the second cleaning is completed, the first linear drive device 4 drives the gantry 3 to move horizontally along the two linear tracks 2 to reach the third cleaning unit 63 for the third cleaning. The third cleaning process is the same as the first cleaning process described in step S4. After the third cleaning is completed, the second linear drive device 64 is reset, the hook (54) is again in contact with the ear 101 on the hanging basket 100, and the hanging basket grabbing mechanism 5 grabs the hanging basket 100 again.

[0074] S7: The first linear drive device 4 drives the gantry 3 to move horizontally along the two linear tracks 2, so that the gantry 3 reaches the end position, and the hanging basket 100 can be manually removed.

[0075] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A FA automatic cleaning machine, characterized in that: include: A base (1) is fixedly arranged relative to the ground; Two linear rails (2) are arranged at one end of the base (1) away from the ground, and are arranged horizontally and at intervals along the length extension direction of the base (1); A gantry (3) is straddled on the two linear rails (2) and is slidably connected to the two linear rails (2); A first linear drive device (4) is arranged on one side of the gantry (3), wherein a movable end of the first linear drive device (4) is fixedly connected to the gantry (3) and is used to drive the gantry (3) to reciprocate along the axial extension direction of the two linear rails (2); Two hanging basket grabbing mechanisms (5) are symmetrically arranged on the gantry (3) and are used to grab the hanging basket (100); Three cleaning units (6) are arranged between the two linear rails (2) and are arranged at intervals along the axial extension direction of the two linear rails (2), and are used to release the hanging basket (100) from the two hanging basket grabbing mechanisms (5) and to clean the inserted hanging basket (100); and are used to change the grabbing state of the two hanging basket grabbing mechanisms (5) to allow the hanging basket (100) to enter the interior of the cleaning unit (6), or to reset the two hanging basket grabbing mechanisms (5) to re-grasp the hanging basket (100); The two hanging basket grabbing mechanisms (5) each comprise a first connecting rod (51), a second connecting rod (52) and a third connecting rod (53) connected end to end; a first guide rod (31) and a second guide rod (32) are provided on the gantry (3); the first connecting rod (51) is extended in a vertical direction and is slidably connected to the first guide rod (31); a return spring is also provided on the first guide rod (31); the third connecting rod (53) is parallel to the first connecting rod (51) and is arranged at intervals; the third connecting rod (53) is slidably connected to the second guide rod (32); the central axis of the first guide rod (31) is arranged parallel to the central axis of the second guide rod (32); a clamping portion (55) is provided on the side of the third connecting rod (53) close to the hanging basket (100); the clamping portion (55) faces the The first connecting rod (51) and the third connecting rod (53) are provided with a clamping groove; the second connecting rod (52) is arranged between the first connecting rod (51) and the third connecting rod (53), and is respectively fixedly connected to the ends of the first connecting rod (51) and the third connecting rod (53) away from the ground; a hook (54) is arranged on one side of the first connecting rod (51) close to the hanging basket (100), one end of the hook (54) is fixedly connected to the end of the first connecting rod (51), and the other end of the hook (54) is horizontally extended outward along the extension direction of the two linear rails (2); a lifting lug (101) is arranged directly above the hanging basket (100), the lifting lug (101) is extended along the crossbeam direction of the gantry (3), and the hook (54) and the lifting lug (101) are abutted against each other; The cleaning units (6) are a first cleaning unit (61), a second cleaning unit (62) and a third cleaning unit (63) which are arranged in sequence; each cleaning unit (6) comprises a cleaning tank (600); a tray (601) is arranged in the cleaning tank (600); a first opening (200) is arranged at the top of the cleaning tank (600); a hanging basket unloading device (300) is symmetrically arranged at the edge of the first opening (200); a follower device (400) is arranged between adjacent cleaning tanks (600); the follower device (400) is connected to adjacent cleaning units (6) are respectively connected to the trays (601) of the second cleaning unit (62); a second linear drive device (64) is also arranged in the cleaning tank (600) of the second cleaning unit (62); a plurality of third guide rods (65) are arranged in each cleaning tank (600), and the plurality of third guide rods (65) are extended along the axial direction of the first opening (200), and the plurality of third guide rods (65) are also slidably connected to the side surface of the tray (601); the movable end of the second linear drive device (64) drives the follower device (400) or the hanging basket unloading device (300) to move synchronously.

2. The FA automatic cleaning machine according to claim 1, characterized in that: The follow-up device (400) comprises a base (401), a fourth guide rod (402), a sixth connecting rod (403), a plurality of seventh connecting rods (404), a plurality of eighth connecting rods (405) and a first blocking portion (406); the base (401) is arranged across the first openings (200) of the cleaning tanks (600) of two adjacent cleaning units (6); the fourth guide rod (402) is inserted through the base (401) and extends vertically upward in a direction away from the base (401); a sixth connecting rod (403) is arranged at one end of the fourth guide rod (402) away from the ground, and the sixth connecting rod (403) is arranged parallel to the base (401); two seventh connecting rods (404) are arranged at the ends of the sixth connecting rod (403) and extend toward the inside of the two adjacent cleaning tanks (600); a support is arranged on the side of the tray (601) close to the hanging basket unloading device (300); The support ears are provided with through holes, and the ends of a pair of seventh connecting rods (404) away from the sixth connecting rod (403) are inserted into the through holes of the support ears of the tray (601) located in the second cleaning unit (62) and are fixedly connected to the movable ends of the second linear drive device (64); one end of the other pair of seventh connecting rods (404) passes through the support ears of the tray (601) of the first cleaning unit (61) or the third cleaning unit (63) and is fixedly connected to the eighth connecting rod (405), and the other end of the eighth connecting rod (405) is away from the seventh connecting rod (404) and extends horizontally outward; the end of the eighth connecting rod (405) away from the seventh connecting rod (404) is fixedly provided with a first blocking portion (406), and the first blocking portion (406) is located on the travel trajectory of the hanging basket unloading device (300) on the cleaning tank (600), and selectively abuts against the hanging basket unloading device (300).

3. The FA automatic cleaning machine according to claim 2, characterized in that: The hanging basket unloading device (300) comprises two first pressure arms (301), two fourth connecting rods (302), two fifth connecting rods (303), a second pressure arm (304) and a wedge block (305); each first pressure arm (301) and each fourth connecting rod (302) are arranged in a cleaning tank (600); the fourth connecting rod (302) in the cleaning tank (600) of the second cleaning unit (62) is fixedly connected to the movable end of the second linear drive device (64); the extension direction of each fourth connecting rod (302) is parallel to the axial direction of the first opening portion (200); and the first pressure arm is fixedly arranged at one end of each fourth connecting rod (302) away from the first opening portion (200). (301), the first pressing arm (301) extends in a direction away from the fourth connecting rod (302); a fifth connecting rod (303) is provided at one end of each fourth connecting rod (302) close to the first opening portion (200), each fifth connecting rod (303) is located outside the first opening portion (200) and extends horizontally outward, a second pressing arm (304) is straddled at one end of the two fifth connecting rods (303) away from the cleaning tank (600), a wedge block (305) is provided on the second pressing arm (304), the cross-sectional area of ​​the end of the wedge block (305) close to the ground is smaller than the cross-sectional area of ​​the end away from the ground, and the size of the wedge block (305) is adapted to the size of the clamping groove of the clamping portion (55).

4. The FA automatic cleaning machine according to claim 3, characterized in that: The first blocking portion (406) extends in a direction away from the eighth connecting rod (405) to the end position of the fourth connecting rod (302) in the cleaning tank (600) of the first cleaning unit (61) or the third cleaning unit (63), and the first blocking portion (406) selectively abuts against the end of the fourth connecting rod (302); a second blocking portion (500) is provided in the cleaning tank (600) of the first cleaning unit (61) or the third cleaning unit (63), and the second blocking portion (500) is located between the ends of the two first pressing arms (301) away from the fourth connecting rod (302), and the second blocking portion (500) and the projections of the two first pressing arms (301) in the vertical direction overlap; the fourth connecting rod (302) and the first blocking portion (406) are magnetically connected; and the second blocking portion (500) and the two first pressing arms (301) are magnetically connected.

5. The FA automatic cleaning machine according to claim 3, characterized in that: The cleaning media in the three cleaning units (6) are clean water, cleaning liquid and clean water respectively.

6. The FA automatic cleaning machine according to claim 3, characterized in that: A circulation pump is arranged at the bottom of the second cleaning unit (62); a plurality of nozzles are arranged in an array at the first opening (200) of the cleaning tank (600) of the second cleaning unit (62) for spraying cleaning liquid onto the surface of the FA chip to be cleaned; a plurality of telescopic card plates (700) are also arranged in the cleaning tank (600) of the second cleaning unit (62); the plurality of telescopic card plates (700) are arranged at intervals along the axial direction of the first opening (200); the fixed ends of the plurality of telescopic card plates (700) are fixedly connected to the inner surface of the cleaning tank (600) of the second cleaning unit (62); the movable end of the telescopic card plate (700) is slidably connected to the fixed end; a reset spring is arranged between the movable end and the fixed end; the movable end of the telescopic card plate (700) selectively collides with or resets the surface of the hanging basket (100).

7. The FA automatic cleaning machine according to claim 3, characterized in that: A heater (800) is also provided inside the second cleaning unit (62), the heater (800) is sealedly connected to the second cleaning unit (62), and the input end of the heater (800) passes through the second cleaning unit (62) and extends outward; a first arched stopper (33) is provided on the gantry (3), and a second arched stopper (900) is symmetrically provided on the outer side of the second cleaning unit (62), the second arched stopper (900) is slidably connected to the second cleaning unit (62), and the second arched stopper (900) is slidably connected to the second cleaning unit (62). A return spring is arranged between the two ends of the second cleaning unit (62); a conductive terminal is arranged on one side of the second bow-shaped stopper (900) close to the cleaning tank (600); the first bow-shaped stopper (33) abuts against the surface of the second bow-shaped stopper (900), so that the second bow-shaped stopper (900) moves horizontally toward the second cleaning tank (600); the conductive terminal abuts against and is electrically connected to the input end of the heater (800) inside the second cleaning unit (62), driving the heater (800) to work and heat the cleaning medium in the cleaning tank (600) of the second cleaning unit (62).

8. A FA automatic cleaning method, characterized in that: The steps include: S1: Configure the FA automatic cleaning machine as described in any one of claims 3 to 7; S2: pre-injecting a cleaning medium into the cleaning tanks (600) of the three cleaning units (6); S3: placing the FA chip to be cleaned on a cleaning fixture and placing it in a hanging basket (100) of a gantry (3) located at a starting position; S4: The first linear drive device (4) drives the gantry (3) to move horizontally along the two linear rails (2) to reach the first cleaning unit (61), and starts the second linear drive device (64) at the second cleaning unit (62). The movable end of the second linear drive device (64) drives the follower device (400) to move. The eighth connecting rod (405) of the follower device (400) located in the first cleaning unit (61) drives the hanging basket unloading device (300) at the first cleaning unit (61) to move vertically downward, so that the second pressing arm (304) and the wedge block (305) at the first cleaning unit (61) also move vertically downward, abut against the clamping portion (55) of the third connecting rod (53) of the hanging basket grabbing mechanism (5), and push the hanging basket grabbing mechanism (5) to move along the axial direction of the first guide rod (31) and the second guide rod (32) on the gantry (3). The first connecting rod (51) also squeezes the reset rod (405) on the first guide rod (31). The spring separates the hook (54) on the hanging basket grabbing mechanism (5) from the lifting ear (101) on the hanging basket (100), thereby realizing unloading of the hanging basket (100); the unloaded hanging basket (100) falls on the tray (601) of the first cleaning unit (61), and further moves downward as the movable end of the second linear drive device (64) drives the follower device (400), and the third guide rod (65) limits the vertical movement direction of the tray (601); The cleaning unit (61) is immersed in the cleaning tank (600) to a certain depth to complete the first cleaning; then the second linear drive device (64) is reset, the clamping portion (55) of the third connecting rod (53) of the hanging basket grabbing mechanism (5) is separated from the wedge block (305), the compressed reset spring drives the first connecting rod (51) to reset, the hook (54) is again in contact with the lifting ear (101) on the hanging basket (100), and the hanging basket grabbing mechanism (5) grabs the hanging basket (100) again; S5: Subsequently, the first linear drive device (4) drives the gantry (3) to move to the second cleaning unit (62). Under the action of the second linear drive device (64), the follower device (400) and the basket unloading device (300) at the second cleaning unit (62) are actuated, and the basket grabbing mechanism (5) on the gantry (3) unloads the basket (100) onto the tray (601) of the second cleaning unit (62) again. The basket (100) moves along the third guide rod (65) in the cleaning tank (600) of the second cleaning unit (62). During the movement, on the first aspect, the second cleaning unit (62) is provided with a circulation pump, and a plurality of nozzles are arranged in an array at the first opening (200) of the cleaning tank (600) of the second cleaning unit (62). The cleaning medium in the basket (100) soaks the FA chip to be cleaned, and the plurality of nozzles spray the cleaning medium onto the surface of the FA chip to be cleaned; Secondly, when the tray (601) moves along the third guide rod (65), it will be pressed against the telescopic card plate (700) in the cleaning tank (600). The fixed ends of the telescopic card plates (700) are fixedly connected to the inner surface of the cleaning tank (600) of the second cleaning unit (62). The movable ends of the telescopic card plates (700) are slidably connected to the fixed ends, and a reset spring is provided between the movable ends and the fixed ends. The tray (601) contacts the movable ends of the telescopic card plates (700). The movable ends of the telescopic card plates (700) have a wedge-shaped or curved surface. When contacting the surface of the tray (601), they will intermittently pass through the window hollowed out on the surface of the hanging basket (100). The movable ends of the telescopic card plates (700) will be continuously compressed and reset, forming a periodic impact effect on the hanging basket (100), which is used to eliminate bubbles on the surface of the FA chip. In a third aspect, a group of first arched blocks (33) are arranged on the second cleaning unit (62), and a second arched block (900) is symmetrically arranged on the outer side of the second cleaning unit (62), and the second arched block (900) is slidably connected to the second cleaning unit (62); a conductive terminal is arranged on a side of the second arched block (900) close to the cleaning tank (600), and the first arched block (33) abuts against the surface of the second arched block (900), so that the second arched block (900) moves horizontally toward the second cleaning tank (600), and the conductive terminal is connected to the second cleaning unit (600). 2) The input end of the internal heater (800) is abutted and electrically connected, driving the heater (800) to work and heat the cleaning medium in the cleaning tank (600) of the second cleaning unit (62); by reciprocatingly lifting and lowering the tray (601) at the second cleaning unit (62), the second cleaning of the FA chip in the hanging basket (100) is achieved; after the second cleaning is completed, the second linear drive device (64) is reset, the hook (54) is again abutted against the ear (101) on the hanging basket (100), and the hanging basket grabbing mechanism (5) grabs the hanging basket (100) again; S6: After the second cleaning is completed, the first linear drive device (4) drives the gantry (3) to move horizontally along the two linear rails (2) to reach the third cleaning unit (63) for a third cleaning. The third cleaning process is the same as the first situation described in step S4. After the third cleaning is completed, the second linear drive device (64) is reset, the hook (54) is again abutted against the lifting ear (101) on the hanging basket (100), and the hanging basket grabbing mechanism (5) grabs the hanging basket (100) again. S7: The first linear drive device (4) drives the gantry (3) to move horizontally along the two linear tracks (2), so that the gantry (3) reaches the end position, and the hanging basket (100) is manually removed.

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