Milling processing method of molybdenum target material

Abstract

The invention provides a molybdenum target material milling method which comprises the following steps: milling a to-be-welded surface of a molybdenum target material by adopting a milling tool to obtain a concave cambered surface of the to-be-welded surface; the depth of the cambered surface is larger than 0.05 mm. According to the method, a cutter of a specific model is adopted for milling treatment, and proper milling machining parameters are matched, so that the required recess can be machined in the surface of the molybdenum target, the to-be-welded cambered surface of the machined molybdenum target is ensured to meet the use requirement, meanwhile, the surface roughness of the to-be-welded surface of the molybdenum target is remarkably improved, and the welding binding rate of the molybdenum target and a back plate is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of target material processing and relates to a milling method for a molybdenum target material. Background Art

[0002] Sputtering is a coating method that uses charged particles to bombard the target material, causing atomic collisions and energy and momentum transfer, so that the target atoms escape from the surface and are deposited on the substrate material. Since the strength of sputtering targets varies, in actual applications, it is necessary to combine sputtering targets that meet performance requirements with backing plates with a certain strength to form target components, which are then installed on the sputtering machine to effectively control sputtering under the action of magnetic and electric fields. The backing plate can provide support for the sputtering target and has the function of conducting heat, so the sputtering target and the backing plate need to be processed and welded into shape.

[0003] However, due to the harsh working environment of the target assembly during the sputtering process, which often involves high temperature, high pressure difference, high voltage electric field, high voltage magnetic field, etc., if the welding bonding rate between the target material and the backing plate in the target assembly is low, the target material will deform, crack, or even fall off the backing plate under heating conditions, which will not only fail to achieve a uniform sputtering effect, but may also cause damage to the sputtering base.

[0004] In recent years, with the continuous development of technologies in the fields of solar cells, flat panel displays, semiconductor integrated circuits, etc., thin films made by sputtering deposition have been widely used in these fields due to their high density and good adhesion to the substrate material. Molybdenum metal sputtering films have broad market prospects in the fields of solar cells, flat panel displays, semiconductor integrated circuits, etc. due to their low resistivity, strong thermal stability, good corrosion resistance and good environmental performance.

[0005] At present, the prepared molybdenum target needs to be welded to the back plate to obtain the molybdenum target assembly. During the machining process of LCD flat molybdenum target, the surface will be very smooth due to the milling of the machining surface by the tool. The existing process is difficult to machine a depression on the surface of the molybdenum target, resulting in problems such as desoldering during the welding process of the molybdenum target and the back plate.

[0006] In summary, it is urgent to develop a method for processing the surface of the molybdenum target to be welded, so as to produce a depression and avoid the problem of desoldering when welding it to the back plate. Summary of the invention

[0007] The purpose of the present invention is to provide a milling processing method for a molybdenum target material, which adopts a specific type of tool for milling processing and matches appropriate milling processing parameters to ensure that the arc surface of the molybdenum target material to be welded meets the use requirements after processing. At the same time, the surface roughness of the molybdenum target material to be welded is significantly increased, which is beneficial to improve the welding bonding rate with the back plate.

[0008] In order to achieve the purpose of the invention, the present invention adopts the following technical solutions:

[0009] The present invention provides a milling method for a molybdenum target material, the milling method comprising:

[0010] The surface to be welded of the molybdenum target material is milled by a milling tool to obtain a concave arc surface of the surface to be welded;

[0011] The depth of the arc surface is greater than 0.05 mm.

[0012] In the present invention, the surface to be welded of the molybdenum target material is only milled once to achieve a depth of the concave arc surface of the surface to be welded greater than 0.05 mm; if special circumstances occur, when the depth of the concave arc surface is less than 0.05 mm after one milling process, a second milling process is performed.

[0013] The milling processing method provided by the present invention adopts a specific milling tool to perform milling processing on the surface to be welded of the molybdenum target material, so that the required depression can be processed on the surface of the molybdenum target material, so that the arc surface and surface roughness of the surface to be welded meet the use requirements, and the welding anomaly of the molybdenum target material in the subsequent welding process is avoided. The milling processing method does not need to adjust the relevant parameters of the milling processing, simplifies the operation process, saves processing costs, improves production efficiency, and is conducive to industrial production.

[0014] As a preferred technical solution of the present invention, the molybdenum target material includes G6 molybdenum target material or G8.5 molybdenum target material.

[0015] In the present invention, the molybdenum target material is an LCD target material.

[0016] Preferably, the milling tool is provided with 8-10 blades, for example, 8, 9 or 10 blades.

[0017] Preferably, the model of the milling tool is R245-12T3K-MM2030.

[0018] In the present invention, the R245-12T3K-MM2030 is purchased from Sandvik; the milling cutter model R245-12T3K-MM2030 is used for milling processing, which can reduce the degree of tool wear, avoid the occurrence of sparks during milling, and increase the service life of the milling cutter compared to ordinary milling cutters.

[0019] As a preferred technical solution of the present invention, the cutting fluid used in the milling process is an aqueous solution of an emulsion.

[0020] Preferably, the volume concentration of the aqueous solution of the emulsion is 5-10%, for example, it can be 5.5%, 6%, 6.5%, 7%, 7.5%, 8%, 8.5%, 9% or 9.5%, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0021] Preferably, the emulsion is Caltex Aquatech 3380 water-soluble turning fluid.

[0022] As a preferred technical solution of the present invention, the rotation speed of the milling process is 100-150r / min, for example, it can be 105r / min, 110r / min, 115r / min, 120r / min, 125r / min, 130r / min, 135r / min, 140r / min or 145r / min, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0023] As a preferred technical solution of the present invention, the feed rate of the milling process is 550-650 mm / min, for example, it can be 560 mm / min, 570 mm / min, 580 mm / min, 590 mm / min, 600 mm / min, 610 mm / min, 620 mm / min, 630 mm / min or 640 mm / min, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0024] As a preferred technical solution of the present invention, the cutting depth of the milling process is 0.1-0.2mm, for example, it can be 0.11mm, 0.12mm, 0.13mm, 0.14mm, 0.15mm, 0.16mm, 0.17mm, 0.18mm or 0.19mm, but is not limited to the listed values. Other unlisted values ​​within the numerical range are also applicable, preferably 0.14-0.16mm.

[0025] In the present invention, the rotation speed, feed rate and cutting amount of the milling process need to be controlled to ensure that the required depression can be machined on the surface of the molybdenum target material by one milling process, so that the arc surface and surface roughness of the surface to be welded meet the use requirements, which is beneficial to improve the welding bonding rate with the back plate and improve the yield rate.

[0026] As a preferred technical solution of the present invention, the maximum value of the arc depth of the surface to be welded is 0.2-0.3mm, for example, it can be 0.21mm, 0.22mm, 0.23mm, 0.24mm, 0.25mm, 0.26mm, 0.27mm, 0.28mm or 0.29mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0027] As a preferred technical solution of the present invention, the molybdenum target material after the milling process is further welded to a back plate to obtain a molybdenum target material assembly.

[0028] Preferably, the welding bonding rate of the molybdenum target assembly is greater than 99%, for example, it can be 99.1%, 99.2%, 99.3%, 99.4%, 99.5%, 99.6%, 99.7%, 99.8% or 99.9%, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0029] As a preferred technical solution of the present invention, the welding method includes brazing.

[0030] Preferably, the solder for brazing includes indium solder.

[0031] As a preferred technical solution of the present invention, the milling method comprises:

[0032] The surface to be welded of the molybdenum target material is milled by a milling tool to obtain a concave arc surface of the surface to be welded;

[0033] The molybdenum target material includes a G6 molybdenum target material or a G8.5 molybdenum target material; the milling tool is equipped with 8-10 blades; the model of the milling tool is R245-12T3K-MM2030;

[0034] The milling process has a rotation speed of 100-150 r / min, a feed rate of 550-650 mm / min, and a cutting depth of 0.1-0.2 mm;

[0035] The cutting fluid used in the milling process is an aqueous solution of an emulsion; the volume concentration of the aqueous solution of the emulsion is 5-10%; the emulsion is Caltex Aquafast 3380 water-soluble turning fluid;

[0036] The depth of the arc surface is greater than 0.05 mm, and the maximum depth is 0.2-0.3 mm;

[0037] Welding the milled molybdenum target material to a back plate to obtain a molybdenum target material assembly with a welding bonding rate greater than 99%;

[0038] The welding method includes brazing; the solder for brazing includes indium solder.

[0039] Compared with the prior art, the present invention has the following beneficial effects:

[0040] (1) The milling method provided by the present invention uses a specific type of tool for milling processing, and matches the appropriate milling processing parameters to process the required depression on the surface of the molybdenum target material, ensuring that the arc surface of the molybdenum target material to be welded after processing meets the use requirements. At the same time, the surface roughness of the surface to be welded of the molybdenum target material is significantly increased, thereby avoiding welding abnormalities of the molybdenum target material in the subsequent welding process;

[0041] (2) The milling processing method provided by the present invention does not require adjustment of relevant parameters of the milling process, simplifies the operation process, saves processing costs, improves production efficiency, and is conducive to industrial production. DETAILED DESCRIPTION

[0042] The technical solution of the present invention is further described below by specific implementation methods. It should be understood by those skilled in the art that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0043] Example 1

[0044] This embodiment provides a milling method for a molybdenum target material, and the milling method comprises:

[0045] The surface to be welded of the molybdenum target material is milled by a milling tool to obtain a concave arc surface of the surface to be welded;

[0046] The molybdenum target material is G6 molybdenum target material; the milling tool is equipped with 10 blades; the model of the milling tool is R245-12T3K-MM2030;

[0047] The milling process has a rotation speed of 120 r / min, a feed rate of 600 mm / min, and a cutting depth of 0.15 mm;

[0048] The cutting fluid used in the milling process is an aqueous solution of an emulsion; the volume concentration of the aqueous solution of the emulsion is 8%; the emulsion is Caltex Aquatech 3380 water-soluble turning fluid;

[0049] The depth of the arc surface is greater than 0.05 mm, and the maximum depth is 0.25 mm.

[0050] Example 2

[0051] This embodiment provides a milling method for a molybdenum target material, and the milling method comprises:

[0052] The surface to be welded of the molybdenum target material is milled by a milling tool to obtain a concave arc surface of the surface to be welded;

[0053] The molybdenum target material is G6 molybdenum target material; the milling tool is equipped with 10 blades; the model of the milling tool is R245-12T3K-MM2030;

[0054] The milling process has a rotation speed of 100 r / min, a feed rate of 650 mm / min, and a cutting depth of 0.16 mm;

[0055] The cutting fluid used in the milling process is an aqueous solution of an emulsion; the volume concentration of the aqueous solution of the emulsion is 10%; the emulsion is Caltex Aquatech 3380 water-soluble turning fluid;

[0056] The depth of the arc surface is greater than 0.05 mm, and the maximum depth is 0.2 mm.

[0057] Example 3

[0058] This embodiment provides a milling method for a molybdenum target material, and the milling method comprises:

[0059] The surface to be welded of the molybdenum target material is milled by a milling tool to obtain a concave arc surface of the surface to be welded;

[0060] The molybdenum target material is G6 molybdenum target material; the milling tool is equipped with 10 blades; the model of the milling tool is R245-12T3K-MM2030;

[0061] The milling process has a rotation speed of 150 r / min, a feed rate of 550 mm / min, and a cutting depth of 0.14 mm;

[0062] The cutting fluid used in the milling process is an aqueous solution of an emulsion; the volume concentration of the aqueous solution of the emulsion is 5%; the emulsion is Caltex Aquafast 3380 water-soluble turning fluid;

[0063] The depth of the arc surface is greater than 0.05 mm, and the maximum depth is 0.3 mm.

[0064] Example 4

[0065] This embodiment provides a milling method for a molybdenum target material. Except that the model of the milling tool is R245-18T6M-PM1010, other conditions are the same as those in Embodiment 1.

[0066] Example 5

[0067] This embodiment provides a milling method for a molybdenum target material. Except that the rotation speed of the milling process is 50 r / min, other conditions are the same as those in Embodiment 1.

[0068] Example 6

[0069] This embodiment provides a milling method for a molybdenum target material. Except that the rotation speed of the milling process is 200 r / min, other conditions are the same as those in Embodiment 1.

[0070] Example 7

[0071] This embodiment provides a milling method for a molybdenum target material. Except that the feed rate of the milling process is 450 mm / min, other conditions are the same as those in Embodiment 1.

[0072] Example 8

[0073] This embodiment provides a milling method for a molybdenum target material. Except that the feed rate of the milling process is 750 mm / min, other conditions are the same as those in Embodiment 1.

[0074] Example 9

[0075] This embodiment provides a milling method for a molybdenum target material. Except that the cutting depth of the milling process is 0.05 mm, other conditions are the same as those of Embodiment 1.

[0076] Example 10

[0077] This embodiment provides a milling method for a molybdenum target material. Except that the cutting depth of the milling process is 0.25 mm, other conditions are the same as those of Embodiment 1.

[0078] Comparative Example 1

[0079] In this comparative example, the surface to be welded of the molybdenum target material was not milled.

[0080] The molybdenum target material obtained in the above embodiment and comparative example was brazed with the back plate to obtain a molybdenum target material assembly, and the brazing solder was indium solder; and the welding bonding rate test was performed using an ultrasonic C-scan imaging flaw detector. The test results are shown in Table 1.

[0081] Table 1

[0082] Welding bonding rate (%) Example 1 99.2 Example 2 99.5 Example 3 99.3 Example 4 96.1 Example 5 96.5 Example 6 95.2 Example 7 94.8 Example 8 95.2 Example 9 95.1 Example 10 94.3 Comparative Example 1 60.2

[0083] From Table 1, we can see that:

[0084] (1) The milling method provided in Examples 1-3 of the present invention uses a specific milling tool and appropriate milling parameters to mill the surface to be welded of the molybdenum target. Only one milling process is performed to make the arc depth of the surface to be welded meet the use requirements, thereby improving the welding qualification rate of the molybdenum target in the subsequent welding process. The welding bonding rate of the obtained molybdenum target assembly is greater than 99%;

[0085] (2) It can be seen from the comparison between Example 1 and Example 4 that when the milling cutter model R245-18T6M-PM1010 is selected, the cutter wears faster and the arc depth of the target material to be welded after processing is too deep;

[0086] (3) By comparing Example 1 with Examples 5-10, it can be seen that when the rotation speed, feed rate or cutting amount during the milling process is too small or too large, it will have an adverse effect on the arc depth or its maximum value of the molybdenum target surface to be welded, thereby reducing the welding qualification rate of the molybdenum target in the subsequent welding process;

[0087] (4) By comparing Example 1 with Comparative Example 1, it can be seen that when the surface to be welded of the molybdenum target material is not milled, the surface of the molybdenum target material is too smooth, resulting in the indium solder not being able to remain well on the welding surface of the molybdenum target during welding, resulting in abnormal welding qualification rate.

[0088] The applicant declares that the present invention illustrates the detailed structural features of the present invention through the above-mentioned embodiments, but the present invention is not limited to the above-mentioned detailed structural features, that is, it does not mean that the present invention must rely on the above-mentioned detailed structural features to be implemented. Those skilled in the art should understand that any improvement of the present invention, equivalent replacement of the components selected by the present invention, addition of auxiliary components, selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

Claims

1. A milling method for a molybdenum target, characterized in that: The milling method comprises: The surface to be welded of the molybdenum target material is milled by a milling tool to obtain a concave arc surface of the surface to be welded; The depth of the arc surface is greater than 0.05 mm.

2. The milling method according to claim 1, characterized in that: The molybdenum target material includes a G6 molybdenum target material or a G8.5 molybdenum target material; Preferably, the milling tool is equipped with 8-10 blades; Preferably, the model of the milling tool is R245-12T3K-MM2030.

3. The milling method according to claim 1 or 2, characterized in that: The cutting fluid used in the milling process is an aqueous solution of an emulsion; Preferably, the volume concentration of the aqueous solution of the emulsion is 5-10%; Preferably, the emulsion is Caltex Aquatech 3380 water-soluble turning fluid.

4. The milling method according to any one of claims 1 to 3, characterized in that: The rotation speed of the milling process is 100-150r / min.

5. The milling method according to any one of claims 1 to 4, characterized in that: The feed rate of the milling process is 550-650 mm / min.

6. The milling method according to any one of claims 1 to 5, characterized in that: The cutting depth of the milling process is 0.1-0.2 mm, preferably 0.14-0.16 mm.

7. The milling method according to any one of claims 1 to 6, characterized in that: The maximum depth of the arc surface is 0.2-0.3 mm.

8. The milling method according to any one of claims 1 to 7, characterized in that: The molybdenum target material after the milling process is also welded to the back plate to obtain a molybdenum target material assembly; Preferably, the welding bonding rate of the molybdenum target assembly is greater than 99%.

9. The milling method according to claim 8, characterized in that: The welding method includes brazing; Preferably, the solder for brazing includes indium solder.

10. The milling method according to any one of claims 1 to 9, characterized in that: The milling method comprises: The surface to be welded of the molybdenum target material is milled by a milling tool to obtain a concave arc surface of the surface to be welded; The molybdenum target material includes a G6 molybdenum target material or a G8.5 molybdenum target material; the milling tool is equipped with 8-10 blades; the model of the milling tool is R245-12T3K-MM2030; The milling process has a rotation speed of 100-150 r / min, a feed rate of 550-650 mm / min, and a cutting depth of 0.1-0.2 mm; The cutting fluid used in the milling process is an aqueous solution of an emulsion; the volume concentration of the aqueous solution of the emulsion is 5-10%; the emulsion is Caltex Aquafast 3380 water-soluble turning fluid; The depth of the arc surface is greater than 0.05 mm, and the maximum depth is 0.2-0.3 mm; Welding the milled molybdenum target material to a back plate to obtain a molybdenum target material assembly with a welding bonding rate greater than 99%; The welding method includes brazing; the solder for brazing includes indium solder.