Automatic dust removal equipment and automatic dust removal method

Abstract

The invention discloses automatic dust removal equipment and an automatic dust removal method. The automatic dust removal equipment comprises a dust removal tank and an AGV (Automatic Guided Vehicle) dust removal vehicle, the dust removal tank comprises an upper tank, a middle tank and a lower tank, a first connecting hole is formed in the side wall of the upper tank and used for being connected with a vacuum pump, and a dust removal cloth bag is arranged in the upper tank; the middle tank is provided with a second connecting hole for connecting a single crystal furnace; the lower tank comprises a top plate, a bottom plate and side plates, the top plate is provided with a hollowed-out area, a gate plate assembly is arranged on the side, close to the bottom plate, of the top plate, and the gate plate assembly seals the hollowed-out area after moving towards the center of the hollowed-out area along the edge of the hollowed-out area; the top plate, the side plate and the bottom plate form an accommodating space for placing a dust collection box, and the side plate comprises a butt joint door; a vent hole is further formed in the lower tank, and argon is introduced into the vent hole; the AGV dust removal vehicle comprises a vehicle body and supporting legs, the supporting legs are lifting mechanisms, the vehicle body comprises a first storage grid and a second storage grid for containing dust collection boxes, and the first storage grid is located on the side, away from the supporting legs, of the second storage grid. Automatic dust removal and automatic dust collection box replacement are achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of dust removal equipment, and more specifically, to an automatic dust removal equipment and an automatic dust removal method. Background Art

[0002] In the existing technology of single crystal silicon production workshop, a large amount of harmful dust, such as oxides, will be generated during the production process of single crystal silicon. Every time the single crystal pulling furnace is stopped, in order to prevent the oxides and other dust from affecting the next batch of single crystal silicon pulling, it is necessary to manually clean the oxides and other dust, which requires the configuration of corresponding dust removal equipment. However, during the dust removal process, oxides and other dust will gather in the confined space of the dust removal equipment, which is easy to cause dust explosions and other safety accidents.

[0003] Therefore, there is an urgent need to provide an automatic dust removal device and an automatic dust removal method that can automatically clean oxide and other dust. Summary of the invention

[0004] In view of this, the present invention provides an automatic dust removal device and an automatic dust removal method which can automatically clean dust such as oxides.

[0005] In one aspect, the present invention provides an automatic dust removal device, including a dust removal tank and an AGV dust removal vehicle, wherein:

[0006] The dust removal tank includes an upper tank, a middle tank and a lower tank connected in sequence, and the upper tank, the middle tank and the lower tank are arranged along a first direction, wherein:

[0007] A first connecting hole is provided on the side wall of the upper tank, and the first connecting hole is used to connect a vacuum pump. A dust removal bag is provided in the upper tank;

[0008] The middle tank is provided with a second connecting hole, and the second connecting hole is connected to the single crystal furnace;

[0009] Along the first direction, the lower tank includes a top plate and a bottom plate that are arranged opposite to each other, the top plate is provided with a hollow area, a gate assembly is provided on a side of the top plate close to the bottom plate, and the gate assembly moves along the edge of the hollow area toward the center of the hollow area to close the hollow area; the lower tank also includes a side plate located between the top plate and the bottom plate, the top plate, the side plate and the bottom plate constitute an accommodating space, the accommodating space is used to place the dust box, and the side plate includes a docking door; the lower tank is also provided with a vent hole, and the vent hole is used to introduce argon gas;

[0010] The AGV dust removal vehicle includes a body and legs, the legs are a liftable mechanism, the body includes a first storage compartment and a second storage compartment arranged along a first direction, the first storage compartment is located on a side of the second storage compartment away from the legs, and the first storage compartment and the second storage compartment are used to place dust boxes.

[0011] Optionally, the gate assembly includes an annular mounting plate, a first motor is provided on one side of the top plate close to the bottom plate, and an output shaft of the first motor is connected to the annular mounting plate to control the rotation of the annular mounting plate;

[0012] The top plate is fixedly connected with N fixing columns, and the mounting plate is provided with N oblong holes. The fixing columns are sleeved in the oblong holes, and the annular mounting plate rotates clockwise or counterclockwise; N rotating shafts are provided on the inner edge of the annular mounting plate, and the rotating shafts are arranged one by one corresponding to the oblong holes; the rotating shafts are sleeved with connecting rods, and the other end of the connecting rods is connected with a fan-blade-shaped gate plate, and the N fan-blade-shaped gate plates move along the edge of the hollow area toward the center of the hollow area to close the hollow area.

[0013] Optionally, a water pipe is provided on the inner wall of the side plate, and cold water flows into the water pipe.

[0014] Optionally, along the first direction, the water pipes are arranged in a U-shaped reciprocating pattern.

[0015] Optionally, the water inlet and the water outlet of the water pipe are both located on a side of the side plate close to the top plate.

[0016] Optionally, slide grooves are arranged in parallel at the bottom of the dust collection box; the bottom plate includes a plurality of first rollers, a belt is sleeved on the outer side of the first roller, a first roller located at the end is connected to the output shaft of the second motor, and the belt is slidably connected to the slide groove.

[0017] Optionally, the first storage compartment and the second storage compartment each include a plurality of second rollers, a belt is sleeved on the outer side of the second roller, a second roller located at the end is connected to the output shaft of the third motor, and the belt is slidably connected to the slide groove.

[0018] Optionally, an infrared alignment point is provided on the outer periphery of the docking door, and an infrared emitting point is provided on the AGV dust removal vehicle, and the infrared emitting point corresponds one to one with the infrared alignment point.

[0019] Optionally, the outriggers of the AGV dust removal vehicle are hydraulic outriggers.

[0020] On the other hand, the present invention also provides an automatic dust removal method, using the above-mentioned automatic dust removal device, comprising:

[0021] Connecting the vacuum pump to the first connection hole through a flange, and connecting the single crystal furnace to the second connection hole through a flange;

[0022] The gate assembly moves from the center of the hollow area to the edge of the hollow area, and the hollow area opens;

[0023] A dust collection box is placed in the accommodating space;

[0024] The AGV dust removal vehicle moves to the position of the lower tank, no dust box is set in the second storage compartment, a new dust box is set in the first storage compartment, and the second storage compartment is aligned with the docking door;

[0025] Start dusting;

[0026] After the dust removal reaches the preset time, the gate assembly moves along the edge of the hollow area toward the center of the hollow area to close the hollow area, argon gas is introduced into the lower tank to restore the lower tank to normal pressure, and the docking door is opened;

[0027] The dust box is placed in the accommodating space and transported to the second storage compartment;

[0028] lowering the legs so that the first storage compartment is aligned with the docking door;

[0029] Transporting the new dust box in the first storage compartment to the accommodating space;

[0030] The gate assembly moves from the center of the hollow area to the edge of the hollow area, the hollow area is opened, and dust removal continues;

[0031] The AGV dust removal vehicle returns to the dust treatment point.

[0032] Compared with the prior art, the automatic dust removal device and the automatic dust removal method provided by the present invention achieve at least the following beneficial effects:

[0033] The automatic dust removal equipment provided by the present invention comprises: a dust removal tank and an AGV dust removal vehicle. The dust removal tank includes an upper tank, a middle tank and a lower tank. The side wall of the upper tank is provided with a first connecting hole for connecting a vacuum pump, and a dust removal bag is provided in the upper tank; the middle tank is provided with a second connecting hole for connecting a single crystal furnace; the lower tank includes a top plate, a bottom plate and a side plate. The top plate is provided with a hollow area for receiving oxides and other dusts. A gate assembly is provided on the side of the top plate close to the bottom plate. The gate assembly moves along the edge of the hollow area toward the center of the hollow area to close the hollow area, forming an independent closed space of the lower tank, and the movement of the gate assembly can be realized; the top plate, the side plate and the bottom plate constitute an accommodating space for placing a dust box, and the side plate includes a docking door for facilitating the docking of the dust removal tank with the dust removal vehicle; the lower tank is also provided with a vent hole, and argon gas is introduced to restore the lower tank to normal pressure, providing an environmental basis for subsequent docking with the AGV dust removal vehicle; the AGV dust removal vehicle includes a body and a leg, and the leg is a lifting mechanism to realize automatic replacement of the dust box, improve the automation of the dust removal process, and can realize automatic cleaning of oxides and other dust and automatic replacement of the dust box.

[0034] Of course, any product implementing the present invention does not necessarily need to achieve all of the technical effects described above at the same time.

[0035] Further features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

[0037] Figure 1It is a structural schematic diagram of an automatic dust removal device provided by the present invention;

[0038] Figure 2 This is a schematic diagram of the structure of a dust removal tank provided by the present invention;

[0039] Figure 3 is a top view of the connecting plate;

[0040] Figure 4 It is a schematic diagram of the lower tank structure;

[0041] Figure 5 Schematic diagram of the dust box structure;

[0042] Figure 6 It is a schematic diagram of the structure of the top plate and gate assembly;

[0043] Figure 7 This is a schematic diagram of the structure of the SGV dust removal vehicle;

[0044] Figure 8 It is a top view of the water pipe structure;

[0045] Fig. 9 This is a flow chart of an automatic dust removal method provided by the present invention;

[0046] Fig.10 This is another flow chart of an automatic dust removal method provided by the present invention;

[0047] 100-dust removal tank, 1-upper tank, 2-middle tank, 3-lower tank, 4-first connecting hole, 5-water pipe, 6-second connecting hole, 7-top plate, 8-bottom plate, 9-hollow area, 10-gate assembly, 11-side plate, 12-dust box, 121-slide, 13-docking door, 14-vent, 200-AGV dust removal vehicle, 16-leg, 31-first storage grid, 32-second storage grid, 9-hollow area, 34-infrared alignment point, 35 infrared emission point, 19-annular mounting plate, 20-fixed column, 21-long round hole, 22-rotating shaft, 23-connecting rod, 24-fan-blade gate, 40-power interface, 15-connecting plate. DETAILED DESCRIPTION

[0048] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangement of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention unless otherwise specifically stated.

[0049] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.

[0050] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered as part of the specification.

[0051] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0052] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0053] The present invention provides an automatic dust removal device, referring to Figure 1-Figure 7 , including a dust removal tank 100 and an AGV dust removal vehicle 200, wherein,

[0054] The dust removal tank 100 includes an upper tank 1, a middle tank 2 and a lower tank 3 connected in sequence, and the upper tank 1, the middle tank 2 and the lower tank 3 are arranged along a first direction y, wherein:

[0055] A first connecting hole 4 is provided on the side wall of the upper tank 1, and the first connecting hole 4 is used to connect a vacuum pump. A dust removal bag is provided in the upper tank 1;

[0056] The middle tank 2 is provided with a second connecting hole 6, and the second connecting hole 6 is connected to the single crystal furnace;

[0057] Along the first direction y, the lower tank 3 includes a top plate 7 and a bottom plate 8 that are arranged opposite to each other, the top plate 7 is provided with a hollow area 9, a gate assembly 10 is provided on the side of the top plate 7 close to the bottom plate 8, and the gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area 9; the lower tank 3 also includes a side plate 11 located between the top plate 7 and the bottom plate 8, the top plate 7, the side plate 11 and the bottom plate 8 constitute an accommodating space, the accommodating space is used to place a dust box 12, and the side plate 11 includes a docking door 13; the lower tank 3 is also provided with a vent 14, and the vent 14 is used to pass argon gas;

[0058] The AGV dust removal vehicle 200 includes a body and a leg 16, the leg 16 is a liftable mechanism, the body includes a first storage compartment 31 and a second storage compartment 32 arranged along a first direction y, the first storage compartment 31 is located on the side of the second storage compartment 32 away from the leg 16, and the first storage compartment 31 and the second storage compartment 32 are used to place the dust box 12.

[0059] Specifically, the present invention provides an automatic dust removal device, including a dust removal tank 100 and an AGV dust removal vehicle 200, wherein:

[0060] The dust removal tank 100 includes an upper tank 1, a middle tank 2 and a lower tank 3 connected in sequence, and the upper tank 1, the middle tank 2 and the lower tank 3 are arranged along a first direction y, wherein:

[0061] A first connecting hole 4 is provided on the side wall of the upper tank 1, and the first connecting hole 4 is used to connect a vacuum pump. The vacuum pump can be used to create a negative pressure environment in the tank. A dust bag is provided in the upper tank 1 to collect dust during the dust removal process; a second connecting hole 6 is provided in the middle tank 2, and the second connecting hole 6 is connected to the single crystal furnace to provide a structural basis for dust removal; along the first direction y, the lower tank 3 includes a top plate 7 and a bottom plate 8 arranged opposite to each other, and the top plate 7 is provided with a hollow area 9, and the hollow area 9 is a closable design, and a gate assembly 10 is provided on the side of the top plate 7 close to the bottom plate 8, and the gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area Area 9, the gate assembly 10 is operated as a whole by a motor, and the electrical control realizes the closing and opening of the hollow area 9, so that the space of the lower tank 3 is adjustable closed and open; the lower tank 3 also includes a side plate 11 located between the top plate 7 and the bottom plate 8, and the top plate 7, the side plate 11 and the bottom plate 8 constitute an accommodating space, and the accommodating space is used to place the dust box 12, and the side plate 11 includes a docking door 13, which is convenient for docking with the AGV dust removal vehicle 200 to improve the dust removal process; the lower tank 3 is also provided with a vent 14, and the vent 14 is used to introduce argon gas to restore the dust removal tank 100 to normal pressure, providing an environmental basis for docking with the AGV dust removal vehicle 200;

[0062] The AGV dust removal vehicle 200 includes a body and a leg 16. The leg 16 is a lifting mechanism. After the leg 16 is lowered, the AGV dust removal vehicle 200 is centered in the dust removal tank 100, and the docking door 13 of the lower tank 3 can be docked with the AGV dust removal vehicle 200. The dust box 12 in the lower tank 3 is interchangeable with the dust box 12 in the AGV dust removal vehicle 200, so that the dust box 12 can be automatically replaced, thereby improving the automation of the dust removal process; the body includes a first storage compartment 31 and a second storage compartment 32 arranged along a first direction y, and the first storage compartment 31 is located on the side of the second storage compartment 32 away from the leg 16, and the first storage compartment 31 and the second storage compartment 32 are used to place the dust box 12.

[0063] It should be noted that the alignment process of the docking door 13 and the AGV dust removal vehicle 200 is achieved through infrared alignment, which improves the automation of the dust removal process and the accuracy of replacing the dust box 12, thereby improving the dust removal efficiency.

[0064] It should be noted that an automatic guided vehicle (AGV) is an industrial vehicle that loads goods automatically or manually, automatically drives along a set route or pulls a cargo trolley to a designated location, and then loads and unloads goods automatically or manually. According to the definition of Japan's JISD6801: AGV is an industrial vehicle that uses batteries as a power source and automatically controls the vehicle. Only when the automatic guided vehicle system (AGVS) is formed by the automatic guidance system, automatic loading and unloading system, communication system, safety system and management system according to the requirements of automation, flexibility and punctuality of material handling operations can the automatic guided vehicle truly play its role. The continuous development of computer hardware technology, parallel and distributed processing technology, automatic control technology, sensor technology and software development environment has provided the necessary technical foundation for the research and application of AGV. The development of artificial intelligence technologies such as understanding and search, task and path planning, fuzzy and neural network control technology has enabled AGV to develop in the direction of intelligence and autonomy.

[0065] The AGV dust removal vehicle 200 in the present invention is provided with a first storage compartment 31 and a second storage compartment 32 for preventing the dust box 12 and a liftable support leg 1616 on the basis of the existing AGV vehicle, and is connected to the existing control system in the workshop. In this embodiment, the MES system (Manufacturing Execution System) manufacturing execution system is used as an example for explanation. The MES system is a production information management system for the workshop execution layer of a manufacturing enterprise. MES can provide enterprises with management modules including manufacturing data management, planning and scheduling management, production scheduling management, inventory management, quality management, human resources management, work center / equipment management, tool and tooling management, procurement management, cost management, project kanban management, production process control, underlying data integration analysis, and upper-level data integration decomposition, so as to create a solid, reliable, comprehensive and feasible manufacturing collaborative management platform for enterprises.

[0066] It should be noted that the upper tank 1 also includes a power interface 40, which is connected to the power cabinet to provide external power for the dust removal tank 100; Figure 3 The connecting plate 15 shown has a plurality of circular holes arranged thereon to facilitate the passage of dust.

[0067] It can be understood that the automatic dust removal equipment provided by the present invention includes: a dust removal tank 100 and an AGV dust removal vehicle 200. The dust removal tank 100 includes an upper tank 1, a middle tank 2 and a lower tank 3. The side wall of the upper tank 1 is provided with a first connecting hole 4 for connecting a vacuum pump, and a dust bag is provided in the upper tank 1; the middle tank 2 is provided with a second connecting hole 6 for connecting a single crystal furnace; the lower tank 3 includes a top plate 7, a bottom plate 8 and a side plate 11. The top plate 7 is provided with a hollow area 9 for receiving oxides and other dust. A gate assembly 10 is provided on one side of the top plate 7 close to the bottom plate 8. The gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area 9, thereby forming an independent closed space for the lower tank 3. The movement of the gate assembly 10 can Implementation; the top plate 7, the side plate 11 and the bottom plate 8 constitute an accommodating space for placing the dust box 12, and the side plate 11 includes a docking door 13, which is convenient for docking the dust removal tank 100 with the dust removal vehicle; the lower tank 3 is also provided with a vent 14, and argon gas is introduced to restore the lower tank 3 to normal pressure, providing an environmental basis for subsequent docking with the AGV dust removal vehicle 200; the AGV dust removal vehicle 200 includes a body and a support leg 16, and the support leg 16 is a lifting mechanism to realize automatic replacement of the dust box 12, improve the automation of the dust removal process, and can realize automatic cleaning of oxides and other dust and automatic replacement of the dust box 12.

[0068] In some optional embodiments, referring to Figure 6 The gate assembly 10 includes an annular mounting plate 19, and a first motor is provided on one side of the top plate 7 close to the bottom plate 8, and an output shaft of the first motor is connected to the annular mounting plate 19 to control the rotation of the annular mounting plate 19;

[0069] The top plate 7 is fixedly connected with N fixing columns 20, and the annular mounting plate 19 is provided with N oblong holes 21. The fixing columns 20 are sleeved in the oblong holes 21, and the annular mounting plate 19 rotates clockwise or counterclockwise; the inner edge of the annular mounting plate 19 is provided with N rotating shafts 22, and the rotating shafts 22 are arranged one by one corresponding to the oblong holes 21; the rotating shafts 22 are sleeved with connecting rods 23, and the other end of the connecting rods 23 is connected with fan-blade-shaped gate plates 24, and the N fan-blade-shaped gate plates 24 move along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area 9.

[0070] It should be noted that, during the dust removal process, the hollow area 9 of the dust removal tank 100 is opened; before the docking door 13 docks with the AGV trolley, the gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area 9, and argon gas is introduced into the lower tank 3 to restore the lower tank 3 to normal pressure, so that the lower tank 3 forms an independent space, which does not affect the internal environment of the upper tank 1 and the middle tank 2, and also prevents dust from flying out of the dust box 12 after the normal pressure is restored, affecting the dust removal effect;

[0071] It should be noted that a first motor (not shown in the figure) is provided on the side of the top plate 7 close to the bottom plate 8. The output shaft of the first motor is connected to the annular mounting plate 19 to control the rotation of the annular mounting plate 19. The first motor can be connected to the MES system to realize the automatic dust removal process.

[0072] It can be understood that the gate assembly 10 includes an annular mounting plate 19, a first motor is provided on one side of the top plate 7 close to the bottom plate 8, and the output shaft of the first motor is connected to the annular mounting plate 19 to control the rotation of the annular mounting plate 19; the top plate 7 is fixedly connected to N fixing columns 20, and the mounting plate is provided with N oblong holes 21, and the fixing columns 20 are sleeved in the oblong holes 21. When the annular mounting plate 19 rotates, the fixing columns 20 move along the oblong holes 21; when the annular mounting plate 19 rotates clockwise, the rotating shaft 22 also rotates clockwise, and under the action of the connecting rod 23, the rotating shaft 22 rotates in a circular motion. The circular motion of the rotating shaft 22 is transformed into the linear motion of the fan-shaped gate plate 24 moving from the center to the edge of the hollow area 9, and the N fan-shaped gate plates 24 move along the center to the edge of the hollow area 9 to open the hollow area 9; the annular mounting plate 19 rotates counterclockwise, and the rotating shaft 22 also rotates counterclockwise. Under the action of the connecting rod 23, the circular motion of the rotating shaft 22 is transformed into the linear motion of the fan-shaped gate plate 24 moving from the edge to the center of the hollow area 9, and the N fan-shaped gate plates 24 move along the edge to the center of the hollow area 9 to close the hollow area 9, thereby realizing the opening and closing of the electric control gate assembly 10.

[0073] In some optional embodiments, referring to Figure 8 A water pipe 5 is provided on the inner wall of the side plate 11, and cold water is introduced into the water pipe 5.

[0074] It should be noted that a water pipe 5 is provided on the inner wall of the side plate 11 of the lower tank 3 , and cold water is passed through the water pipe 5 , which can cool the oxides during the dust removal process, thereby achieving dust reduction in the dust removal tank 100 .

[0075] In some optional embodiments, the water pipes 5 are arranged in a U-shaped reciprocating manner along the first direction y.

[0076] It should be noted that along the first direction y, the water pipe 5 is arranged in a U-shaped reciprocating manner, and the contact space with the inner wall of the side plate 11 is relatively large. When the material of the water pipe 5 is certain, the dust reduction and cooling effect of the maximum area can be guaranteed, which can save costs to a certain extent. On the other hand, the arrangement of the water pipe 5 in a U-shaped reciprocating manner is simple, which can also save production costs to a certain extent. At the same time, the water injection speed and circulation effect of the U-shaped arrangement are better.

[0077] In some optional embodiments, the water inlet of the water pipe 5 and the water outlet of the water pipe 5 are both located on a side of the side plate 11 close to the top plate 7 .

[0078] It should be noted that the water inlet and the water outlet of the water pipe 5 are both located on the side of the side plate 11 close to the top plate 7, which is convenient for observing the water circulation process and avoiding problems in the water circulation path that affect the cooling effect.

[0079] In some optional embodiments, referring to Figure 5 , slide grooves 121 are arranged in parallel at the bottom of the dust box 12; the bottom plate 8 includes a plurality of first rollers, a belt is sleeved on the outer side of the first roller, a first roller located at the end is connected to the output shaft of the second motor, and the belt is slidably connected to the slide groove 121.

[0080] It should be noted that slide grooves 121 are arranged in parallel at the bottom of the dust box 12; the bottom plate 8 includes a plurality of first rollers, a belt is sleeved on the outer side of the first roller, a first roller located at the end is connected to the output shaft of the second motor, the belt is slidably connected to the slide groove 121, when the second motor is running, the first roller runs, interacts with the slide groove 121, drives the dust box 12 to move, and the dust box 12 is transferred from the lower tank 3 to the second storage compartment 32, so that the dust box 12 is automatically replaced.

[0081] In some optional embodiments, referring to Figure 7 The first storage compartment 31 and the second storage compartment 32 each include a plurality of second rollers (not shown in the figure), a belt is sleeved on the outer side of the second roller, a second roller located at the end is connected to the output shaft of the third motor, and the belt is slidably connected to the slide groove 121.

[0082] It should be noted that the bottom of the first storage compartment 31 and the second storage compartment 32 both include a plurality of second rollers, the outer side of the second roller is sleeved with a belt, a second roller located at the end is connected to the output shaft of the third motor, the belt is slidably connected to the slide groove 121, and after the AGV dust removal vehicle 200 is docked with the dust removal tank 100, the docking door 13 is opened, the support leg 16 is raised, the second storage compartment 32 is aligned with the docking door 13, the second motor is operated to send the dust box 12 out, the third motor is operated, the second roller is operated, the belt and the slide groove 121 move relative to each other, the dust box 12 enters the second storage compartment 32, the support leg 16 is lowered, the first storage compartment 31 is aligned with the docking door 13, the third motor is operated, and through the operation of the second roller, the belt and the slide groove 121 move relative to each other, and the new dust box 12 enters the accommodating space of the lower tank 3, completing the automatic replacement of the dust box 12.

[0083] In some optional embodiments, referring to Figure 4 and Figure 7 An infrared alignment point 34 is provided on the outer periphery of the docking door 13 , and an infrared emitting point 35 is provided on the AGV dust removal vehicle 200 , and the infrared emitting point 35 corresponds to the infrared alignment point 34 one by one.

[0084] It should be noted that an infrared alignment point 34 is provided on the outer periphery of the docking door 13, and the AGV dust removal vehicle 200 is provided with an infrared emitting point 35. The infrared emitting point 35 corresponds one-to-one with the infrared alignment point 34. The alignment of the docking door 13 and the AGV dust removal vehicle 200 is achieved through infrared alignment, which facilitates the docking of the AGV dust removal vehicle 200 with the dust removal tank 100 and improves the accuracy of alignment.

[0085] It should be noted that infrared transmission and reception technology is mature and widely used, which makes the price of related products relatively low, and the construction cost is also low. It also has the characteristics of strong anti-interference ability, reliable information transmission, low power consumption, low cost, easy encoding and decoding, which can reduce costs and increase efficiency to a certain extent.

[0086] In some optional embodiments, the legs 16 of the AGV dust removal vehicle 200 are hydraulic legs 16 .

[0087] It should be noted that the hydraulic lift adopts advanced hydraulic transmission technology, which can achieve fast and smooth lifting, greatly improving work efficiency, while ensuring the safety and stability of the outrigger 16 during the lifting process; hydraulic lift usually adopts high-strength materials and structural design, and has a high load-bearing capacity; hydraulic lifting equipment can quickly and accurately complete the handling and stacking of goods, greatly improving work efficiency and reducing labor costs.

[0088] The present invention also provides an automatic dust removal method, using any of the automatic dust removal devices of the above embodiments, referring to Fig. 9 ,include:

[0089] S1: Connect the vacuum pump to the first connecting hole 4 through a flange, and connect the single crystal furnace to the second connecting hole 6 through a flange;

[0090] S2: The gate assembly 10 moves from the center of the hollow area 9 to the edge of the hollow area 9, and the hollow area 9 is opened;

[0091] S3: placing the dust box 12 in the accommodating space;

[0092] S4: The AGV dust removal vehicle 200 moves to the position of the lower tank 3, the second storage compartment 32 is not provided with a dust box 12, a new dust box 12 is provided in the first storage compartment 31, and the second storage compartment 32 is aligned with the docking door 13;

[0093] S5: start dust removal;

[0094] S6: After the dust removal reaches the predetermined time, the gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area 9, argon gas is introduced into the lower tank 3 to restore the lower tank 3 to normal pressure, and the docking door 13 is opened;

[0095] S7: placing the dust box 12 in the accommodating space and transporting it to the second storage compartment 32;

[0096] S8: lowering the legs 16 so that the first storage compartment 31 is aligned with the docking door 13;

[0097] S9: transporting the new dust box 12 in the first storage compartment 31 to the accommodating space;

[0098] S10: The shutter assembly 10 moves from the center of the hollow area 9 to the edge of the hollow area 9, the hollow area 9 is opened, and dust removal continues;

[0099] S11: The AGV dust removal vehicle 200 returns to the dust processing point.

[0100] Specifically, the present invention provides an automatic dust removal method, comprising: S1: connecting a vacuum pump to a first connection hole 4 through a flange, and connecting a single crystal furnace to a second connection hole 6 through a flange, to provide a structural basis for the subsequent dust removal process;

[0101] S2: The gate assembly 10 moves from the center of the hollow area 9 to the edge of the hollow area 9, and the hollow area 9 is opened. The hollow area 9 is opened to realize the connection of the space inside the dust removal tank 100, thereby improving the dust removal effect;

[0102] S3: A dust collecting box 12 is placed in the accommodating space to provide a storage space for oxides and dust generated during the dust removal process and facilitate subsequent cleaning;

[0103] S4: The AGV dust removal vehicle 200 moves to the position of the lower tank 3. No dust box 12 is set in the second storage compartment 32. A new dust box 12 is set in the first storage compartment 31. The second storage compartment 32 is aligned with the docking door 13 to facilitate replacement with the dust box 12 in the dust removal tank 100 to process dust removal waste.

[0104] S5: Start dust removal. After the vacuum pump is running, a vacuum environment is formed in the dust removal tank 100. Part of the oxide-based dust can enter the dust collection box 12. The dust bag collects part of the waste to enhance the dust removal effect.

[0105] S6: After the dust removal reaches the predetermined time, the gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 and then closes the hollow area 9, and introduces argon gas into the lower tank 3 to restore the lower tank 3 to normal pressure, and opens the docking door 13; after dust removal for a period of time, the dust box 12 needs to be replaced, the hollow area 9 is closed, and the lower tank 3 forms a closed independent space to avoid affecting the internal environment of the upper tank 1 and the middle tank 2. Argon gas is introduced into the lower tank 3 to restore the normal pressure environment, providing a structural basis for the subsequent docking of the dust removal tank 100 and the AGV dust removal vehicle 200;

[0106] S7: The dust box 12 is placed in the accommodating space and transported to the second storage compartment 32. The dust box 12 in the lower tank 3 is transported to the second storage compartment 32 by the second motor;

[0107] S8: lowering the legs 16 so that the first storage compartment 31 is aligned with the docking door 13, so as to facilitate replacement of the new dust box 12;

[0108] S9: transporting the new dust box 12 in the first storage compartment 31 to the accommodating space, the third motor is running, the dust box 12 is transferred from the first storage compartment 31 to the accommodating space, and the dust box 12 is replaced;

[0109] S10: The gate assembly 10 moves from the center of the hollow area 9 to the edge of the hollow area 9, the hollow area 9 is opened, and dust removal continues. After the dust box 12 is replaced, the hollow area 9 is opened, the upper tank 1, the middle tank 2 and the lower tank 3 are connected, and dust removal continues;

[0110] S11: The AGV dust removal vehicle 200 returns to the dust processing point and replaces the dust box 12.

[0111] It should be noted that flange connection has high bonding strength, which can ensure the stability and reliability of the connection; flange connection can achieve good sealing performance and prevent fluid leakage through tight connection using gaskets and bolts; flange connection is suitable for a variety of working conditions, including high temperature, high pressure, corrosion-prone environments, and has a wide range of applications; the processing and installation of flange connection are relatively simple and the cost is low, so it has certain advantages in terms of economy.

[0112] It can be understood that the automatic dust removal method provided by the present invention includes S1: connecting the vacuum pump to the first connecting hole 4 through a flange, and connecting the single crystal furnace to the second connecting hole 6 through a flange; S2: moving the gate assembly 10 from the center of the hollow area 9 to the edge of the hollow area 9, and the hollow area 9 is opened; S3: placing a dust box 12 in the accommodating space; S4: the AGV dust removal vehicle 200 moves to the position of the lower tank 3, the dust box 12 is not set in the second storage compartment 32, a new dust box 12 is set in the first storage compartment 31, and the second storage compartment 32 is aligned with the docking door 13; S5: starting dust removal; S6: after the dust removal reaches a predetermined time, the gate assembly 10 moves along the edge of the hollow area 9 After the edge moves toward the center of the hollow area 9, the hollow area 9 is closed, argon gas is introduced into the lower tank 3 to restore the lower tank 3 to normal pressure, and the docking door 13 is opened; S7: the dust box 12 is placed in the accommodating space and transported to the second storage compartment 32; S8: the support legs 16 are lowered to align the first storage compartment 31 with the docking door 13; S9: the new dust box 12 in the first storage compartment 31 is transported to the accommodating space; S10: the gate assembly 10 moves from the center of the hollow area 9 to the edge of the hollow area 9, the hollow area 9 is opened, and dust removal continues; a highly automated dust removal process can be achieved, and automatic dust removal and replacement of dust boxes can be achieved through the cooperation of the dust removal tank 100 and the AGV dust removal vehicle 200.

[0113] The present invention also provides another automatic dust removal method, using any of the automatic dust removal devices of the above embodiments, referring to Fig.10 ,include:

[0114] S1: Connect the vacuum pump to the first connecting hole 4 through a flange, and connect the single crystal furnace to the second connecting hole 6 through a flange;

[0115] S2: The gate assembly 10 moves from the center of the hollow area 9 to the edge of the hollow area 9, and the hollow area 9 is opened;

[0116] S3: placing the dust box 12 in the accommodating space;

[0117] S4: The AGV dust removal vehicle 200 moves to the position of the lower tank 3, the first storage compartment 31 is not provided with a dust box 12, a new dust box 12 is provided in the second storage compartment 32, and the first storage compartment 31 is aligned with the docking door 13;

[0118] S5: start dust removal;

[0119] S6: After the dust removal reaches the predetermined time, the gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area 9, argon gas is introduced into the lower tank 3 to restore the lower tank 3 to normal pressure, and the docking door 13 is opened;

[0120] S7: placing the dust box 12 in the accommodating space and transporting it to the first storage compartment 31;

[0121] S8: Raise the legs 16 so that the second storage compartment 32 is aligned with the docking door 13;

[0122] S9: transporting the new dust box 12 in the second storage compartment 32 to the accommodating space;

[0123] S10: The shutter assembly 10 moves from the center of the hollow area 9 to the edge of the hollow area 9, the hollow area 9 is opened, and dust removal continues;

[0124] S11: The AGV dust removal vehicle 200 returns to the dust processing point.

[0125] It can be seen from the above embodiments that the automatic dust removal device and the automatic dust removal method provided by the present invention achieve at least the following beneficial effects:

[0126] The automatic dust removal equipment provided by the present invention includes: a dust removal tank 100 and an AGV dust removal vehicle 200. The dust removal tank 100 includes an upper tank 1, a middle tank 2 and a lower tank 3. The side wall of the upper tank 1 is provided with a first connecting hole 4 for connecting a vacuum pump, and a dust removal bag is provided in the upper tank 1; the middle tank 2 is provided with a second connecting hole 6 for connecting a single crystal furnace; the lower tank 3 includes a top plate 7, a bottom plate 8 and a side plate 11, the top plate 7 is provided with a hollow area 9 for receiving oxides and other dust, and a gate assembly 10 is provided on the side of the top plate 7 close to the bottom plate 8. The gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area 9, thereby forming an independent closed space for the lower tank 3. The movement of the gate assembly 10 can Implementation; the top plate 7, the side plate 11 and the bottom plate 8 constitute an accommodating space for placing the dust box 12, and the side plate 11 includes a docking door 13, which is convenient for docking the dust removal tank 100 with the dust removal vehicle; the lower tank 3 is also provided with a vent 14, and argon gas is introduced to restore the lower tank 3 to normal pressure, providing an environmental basis for subsequent docking with the AGV dust removal vehicle 200; the AGV dust removal vehicle 200 includes a body and a support leg 16, and the support leg 16 is a lifting mechanism to realize automatic replacement of the dust box 12, improve the automation of the dust removal process, and can realize automatic cleaning of oxides and other dust and automatic replacement of the dust box 12.

[0127] Although some specific embodiments of the present invention have been described in detail by way of example, it will be appreciated by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It will be appreciated by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. An automatic dust removal device, characterized in that: Including dust removal tank and AGV dust removal vehicle, among which, The dust removal tank comprises an upper tank, a middle tank and a lower tank connected in sequence, wherein the upper tank, the middle tank and the lower tank are arranged along a first direction, wherein: A first connecting hole is provided on the side wall of the upper tank, and the first connecting hole is used to connect a vacuum pump. A dust removal bag is provided in the upper tank; The middle tank is provided with a second connection hole, and the second connection hole is connected to the single crystal furnace; Along the first direction, the lower tank includes a top plate and a bottom plate that are arranged opposite to each other, the top plate is provided with a hollow area, a gate assembly is provided on a side of the top plate close to the bottom plate, and the gate assembly moves along the edge of the hollow area toward the center of the hollow area to close the hollow area; the lower tank also includes a side plate located between the top plate and the bottom plate, the top plate, the side plate and the bottom plate constitute an accommodating space, the accommodating space is used to place a dust box, and the side plate includes a docking door; the lower tank is also provided with a vent hole, and the vent hole is used to introduce argon gas; The AGV dust removal vehicle includes a body and legs, the legs are a liftable mechanism, the body includes a first storage compartment and a second storage compartment arranged along a first direction, the first storage compartment is located on a side of the second storage compartment away from the legs, and the first storage compartment and the second storage compartment are used to place dust boxes.

2. The automatic dust removal equipment according to claim 1, characterized in that: The gate assembly comprises an annular mounting plate, a first motor is provided on a side of the top plate close to the bottom plate, and an output shaft of the first motor is connected to the annular mounting plate to control the rotation of the annular mounting plate; The top plate is fixedly connected with N fixing columns, and the mounting plate is provided with N oblong holes, and the fixing columns are sleeved in the oblong holes, and the annular mounting plate rotates clockwise or counterclockwise; the inner edge of the annular mounting plate is provided with N rotating shafts, and the rotating shafts are arranged in a one-to-one correspondence with the oblong holes; the rotating shaft is sleeved with a connecting rod, and the other end of the connecting rod is connected with a fan-blade-shaped gate plate, and the N fan-blade-shaped gate plates move along the edge of the hollow area toward the center of the hollow area to close the hollow area.

3. The automatic dust removal equipment according to claim 1, characterized in that: The inner wall of the side plate is provided with a water pipe, and cold water is passed into the water pipe.

4. The automatic dust removal device according to claim 3, characterized in that: Along the first direction, the water pipes are arranged reciprocatingly in a U shape.

5. The automatic dust removal device according to claim 4, characterized in that: The water inlet of the water pipe and the water outlet of the water pipe are both located on one side of the side plate close to the top plate.

6. The automatic dust removal device according to claim 1, characterized in that: The bottom of the dust box is provided with slide grooves in parallel; the bottom plate includes a plurality of first rollers, the outer sides of the first rollers are sleeved with belts, one of the first rollers at the end is connected to the output shaft of the second motor, and the belt is slidably connected to the slide grooves.

7. The automatic dust removal device according to claim 1, characterized in that: The first storage compartment and the second storage compartment each include a plurality of second rollers, a belt is sleeved on the outer side of the second roller, one of the second rollers at the end is connected to the output shaft of the third motor, and the belt is slidably connected to the slide groove.

8. The automatic dust removal device according to claim 1, characterized in that: The outer periphery of the docking door is provided with an infrared alignment point, and the AGV dust removal vehicle is provided with an infrared emitting point, and the infrared emitting point corresponds one-to-one with the infrared alignment point.

9. The automatic dust removal device according to claim 1, characterized in that: The outriggers of the AGV dust removal vehicle are hydraulic outriggers.

10. An automatic dust removal method, using the automatic dust removal device according to any one of claims 1 to 9, characterized in that: include: Connecting the vacuum pump to the first connection hole through a flange, and connecting the single crystal furnace to the second connection hole through a flange; The gate assembly moves from the center of the hollow area to the edge of the hollow area, and the hollow area is opened; A dust collection box is placed in the accommodating space; The AGV dust removal vehicle moves to the position of the lower tank, no dust box is set in the second storage compartment, a new dust box is set in the first storage compartment, and the second storage compartment is aligned with the docking door; Start dusting; After the dust removal reaches a predetermined time, the gate assembly moves along the edge of the hollow area toward the center of the hollow area to close the hollow area, argon gas is introduced into the lower tank to restore the lower tank to normal pressure, and the docking door is opened; The dust box is placed in the accommodating space and transported to the second storage compartment; lowering the legs so that the first storage compartment is aligned with the docking door; transporting the new dust box in the first storage compartment to the accommodating space; The shutter assembly moves from the center of the hollow area to the edge of the hollow area, and the hollow area is opened to continue dust removal; The AGV dust removal vehicle returns to the dust processing point.

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