Coating device

Abstract

The invention relates to a coating device which comprises an equipment body with a spraying cavity and a substrate carrier used for bearing a substrate to be coated, an overhaul opening communicated with the spraying cavity is formed in the top wall of the equipment body, the substrate carrier is arranged in the spraying cavity, and the substrate carrier is constructed to be capable of moving out of the spraying cavity through the overhaul opening. Wherein the inner side wall of the spraying chamber comprises a plurality of mounting surfaces, the plurality of mounting surfaces are sequentially and adjacently arranged around a first axis which is parallel to the bottom wall of the spraying chamber and points to the top wall, the plurality of mounting surfaces comprise a first mounting surface and a plurality of second mounting surfaces, the first mounting surface is provided with a material conveying opening communicated with the spraying chamber, and the second mounting surfaces are provided with functional part groups; the substrate carrier is arranged to be capable of entering and exiting the spraying cavity from the material conveying opening. The film coating device has better film coating uniformity while having better maintenance convenience, and is convenient to be compatible with other equipment.

Description

Technical Field

[0001] The present application relates to the field of semiconductor coating technology, and in particular to a coating device. Background Art

[0002] The commonly used coating device for semiconductors is a single-chip coating device, in which the coating material source and the substrate to be coated are placed in parallel. The substrate to be coated will block most of the coating material generated by the coating material source, so that the coating material is deposited on the substrate to be coated to form a film layer. However, the production efficiency of the single-chip coating device is low, so the coating equipment that can coat in batches is born to meet the demand in order to improve the production efficiency of the coating device.

[0003] The coating equipment capable of batch coating in the related art is less convenient to maintain, is more time-consuming, has poor coating uniformity, and has low compatibility with other equipment. Summary of the invention

[0004] Based on this, it is necessary to provide a coating device that can have better maintenance convenience, better coating uniformity, and is compatible with other equipment.

[0005] A coating device, the coating device comprising:

[0006] An equipment body having a spray chamber, wherein a maintenance opening communicating with the spray chamber is provided on a top wall of the equipment body; and

[0007] A substrate carrier for carrying the substrate to be coated, disposed in the spray chamber, the substrate carrier being configured to be able to be moved out of the spray chamber through the inspection opening;

[0008] Among them, the inner wall of the spray chamber includes a plurality of mounting surfaces, and the plurality of mounting surfaces are arranged adjacent to each other in sequence around a first axis parallel to the bottom wall of the spray chamber and pointing toward the top wall. The plurality of mounting surfaces include a first mounting surface with a material transport opening connected to the spray chamber, and a plurality of second mounting surfaces, wherein the second mounting surfaces are equipped with a functional component group, and the substrate carrier is configured to be able to enter and exit the spray chamber from the material transport opening.

[0009] In one of the embodiments, the functional component group includes at least one of a shower plate, a first heating element and a plasma source, and the functional component group is detachably connected to the second mounting surface.

[0010] In one embodiment, the functional component group includes the shower plate and the plasma source, and the shower plate and the plasma source are arranged in sequence along the direction from the center to the periphery of the shower chamber; or

[0011] The functional component group includes the shower plate and the first heating element, and the first heating element is arranged on one side of the shower plate; or

[0012] The functional component group includes the plasma source and the first heating element, and the first heating element is arranged at one side of the plasma source.

[0013] In one embodiment, one of the two adjacent functional component groups on two adjacent second mounting surfaces includes the shower plate, and the other one includes the plasma source.

[0014] In one embodiment, the functional component group includes the spray plate, the first heating element and the plasma source. The spray plate and the plasma source are arranged in sequence along the direction pointing from the center to the periphery of the spray chamber, and the first heating element is arranged on one side of the plasma source.

[0015] In one of the embodiments, at least one of the mounting surfaces is provided with a mounting opening communicating with the spray chamber, and a closed door is provided at the mounting opening, and the closed door is configured to be switchable between a closed state and an open state;

[0016] When the closed door is in a closed state, the closed door is sealed to the mounting opening;

[0017] When the closed door is in an open state, the installation opening is connected to the external environment.

[0018] In one embodiment, a virtual plane is defined, the first axis is located in the virtual plane, two of the plurality of second mounting surfaces are symmetrical relative to the virtual plane, the functional component group includes a first heating element, and the two first heating elements of the two functional component groups are arranged one by one on the two second mounting surfaces that are symmetrical relative to the virtual plane.

[0019] In one of the embodiments, a reference plane is defined, the first axis is located in the reference plane, the intersection line of the reference plane and the mounting surface is the reference line, and the reference line is parallel to or intersects with the first axis.

[0020] In one of the embodiments, a plurality of the functional component groups are disposed on the same second mounting surface, and the plurality of the functional component groups on the same second mounting surface are arranged along a direction parallel to the first axis.

[0021] In one embodiment, the coating device includes a second heating element arranged on the top wall and extending in a direction parallel to the first axis, the second heating element includes an annular heater arranged around the first axis or a heating tube whose tube body extends in a direction parallel to the first axis, and the second heating element has a preset interval with the mounting surface, and the substrate carrier is arranged between the second heating element and the mounting surface.

[0022] In one embodiment, the coating device comprises a carrier base and at least one substrate carrier disposed in the spray chamber, the substrate carrier is detachably connected to the carrier base, and the substrate carrier is configured to carry a plurality of substrates to be coated, and the plurality of substrates to be coated are arranged in sequence along a direction parallel to the first axis;

[0023] At least one of the substrate carriers is arranged around the first axis, and the carrier base is configured to be able to drive the substrate carrier to revolve around the first axis, and the substrate carrier is configured to be able to rotate around its own axis parallel to the first axis;

[0024] The substrate carrier is provided with a handle facing the top wall, and the substrate carrier can be moved out of the spray chamber through the inspection opening by the handle.

[0025] In one embodiment, the functional part group includes a spray plate and / or a plasma source, and at least one of the multiple mounting surfaces opposite to the spray plate and / or the plasma source is provided with an exhaust port, and the exhaust port is arranged on a side of the mounting surface close to the bottom wall, and the number of the exhaust ports is at least one.

[0026] In one embodiment, a first ventilation channel is defined between the carrier base and the inner wall of the spray chamber, the first ventilation channel is arranged around the first axis, and the first ventilation channel is connected between the spray chamber and the air suction port.

[0027] In one embodiment, a plurality of ventilation holes are provided on the carrier base, and the ventilation holes are penetrated on the carrier base in a direction parallel to the first axis and connected between the spray chamber and the air suction port. The plurality of ventilation holes are arranged around the first axis, and the substrate carrier is configured to be installed at the ventilation holes.

[0028] In one embodiment, the carrier base includes a carrier and a driving member, the carrier is used to carry the substrate carrier, and the driving member is transmission-connected to the carrier to drive the carrier to rotate around the first axis;

[0029] The bearing member is provided with the vent hole along a direction parallel to the first axis.

[0030] The substrate carrier of the above-mentioned coating device can be taken out from the inspection opening, which is conducive to improving the convenience of inspecting the substrate carrier. By setting up multiple second mounting surfaces, the coating device can be compatible with various functional parts groups, which improves the applicability and flexibility of the coating device, and is conducive to reasonably compatibility of multiple functional parts groups to multiple second mounting surfaces according to actual use requirements, which is conducive to improving the uniformity of equipment coating. And the material transport opening is opened on the first mounting surface, so that the inspection opening and the material transport opening are opened separately, and there is no need to mix the same opening, and there is no need to remove the material transport equipment at the material transport opening when maintenance is required, which is conducive to improving the convenience of operation during maintenance and material transportation, and is conducive to improving the efficiency of maintenance and material transportation.

[0031] The coating device provided by the present application also has the following advantages:

[0032] 1. The first heating element and the second heating element are arranged to cooperate with each other so that the substrate to be coated on the substrate carrier can be heated more evenly, which is beneficial to improving the coating uniformity of the coating device.

[0033] 2. The first ventilation channel is provided to make the exhaust airflow in each place in the spray chamber more uniform, thereby reducing the risk of uneven coating caused by the accumulation of spray gas or dust in the exhaust airflow, which is beneficial to improving the coating uniformity of the substrate to be coated.

[0034] 3. The substrate carrier is configured to be able to revolve around the first axis and to rotate around the first axis, so that it can simultaneously rotate while revolving during the coating process, which is beneficial to further improve the coating uniformity of the substrate to be coated. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] FIG. 1 is a front view schematic diagram of the structure of a coating device according to an embodiment of the present application.

[0036] FIG. 2 is a schematic diagram of a top view of the structure of a coating device according to an embodiment of the present application.

[0037] FIG. 3 is a front view schematic diagram of the structure of a plasma source according to an embodiment of the present application.

[0038] FIG. 4 is a schematic diagram of a three-dimensional structure of a substrate carrier according to an embodiment of the present application.

[0039] FIG. 5 is a schematic diagram of the three-dimensional structure of a carrier base and a substrate carrier according to an embodiment of the present application.

[0040] FIG. 6 is a front view structural diagram of a carrier base and a substrate carrier according to an embodiment of the present application.

[0041] FIG. 7 is a schematic diagram of an exploded structure of a carrier base and a substrate carrier along a first axis according to an embodiment of the present application.

[0042] Description of reference numerals:

[0043] 10. Coating device;

[0044] 110, shell; 111, mounting surface; 120, shell cover; 131, spray chamber; 132, accommodating chamber; 140, inspection opening; 150, material transport opening; 160, installation opening; 171, plasma source; 172, material transport equipment; 180, second heating element; 191, air extraction port; 192, vacuum system; 193, butterfly valve; 194, filter tank; 195, source bottle cabinet;

[0045] 210, substrate carrier; 211, handle; 212, top frame; 213, bottom frame; 214, support frame; 215, limit groove; 220, carrier base; 221, bearing member; 222, driving member; 223, magnetic fluid; 230, revolving gear; 240, rotating gear;

[0046] 310, first ventilation channel; 320, ventilation hole; 330, second ventilation channel;

[0047] 400. A substrate to be coated. DETAILED DESCRIPTION

[0048] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0049] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0050] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0051] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0052] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0053] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If present, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0054] As market demand increases, multi-chip coating devices are gradually developing. Compared with single-chip coating devices that can provide precision coating, multi-chip coating devices are more suitable for large-scale production. They can process multiple substrates at the same time, thereby improving production efficiency and reducing costs. The design of multi-chip coating devices usually needs to focus on improving production efficiency, process stability and maintenance efficiency, such as by shortening the machine door opening and closing time, improving the target material utilization efficiency and improving the convenience of maintenance.

[0055] The multi-chip coating devices in the related art are often less convenient to maintain, more time-consuming, and have low maintenance efficiency. For example, in the related art, the body of the multi-chip coating device is usually provided with a loading and unloading opening, and a loading and unloading mechanism at the loading and unloading opening, so that the substrates to be coated are loaded into the body of the multi-chip coating device through the loading and unloading mechanism, and the coated substrates are unloaded from the body of the multi-chip coating device through the loading and unloading mechanism, so as to facilitate the coating of the next batch of substrates. When overhauling the multi-chip coating device in the related art, it is usually necessary to disassemble the loading and unloading mechanism at the loading and unloading opening relative to the multi-chip coating device, and then overhaul the inside of the multi-chip coating device from the loading and unloading opening, which is more complicated and time-consuming. Moreover, the carrier that carries the multiple substrates inside the multi-chip coating device often has a more complex structure. Even if the maintenance tools can be inserted into the multi-chip coating device through the loading and unloading opening, it is difficult to fully overhaul the carrier with a complex structure.

[0056] Based on this, please provide a coating device that can have better maintenance convenience, help save maintenance time, and at the same time be compatible with other equipment and have better coating uniformity.

[0057] Referring to FIG. 1 and FIG. 2 , FIG. 1 is a schematic diagram of the front view structure of a coating device 10 according to an embodiment of the present application. FIG. 2 is a schematic diagram of the top view structure of a coating device 10 according to an embodiment of the present application. The coating device 10 provided in the present application includes an equipment body having a spray chamber 131, a substrate carrier 210 for carrying a substrate 400 to be coated, and a functional component group. The substrate carrier 210 is arranged in the spray chamber 131 for carrying the substrate 400 to be coated. The coating material sprayed in the spray chamber 131 is deposited on the substrate 400 to be coated to form a film layer on the surface of the substrate 400 to be coated.

[0058] An inspection opening 140 communicating with the spray chamber 131 is provided on the top wall of the device body. In some embodiments, the device body includes a housing 110 and a housing cover 120. The inspection opening 140 is provided on the top wall of the housing 110. The housing cover 120 is covered at the inspection opening 140 to maintain a background vacuum in the spray chamber 131. The substrate carrier 210 is configured to be able to be moved out of the spray chamber 131 through the inspection opening 140 to facilitate the inspection of the substrate carrier 210. The inspection tool can also be inserted into the spray chamber 131 through the inspection opening 140 to inspect the internal structure of the spray chamber 131, which is conducive to improving the convenience of inspection.

[0059] Among them, the inner wall of the spray chamber 131 includes a plurality of mounting surfaces 111 arranged around a first axis, and the plurality of mounting surfaces 111 are arranged adjacent to each other in sequence around a first axis parallel to the bottom wall of the spray chamber 131 and pointing toward the top wall. It can be understood that the mounting surface 111 of the present application is a partial inner wall of the spray chamber 131, or the mounting surface 111 is a partial inner side wall surface of the coating device 10.

[0060] The plurality of mounting surfaces 111 include a first mounting surface provided with a material transport opening 150 connected to the spray chamber 131. The substrate carrier 210 is configured to be able to enter and exit the spray chamber 131 from the material transport opening 150. The loading step of the substrate 400 to be coated and the unloading step of the substrate that has been coated in the spray chamber 131 are both performed from the material transport opening 150. In this way, the inspection opening 140 and the material transport opening 150 are opened separately, and there is no need to mix the same opening. During maintenance, maintenance can be performed more conveniently through the inspection opening 140. In addition, the first mounting surface is provided with a material transport opening 150, which is convenient for compatibility with the material transport device 172 and for vacuum compatibility of the material transport device 172 and the spray chamber 131.

[0061] The plurality of mounting surfaces 111 further include a second mounting surface, on which a functional component group is mounted. The second mounting surface is provided to facilitate mounting the functional component group on the inner wall of the spray chamber 131, and to facilitate the layout of the functional component group on the inner wall of the spray chamber 131 according to requirements, thereby improving the applicability and flexibility of the coating device 10.

[0062] The substrate carrier 210 provided in the present application can be taken out from the inspection opening 140, which is conducive to improving the convenience of inspecting the substrate carrier 210, and is convenient for comprehensive inspection of the taken-out substrate carrier 210. The present application sets multiple second mounting surfaces, so that the coating device 10 can be compatible with various functional parts groups, improves the applicability and flexibility of the coating device 10, and is conducive to reasonably compatible with multiple functional parts groups on multiple second mounting surfaces according to actual use requirements, which is conducive to improving the coating uniformity of the equipment. And the material transport opening 150 is opened on the first mounting surface, so that the inspection opening 140 and the material transport opening 150 are opened separately, without mixing the same opening, and without removing the material transport equipment 172 at the material transport opening 150 when maintenance is required, which is conducive to improving the convenience of operation during maintenance and material transportation, and is conducive to improving the efficiency of maintenance and material transportation.

[0063] In some embodiments, a material transport robot is provided on the side of the material transport device 172 facing the material transport opening 150 , and the loading and unloading of substrates is achieved through the material transport robot and through the material transport opening 150 .

[0064] In some embodiments, as shown in FIG. 2 , the functional component group includes at least one of a spray plate, a first heating element, and a plasma source 171. That is, the spray plate, the first heating element, and the plasma source 171 can be mounted on the second mounting surface. Among them, the spray plate can be used to spray the coating material or other gases into the spray chamber 131. The first heating element is used to heat the spray plate, the plasma source 171, or the spray chamber 131 to improve the uniformity of the coating. The plasma source 171 is used to spray plasma into the spray chamber 131. Through the mixing and action of the plasma on the coating material, the coating material is more evenly deposited on the substrate 400 to be coated, thereby improving the uniformity of the film layer.

[0065] In some embodiments, refer to FIG3, which is a front view of a plasma source 171 according to an embodiment of the present application. The plasma source 171 includes a plurality of exit holes arranged in an array on the exit surface of the plasma, and the plurality of exit holes are arranged in an array with equal intervals, so that the plasma source 171 can eject uniform plasma.

[0066] In this embodiment, the functional component group includes at least one of a spray plate, a first heating element, and a plasma source 171, which means that a functional component group installed on the same second mounting surface can be a spray plate, a first heating element, a plasma source 171, or any combination of the three, such as a functional component group being a combination of a spray plate and a plasma source 171, a functional component group being a combination of a spray plate and a first heating element, a functional component group being a combination of a plasma source 171 and a first heating element, or a functional component group being a combination of a spray plate, a first heating element, and a plasma source 171. The above-mentioned multiple combinations can be flexibly arranged to meet actual use requirements, and no excessive restrictions are made here. In this way, the functional component group of the corresponding combination can be installed on the corresponding second mounting surface, and the layout of the functional component group can be adjusted according to actual needs, so that the coating device 10 of the present application has better applicability and flexibility.

[0067] In some embodiments, the functional part group includes a spray plate and a plasma source 171, and the spray plate and the plasma source 171 are sequentially arranged along the direction from the center of the spray chamber 131 to the periphery. The direction from the center of the spray chamber 131 to the periphery can be understood as the direction from the center of the spray chamber 131 to the periphery on the peripheral side opposite to the top wall and the bottom wall of the main body. In this way, the spray path of the spray plate spraying the coating material or other gas into the spray chamber 131 intersects or even overlaps with the spray path of the plasma source 171 spraying the plasma into the spray chamber 131, so that the coating material or other gas sprayed by the spray plate is fully mixed with the plasma, which is beneficial to improve the deposition uniformity of the coating material on the substrate 400 to be coated, and to improve the uniformity of the coated layer.

[0068] In some embodiments, while the spray plate and the plasma source 171 are arranged in sequence along the direction from the center of the spray chamber 131 to the periphery, the first heating element can also be arranged on one side of the two. In other words, the functional component group includes a spray plate, a first heating element and a plasma source 171, and the spray plate and the plasma source 171 are arranged in sequence along the direction from the center of the spray chamber 131 to the periphery, and the first heating element is arranged on one side of the plasma source 171. Thus, the spray plate and the plasma source 171 can be heated by the first heating element, so that the coating material or other gas sprayed by the spray plate is fully mixed with the plasma and can have a suitable temperature, which is conducive to improving the uniformity of the coated layer. It can be understood that the first heating element can be located on one side of the two in any direction, and no excessive restrictions are made here.

[0069] In some embodiments, the functional component group includes a spray plate and a first heating element, and the first heating element is disposed on one side of the spray plate to heat the spray plate, which is beneficial for the coating material or other gas sprayed from the spray plate to be at a suitable temperature, and is beneficial for improving the uniformity of the coating material deposited on the substrate 400 to be coated. The first heating element is disposed on one side of the spray plate. It can be understood that the first heating element can be disposed on one side of the spray plate in any direction, such as the side of the spray plate facing or away from the spray chamber 131, and also on any side of the opposite sides of the spray plate along the extension direction of the first axis, and also on any side of the left and right sides of the spray plate when the spray plate is facing the spray chamber 131 as the front direction, and no excessive restrictions are made here.

[0070] In some embodiments, the functional component group includes a plasma source 171 and a first heating element, and the first heating element is disposed on one side of the plasma source 171. The plasma source 171 is heated by the first heating element, so that the plasma sprayed from the plasma source 171 is at a suitable temperature. This is conducive to improving the effect of plasma promoting the deposition of the coating material on the substrate 400 to be coated, thereby improving the deposition efficiency of the coating material and the coating efficiency. At the same time, the suitable temperature is conducive to promoting the mixing of the plasma with the coating material or other gases, which is conducive to improving the uniformity of the coating.

[0071] In this embodiment, the first heating element is disposed on one side of the plasma source 171. It is understandable that the first heating element can be disposed on one side of the plasma source 171 in any direction without too much restriction. For example, the first heating element can be disposed on the side of the plasma source 171 facing or away from the spray chamber 131, or on any side of the opposite sides of the plasma source 171 along the extension direction of the first axis, or on any side of the left and right sides of the plasma source 171 when the plasma source 171 faces the spray chamber 131 as the front.

[0072] In some embodiments, the second mounting surface is provided with a plurality of them, and one of the two adjacent functional parts groups on two adjacent second mounting surfaces may include a spray plate, and the other one includes a plasma source 171. The spray plate and the plasma source 171 are placed close to each other, and their spray paths intersect, so that the spray path of the spray plate spraying the coating material or other gas toward the spray chamber 131 intersects with the spray path of the plasma source 171 spraying the plasma toward the spray chamber 131, so that the coating material or other gas sprayed by the spray plate is fully mixed with the plasma, which is beneficial to improve the deposition uniformity of the coating material on the substrate 400 to be coated, and to improve the uniformity of the coated layer.

[0073] In some embodiments, the first heating element is configured as a heating plate to facilitate better compatibility between the first heating element and the second mounting surface, thereby facilitating installation of the first heating element on the corresponding second mounting surface.

[0074] In some embodiments, the functional component group is detachably connected to the second mounting surface, which facilitates the flexible adjustment of the functional component group relative to the second mounting surface according to needs, and also facilitates the disassembly and maintenance of the functional component group. The material transport device 172 can also be detachably connected to the first mounting surface, which facilitates the disassembly of the material transport device 172 and the housing 110, so that the two can be repaired separately.

[0075] In some embodiments, a first mounting member (not shown) is mounted on the second mounting surface, and the coating device 10 further includes a second mounting member (not shown) detachably connected to the first mounting member. The second mounting member is used to fix the functional group on the second mounting surface, or to be used in combination with the first mounting member to achieve a detachable connection between the functional group and the second mounting surface, so as to flexibly adjust the layout of each functional group in the spray chamber 131, and further improve the applicability and flexibility of the coating device 10. It can be understood that the detachable connection between the functional group and the second mounting surface, when the functional group needs to be repaired, the functional group to be repaired can be disassembled relative to the second mounting surface, and taken out from the inspection opening 140 for inspection, which is conducive to further improving the convenience of maintenance of the coating device 10. Corresponding to the multiple second mounting surfaces, the present application is provided with multiple first mounting members and second mounting members to achieve detachable connection of the functional groups on multiple second mounting surfaces.

[0076] In some embodiments, a virtual plane is defined, the first axis is located in the virtual plane, and two of the multiple second mounting surfaces are symmetrical relative to the virtual plane. The functional part group includes a first heating element, and the two first heating elements of the two functional part groups are arranged one by one on the two second mounting surfaces symmetrical relative to the virtual plane. Therefore, the two first heating elements are arranged relative to the entire spray chamber 131, thereby being able to provide uniform heating to the entire spray chamber 131, improve the temperature uniformity in the entire spray chamber 131, and further provide uniform heating to the substrate carrier 210 in the spray chamber 131131 in a circumferential direction, which is beneficial to the uniform temperature of the parts to be coated on the substrate carrier 210, and is beneficial to the uniform deposition of the coating material in the spray chamber 131 on the parts to be coated, and is beneficial to the deposition and formation of a uniform film layer on the parts to be coated.

[0077] In some embodiments, two spray plates may be respectively disposed on two second mounting surfaces symmetrical relative to the virtual plane to improve the uniformity of the coating material in the spray chamber 131 and facilitate uniform deposition of the coating material on the substrate 400 to be coated.

[0078] As shown in FIG. 2 , the number of first mounting surfaces can be set to one, and the first mounting surface is used to mount the material transporting device 172 correspondingly. The number of second mounting surfaces can be set to five, and one of the second mounting surfaces is opposite to the first mounting surface and is used to mount the plasma source 171. Two of the remaining four second mounting surfaces are symmetrically arranged along a virtual plane defined, and are respectively used to mount a spray plate, or in other words, two spray plates are respectively mounted on the above-mentioned two second mounting surfaces. Another two of the remaining four second mounting surfaces are symmetrically arranged along another virtual plane defined, and are respectively used to mount a first heating element, or in other words, two first heating elements are respectively mounted on the above-mentioned two second mounting surfaces. In this way, the two first heating elements arranged oppositely can provide uniform heating for the spray chamber 131, and the two spray plates arranged oppositely can provide uniform coating materials or other gases for the spray chamber 131, which is beneficial to improving the coating uniformity of the coating device 10.

[0079] In some embodiments, a reference plane is defined, the first axis is located in the reference plane, the intersection of the reference plane and the mounting surface 111 is the reference line, and the reference line is parallel to or intersects the first axis. That is, the mounting surface 111 of the present application can be set as a plane parallel to the first axis, or can be set as a plane with a certain inclination angle to the first axis. The setting of the plane facilitates the mounting surface 111 to be compatible with structures such as the plasma source 171, the shower plate, and the first heating element.

[0080] If the reference line is parallel to the first axis, the functional component groups installed on the installation surface 111 are equidistantly spaced toward the first axis at various locations along the extension direction of the first axis, and the coating material or other gas received by the multiple substrates 400 to be coated stacked along the extension direction of the first axis on the substrate carrier 210 have the same spraying speed and spraying density, and the thickness and uniformity of the coating layer on the multiple substrates 400 to be coated stacked along the extension direction of the first axis tend to be consistent, and thus the overall uniformity of the coating layer of the same batch of substrates 400 to be coated in the same coating chamber is better.

[0081] In this way, the mounting surface 111 is inclined with the first axis, so that the functional component group can be inclined relative to the substrate carrier 210 located at the center of the spray chamber 131, so that the multiple substrates 400 to be coated stacked along the extension direction of the first axis of the substrate carrier 210 are not spaced equally from the functional component group, so that the spraying speed and spraying density of the coating material or other gas received by the multiple substrates 400 to be coated stacked along the extension direction of the first axis are different, and then when the same batch of coating is carried out in the same coating chamber, the thickness of the film layer finally formed by the different substrates 400 to be coated stacked along the extension direction of the first axis is different, that is, the present application can change the distance between the different substrates 400 to be coated stacked along the extension direction of the first axis and the functional component by designing the inclination angle of the mounting surface 111 and the first axis, and then adjust the spraying speed and spraying density of the coating material or other gas received by the different substrates 400 to be coated stacked along the extension direction of the first axis, and finally different substrates 400 to be coated have different thicknesses of film layers. That is, the plurality of substrates 400 to be coated that undergo the same batch of coating in the same coating chamber of the present application can have film layers of different thicknesses.

[0082] In some embodiments, referring to FIG. 2 , at least one second mounting surface is provided with a mounting opening 160 connected to the spray chamber 131, and a functional component group is installed at the mounting opening 160. The functional component group can extend into the spray chamber 131 from the mounting opening 160. It can be understood that the second mounting surface is provided with an opening to facilitate the installation of functional component groups of different thicknesses. In this way, the adaptability of the coating device 10 to various combinations of functional component groups can be improved, so that it can adapt to a variety of combinations of functional component groups.

[0083] In some embodiments, a closed door (not shown) is provided at the installation opening 160 , and the closed door is configured to be switchable between a closed state and an open state, that is, the closed door can be opened or closed depending on whether the installation opening 160 is used.

[0084] When the closed door is in the closed state, the closed door is sealed to the installation opening 160, that is, when the installation opening 160 is not needed to install the functional component group, the closed door can be closed so that the closed door is blocked at the installation opening 160 to ensure that the spray chamber 131 has good sealing. When the closed door is in the open state, the installation opening 160 is connected to the external environment. At this time, the installation opening 160 is in a conducting state rather than a blocked state, and the installation functional component group can be set at the installation opening 160 of the installation surface 111, so that the functional component group is connected to the spray chamber 131 through the installation opening 160 to achieve its function.

[0085] In some embodiments, a plurality of functional component groups are provided on the same second mounting surface, and the plurality of functional component groups on the same second mounting surface are arranged in a direction parallel to the first axis. It can be understood that as the number of substrates 400 to be coated that need to be coated simultaneously increases, the height of the equipment body in a direction parallel to the first axis can be increased, and correspondingly, the height of the second mounting surface and the entire spray chamber 131 in a direction parallel to the first axis increases, so that a plurality of functional component groups can be provided on the same second mounting surface along the extension direction of the first axis, so as to realize simultaneous coating of a greater number of substrates 400 to be coated, and the specific arrangement of each of the plurality of functional component groups on the same mounting surface 111 can be selected and combined according to the needs, and will not be repeated here.

[0086] 1 and 2 , the coating device 10 further includes a second heating element 180 disposed on the top wall and extending in a direction parallel to the first axis. The second heating element 180 includes a ring heater disposed around the first axis or a heating tube whose tube body extends in a direction parallel to the first axis. The second heating element 180 and the mounting surface 111 have a preset interval, and the substrate carrier 210 is disposed between the second heating element 180 and the mounting surface 111. In this way, the second heating element 180 can heat the side of the substrate carrier 210 away from the mounting surface 111. Combined with the setting of the first heating element, the first heating element and the second heating element 180 can uniformly heat the entire spray chamber 131 at the same time, and heat the side of the substrate carrier 210 facing and away from the mounting surface 111 at the same time, which is beneficial to improve the uniformity of heating the substrate carrier 210. In other words, the second heating element 180 is located in the center of the spray chamber 131, and the first heating element is located on the inner wall of the spray chamber 131. The coordinated arrangement of the first heating element and the second heating element 180 is beneficial to stabilizing the temperature at various locations in the spray chamber 131, which is beneficial to improving the uniformity of the film layer deposited on the substrate 400 to be coated.

[0087] Among them, when the space in the center of the spray chamber 131 surrounded by multiple substrate carriers 210 is small, the second heating element 180 can be a heating tube whose tube body extends in a direction parallel to the first axis, so that the second heating element 180 and the substrate carrier 210 maintain a suitable distance. When the space in the center of the spray chamber 131 surrounded by multiple substrate carriers 210 is large, the second heating element 180 can be a ring heater arranged around the first axis, so that the second heating element 180 and the substrate carrier 210 can still maintain a suitable distance. In general, the second heating element 180 can be set as a heating tube or a ring heater, so that the distance between the second heating element 180 and the substrate carrier 210 is appropriate, and the second heating element 180 will not be too close to the substrate carrier 210, causing the substrate 400 to be coated on the substrate carrier 210 to be burned, nor will the second heating element 180 be too far away from the substrate carrier 210, and the heating will be ineffective. The second heating element 180 is reasonably arranged, and the shape of the second heating element 180 is not limited. A preset interval is provided between the second heating element 180 and the mounting surface 111, and the substrate carrier 210 therebetween has better heating uniformity. The second heating element 180 cooperates with the first heating element to uniformly heat the entire spray chamber 131, so that the temperature at each location in the spray chamber 131 is stable, which is beneficial to improving the uniformity of the film layer deposited on the substrate 400 to be coated.

[0088] In some embodiments, referring to Figure 1, in combination with Figures 4 and 5, Figure 4 is a schematic diagram of the three-dimensional structure of a substrate carrier 210 according to an embodiment of the present application. Figure 5 is a schematic diagram of the three-dimensional structure of a carrier base 220 and a substrate carrier 210 according to an embodiment of the present application.

[0089] The coating device 10 includes a carrier base 220 for carrying a substrate carrier 210 and at least one of the above-mentioned substrate carriers 210, and the carrier base 220 and the substrate carrier 210 are both arranged in the spray chamber 131. The substrate carrier is configured to carry a plurality of substrates 400 to be coated, and the plurality of substrates 400 to be coated are arranged in sequence along a direction parallel to the first axis. In this way, a plurality of substrate carriers 210 can carry a greater number of substrates 400 to be coated, so as to facilitate simultaneous coating of a large number of substrates 400 to be coated, and to improve the coating efficiency of a large number of substrates 400 to be coated.

[0090] In some embodiments, at least one substrate carrier 210 is arranged around a first axis, and the carrier base 220 is configured to drive the substrate carrier 210 to revolve around the first axis, and the substrate carrier 210 is configured to rotate around its own axis parallel to the first axis.

[0091] At least one substrate carrier 210 is arranged around the first axis, which is conducive to improving the uniformity of the force applied to each part of the substrate carrier 210 and improving the service life of the coating device 10. The uniform arrangement of the substrate carrier 210 around the first axis is also conducive to uniform deposition of the coating material on the substrate 400 to be coated, and is conducive to improving the uniformity of the film layer formed on the substrate 400 to be coated. The substrate carrier 210 revolves around the first axis and can rotate around its own axis parallel to the first axis, so that the substrate 400 to be coated on the substrate carrier 210 revolves and rotates at the same time when the coating material is deposited, which is conducive to improving the uniformity of the deposition of the coating material on the substrates 400 to be coated on each substrate carrier 210, and further conducive to improving the uniformity of the film layer formed on the substrate 400 to be coated.

[0092] In some embodiments, as shown in FIG. 4 , the substrate carrier 210 includes a top carrier 212, a bottom carrier 213, and at least three support frames 214 disposed between the top carrier 212 and the bottom carrier 213. Each support frame 214 is connected between the top carrier 212 and the bottom carrier 213 along the extension direction of the first axis, and each support frame 214 is provided with a plurality of limiting grooves 215, which are used to fix and limit the substrate 400 to be coated, so as to improve the limiting stability of the substrate 400 to be coated and reduce the risk of film falling. In this way, each substrate carrier 210 can independently carry a plurality of substrates 400 to be coated, and a plurality of substrate carriers 210 are provided to carry a plurality of groups of substrates 400 to be coated. When different substrate carriers 210 need to be repaired, only the corresponding substrate carrier 210 needs to be taken out, and the repair is convenient.

[0093] In some embodiments, the substrate carrier 210 is detachably connected to the carrier base 220, and a handle 211 is provided on the substrate carrier 210 along the extension direction of the first axis toward the top wall, and the substrate carrier 211 can be moved out of the spray chamber 131 through the inspection opening 140. In this way, the substrate carrier 210 can be disassembled from the carrier base 220, and the substrate carrier 210 can be taken out through the inspection opening 140 on the top wall by holding the handle 211 on the substrate carrier 210 for inspection, which further increases the convenience of inspection. In some embodiments, the substrate carrier 210 and the carrier base 220 are detachably connected via a detachably connected bearing, which is not limited to threaded bearings, pin-connected bearings, and drop-mounted bearings that can realize a quickly detachable connection between the substrate carrier 210 and the carrier base 220, so as to increase the installation or disassembly speed of the substrate carrier 210 and the carrier base 220, thereby further saving the maintenance time of the substrate carrier 210 and improving the maintenance efficiency.

[0094] In some embodiments, referring to Figures 6 and 7, Figure 6 is a front view of a carrier base 220 and a substrate carrier 210 according to an embodiment of the present application. Figure 7 is an exploded view of a carrier base 220 and a substrate carrier 210 according to an embodiment of the present application along the extension direction of the first axis.

[0095] The carrier base 220 includes a bearing member 221 and a driving member 222. The bearing member 221 is used to carry the substrate carrier 210. The driving member 222 is transmission-connected to the bearing member 221 to drive the bearing member 221 to rotate around a first axis, and then the driving member 222 provides drive to drive the bearing member 221 and the substrate carrier 210 to revolve around the first axis. The revolution motion is beneficial to spraying the spray material in the spray chamber 131 more evenly onto the substrate 400 to be coated, which is beneficial to improving the uniformity of the film layer deposited on the substrate 400 to be coated.

[0096] In some embodiments, as shown in FIG. 7 , the carrier base 220 further includes a magnetic fluid 223 which is transmission-connected between the driving member 222 and the supporting member 221 . It can be understood that the provision of the magnetic fluid 223 is beneficial for providing good sealing between the carrier base 220 and the device body, and is beneficial for maintaining a suitable vacuum degree in the spray chamber 131 .

[0097] In some embodiments, referring to FIGS. 6 and 7 , the carrier base 220 further includes a revolving gear 230 and at least one self-rotating gear 240 meshing with the revolving gear 230. The revolving gear 230 and the self-rotating gear 240 enable each substrate carrier 210 to rotate around itself parallel to the first axis, that is, each substrate carrier 210 can self-rotate. The revolution and self-rotation of the substrate carrier 210 can stir the spray material and process gas such as plasma entering the spray chamber 131, which is beneficial to improving the uniformity of the coating.

[0098] The central axis of the revolving gear 230 coincides with the first axis, and the supporting member 221 is configured to be able to rotate around the first axis relative to the revolving gear 230. It can be understood that the output end of the driving member 222 passes through the center position of the revolving gear 230 and is transmission-connected to the supporting member 221, so as to drive the supporting member 221 to rotate around the first axis while not driving the revolving gear 230 to rotate around the first axis, thereby enabling the supporting member 221 to rotate relative to the revolving gear 230.

[0099] In this way, at least one self-rotating gear 240 is arranged around the first axis, and each self-rotating gear 240 is in transmission connection with the carrier 221, and the carrier 221 is configured to be able to drive the self-rotating gear 240 to rotate around the first axis, and to make the self-rotating gear 240 rotate around an axis parallel to the first axis under the meshing action with the revolving gear 230. At least one substrate carrier 210 is detachably connected to at least one self-rotating gear 240 in a one-to-one correspondence, and then the substrate carrier 210 can be driven to rotate around an axis parallel to the first axis through the self-rotation of the self-rotating gear 240, so that the substrate carrier 210 can complete the revolving and self-rotating motion, further improving the uniformity of the coating material deposited on the coated substrate on the substrate carrier 210 during coating, and then facilitating the improvement of the uniformity of the film layer on the coated substrate.

[0100] In some embodiments, the functional component group includes a shower plate and / or a plasma source 171 , that is, the functional component group includes a shower plate or a plasma source 171 , or a combination of a shower plate and a plasma source 171 . At least one of the multiple mounting surfaces 111 opposite to the spray plate and / or the plasma source 171 is provided with an exhaust port 191. It can be understood that the exhaust port 191 is provided on at least one mounting surface 111 opposite to the spray plate or the plasma source 171. If the spray plate and the plasma source 171 are provided on the same mounting surface 111, the exhaust port 191 can also be provided on at least one mounting surface 111 opposite to the mounting surface 111, so that the coating material or other gas, or plasma sprayed by the spray plate and the plasma source 171 can pass through and be partially deposited on the substrate 400 to be coated in the spray chamber 131, and the excess part can be extracted from the exhaust port 191, so as to realize the circulation of the coating material or other gas and the plasma in the spray chamber 131, so that the coating material is gradually deposited on the substrate 400 to be coated, and a film layer is formed on the substrate 400 to be coated. The exhaust port 191 can be arranged on one side of the mounting surface 111 close to the bottom wall, so as not to affect the installation opening 160 or the inspection opening 140 provided on the mounting surface 111 provided with the exhaust port 191, and not to affect the integration of other functional parts or material transport equipment 172. The number of the exhaust port 191 is at least one. If there are a large number of spray plates and plasma sources 171, the number of the exhaust ports 191 can be increased accordingly, so as to make the coating material or other gas in the spray chamber 131 flow smoothly with the plasma.

[0101] In some embodiments, referring to FIG. 1 , a first ventilation channel 310 is defined between the carrier base 220 and the inner wall of the spray chamber 131. The first ventilation channel 310 is arranged around the first axis and communicated with the spray chamber 131. An exhaust port 191 communicated with the first ventilation channel 310 is provided on the equipment body. In this way, the excess spray gas and dust generated during the spraying process can be sequentially exhausted to the outside of the exhaust port 191 through the first ventilation channel 310 to be exhausted from the spray chamber 131. The first ventilation channel 310 is arranged around the first axis, so that the exhaust airflow in each place in the spray chamber 131 is relatively uniform, reducing the risk of uneven coating caused by the accumulation of spray gas or dust in the exhaust airflow, which is beneficial to improving the coating uniformity of the substrate 400 to be coated.

[0102] In some embodiments, as shown in FIG. 7 , a plurality of vent holes 320 are provided on the carrier base 220. The vent holes 320 are provided on the carrier base 220 in a direction parallel to the first axis, and the vent holes 320 are connected between the spray chamber 131 and the air extraction port 191. The plurality of vent holes 320 are provided around the first axis. In this way, the vent holes 320 are provided so that the air extraction path is not limited to the first air passage 310 provided between the carrier base 220 and the inner side wall. The spray chamber 131 is provided with an air extraction path near its bottom wall, which can provide uniform air extraction for all parts of the spray chamber 131, reduce the risk of accumulation of the spray airflow at a certain place in the spray chamber 131, and help improve the coating uniformity of the substrate 400 to be coated, or in other words, help improve the successful coating yield rate of the substrate 400 to be coated.

[0103] In some embodiments, the carrier 221 is provided with the above-mentioned vent holes 320 in a direction parallel to the first axis, that is, the above-mentioned vent holes 320 are formed on the carrier 221. And the substrate carrier 210 is configured to be installed at the vent holes 320. It can be understood that the vent holes 320 can be used to install the substrate carrier 210, and can also be hollowed out to pass the spray air flow to the exhaust port 191 when the substrate carrier 210 is not required to be installed, thereby reducing the risk of the spray air flow accumulating somewhere in the spray chamber 131, which is conducive to improving the coating uniformity of the substrate 400 to be coated.

[0104] In some embodiments, a second ventilation channel 330 connected to the air extraction port 191 and the air vents 320 is defined between the carrier base 220 and the bottom wall of the spray chamber 131. Each air vent 320 is connected to the spray chamber 131 and the second ventilation channel 330. The excess spray gas or dust entering the air vent 320 flows to the air extraction port 191 through the second ventilation channel 330 to flow out of the spray chamber 131. In some embodiments, the side of the second ventilation channel 330 away from the air vent 320 is connected to the first ventilation channel 310, that is, the excess spray gas or dust entering the air vent 320 flows to the air extraction port 191 through the second ventilation channel 330 and the first ventilation channel 310 in sequence to flow out of the spray chamber 131. In this way, through the arrangement of the first ventilation channel 310 and the ventilation hole 320, it is beneficial to improve the uniformity of air extraction at various locations in the spray chamber 131, and then it is beneficial to improve the uniformity of the circulation of the spray material in the spray chamber 131, which is beneficial to improve the uniformity of the film layer deposited on the substrate 400 to be coated, and it is beneficial to improve the coating quality.

[0105] In some embodiments, as shown in FIG. 1 , the main body of the device further defines a containing chamber 132, which is located at the bottom of the spray chamber 131 along the extension direction of the first axis. A vacuum system 192 is contained in the containing chamber 132, and the vacuum system 192 is connected to the air extraction port 191 to extract air from the spray chamber 131. A butterfly valve 193 and a filter tank 194 are also provided on the connecting channel between the vacuum system 192 and the air extraction port 191. The butterfly valve 193 is used to control whether the air extraction port 191 is to be evacuated, and plays a switch role. The filter tank 194 is used to filter the spray material and dust in the gas extracted from the air extraction port 191. That is, the excess spray gas and the generated dust in the spraying process can be extracted through the air extraction port 191 to the filter tank 194 for filtration. The filter tank 194 can be filtered by physical filtration or chemical filtration. For example, physical filtration achieves separation by the difference in the pore size of the filter medium and the particle size of the impurities, while chemical filtration removes impurities by adsorbents or chemical reactions.

[0106] In some embodiments, referring to FIG. 1 , the accommodating chamber 132 can also accommodate a driving member 222 and a magnetic fluid 223, so that the driving member 222 and the magnetic fluid 223 are disposed in the accommodating chamber 132 and will not be located in the spray chamber 131 to affect the flow of the spraying airflow, thereby reducing the risk of uneven coating caused by the driving member 222 and the magnetic fluid 223 being located in the spray chamber 131. The accommodating chamber 132 also accommodates an active bottle cabinet 195, which is used to store a variety of spray materials and is connected to the corresponding spray plate to provide spray materials to the spray plate. The setting of the accommodating chamber 132 is conducive to regulating the height of the spray chamber 131, facilitating the adaptation of different numbers of substrates 400 to be coated, and facilitating the reduction of the overall size of the coating device 10, facilitating miniaturization design.

[0107] The coating device 10 provided in the present application has the following advantages:

[0108] 1. An inspection opening 140 is provided, and the inspection opening 140 and the material transport opening 150 are opened separately. There is no need to remove the material transport equipment 172 at the material transport opening 150 when inspection is required, and the substrate carrier 210 and the carrier base 220 are detachably connected, which is conducive to moving the substrate carrier 210 out of the spray chamber 131 from the inspection opening 140 for inspection, which is conducive to improving the convenience of operation during inspection and material transportation, and is conducive to improving the efficiency of inspection and coating.

[0109] 2. Multiple second mounting surfaces are provided so that the coating device 10 can be compatible with various combinations of functional parts groups, and the functional parts groups are detachably connected to the second mounting surfaces, which is beneficial for adjusting the arrangement of the functional parts groups in the spray chamber 131 according to the actual use requirements of the coating device 10, thereby improving the applicability and flexibility of the coating device 10.

[0110] 3. The first heating element and the second heating element 180 are arranged to cooperate with each other so that the substrate 400 to be coated on the substrate carrier 210 can be heated more evenly, which is beneficial to improving the coating uniformity of the coating device 10.

[0111] 4. The first ventilation channel 310 and the ventilation hole 320 are provided to make the exhaust airflow in each place in the spray chamber 131 more uniform, reducing the risk of uneven coating caused by the accumulation of spray gas or dust in the exhaust airflow, which is beneficial to improving the coating uniformity of the substrate 400 to be coated.

[0112] 5. The substrate carrier 210 can revolve around the first axis and rotate around an axis parallel to the first axis, so that it can simultaneously rotate while revolving during the coating process, which is beneficial to further improve the coating uniformity of the substrate 400 to be coated.

[0113] 6. A accommodating chamber 132 is provided to accommodate the driving component 222, the magnetic fluid 223, the vacuum system 192 and the source bottle cabinet 195, etc., so that the driving component 222, the magnetic fluid 223, the vacuum system 192 and the source bottle cabinet 195, etc. will not be located in the spray chamber 131 to affect the flow of the spraying airflow, thereby reducing the risk of uneven coating caused by the driving component 222 and the magnetic fluid 223 being located in the spray chamber 131, which is beneficial to improving the stability and uniformity of the coating.

[0114] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0115] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A coating device, characterized in that: The coating device comprises: An equipment body having a spray chamber, wherein a maintenance opening communicating with the spray chamber is provided on a top wall of the equipment body; and A substrate carrier for carrying the substrate to be coated, disposed in the spray chamber, the substrate carrier being configured to be able to be moved out of the spray chamber through the inspection opening; Among them, the inner wall of the spray chamber includes a plurality of mounting surfaces, and the plurality of mounting surfaces are arranged adjacent to each other in sequence around a first axis parallel to the bottom wall of the spray chamber and pointing toward the top wall. The plurality of mounting surfaces include a first mounting surface with a material transport opening connected to the spray chamber, and a plurality of second mounting surfaces, wherein the second mounting surfaces are equipped with a functional component group, and the substrate carrier is configured to be able to enter and exit the spray chamber from the material transport opening.

2. The coating device according to claim 1, characterized in that: The functional component group includes at least one of a shower plate, a first heating element and a plasma source, and the functional component group is detachably connected and arranged on the second mounting surface.

3. The coating device according to claim 2, characterized in that: The functional component group includes the shower plate and the plasma source, and the shower plate and the plasma source are arranged in sequence along the direction from the center to the periphery of the shower chamber; or The functional component group includes the shower plate and the first heating element, and the first heating element is arranged on one side of the shower plate; or The functional component group includes the plasma source and the first heating element, and the first heating element is arranged at one side of the plasma source.

4. The coating device according to claim 2, characterized in that: One of the two adjacent functional component groups on the two adjacent second mounting surfaces includes the shower plate, and the other one includes the plasma source.

5. The coating device according to claim 2, characterized in that: The functional component group includes the spray plate, the first heating element and the plasma source. The spray plate and the plasma source are arranged in sequence along the direction from the center to the periphery of the spray chamber, and the first heating element is arranged on one side of the plasma source.

6. The coating device according to claim 1, characterized in that: At least one of the mounting surfaces is provided with a mounting opening communicating with the spray chamber, and a closed door is provided at the mounting opening, and the closed door is configured to be switchable between a closed state and an open state; When the closed door is in a closed state, the closed door is sealed to the mounting opening; When the closed door is in an open state, the installation opening is connected to the external environment.

7. The coating device according to claim 1, characterized in that: A virtual plane is defined, the first axis is located in the virtual plane, two of the plurality of second mounting surfaces are symmetrical relative to the virtual plane, the functional component group includes a first heating element, and the two first heating elements of the two functional component groups are arranged one by one on the two second mounting surfaces that are symmetrical relative to the virtual plane.

8. The coating device according to claim 1, characterized in that: A reference plane is defined, the first axis is located in the reference plane, the intersection line of the reference plane and the mounting surface is the reference line, and the reference line is parallel to or intersects with the first axis.

9. The coating device according to claim 1, characterized in that: A plurality of the functional component groups are disposed on the same second mounting surface, and the plurality of the functional component groups on the same second mounting surface are arranged along a direction parallel to the first axis.

10. The coating device according to claim 1, characterized in that: The coating device includes a second heating element arranged on the top wall and extending in a direction parallel to the first axis, the second heating element includes an annular heater arranged around the first axis or a heating tube whose tube body extends in a direction parallel to the first axis, and the second heating element has a preset interval with the mounting surface, and the substrate carrier is arranged between the second heating element and the mounting surface.

11. The coating device according to claim 1, characterized in that: The coating device comprises a carrier base and at least one substrate carrier disposed in the spray chamber, wherein the substrate carrier is detachably connected to the carrier base, and the substrate carrier is configured to carry a plurality of substrates to be coated, and the plurality of substrates to be coated are arranged in sequence along a direction parallel to the first axis; At least one of the substrate carriers is arranged around the first axis, and the carrier base is configured to be able to drive the substrate carrier to revolve around the first axis, and the substrate carrier is configured to be able to rotate around its own axis parallel to the first axis; The substrate carrier is provided with a handle facing the top wall, and the substrate carrier can be moved out of the spray chamber through the inspection opening by the handle.

12. The coating device according to claim 11, characterized in that: The functional part group includes a spray plate and / or a plasma source, and at least one of the multiple mounting surfaces opposite to the spray plate and / or the plasma source is provided with an exhaust port, and the exhaust port is arranged on a side of the mounting surface close to the bottom wall, and the number of the exhaust ports is at least one.

13. The coating device according to claim 12, characterized in that: A first ventilation channel is defined between the carrier base and the inner side wall of the spray chamber. The first ventilation channel is arranged around the first axis and communicates between the spray chamber and the air extraction port.

14. The coating device according to claim 12, characterized in that: The carrier base is provided with a plurality of ventilation holes, which are arranged on the carrier base in a direction parallel to the first axis and connected between the spray chamber and the air suction port. The plurality of ventilation holes are arranged around the first axis, and the substrate carrier is configured to be installed at the ventilation holes.

15. The coating device according to claim 14, characterized in that: The carrier base comprises a bearing member and a driving member, the bearing member is used to bear the substrate carrier, and the driving member is transmission-connected to the bearing member to drive the bearing member to rotate around the first axis; The bearing member is provided with the vent hole along a direction parallel to the first axis.

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