9results about How to "Improve coating uniformity" patented technology

The application relates to the field of semiconductor process equipment, in particular to a device for large-capacity liquid medicine storage of semiconductor equipment and a liquid medicine supply system. The device comprises a liquid storage tank provided with a liquid storage cavity, the upper portion of the liquid storage cavity is provided with a cleaning cavity in fluid communication with the liquid storage cavity; the internal volume of the cleaning cavity is smaller than that of the liquid storage cavity; a liquid inlet pipe is arranged to introduce liquid medicine into the liquid storage cavity of the liquid storage tank from the outside; a liquid outlet pipe is arranged at the bottom of the liquid storage cavity and connects the liquid storage cavity of the liquid storage tank to a liquid source; a waste pipe is arranged at the top of the cleaning cavity to discharge the liquid medicine bubbles in the cleaning cavity; and a vent pipe is arranged to connect the cleaning cavity of the liquid storage tank with the outside to keep the air pressure in the cleaning cavity of the liquid storage tank consistent with the ambient air pressure. The application improves the separation efficiency of large-capacity liquid medicine and gas, reduces the probability of generating bubbles in the liquid medicine, improves the uniformity of wafer surface coating, and can meet the high-integration equipment layout.

This invention discloses a multi-level carbon-coated ternary composite material and its preparation method, comprising the following steps: S1: Nanoscale wet grinding of single-crystal NCM and expanded graphite, allowing NCM to be inserted between the expanded graphite layers, followed by drying to obtain mixture 1; S2: Mixing mixture 1 from S1 with medium-temperature pitch to obtain mixture 2; S3: Low-temperature sintering of mixture 2 obtained in S2, followed by crushing to obtain the multi-level carbon-coated ternary composite material. This invention embeds single-crystal NCM into the expanded graphite layers through grinding, improving the electronic conductivity of NCM and enhancing rate performance. The expanded graphite adapts to the volume expansion of single-crystal NCM during charge and discharge, maintaining close contact between materials, thereby improving cycle life. The secondary coating of the material with low-softening-point medium-temperature pitch further reduces the contact area between single-crystal NCM and the electrolyte, improving cycle stability. The medium-temperature pitch can complete carbonization at a lower temperature, avoiding the collapse of the NCM structure during high-temperature carbonization.

The application discloses a battery piece coating device. The device comprises a coating workbench, a hollow area matched with the size of the battery piece is arranged on the coating workbench; a battery piece bearing platform matched with the size of the hollow area and capable of being embedded into the hollow area is used for bearing the battery piece; a coating assembly is used for performing the operation of coating the photosensitive glue on the battery piece; a driving assembly is connected with the battery piece bearing platform and used for moving the battery piece bearing platform to a preset coating position of the hollow area to bear the battery piece to be coated and moving the battery piece bearing platform to a discharging position of the battery piece after the coating of the battery piece is completed. The battery piece coating device provided by the application does not need to perform vacuum adsorption on the battery piece during coating, thereby avoiding the problem that the thickness of the photosensitive glue coated on the adsorption position and the non-adsorption position is different due to the vacuum adsorption of the battery piece, and the coating uniformity of the battery piece is improved.

This utility model discloses a circular multi-chamber continuous coating device. The vacuum chamber contains circularly distributed workpiece entry / exit stations and multiple coating stations. A workpiece transmission mechanism connects the workpiece entry / exit stations to each coating station. Each coating station is equipped with a dual-axis moving magnetron sputtering target, which includes a target material, a magnetic field assembly, a translation mechanism, and a rotation mechanism. The target material is positioned above the coating station, and the magnetic field assembly is positioned above the target material. The magnetic field assembly is equipped with the translation and rotation mechanisms. This circular multi-chamber continuous coating device, by setting workpiece entry / exit stations and multiple coating stations within a circular vacuum chamber, can achieve multi-layer coating of workpieces. Simultaneously, by setting a target material with both rotating and translating magnetic fields at each coating station, it changes the traditional coating process where the magnetic field is stationary or can only move in one direction. This effectively improves the uniformity of workpiece coating while reducing target material consumption and avoiding significant waste of target material.

The utility model belongs to fruit stalk mildewproof technical field provides fruit stalk mildewproof coating drying integration device, including support frame, the inner wall fixed connection of support frame has the coating box, the inner wall fixed connection of coating box has water level sensor, still includes: coating mechanism, coating mechanism includes fixedly connected on the motor of support frame side wall, the output fixed connection of motor has the conveying roller, the outer wall of conveying roller is equipped with the conveyer belt, and the outer wall of conveyer belt is equipped with the mounting hole. The utility model discloses when the coating and drying treatment of fruit stalk are all completed, and the carrying plate continues to run to the discharge station with the conveyer belt. At this moment, the conveyer belt drives the U-shaped slide rod and the carrying plate to overturn, and in the carrying plate overturning process, the fruits and vegetables are separated from the placing notch due to the action of gravity, and the automatic unloading operation is completed, which not only effectively avoids manual intervention, but also improves the automation level of the equipment.

This disclosure provides a silicon-carbon anode sheet, its preparation method, and a soft-pack lithium battery. The preparation method of the silicon-carbon anode sheet involves: dissolving water-soluble conductive polyaniline in an organic solvent, mixing it with CMC adhesive, and then mixing it with silicon-carbon slurry and a multifunctional organophosphonic acid crosslinking agent (mixing temperature: 15℃-25℃) to obtain an anode slurry; coating the anode slurry onto a negative current collector to obtain a silicon-carbon anode sheet semi-finished product; and sequentially subjecting the silicon-carbon anode sheet semi-finished product to pre-baking (90℃-120℃) and vacuum drying (70℃-90℃, time: 2h-5h) to obtain the silicon-carbon anode sheet. This method, by adding multifunctional organophosphonic acid crosslinking agents and water-soluble conductive polyaniline, facilitates the formation of a three-dimensional conductive suppression network with high conductivity, uniform and continuous conductivity, strong toughness and strong self-healing ability. This enhances the constraint on the negative electrode slurry, reduces the volume expansion rate to <15%, inhibits silicon-carbon cracking, and improves the self-healing ability of the three-dimensional conductive suppression network, thus broadening the application of high-capacity silicon-carbon negative electrode sheets in soft-pack lithium batteries.

This invention proposes an electrode, a battery, and a mechanical device. The electrode includes a current collector, with an active material layer on at least one side. Strip-shaped conductive fibers are distributed on the surface of at least one side of the current collector, and these fibers are distributed within the active material layer. This invention utilizes the distributed strip-shaped conductive fibers within the active material layer, where the fibers are tightly bonded to the current collector, forming a three-dimensional conductive network. The active material and the conductive network form a continuous electron channel, achieving efficient electron transfer, improving the battery's charge / discharge rate, and reducing heat generation.

The utility model discloses a kind of glass substrate surface treatment liquid medicine automatic coating devices, relate to glass processing technical field.The utility model includes cleaning mechanism, the rear side of liquid tank left wall is fixed with motor, motor's power output shaft is fixed with rotating roller, rotating roller's outside is fixed with bristle, the front of rotating roller is equipped with with the fixed gas outlet box of liquid tank;The upper portion of conveyor is equipped with liquid distribution box, coating assembly includes rotating tube, the lower end of rotating tube is fixed with hollow disc, the lower side of hollow disc is equipped with a plurality of installation box in circular array, the upper wall of installation box is fixed with the connecting pipe fixed with hollow disc, the lower side in installation box inside is fixed with coating brush by bolt.The utility model makes bristle rotate to clean conveying belt by motor, avoid sundries to influence subsequent glass substrate conveying, and by conveying pump work, liquid medicine drenches coating brush, utilize coating brush rotation to coat the surface of glass substrate, improve coating uniformity, also avoid liquid medicine splashing.

This invention relates to the field of vacuum coating technology, specifically to a band saw blade coating device and its coating process. The device includes a vacuum coating chamber, a drive mechanism with its output end located within the vacuum coating chamber, and several linkage mechanisms. A support frame, connected to the drive mechanism, is installed within the vacuum coating chamber. The support frame includes a rotatable central column. Each linkage mechanism includes a horizontal shaft rotatably connected to the central column. An inclined shaft, forming an angle with the horizontal shaft's length direction, is mounted on the inclined shaft. A rotating bearing is sleeved on the inclined shaft, and a clamping mechanism for holding the band saw blade roll is sleeved on the rotating bearing. Within the vacuum coating chamber, the band saw blade roll can not only revolve but also change its lateral and vertical angles, allowing the saw teeth to face the target material at more angles. This effectively overcomes the shadow effect caused by the existing technology's limited revolving and rotating capabilities, which results in coating blind spots and uneven film thickness on the saw tooth side. This improves the coating uniformity of all parts of the saw tooth side, especially the front tooth side.