Mechanical arm air passage detection tool and use method

Abstract

The invention discloses a mechanical arm air passage detection tool and a use method. The tool comprises a base; the plurality of transfer ventilation nozzles are arranged above the base, and the transfer ventilation nozzles are connected with air connecting pipes; the supporting frame is detachably connected with the base, and the supporting frame is used for packaging the switching ventilation nozzle; and the upper cover is fixedly connected with the base. The using method comprises the steps that the transfer ventilation nozzle is placed in the through groove of the base, the position of the transfer ventilation nozzle is adjusted, and the transfer ventilation nozzle is fixed to the base; connecting an air passage interface of the mechanical arm to be tested with the switching ventilation nozzle, and fixing the mechanical arm through the support frame and the upper cover; the transfer ventilation nozzle is connected with the air receiving pipe, the air receiving pipe is connected with the measuring equipment, and the air channel of the mechanical arm is detected through the measuring equipment. The air channel in the mechanical arm can be accurately detected, it is guaranteed that the air output of the adsorption opening is reasonable and uniform, and the probability of the wafer sliding phenomenon in the wafer transferring process is effectively reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of detection tooling, and in particular to a mechanical arm airway detection tooling and a use method thereof. Background Art

[0002] With the rapid development of semiconductors, semiconductor chips are increasingly used in various industries. In the process of semiconductor chip manufacturing, semiconductor wafers need to be transferred between various process links. Therefore, the wafer, as the carrier of the chip, is very critical in its transportation process. The transfer of semiconductor wafers is usually completed by a robotic arm. Therefore, it is particularly important for the robotic arm to be able to lift and transport the wafers steadily.

[0003] Robotic arms are divided into clamping type and adsorption type. If the ventilation volume of the adsorption type arm is unqualified or uneven, slippage will occur during the wafer transfer process. Therefore, it is necessary to test whether the internal airway structure of the fixture test arm is reasonable and whether the ventilation volume is uniform.

[0004] In the prior art, the jig for testing the robotic arm has the disadvantages of being large in size, having a single applicability or having a poor measurement effect. Summary of the invention

[0005] The purpose of the present invention is to solve the above-mentioned problem and provide a mechanical arm airway detection tool and a method of use.

[0006] In order to achieve the above-mentioned purpose, the present invention specifically adopts the following technical solutions:

[0007] A mechanical arm airway detection tooling, comprising a base;

[0008] A plurality of transfer vent nozzles are arranged above the base, and the transfer vent nozzles are connected with air connection pipes;

[0009] A support frame, detachably connected to the base, and used to encapsulate the adapter vent nozzle;

[0010] An upper cover, fixedly connected to the base;

[0011] There is a cavity between the adapter ventilation nozzle and the top wall of the support frame, and the cavity is used to insert the airway interface of the robotic arm to be tested. When in use, the airway interface is assembled with the corresponding adapter ventilation nozzle, and the air pipe is connected to an external measuring instrument to judge the airway performance of the robotic arm to be tested.

[0012] As a further description of the above technical solution, a through groove is provided on the surface of the base, and the through groove is adapted to the bottom of the adapter ventilation nozzle.

[0013] As a further description of the above technical solution, the upper surface of the base is provided with scale lines, and the scale lines are used to locate the fixed position of the adapter ventilation nozzle.

[0014] As a further description of the above technical solution, at least two groups of the adapter vent nozzles are provided, and each of the adapter vent nozzles is connected to the air connecting pipe via a copper pagoda joint.

[0015] As a further description of the above technical solution, a sealing groove is provided on the end surface of the adapter vent nozzle, and a sealing ring is provided in the sealing groove.

[0016] As a further description of the above technical solution, a locking block is provided at the bottom of the base, and the locking block is connected to the bottom of the adapter vent nozzle to fix the adapter vent nozzle to the base.

[0017] As a further description of the above technical solution, the end surface of the adapter ventilation nozzle is provided with a plurality of positioning holes 1, and the lower surface of the robot arm to be tested is provided with a plurality of through holes 1, and the positioning holes 1 are adapted to the through holes 1.

[0018] As a further description of the above technical solution, the base, the support frame and the upper cover are all provided with mounting holes, and the mounting holes are used in conjunction with screws to assemble the upper cover, the support frame and the base.

[0019] As a further description of the above technical solution, the base is a stepped structure.

[0020] A method for using the robotic arm airway detection tooling according to any one of the above items, the specific steps comprising:

[0021] S100, placing the transfer vent nozzle in the through groove of the base, adjusting the position of the transfer vent nozzle, and fixing the transfer vent nozzle on the base;

[0022] S200, connecting the airway interface of the robot arm to be tested to the adapter ventilation nozzle, and fixing the robot arm through a support frame and an upper cover;

[0023] S300, connecting the adapter ventilation nozzle to an air connection pipe, connecting the air connection pipe to a measuring device, and detecting the airway of the robot arm through the measuring device.

[0024] The beneficial effects of the present invention are as follows:

[0025] The robot arm airway detection tooling can position and connect the airway interface with the adapter ventilation nozzle through the cooperation of the support frame, base and upper cover, thereby improving the detection efficiency and detection effect of the airway of the suction-type arm robot arm. The fixture can be used to accurately detect the internal airway of the robot arm to ensure that the air output of the suction port is reasonable and uniform, effectively reducing the probability of slippage during wafer transfer.

[0026] In order to more clearly illustrate the structural features and functions of the present invention, the present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a three-dimensional picture of the airway inspection tooling;

[0028] Figure 2 It is an exploded view of the airway inspection tooling;

[0029] Figure 3 It is a flow chart of the method of using the airway detection tooling.

[0030] Figure numerals: 1. Upper cover; 2. Support frame; 3. Base; 4. Adapter vent; 5. Locking block; 6. Positioning pin; 7. Sealing ring; 8. Copper pagoda connector; 9. Air pipe; 10. M5 hexagon socket screw; 11. M4 hexagon socket screw; 12. M3 hexagon socket screw; 13. Adsorption type robotic arm. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the embodiments of the present invention more clear, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0032] refer to Figure 1 , a robot arm airway detection tooling, including a base 3, a plurality of adapter vent nozzles 4 are arranged on the upper surface of the base 3, and one end of the adapter vent nozzle 4 is connected to an air connection pipe 9. A support frame 2 is detachably connected to the top of the base 3, and there is a space between the support frame 2 and the base 3, and the space can be used to encapsulate the adapter vent nozzle 4 and the airway interface of the robot arm to be tested. An upper cover 1 is fixedly connected to the upper surface of the base 3, and the upper cover 1 and the base 3 surround and fix the adapter vent nozzle 4 and the support frame 2. Optionally, the adapter vent nozzle 4 is connected to the air connection pipe 9 through a copper pagoda joint 8, and a countersunk hole is opened in the center of the adapter vent nozzle 4, which is connected to the side threaded hole, and the side threaded hole is screwed and tightened with one end of the copper pagoda joint 8 thread to input the gas in the air connection pipe 9 into the airway of the adsorption type robot arm 13 through the adapter vent nozzle 4.

[0033] Among them, the air pipe 9 is connected to an external measuring device (i.e., a measuring instrument). After the airway interface of the robotic arm to be tested is connected to the corresponding adapter ventilation nozzle 4 and the sealing of the connection is ensured, the measuring equipment is used for detection. Through the measurement data value of the measuring instrument, it is judged whether the airway structure of the airway of the robotic arm to be tested (i.e., the adsorption type robotic arm 13) is reasonable, whether the ventilation volume is reasonable, and whether the air outlet of each vent is uniform.

[0034] The present invention adopts the above-mentioned airway detection tooling, and through the cooperation of the support frame 2, the base 3 and the upper cover 1, the airway interface and the adapter ventilation nozzle 4 can be positioned and connected, thereby improving the detection efficiency and detection effect of the airway of the suction-type arm robot arm. The fixture can be used to accurately detect the airway inside the robot arm, ensuring that the air output of the suction port is reasonable and uniform, and effectively reducing the probability of slippage during the wafer transfer process.

[0035] refer to Figure 2 , a through groove is provided on the surface of the base 3, and the through groove is adapted to the bottom of the adapter vent nozzle 4. Specifically, a protruding structure is formed at the bottom of the adapter vent nozzle 4, and the protruding structure is a cube, which can be inserted into the through groove and can slide left and right along the through groove. Therefore, the position of the adapter vent nozzle 4 on the base 3 can be adjusted to adjust the relative position between the two adapter vent nozzles 4, and the ventilation interface of different types of adsorption-type mechanical arms 13 can be adapted to improve the applicability of the airway detection tooling. Optionally, a locking block 5 is provided at the bottom of the base 3, and the locking block 5 is connected to the bottom of the adapter vent nozzle 4. Specifically, the locking block 5 is fixed to the bottom of the adapter vent nozzle 4 by an M3 hexagon socket screw 12.

[0036] Optionally, the end face of the adapter vent nozzle 4 is provided with a sealing groove, and an O-ring 7 is provided in the sealing groove, which can ensure that the vent of the adapter vent nozzle 4 and the mechanical arm are sealed and leak-proof, thereby improving the accuracy of subsequent airway detection. A positioning hole 1 is provided on the end face of the adapter vent nozzle 4, and the position of the positioning hole 1 corresponds to the four through holes 1 of the adsorption-type mechanical arm 13. When in use, since the ventilation interface of the arm is placed downward, the ventilation interface cannot be accurately connected with the ventilation port of the adapter vent nozzle 4 by visual blind operation. By setting the positioning hole 1 to match the through hole 1, and inserting the positioning pin 6 into the positioning hole 1 and the through hole 1, the adapter vent nozzle 4 can be quickly connected with the ventilation interface of the mechanical arm.

[0037] Optionally, scale lines are provided on the upper surface of the base 3, through which the relative positions of the two adapter ventilation nozzles 4 can be adjusted manually and accurately, and can be accurately adapted to mechanical arms of different sizes.

[0038] Optionally, the base 3 is in a stepped shape, wherein the scale line is set at the edge of the higher step structure, and the transfer vent nozzle 4 is set in the middle of the lower step structure. When the transfer vent nozzle 4 is moved, the position of the transfer vent nozzle 4 or the relative position of the two transfer vent nozzles 4 can be calibrated by the scale line. At the same time, when the airway detection tool is in use, the support frame 2 is fixed above the transfer vent nozzle 4, that is, the support frame 2 is connected to the surface of the lower step structure. After the support frame 2 is fixedly installed, its overall height is flush with the higher step structure, or slightly higher. However, the volume of the entire airway detection tool is reduced to a certain extent, making it more convenient to use.

[0039] Optionally, the structure of the support frame 2 includes a horizontal support plate and longitudinal plates fixed at both ends of the support plate, and the space between the support plate and the longitudinal plates on both sides is used to encapsulate the adapter ventilation nozzle 4 and the robot arm airway interface.

[0040] Optionally, the base 3, the support frame 2 and the upper cover 1 are all provided with mounting holes, and the mounting holes cooperate with screws to assemble the upper cover 1, the support frame 2 and the base 3. Specifically, the support frame 2 is fixedly connected to the base 3 by M4 hexagon socket screws 11. The upper cover 1 is locked to the upper surface of the base 3 by M5 hexagon socket screws 10 in the mounting holes.

[0041] refer to Figure 3 The present disclosure provides a method for using a robotic arm airway detection tooling, and the specific steps are as follows:

[0042] S100, placing the transfer vent nozzle 4 in the through groove of the base 3, adjusting the position of the transfer vent nozzle 4, and fixing the transfer vent nozzle 4 on the base 3. Specifically, scale lines are laser engraved on the base 3, and the positions of the two transfer vent nozzles 4 can be flexibly adjusted based on the scale lines.

[0043] S200, connect the airway interface of the robot arm to be tested with the adapter vent nozzle 4, and fix the robot arm through the support frame 2 and the upper cover 1. Specifically, put two locking blocks 5 at the bottom of the base 3, and fix and lock them with M3 hexagon socket bolts. The end face of the adapter vent nozzle 4 is provided with positioning holes, and the positions of the positioning holes correspond to the four through holes on the adsorption type robot arm 13 one by one. Then, place the adsorption type robot arm 13 on the base 3, insert four positioning pins 6, and after positioning, align and press the upper cover 1 of the fixture, and use M5 hexagon socket screws 10 to lock the upper cover 1 and the base 3, so that the adsorption type robot arm 13 can be pressed.

[0044] S300, connect the adapter ventilation nozzle 4 to the air connecting pipe 9, connect the air connecting pipe 9 to the measuring equipment, and detect the airway of the robot arm through the measuring equipment to determine whether the airway structure of the adsorption type robot arm 13 is reasonable, whether the ventilation volume is qualified, and whether the air outlet of each vent is uniform.

[0045] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A mechanical arm airway detection tool, characterized in that: Including base; A plurality of transfer vent nozzles are arranged above the base, and the transfer vent nozzles are connected with air connection pipes; A support frame, detachably connected to the base, and used to encapsulate the adapter vent nozzle; An upper cover, fixedly connected to the base; There is a cavity between the adapter ventilation nozzle and the top wall of the support frame, and the cavity is used to insert the airway interface of the robotic arm to be tested. When in use, the airway interface is assembled with the corresponding adapter ventilation nozzle, and the air pipe is connected to an external measuring instrument to judge the airway performance of the robotic arm to be tested.

2. The mechanical arm airway detection tooling according to claim 1 is characterized in that: A through groove is provided on the surface of the base, and the through groove is matched with the bottom of the adapter vent nozzle.

3. The mechanical arm airway detection tooling according to claim 1 is characterized in that: The upper surface of the base is provided with scale lines, and the scale lines are used to locate the fixed position of the adapter ventilation nozzle.

4. The mechanical arm airway detection tooling according to claim 1, characterized in that: At least two groups of the transfer vent nozzles are provided, and each of the transfer vent nozzles is connected to the air connection pipe via a copper pagoda joint.

5. The mechanical arm airway detection tooling according to claim 1, characterized in that: The end surface of the adapter vent nozzle is provided with a sealing groove, and a sealing ring is provided in the sealing groove.

6. The mechanical arm airway detection tooling according to claim 1, characterized in that: A locking block is provided at the bottom of the base, and the locking block is connected to the bottom of the adapter vent nozzle to fix the adapter vent nozzle to the base.

7. The mechanical arm airway detection tooling according to claim 1, characterized in that: The end surface of the adapter ventilation nozzle is provided with a plurality of positioning holes 1, and the lower surface of the robot arm to be tested is provided with a plurality of through holes 1, and the positioning holes 1 are matched with the through holes 1.

8. The mechanical arm airway detection tooling according to claim 1, characterized in that: The base, the support frame and the upper cover are all provided with mounting holes, and the mounting holes cooperate with screws to assemble the upper cover, the support frame and the base.

9. The mechanical arm airway detection tooling according to claim 1, characterized in that: The base is a stepped structure.

10. A method for using the mechanical arm airway detection tooling according to any one of claims 1 to 9, characterized in that: The specific steps include: S100, placing the transfer vent nozzle in the through groove of the base, adjusting the position of the transfer vent nozzle, and fixing the transfer vent nozzle on the base; S200, connecting the airway interface of the robot arm to be tested to the adapter ventilation nozzle, and fixing the robot arm through a support frame and an upper cover; S300, connecting the adapter ventilation nozzle to an air connection pipe, connecting the air connection pipe to a measuring device, and detecting the airway of the robot arm through the measuring device.

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