Dust-free room gas pollution online monitoring method, device, equipment and medium

Abstract

The invention relates to a dust-free room gas pollution online monitoring method, device, equipment and medium, and belongs to the field of gas detection. The method comprises the following steps: collecting a dust-free room gas sample; obtaining a to-be-detected solution of the dust-free room through the gas sample of the dust-free room; acquiring the content of dust-free room pollutants in the to-be-detected solution of the dust-free room; outputting a dust-free room pollution instruction according to the pollutant content of the dust-free room, wherein the dust-free room pollution instruction comprises a pollution instruction and a cleaning instruction; when the control terminal receives a pollution instruction, obtaining a gas pollution source of the dust-free room through an improved gas source positioning method; and gas in the dust-free room is discharged into a matched adsorption device from a gas pollution source of the dust-free room. According to the invention, an air sample which is difficult to directly detect is converted into liquid which is stable in sampling, not easy to be polluted by the outside and low in detection instrument cost through ultrapure water, various defects of high-difficulty air direct sampling, analysis and detection and limitation of types of detected substances are overcome, and a pollution source can be quickly positioned and measures can be taken when pollution exceeds the standard.

Description

Technical Field

[0001] The present invention belongs to the technical field of gas detection, and in particular relates to a method, device, equipment and medium for online monitoring of gas pollution in a clean room. Background Art

[0002] The air quality in the clean room is required to reach the ion level, but the pollution entering from the fresh air inlet of the clean room and the pollution generated by the chemicals and special gases used in the production inside the clean room will significantly pollute the clean room air, causing the quality of the products to decline or even be scrapped. If the pollutants cannot be monitored in time, long-term pollution will cause a devastating blow to large-scale mass-produced products, and will also make the clean room environment permanently unable to recover.

[0003] At present, most clean rooms adopt the monitoring method of collecting air samples and then sending them to the laboratory for analysis and testing. However, this method has disadvantages such as high difficulty in collecting air samples, easy contamination of sampling bottles, inability to analyze and test in time after sampling, and long waiting time for testing. These disadvantages can easily cause distortion of results and reduce timeliness, significantly affecting the work of the clean room. In addition, there is a lack of effective means to locate the source of pollution and curb the further deterioration of clean room pollution after detection. Summary of the invention

[0004] In order to solve the above problems existing in the prior art, the present invention provides a method, device, equipment and medium for online monitoring of gas contamination in a clean room.

[0005] The purpose of the present invention can be achieved through the following technical solutions: A method for online monitoring of clean room gas pollution, the implementation of which comprises the following steps: Collect clean room gas samples; Obtaining a clean room test solution through the clean room gas sample; Obtaining the content of clean room pollutants in the clean room test solution; Outputting a clean room pollution instruction according to the clean room pollutant content, wherein the clean room pollution instruction includes a pollution instruction and a cleaning instruction; When the control terminal receives the pollution instruction, the source of the clean room gas pollution is obtained by improving the gas source positioning method; The gas in the clean room is discharged into the matching adsorption device from the source of the clean room gas pollution.

[0006] Preferably, collecting clean room gas samples includes: A pollution monitoring cycle is preset, and the clean room gas sample is collected through an air sampling pipeline according to the pollution monitoring cycle, and the air sampling pipeline is covered with nanopores.

[0007] Preferably, obtaining the clean room test solution through the clean room gas sample comprises: The clean room gas sample is pressurized to dissolve into ultrapure water through the nanopores to obtain the clean room test solution.

[0008] Preferably, outputting a clean room pollution instruction according to the clean room pollutant content comprises: Presetting a clean room pollutant content threshold, and obtaining the clean room pollution instruction by comparing the clean room pollutant content threshold and the clean room pollutant content; When the pollutant content in the clean room is greater than or equal to the pollutant content threshold in the clean room, the pollution instruction is output to the control terminal; when the pollutant content in the clean room is less than the pollutant content threshold in the clean room, the cleaning instruction is output to the control terminal.

[0009] Preferably, the method of obtaining the clean room gas pollution source by improving the gas source positioning method comprises: Randomly selecting a starting detection point in the clean room, and obtaining a maximum entropy reduction by updating the position of the starting detection point; When the entropy reduction reaches the maximum entropy reduction, the location of the starting detection point is the source of the clean room gas pollution.

[0010] Preferably, randomly selecting a starting detection point in the clean room, and obtaining the posterior probability distribution function entropy and the maximum entropy reduction of the clean room gas concentration by updating the position of the starting detection point comprises: Simulating a gas concentration field diffusion equation generated by the clean room gas pollution source at the starting detection point; Obtaining the gas concentration field by solving the gas concentration field diffusion equation in two-dimensional space; Setting a search radius, and obtaining a detection probability of the starting detection point within the search radius through the gas concentration field; The starting detection point continuously moves within the search radius, and performs a gas detection each time it moves to obtain a possible trajectory of the starting detection point; Normalizing the possible trajectory to obtain a posterior probability distribution function at time T; Obtaining the posterior probability distribution function entropy of the posterior probability distribution function at time T; The maximum entropy reduction is calculated according to the entropy of the posterior probability distribution function.

[0011] Preferably, the expression of the possible trajectory is , where L is the possible trajectory, t is the time point when the pollutant is detected, and r t is the position of the starting detection point at time t, P(r t |r 0) is the detection probability at time t, t' is the time point when no pollutant is detected, r t' is the position of the starting detection point at time t', Q is the radius function of the gas mass, which is a constant value, and r t' is the position of the starting detection point at time t', H is the number of times the pollutant is detected, and H' is the number of times the pollutant is not detected.

[0012] An online monitoring device for clean room gas pollution, used to perform the above-mentioned online monitoring method for clean room gas pollution, characterized by comprising a sample collection module, a pollution detection module, and a source positioning module; The sample collection module is used to collect clean room gas samples, and obtain the clean room test solution through the clean room gas samples; The pollution detection module is used to obtain the content of clean room pollutants in the clean room test solution through a water sample analyzer, and output a clean room pollution instruction according to the content of the clean room pollutants, wherein the clean room pollution instruction includes a pollution instruction and a cleaning instruction; The source positioning module is used to control the terminal to obtain the clean room gas pollution source by improving the gas source positioning method when receiving the pollution instruction, and discharge the gas in the clean room into the matching adsorption device from the clean room gas pollution source.

[0013] An electronic device comprises a memory, a processor and a computer program stored in the memory and executable on the processor, wherein the processor implements the above-mentioned method for online monitoring of clean room gas contamination when executing the program.

[0014] A storage medium containing computer executable instructions, wherein the computer executable instructions are used to execute the above-mentioned method for online monitoring of clean room gas contamination when executed by a computer processor.

[0015] The beneficial effects of the present invention are: (1) By collecting clean room gas samples and obtaining clean room test solutions, and analyzing the content of clean room pollutants in the clean room test solutions, the sample collection process is simplified, and the samples are not easily contaminated. Real-time analysis and testing can be performed, which greatly shortens the waiting time and significantly improves the accuracy and timeliness of the results, which is conducive to the implementation of subsequent clean room pollution monitoring measures; (2) By improving the gas source positioning method, the source of clean room gas pollution can be obtained, pollution can be controlled from the source, and the further deterioration of clean room pollution can be effectively prevented; (3) By dissolving air samples that are difficult to detect directly in ultrapure water, the samples are converted into liquids that are stable in sampling, not susceptible to external contamination, have low detection instrument costs, and are easy to monitor and analyze, thus overcoming the shortcomings of the difficult direct air sampling and analysis. (4) Pressurizing the clean room gas sample to dissolve into ultrapure water through the nanopores, where the nanopores can improve the efficiency of extracting air pollutants; (5) In media like air, gas diffusion creates random, incoherent gas patches, making it impossible to determine the concentration gradient and therefore unable to form guidance to the source. Locating the source of clean room gas contamination by maximum entropy reduction is a gradient-free method that can adapt to the situation of non-steady gradients in leaks. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0017] Figure 1 The present invention is a flow chart of the steps of a method for online monitoring of clean room gas contamination. DETAILED DESCRIPTION

[0018] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation methods, structures, features and effects of the present invention are described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0019] The working principle and use process of the present invention: See also Figure 1 , a method for online monitoring of clean room gas contamination, comprising: S1: Collect clean room gas samples; S2: obtaining a clean room test solution through the clean room gas sample; S3: obtaining the content of clean room pollutants in the clean room test solution through a water sample analyzer, wherein the water sample analyzer includes but is not limited to an ion chromatograph, a conductivity meter, and a total organic carbon analyzer; S4: outputting a clean room pollution instruction according to the clean room pollutant content, wherein the clean room pollution instruction includes a pollution instruction and a cleaning instruction; S5: When the control terminal receives the pollution instruction, the clean room gas pollution source is obtained by improving the gas source positioning method; S6: Exhausting the gas in the clean room from the source of the clean room gas pollution into a matching adsorption device.

[0020] In this embodiment, collecting the clean room gas sample can be specifically implemented by the following steps: A pollution monitoring cycle is preset, and the clean room gas sample is collected through an air sampling pipeline according to the pollution monitoring cycle. The air sampling pipeline is covered with nanopores to improve the efficiency of extracting air pollutants.

[0021] In this embodiment, obtaining the clean room test solution through the clean room gas sample can be specifically implemented through the following steps: The clean room gas sample is pressurized to dissolve into ultrapure water through nanopores to obtain the clean room test solution. The air sample that is difficult to directly detect is dissolved in ultrapure water and converted into a liquid with stable sampling, not easily polluted by the outside world, low detection instrument cost and easy monitoring and analysis, thereby solving the shortcomings of the highly difficult direct air sampling and analysis inspection.

[0022] In this embodiment, a clean room pollution instruction is output according to the clean room pollutant content, and the clean room pollution instruction includes a pollution instruction and a cleaning instruction, which can be specifically implemented by the following steps: Presetting a clean room pollutant content threshold, and obtaining the clean room pollution instruction by comparing the clean room pollutant content threshold and the clean room pollutant content; When the pollutant content in the clean room is greater than or equal to the pollutant content threshold in the clean room, the pollution instruction is output to the control terminal; when the pollutant content in the clean room is less than the pollutant content threshold in the clean room, the cleaning instruction is output to the control terminal.

[0023] In this embodiment, when the control terminal receives the pollution instruction, the clean room gas pollution source is obtained by improving the gas source positioning method, which can be implemented by the following steps: S501: randomly selecting a starting detection point in the clean room, and obtaining the posterior probability distribution function entropy and the maximum entropy reduction of the clean room gas concentration by updating the position of the starting detection point; S502: When the entropy reduction reaches the maximum entropy reduction, the position of the starting detection point is the source of the clean room gas contamination. Locating the source of the clean room gas contamination by the maximum entropy reduction is a non-gradient method, which can adapt to the situation of unstable gradient in leakage and overcome the problem that the diffusion of gas in a medium such as air will cause random and incoherent gas patches, making it impossible to determine the concentration gradient and thus unable to form guidance on the source.

[0024] In this embodiment, a starting detection point is randomly selected in the clean room, and the posterior probability distribution function entropy and the maximum entropy reduction of the clean room gas concentration are obtained by updating the position of the starting detection point. Specifically, the following steps can be performed: S501-1: Simulate the gas concentration field diffusion equation generated by the clean room gas pollution source at the starting detection point. The mathematical description of the gas concentration field diffusion equation is: , where V is the average air velocity in the clean room, is the gradient operator, c(r|r 0) is the gas concentration field, which indicates the gas concentration generated by the clean room gas pollution source at the starting detection point, r is the starting detection point position, r 0 is the location of the clean room gas pollution source, D is the gas diffusion rate, is the gas survival time, R is the gas release rate, is the impact function; S501-2: Obtain the solution of the gas concentration field diffusion equation in two-dimensional space: , where (yy 0 ) is the longitudinal distance between the starting detection point and the source of clean room gas pollution, K 0 is the zero-order modified Bessel function; S501-3: Set the search radius and obtain the detection probability of the starting detection point within the search radius. The detection probability is the probability of detecting pollutants within the search radius. The mathematical description of the detection probability is: , where P(r|r 0 ) is the detection probability, a is the search radius; S501-4: The starting detection point moves continuously within the search radius, and performs a gas detection each time it moves. The possible trajectory of the starting detection point is: , where L is the possible trajectory, t is the time point when the pollutant is detected, and r t is the position of the starting detection point at time t, P(r t |r 0 ) is the detection probability at time t, t' is the time point when no pollutant is detected, r t' is the position of the starting detection point at time t', Q is the radius function of the gas mass, which is a constant value, and r t' is the position of the starting detection point at time t', H is the number of times the pollutant is detected, and H' is the number of times the pollutant is not detected; S501-5: Normalize the possible trajectory to obtain the posterior probability distribution function at time T: , where P T is the posterior probability distribution function, T time includes t time and t' time, P(r T |r 0 ) is the detection probability at time T; S501-6: Obtain the entropy of the posterior probability distribution function of the posterior probability distribution function at time T: , where S T is the entropy of the posterior probability distribution function; S501-7: Calculate the maximum entropy reduction according to the entropy of the posterior probability distribution function, and the calculation formula is: , where maxS is the maximum entropy reduction.

[0025] An online monitoring device for clean room gas pollution, comprising a sample collection module, a pollution detection module, and a source positioning module; The sample collection module is used to collect clean room gas samples, and obtain the clean room test solution through the clean room gas samples; The pollution detection module is used to obtain the content of clean room pollutants in the clean room test solution through a water sample analyzer, and output a clean room pollution instruction according to the content of the clean room pollutants, wherein the clean room pollution instruction includes a pollution instruction and a cleaning instruction; The source positioning module is used to control the terminal to obtain the clean room gas pollution source by improving the gas source positioning method when receiving the pollution instruction, and discharge the gas in the clean room into the matching adsorption device from the clean room gas pollution source.

[0026] The computer storage medium of the embodiment of the present invention may adopt any combination of one or more computer-readable media. The computer-readable medium may be a computer-readable signal medium or a computer-readable storage medium. The computer-readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, device or device, or any combination of the above. More specific examples (non-exhaustive list) of computer-readable storage media include: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In this document, a computer-readable storage medium may be any tangible medium containing or storing a program that may be used by or in combination with an instruction execution system, device or device.

[0027] Computer-readable signal media may include data signals propagated in baseband or as part of a carrier wave, which carry computer-readable program code. Such propagated data signals may take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. Computer-readable signal media may also be any computer-readable medium other than a computer-readable storage medium, which may send, propagate, or transmit a program for use by or in conjunction with an instruction execution system, apparatus, or device.

[0028] The program code included on the computer readable medium can be transmitted with any appropriate medium, including but not limited to wireless, electric wire, optical cable, RF, etc., or any suitable combination of the above. The computer program code for performing the operation of the present invention can be written in one or more programming languages ​​or their combinations, and the programming language includes object-oriented programming languages-such as Java, Smalltalk, C++, and also includes conventional procedural programming languages-such as "C" language or similar programming languages. The program code can be executed completely on the user's computer, partially on the user's computer, as an independent software package, partially on the user's computer and partially on the remote computer, or completely on the remote computer or server. In the case of a remote computer, the remote computer can be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or it can be connected to an external computer (for example, using an Internet service provider to connect through the Internet).

[0029] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A method for online monitoring of clean room gas pollution, characterized in that: The implementation of the clean room gas pollution online monitoring method comprises the following steps: Collect clean room gas samples; Obtaining a clean room test solution through the clean room gas sample; Obtaining the content of clean room pollutants in the clean room test solution; Outputting a clean room pollution instruction according to the clean room pollutant content, wherein the clean room pollution instruction includes a pollution instruction and a cleaning instruction; When the control terminal receives the pollution instruction, the source of the clean room gas pollution is obtained by improving the gas source positioning method; The gas in the clean room is discharged into the matching adsorption device from the source of gas pollution in the clean room.

2. The method for online monitoring of clean room gas pollution according to claim 1, characterized in that: The collecting of clean room gas samples comprises: A pollution monitoring cycle is preset, and the clean room gas sample is collected through an air sampling pipeline according to the pollution monitoring cycle, and the air sampling pipeline is covered with nano-pores.

3. The method for online monitoring of clean room gas pollution according to claim 1, characterized in that: The step of obtaining the clean room test solution through the clean room gas sample comprises: The clean room gas sample is pressurized to dissolve into ultrapure water through the nanopores to obtain the clean room test solution.

4. The method for online monitoring of clean room gas pollution according to claim 1, characterized in that: Outputting a clean room pollution instruction according to the clean room pollutant content includes: Presetting a clean room pollutant content threshold, and obtaining the clean room pollution instruction by comparing the clean room pollutant content threshold and the clean room pollutant content; When the pollutant content in the clean room is greater than or equal to the pollutant content threshold in the clean room, the pollution instruction is output to the control terminal; when the pollutant content in the clean room is less than the pollutant content threshold in the clean room, the cleaning instruction is output to the control terminal.

5. The method for online monitoring of clean room gas pollution according to claim 1, characterized in that: The method of obtaining the clean room gas pollution source by improving the gas source positioning method comprises: Randomly selecting a starting detection point in the clean room, and obtaining a maximum entropy reduction by updating the position of the starting detection point; When the entropy reduction reaches the maximum entropy reduction, the location of the starting detection point is the source of the clean room gas pollution.

6. The method for online monitoring of clean room gas pollution according to claim 5, characterized in that: The randomly selecting a starting detection point in the clean room and obtaining the posterior probability distribution function entropy and the maximum entropy reduction of the clean room gas concentration by updating the position of the starting detection point comprises: Simulate the gas concentration field diffusion equation generated by the clean room gas pollution source at the starting detection point. The mathematical description of the gas concentration field diffusion equation is: , where V is the average air velocity in the clean room, is the gradient operator, c(r|r0) is the gas concentration field, which indicates the gas concentration generated by the clean room gas pollution source at the starting detection point, r is the starting detection point position, r0 is the clean room gas pollution source position, D is the gas diffusion rate, is the gas survival time, R is the gas release rate, is the impact function; The solution of the gas concentration field diffusion equation in two-dimensional space is obtained as follows: , where (y-y0) is the longitudinal distance between the starting detection point and the source of clean room gas contamination, and K0 is the zero-order modified Bessel function; Set the search radius, and obtain the detection probability of the starting detection point within the search radius through the gas concentration field. The mathematical description of the detection probability is: , where P(r|r0) is the detection probability and a is the search radius; The starting detection point continuously moves within the search radius, and performs a gas detection each time it moves to obtain a possible trajectory of the starting detection point; The posterior probability distribution function at time T obtained by normalizing the possible trajectory is: , where P T is the posterior probability distribution function, T time includes t time and t' time, P(r T |r0) is the detection probability at time T; The entropy of the posterior probability distribution function at time T is obtained as follows: , where S T is the entropy of the posterior probability distribution function; The maximum entropy reduction is calculated according to the entropy of the posterior probability distribution function, and the calculation formula is: , where maxS is the maximum entropy reduction.

7. The method for online monitoring of clean room gas pollution according to claim 6, characterized in that: The expression of the possible trajectory is , where L is the possible trajectory, t is the time point when the pollutant is detected, and r t is the position of the starting detection point at time t, P(r t |r0) is the detection probability at time t, t' is the time point when no pollutant is detected, r t' is the position of the starting detection point at time t', Q is the function of the radius of the gas cluster, which is a constant value, H is the number of times the pollutant is detected, and H' is the number of times the pollutant is not detected.

8. An online monitoring device for clean room gas pollution, characterized in that: The device is applied to the online monitoring method for clean room gas contamination as claimed in any one of claims 1 to 7, comprising a sample collection module, a contamination detection module, and a source positioning module; The sample collection module is used to collect clean room gas samples, and obtain the clean room test solution through the clean room gas samples; The pollution detection module is used to obtain the content of clean room pollutants in the clean room test solution through a water sample analyzer, and output a clean room pollution instruction according to the content of the clean room pollutants, wherein the clean room pollution instruction includes a pollution instruction and a cleaning instruction; The source positioning module is used to control the terminal to obtain the source of clean room gas pollution by improving the gas source positioning method when receiving the pollution instruction, and discharge the gas in the clean room into the matching adsorption device from the clean room gas pollution source.

9. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that: When the processor executes the program, the online monitoring method for clean room gas contamination as described in any one of claims 1 to 7 is implemented.

10. A storage medium containing computer executable instructions, characterized in that: The computer executable instructions are used to execute the online monitoring method for clean room gas contamination as claimed in any one of claims 1 to 7 when executed by a computer processor.

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