Insulation coating porosity measurement method, equipment, storage medium and program product

Abstract

The present application relates to the field of semiconductor equipment technology, and provides a method, device, storage medium and program product for measuring the porosity of an insulating coating, the method comprising: providing a plurality of sample substrates; obtaining the first discharge current data and porosity of the sample substrate under low pressure and uniform electric field conditions, establishing a mapping table corresponding to the porosity and the first discharge current data and storing it in a database; setting the sample to be tested under the same low pressure and uniform electric field conditions for self-sustaining discharge, and obtaining the second discharge current data; based on the second discharge current data, by searching the mapping table, obtaining the corresponding porosity of the sample to be tested. The present application, without damaging the coating, pre-establishes a mapping table between the porosity and the discharge current data, and then can quickly find the corresponding porosity according to the discharge current data of the sample to be tested, thereby improving the measurement efficiency. A comprehensive detection of the coatings of various parts of the product is achieved, and the detection data is complete.

Description

Technical Field

[0001] The present application relates to the field of semiconductor equipment technology, and in particular to a method, equipment, storage medium and program product for measuring the porosity of an insulating coating. Background Art

[0002] When semiconductor process equipment is in operation, plasma discharge inside the cavity will cause corrosion to the components inside the cavity. Therefore, the surface of the components inside the cavity needs to be modified to improve its corrosion resistance.

[0003] Plasma spraying technology can form a dense anti-corrosion coating on the surface of the material. However, due to the characteristics of the material and processing technology, the coating prepared by plasma spraying technology inevitably has porosity defects; porosity defects will affect the corrosion resistance of the coating. Therefore, it is necessary to monitor the porosity of the coating to improve the processing technology of the coating.

[0004] The existing porosity measurement method uses metallographic testing to directly measure. Since metallographic testing is destructive, only a control group can be set up, and the data of the control group can reflect the porosity of the coating. However, the control group data only represents the porosity of some samples, and cannot cover all products or all parts of the products. In this way, it is impossible to accurately reflect the porosity of the overall coating of the product. Summary of the invention

[0005] In response to the shortcomings of the prior art, the present application provides a method, equipment, storage medium and program product for measuring the porosity of an insulating coating, aiming to quickly and conveniently obtain the porosity of the product coating without destroying the coating, so as to achieve comprehensive testing of the coatings in various parts of the product and complete test data.

[0006] In order to achieve the above objectives and other advantages, the present application adopts the following technical solutions:

[0007] In a first aspect, the present application provides a method for measuring the porosity of an insulating coating, which is applied to a test device for detecting the breakdown characteristics of an insulating medium, and the method comprises:

[0008] providing a plurality of sample substrates;

[0009] Acquire the first discharge current data and porosity of the sample substrate under low pressure and uniform electric field conditions, establish a mapping table corresponding to the porosity and the first discharge current data and store it in a database;

[0010] The sample to be tested is placed under the same low pressure and uniform electric field conditions to perform self-sustaining discharge, and obtain second discharge current data;

[0011] Based on the second discharge current data, the corresponding porosity of the sample to be tested is obtained by searching the mapping table.

[0012] According to a method for measuring porosity of an insulating coating provided by the present application, before the step of obtaining first discharge current data and porosity of the sample substrate under low pressure and uniform electric field conditions, the method further includes:

[0013] Obtaining the coating thickness of the sample substrate;

[0014] Based on the coating thickness, the pore length is obtained by a preset proportionality coefficient between the coating thickness and the pore length;

[0015] Based on the pore length, the low pressure of the test device is set to meet the adaptation conditions of the Thomson discharge;

[0016] In the testing device, the contact area between the upper electrode and the coating surface is set to be greater than a set threshold value, and the lower electrode is in contact and connected with the sample substrate to form a stable uniform electric field condition.

[0017] According to a method for measuring the porosity of an insulating coating provided by the present application, the step of setting the low pressure of the test device to meet the adaptation conditions of the Thomson discharge further includes:

[0018] The test device is evacuated or nitrogen is injected during evacuation to form a low-pressure environment.

[0019] According to a method for measuring the porosity of an insulating coating provided by the present application, the step of obtaining the first discharge current data and the porosity of the sample substrate under low pressure and uniform electric field conditions includes:

[0020] Applying voltage to the upper electrode and the lower electrode of the testing device to make the sample substrate self-sustaining discharge under the low pressure and uniform electric field conditions, and recording first discharge current data;

[0021] The porosity of the coating of the sample substrate is measured and recorded by metallographic detection.

[0022] According to a method for measuring porosity of an insulating coating provided by the present application, the step of establishing a mapping table corresponding to the porosity and the first discharge current data and storing the mapping table in a database includes:

[0023] Creating a database table corresponding to different insulating materials or coating thicknesses in a database, wherein the fields set in the database table include: insulating material type, coating thickness, discharge current data, and porosity;

[0024] Under different insulating materials or coating thicknesses, the measured first discharge current data and porosity are stored in the corresponding database table to form a mapping table corresponding to the porosity and the first discharge current data.

[0025] According to a method for measuring the porosity of an insulating coating provided by the present application, the step of providing a plurality of sample substrates comprises:

[0026] Different insulating materials and process parameters are used to perform plasma spraying on the surface of each sample substrate, so that different coating thicknesses can be formed on the surface of the sample substrate, so that the sample substrate has different currents and porosities in self-sustaining discharge under low pressure and uniform electric field conditions.

[0027] According to a method for measuring the porosity of an insulating coating provided in the present application, the coating thickness of the sample substrate is between 200 and 1000 μm.

[0028] In a second aspect, the present application provides an electronic device, the electronic device comprising:

[0029] One or more processors; and a memory storing computer program instructions, wherein when the computer program instructions are executed, the processors execute the steps of the insulation coating porosity measurement method as described in any one of the above.

[0030] In a third aspect, the present application provides a computer-readable storage medium having a computer program / instruction stored thereon, which, when executed by a processor, implements the steps of any of the above-described methods for measuring the porosity of insulating coatings.

[0031] In a fourth aspect, the present application provides a computer program product, comprising a computer program / instruction, which, when executed by a processor, implements the steps of any of the above-described methods for measuring the porosity of an insulating coating.

[0032] The present application provides a method, device, storage medium and program product for measuring the porosity of an insulating coating, which provides multiple sample substrates; obtains the first discharge current data and porosity of the sample substrate under low pressure and uniform electric field conditions, establishes a mapping table corresponding to the porosity and the first discharge current data and stores it in a database; sets the sample to be tested to self-sustaining discharge under the same low pressure and uniform electric field conditions to obtain the second discharge current data; based on the second discharge current data, obtains the corresponding porosity of the sample to be tested by searching the mapping table. The present application pre-establishes a mapping table between the porosity and the discharge current data without destroying the coating, and then can quickly find the corresponding porosity according to the discharge current data of the sample to be tested, thereby improving the measurement efficiency. A comprehensive detection of the coatings of various parts of the product is achieved, and the detection data is complete. It can then be used in large-scale production, greatly reducing the time and cost of coating inspection. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other implementation methods can be obtained based on these drawings without paying any creative work.

[0034] Figure 1 It is a schematic flow chart of a method for measuring the porosity of an insulating coating provided in an embodiment of the present application;

[0035] Figure 2 is a characteristic diagram of the Baschen curve corresponding to different gases provided in the embodiment of the present application;

[0036] Figure 3 It is a schematic diagram of the structure of the electronic device provided by this application. DETAILED DESCRIPTION

[0037] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the following specifically cites the preferred embodiments and describes them in detail with the accompanying drawings.

[0038] It should be noted that it is explicitly and implicitly understood by those of ordinary skill in the art that the embodiments described in this application can be combined with other embodiments without conflict. Unless otherwise defined, the technical terms or scientific terms involved in this application should be the usual meanings understood by people with ordinary skills in the technical field to which this application belongs. The words "one", "a", "a", "the" and the like involved in this application do not indicate a quantitative limitation and may represent the singular or plural. The terms "including", "comprising", "having" and any of their variations involved in this application are intended to cover non-exclusive inclusions; the terms "first", "second", "third", etc. involved in this application are merely to distinguish similar objects and do not represent a specific ordering of objects.

[0039] When semiconductor process equipment is in operation, the plasma discharge inside the cavity will corrode the parts inside the cavity. When enterprises produce related equipment and parts, they can form a dense anti-corrosion coating on the surface of the material by using plasma spraying technology. In the coating process, the sample standard sheet (the sample standard sheet is a sample substrate of the same material as the product, which can be rectangular, circular, etc.) except the target product is coated under the same coating conditions, and the porosity (porosity = (pore area / total selected area) × 100%) is directly measured for the sample standard sheet by metallographic detection method (using the camera system of the metallographic microscope or digital camera to obtain the image of the coating, and analyze the microstructure of the coating material, including parameters such as porosity) to reflect the porosity of the target product coating. However, in fact, the surface to be coated of the product is actually much more complex than the standard rectangular surface. For example, the product is an I-shaped or L-shaped structural part. Since there are significant differences between the complex structural parts and the sample standard sheet in terms of shape, size and material distribution, using the metallographic measurement data of the sample standard sheet to reflect the porosity of the target product may cause data distortion. In addition, since there are many hard-to-reach corners and gaps in complex structural parts, the existing technology may not be able to effectively measure the porosity of these areas, resulting in incomplete measurement data. Therefore, the present invention provides a method, device, storage medium and program product for measuring the porosity of an insulating coating, which aims to quickly and conveniently obtain the porosity of a product coating without destroying the coating, so as to achieve comprehensive testing of the coatings of various parts of the product and complete the test data.

[0040] Reference Figure 1 As shown, an embodiment of the present application provides a method for measuring the porosity of an insulating coating, which is applied to a test device for detecting the breakdown characteristics of an insulating medium, and the method includes:

[0041] Step S1: providing a plurality of sample substrates.

[0042] In this embodiment, step S1 specifically includes:

[0043] Different insulating materials and process parameters are used to perform plasma spraying on the surface of each sample substrate, so that different coating thicknesses can be formed on the surface of the sample substrate, so that the sample substrate has different currents and porosities in self-sustaining discharge under low pressure and uniform electric field conditions.

[0044] In this embodiment, the coating thickness of the sample substrate is between 200 and 1000 μm.

[0045] Specifically, the insulating coating is formed by spraying on the surface of the sample substrate. The spraying method includes: plasma spraying, nano spraying, cold spraying, etc. In this embodiment, the plasma spraying method is preferably used for spraying. During the plasma spraying process, the insulating material is heated to a molten or semi-molten state and sprayed at a high speed onto the pretreated workpiece surface to form a firmly attached insulating surface layer. This coating not only has excellent corrosion resistance, but also can improve the comprehensive properties of the material such as wear resistance, high temperature oxidation resistance and electrical insulation.

[0046] The coating thickness can be controlled by adjusting the process parameters (such as spraying time, spraying rate, etc.) during the plasma spraying process to ensure that the coating thickness ranges from thinner (such as 200μm) to thicker (such as 1000μm) multiple thickness levels.

[0047] The selection of relevant insulating materials should be based on their common applications in semiconductor processes and their corrosion resistance requirements. For example, it may include oxide ceramics such as aluminum oxide, magnesium oxide, and yttrium oxide, and may also include non-oxide ceramics such as silicon nitride, silicon carbide, silicon dioxide, and other materials with high temperature resistance, corrosion resistance, and good insulation. When selecting spraying materials, it is necessary to make comprehensive considerations based on specific application scenarios and requirements. This embodiment does not specifically limit the selection of relevant insulating materials.

[0048] Therefore, by adopting different insulating materials and process parameters, various situations of different insulating materials and different insulating coatings in actual applications can be simulated, providing rich sample data for subsequent breakdown characteristic tests and porosity measurements.

[0049] Step S2: obtaining first discharge current data and porosity of the sample substrate under low pressure and uniform electric field conditions, establishing a mapping table corresponding to the porosity and the first discharge current data and storing it in a database.

[0050] In this embodiment, before step S2, the method further includes: setting low pressure and uniform electric field conditions, specifically:

[0051] Obtain the coating thickness of the sample substrate;

[0052] Based on the coating thickness, the pore length is obtained by a preset proportionality coefficient between the coating thickness and the pore length;

[0053] Based on the pore length, the low gas pressure of the test device is set to meet the adaptation conditions of the Thomson discharge;

[0054] In the test device, the contact area between the upper electrode and the coating surface is set to be greater than a set threshold value, and the lower electrode is in contact and connected with the sample substrate to form a stable uniform electric field condition.

[0055] During the plasma spraying process, the airflow (the gas carrying the coating material) forms a vortex-shaped motion field. Due to the unevenness and complexity of the airflow vortex field, the coating may form complex pores in the lateral and / or longitudinal directions of the coating during the deposition process, such as multi-level pore structures. This makes the pore length (i.e., the depth of the pore itself) formed in the coating greater than the overall thickness of the coating, thereby affecting the path of the discharge current through the pores. Moreover, the presence of multiple pores in the coating allows the current to pass through multiple pores at the same time through the coating, just like the current is divided in a parallel circuit. When the number of pores in the coating increases, the number of channels that the current can pass through increases, which increases the "effective area" of the discharge gap to a certain extent. Therefore, the proportional relationship between the coating thickness and the pore length needs to be determined according to different plating processes. For example, the correlation between them is determined by combining factors such as coating materials and process parameters, and then a certain proportional relationship range (such as a proportional relationship of 1 to 10) between the coating thickness and the pore length is obtained.

[0056] Use appropriate measuring tools (such as microscopes, thickness gauges, etc.) to obtain the coating thickness of the sample substrate, and determine the corresponding proportional coefficient in combination with factors such as coating materials and process parameters to determine the pore length. In order to consider both the pore length (in cm) and the low gas pressure (in torr) at the same time, adjust the gas pressure in the test device according to the estimated pore length to ensure that the test device meets the adaptation conditions of Thomson discharge, so that accurate discharge current can be obtained according to the pore length in this environment. Preferably, the range set for the Thomson discharge adaptation condition is 0.1~10 (cm×torr), torr (torr, in the field of vacuum technology, represents gas pressure).

[0057] When the film thickness is known (between 200μm and 1000μm), the Thomson discharge adaptation condition is set to 0.1~10 (cm×torr) for measurement. A general vacuum pump can meet the environmental conditions without setting 10 - 4 The high-specification vacuum condition of torr (only molecular pumps can meet the conditions, the equipment cost is high and the vacuuming is slow, resulting in slow measurement) can also accurately reflect the dielectric properties and porosity of the material. The test device for detecting the breakdown characteristics of insulating media is used to test the breakdown strength and voltage withstand time of insulating materials under power frequency voltage or DC voltage to evaluate their electrical insulation performance. Its working principle is to apply a gradually increasing voltage to the insulating material under test until the material breaks down (i.e. loses its insulation properties), record the breakdown voltage value at this time, and calculate the dielectric strength or electrical strength of the material based on it.

[0058] Setting uniform electric field conditions: In the test device, the contact area between the upper electrode and the coating surface is set to be greater than a set threshold. In this embodiment, the threshold is set to 0.25 cm 2 , the contact area is preferably greater than 0.25 cm 2 The lower electrode is in contact with the back or bottom of the sample substrate to form a complete circuit loop, which ensures the uniformity of the electric field distribution. The uniformity of the electric field distribution can also be further optimized by adjusting parameters such as the position, shape and voltage of the electrode.

[0059] It should be noted that the coating material itself is insulating. Under normal room temperature and pressure, the insulation strength of air is 3-5kV / mm, and the insulation strength of the ceramic coating is 13-20kV / mm. Although there is a multiple difference in the insulation capacity between the two, there is no difference in order of magnitude. Therefore, under normal pressure, since both the gas molecules in the air and the pores in the coating may become conductive channels, the discharge process is relatively complicated, the measured discharge curve is distorted, and the measured discharge current is inaccurate, and thus the accurate porosity cannot be obtained based on the current-porosity correspondence. Therefore, it is necessary to test the electrical strength of the insulating material in a low-pressure environment.

[0060] The porosity of an excellent coating is between about 2% and 5%, which is relatively low. Under the premise of meeting the adaptation conditions of the Thomson discharge theory, under low pressure conditions, the collision and ionization between gas molecules can be reduced, and the pores have stronger conductivity, which can eliminate the influence of the coating material on the discharge curve. In other words, the coating is regarded as absolutely insulating, and the discharge under low pressure conditions can be considered to be caused only by the pore discharge of the coating, which makes the discharge curve more accurately reflect the discharge characteristics of the pores.

[0061] When the test device is evacuated, various gases can be injected to measure its ionization characteristics under specific gas environment conditions. These gases mainly include: air (Air), nitrogen (N2), neon (Ne), helium (He), argon (Ar) and hydrogen (H2). The Baschen curve of each gas is as follows Figure 2 As shown, the Baschen curve describes the breakdown voltage V of a gas gap in a uniform electric field. t The relationship between the gas pressure and the distance (cm·Torr). The Baschen curve is usually U-shaped with a minimum point. On the left side of the curve, when the gas pressure is low or the electrode spacing is large, the breakdown voltage V t Higher; on the right side of the curve, when the gas pressure is higher or the electrode spacing is smaller, the breakdown voltage V t is also higher; at the minimum point of the curve, the breakdown voltage V t The minimum breakdown voltage V corresponding to different gases is s.min and the corresponding (pd) minThe values ​​(the minimum value of the product of the gas gap d and the gas pressure p, in cm·Torr) are shown in Table 1.

[0062] Table 1 Dielectric properties data corresponding to different gases

[0063]

[0064] Preferably, in this embodiment, nitrogen (N2) is injected during vacuuming. Nitrogen has a relatively high ionization energy and a low degree of ionization at a lower voltage, and may show a lower initial conductivity in the measurement, but changes significantly with increasing voltage.

[0065] In this embodiment, in step S2, the step of obtaining the first discharge current data and porosity of the sample substrate under low pressure and uniform electric field conditions specifically includes:

[0066] Step S201: applying voltage to the upper electrode and the lower electrode of the test device to make the sample substrate self-sustaining discharge under low pressure and uniform electric field conditions, and recording first discharge current data;

[0067] Step S202: using a metallographic detection method to measure and record the porosity of the coating on the sample substrate.

[0068] Specifically, after applying voltage to the two electrodes of the test device, due to defects such as pores in the sample substrate coating, the gas inside the pores is more likely to undergo Thomson discharge, which will cause the electric field to concentrate at the pores and trigger discharge. This discharge process is self-sustaining, that is, when the external electric field exceeds the critical value E of the electric field strength, the discharge process can be maintained by itself under the action of the external electric field. By measuring the current data during this discharge process, the porosity and defects of the coating can be reflected.

[0069] It should be noted that the specific implementation process of the metallographic detection method can be achieved through existing technologies, which is not within the protection scope of this embodiment and will not be elaborated in detail.

[0070] In this embodiment, in step S2, the step of establishing a mapping table corresponding to the porosity and the first discharge current data and storing it in a database includes:

[0071] Step S203: creating a database table corresponding to different insulating materials or coating thicknesses in the database, wherein the fields set in the database table include: insulating material type, coating thickness, discharge current data and porosity;

[0072] Step S204: Under different insulating materials or coating thicknesses, the measured first discharge current data and porosity are stored in a corresponding database table to form a mapping table corresponding to the porosity and the first discharge current data.

[0073] Specifically, a suitable database system, such as MySQL, PostgreSQL, etc., is selected according to the scale of the previous sample data or according to the needs of the enterprise. The database table structure is designed, and the table structure should contain the following fields: insulating material type, coating thickness, discharge current data, porosity, and process parameters to store information such as insulating material type, coating thickness, discharge current data, porosity, and process parameters. The measured discharge current data is classified according to the insulating material type and / or coating thickness, and entered into the corresponding database table, thereby forming a mapping table in which the first discharge current data is mapped to porosity. Different types of insulating materials have different physical and chemical properties, and different process parameters will affect the quality and performance of the coating. When the insulating material and / or the process parameters of the spraying change, the discharge behavior of the pores will be affected. Therefore, in the database table, the discharge current data can form a corresponding relationship with the insulating material type and the spraying process parameters, which will also affect the detection of porosity.

[0074] By establishing a database table, you can easily store, manage and query a large amount of data, easily establish associations between these data, and facilitate subsequent data query and analysis. Moreover, using a database for management can be applied in large-scale production, and the stored data can be easily shared and accessed by multiple departments and personnel, thus providing strong support for process optimization and decision-making.

[0075] Step S3: setting the sample to be tested under the same low pressure and uniform electric field conditions to perform self-sustaining discharge, and obtaining second discharge current data;

[0076] Step S4: Based on the second discharge current data, the corresponding porosity of the sample to be tested is obtained by looking up the mapping table.

[0077] In order to ensure the comparability and accuracy of the test results, the environmental settings of the measuring device for the sample to be tested must be consistent with the low pressure and uniform electric field conditions set in step S2. Under the action of the electric field, the gas molecules inside the pores will be ionized to form a discharge, and the discharge current data at this time is recorded, which is the second discharge current data.

[0078] The mapping table is a database table established based on a large amount of test data, which reflects the quantitative relationship between discharge current and porosity. By looking up the mapping table, the porosity of the sample to be tested can be quickly and accurately obtained. This simplifies the porosity detection process and improves the detection efficiency. Moreover, the test data is obtained through real tests, so the measurement results have high accuracy and reliability.

[0079] If the amount of sample data in the early stage is insufficient, the data in the database table is insufficient, and the corresponding porosity cannot be retrieved in the database table according to the second discharge current data, a suitable range search or interpolation method can be used. For example, all porosities within a certain range can be searched according to the second discharge current data, and the average porosity of these values ​​can be calculated; or two adjacent current data points can be found according to the second discharge current data, and linear interpolation can be used to estimate the porosity.

[0080] Therefore, by obtaining the self-sustained discharge current of the sample to be tested in a uniform electric field under low pressure to indirectly characterize the porosity of the insulating material, the porosity can be measured without destroying the coating. Compared with destructive random inspections and sample testing, the coatings of various parts of the product can be comprehensively tested, and the test data is complete.

[0081] In addition, the discharge current data is in correspondence with the type of insulating material and the process parameters of the spraying. Therefore, by analyzing the discharge current data and porosity under different insulating materials and coating thicknesses, the optimal process parameter combination can be found, thereby improving product quality and production efficiency.

[0082] In summary, the embodiment of the present application provides a method for measuring the porosity of an insulating coating, by providing multiple sample substrates; obtaining the first discharge current data and porosity of the sample substrate under low pressure and uniform electric field conditions, establishing a mapping table corresponding to the porosity and the first discharge current data and storing it in a database; setting the sample to be tested under the same low pressure and uniform electric field conditions for self-sustaining discharge, and obtaining the second discharge current data; based on the second discharge current data, by searching the mapping table, the corresponding porosity of the sample to be tested is obtained. The present application pre-establishes a mapping table between the porosity and the discharge current data without destroying the coating, and then can quickly find the corresponding porosity according to the discharge current data of the sample to be tested, thereby improving the measurement efficiency. A comprehensive detection of the coatings of various parts of the product is achieved, and the detection data is complete. It can then be used in large-scale production, greatly reducing the time and cost of coating inspection.

[0083] Those skilled in the art will appreciate that, in the above method of specific implementation, the order in which the steps are written does not imply a strict execution order and does not constitute any limitation on the implementation process. The specific execution order of the steps should be determined by their functions and possible internal logic.

[0084] In addition, some embodiments of the present application also provide an electronic device. The electronic device may be a digital computer in various forms, such as a laptop computer, a desktop computer, a workbench, a personal digital assistant, a server, a blade server, a mainframe computer, etc. The electronic device may also be a mobile device in various forms, such as a personal digital processing, a cellular phone, a smart phone, a wearable device, and other similar computing devices.

[0085] The electronic device comprises: one or more processors; and a memory storing computer program instructions, wherein when the computer program instructions are executed, the processor executes the steps of the insulating coating porosity measurement method provided in any one or more of the above embodiments. Figure 3 An exemplary structural diagram of the electronic device is disclosed. Figure 3 As shown, the electronic device includes: one or more processors 1101, a memory 1102, and interfaces for connecting various components, including high-speed interfaces and low-speed interfaces. The various components are connected to each other using different buses and can be installed on a common mainboard or installed in other ways as needed. The processor can process instructions executed in the electronic device, including instructions stored in or on the memory to display graphical information of the GUI on an external input / output device (such as a display device coupled to the interface). In some other embodiments, if necessary, multiple processors and / or multiple buses can be used with multiple memories and multiple memories. Similarly, multiple electronic devices can be connected, and each device provides some necessary operations (for example, as a server array, a group of blade servers, or a multi-processor system). Among them, the components shown in this article, their connections and relationships, and their functions are only examples, and are not intended to limit the implementation of the present application described and / or required herein.

[0086] The electronic device may further include: an input device 1103 and an output device 1104. The processor 1101, the memory 1102, the input device 1103 and the output device 1104 may be connected via a bus or other means. Figure 3 The example of connecting through bus is taken in the following.

[0087] The input device 1103 can receive input digital or character information, and generate key signal input related to the user settings and function control of the electronic device, such as a touch screen, a keypad, a mouse, a track pad, a touch pad, an indicator rod, one or more mouse buttons, a trackball, a joystick and other input devices. The output device 1104 may include a display device, an auxiliary lighting device (e.g., an LED) and a tactile feedback device (e.g., a vibration motor), etc. The display device may include, but is not limited to, a liquid crystal display (LCD), a light emitting diode (LED) display and a plasma display. In some embodiments, the display device may be a touch screen.

[0088] To provide interaction with a user, the electronic device may be a computer. The computer has: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and a pointing device (e.g., a mouse or a trackball), through which the user can provide input to the computer. Other types of devices may also be used to provide interaction with a user; for example, the feedback provided to the user may be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user may be received in any form (including acoustic input, voice input, or tactile input).

[0089] In the embodiments of the present application, a computer program / instruction is stored on a computer-readable medium, and when the computer program / instruction is executed by a processor, the steps of the method for measuring the porosity of an insulating coating provided in any one or more of the above embodiments are implemented. The computer-readable medium may be included in the electronic device described in the above embodiments; or it may exist independently without being assembled into the device. The above computer-readable medium carries one or more computer-readable instructions.

[0090] The memory 1102 can be used as a non-transient computer-readable storage medium, which can be used to store non-transient software programs, non-transient computer executable programs and modules. The processor 1101 executes various functional applications and data processing of the server by running the non-transient software programs, instructions and modules stored in the memory 1102, so as to implement the program instructions / modules corresponding to the method provided by any one or more embodiments in the embodiments of the present application.

[0091] The memory 1102 may include a program storage area and a data storage area, wherein the program storage area may store an operating system, an application required for at least one function; the data storage area may store data created according to the use of the electronic device, etc. In addition, the memory 1102 may include a high-speed random access memory, and may also include a non-transient memory, such as at least one disk storage device, a flash memory device, or other non-transient solid-state storage device. In some embodiments, the memory 1102 may optionally include a memory remotely arranged relative to the processor 1101, and these remote memories may be connected to the electronic device via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0092] It should be noted that more specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination thereof. In the present application, a computer-readable storage medium may be any tangible medium containing or storing a program that may be used by or in conjunction with an instruction execution system, apparatus, or device.

[0093] Computer-readable storage media include permanent and non-permanent, removable and non-removable media, and can be implemented by any method or technology to store information. Information can be computer-readable instructions, data structures, modules of programs or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, read-only compact disk (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassettes, magnetic tape disk storage or other magnetic storage devices or any other non-transmission medium that can be used to store information that can be accessed by a computing device.

[0094] Computer program code for performing the operations of the present application may be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages, such as Java, Smalltalk, C++, and conventional procedural programming languages, such as "C" or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, as a separate software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer via any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0095] In the above embodiments, all or part of the embodiments may be implemented by software, hardware, firmware or any combination thereof. For example, an application specific integrated circuit (ASIC), a general-purpose computer or any other similar hardware device may be used to implement the embodiments. In some embodiments, the software program of the present application may be executed by a processor to implement the above steps or functions. Similarly, the software program of the present application (including related data structures) may be stored in a computer-readable recording medium, such as a RAM memory, a magnetic or optical drive or a floppy disk and the like. In addition, some steps or functions of the present application may be implemented by hardware, for example, as a circuit that cooperates with a processor to perform various steps or functions.

[0096] The computer program product provided in the embodiment of the present application includes one or more computer programs / instructions, and when the computer program / instructions are executed by the processor, the process or function described in the embodiment of the present application is generated in whole or in part. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions may be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions may be transmitted from a website site, a computer, a server, or a data center to another website site, a computer, a server, or a data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) mode. The computer-readable storage medium may be any available medium that a computer can access or a data storage device such as a server or a data center that includes one or more available media integrations. The available medium may be a magnetic medium, (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid state disk (SSD)), etc.

[0097] The flow chart or block diagram in the accompanying drawings shows the possible architecture, function and operation of the equipment, method and computer program product according to various embodiments of the present application. In this regard, each box in the flow chart or block diagram can represent a module, a program segment or a part of a code, and the module, the program segment or a part of the code contains one or more executable instructions for realizing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the box can also occur in a different order from the order marked in the accompanying drawings. For example, two boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram and / or flow chart, and the combination of the boxes in the block diagram and / or flow chart can be implemented with a dedicated system for hardware that performs a specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.

[0098] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily mention changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims, and the above embodiments should be regarded as exemplary and non-restrictive.

Claims

1. A method for measuring the porosity of an insulating coating, characterized in that: A test device for detecting the breakdown characteristics of an insulating medium, the method comprising: providing a plurality of sample substrates; Acquire the first discharge current data and porosity of the sample substrate under low pressure and uniform electric field conditions, establish a mapping table corresponding to the porosity and the first discharge current data and store it in a database; The step of establishing a mapping table corresponding to the porosity and the first discharge current data and storing the mapping table in a database comprises: Creating a database table corresponding to different insulating materials or coating thicknesses in a database, wherein the fields set in the database table include: insulating material type, coating thickness, discharge current data, and porosity; Under different insulating materials or coating thicknesses, the measured first discharge current data and porosity are stored in the corresponding database table to form a mapping table corresponding to the porosity and the first discharge current data; The sample to be tested is placed under the same low pressure and uniform electric field conditions to perform self-sustaining discharge, and obtain second discharge current data; Based on the second discharge current data, the corresponding porosity of the sample to be tested is obtained by searching the mapping table.

2. The method for measuring the porosity of an insulating coating according to claim 1, characterized in that: Before the step of obtaining the first discharge current data and porosity of the sample substrate under low pressure and uniform electric field conditions, the method further includes: Obtaining the coating thickness of the sample substrate; Based on the coating thickness, the pore length is obtained by a preset proportionality coefficient between the coating thickness and the pore length; Based on the pore length, the low pressure of the test device is set to meet the adaptation conditions of the Thomson discharge; In the testing device, the contact area between the upper electrode and the coating surface is set to be greater than a set threshold value, and the lower electrode is in contact and connected with the sample substrate to form a stable uniform electric field condition.

3. The method for measuring the porosity of an insulating coating according to claim 2, characterized in that: The step of setting the low pressure of the test device to meet the adaptation conditions of the Thomson discharge also includes: The test device is evacuated or nitrogen is injected during evacuation to form a low-pressure environment.

4. The method for measuring the porosity of an insulating coating according to claim 1 or 2, characterized in that: The step of obtaining the first discharge current data and porosity of the sample substrate under low pressure and uniform electric field conditions comprises: Applying voltage to the upper electrode and the lower electrode of the testing device to make the sample substrate self-sustaining discharge under the low pressure and uniform electric field conditions, and recording first discharge current data; The porosity of the coating of the sample substrate is measured and recorded by metallographic detection.

5. The method for measuring the porosity of an insulating coating according to claim 1, characterized in that: The step of providing a plurality of sample substrates comprises: Different insulating materials and process parameters are used to perform plasma spraying on the surface of each sample substrate, so that different coating thicknesses can be formed on the surface of the sample substrate, so that the sample substrate has different currents and porosities in self-sustaining discharge under low pressure and uniform electric field conditions.

6. The method for measuring the porosity of an insulating coating according to claim 1 or 5, characterized in that: The coating thickness of the sample substrate is between 200 and 1000 μm.

7. An electronic device, characterized in that: The electronic device comprises: One or more processors; and a memory storing computer program instructions, wherein when the computer program instructions are executed, the processor executes the insulating coating porosity measurement method according to any one of claims 1 to 6.

8. A computer-readable storage medium having a computer program / instruction stored thereon, characterized in that: When the computer program / instructions are executed by a processor, the method for measuring the porosity of an insulating coating as claimed in any one of claims 1 to 6 is implemented.

9. A computer program product comprising a computer program / instructions, characterized in that When the computer program / instruction is executed by a processor, the method for measuring the porosity of an insulating coating as claimed in any one of claims 1 to 6 is implemented.

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