Movement mechanism, method and movement platform based on Halbach permanent magnet array

Abstract

The invention relates to a motion mechanism and method based on a Halbach permanent magnet array and a motion platform. The motion mechanism based on the Halbach permanent magnet array comprises a rotor, the rotor comprises n driving units of the same structure, and n is an even number larger than 4; each driving unit comprises a plurality of coils, the n driving units are arranged in a central symmetry manner relative to the center of the rotor, and all the coils in the rotor are arranged to form a central symmetry coil array, so that the moments of the n driving units relative to the center of the rotor are mutually counteracted. Compared with the prior art, by optimizing the layout of the driving unit in the rotor, under the condition that the driving unit meets the output requirement and the output center of the driving unit coincides with the center of mass of the motion platform, the torque of the driving unit relative to the center of mass can be offset as much as possible, and therefore the requirement for a control system is lowered, and the control efficiency is improved. The performance requirement for the driving unit under the small process node value is lowered, and the production efficiency of the workpiece table is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of photolithography machines, and in particular to a motion mechanism, method and motion platform based on a Halbach permanent magnet array. Background Art

[0002] With the development of the semiconductor industry, photolithography machines, as key equipment in the chip industry, have seen their development and innovation directly impact the growth of the semiconductor industry and other industries. The motion stage of a photolithography machine is the motion positioning device that carries silicon wafers for measurement and exposure, requiring high-performance motion. Currently, the long-range motion of most photolithography machines is primarily accomplished by the motion stage's drive unit in a Halbach permanent magnet array. Therefore, the layout of the motion stage's drive unit plays a crucial role in the production efficiency of the photolithography machine's workpiece stage.

[0003] The motion stage of the lithography machine with a larger process node value uses four drive units to complete the six-degree-of-freedom motion of the workpiece stage through interaction with the Halbach permanent magnet array. Figure 1 The coils of adjacent drive units are arranged at 90° to each other. As the process node value becomes smaller and smaller, the four-drive unit layout structure can no longer meet the performance requirements of the motion stage. At present, in order to improve production efficiency, the motion stage of the photolithography machine with smaller process node value uses six drive units to achieve six degrees of freedom motion of the workpiece stage. The layout of each drive unit in the permanent magnet array is shown in Figure 2 The coils of adjacent drive units are arranged at 90° to each other, and the number of mutually cancelling torques of the drive units is small, or when the torques cancel each other, the output of the motors in the same direction is inconsistent, which places high demands on the motion stage control system. At the same time, during the operation of the six-drive unit lithography machine motion stage, when two motion stages swap positions during operation, due to the limitations of the Halbach permanent magnet array, some of the motion stage's drive units must be moved out of the magnetic steel array. At this time, two drive units do not participate in the work, which not only increases the requirements for the control system, but also some drive units are not effectively utilized. Summary of the Invention

[0004] The present invention provides a motion mechanism based on a Halbach permanent magnet array, which rationally arranges drive units so as to offset the torques of the drive units, thereby effectively solving the problem of high control system requirements of existing motion platforms.

[0005] The present invention provides a motion mechanism based on a Halbach permanent magnet array, comprising a mover, wherein the mover comprises n drive units with identical structures, where n is an even number greater than 4;

[0006] Each of the drive units includes a coil group, which includes multiple coils. The n drive units are arranged in a centrally symmetrical manner relative to the center of the mover, and all the coils in the mover are arranged together to form a centrally symmetrical coil array, so that the moments of the n drive units relative to the center offset each other.

[0007] In one embodiment, the mover includes 6 drive units, and the 6 drive units are arranged in two rows and three columns; the first row includes a first drive unit, a second drive unit, and a third drive unit arranged in sequence, and the second row includes a fourth drive unit, a fifth drive unit, and a sixth drive unit arranged in sequence; the length directions of the coils in the four drive units, namely, the first drive unit, the second drive unit, the fifth drive unit, and the sixth drive unit, are the same; the length directions of the coils in the two drive units, namely, the third drive unit and the fourth drive unit, are the same and are both perpendicular to the length direction of the coil in the first drive unit.

[0008] In one embodiment, the mover includes 8 drive units, and the 8 drive units are arranged in two rows and four columns; the first row includes a first drive unit, a second drive unit, a third drive unit and a fourth drive unit arranged in sequence, and the second row includes a fifth drive unit, a sixth drive unit, a seventh drive unit and an eighth drive unit arranged in sequence; the length directions of the coils in the four drive units of the first drive unit, the second drive unit, the seventh drive unit and the eighth drive unit are the same; the length directions of the coils in the four drive units of the third drive unit, the fourth drive unit, the fifth drive unit and the sixth drive unit are the same and are all perpendicular to the length direction of the coil in the first drive unit.

[0009] In one embodiment, the mover includes 8 drive units, and the 8 drive units are arranged in two rows and four columns; the first row includes a first drive unit, a second drive unit, a third drive unit and a fourth drive unit arranged in sequence, and the second row includes a fifth drive unit, a sixth drive unit, a seventh drive unit and an eighth drive unit arranged in sequence; the length directions of the coils in the first drive unit and the eighth drive unit are the same; the length directions of the coils in the six drive units, namely the second drive unit, the third drive unit, the fourth drive unit, the fifth drive unit, the sixth drive unit and the seventh drive unit, are the same and are perpendicular to the length direction of the coil in the first drive unit.

[0010] In one embodiment, the device further includes a stator, which is a permanent magnet array with a Halbach structure, and the mover is located above the stator.

[0011] The present invention also provides a method for arranging drive units for use in a motion mechanism based on a Halbach permanent magnet array, wherein the motion structure includes a stator and a mover, the stator is a permanent magnet array of a Halbach structure, the mover includes n drive units, n is an even number greater than 4, each drive unit includes a coil group, and the coil group includes multiple coils; the mover is placed above the stator, and the number and direction of arrangement of the drive units in each direction are determined according to the requirements of the speed and acceleration of the motion mechanism in different directions, so that the n drive units are arranged in a centrally symmetrical manner relative to the center of the mover and all the coils in the mover are arranged together to form a centrally symmetrical coil array, so that the torque of the n drive units relative to the center of the mover is offset, thereby reducing the requirements for the control system.

[0012] The present invention also provides a motion platform based on a Halbach permanent magnet array, which includes the motion mechanism based on the Halbach permanent magnet array as described above.

[0013] In one embodiment, the motion platform further includes a position detection device and a main frame, the position detection device is used to monitor the posture of the motion platform in a three-dimensional coordinate system, and the main frame is used to install the mover and the position detection device.

[0014] In one embodiment, the position detection device includes a Class I sensor, a Class II sensor, and a Class III sensor, wherein the Class I sensor is used to measure the displacement of the moving stage in the Z direction, the Class II sensor is used to measure the displacement of the moving stage in the Y direction, and the Class III sensor is used to measure the displacement of the moving stage in the X direction.

[0015] In one embodiment, the type I sensor and the type II sensor are eddy current sensors, and the type III sensor is a capacitive scale sensor.

[0016] Compared with the prior art, the advantage of the present invention is that the lithography machine motion table based on the Halbach permanent magnet array provided by the present invention optimizes the layout of the drive unit in the mover. When the drive unit meets the output requirements and the output center of the mover and the center of mass of the motion table coincide, the torque of the drive unit relative to the center of mass can be offset as much as possible, thereby reducing the requirements for the control system, reducing the performance requirements for the drive unit under smaller process node values, and improving the production efficiency of the workpiece table. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Hereinafter, the present invention will be described in more detail based on embodiments with reference to the accompanying drawings.

[0018] Figure 1 This is the layout diagram of the four drive units in the existing motion platform;

[0019] Figure 2 This is the layout diagram of the six drive units in the existing motion platform;

[0020] Figure 3 1 is a schematic structural diagram of a motion mechanism based on a Halbach permanent magnet array and having six drive units in one embodiment of the present invention;

[0021] Figure 4 1 is a schematic diagram showing the output of each drive unit when a mover with six drive units is only floating in one embodiment of the present invention;

[0022] Figure 5 1. It is a schematic diagram of the output of each driving unit when a mover with six driving units moves in the Y direction in one embodiment of the present invention;

[0023] Figure 6 1. It is a schematic diagram of the output of each driving unit when a mover with six driving units moves in the X direction in one embodiment of the present invention;

[0024] Figure 7 1 is a schematic structural diagram of a motion mechanism based on a Halbach permanent magnet array and having eight drive units in one embodiment of the present invention;

[0025] Figure 8 2 is a schematic structural diagram of a motion mechanism based on a Halbach permanent magnet array and having eight drive units in another embodiment of the present invention;

[0026] Figure 9 1 is a schematic structural diagram of a motion stage based on a Halbach permanent magnet array in one embodiment of the present invention;

[0027] Figure 10 1 is a top view of a motion stage based on a Halbach permanent magnet array in one embodiment of the present invention.

[0028] Reference numerals:

[0029] 1. Halbach permanent magnet array; 2. Drive unit; 3. Motion mechanism; 4. Glass-ceramic parts; 5. First connecting plate; 6. Second connecting plate; 7. Main frame; 8. Type I sensor; 9. Footrest; 10. Type II sensor; 11. Type III sensor; 12. Sensor bracket; 13. Coil;

[0030] a1, b1, c1, first drive unit; a2, b2, c2, second drive unit; a3, b3, c3, third drive unit; a4, b4, c4, fourth drive unit; a5, b5, c5, fifth drive unit; a6, b6, c6, sixth drive unit; b7, c7, seventh drive unit; b8, c8, eighth drive unit;

[0031] Fy1, Fy2, Fy5, Fy6, Fx3, Fx4, Fz1, Fz2, Fz3, Fz4, Fz5, Fz6, thrust. DETAILED DESCRIPTION

[0032] The present invention will be further described below with reference to the accompanying drawings.

[0033] The motion mechanism based on the Halbach permanent magnet array provided by the present invention (hereinafter referred to as the motion mechanism) includes a Halbach permanent magnet array 1 and a mover, and the mover is located above the Halbach permanent magnet array 1. The mover includes n drive units 2 with the same structure, where n is an even number greater than 4 (such as 6, 8, 10, etc.); each drive unit 2 includes a coil group, which is composed of a plurality of coils 13. All drive units 2 in the mover are arranged in a centrally symmetrical manner relative to the center of the mover, and all coils 13 are arranged to form a centrally symmetrical coil array, and the symmetry centers of all drive units 2 coincide with the symmetry centers of the coil array. By optimizing the arrangement of the drive units 2 in the mover, when the drive units 2 meet the output requirements, the torque of the drive units 2 relative to the center of the mover is offset as much as possible, thereby reducing the requirements for the control system.

[0034] Based on the same concept, the present invention also provides a method for arranging a mover in a motion mechanism based on a Halbach permanent magnet array, wherein the mover in this method includes n drive units 2 of identical structure, where n is an even number greater than 4, and each drive unit 2 includes a coil group, which includes multiple coils 13. The number and direction of the drive units 2 in each direction are determined according to the speed and acceleration requirements of the motion mechanism 3 in different directions, so that the n drive units 2 are arranged in a centrally symmetrical manner relative to the center of the mover and all the coils 13 in the mover are arranged together to form a centrally symmetrical coil array, so that the torque of the drive units 2 relative to the center of the mover is offset as much as possible, thereby reducing the requirements for the control system. This arrangement of the drive units 2 can fully utilize the performance of the drive units, thereby obtaining a large driving force in the direction of large acceleration and a small driving force in the direction of small acceleration, avoiding power redundancy of the drive units 2 caused by excessive arrangement of the drive units 2. Through the reasonable arrangement of the drive units 2, the overall size of the motion platform can also be reduced, avoiding the situation where the size is too large and individual drive units 2 are not working when the two platforms are working and exchanging positions, further reducing the requirements for the control system.

[0035] like Figures 3 to 6As shown, the mover of the motion mechanism 3 consists of six drive units. Each drive unit has an identical structure, including a coil assembly. Each coil assembly includes three rectangular coils 13 of identical length. Therefore, the performance of each drive unit within the mover is consistent, that is, the output of each drive unit is the same. The motion mechanism 3 is located in a three-dimensional coordinate system. The plane defined by the X-axis and Y-axis is called the XY plane. The Halbach permanent magnet array 1 is located in the XY plane or parallel to the XY plane.

[0036] Six drive units are positioned above the Halbach permanent magnet array 1 and arranged in two rows and three columns, with the rows extending along the Y direction and the columns along the X direction. The first row includes the first drive unit a1, the second drive unit a2, and the third drive unit a3, arranged in sequence. The second row includes the fourth drive unit a4, the fifth drive unit a5, and the sixth drive unit a6, arranged in sequence. The coils 13 within the four drive units a1, a2, a5, and a6 all have the same length, parallel to the X direction. The coils 13 within the third drive unit a3 and the fourth drive unit a4 all have the same length, parallel to the Y direction, and perpendicular to the length of the coil 13 within the first drive unit a1. Each drive unit has consistent performance, meaning it generates the same output. The six drive units are arranged centrosymmetrically with respect to the center of the mover, and all coils 13 within the six drive units are also centrosymmetrically arranged with respect to the center of the mover. This minimizes the torque of the drive units relative to the center of the mover, thus reducing the requirements for the control system.

[0037] According to the force conditions of each drive unit in the Halbach permanent magnet array 1, the mover can obtain a greater speed and acceleration in the Y direction, and a smaller speed and acceleration in the X direction than in the Y direction. When the performance of each drive unit is consistent, the motion performance in the X direction is half of that in the Y direction. This layout can effectively utilize the performance of the drive unit under the condition that the Y direction stroke is large and the X direction stroke is small when the performance of each drive unit is constant, and avoids the power redundancy of the drive unit caused by too many drive units. Of course, Figure 3 In the drive unit layout shown, the X and Y directions can be swapped. Based on this drive unit layout, six degrees of freedom motion of the motion stage can be achieved.

[0038] like Figure 3 As shown, the central axes of the second drive unit a2 and the fifth drive unit a5 coincide with each other, and the output centers of all drive units are defined as the central symmetry points of each drive unit. When the mass of each drive unit is considered separately, the torques of each drive unit relative to the central symmetry point can be offset by the output of the drive unit itself.

[0039] like Figures 4 to 6 As shown, when the center of mass of the mover coincides with the output center, when the drive unit keeps the mover floating, the torque generated by the thrust Fy1 of the first drive unit a1 in the Y direction on the center of mass and the torque generated by the thrust Fy6 of the sixth drive unit a6 in the Y direction on the center of mass also cancel each other out; the torque generated by the thrust Fx3 of the third drive unit a3 in the X direction on the center of mass and the torque generated by the thrust Fx4 of the fourth drive unit a4 in the X direction on the center of mass cancel each other out; the torque generated by the thrust Fy2 of the second drive unit a2 in the Y direction on the center of mass and the torque generated by the thrust Fy5 of the fifth drive unit a5 in the Y direction on the center of mass also cancel each other out.

[0040] In order to keep the mover floating and moving in the XY plane or in a plane parallel to the XY plane, in addition to satisfying the offset of the torques generated on the center of mass by the thrusts in the X direction and the Y direction of each drive unit, the torque generated on the center of mass by the thrust Fz1 in the Z direction of the first drive unit a1 and the torque generated on the center of mass by the thrust Fz6 in the Z direction of the sixth drive unit a6 offset each other; the torque generated on the center of mass by the thrust Fz2 in the Z direction of the second drive unit a2 and the torque generated on the center of mass by the thrust Fz5 in the Z direction of the fifth drive unit a5 offset each other; the torque generated on the center of mass by the thrust Fz3 in the Z direction of the third drive unit a3 and the torque generated on the center of mass by the thrust Fz4 in the Z direction of the fourth drive unit a4 offset each other; by offsetting the torques of the drive units in the mover as much as possible, this reduces the requirements for the control system.

[0041] For the working conditions where the horizontal Y direction speed or acceleration requires a certain value, Figure 2 Compared to the drive unit arrangement shown, Figure 3 The drive unit arrangement shown provides a drive unit with lower losses for providing horizontal forces.

[0042] Of course, when the center of mass coincides with the output center, the first drive unit a1 and the second drive unit a2 can be regarded as a whole, and the fifth drive unit a5 and the sixth drive unit a6 can be regarded as a whole. The overall output torque satisfies that when the mover floats, the torque generated by the overall thrust of the first drive unit a1 and the second drive unit a2 in the Y direction on the center of mass and the torque generated by the overall thrust of the fifth drive unit a5 and the sixth drive unit a6 in the Y direction on the center of mass offset each other; the torque generated by the thrust Fx3 of the third drive unit a3 in the X direction on the center of mass and the torque generated by the thrust Fx4 of the fourth drive unit a4 in the X direction on the center of mass offset each other. When moving in the horizontal plane, in addition to satisfying the offset of the torques generated on the center of mass by the thrusts of the drive units in the mover in the X direction and the Y direction, the torque generated on the center of mass by the overall thrust of the first drive unit a1 and the second drive unit a2 in the Z direction and the torque generated on the center of mass by the overall thrust of the fifth drive unit a5 and the sixth drive unit a6 in the Z direction offset each other, and the torque generated on the center of mass by the thrust Fz3 of the third drive unit a3 in the Z direction and the torque generated on the center of mass by the thrust Fz4 of the fourth drive unit a4 in the Z direction offset each other; however, this is not the optimal solution for the control system because the control consistency of the drive units in the same direction cannot be satisfied.

[0043] like Figure 7 and Figure 8 As shown, the mover of the motion mechanism 3 can be composed of eight drive units. Preferably, each drive unit has the same structure, including a coil assembly, each coil assembly including three rectangular coils 13 of the same length. Therefore, the performance of each drive unit in the mover is consistent, that is, the output of each drive unit is the same. The motion mechanism 3 is located in a three-dimensional coordinate system. The plane defined by the X-axis and Y-axis is called the XY plane. The Halbach permanent magnet array 1 is located in the XY plane or parallel to the XY plane.

[0044] like Figure 7 As shown, when the X- and Y-phase velocities and acceleration requirements of the motion mechanism 3 are consistent, the eight drive units are located above the Halbach permanent magnet array 1 and arranged in two rows and four columns, with the rows extending along the Y direction and the columns extending along the X direction. The first row includes the first drive unit b1, the second drive unit b2, the third drive unit b3, and the fourth drive unit b4, which are arranged in sequence. The second row includes the fifth drive unit b5, the sixth drive unit b6, the seventh drive unit b7, and the eighth drive unit b8, which are arranged in sequence. The length directions of the coils 13 in the four drive units of the first drive unit b1, the second drive unit b2, the seventh drive unit b7, and the eighth drive unit b8 are the same and parallel to the Y direction. The length directions of the coils 13 in the four drive units of the third drive unit b3, the fourth drive unit b4, the fifth drive unit b5, and the sixth drive unit b6 are the same and parallel to the X direction, and perpendicular to the length direction of the coil 13 in the first drive unit.

[0045] Each drive unit has consistent performance, meaning that each drive unit has the same output. The eight drive units are arranged centrally and symmetrically relative to the center of the mover, and all coils 13 within the eight drive units are also arranged centrally and symmetrically. This allows the drive units' central moments relative to the mover to be offset as much as possible, thereby reducing the requirements for the control system. Based on the forces exerted on each drive unit in the Halbach permanent magnet array 1, the speed and acceleration achievable by the mover in the Y direction are equal to the speed and acceleration achievable in the X direction, and the achievable motion performance in the X direction is equal to the achievable motion performance in the Y direction. This layout effectively utilizes the performance of the drive units, improving work or production efficiency, when the drive unit performance is constant and the Y-direction travel is equal to the X-direction travel.

[0046] like Figure 8 As shown, when the X- and Y-phase velocity and acceleration requirements of the motion mechanism 3 are inconsistent, eight drive units are located above the Halbach permanent magnet array 1 and arranged in two rows and four columns, with the rows extending along the Y direction and the columns extending along the X direction. The first row includes the first drive unit c1, the second drive unit c2, the third drive unit c3, and the fourth drive unit c4, which are arranged in sequence. The second row includes the fifth drive unit c5, the sixth drive unit c6, the seventh drive unit c7, and the eighth drive unit c8, which are arranged in sequence. The length direction of the coils 13 in the first drive unit c1 and the eighth drive unit c8 is the same, both parallel to the Y direction. The length direction of the coils 13 in the six drive units, the second drive unit c2, the third drive unit c3, the fourth drive unit c4, the fifth drive unit c5, the sixth drive unit c6, and the seventh drive unit c7, is the same, both parallel to the X direction and perpendicular to the length direction of the coil 13 in the first drive unit.

[0047] Each drive unit has consistent performance, meaning that each drive unit has the same output. The eight drive units are arranged centrosymmetrically with respect to the center of the mover, and all coils 13 within the eight drive units are also arranged centrosymmetrically. This minimizes the torque of the drive units relative to the center of the mover, thereby reducing the requirements for the control system. Based on the forces acting on each drive unit in the Halbach permanent magnet array 1, the velocity and acceleration of the mover in the Y direction are greater than those in the X direction, and the kinematic performance in the Y direction is greater than that in the X direction. This layout effectively utilizes the performance of the drive units when the drive unit performance is constant and the Y-direction travel is greater than the X-direction travel.

[0048] The motion mechanism 3 provided by the present invention can be used in a motion platform based on the Halbach permanent magnet array 1, such as Figure 9 and Figure 10As shown, the motion platform mainly includes a motion mechanism 3, a position detection device and a main frame 7. The motion mechanism 3 is used to drive the motion platform, the position detection device is used to monitor the posture of the motion platform in the three-dimensional coordinate system, and the main frame 7 is used to install the mover and the position detection device.

[0049] Specifically, the bottom of the main frame 7 is equipped with a motion mechanism 3 and several feet 9, wherein the portion of the feet 9 protruding from the bottom surface of the main frame 7 is higher than the motion mechanism 3. The provision of the feet 9 can protect the drive unit in the motion mechanism and prevent the drive unit from being hit when the motion platform descends. The position detection device includes a type I sensor 8, a type II sensor 10, and a type III sensor 11. Among them, the type I sensor 8 is used to measure the displacement of the motion platform in the Z direction. There can be multiple type I sensors 8, such as Figure 9 As shown, four Type I sensors 8 are provided, mounted at the bottom of the four corners of the main frame 7. Type II sensors 10 are used to measure the displacement of the motion stage in the Y direction, and Type III sensors 11 are used to measure the displacement of the motion stage in the X direction. The Type II and Type III sensors 10, 11 are mounted on a sensor bracket 12, which in turn is attached to the main frame 7. The Type I and Type II sensors 8, 10 are preferably eddy current sensors, while the Type III sensor 11 is preferably a capacitive scale sensor.

[0050] In order to facilitate the loading of components, a loading mechanism may be provided on the moving platform to enable the components to be placed on the moving platform. Figure 9 As shown, the supporting mechanism includes a first connecting plate 5, a second connecting plate 6 and a microcrystalline glass part 4. The first connecting plate 5 is installed on the top of the main frame 7. The second connecting plate 6 is connected above the first connecting plate 5. The top of the second connecting plate 6 is connected to the microcrystalline glass part. The microcrystalline glass part can be used for grating measurement.

[0051] While the present invention has been described with reference to preferred embodiments, various modifications may be made and equivalent components may be substituted without departing from the scope of the present invention. In particular, the various technical features described in the various embodiments may be combined in any manner, provided no structural conflicts exist. The present invention is not limited to the specific embodiments disclosed herein, but encompasses all technical solutions within the scope of the claims.

Claims

1. A motion mechanism based on a Halbach permanent magnet array, comprising a mover, characterized in that: The mover includes n drive units with the same structure, where n is an even number greater than 4; Each of the drive units includes a coil group, which includes multiple coils. The n drive units are arranged in a centrally symmetrical manner relative to the center of the mover, and all the coils in the mover are arranged together to form a centrally symmetrical coil array, so that the moments of the n drive units relative to the center offset each other.

2. The motion mechanism based on the Halbach permanent magnet array according to claim 1, characterized in that: The mover includes 6 drive units, and the 6 drive units are arranged in two rows and three columns; the first row includes a first drive unit, a second drive unit and a third drive unit arranged in sequence, and the second row includes a fourth drive unit, a fifth drive unit and a sixth drive unit arranged in sequence; the length directions of the coils in the four drive units, namely, the first drive unit, the second drive unit, the fifth drive unit and the sixth drive unit, are the same; the length directions of the coils in the two drive units, namely, the third drive unit and the fourth drive unit, are the same and are both perpendicular to the length direction of the coils in the first drive unit.

3. The motion mechanism based on the Halbach permanent magnet array according to claim 1, characterized in that: The mover includes 8 drive units, and the 8 drive units are arranged in two rows and four columns; the first row includes a first drive unit, a second drive unit, a third drive unit and a fourth drive unit arranged in sequence, and the second row includes a fifth drive unit, a sixth drive unit, a seventh drive unit and an eighth drive unit arranged in sequence; the length directions of the coils in the four drive units of the first drive unit, the second drive unit, the seventh drive unit and the eighth drive unit are the same; the length directions of the coils in the four drive units of the third drive unit, the fourth drive unit, the fifth drive unit and the sixth drive unit are the same and are perpendicular to the length direction of the coils in the first drive unit.

4. The motion mechanism based on the Halbach permanent magnet array according to claim 1, characterized in that: The mover includes 8 drive units, and the 8 drive units are arranged in two rows and four columns; the first row includes a first drive unit, a second drive unit, a third drive unit and a fourth drive unit arranged in sequence, and the second row includes a fifth drive unit, a sixth drive unit, a seventh drive unit and an eighth drive unit arranged in sequence; the length directions of the coils in the first drive unit and the eighth drive unit are the same; the length directions of the coils in the six drive units, namely, the second drive unit, the third drive unit, the fourth drive unit, the fifth drive unit, the sixth drive unit and the seventh drive unit, are the same and are perpendicular to the length direction of the coil in the first drive unit.

5. The motion mechanism based on the Halbach permanent magnet array according to any one of claims 1 to 4, characterized in that: It also includes a stator, which is a permanent magnet array of a Halbach structure, and the mover is located above the stator.

6. A method for arranging a drive unit, characterized in that: Used in a motion mechanism based on a Halbach permanent magnet array, the motion mechanism includes a stator and a mover, the stator is a permanent magnet array of a Halbach structure, the mover includes n drive units, n is an even number greater than 4, each of the drive units includes a coil group, and the coil group includes a plurality of coils; the mover is placed above the stator, and the arrangement number and direction of the drive units in each direction are determined according to the requirements of the speed and acceleration of the motion mechanism in different directions, so that the n drive units are arranged in a centrally symmetrical manner relative to the center of the mover and all the coils in the mover are arranged together to form a centrally symmetrical coil array, so that the torques of the n drive units relative to the center are offset, thereby reducing the requirements for the control system.

7. A motion platform based on a Halbach permanent magnet array, characterized in that: The invention comprises the motion mechanism described in any one of claims 1 to 5.

8. The motion stage based on the Halbach permanent magnet array according to claim 7, characterized in that: The motion platform further comprises a position detection device and a main frame. The position detection device is used to monitor the posture of the motion platform in a three-dimensional coordinate system, and the main frame is used to install the mover and the position detection device.

9. The motion stage based on the Halbach permanent magnet array according to claim 8, characterized in that: The position detection device includes a type I sensor, a type II sensor and a type III sensor, the type I sensor is used to measure the displacement of the moving table in the Z direction, the type II sensor is used to measure the displacement of the moving table in the Y direction, and the type III sensor is used to measure the displacement of the moving table in the X direction.

10. The motion stage based on the Halbach permanent magnet array according to claim 9, characterized in that: The type I sensor and the type II sensor are eddy current sensors, and the type III sensor is a capacitive scale sensor.

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