Light field detector based on randomly distributed micro / nano island film

Abstract

The invention discloses a light field detector based on a randomly distributed micro / nano island film. The light field detector comprises a photosensitive array layer, a transparent protection window and a micro / nano island film layer. The thin film is composed of micro / nano islands with randomly distributed morphology and size, a uniform thin film is formed through a physical vapor deposition technology, vacuum annealing treatment is carried out at a specific temperature for more than half an hour, and an irregular micro / nano island structure is generated by using surface tension. By regulating and controlling the deposition condition and the annealing process, the morphology and the size of the island particles can be adjusted on the micro / nano scale, so that the average size of the island particles is equivalent to that of the photosensitive units, and different optical responses of different photosensitive units to incident light field information are realized. A mapping relation between light field information and light sensing unit signals is established by adopting convolutional neural network model optimization and through a multi-layer network structure and a data feedback mechanism, and real-time efficient sensing of incident light field information is realized. The optical field detector has high-precision, high-efficiency and high-integration-level optical field detection capability.

Description

Technical Field

[0001] The invention belongs to the field of spectrum and imaging technology, and in particular relates to a light field detector based on randomly distributed micro / nano island films. Background Art

[0002] Light waves have basic properties such as light intensity, frequency, phase, polarization state and spatial distribution. They cover the light beam emitted by the light source and the light beam reflected, transmitted and scattered by the object or interface, and carry intrinsic information related to the light source or object. In the existing technology, detection methods such as polarization imaging and hyperspectral imaging can be used to measure these light wave properties, and infer the composition, structure and distribution of the light source or object through these measurement data. However, traditional detection technology can usually only obtain the two-dimensional properties of light waves. For example, spectrometers can detect light intensity and frequency, and cameras can capture light intensity and spatial distribution information. Although some technologies such as polarization imaging and hyperspectral cameras can simultaneously obtain three-dimensional light wave properties, these technologies have problems such as limited detection capabilities, high prices, and large equipment size, which limit their widespread application.

[0003] With the rapid development of the field of micro-nano optics, a new technical approach to achieve multi-dimensional light field perception has been provided. Through the microstructure's ability to perceive the multi-dimensional information of the light field, combined with advanced algorithms, accurate detection of the multi-dimensional properties of unknown light wave fields can be achieved. Multi-dimensional light field sensing devices based on microstructures have become the focus of current technical research due to their advantages such as high detection accuracy, high integration, miniaturization and low cost. However, when preparing efficient microstructures over a large area, especially in short-wave bands (such as ultraviolet and visible light bands), there are technical bottlenecks such as complex processes, high costs and large processing errors.

[0004] The present invention provides a light field detection device based on randomly distributed micro / nano island films, which cleverly utilizes micro / nano island particles with randomly distributed morphologies to construct a super pixel structure. During the processing of the micro / nano island particles, their morphologies and spatial distributions are randomly generated, resulting in the micro / nano island particles in each photosensitive unit being different in quantity, size and morphology, thereby making the optical responses of different photosensitive units different. Through the application of neural network algorithms, it is possible to detect multidimensional information such as the light intensity, polarization state, spatial distribution and frequency of the incident light field, establish a mapping relationship between these information, and thereby realize functions such as polarization detection, spectral information reconstruction and imaging of unknown incident light. Summary of the invention

[0005] The embodiment of the present invention provides a light field detection device based on randomly distributed micro / nano island films, which is used to solve the shortcomings of the existing technical solutions, such as low efficiency of microstructure preparation, inability to carry out large-area preparation, and high cost, thereby limiting commercial applications such as polarization detection, imaging, and spectral reconstruction.

[0006] The embodiment of the present invention provides a light field detection device based on randomly distributed micro / nano island thin films, comprising: a photosensitive array layer (1), a micro / nano island thin film layer (2), and a transparent protective window (3), wherein the micro / nano island thin film layer is composed of micro / nano island thin film layers with different morphologies and sizes; the average size of the micro / nano island particles is controlled by adjusting the deposition rate, temperature and vacuum degree, and is suitable for a wavelength range of 200 nm to 2500 nm.

[0007] The embodiment of the present invention provides a light field detection device based on a randomly distributed micro / nano island film, wherein the micro / nano island structure layer has the characteristics of random morphology and random size, so that the overall morphology, quantity and size of the micro / nano island structure in each photosensitive unit are different, thereby making each photosensitive unit have different light response capabilities to the incident light field; wherein the size of the micro / nano island can be regulated by controlling the preparation conditions, and its size is normally distributed, and the average size range of the micro / nano island is 0.5nm 2 ~200um 2 .

[0008] The embodiment of the present invention provides a light field detection device based on a randomly distributed micro / nano island film, wherein the thickness of the micro / nano island film ranges from 10nm to 1um; wherein the material for preparing the micro / nano island film is composed of one of gold materials.

[0009] The embodiment of the present invention provides a light field detection device based on a randomly distributed micro / nano island film. The photosensitive array layer (1) is applicable to any device having a photosensitive array, such as CCD or CMOS.

[0010] An embodiment of the present invention provides a light field detection device based on a randomly distributed micro / nano island film, wherein the vertical distance between the micro / nano island film and the photosensitive unit should be controlled within the Fresnel diffraction zone.

[0011] The embodiment of the present invention provides a light field detection device based on a randomly distributed micro / nano island film, wherein the transparent protection window (3) is glass or quartz or other light-transmitting materials; and gas or other any transparent materials can be filled between the light modulation layer and the photosensitive array, and the two can also be precisely fitted without a gap. The protection window here mainly prevents damage to the device or increases light transmittance.

[0012] The embodiment of the present invention provides a light field detection device based on randomly distributed micro / nano island films. The specific method is: first, a transparent material gap layer is spin-coated or evaporated on the surface of a photosensitive array. This step can be selected according to actual needs; then, a thin film layer is deposited by evaporation; finally, the film is vacuum annealed to form a micro / nano island thin film layer.

[0013] The embodiment of the present invention provides a light field detection device based on a randomly distributed micro / nano island film. The number and morphology of micro / nano island particles contained in the microstructure units in the micro / nano island film layer are different, and the optical response of each microstructure unit to the incident light field is also different, which greatly increases the richness of the modulation of different incident light fields, and also increases the measurement accuracy and integration of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the device structure of the present invention.

[0015] Figure 2 for Figure 1 Cross-sectional view of part of the structure.

[0016] Figure 3 for Figure 1 Top view of the micro / nanoisland film layer.

[0017] Figure 4 Schematic diagram of micro / nano-island thin film layers with other sizes and morphologies produced by changing the preparation conditions. DETAILED DESCRIPTION

[0018] In order to make the technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be described more clearly and comprehensively in conjunction with the accompanying drawings in the embodiments of the present invention.

[0019] The following is combined with Figure 1 The present invention describes an optical field detection device based on a randomly distributed micro / nano island film according to an embodiment of the present invention, comprising: a micro / nano island film layer, a photosensitive array layer, and a transparent protective window. A plurality of micro / nano island particles with different morphologies and sizes grow on the surface area of ​​the micro / nano island film layer. A number of nano island particles are randomly distributed in a microstructure unit equivalent to a photosensitive array unit. The number, size, and morphology of the micro / nano island particles are different in different microstructure units, so that the optical response in each microstructure unit is different.

[0020] The optical field detection device based on the micro / nano island film of the present invention has a structural schematic diagram as shown in FIG. Figure 1 As shown, there are four preparation options: The first option: Step 1: Spin coating or evaporating a transparent material gap layer on the surface of the photosensitive array; Step 2: Deposit a thin film layer by evaporation; Step 3: Use vacuum annealing to form a micro / nano island structure layer on the film.

[0021] Second option: The first step: depositing a thin film layer directly on the surface of the photosensitive array layer; Step 2: Perform vacuum annealing at an appropriate temperature to form a micro / nano island structure layer on the film.

[0022] The third option: Step 1: depositing a thin film layer on the surface of a transparent substrate; Step 2: Perform vacuum annealing at an appropriate temperature to form a micro / nano island structure layer on the film; Step 3: Attach the prepared micro / nano island structure layer surface to the photosensitive array layer surface.

[0023] The third option: Step 1: depositing a thin film layer on the surface of a transparent substrate; Step 2: Perform vacuum annealing at an appropriate temperature to form a micro / nano island structure layer on the film; Step 3: Back-stick the prepared micro / nano island film layer surface to the photosensitive array layer surface.

[0024] In addition, micro / nano islands with different morphologies and sizes can be randomly generated by changing the deposition conditions or vacuum annealing conditions. This will greatly reduce processing costs, improve preparation efficiency, and meet the needs of light modulation layers of various sizes.

[0025] Combination Figure 2 and Figure 3 From the cross-sectional and top-down views of the light modulation layer, it can be found that the microstructure units corresponding to each photosensitive array have different internal structural morphologies. By utilizing the differences in the modulation of the incident light field by each microstructure unit and using artificial intelligence algorithms to pick up dimensional information such as the intensity, polarization state, spatial distribution, and frequency of the incident light field, and establishing a mapping relationship between them, high-precision perception of the incident light field spectrum, polarization, and spatial distribution can be achieved.

[0026] Figure 4 What is shown are possible types of microstructures in the micro / nano island film layer, but the present invention is not limited to this type; during the experimental preparation process, the vacuum annealing temperature, time and deposition form can be adjusted, and the overall morphology, size and number of the micro / nano islands on the entire structural level can be roughly controlled.

[0027] The above description is only for illustrating the embodiments and technical principles of the present application, and is not intended to limit the present invention.

Claims

1. A light field detection device based on randomly distributed micro / nano island films, characterized in that: include: A photosensitive array layer (1), a micro / nano island thin film layer (2), and a transparent protective window (3), wherein the micro / nano island thin film layer is composed of micro / nano island thin film layers of different shapes and sizes; the average size of the micro / nano island particles is controlled by adjusting the deposition rate, temperature and vacuum degree, and is suitable for a wavelength range of 200 nm to 2500 nm.

2. A light field detection device based on randomly distributed micro / nano island thin films according to claim 1, characterized in that: The micro / nano island structure layer has the characteristics of random morphology and random size, so that the overall morphology, quantity and size of the micro / nano island structure in each photosensitive unit are different, so that the optical response ability of each photosensitive unit to the incident light field is different; The size of the micro / nano islands can be adjusted by controlling the preparation conditions. The size is normally distributed, and the average micro / nano island size range is 0.5um. 2 ~200um 2 .

3. A light field detection device based on randomly distributed micro / nano island films according to claim 1, characterized in that: The thickness of the micro / nano island film ranges from 10nm to 1um; the material used to prepare the micro / nano island film is composed of gold.

4. The optical field detection device based on randomly distributed micro / nano island thin film according to claim 1, characterized in that: The photosensitive array layer (1) is applicable to any device having a photosensitive array, such as CCD or CMOS.

5. The optical field detection device based on randomly distributed micro / nano island thin film according to claim 1, characterized in that: The vertical distance between the micro / nano island film and the photosensitive unit should be controlled within the Fresnel diffraction zone.

6. The optical field detection device based on randomly distributed micro / nano island thin film according to claim 1, characterized in that: The transparent protective window (3) is made of glass, quartz or other light-transmitting materials; and gas or other any transparent material can be filled between the micro / nano island film layer and the photosensitive array, and the two can also be precisely fitted together without any gap.

7. A light field detection device based on randomly distributed micro / nano island films according to claim 1, characterized in that: The specific method is: first, a transparent material gap layer is spin-coated or evaporated on the surface of the photosensitive array, and this step can be selected according to actual needs; then a thin film layer is deposited by evaporation; finally, vacuum annealing is used to collapse the film to form a micro / nano island thin film layer.

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