Cleaning device

Abstract

The invention discloses a cleaning device, and relates to the technical field of carrier cleaning, and the cleaning device comprises a conveying mechanism, and a feeding mechanism, a cleaning mechanism, an overturning mechanism, an air blowing mechanism and a discharging mechanism which are arranged along the conveying direction of the conveying mechanism, the cleaning device is provided with a feeding area, a cleaning area, a drying area and a discharging area which are sequentially arranged in the conveying direction of the conveying mechanism. The feeding mechanism is located in the feeding area and used for conveying the carriers to the conveying mechanism. The cleaning mechanism is located in the cleaning area and comprises a cleaning assembly and a side edge brushing assembly, the side edge brushing assembly is arranged on one side of the cleaning assembly, and the cleaning assembly and the side edge brushing assembly are both used for cleaning the carrier; the turnover mechanism is located in the cleaning area, corresponds to the cleaning assembly and is used for driving the carrier to turn over; according to the technical scheme provided by the invention, the automation degree is high, the cleaning of the carrier is also very comprehensive, and the cleaning efficiency and the cleaning effect are relatively good.

Description

Technical Field

[0001] The present invention relates to the technical field of carrier cleaning, and in particular to a cleaning device. Background Art

[0002] In the manufacture of microelectronics and semiconductors, a carrier is required to transport the photoresist barrels from the warehouse to the clean room. Since the carrier will inevitably be contaminated with dust and other impurities during the transportation process, the outer surface of the carrier needs to be cleaned to prevent the carrier from carrying dust and other impurities into the clean room.

[0003] At present, the existing cleaning methods for the carrier and the photoresist barrel loaded in the carrier mostly rely on manual wiping and cleaning. Such cleaning methods not only require a lot of manpower, but also have unsatisfactory cleaning efficiency and cleaning effect. Summary of the invention

[0004] The main purpose of the present invention is to provide a cleaning device, which aims to solve the problem that the cleaning efficiency and cleaning effect of the carrier are not ideal when the carrier is cleaned manually in the prior art.

[0005] To achieve the above-mentioned purpose, the present invention proposes a cleaning device for cleaning a carrier loaded with a photoresist barrel, comprising a conveying mechanism and a loading mechanism, a cleaning mechanism, a flipping mechanism, a blowing mechanism and a unloading mechanism arranged along the conveying direction of the conveying mechanism, wherein the cleaning device has a loading area, a cleaning area, a drying area and an unloading area arranged in sequence along the conveying direction of the conveying mechanism;

[0006] The loading mechanism is located in the loading area and is used to transport the carrier to the conveying mechanism;

[0007] The cleaning mechanism is located in the cleaning area, and includes a cleaning component and a side brush component. The side brush component is arranged on one side of the cleaning component, and both the cleaning component and the side brush component are used to clean the carrier;

[0008] The flipping mechanism is located in the cleaning area and is arranged corresponding to the cleaning component. The flipping mechanism is used to drive the carrier to flip so that the side of the carrier away from the cleaning component faces the cleaning component for cleaning;

[0009] The blower mechanism is located in the drying area to blow dry the carrier after cleaning;

[0010] The unloading mechanism is located in the unloading area and is used for transporting the carrier after being blown dry.

[0011] In one embodiment, the cleaning component includes a water washing component and an air blowing component, and the water washing component and the air blowing component are both arranged on the conveying mechanism and located at the bottom of the carrier. The number of the water washing component and the number of the air blowing components are both multiple, and the multiple water washing components and the multiple air blowing components are staggered along the conveying direction of the conveying mechanism.

[0012] In one embodiment, the water washing component is provided with a rotating nozzle protruding toward one side of the carrier, and the rotating nozzle can be inserted into the flipped carrier to clean the inner peripheral wall of the carrier.

[0013] In one embodiment, the flipping mechanism includes a hanger structure, an adjustment component, a flipping component and a clamping component. The hanger structure is arranged on the outer peripheral side of the conveying mechanism. The adjustment component is connected to the flipping component. The adjustment component is arranged on the hanger structure. The adjustment component can drive the flipping component to move on the inner side of the hanger structure. The clamping component is arranged on the side of the flipping component facing the conveying mechanism. The clamping component is used to clamp the carrier, and the flipping component is used to drive the clamping component and the clamped carrier to flip.

[0014] In one embodiment, the hanger structure includes two support columns, a crossbeam connecting the two support columns, and a horizontal adjustment caster disposed on the two support columns and rotatably connected to the crossbeam away from the crossbeam;

[0015] The adjustment assembly includes a first driving mechanism, a first guide rail, a second driving mechanism, a second guide rail and a mounting frame, the first guide rail being arranged on the crossbeam, the extension direction of the first guide rail being consistent with the extension direction of the crossbeam, the flipping assembly being arranged on the mounting frame, the mounting frame being slidably arranged on the first guide rail, the second guide rail being arranged on the mounting frame, the extension direction of the second guide rail being consistent with the extension direction of the mounting frame, the flipping assembly being slidably arranged on the second guide rail, the first driving mechanism being used to drive the mounting frame, the flipping assembly and the second driving mechanism to move along the extension direction of the first guide rail, the second driving mechanism being used to drive the clamping assembly to move along the extension direction of the second guide rail to adjust the positions of the flipping assembly and the clamping assembly so that the clamping assembly clamps the carrier.

[0016] In one embodiment, the first guide rail includes a main guide rail and a secondary guide rail, the main guide rail is arranged on the cross beam, the secondary guide rail is arranged on the horizontal adjustment caster, the extension direction of the secondary guide rail is consistent with the extension direction of the main guide rail, and the second driving mechanism is slidably arranged on the secondary guide rail.

[0017] In one embodiment, the loading mechanism and / or the unloading mechanism comprises a loading rack, one end of the loading rack has an escape space, and the escape space is used for parking a transfer vehicle of the transfer vehicle;

[0018] The lifting assembly is arranged on the feeding frame;

[0019] The conveying assembly is arranged on the lifting assembly, and the lifting assembly is drivingly connected to the conveying assembly to drive the conveying assembly to move up and down between a first position and a second position, wherein the second position is located above the first position;

[0020] In the first position, the conveying assembly is used to support the carrier on the transfer vehicle located in the avoidance space;

[0021] In the second position, the conveying assembly is used to convey the carrier carried thereon to the conveying mechanism of the cleaning device; and / or

[0022] Guide components are provided on both sides of the loading rack, and the guide components are used to guide the carrier when the conveying component conveys the carrier; and / or

[0023] The loading rack is also provided with a weighing module, and the weighing module is used to weigh the carrier to obtain the loading status information of the carrier; and / or

[0024] The loading frame is provided with brake components at both ends along the conveying direction of the conveying mechanism, and the brake components are used to prevent the carrier from sliding off the conveying component.

[0025] In one embodiment, the conveying mechanism comprises a conveying frame;

[0026] Two roller conveying assemblies are rotatably disposed at two ends of the conveying frame, and the two roller conveying assemblies are correspondingly and spaced apart to form an installation space;

[0027] A first transmission member is disposed between the two roller transmission assemblies and is respectively connected to the two roller transmission assemblies in a transmission manner;

[0028] A driving member is disposed on the conveying frame and is linked to the first transmission member. The driving member drives the first transmission member to drive the two roller conveying assemblies to operate synchronously to transport the carrier.

[0029] In one embodiment, the blowing mechanism includes two support frames, a first blowing section, a second blowing section, a third blowing section and a fourth blowing section, the two support frames are arranged on both sides of the conveying mechanism, the first blowing section is rotatably arranged on one of the support frames, the second blowing section is rotatably arranged on the other support frame and corresponds to the first blowing section, two ends of the third blowing section are rotatably connected to the two support frames and are located above the two support frames, and the fourth blowing section is arranged in the conveying mechanism and corresponds to the third blowing section.

[0030] In one embodiment, the side brushing mechanism is used to brush the peripheral side of the carrier, and the side brushing mechanism includes a third guide rail, a third driving mechanism and a brushing assembly. The third guide rail and the third driving mechanism are respectively located on opposite sides of the brushing assembly and are respectively provided on the conveying mechanism. The brushing assembly is slidably connected to the third guide rail, and the third driving mechanism is used to drive the brushing assembly to reciprocate along the extension direction of the third guide rail to brush the outer peripheral side of the carrier. The brushing assembly includes a cleaning tube and a brush, and the cleaning tube is provided above the brush.

[0031] The technical solution of the present invention is configured so that when the carrier needs to be cleaned after use, the cleaning device can more efficiently and automatically clean the carrier. The cleaning device can not only automatically clean the carrier, but also achieve comprehensive cleaning through the cooperation of the cleaning components, side brushing mechanisms and flipping mechanisms in the cleaning mechanism. Therefore, the cleaning device not only has a high degree of automation, but also cleans the carrier comprehensively, thereby improving the cleaning efficiency and cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0033] Figure 1 A schematic structural diagram of an embodiment of a cleaning device provided by the present invention;

[0034] Figure 2 A schematic diagram of the structure of the cleaning device provided by the present invention without the shell assembly;

[0035] Figure 3 A schematic structural diagram of another embodiment of the cleaning device provided by the present invention;

[0036] Figure 4A schematic structural diagram of another embodiment of the cleaning device provided by the present invention;

[0037] Figure 5 for Figure 4 The structural diagram of the flipping mechanism;

[0038] Figure 6 for Figure 4 A schematic diagram of the structure of the middle lifting mechanism in the first position;

[0039] Figure 7 for Figure 4 A schematic diagram of the structure of the middle lifting mechanism in the second position;

[0040] Figure 8 for Figure 6 A schematic diagram of the structure of the lifting assembly and the conveying assembly;

[0041] Fig. 9 for Figure 4 The structural diagram of the transmission mechanism;

[0042] Fig.10 for Fig. 9 A schematic diagram of the structure of the transmission mechanism part being disassembled;

[0043] Fig.11 for Fig. 9 Schematic diagram of the structure of the middle drum body.

[0044] Description of Figure Numbers:

[0045] 100, cleaning device; 10, feeding mechanism; 11, feeding frame; 111, main body; 112, mounting portion; 113, avoidance space; 12, conveying assembly; 121, supporting portion; 122, first conveying portion; 123, second conveying portion; 13, lifting assembly; 131, power portion; 132, first driving portion; 133, second driving portion; 134, linkage portion; 14, guide assembly; 141, connecting frame; 142, guide wheel; 15, brake assembly; 151, telescopic cylinder; 152, telescopic column; 153, buffer block; 16, weighing module; 20, transmission mechanism; 21, transmission frame; 211, first bracket; 212, second bracket; 213, protective cover; 22, roller transmission assembly; 221, roller body; 222, first toothed disc; 223, second toothed disc; 224, anti-slip sleeve; 23, driving member; 24, first transmission member; 25, recovery mechanism; 251, water tank; 252, storage box; 30, Isolation mechanism; 31, isolation frame; 32, enclosure; 33, door assembly; 40, cleaning mechanism; 41, cleaning assembly; 411, water washing component; 4111, rotating nozzle; 412, air blowing component; 413, nozzle; 42, side brushing assembly; 421, third guide rail; 422, cleaning pipe; 423, brushing brush; 50, turning mechanism; 51, hanger structure; 511, support column; 512, crossbeam; 52, adjustment assembly; 521, first driving mechanism ; 522, first guide rail; 5221, main guide rail; 5222, auxiliary guide rail; 523, mounting frame; 524, second driving mechanism; 525, second guide rail; 53, flip assembly; 54, clamping assembly; 55, horizontal adjustment casters; 60, blower mechanism; 61, support frame; 62, first blowing section; 63, second blowing section; 64, third blowing section; 65, fourth blowing section; 70, unloading mechanism; 80, shell assembly; 81, shell; 82, exhaust fan.

[0046] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0047] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0048] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0049] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0050] Most of the existing cleaning methods for carriers can only rely on manual wiping and cleaning, which not only requires a lot of manpower, but also has unsatisfactory cleaning efficiency and cleaning effect.

[0051] The present invention provides a cleaning device 100 .

[0052] See also Figures 1 to 3In one embodiment of the present invention, the cleaning device 100 is used to clean a carrier loaded with a photoresist barrel, and includes a conveying mechanism 20 and a loading mechanism 10, a cleaning mechanism 40, a flipping mechanism 50, a blower mechanism 60 and a unloading mechanism 70 arranged along the conveying direction of the conveying mechanism 20. The cleaning device 100 has a loading area, a cleaning area, a drying area and an unloading area arranged in sequence along the conveying direction of the conveying mechanism 20; the loading mechanism 10 is located in the loading area to transport the carrier to the conveying mechanism 20; the cleaning mechanism 40 is located in the cleaning area, and the cleaning mechanism 40 includes a cleaning component 41 and a side brushing assembly 42, the side brushing assembly 42 is arranged on one side of the cleaning assembly 41, and the cleaning assembly 41 and the side brushing assembly 42 are both used for cleaning the carrier; the flipping mechanism 50 is located in the cleaning area and is arranged corresponding to the cleaning assembly 41, the flipping mechanism 50 is used to drive the carrier to flip so that the side of the carrier away from the cleaning assembly 41 is cleaned toward the cleaning assembly 41; the blowing mechanism 60 is located in the drying area to blow dry the carrier after cleaning; the unloading mechanism 70 is located in the unloading area to transport the carrier after drying.

[0053] The technical solution of the present invention is to arrange a feeding mechanism 10, a cleaning mechanism 40, a turning mechanism 50, a blowing mechanism 60 and a unloading mechanism 70 along the conveying direction of the conveying mechanism 20, wherein the feeding area, the cleaning area, the drying area and the unloading area are sequentially divided along the extending direction of the conveying mechanism 20, wherein the feeding mechanism 10 is arranged at one end of the conveying mechanism 20 and is located in the feeding area, and the cleaning mechanism 40 is arranged in the cleaning area of ​​the conveying mechanism 20, the blowing mechanism 60 is arranged in the drying area of ​​the conveying mechanism 20, and the unloading mechanism 70 is arranged in the unloading area of ​​the conveying mechanism 20. In this embodiment, the feeding mechanism 10 is mainly used to transfer the auxiliary The carrier sprayed with photoresist is transferred to the conveying mechanism 20, and the cleaning mechanism 40 is arranged in the cleaning area and is partially located above the conveying mechanism 20. The cleaning mechanism 40 includes a cleaning component 41 and a side brushing component 42, wherein the cleaning component 41 is arranged inside the conveying mechanism 20, and the side brushing component 42 is movably arranged above the conveying mechanism 20. When the conveying mechanism 20 conveys the carrier, the cleaning component 41 can clean the bottom of the carrier at the bottom, and the side brushing component 42 can brush the periphery of the carrier. Since the cleaning component 41 is arranged inside the conveying mechanism 20, it is not The upper surface of the carrier can be cleaned. In this embodiment, a flip component 53 is provided corresponding to the cleaning component 41, wherein the flip component 53 can clamp and flip the carrier after the bottom of the carrier is cleaned, so that the side of the carrier that originally faces away from the cleaning component 41 can be cleaned by the cleaning component 41, so that the carrier is fully cleaned. When the carrier moves from the cleaning area of ​​the conveying mechanism 20 to the drying area, the blower mechanism 60 in the drying area will blow air to the periphery of the carrier, so as to blow away the water stains on the periphery of the carrier, thereby achieving the effect of drying the carrier. After the blowing of the carrier is completed, it will be on the conveying area of ​​the conveying mechanism 20. The carrier is then transferred to the unloading area through the unloading mechanism 70 arranged in the unloading area to the transfer vehicle for transportation. Through such an arrangement, when the carrier needs to be cleaned after use, the cleaning device 100 can be used to more efficiently and automatically clean the carrier. The cleaning device 100 can not only automatically clean the carrier, but also can cooperate with the cleaning component 41 in the cleaning mechanism 40 and the side brushing mechanism and the flipping mechanism 50 to achieve comprehensive cleaning. Therefore, the cleaning device 100 not only has a high degree of automation, but also cleans the carrier comprehensively, thereby making the cleaning efficiency and cleaning effect better.

[0054] In one embodiment, if Figure 4As shown, the cleaning component 41 includes a water washing component 411 and an air blowing component 412. The water washing component 411 and the air blowing component 412 are both arranged on the conveying mechanism 20 and located at the bottom of the carrier. The number of the water washing component 411 and the number of the air blowing component 412 are both multiple, and the multiple water washing components 411 and the multiple air blowing components 412 are staggered along the conveying direction of the conveying mechanism 20. In order to enable the cleaning component 41 to better clean the upper and lower end surfaces of the carrier, in the present embodiment, the cleaning component 41 includes a water washing component 411 and an air blowing component 412, wherein the water washing component 411 and the air blowing component 412 are provided in plurality, and the plurality of water washing components 411 and the plurality of air blowing components 412 are arranged at staggered intervals along the conveying direction of the conveying mechanism 20, and the water washing component 411 and the air blowing component 412 are both provided with nozzles 413 facing upward, and the water washing component 411 washes the side of the carrier facing the water washing component 411 with water through the nozzle 413, and the air blowing component 412 cooperates with the water The washing component 411 blows air on the surface of the carrier, so that impurities contaminated on the end surface of the carrier are easier to detach, thereby improving the cleaning effect. In this embodiment, multiple water washing components 411 and multiple air blowing components 412 are detachably arranged between the conveying mechanism 20, and the multiple water washing components 411 are connected to the cleaning water source, while the multiple air blowing components 412 are connected to power elements such as air pumps. In other embodiments, the water washing component 411 can also be connected to the recovery mechanism 25 to reuse the water recovered and treated in the recovery mechanism 25, and no excessive restrictions are made on this.

[0055] Specifically, the water washing component 411 is provided with a rotating nozzle 4111 protruding toward one side of the carrier, and the rotating nozzle 4111 can be inserted into the carrier after flipping to clean the inner peripheral wall of the carrier. In order to facilitate the cleaning of the inner peripheral wall of the carrier after flipping through the flipping mechanism 50, in this embodiment, a rotating nozzle 4111 is protruding upward on a water washing component 411, and the carrier will not collide with the rotating nozzle 4111 when it moves normally through the conveying mechanism 20. When the flipping mechanism 50 flips the carrier, the cavity opening of the accommodating cavity formed by the carrier will face the water washing component 411. At this time, the rotating nozzle 4111 is inserted into the accommodating cavity of the carrier. Since the rotating nozzle 4111 will rotate when spraying water, the rotating nozzle 4111 can better spray water on the peripheral wall of the accommodating cavity of the carrier, so that the water washing component can clean the carrier more comprehensively, so that the cleaning effect is better.

[0056] In one embodiment, if Figure 5As shown, the flipping mechanism 50 includes a hanger structure 51, an adjusting component 52, a flipping component 53 and a clamping component 54. The hanger structure 51 is arranged on the outer peripheral side of the conveying mechanism 20. The adjusting component 52 is connected to the flipping component 53. The adjusting component 52 is arranged on the hanger structure 51. The adjusting component 52 can drive the flipping component 53 to move on the inner side of the hanger structure 51. The clamping component 54 is arranged on the side of the flipping component 53 facing the conveying mechanism 20. The clamping component 54 is used to clamp the carrier, and the flipping component 53 is used to drive the clamping component 54 and the clamped carrier to flip. In order to enable the flipping mechanism 50 to better clamp and flip the carrier, in the present embodiment, the flipping mechanism 50 includes a hanger structure 51, an adjustment component 52, a flipping component 53 and a clamping component 54, wherein the hanger structure 51 is supported on the outer peripheral side of the cleaning area of ​​the conveying mechanism 20 and is arranged corresponding to the cleaning component 41 in the cleaning mechanism 40, and the adjustment component 52 is arranged on the hanger structure 51, the flipping component 53 is arranged on the adjustment component 52, and the clamping component 54 is vertically arranged on the flipping component 53. When the clamping component 54 needs to clamp the carrier and flip it, the adjustment component 52 needs to be adjusted to the hanger structure 51. The frame structure 51 is the origin and drives the flipping assembly 53 and the clamping assembly 54 to move toward the carrier. Then, the clamping assembly 54 clamps part of the carrier. After that, the adjusting assembly 52 drives the flipping assembly 53 and the clamping assembly 54 to drive the carrier to lift upward synchronously. After the lifting action is completed, the flipping assembly 53 drives the clamping assembly 54 to drive the carrier to flip 180 degrees synchronously, so that the carrier flips as a whole. Then, the adjusting assembly 52 drives the flipping assembly 53 and the clamping assembly 54 to drive the carrier to lower downward, and the inner cavity wall of the carrier's accommodating cavity is washed with water by the water washing component 411 in the above embodiment.

[0057] Specifically, the hanger structure 51 includes two support columns 511, a crossbeam 512 connecting the two support columns 511, and a horizontal adjustment caster 55 rotatably connected to the two support columns 511 away from the crossbeam 512; the adjustment component 52 includes a first driving mechanism 521, a first guide rail 522, a second driving mechanism 524, a second guide rail 525 and a mounting frame 523, the first guide rail 522 is arranged on the crossbeam 512, and the extension direction of the first guide rail 522 is consistent with the extension direction of the crossbeam 512, the flip component 53 is arranged on the mounting frame 523, and the mounting frame 523 is slidably arranged on the first guide rail 522, The second guide rail 525 is arranged on the mounting frame 523, and the extension direction of the second guide rail 525 is consistent with the extension direction of the mounting frame 523. The flipping assembly 53 is slidably arranged on the second guide rail 525. The first driving mechanism 521 is used to drive the mounting frame 523, the flipping assembly 53 and the second driving mechanism 524 to move along the extension direction of the first guide rail 522. The second driving mechanism 524 is used to drive the clamping assembly 54 to move along the extension direction of the second guide rail 525 to adjust the positions of the flipping assembly 53 and the clamping assembly 54 so that the clamping assembly 54 clamps the carrier.In this embodiment, the hanger structure 51 includes two parallel support columns 511 and a cross beam 512 and a horizontal adjustment caster 55 of the two support columns 511 away from the cross beam 512. The two support columns 511 are respectively located on both sides of the conveying mechanism 20, and the cross beam 512 is provided with the top of the two support columns 511. The horizontal adjustment casters 55 are respectively provided at the bottom ends of the two support columns 511 and support the two support columns 511. The horizontal adjustment casters 55 are provided to facilitate the movement or leveling of the hanger structure 51 when it is supported on the ground. In this embodiment, the adjustment component 52 includes a first driving mechanism 521, a first guide rail 522, and a second driving mechanism 521. The first guide rail 522 is arranged on the cross beam 512 and is located at both ends of the first guide rail 522. The extension direction of the first guide rail 522 is consistent with the extension direction of the cross beam 512. The first driving mechanism 521 is also arranged on the cross beam 512. The driving end of the first driving mechanism 521 is connected to the installation frame 523. The installation frame 523 can be slidably arranged on the first guide rail 522. The first driving mechanism 521 can drive the installation frame 523 to move along the first guide rail 522. The second guide rail 525 is arranged on the installation frame 523. The extension direction of the second guide rail 525 is consistent with the extension direction of the installation frame 512. The extension direction of the frame 523 is consistent, the flip assembly 53 can be slidably arranged on the second guide rail 525, the driving end of the second driving mechanism 524 is connected to the flip assembly 53, and the second driving mechanism 524 can drive the flip assembly 53 to move along the second guide rail 525. In this embodiment, the first driving mechanism 521 can not only drive the installation frame 523 to move, but also drive the flip assembly 53, the clamping assembly 54 and the second driving mechanism 524 to move simultaneously through the installation frame 523, and the second driving mechanism 524 can drive the flip assembly 53 to move along the second guide rail 525. Through such a setting, it is possible to adjust the flip assembly 53 and the clamping assembly 54. The position of the clamping assembly 54 enables the clamping assembly 54 to clamp the carrier when it is needed, and cooperate with the flipping assembly 53 to flip it. When the carrier is not needed to be clamped, the clamping assembly 54 will not hinder the movement of the carrier on the conveying mechanism 20. In this embodiment, the first driving mechanism 521 can more smoothly push the installation frame 523, the flipping assembly 53, the clamping assembly 54 and the second driving mechanism 524 to move toward the side of the carrier, and the second driving mechanism 524 can more conveniently drive the flipping assembly 53 to drive the clamping assembly 54 and the carrier to lift upward, so as to facilitate the flipping assembly 53 to flip the carrier.

[0058] More specifically, the first guide rail 522 includes a main guide rail 5221 and a secondary guide rail 5222, the main guide rail 5221 is arranged on the cross beam 512, the secondary guide rail 5222 is arranged on the horizontal adjustment caster 55, the extension direction of the secondary guide rail 5222 is consistent with the extension direction of the main guide rail 5221, and the second driving mechanism 524 is slidably arranged on the secondary guide rail 5222. In this embodiment, the first guide rail 522 includes a main guide rail 5221 and a secondary guide rail 5222, wherein the main guide rail 5221 is arranged on the cross beam 512, and the secondary guide rail 5222 is arranged at the bottom end of the horizontal adjustment caster 55 or the support column 511, but the secondary guide rail 5222 and the main guide rail 5221 have the same orientation. In this embodiment, the main guide rail 5221 is slidably connected to the mounting frame 523, and the secondary guide rail 5222 is used to be slidably connected to the second drive mechanism 524 and support the second drive mechanism 524, so that the first drive mechanism 521 can more smoothly push the mounting frame 523, the flip assembly 53, the clamping assembly 54 and the second drive mechanism 524 to move toward the side of the carrier.

[0059] In one embodiment, if Figures 6 to 8As shown, the loading mechanism 10 and / or the unloading mechanism 70 includes a loading frame 11, one end of the loading frame 11 has an escape space 113, and the escape space 113 is used for parking a transfer vehicle of a transfer carrier; a lifting component 13 is arranged on the loading frame 11; a conveying component 12 is arranged on the lifting component 13, and the lifting component 13 is drivingly connected to the conveying component 12 to drive the conveying component 12 to lift between a first position and a second position, and the second position is located above the first position; in the first position, the conveying component 12 is used to support the carrier on the transfer vehicle located in the escape space 113; in the second position In the second position, the conveying component 12 is used to convey the carrier carried thereon to the conveying mechanism 20 of the cleaning device 100; and / or guide components 14 are provided on both sides of the loading frame 11, and the guide components 14 are used to guide the carrier when the conveying component 12 conveys the carrier; and / or a weighing module 16 is also provided on the loading frame 11, and the weighing module 16 is used to weigh the carrier to obtain the loading status information of the carrier; and / or the loading frame 11 is provided with brake components 15 at both ends along the conveying direction of the conveying mechanism 20, and the brake components 15 are used to prevent the carrier from slipping off the conveying component 12. In one embodiment, the conveying mechanism 20 is applied to the cleaning device 100, including a conveying frame 21, two roller conveying assemblies 22, a first transmission member 24 and a driving member 23, wherein the two roller conveying assemblies 22 are rotatably arranged at both ends of the conveying frame 21, and the two roller conveying assemblies 22 are corresponding and spaced apart to form an installation space; the first transmission member 24 is arranged between the two roller conveying assemblies 22 and is respectively connected to the two roller conveying assemblies 22 in transmission; the driving member 23 is arranged on the conveying frame 21 and is linked to the first transmission member 24, and the driving member 23 drives the first transmission member 24 to drive the two roller conveying assemblies 22 to operate synchronously to transport the carrier.One end of the loading rack 11 is provided with an escape space 113, and the escape space 113 is used for the transfer vehicle to stop under the loading rack 11 and transfer the carried carrier to the top of the conveying assembly 12. In the present embodiment, the transfer vehicle is slightly lower than the height of the escape space 113, but the width of the transfer vehicle is greater than the width of the loading rack 11, and the carrier is transferred by standing on the transfer vehicle, and the width of the carrier is also greater than the width of the loading mechanism 10. When the carrier stands on the transfer vehicle for transfer, the carrier is higher than the conveying assembly 12 arranged on the loading rack 11, so when the transfer vehicle transfers the carrier, it can stay in the escape space 113, and the carrier is located above the conveying assembly 12. Because the loading rack 11 is provided with a lifting assembly 13 that can lift the conveying assembly 12, the lifting assembly 13 can drive the conveying assembly 12 to lift so that the conveying assembly 12 has a first position and a second position, and the second position is located above the first position. When the conveying assembly 12 is in the first position, the conveying assembly 12 In the state of preparing to support the carrier, when the transfer vehicle transfers the carrier to the top of the conveying component 12 in the first position, the lifting component 13 is started, driving the conveying component 12 to lift from the first position to the second position. When the conveying component 12 is lifted, it will support the bottom of the carrier and remove the carrier from the transfer vehicle. At this time, the transfer vehicle can exit the avoidance space 113, and then, the conveying component 12 will transport the carrier to the conveying mechanism of the cleaning device 100, so that the carrier can be cleaned in the cleaning device 100 through the conveying mechanism 20. Through such a setting, when the cleaning device 100 for cleaning the carrier is in use, the carrier can be automatically transported to the cleaning device 100 through the loading mechanism 10 in cooperation with the transfer vehicle for transporting the carrier, so as to realize the assembly line cleaning operation in the cleaning device 100, thereby achieving the effect of further improving the automation effect of the cleaning device 100, reducing the use of manpower, and improving the working efficiency of the cleaning device 100.

[0060] In one embodiment, if Figure 6 and Figure 7As shown, the loading rack 11 includes a main body 111 and a mounting portion 112 , wherein the mounting portion 112 is located above the main body 111 , and a portion of the mounting portion 112 protrudes from the main body 111 to form the avoidance space 113 , so that the transfer vehicle can park and transfer the loaded carrier to the top of the mounting portion 112 . In this embodiment, the loading frame 11 includes a main body 111 and a mounting portion 112, wherein the mounting portion 112 is located above the main body 111, and a portion of the mounting portion 112 protrudes from the main body 111. The protruding portion of the mounting portion 112 and the main body 111 form an avoidance space 113 in the above embodiment, which is used for parking a transfer vehicle for the transfer vehicle, so that the loading mechanism 10 can facilitate the transfer and transportation of the vehicle. Of course, in other embodiments, the main body 111 and the mounting portion 112 can be an integral arrangement, or they can be installed in a detachable manner later, and the mounting portion 112 can also be formed by protruding outward from one end of the main body 111 away from the ground. No excessive restrictions are placed on the specific arrangements of the main body 111 and the mounting portion 112.

[0061] In one embodiment, if Figure 6 and Figure 8 As shown, the conveying assembly 12 includes a supporting portion 121, a first conveying portion 122 and a second conveying portion 123. The supporting portion 121 is placed on the loading frame 11 and connected to the lifting assembly 13. The first conveying portion 122 and the second conveying portion 123 are sequentially arranged at the top of the supporting portion 121 along the conveying direction. To facilitate the assembly and installation of the conveying component 12, in the present embodiment, the conveying component 12 includes a supporting portion 121, a first conveying portion 122 and a second conveying portion 123, wherein the first conveying portion 122 and the second conveying portion 123 are rotatably disposed above the supporting portion 121, and the supporting portion 121 is connected to the lifting end of the lifting component 13. When the conveying component 12 is located at the first position, the supporting portion 121 is supported on the loading frame 11, and the supporting portion 121 can use the loading frame 11 as a support portion. In some embodiments, the first conveying portion 122 and the second conveying portion 123 can be independent conveying systems or linked conveying systems, and no excessive restrictions are made on this. The arrangement of the first conveying portion 122 and the second conveying portion 123 can not only facilitate installation, but also facilitate inspection and maintenance.

[0062] Specifically, Figure 8As shown, the conveying assembly 12 further includes a weighing module 16 , which is disposed on the first conveying portion 122 and / or the second conveying portion 123 , so as to weigh the carrier located above the first conveying portion 122 or the second conveying portion 123 . In order to obtain specific information of the carrier, in this embodiment, a weighing module 16 is provided on the first conveying part 122 or the second conveying part 123. When the carrier is supported by the first conveying part 122 or the second conveying part 123, the weighing module 16 can weigh the carrier, and judge whether the carrier is loaded with workpieces according to the weighing result. If no workpiece is loaded, the cleaning device 100 will activate the flipping mechanism 50 to flip the carrier and clean the carrier comprehensively. If the workpiece is loaded, the cleaning device 100 will not activate the flipping mechanism 50, and only clean the bottom and periphery of the carrier. Through such a setting, the specific state of the carrier can be more specifically known. In order to improve the accuracy of the weighing result, in one embodiment, a weighing module 16 is provided on both the first conveying part 122 and the second conveying part 123. The two weighing modules 16 can check the weight of the carrier with each other, so that the obtained result is more accurate. Of course, in other embodiments, the weighing module 16 can also be replaced by other acoustic and optical sensors, or the weighing module 16 can be used in conjunction with the acoustic and optical sensors, and there is no excessive limitation on this.

[0063] In one embodiment, if Figure 6 As shown, the conveying component 12 is provided with a guide component 14 on both sides perpendicular to its own conveying direction, and the guide component 14 includes a connecting frame 141 and a guide wheel 142. The connecting frame 141 is detachably arranged on the conveying component 12, and the guide wheel 142 is rotatably arranged at one end of the connecting frame 141 away from the conveying component 12, and the guide surface of the guide wheel 142 is arranged toward the conveying component 12. In order to prevent the conveying component 12 from deviating from the preset conveying direction when conveying the carrier, in the present embodiment, guide components 14 are arranged on both sides perpendicular to the conveying direction of the conveying component 12 itself, and the guide components 14 include a connecting frame 141 and a guide wheel 142, wherein the guide wheel 142 is rotatably arranged on the connecting frame 141, and the guide surface of the guide wheel 142 faces the conveying component 12, and the connecting frame 141 is detachably arranged on both sides of the conveying component 12. In the present embodiment, a plurality of guide components 14 are arranged, and the plurality of guide components 14 are arranged at intervals along the conveying direction of the conveying component 12. When the conveying component 12 conveys the carrier, the guide component 14 can abut against the bottom of the carrier and be rollingly connected with the bottom of the carrier through the guide wheel 142 to guide the conveying direction of the carrier.

[0064] In one embodiment, if Figure 6As shown, the conveying component 12 is provided with brake components 15 at both ends along the conveying direction of the carrier, and the brake component 15 includes a telescopic cylinder 151 and a telescopic column 152. The telescopic column 152 is movably arranged in the telescopic cylinder 151 along the lifting direction of the conveying component 12. When the telescopic column 152 extends out of the telescopic cylinder 151, the telescopic column 152 can prevent the carrier from sliding off the conveying component 12. In order to prevent the carrier from slipping off the conveying assembly 12 and causing damage to the carrier when the conveying assembly 12 is conveying the carrier, a brake assembly 15 is also provided in the present embodiment. The brake assembly 15 is arranged at both ends of the loading frame 11 along the conveying direction of the conveying assembly 12. When the conveying assembly 12 is lifted from the first position to the second position, the telescopic cylinder 151 in the brake assembly 15 will push the telescopic column 152 to extend outward until it protrudes from the telescopic cylinder 151 and the conveying assembly 12, so as to protect the carrier on the conveying assembly 12, and the brake assembly 15 can also control the rhythm of the carrier entering the cleaning device 100, so as to prevent multiple carriers from entering the cleaning device 100 at the same time, causing cleaning congestion and resulting in low cleaning efficiency.

[0065] Specifically, the brake assembly 15 further includes a buffer block 153, which is disposed at one end of the telescopic column 152 that faces away from the telescopic cylinder 151. To prevent the telescopic column 152 from damaging the vehicle, in this embodiment, a buffer block 153 is further disposed at one end of the telescopic column 152 that extends out of the telescopic cylinder 151. The buffer block 153 is made of a flexible material, which can prevent the outer periphery of the vehicle from being bumped and damaged when it abuts against the vehicle. Of course, in other embodiments, the buffer block 153 can also be a buffer sleeve, which is disposed on the outer periphery of the telescopic column 152. The specific arrangement of the buffer block 153 is not limited in detail.

[0066] In one embodiment, the conveying assembly 12 includes an assembly rack, a plurality of brackets and a plurality of electric rollers, and the plurality of brackets and the plurality of electric rollers are rotatably arranged in the assembly rack, and the brackets and the electric rollers are arranged at intervals and staggered along the direction in which the conveying assembly 12 conveys the carrier. In order to save manufacturing costs, in this embodiment, the conveying assembly 12 includes an assembly rack, a plurality of brackets and a plurality of electric rollers, and the plurality of brackets and the plurality of electric rollers are rotatably arranged in the assembly rack, and the plurality of brackets and the plurality of electric rollers are arranged at intervals and staggered along the conveying direction of the conveying assembly 12, which can reduce the use of electric rollers, which means that the use of drive motors can be reduced, and such an arrangement can still achieve a good conveying effect. In the embodiment in which the conveying assembly 12 includes the first conveying part 122 and the second conveying part 123, the first conveying part 122 and the second conveying part 123 can be arranged in such a manner.

[0067] In one embodiment, if Figure 8 As shown, the lifting assembly 13 includes a power unit 131, a first driving unit 132, a second driving unit 133 and a linkage unit 134. The first driving unit 132 and the second driving unit 133 are spaced apart along the direction of the conveying component conveying the carrier. The linkage unit 134 is disposed between the first driving unit 132 and the second driving unit 133, and is respectively linked to the first driving unit 132 and the second driving unit 133. The linkage unit 134 is linked to the power unit 131, and the power unit 131 is used to drive the linkage unit 134 to drive the first driving unit 132 and the second driving unit 133 to lift and lower. Since the conveying assembly 12 is laid for a long time, it needs to be set protruding from the main body 111 like the mounting portion 112 in the above-mentioned lifting frame, and the lifting assembly 13 is installed inside the main body 111. In order to enhance the support of the lifting assembly 13 to the conveying assembly 12, in this embodiment, the lifting assembly 13 includes a power part 131, a first driving part 132, a second driving part 133 and a linkage part 134, wherein one end of the first driving part 132 and the second driving part 133 are connected to the bottom of the conveying assembly 12, the first driving part 132 and the second driving part 133 are arranged at intervals along the conveying direction of the conveying assembly 12, and the linkage part 134 is arranged between the first driving part 132 and the second driving part 133, and are respectively meshed and connected with the first driving part 132 and the second driving part 133, and the linkage part 134 is arranged on the main body of the lifting frame. The power unit 131 inside 111 is linked and connected. In the present embodiment, the power unit 131 is a driving motor, the linkage unit 134 is a transmission rod, and the first driving unit 132 and the second driving unit 133 are lifting rods, and they are all connected by meshing transmission. In another embodiment, there are multiple first driving units 132 and the second driving units 133, and another transmission rod can be set between the multiple first driving units 132 and the multiple second driving units 133, so that the multiple first driving units 132 and the multiple second driving units 133 can synchronously realize lifting operations. The lifting assembly 13 configured in this way can maintain a stable lifting operation for the conveying assembly 12. In other embodiments, the lifting assembly 13 can adopt a hydraulic lifting system or a pneumatic lifting system instead of the above-mentioned transmission system, and there are no excessive restrictions on the specific configuration of the lifting assembly 13.

[0068] In one embodiment, if Figures 9 to 11The conveying mechanism 20 includes a conveying frame 21; two roller conveying assemblies 22 are rotatably disposed at both ends of the conveying frame 21, and the two roller conveying assemblies 22 are corresponding and spaced apart to form an installation space; a first transmission member 24 is disposed between the two roller conveying assemblies 22 and is respectively connected to the two roller conveying assemblies 22 in a transmission manner; a driving member 23 is disposed on the conveying frame 21 and is linked to the first transmission member 24, and the driving member 23 drives the first transmission member 24 to drive the two roller conveying assemblies 22 to operate synchronously to transport the carrier. In this embodiment, the conveying mechanism 20 includes a conveying frame 21, two roller conveying assemblies 22, a first transmission member 24 and a driving member 23, wherein the two roller conveying assemblies 22 are rotatably arranged on the conveying frame 21, and the two roller conveying assemblies 22 are arranged correspondingly at intervals to form a double-row conveying track, and an installation space is also formed between the two, and the installation space can be convenient for installing other functional components of the cleaning device 100. In order to enable the two roller conveying assemblies 22 to operate synchronously, in this embodiment, the first transmission member 24 is arranged between the two roller conveying assemblies 22 and is respectively connected to the two roller conveying assemblies 22, and the first transmission member 24 is drivingly connected to the driving member 23 arranged on the conveying frame 21. The two can be directly driven or connected. Therefore, the transmission connection is made through other connecting parts. When the driving member 23 is running, the driving member 23 drives the first transmission member 24 to drive the two roller conveying assemblies 22 located at both ends to run synchronously. When the two roller conveying assemblies 22 are running synchronously, the carrier located above themselves will be transported synchronously. The conveying mechanism 20 arranged in this way can not only stably realize multi-point support and transmission of the carrier in transmission, but also form an installation space in the two roller conveying assemblies 12 and the conveying frame 21. The installation space can facilitate the installation of other functional components in the cleaning device 100. The present technical solution can not only keep the carrier relatively stable during transmission through the multi-point support and synchronous operation transmission method, but also facilitate the installation of other functional components of the cleaning device 100, so as to improve the cleaning effect of the cleaning device 100.

[0069] In one embodiment, if Fig.10As shown, the roller conveying assembly 22 includes a plurality of roller bodies and a plurality of second transmission members, and the plurality of roller bodies are sequentially linked and connected through the plurality of second transmission members. In this embodiment, the roller conveying assembly 22 includes a plurality of roller bodies and a plurality of second transmission members, wherein the plurality of roller bodies are arranged at intervals along the conveying direction of the roller conveying assembly 22, and the plurality of second transmission members sequentially link and connect two adjacent roller bodies, so that when the driving member 23 drives a roller body in the roller conveying assembly 22 to operate through the first transmission member 24, the roller body can drive the adjacent roller body to operate synchronously through the second transmission member, and at this time, the synchronously operating roller body also drives the roller body on the other side to operate synchronously through another second transmission member, and so on, so as to achieve the effect of sequential linkage connection, and such a setting can ensure that each roller body can achieve synchronous operation.

[0070] Specifically, Fig.11 As shown, one end of the roller body is provided with a first toothed disc 222 and a second toothed disc 223 at intervals along its own extension direction, the first toothed disc 222 of the roller body is meshingly connected with the first toothed disc 222 of the roller body adjacent to one side through the second transmission member, and the second toothed disc 223 of the roller body is meshingly connected with the second toothed disc 223 of the roller body adjacent to the other side through another second transmission member. In the present embodiment, a first toothed disc 222 and a second toothed disc 223 are arranged at intervals at one end of the roller body along its own extension direction, wherein two adjacent roller bodies can be respectively sleeved on their own first toothed discs 222 by a second transmission member to realize linkage connection, and then another second transmission member is sleeved on its own second toothed disc 223 and the second toothed disc 223 of the other roller body, so as to realize staggered transmission arrangement in sequence and realize synchronous operation. In other embodiments, the first toothed disc 222 and the second toothed disc 223 are respectively arranged at the two ends of the roller body, and the roller body is meshed and connected with the first toothed disc 222 of the roller body on the left side through a second transmission member arranged on the first toothed disc 222, and then meshed and connected with the second toothed disc 223 of the roller body on the right side through another second transmission member arranged on the second toothed disc 223, so as to realize synchronous linkage connection, and the specific positions of the first toothed disc 222 and the second toothed disc 223 are not excessively limited.

[0071] In one embodiment, if Fig.10As shown, the top of the conveying frame 21 is provided with a first bracket 211 and a second bracket 212, the first bracket 211 and the second bracket 212 are arranged at intervals along the extension direction of the first transmission member 24, and the first bracket 211, the second bracket 212 and the conveying frame 21 are enclosed to form the installation cavity for the installation of the roller conveying assembly 22. In order to facilitate the disassembly and maintenance of the roller conveying assembly 22, in this embodiment, the top of the conveying frame 21 is detachably provided with a first bracket 211 and a second bracket 212, wherein the first bracket 211 and the second bracket 212 are arranged at intervals on the conveying frame 21 along the extension direction of the first transmission member 24, and the first bracket 211 and the second bracket 212 are enclosed to form an installation cavity, and the installation cavity is used for the roller body in the roller conveying assembly 22 to be rotatably connected.

[0072] Specifically, a protective cover 213 is detachably provided on the first bracket 211, and the protective cover 213 is used to cover the first toothed disc 222 and the second toothed disc 223. Since the drum body is provided with the first toothed disc 222 and the second toothed disc 223 which are linked to the adjacent drum body, and the first toothed disc 222 and the second toothed disc 223 have the risk of crushing external objects when they cooperate with the second transmission member to operate, in order to avoid this risk, in this embodiment, a protective cover 213 is detachably provided on the first bracket 211, and a part of the protective cover 213 is connected to the first bracket 211, and the other part covers and protects the first toothed disc 222 and the second toothed disc 223 of the drum body. The provision of the protective cover 213 can not only reduce the risk of crushing the first toothed disc 222 and the second toothed disc 223 to external objects, but also prevent the first toothed disc 222 and the second toothed disc 223 from being contaminated by external liquid or dust.

[0073] In one embodiment, if Fig.11 As shown, the outer periphery of the roller body used for contacting with the carrier is provided with an anti-skid sleeve 224. In order to enable the roller body to better transfer the carrier to the next stage when rotating, and to increase the friction between the outer surface of the roller body and the carrier, in this embodiment, the outer periphery of the roller body is provided with an anti-skid sleeve 224, which can effectively increase the friction between the roller body and the carrier when they are in contact, so that the roller body can better transfer the carrier to the next stage when rotating. Of course, in other embodiments, the outer periphery of the roller body can also be engraved with lines to increase the friction between the roller body and the carrier when they are in contact. Therefore, there is no excessive limitation on the anti-skid structure provided on the outer periphery of the roller body.

[0074] In one embodiment, if Fig. 9As shown, the conveyor frame 21 is provided with leveling feet, and the leveling feet can adjust the height of the conveyor mechanism 20. In order to adapt the conveyor frame 21 when it is put into an uneven site for use, in this embodiment, leveling feet are provided at the bottom of the transmission frame, and the leveling feet can be connected to the transmission frame by threaded connection, or by clamping. When adjusting, the leveling effect can be achieved by adjusting the height of the conveyor mechanism 20 extended by the leveling feet. Of course, in other embodiments, in order to facilitate the transportation of the conveyor mechanism 20 as a whole, a roller assembly can also be provided at the bottom of the conveyor mechanism 20, and the roller assembly includes a locking structure. When the conveyor mechanism 20 needs to be positioned and installed, it can be locked by the locking structure.

[0075] In one embodiment, the cleaning device 100 includes a recovery mechanism 25. In this embodiment, the cleaning mechanism 40 and a portion of the recovery mechanism 25 are disposed between the conveying mechanism 20 to perform a cleaning operation on the carrier conveyed by the conveying mechanism 20 and to recover the waste water after the cleaning is completed by the cleaning mechanism 40. Fig.10 As shown, the cleaning mechanism 40 is located above the conveying mechanism 20, and the recycling mechanism 25 is located in the installation space, so as to recycle the waste water after the cleaning mechanism 40 cleans the carrier. In this embodiment, part of the cleaning mechanism 40 is located above the conveying mechanism 20, for example, the side brushing assembly 42 and the flip assembly 53 in the cleaning mechanism 40 are both arranged above the conveying mechanism 20, and the recycling mechanism 25 is arranged in the installation space formed between the two roller conveying assemblies 22 of the conveying mechanism 20, and the recycling mechanism 25 is arranged at the position of the conveying mechanism 20 corresponding to the cleaning mechanism 40. The recycling mechanism 25 arranged in this way can facilitate the centralized recycling of the waste water after the side brushing assembly 42 in the cleaning mechanism 40 cleans the carrier.

[0076] Specifically, Fig. 9 As shown, the recovery mechanism 25 includes a water tank 251, a filter core and a storage box 252. The water tank 251 is arranged in the installation space, and the storage box 252 is arranged below the water tank 251. The water tank 251 is connected with the storage box 252, and the filter core is detachably arranged between the water tank 251 and the storage box 252. In this embodiment, the recovery mechanism 25 includes a water tank 251, a filter core (not shown in the figure) and a storage box 252, wherein the water tank 251 is detachably arranged in the installation space of the conveying mechanism 20 to centrally receive the waste water after the cleaning component 41 in the cleaning device 100 cleans the carrier, and then the waste water flows into the storage box 252 through the filter core, and the waste water is filtered when it flows into the storage box 252 through the filter core, so that the waste water collected in the storage box 252 can be reused, and the water in the storage box 252 can supply water to the cleaning component 41.

[0077] In one embodiment, if Figure 3 or Figure 4 As shown, the blowing mechanism 60 includes two support frames 61, a first blowing part 62, a second blowing part 63, a third blowing part 64 and a fourth blowing part 65, the two support frames 61 are arranged on both sides of the conveying mechanism 20, the first blowing part 62 is rotatably arranged on one of the support frames 61, the second blowing part 63 is rotatably arranged on the other support frame 61 and corresponds to the first blowing part 62, both ends of the third blowing part 64 are rotatably connected to the two support frames 61 respectively and are located above the two support frames 61, and the fourth blowing part 65 is arranged in the conveying mechanism 20 and corresponds to the third blowing part 64. In order to dry all water stains on the carrier after the carrier is cleaned by the cleaning mechanism 40, in this embodiment, the blower mechanism 60 includes two support frames 61, and the two support frames 61 are arranged on both sides of the conveying mechanism 20. A first blower 62 is detachably mounted on one of the support frames 61 through an adjusting component, and a second blower 63 is detachably mounted on the other support frame 61 through an adjusting component. A third blower 64 is detachably mounted on the top of the two support frames 61, and is arranged between the conveying mechanism 20 toward the conveying mechanism 20. The third blowing section 64 is provided with a fourth blowing section 65. When the blower mechanism 60 is running, the first blowing section 62 and the second blowing section 63 dry the lower surface and the side of the carrier, while the third blowing section 64 dries the upper surface of the carrier and both ends along the conveying direction, and the fourth blowing section 65 dries the lower surface of the carrier and both ends along the conveying direction. Through such an arrangement, the blower mechanism 60 can comprehensively dry the cleaned carrier to prevent the formation of water stain marks after water stains evaporate.

[0078] In one embodiment, the cleaning device 100 also includes a dust removal mechanism, which is disposed between the loading area and the cleaning area of ​​the conveying mechanism 20. The specific structural arrangement of the dust removal mechanism in this embodiment can refer to the air blowing mechanism 60 in the above embodiment, so that air and dust are blown away before the carrier passes through the conveying mechanism 20 and enters the cleaning area of ​​the cleaning device 100, and then the cleaning operation is performed. This can reduce the working intensity of the cleaning mechanism 40 to a certain extent, thereby ensuring the cleaning effect.

[0079] In one embodiment, if Figure 3As shown, the side brushing mechanism is used to brush the peripheral side of the carrier, and the side brushing mechanism includes a third guide rail 421, a third driving mechanism and a brushing assembly. The third guide rail 421 and the third driving mechanism are respectively located on opposite sides of the brushing assembly and are respectively provided on the conveying mechanism 20. The brushing assembly is slidably connected to the third guide rail 421. The third driving mechanism is used to drive the brushing assembly to reciprocate along the extension direction of the third guide rail 421 to brush the peripheral side of the carrier. The brushing assembly includes a cleaning pipe 422 and a brush 423. The cleaning pipe is provided above the brush 423. In the present embodiment, the side brushing mechanism includes a third guide rail 421, a third driving mechanism and a brushing assembly, wherein the third guide rail 421 and the third driving mechanism are relatively arranged at the two ends of the brushing assembly and are arranged on the overall frame of the cleaning device 100, and the third driving mechanism cooperates with the third guide rail 421 to drive the brushing assembly to perform reciprocating lifting and lowering movements. When the third driving mechanism drives the brushing assembly to reciprocately lift and lower, the brushing assembly moves smoothly through the third guide rail 421. In the present embodiment, the brushing assembly includes a cleaning tube and a brush 423, wherein the cleaning tube is arranged above the cleaning brush. When the third driving mechanism drives the brushing assembly to perform lifting and reciprocating movements, the cleaning tube sprays water toward the brush 423, and the brush 423 simultaneously brushes the surrounding side of the carrier, thereby achieving more efficient cleaning of the surrounding side of the carrier.

[0080] In one embodiment, if Figure 2 or Figure 4 As shown, since the cleaning area of ​​the cleaning device 100 will generate splashing water when cleaning the carrier, the water splashes out. In this embodiment, an isolation mechanism 30 is provided, and the isolation mechanism 30 includes an isolation frame 31, a panel 32 and a door assembly 33. The isolation frame 31 is arranged around the cleaning area, and the panel 32 is detachably arranged on the isolation frame 31, so as to enclose a cleaning area in a semi-sealed state, and the door assembly 33 is provided with two pieces, which are respectively arranged at both ends of the conveying direction of the conveying mechanism 20. The door assembly 33 includes a sensor, a drive motor, a guide part and a sealing door. Regarding the drive motor, it can be a rodless cylinder or a hydraulic telescopic rod, and no excessive restrictions are made for comparison. When the carrier moves to the position of the door assembly 33, the sensor senses the information of the carrier, and then the drive motor and the guide part cooperate to drive the sealing door to open, so that the carrier enters the cleaning area, and then the drive motor and the guide part close the sealing door. After that, the cleaning mechanism 40 in the cleaning area cleans the carrier. This arrangement can effectively prevent water from splashing out.

[0081] In one embodiment, if Figure 1As shown, in the present embodiment, a shell 81 assembly 80 is also included. The shell 81 assembly 80 is mainly sleeved on the outer periphery of the cleaning device 100 to achieve wrap-around protection for the components of the cleaning device 100. To facilitate the discharge of the gas inside the cleaning device 100 to the outside, in the present embodiment, the shell 81 assembly 80 includes a shell 81 and an exhaust fan 82, wherein the exhaust fan 82 is arranged on the shell 81, and is mainly used to discharge the gas inside the shell 81 assembly 80 to the outside. In another embodiment, to facilitate the user to check the status of the cleaning device 100, part of the shell 81 can be set with a plastic plate of a transparent material.

[0082] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A cleaning device for cleaning a carrier loaded with a photoresist barrel, characterized in that: It includes a conveying mechanism and a loading mechanism, a cleaning mechanism, a flipping mechanism, a blowing mechanism and a unloading mechanism arranged along the conveying direction of the conveying mechanism, and the cleaning device has a loading area, a cleaning area, a drying area and an unloading area arranged in sequence along the conveying direction of the conveying mechanism; The loading mechanism is located in the loading area and is used to transport the carrier to the conveying mechanism; The cleaning mechanism is located in the cleaning area, and includes a cleaning component and a side brush component. The side brush component is arranged on one side of the cleaning component, and both the cleaning component and the side brush component are used to clean the carrier; The flipping mechanism is located in the cleaning area and is arranged corresponding to the cleaning component. The flipping mechanism is used to drive the carrier to flip so that the side of the carrier away from the cleaning component faces the cleaning component for cleaning; The blower mechanism is located in the drying area to blow dry the carrier after cleaning; The unloading mechanism is located in the unloading area and is used for transporting the carrier after being blown dry.

2. The cleaning device according to claim 1, characterized in that: The cleaning assembly includes a water washing component and an air blowing component, and the water washing component and the air blowing component are both arranged on the conveying mechanism and located at the bottom of the carrier. The number of the water washing component and the air blowing component are both multiple, and the multiple water washing components and the multiple air blowing components are staggered along the conveying direction of the conveying mechanism.

3. The cleaning device according to claim 2, characterized in that: The water washing component is provided with a rotating nozzle protruding toward one side of the carrier, and the rotating nozzle can be inserted into the carrier after turning over to clean the inner peripheral wall of the carrier.

4. The cleaning device according to claim 1, characterized in that: The flipping mechanism includes a hanger structure, an adjustment component, a flipping component and a clamping component. The hanger structure is arranged on the outer peripheral side of the conveying mechanism. The adjustment component is connected to the flipping component. The adjustment component is arranged on the hanger structure. The adjustment component can drive the flipping component to move on the inner side of the hanger structure. The clamping component is arranged on the side of the flipping component facing the conveying mechanism. The clamping component is used to clamp the carrier, and the flipping component is used to drive the clamping component and the clamped carrier to flip.

5. The cleaning device according to claim 4, characterized in that: The hanger structure comprises two supporting columns, a crossbeam connecting the two supporting columns, and a horizontal adjustment caster disposed on the two supporting columns and away from the crossbeam and rotatably connected; The adjustment assembly includes a first driving mechanism, a first guide rail, a second driving mechanism, a second guide rail and a mounting frame, the first guide rail being arranged on the crossbeam, the extension direction of the first guide rail being consistent with the extension direction of the crossbeam, the flipping assembly being arranged on the mounting frame, the mounting frame being slidably arranged on the first guide rail, the second guide rail being arranged on the mounting frame, the extension direction of the second guide rail being consistent with the extension direction of the mounting frame, the flipping assembly being slidably arranged on the second guide rail, the first driving mechanism being used to drive the mounting frame, the flipping assembly and the second driving mechanism to move along the extension direction of the first guide rail, the second driving mechanism being used to drive the clamping assembly to move along the extension direction of the second guide rail to adjust the positions of the flipping assembly and the clamping assembly so that the clamping assembly clamps the carrier.

6. The cleaning device according to claim 5, characterized in that: The first guide rail includes a main guide rail and a secondary guide rail, the main guide rail is arranged on the cross beam, the secondary guide rail is arranged on the horizontal adjustment caster, the extension direction of the secondary guide rail is consistent with the extension direction of the main guide rail, and the second driving mechanism is slidably arranged on the secondary guide rail.

7. The cleaning device according to any one of claims 1 to 6, characterized in that: The loading mechanism and / or the unloading mechanism comprises a loading rack, one end of the loading rack has an escape space, and the escape space is used for parking a transfer vehicle of the transfer vehicle; The lifting assembly is arranged on the feeding frame; The conveying assembly is arranged on the lifting assembly, and the lifting assembly is drivingly connected to the conveying assembly to drive the conveying assembly to move up and down between a first position and a second position, wherein the second position is located above the first position; In the first position, the conveying assembly is used to support the carrier on the transfer vehicle located in the avoidance space; In the second position, the conveying assembly is used to convey the carrier carried thereon to the conveying mechanism of the cleaning device; and / or Guide components are provided on both sides of the loading rack, and the guide components are used to guide the carrier when the conveying component conveys the carrier; and / or The loading rack is further provided with a weighing module, and the weighing module is used to weigh the carrier to obtain the loading status information of the carrier; and / or The loading frame is provided with brake components at both ends along the conveying direction of the conveying mechanism, and the brake components are used to prevent the carrier from sliding off the conveying component.

8. The cleaning device according to any one of claims 1 to 6, characterized in that: The conveying mechanism comprises a conveying frame; Two roller conveying assemblies are rotatably disposed at two ends of the conveying frame, and the two roller conveying assemblies are correspondingly and spaced apart to form an installation space; A first transmission member is disposed between the two roller transmission assemblies and is respectively connected to the two roller transmission assemblies in a transmission manner; A driving member is disposed on the conveying frame and is linked to the first transmission member. The driving member drives the first transmission member to drive the two roller conveying assemblies to operate synchronously to transport the carrier.

9. The cleaning device according to any one of claims 1 to 6, characterized in that: The blowing mechanism includes two support frames, a first blowing section, a second blowing section, a third blowing section and a fourth blowing section. The two support frames are arranged on both sides of the conveying mechanism, the first blowing section is rotatably arranged on one of the support frames, the second blowing section is rotatably arranged on the other support frame and corresponds to the first blowing section, two ends of the third blowing section are rotatably connected to the two support frames and are located above the two support frames, and the fourth blowing section is arranged in the conveying mechanism and corresponds to the third blowing section.

10. The cleaning device according to any one of claims 1 to 6, characterized in that: The side brushing mechanism is used to brush the peripheral side of the carrier, and the side brushing mechanism includes a third guide rail, a third driving mechanism and a brushing assembly. The third guide rail and the third driving mechanism are respectively located on opposite sides of the brushing assembly and are respectively arranged on the conveying mechanism. The brushing assembly is slidably connected to the third guide rail. The third driving mechanism is used to drive the brushing assembly to reciprocate along the extension direction of the third guide rail to brush the peripheral side of the carrier. The brushing assembly includes a cleaning tube and a brush. The cleaning tube is arranged above the brush.

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