Slicing machine, slicing unit production line, control method of slicing unit production line, medium and equipment

Abstract

The invention relates to the technical field of linear cutting, and particularly provides a slicing machine, a slicing unit production line comprising the slicing machine, a control method of the slicing unit production line, a computer readable storage medium and computer equipment. The corresponding control method of the slicing unitization production line comprises the steps that the transfer mechanism is made to be conveyed to a target position matched with the slicing machine or a workpiece is removed from the target position; and the connecting tool is used for conveying the workpiece to a cutting area of the slicing machine or removing the workpiece from the cutting area. By means of the structure, the workpiece can be conveyed to the cutting area of any slicing machine to be subjected to corresponding slicing operation through cooperation of the transfer mechanism and the connecting tool, and therefore slicing unit production completed through multiple machines is achieved.

Description

Technical Field

[0001] The present invention relates to the field of wire cutting technology, and specifically provides a slicer, a slicing unitized production line including the slicer, a control method for the slicing unitized production line, a computer-readable storage medium, and a computer device. Background Art

[0002] Taking the hard and brittle material as silicon rod as an example, the equipment for processing it usually includes a cutter for cutting the rod material (round rod) according to the length specification, a squarer for cutting the round rod of a certain length into square rods, a grinder for grinding the square rod (grinding surface and chamfer) (such as usually including rough grinding and fine grinding), and a slicer for slicing the square rod that meets the accuracy standard after grinding. The working principle of the slicer is as follows: after the square rod is bonded to the wafer support, the square rod is sliced ​​by the wire mesh of the cutting machine in the manner of wire saw cutting (the silicon rod is fed along its radial direction, and the wire mesh reciprocates between adjacent cutting rollers) to produce silicon wafers (such as silicon wafers). Each complete slicing operation of the wire mesh is called a one-knife cutting operation of the slicer.

[0003] Taking slicing as an example, the slicing operation of existing slicers is concentrated near the slicing station, and each cutting operation is a stand-alone operation for a single silicon rod. Since each cutting operation usually includes dozens of operation steps and is usually completed by one or two operators, this processing method often has the following problems: the operation of the slicer requires high professionalism and proficiency of the operator, the labor cost is high, and the large number of steps makes it easy for the operator to make mistakes. Once the operator makes a mistake, it may cause different degrees of cutting abnormalities.

[0004] Taking the photovoltaic industry, one of the application fields of silicon wafers, as an example, with the rapid development of the photovoltaic industry, there will inevitably be a demand for continuous expansion of the aforementioned silicon wafer processing chain including slicing operations. As mentioned above, this will lead to a continuous increase in the gap in operators, which already exists. Therefore, stand-alone products (slicers) corresponding to single-machine operations have gradually been unable to meet market demand. In view of this, after fully studying and analyzing the operation of the slicer, the inventor aims to propose a unitized structural framework that can realize the simultaneous operation of multiple slicers. Summary of the invention

[0005] The present invention aims to provide a production line for slicing unitized operations performed by multiple slicing machines, a single machine form of the slicing machines in the production line, and a method for implementing the unitized operations.

[0006] In a first aspect, the present invention provides a slicer, comprising: a slicer body, which forms a cutting chamber; a liquid circuit portion; and an electronic control portion; wherein the liquid circuit portion and the electronic control portion are arranged on the outside of the cutting chamber, and in an assembled state, the liquid circuit portion and the electronic control portion are arranged in a manner that enables the slicer to construct an avoidance space so that: a workpiece can be loaded and / or unloaded through the avoidance space.

[0007] Such a configuration provides a possible structural form of a microtome.

[0008] It is understandable that those skilled in the art can determine the structural form of the liquid circuit part and the electric control part, the respective arrangement positions relative to the cutting chamber, and the relative position between the two according to actual needs. For example, the liquid circuit part / electric control part can be centrally arranged or separately arranged. The two can be centrally arranged or separately arranged.

[0009] It is understandable that those skilled in the art can determine the specific form and orientation of the avoidance space according to actual loading and unloading requirements. Taking loading operations as an example, the avoidance space allows components to be loaded from the front, rear or side of the cutting chamber.

[0010] For the above-mentioned slicer, in a possible implementation manner, the electric control unit includes a first electric control cabinet and a second electric control cabinet, and the first electric control cabinet and the second electric control cabinet are centrally arranged or separately arranged.

[0011] This configuration provides a possible structural form of the electronic control unit.

[0012] It is understandable that technical personnel in this field can determine the allocation method of the first / second electric control cabinet according to actual needs, such as dividing it according to high voltage and low voltage, such as one of the first electric control cabinet and the second electric control cabinet is a high voltage electric control cabinet and the other is a low voltage electric control cabinet.

[0013] For the above-mentioned slicer, in a possible implementation manner, the liquid circuit part includes a liquid circuit system, and the liquid circuit system includes a first liquid circuit unit and a second liquid circuit unit, and the first liquid circuit unit and the second liquid circuit unit are centrally arranged or separately arranged.

[0014] This configuration provides a possible structural form for the liquid path portion.

[0015] It is understandable that those skilled in the art can determine the distribution method of the first / second liquid circuit unit according to actual needs, such as dividing it according to the circulation of the cutting fluid, such as one of the first liquid circuit unit and the second liquid circuit unit is an external circulation liquid circuit unit and the other is an internal circulation liquid circuit unit.

[0016] For the above-mentioned slicer, in a possible implementation manner, the liquid circuit portion includes a liquid supply cylinder, and the liquid supply cylinder is arranged at a position adjacent to the first liquid circuit unit or the second liquid circuit unit.

[0017] This configuration provides a possible structural form for the liquid path portion.

[0018] For the above-mentioned slicer, in a possible implementation manner, the first liquid circuit unit and the second liquid circuit unit are disposed on both sides of the cutting chamber, and the first electric control cabinet and the second electric control cabinet are respectively arranged above the first liquid circuit unit and the second liquid circuit unit, so that: the avoidance space is formed between the first electric control cabinet and the second electric control cabinet.

[0019] Through this composition, a possible construction method of the avoidance space is given.

[0020] For the above-mentioned slicer, in a possible implementation manner, a reserved space is formed below the first liquid circuit unit, and the liquid supply cylinder is disposed in the reserved space.

[0021] Through such a structure, a possible configuration mode of the liquid supply cylinder is provided.

[0022] For the above slicer, in a possible implementation manner, the first liquid circuit unit and the second liquid circuit unit are collectively arranged to form a first component, and the first electric control cabinet and the second electric control cabinet are collectively arranged to form a second component.

[0023] The first component and the second component are disposed on two sides of the cutting chamber and thus form the avoidance space therebetween.

[0024] Through this composition, a possible construction method of the avoidance space is given.

[0025] For the above-mentioned slicer, in a possible implementation manner, the liquid supply cylinder is arranged between the second component and the second component.

[0026] Through such a structure, a possible configuration mode of the liquid supply cylinder is provided.

[0027] For the above-mentioned slicer, in a possible embodiment, the first liquid circuit unit and the second liquid circuit unit are collectively arranged to form a first component, the first electric control cabinet and the second electric control cabinet are collectively arranged to form a second component, and the first component and the second component are arranged on one side of the cutting chamber in a longitudinally stacked manner along the loading and unloading direction of the workpiece, and thus an open avoidance space is formed between the cutting chamber and the one side.

[0028] Through this composition, a possible construction method of the avoidance space is given.

[0029] For the above-mentioned slicer, in a possible embodiment, the liquid supply cylinder is arranged on the side of the structure formed by the longitudinal stacking of the first component and the second component, and is projected toward the cutting chamber along the direction of loading and unloading the workpiece, and the cutting chamber and the liquid supply cylinder overlap at least partially.

[0030] Through such a configuration, a possible configuration of the liquid supply cylinder is provided, such as: being arranged at the other side of the cutting chamber so that there is no overlap with the cutting chamber; being arranged completely between the two sides so that the projection completely overlaps with the cutting chamber; being arranged partially between the two sides and the other part being arranged at the other side so that there is a partial overlap with the cutting chamber.

[0031] For the above-mentioned slicer, in a possible embodiment, the first liquid circuit unit and the second liquid circuit unit are collectively arranged to form a first component, the first electric control cabinet and the second electric control cabinet are collectively arranged to form a second component, the first component is arranged on one side of the cutting chamber along the loading and unloading direction of the workpiece, and the second component and / or the liquid supply cylinder are movably configured in the cutting chamber, thereby forming an open avoidance space above the first component.

[0032] Through such a structure, a possible configuration mode of the liquid supply cylinder is provided. For example, the second component is arranged on the ground near the cutting chamber in a manner that it can be moved at will.

[0033] It is understandable that the suspension setting mode and setting position of the second component can be arbitrarily selected according to actual needs.

[0034] In a second aspect, the present invention provides a slicing unitized production line, which includes: a production line body; at least one slicer as described in any of the foregoing items, which is configured on the production line body; and a transfer mechanism, which can carry a workpiece and at least deliver the workpiece to the position of the slicer corresponding to the avoidance space.

[0035] First, it can be understood that the slicing unit production line has all the technical effects of the slicing machine described in any of the above items, which will not be repeated here. On this basis, through such a structure, a possible structural form of the slicing unit production line is given.

[0036] It is understandable that those skilled in the art can determine the structural form and number of the transfer mechanism, the specific way of loading the workpiece onto the transfer mechanism, and the movement of the workpiece by the transfer mechanism and where the workpiece moves, etc., according to actual needs. For example, the transfer mechanism can have one or more degrees of freedom to achieve movement in corresponding directions, the workpiece can be directly or with the help of an intermediate component mounted on the transfer mechanism, the transfer mechanism can achieve loading of the workpiece by means of bonding, abutment, accommodation, etc., and the number of transfer mechanisms and slicers can be one-to-one, one-to-many, or many-to-many.

[0037] For the above-mentioned slicing unitized production line, in a possible embodiment, the production line body is configured with a loading component and a unloading component, and the transfer mechanism is capable of moving between a loading area corresponding to the loading component and a unloading area corresponding to the unloading component; and / or the transfer mechanism is capable of moving within the loading area and / or the unloading area.

[0038] Through such a structure, a movement form of the workpiece is provided by means of the transfer mechanism.

[0039] For the above-mentioned slicing unitized production line, in a possible implementation manner, the transfer mechanism can move at a certain position between the loading area and the unloading area in a manner of approaching or moving away from the slicer.

[0040] Through such a structure, a movement form of the workpiece is provided by means of the transfer mechanism.

[0041] For the above-mentioned slicing unitized production line, in a possible implementation manner, the transfer mechanism can move in a vertical direction in a manner of approaching or moving away from the slicer.

[0042] Through such a structure, a movement form of the workpiece is provided by means of the transfer mechanism.

[0043] For the above-mentioned slicing unitized production line, in a possible implementation manner, the production line body is configured with a connection tooling, the connection tooling can be set on the transfer mechanism, and the workpiece can be carried on the connection tooling.

[0044] With such a configuration, it is possible to mount the workpiece on the transfer mechanism through the connection jig.

[0045] It is understandable that those skilled in the art can determine the structural form, number, method of loading the workpiece thereon, and method of configuring the transfer mechanism, etc. of the connection tooling according to actual needs. For example, it can be: the connection tooling includes two, and the workpiece is loaded by approaching the two connection toolings in the vertical direction or the horizontal direction; the connection tooling includes one, and a space capable of accommodating space is formed in the connection tooling; etc.

[0046] For the above-mentioned slicing unit production line, in a possible implementation, the connection tooling includes: a first movable part, which can move in a direction close to / away from a cutting chamber of the slicer, and the first movable part is provided with at least one docking structure that can fix the first movable part to the workpiece.

[0047] Through such a construction, a possible structural form of the connection tooling is provided.

[0048] It is understandable that those skilled in the art can determine the structural form of the first movable part and the method for realizing the movement of the first movable part toward / away from the cutting chamber according to actual needs, such as manual or with the aid of a reasonable driving transmission mechanism, etc. For example, the first movable part can be a plate-shaped structure, a block-shaped structure, or a structure with a receiving space, etc.

[0049] In addition, it is understandable that those skilled in the art can determine the structural form, number and specific method of the docking structure to achieve fixed connection with the workpiece according to actual needs. For example, the docking structure can be connected to the original structure of the workpiece (or the original configuration structure of the workpiece) to achieve fixed connection or by adding a structure that matches the docking structure to achieve fixed connection. The method of fixed connection can be bonding, abutting, overlapping, clamping, plugging, screwing, etc.

[0050] For the above-mentioned slicing unitized production line, in a possible implementation manner, the workpiece is mounted on a wafer tray, and the docking structure can cooperate with the wafer tray to thereby achieve fixed connection between the workpiece and the first movable part.

[0051] Through such a configuration, a possible form of achieving workpiece fixation through the docking structure is provided. For example, the docking structure can cooperate with the existing part / structure or the newly added part / structure of the crystal holder in the aforementioned bonding, abutting, overlapping, clamping, plugging, screwing, etc. to achieve fixation of the workpiece and the first movable part.

[0052] For the above-mentioned slicing unitized production line, in a possible implementation manner, the wafer support includes an operating end, and the docking structure can be fixedly connected to the wafer support by extending into the operating end.

[0053] Through such a configuration, a method for the docking structure to achieve fixed connection is provided, such as the operating end is a handle with a hollow middle portion. Accordingly, the docking structure can be a block structure, a columnar structure, a hook structure, etc. The docking structure can be driven to extend into / out of the handle by the movement of the aforementioned transfer structure in the vertical direction.

[0054] For the above-mentioned slicing unit production line, in a possible implementation manner, the first movable part is a strip-shaped structure, and a plurality of the docking structures are arranged on the strip-shaped structure along its length direction.

[0055] This configuration provides a possible structural form of the first movable part.

[0056] It is understandable that those skilled in the art can determine the number of docking structures and their distribution on the strip structure according to actual needs. For example, the structural forms of multiple docking structures can be the same or different, and multiple docking structures can be evenly or unevenly distributed along the length direction of the strip structure.

[0057] For the above-mentioned slicing unit production line, in a possible implementation, the strip structure has a first end and a second end, the strip structure is provided with the docking structure at the first end or near the first end, and the strip structure is provided with the docking structure at the second end or near the second end.

[0058] With such a configuration, it is possible to realize loading and unloading operations for a single slicer through the cooperation of the two docking structures.

[0059] For the above-mentioned slicing unitized production line, in a possible implementation manner, the connection tooling includes: a first driving component, and the first driving component can drive the first movable part to move in a manner of approaching / moving away from the cutting chamber.

[0060] This configuration provides a possible way for the first movable part to realize its movement.

[0061] It is understandable that those skilled in the art can determine the structural form of the first driving component and the specific manner in which it drives the first movable part to move closer to / away from the cutting chamber according to actual needs. For example, the first driving component can be a motor, a power cylinder (such as a pneumatic cylinder, an electric cylinder, a hydraulic cylinder), a rotary module, a linear module, etc. The first driving component can directly drive or indirectly drive the first movable part to move closer to / away from the cutting chamber through transmission components such as a gear set, a gear rack mechanism, a screw nut mechanism, etc.

[0062] For the above-mentioned slicing unit production line, in a possible implementation manner, the connection tooling includes: a first screw and nut mechanism, and the first driving component can drive the first movable part to move in a manner of approaching / moving away from the cutting chamber through the first screw and nut mechanism.

[0063] Through such a construction, a specific form of the drive transmission mechanism corresponding to the first movable part is given.

[0064] For the above-mentioned slicing unit production line, in a possible implementation, the connection tooling includes: a carrying part, which can carry the workpiece, so that: when the workpiece is carried on the carrying part, the carrying part and the workpiece move with the movement of the first movable part.

[0065] Through such a construction, a possible structural form of the connection tooling is provided.

[0066] It is understandable that those skilled in the art can determine the structure, number and specific way of carrying workpieces of the carrying part according to actual needs, such as the carrying part has a static carrying space or can form a dynamic carrying space.

[0067] For the above-mentioned slicing unit production line, in a possible implementation, the carrying part includes a second movable part, the second movable part includes a first part and a second part, and the first part and the second part can generate relative movement in a direction of approaching / moving away from each other to hold the workpiece tightly.

[0068] Through such a configuration, a possible structural form of the mounting part is provided.

[0069] It is understandable that those skilled in the art can determine the structural form of the first / second part, the relative motion mode between the two, and the force generation mode for achieving the motion, etc. according to actual needs. For example, both the first part and the second part can move, or only one of them moves while the other is stationary. The relative motion between the two can be achieved by manpower or by means of a reasonable drive transmission mechanism, etc.

[0070] For the above-mentioned slicing unit production line, in a possible implementation manner, the connection tooling includes: a second driving component, and the second driving component can drive the first part and / or the second part to move.

[0071] This configuration provides a possible way for the second movable part to realize its movement.

[0072] Similar to the aforementioned first driving component, it is understandable that those skilled in the art can determine the structural form of the second driving component and the specific manner in which it drives the first / second part to achieve relative motion therebetween according to actual needs. For example, the second driving component can be a motor, a power cylinder (such as a pneumatic cylinder, an electric cylinder, a hydraulic cylinder), a rotary module, a linear module, etc. The second driving component can directly drive the first / second part or indirectly drive the first / second part through a transmission component such as a gear set, a gear rack mechanism, a screw nut mechanism, etc. to generate relative motion therebetween.

[0073] For the above-mentioned slicing unit production line, in a possible implementation, the connection tooling includes: a second screw and nut mechanism, the screw of the second screw and nut mechanism has two thread segments with opposite rotation directions, and the second driving component can drive the first part and the second part to move in a manner of approaching / moving away from each other through the second screw and nut mechanism.

[0074] Through such a construction, a specific form of the drive transmission mechanism corresponding to the second movable part is given.

[0075] For the above-mentioned slicing unitized production line, in a possible implementation manner, the connection tooling includes a tooling base, and the first movable part is arranged on the tooling base.

[0076] Through such a configuration, a possible structural form of the connection tool is provided. For example, the tool base is mainly used as a mounting carrier, so the first / second movable part is directly or indirectly arranged on the mounting base. In addition, the tool base can also be fixed to the transfer mechanism to achieve the connection tool to be adapted to the production line. For example, the tool base can be a mounting frame, a mounting frame, a mounting table, etc.

[0077] For the above-mentioned slicing unit production line, in a possible implementation, the transfer mechanism includes at least one overhead rail robot, and the overhead rail robot is at least capable of carrying the workpiece and delivering the workpiece to and / or moving it out of the slicer through the avoidance space.

[0078] Through such a structure, a specific structural form of the transfer mechanism is given, such as based on the ceiling rail configured on the main body of the production line, the movement of the corresponding dimension is achieved by the walking of the ceiling rail robot on the ceiling rail.

[0079] It is understandable that the transfer tasks of the transfer mechanism for the workpiece in each link can be completed entirely by the ceiling rail robot, or only part of it can be completed by the ceiling rail robot. It can be completed by one ceiling rail robot, or it can be completed by the collaboration of multiple ceiling rail robots. Exemplarily, the transfer tasks corresponding to the workpiece include transfers corresponding to paths A, B, and C, wherein the transfer tasks corresponding to path A are completed by the ceiling rail robot, while the transfer tasks corresponding to paths B and C are completed by other means. Exemplarily, after the workpiece is delivered from path A to a specified position (such as the intersection of path A and path B) by the ceiling rail robot, the workpiece transfer corresponding to path B is realized by the truss manipulator. Alternatively, two ceiling rail robots are configured in the main body of the production line, and the transfer work corresponding to path A and path B is completed by two ceiling rail robots respectively.

[0080] For the above-mentioned slicing unitized production line, in a possible implementation, the transfer mechanism includes: a loading transfer mechanism, which can at least transfer the workpiece in the loading area; and / or a unloading transfer mechanism, which can at least transfer the workpiece in the unloading area.

[0081] With such a configuration, it is possible to complete the task of transferring workpieces on a unitized production line through multiple transfer mechanisms (cooperation of individual units).

[0082] The reason for such a setting is that during the transfer of the workpiece, the transfer difficulty, accuracy, and front and rear connecting parts / positions are different corresponding to different areas or transfer paths. Therefore, through the collaboration of multiple units, it is expected to better complete the complete transfer of the workpiece.

[0083] It is understandable that those skilled in the art can determine the specific structural form, number, and connection method of the loading / unloading transfer mechanism with the overhead rail robot according to actual needs. For example, the loading / unloading transfer mechanism can be an AGV, a manipulator with multi-dimensional movement, an opening and closing component that can move in the vertical and horizontal directions, etc., wherein the structural form of the loading / unloading transfer mechanism can be the same or different. In addition, those skilled in the art can determine the configuration method of the loading / unloading transfer mechanism according to actual needs, such as only configuring a transfer mechanism for the loading area or the unloading area, or configuring a transfer mechanism for both the loading area and the unloading area. Exemplarily, a loading transfer mechanism and a unloading transfer mechanism are respectively configured for the loading area and the unloading area, wherein the structures of the loading transfer mechanism and the unloading transfer mechanism are different.

[0084] In addition, it is understandable that those skilled in the art can determine the specific connection method between the overhead rail robot and the loading / unloading transfer mechanism according to actual needs. For example, it can be: the overhead rail robot and the loading / unloading transfer mechanism directly transfer the workpiece, or it can be achieved through an intermediate position or component. The connection between the workpiece and the two is achieved through an intermediate position or component. Exemplarily, an intermediate component that can generate a certain amount of motion is arranged between the two. For example, taking the overhead rail robot and the unloading transfer mechanism as an example, the intermediate component first approaches the overhead rail robot to receive the workpiece mounted on the overhead rail robot, and then approaches the unloading transfer mechanism to load the workpiece onto the unloading transfer mechanism.

[0085] For the above-mentioned slicing unitized production line, in a possible implementation, the main body of the production line is equipped with a transfer table, and the overhead rail robot can deliver the workpiece to / from the transfer table; and / or the loading transfer mechanism and / or the unloading transfer mechanism can deliver the workpiece to / from the transfer table.

[0086] Through such a structure, a possible connection method between the overhead rail robot and the loading / unloading material transfer mechanism is given.

[0087] It is understandable that technical personnel in this field can determine the structural form, specific setting position and setting method of the turntable according to actual conditions. For example, the turntable can be a fixed structure or a rotatable / movable / liftable mechanism. The turntable can be set in the upper / lower material area or outside the upper / lower material area (close to the slicer).

[0088] For the above-mentioned slicing unitized production line, in a possible implementation manner, the transfer table can be arranged in the loading area and / or the unloading area.

[0089] Through this structure, a specific configuration method of the transfer table is given. Taking the overhead rail robot and the material transfer mechanism as an example, after the slicer completes the slicing operation of the current workpiece, the overhead rail robot delivers the workpiece to the designated position corresponding to the transfer table. After that, the material transfer mechanism can grab the workpiece at the designated position and further transport the workpiece to the degumming workshop.

[0090] For the above-mentioned slicing unitized production line, in a possible implementation manner, the transfer table is movably disposed on the production line body.

[0091] With such a configuration, it is possible to realize the transfer operation by coordinating the movements of the transfer mechanism and the transfer table, thereby expecting to save the time required for the transfer operation.

[0092] It is understandable that those skilled in the art can determine the activity mode (such as movement, rotation, etc.), activity range, the mechanism on which the activity depends and the relationship between its activity form and the activity of the transfer mechanism (such as being able to move relatively independently or having to move synchronously with the transfer mechanism) of the transfer platform according to actual needs.

[0093] For the above-mentioned slicing unitized production line, in a possible implementation manner, the loading transfer mechanism and / or the unloading transfer mechanism includes: an opening and closing component, and the opening and closing component can clamp and transfer the workpiece.

[0094] Through such a configuration, a possible structural form of the loading / unloading material transfer mechanism is provided.

[0095] It is understandable that those skilled in the art can select any reasonable form of opening and closing components according to actual needs to complete the transfer of workpieces in the loading / unloading area.

[0096] For the above-mentioned slicing unitized production line, in a possible implementation, the production line body includes one or more, the loading transfer mechanism and / or the unloading transfer mechanism includes a frame, and the opening and closing component can move along the frame, wherein, in the case where the production line body includes multiple, the opening and closing component can switch between different production line bodies by its movement along the frame.

[0097] By such a configuration, it is possible to seek to undertake more transfer work through the same opening and closing component. For example, the production line body includes multiple, and the frame (such as a truss) runs through the unloading areas of the multiple production line bodies. By configuring an opening and closing component for the frame, the transfer work corresponding to the unloading areas of the multiple production line bodies can be achieved through the opening and closing component.

[0098] For the above-mentioned slicing unitized production line, in a possible implementation manner, the loading transfer mechanism and / or the unloading transfer mechanism includes a robot.

[0099] Through such a configuration, a possible structural form of the loading / unloading material transfer mechanism is provided.

[0100] It is understandable that those skilled in the art can select any reasonable form of manipulator to complete the transfer of workpieces in the loading / unloading area according to actual needs. For example, the manipulator usually grasps the workpiece by retracting and extending the movement. In this way, compared with the overhead rail robot, the configuration of the overhead rail and other structures is omitted, and the layout is more flexible.

[0101] In a third aspect, the present invention provides a control method for a slicing unitized production line, which includes a transfer mechanism, a connecting tool and at least one slicer, and the control method includes: enabling the transfer mechanism to deliver the workpiece to a target position compatible with the slicer or remove the workpiece from the target position; enabling the connecting tool to deliver the workpiece to a cutting area of ​​the slicer or remove the workpiece from the cutting area.

[0102] Through such a structure, a possible implementation method of a slicing unit production line is provided.

[0103] It is understandable that those skilled in the art can determine the orientation of the target position and its specific form of adaptation to the slicer according to actual needs, as long as such adaptation can be accurately and reliably achieved through a determined structure, set logic, etc.

[0104] It should be noted that, obviously, the structural form of the relevant components mentioned here and in the control method below may include but is not limited to the specific form in the slicing unit production line mentioned above.

[0105] Regarding the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the slicer can construct an avoidance space, and in the step of "enabling the transfer mechanism to deliver the workpiece to a target position compatible with the slicer or removing the workpiece from the target position", the workpiece at the target position can realize loading and / or unloading operations for the cutting area of ​​the slicer through the avoidance space.

[0106] This configuration provides a possible form of adaptation.

[0107] Regarding the control method of the above-mentioned slicing unit production line, in a possible implementation, the slicer includes a liquid circuit portion and an electrical control portion, and the configuration of the liquid circuit portion and the electrical control portion enables the slicer to construct an avoidance space.

[0108] Through such a configuration, a possible construction method of the avoidance space is provided.

[0109] For the control method of the above-mentioned slicing unitized production line, in a possible implementation manner, the electric control part includes a first electric control cabinet and a second electric control cabinet, and the first electric control cabinet and the second electric control cabinet are centrally arranged or separately arranged, and the liquid circuit part includes a liquid circuit system, and the liquid circuit system includes a first liquid circuit unit and a second liquid circuit unit, and the first liquid circuit unit and the second liquid circuit unit are centrally arranged or separately arranged, and the construction method of the avoidance space includes: the first liquid circuit unit and the second liquid circuit unit are respectively arranged on both sides of the cutting room, and the first electric control cabinet and the second electric control cabinet are respectively arranged above the first liquid circuit unit and the second liquid circuit unit, so that: the avoidance space is formed between the first electric control cabinet and the second electric control cabinet; or the first liquid circuit unit and the second liquid circuit unit are centrally arranged to form a first component, and the first electric control cabinet and the second electric control cabinet are centrally arranged to form a first component. The first component and the second component are arranged in the middle to form a second component, and the first component and the second component are respectively placed on both sides of the cutting chamber to form the avoidance space therebetween; or the first liquid circuit unit and the second liquid circuit unit are centrally arranged to form a first component, and the first electric control cabinet and the second electric control cabinet are centrally arranged to form a second component, and the first component and the second component are longitudinally stacked and arranged on one side of the cutting chamber along the loading and unloading direction of the workpiece, and thus an open avoidance space is formed between the cutting chamber and the one side; or the first liquid circuit unit and the second liquid circuit unit are centrally arranged to form a first component, and the first electric control cabinet and the second electric control cabinet are centrally arranged to form a second component, and the first component is arranged on one side of the cutting chamber along the loading and unloading direction of the workpiece, and the second component is movably configured in the cutting chamber to form an open avoidance space above the first component.

[0110] Through such a configuration, a possible implementation method of constructing an escape space through the electronic control unit and the liquid circuit unit is provided.

[0111] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the connecting fixture includes a first movable part, and the first movable part is provided with at least one docking structure, and the "making the connecting fixture deliver the workpiece to the cutting area of ​​the slicer or remove the workpiece from the cutting area" includes: fixing the docking structure to the workpiece, and making the first movable part move in a direction approaching / moving away from the cutting chamber of the slicer, thereby delivering the workpiece to the cutting area of ​​the slicer or removing the workpiece from the cutting area.

[0112] Through such a configuration, a possible implementation method is provided for enabling the workpiece to move between the target position and the cutting position within the projection plane of the horizontal plane by means of the engaging tool.

[0113] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the workpiece is mounted on a wafer tray, and in the step of "fixing the docking structure to the workpiece, and causing the first movable part to move in a direction approaching / away from a cutting chamber of the slicer, thereby delivering the workpiece to the cutting area of ​​the slicer or removing the workpiece from the cutting area", the "fixing the docking structure to the workpiece" includes: making the docking structure cooperate with the wafer tray and thereby fixing the docking structure to the workpiece.

[0114] Through such a structure, a possible implementation method of fixing the connection tool including the first movable part to the workpiece is provided.

[0115] Regarding the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the crystal support includes an operating end, and the "making the docking structure cooperate with the crystal support and thereby making the docking structure fixedly connected to the workpiece" includes: making the transfer mechanism drive the docking structure to move downward and extend into the operating end, thereby cooperating with the crystal support and thereby making the docking structure fixedly connected to the workpiece.

[0116] Through such a structure, a specific implementation method of fixing is provided.

[0117] Regarding the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the first movable part is a strip structure, and a plurality of the docking structures are arranged on the strip structure along its length direction, and the "making the docking structure cooperate with the crystal support and thereby making the docking structure fixedly connected to the workpiece" includes: making the first movable part move in a direction approaching / moving away from the cutting chamber of the slicer, so that one of the plurality of docking structures cooperates with the crystal support.

[0118] Through such a structure, it is possible to achieve loading or unloading operations that are compatible with the docking structures at different positions.

[0119] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the docking tooling includes a first driving component, and in the step of "fixing the docking structure to the workpiece, and causing the first movable part to move in a direction approaching / away from a cutting chamber of the slicer, thereby delivering the workpiece to the cutting area of ​​the slicer or removing the workpiece from the cutting area", the "causing the first movable part to move in a direction approaching / away from the cutting chamber of the slicer" includes: causing the first driving component to drive the first movable part to move in a manner approaching / away from the cutting chamber of the slicer.

[0120] Such a configuration provides a possible way for the first movable component to realize its movement.

[0121] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the docking tooling includes a carrying part, and in the step of "fixing the docking structure to the workpiece, and causing the first movable part to move in a direction approaching / away from a cutting chamber of the slicer, thereby delivering the workpiece to the cutting area of ​​the slicer or removing the workpiece from the cutting area", the "causing the first movable part to move in a direction approaching / away from the cutting chamber of the slicer" includes: when the workpiece is carried on the carrying part, the carrying part and the workpiece move with the movement of the first movable part.

[0122] Through such a structure, a possible implementation method for matching the workpiece with the connecting tool is provided.

[0123] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the carrying part includes a second movable part, the second movable part includes a first part and a second part, and in the step of "when the workpiece is carried on the carrying part, the carrying part and the workpiece move with the movement of the first movable part", the "carrying the workpiece on the carrying part" includes: causing the first part and the second part to generate relative movement in a direction of approaching / moving away from each other so as to hold the workpiece tightly.

[0124] This structure provides a possible implementation method for mounting the workpiece on the connection tool.

[0125] Regarding the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the connecting tooling includes a second driving component, and the "causing the first part and the second part to generate a relative movement in a direction approaching / moving away from each other to thereby hold the workpiece" includes: causing the second driving component to drive the first part and / or the second part to move, thereby causing the first part and the second part to generate a relative movement in a direction approaching / moving away from each other to thereby hold the workpiece.

[0126] Such a structure provides a possible implementation mode for the second movable component to hold the workpiece tightly.

[0127] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the connecting tooling includes a second screw-nut mechanism, the screw of the second screw-nut mechanism has two thread segments with opposite rotation directions, and the "making the second driving component drive the first part and / or the second part to move" includes: making the second driving component drive the second screw-nut mechanism and thereby make the first part and the second part matching the two thread segments with opposite rotation directions move in a manner of approaching / moving away from each other.

[0128] Through such a structure, a specific implementation method is provided for the workpiece to be held tightly by the second movable component.

[0129] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the transfer mechanism includes an overhead rail robot, and the "making the transfer mechanism deliver the workpiece to a target position that is compatible with the slicer or remove the workpiece from the target position" includes: making the overhead rail robot deliver the workpiece to a target position that is compatible with the slicer or remove the workpiece from the target position.

[0130] Through such a structure, a specific structure of the transfer mechanism is given.

[0131] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the production line includes a loading component and a unloading component, and the "making the overhead rail robot deliver the workpiece to a target position compatible with the slicer or remove the workpiece from the target position" includes: making the transfer mechanism drive the workpiece to move between a loading area corresponding to the loading component and a unloading area corresponding to the unloading component and deliver the workpiece to a target position compatible with the slicer or remove the workpiece from the target position.

[0132] Through such a structure, the path involved in the transfer task completed by the Tiangan robot is given.

[0133] For the control method of the above-mentioned slicing unitized production line, in a possible implementation manner, the production line includes a loading component and a unloading component, the transfer mechanism includes a loading transfer mechanism and / or an unloading transfer mechanism, and the “enabling the transfer mechanism to deliver the workpiece to a target position compatible with the slicer or remove the workpiece from the target position” includes:

[0134] The loading transfer mechanism is configured to at least transfer the workpieces in the loading area; and / or the unloading transfer mechanism is configured to at least transfer the workpieces in the unloading area.

[0135] Through such a composition, the possible forms of the transfer mechanism and the paths involved in the transfer tasks it completes are given.

[0136] Regarding the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the main body of the production line is provided with a transfer table, and the "enabling the transfer mechanism to deliver the workpiece to a target position compatible with the slicer or to remove the workpiece from the target position" includes: enabling the overhead rail robot to deliver the workpiece to / from the transfer table and deliver the workpiece to a target position compatible with the slicer or to remove the workpiece from the target position; enabling the loading transfer mechanism and / or the unloading transfer mechanism to deliver the workpiece to / from the transfer table and to transfer the workpiece in the loading area and / or the unloading area.

[0137] Through such a structure, a possible implementation method of the combined transfer mechanism to achieve transfer cooperation is provided.

[0138] Regarding the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the transfer table is movably arranged on the main body of the production line, and the "making the transfer mechanism deliver the workpiece to / from the target position compatible with the slicer or remove the workpiece from the target position" includes: making the overhead rail robot and / or the transfer table deliver the workpiece to / from the transfer table and deliver the workpiece to the target position compatible with the slicer or remove the workpiece from the target position; making the loading transfer mechanism and / or the unloading transfer mechanism and / or the transfer table deliver the workpiece to / from the transfer table and transfer the workpiece in the loading area and / or the unloading area.

[0139] With such a structure, it is possible to better realize the task of transferring the workpiece by means of the movement of the transfer table.

[0140] It is understandable that those skilled in the art can determine the movement mode of the transfer platform and whether it moves independently or in association with other moving parts according to actual needs. For example, the transfer platform can move synchronously with the overhead rail robot or autonomously.

[0141] Regarding the control method of the above-mentioned slicing unitized production line, in a possible implementation manner, the production line body includes one or more, the loading transfer mechanism and / or the unloading transfer mechanism includes a frame and an opening and closing component, wherein, in the case where the production line body includes multiple, the control method includes: making the opening and closing component move along the frame, so that the opening and closing component switches between different production line bodies.

[0142] Through such a structure, it is possible to achieve the sharing of the loading transfer mechanism and / or the unloading transfer mechanism on multiple production line bodies, so as to better adapt to larger-scale slicing unit production.

[0143] In a fourth aspect, the present invention provides a computer-readable storage medium, which includes a memory, wherein the memory is suitable for storing multiple program codes, and the program codes are suitable for being loaded and run by a processor to execute the control method of the slicing unit production line described in any one of the above.

[0144] It can be understood that the computer-readable storage medium has all the technical effects of the control method of the slicing unit production line described in any of the above items, which will not be repeated here.

[0145] It is understood by those skilled in the art that the present invention implements all or part of the processes in the control method of the slicing unitized production line, which can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a computer-readable storage medium. When the computer program is executed by the processor, the steps of the above-mentioned various method embodiments can be implemented. Among them, the computer program includes computer program code, and it can be understood that the program code includes but is not limited to the program code for executing the control method of the slicing unitized production line. For the convenience of explanation, only the part related to the present invention is shown. The computer program code can be in the form of source code, object code, executable file or some intermediate form. The computer-readable storage medium may include: any entity or device, medium, U disk, mobile hard disk, disk, optical disk, computer memory, read-only memory, random access memory, electric carrier signal, telecommunication signal and software distribution medium that can carry the computer program code. It should be noted that the content contained in the computer-readable storage medium can be appropriately increased or decreased according to the requirements of legislation and patent practice in the jurisdiction. For example, in some jurisdictions, according to legislation and patent practice, the computer-readable storage medium does not include electric carrier signals and telecommunication signals.

[0146] In a fifth aspect, the present invention provides a computer device comprising a memory and a processor, wherein the memory is suitable for storing a plurality of program codes, and the program codes are suitable for being loaded and run by the processor to execute the control method of the slicing unitization production line as described in any one of the above.

[0147] It is understandable that the device has all the technical effects of the control method of the slicing unit production line described in any of the above, which will not be described in detail here. The device can be a computer-controlled device formed by various electronic devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0148] The following takes the workpiece as a silicon rod (hereinafter referred to as silicon rod, including the silicon rod including the wafer tray to be processed and the silicon wafer including the wafer tray that has been processed) and the transfer mechanism as a combined mechanism including a ceiling robot (mainly including the ceiling robot and an opening and closing component walking on the truss, wherein the obvious advantage of the ceiling robot is that it can well free up the ground space for placing items and passing. However, there will be corresponding shortcomings such as the inconvenience of maintenance of the equipment at a high place) as an example, and describes the preferred embodiments of the present invention with reference to the accompanying drawings, in which:

[0149] Figure 1 A schematic diagram showing the structure of a slicing unit production line according to an embodiment of the present invention Figure 1 , the figure shows the overhead robot in the transfer mechanism and the single slicer in the slicing unit production line;

[0150] Figure 2 A schematic diagram showing the structure of a connection tool in a slicing unit production line according to an embodiment of the present invention Figure 1 ;

[0151] Figure 3 A schematic diagram showing the structure of a connection tool in a slicing unit production line according to an embodiment of the present invention Figure 2 ;

[0152] Figure 4 A schematic diagram showing the structure of a connection tool in a slicing unit production line according to an embodiment of the present invention Figure 3 ;

[0153] Figure 5 A schematic diagram showing the state of the feeding operation of the connecting tooling for the single slicer in the slicing unit production line according to an embodiment of the present invention Figure 1 (Sky Track Robot is in place);

[0154] Figure 6 A schematic diagram showing the state of the feeding operation of the connecting tooling for the single slicer in the slicing unit production line according to an embodiment of the present invention Figure 2 (The extended end at the rear of the connecting tool hooks the handle at the tail end of the crystal tray);

[0155] Figure 7 A schematic diagram showing the state of the feeding operation of the connecting tooling for the single slicer in the slicing unit production line according to an embodiment of the present invention Figure 3 (The entire material exits the fixture and connects with the internal guide rail of the cutting chamber);

[0156] Figure 8 A schematic diagram showing the state of the feeding operation of the connecting tooling for the single slicer in the slicing unit production line according to an embodiment of the present invention Figure 4 (The first movable part of the connecting tooling extends out and hooks the handle at the rear end of the crystal tray);

[0157] Fig. 9 A schematic diagram showing the state of the feeding operation of the connecting tooling for the single slicer in the slicing unit production line according to an embodiment of the present invention Figure 5 (Push the entire material into the cutting chamber);

[0158] Fig.10 A schematic diagram showing the state of the unloading operation of the connecting tooling for a single slicer in a slicing unit production line according to an embodiment of the present invention Figure 1 (Sky Track Robot is in place);

[0159] Fig.11 A schematic diagram showing the state of the unloading operation of the connecting tooling for a single slicer in a slicing unit production line according to an embodiment of the present invention Figure 2 (The first movable part of the connecting tooling extends out and hooks the handle at the rear end of the crystal tray);

[0160] Fig.12 A schematic diagram showing the state of the unloading operation of the connecting tooling for a single slicer in a slicing unit production line according to an embodiment of the present invention Figure 3 (Pull the entire material out of the cutting chamber);

[0161] Fig.13 A schematic diagram showing the state of the unloading operation of the connecting tooling for a single slicer in a slicing unit production line according to an embodiment of the present invention Figure 4 (The first movable part of the connecting tool is extended again, and the extended end at the rear thereof hooks the handle at the tail end of the crystal support);

[0162] Fig.14 A schematic diagram showing the state of the unloading operation of the connecting tooling for a single slicer in a slicing unit production line according to an embodiment of the present invention Figure 5 (Pull the entire material into the fixture);

[0163] Fig.15 A schematic diagram showing the structure of a single slicer in a slice unit production line according to an embodiment of the present invention Figure 1 ;

[0164] Fig.16 A schematic diagram showing the structure of a single slicer in a slice unit production line according to an embodiment of the present invention Figure 2 ;

[0165] Fig.17 A schematic diagram showing the structure of a single slicer in a slice unit production line according to an embodiment of the present invention Figure 3 ;

[0166] Fig.18 A schematic diagram showing the structure of a single slicer in a slice unit production line according to an embodiment of the present invention Figure 4 ;as well as

[0167] Fig.19 A schematic diagram showing the structure of a slicing unit production line according to an embodiment of the present invention Figure 2 The figure shows the opening and closing components in the transfer mechanism but does not show the single slicer in the slicing unit production line.

[0168] List of reference numerals:

[0169] 1. Main body of production line;

[0170] 21. Loading area; 22. Unloading area;

[0171] 31. Sky rail robot; 33. Opening and closing assembly; 34. Truss; 35. Transfer platform;

[0172] 4. Connect tooling;

[0173] 40. Install the substrate;

[0174] 41. first movable part; 411. extension end; 412. first servo motor; 413. first screw nut mechanism;

[0175] 421, first part; 422, second part; 423, second servo motor; 424, second screw nut mechanism; 425, second linear guide rail; 426, clamping plate; 427, protrusion;

[0176] 5. Slicer;

[0177] 51. Slicer body; 52. Cutting chamber; 53. Cutting mechanism;

[0178] 54. Liquid circuit system; 541. Internal circulation liquid circuit unit; 542. External circulation liquid circuit unit; 55. Liquid supply cylinder;

[0179] 57, electric control cabinet; 571, low voltage electric control cabinet; 572, high voltage electric control cabinet;

[0180] 61. Silicon rod; 62. Crystal tray. DETAILED DESCRIPTION

[0181] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the protection scope of the present invention.

[0182] It should be noted that in the description of the present invention, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings, which are only for the convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0183] In addition, it should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "installation", "setting", and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, an indirect connection through an intermediate medium, or the internal connection of two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0184] In addition, in order to better illustrate the present invention, many specific details are given in the following specific embodiments. Those skilled in the art should understand that the present invention can also be implemented without certain specific details. In some examples, the principles of the slicer, transfer mechanism including the overhead rail robot, etc., which are well known to those skilled in the art, are not described in detail in order to highlight the main purpose of the present invention. Figures 1 to 19 The present invention is described in whole or in part.

[0185] As a type of wire cutting machine, a slicer is mainly used to cut silicon rods (usually called square rods) with grinding accuracy that meets the standard using a wire mesh composed of cutting wires (such as diamond wires, etc.) to obtain silicon wafers. Under normal circumstances, the slicing operation is as follows: after the stick gluing is completed in a gluing workshop (the square rod to be sliced ​​is glued to the crystal tray), the crystal tray is fixed on the feed mechanism, and during the reciprocating motion of the wire mesh between the cutting main rollers of the cutting mechanism, the feed mechanism drives the silicon rod close to the wire mesh, and the wire mesh can slice the square rod by wire sawing. For example, the slicer includes a slicer body, and the slicer body is formed with a cutting chamber, and an operating door is respectively provided on the left and right sides of the cutting chamber, and the cutting mechanism is arranged in the cutting chamber. In this example, the cutting mechanism composed of multiple cutting main rollers constructs a single-station structure that can slice a silicon rod in a single operation.

[0186] In a possible embodiment, the present invention provides a slicing production line capable of realizing multi-machine automated production, the production line mainly includes a production line body 1, such as the production line body may include but not limited to necessary work surfaces, terminals that allow manual intervention, parts that must be manually operated, control terminals configured at the work site, collection terminals that can collect the work on site (such as visual signals, sound signals, etc.), central control terminals that can analyze and control the slicing work on site, and reminder terminals that issue reminder information such as voice broadcasts and alarms when necessary. Among them, the production line body is equipped with multiple slicing machines 5 (single machines), based on which it is expected that multiple slicing machines can simultaneously perform slicing operations on silicon rods to be processed (grinded square rods) or select a part of them to perform slicing operations on silicon rods, such as multiple single machines are configured in a removable manner on the production line, so that the scale of the production line can be flexibly adjusted and the single machines can be replaced or repaired after removal. In addition, the structural form, slicing operation method and the method of configuring the multiple single machines in the production line body can be the same or different. Exemplarily, the main body of the production line includes multiple areas, wherein a single machine in a certain area is mainly used for processing silicon wafers with more stringent processing requirements, and therefore the single machine corresponding to this area has better processing accuracy.

[0187] In a possible embodiment, the main body of the production line is configured with a loading component and a unloading component, wherein the loading component is connected to a gluing workshop or a gluing area, such as the silicon rods (bonded to the crystal support) out of the curing warehouse of the gluing workshop can be transferred to the loading area 21 corresponding to the loading component by manual and / or automatic operation. For example, the trolley carrying the silicon rods is manually transferred to the loading area. Among them, the unloading component is connected to a degumming workshop or a degumming area, and the degumming workshop is mainly for degumming the silicon rods (in the form of multiple silicon wafers) bonded to the crystal support and completed the slicing operation. Similar to the connection between the aforementioned gluing workshop or gluing area and the loading operation, the silicon wafers corresponding to the unloading area 22 of the unloading component can also be transferred to the degumming workshop or the degumming area by manual and / or automatic operation. For example, the trolley carrying the silicon rods is manually transferred to the degumming workshop or the degumming area. For example, the loading / unloading component generally includes a loading / unloading trolley or an loading / unloading rack.

[0188] In a possible implementation, the aforementioned multiple stand-alone machines share one loading component and one unloading component and use similar loading and unloading control logic for the stand-alone machines. Obviously, the structure of the loading / unloading component can also be adjusted according to actual needs, such as but not limited to: configuring multiple loading components and unloading components for multiple slicers, such as configuring one loading component and unloading component for one or more stand-alone machines according to the orientation, priority, product model, and the properties of the workpiece to be processed (such as the particularity or importance of a batch of products, etc.), illustratively, configuring one loading component and unloading component for multiple stand-alone machines in the same row, and configuring a separate loading component and unloading component for a certain stand-alone machine; multiple stand-alone machines share one loading component and one unloading component, and configuring a separate loading and unloading control logic for one or several stand-alone machines (such as also according to the aforementioned orientation, priority, product model, and the properties of the workpiece to be processed, etc.).

[0189] Taking multiple stand-alone machines sharing one set of loading components and one set of unloading components as an example, the production line includes a transfer mechanism, which is mainly used to realize the transfer of silicon rods to be sliced ​​and the cut silicon wafers between the loading component, the slicer and the unloading component, as well as the transfer inside the loading component and the unloading component, such as the transfer of silicon rods to be sliced ​​between the loading component and the slicer (loading operation), the transfer of cut silicon wafers between the slicer and the unloading component (unloading operation), the corresponding operations inside the loading / unloading component, and the connection operations such as taking and unloading in the area between the loading / unloading component and the two.

[0190] In a possible embodiment, the transfer mechanism includes a manipulator / robot that can at least walk along the direction between the loading assembly, the unloading assembly and different slicers, such as the manipulator can walk between the loading assembly and the unloading assembly (such as can be called the length direction) with the help of trusses, ceiling rails, ground rails and other frames, walk along the direction of moving in / out of the cutting area of ​​the single machine (such as can be called the width direction) and move in the vertical direction (such as can be called the longitudinal direction). For example, the corresponding number of single machines can be calculated according to the logical rhythm of the group control system, so as to realize the loading and unloading operations of silicon rods for single machines (moving in / out of the cutting area of ​​the single machine) and production lines (entering the loading area of ​​the production line or moving out of the unloading area of ​​the production line) through the corresponding walking of the manipulator. As in this example, the manipulator of the transfer mechanism includes a ceiling rail robot 31 and an opening and closing component 33 configured in the unloading area as a unloading transfer mechanism, such as the opening and closing component 33 can walk along the width direction of the main body of the production line on the truss 34. Among them, the cooperation between the overhead rail robot and the overhead rail configured on the main body of the production line realizes the walking requirements corresponding to the slicing unitized production line along the length direction (the part between the loading component and the unloading component, the width direction (close to / away from the cutting room of the slicer) and the longitudinal direction (to constrain or release the constraints of the connecting tooling and the crystal support). Exemplarily, a transfer table 35 capable of placing one or more silicon rods is respectively provided in the loading area and the unloading area. The overhead rail robot can take the silicon rods from the transfer table and further deliver them to the slicer for slicing. For example, after the overhead rail robot delivers the silicon wafers that have completed the slicing operation to the transfer table corresponding to the unloading area, the opening and closing component can take the silicon wafers from the transfer table and further transfer them to the degumming workshop or degumming area. Preferably, the transfer table itself can also move, so as to save beats while completing the transfer task through the cooperation of the transfer table and the overhead rail robot / truss manipulator. Such as may include but is not limited to:

[0191] Scenario 1:

[0192] There are no trusses or opening and closing components that move on the trusses in the loading area and the unloading area, and the transfer mechanism only includes the overhead rail robot. The transfer table corresponding to the loading area and the transfer table corresponding to the unloading area move together with the overhead rail robot. Specifically, the overhead rail robot carries the connection tooling to clamp the silicon rod containing the crystal tray from the loading component, and places the silicon rod on the transfer table corresponding to the loading area (the transfer table and the overhead rail robot move together), and the overhead rail robot and the transfer table further move to the slicer for slicing, and the overhead rail robot clamps one of the silicon rods from the transfer table and feeds it to the slicer. After the slicer completes the slicing operation, the overhead rail robot unloads the silicon wafer containing the crystal tray (cut material) from the corresponding slicer and places it on the transfer table corresponding to the unloading area, and transfers the cut material to the unloading area by moving the transfer table and the overhead rail robot together. The overhead rail robot carries the connection tooling to transfer the cut material from the transfer table corresponding to the unloading area to the unloading component.

[0193] Scenario 2:

[0194] Trusses and opening and closing components that move on the trusses are only provided in the unloading area, and the turntable corresponding to the loading area moves together with the overhead rail robot. The turntable corresponding to the unloading area can move autonomously, and cooperates with the trusses and opening and closing components configured in the unloading area to complete the transfer tasks corresponding to the unloading area. Specifically, the overhead rail robot carries the connection tooling to clamp the silicon rods containing the crystal trays from the loading assembly, and places the silicon rods on the turntable corresponding to the loading area (the turntable and the overhead rail robot move together). Multiple silicon rods can be placed on the turntable, and the overhead rail robot and the turntable further move to the slicer for slicing operations. The overhead rail robot clamps one of the silicon rods from the turntable and feeds it to the slicer. Since the turntable and the overhead rail robot can move together, several more silicon rods can be placed at the loading position, and there is no need to include the step of going back to retrieve the materials for each slicing operation. The turntable corresponding to the unloading area moves to the position of the slicer where unloading is required. After the overhead rail robot unloads the cut materials from the slicer, it places the cut materials on the turntable corresponding to the unloading area. In this way, multiple cut materials can be placed on the turntable. Then the turntable corresponding to the unloading area moves to the unloading position, and the cut materials are placed from the turntable to the unloading assembly through the opening and closing clamps walking on the truss.

[0195] Scenario 3:

[0196] In addition to the unloading area, a truss and an opening and closing component that moves on the truss are also provided in the loading area. The difference from the second situation is that the overhead rail robot and the turntable corresponding to the loading area do not move synchronously, and the turntable cooperates with the opening and closing component provided in the loading area to complete the transfer task in the loading area. Specifically, the opening and closing clamp transfers the silicon rods from the loading assembly to the turntable, and multiple silicon rods can be placed on the turntable at this time. The turntable moves by itself to the position of the slicer that needs to be loaded, and the overhead rail robot also moves to the corresponding position. The overhead rail robot can put one of the multiple silicon rods placed on the turntable from the turntable into the slicer.

[0197] Taking the transfer mechanism with only trusses and opening and closing components configured in the unloading area as an example, the process of any slicing operation in the slicing unit production line generally includes the following four steps:

[0198] The material picking step is as follows: the overhead rail robot carries the connection tooling to pick up the material from the loading assembly and puts the material on the transfer table corresponding to the loading area;

[0199] The loading step is specifically as follows: the overhead rail robot moves to a position corresponding to the slicer that completes the current slicing operation (such as the overhead rail robot and the transfer table corresponding to the loading area move to the position together), and completes the loading operation of delivering the workpiece to the cutting area;

[0200] The unloading step is specifically as follows: the overhead rail robot carries the connection tooling and moves to the unloading position corresponding to the slicer, and takes out the sliced ​​silicon rod from the slicer or moves it to the unloading area after taking it out;

[0201] The material discharge step is specifically as follows: the cut materials of the transfer table corresponding to the material discharge area are transported and placed on the material discharge assembly by opening and closing the clamps along the movement of the truss.

[0202] It is understandable that the above-mentioned overhead rail robot 31 and the opening and closing component 33 are only an exemplary description of the transfer mechanism. Those skilled in the art can flexibly adjust the type, number, corresponding transfer path, etc. of the transfer mechanism included in the example according to actual conditions, such as configuring the loading area with an opening and closing component that can walk on the truss or including two overhead rail robots (one between the loading component and the unloading component, and the other in the loading area), etc. For example, the transfer operation in the unloading area can also be completed by the overhead rail robot, such as the overhead rail robot carrying the connection tooling to the position of the slicer that needs to unload, taking the sliced ​​silicon rod (including the silicon wafer of the crystal tray) from the slicer and placing it directly on the unloading component or placing it on the unloading component via the transfer table.

[0203] In addition, as the scale of unitized production continues to expand, there may be a form in which the production line body includes multiple main bodies. In this way, the trusses arranged along the width direction of the production line body can be extended so that multiple production line bodies share a material unloading transfer mechanism.

[0204] Based on this, taking the transfer operation of the overhead rail robot as an example, the working mode of the production line is roughly as follows: the group control system can match the appropriate single machine for the silicon rods that need to be processed according to the number of silicon rods to be processed, the equipment status of the single machine, the status of the manipulator, etc. Based on this, the manipulator will transport the silicon rods to be processed from the loading area corresponding to the loading assembly according to the control instructions of the group control system, and the silicon rods to be sliced ​​on the transfer table corresponding to the loading area will be transported to the preset target position that can be connected with the single slicer machine by walking along the length and width directions of the overhead rail. When the silicon rods are delivered to the target position, the group control system reconfirms the status information of the single slicer machine corresponding to the current delivery operation according to the equipment management information, such as the status information including but not limited to running, debugging, maintenance, fault handling, and standby. When the overhead rail robot fails, the loading of the current single slicer machine can be achieved by replacing the overhead rail robot with manual loading on the front wall of the cutting room as described below. After the slicer completes the slicing operation on the silicon rod, the overhead robot moves the cut silicon wafer including the wafer tray to the transfer table corresponding to the unloading area through a walking path similar to the aforementioned loading operation path.

[0205] It can be seen that in the entire slicing unitized production line of the present invention, the functional areas mainly include a loading area corresponding to the loading assembly, a slicing area corresponding to multiple single slicers, and a unloading area corresponding to the unloading assembly. Based on this, with the help of the overhead rail robot walking on the overhead rail and through the cooperation between the manipulator and the opening and closing assembly in the loading / unloading area, the movement of silicon rods between different single slicers can be realized. In addition, by extending the frame (such as a truss) of the opening and closing assembly, it is expected that the transfer operation of multiple production line bodies corresponding to the unloading area can be realized through one opening and closing assembly.

[0206] In a possible implementation, the production line body is equipped with a connection tool 4, which can be configured on a manipulator, and silicon rods or silicon wafers including a crystal tray can be carried on the connection tool. The connection tool is mainly used to cooperate with the manipulator to move the silicon rods including the crystal tray into the cutting area of ​​a single machine to achieve slicing and loading operations for the single machine, or to move the silicon wafers including the crystal tray out of the cutting area of ​​the single machine to achieve slicing and unloading operations for the single machine.

[0207] In a possible embodiment, the connection tool 4 includes a tool base 40 as a mounting carrier and a first movable part 41 and a second movable part arranged on the tool base, such as a manipulator that can carry the connection tool on it by cooperating with the tool base. Exemplarily, the tool base is roughly a plate-like structure. Among them, the first movable part can move along the aforementioned moving in / out direction from the cutting area of ​​the single machine to drive the silicon rod containing the crystal tray to move along the direction, and the second movable part can form a clamping space that holds the silicon rod containing the crystal tray tightly. In this way, on the basis of the silicon rod containing the crystal tray being held tightly by the second movable part, the loading and unloading operations of the silicon rod containing the crystal tray for the single machine can be realized with the help of the first movable part.

[0208] In a possible embodiment, the first movable part 41 generally includes a strip structure arranged along the aforementioned direction of moving in / out from the cutting area of ​​the single machine, and a docking structure capable of cooperating with the crystal tray is arranged or formed on the strip structure along its length direction, so as to achieve the fixed connection between the first movable part and the operating end of the crystal tray by means of the docking structure. Exemplarily, the docking structure is an extension end 411 extending downward from the strip structure, and the extension end can cooperate with the handle at the tail end of the crystal tray as an operating end to achieve the fixed connection between the first movable part and the crystal tray. In this way, under the drive of the servo motor, the strip structure can slide freely in the groove on the upper surface of the crystal tray, and the robot drives the connection tooling to move downward / upward, so that the extension end can cooperate with the handle at the tail end of the crystal tray to clamp the crystal tray or release the cooperation so that the strip structure releases the crystal tray. As in the present invention, two extension ends are respectively arranged at the positions of the two ends of the strip structure.

[0209] For example, if the first movable part includes a first servo motor 412, the first servo motor drives the strip structure to move in / out of the cutting area of ​​the single machine through the first screw nut mechanism 413. For example, in order to ensure that the movement of the first movable part is more stable, a first linear guide (not shown) can be arranged on the second movable part along the direction of the first movable part. For example, in this example, a first linear guide is arranged on both sides of the strip structure. Accordingly, a slide groove or slide hole capable of cooperating with the linear guide is arranged at the end of the strip structure.

[0210] In a possible embodiment, the second movable part includes a first part 421 and a second part 422 that are arranged relatively to each other, and the workpiece is clamped or loosened by moving the first part and / or the second part in a direction of approaching / moving away from each other. For example, if the second movable part is configured with a second servo motor 423, the second servo motor is connected to a second screw nut mechanism 424, and the screw of the second screw nut mechanism includes two sections of thread segments with opposite rotation directions, and nuts adapted to the two sections of thread segments with opposite rotation directions are respectively fixed to the first part and the second part. In this way, the two parts can be brought closer / away from each other, thereby achieving the clamping or loosening of the crystal support. For example, in order to ensure that the approaching / moving away movement between the two clamping parts is more stable, a second linear guide 425 adapted to the second screw nut mechanism can be configured between the first part and the second part.

[0211] In a possible implementation, in order to ensure that the two clamping parts can clamp the silicon rod containing the crystal support more reliably, the first / second part is formed with a clamping structure on the side close to each other, such as the first / second part has a vertically arranged clamping plate 426 on the part close to each other, and a plurality of protrusions 427 with a buffering function are arranged on the clamping plate, so that the reliability of clamping can be ensured by multi-point clamping. Of course, the protrusion 427 can also be directly fixed on the first part and the second part. As in this example, the first / second part can respectively cooperate with a pair of side parts of the crystal support so as to hold the silicon rod containing the crystal support tightly in the clamping space formed by the first part and the second part. Exemplarily, the clamping plate includes a transverse part and a vertical part, the clamping plate is arranged on the inner side of the vertical part, and reinforcing structures such as reinforcing ribs and reinforcing plates are arranged between the transverse part and the vertical part.

[0212] Main reference Figures 5 to 9 , such as based on the above structure, when the robot delivers the silicon rod (along the length direction and width direction) to the position ( Figure 5 ) After that, the slicing and loading process for the cutting room of a single machine mainly includes the following steps:

[0213] S11, the overhead rail robot drives the connecting tooling to move downward, so that the tail end of the strip structure ( Figure 5The extended end of the strip structure (the right end in FIG) moves downward to hook the handle at the rear end of the crystal tray, thereby achieving fixed connection between the rear end of the strip structure and the silicon rod including the crystal tray.

[0214] S12, the first servo motor 412 drives the strip structure to move (extend) toward the cutting chamber, thereby pushing the entire material (including the silicon rods of the wafer tray) out of the interior of the connecting tooling, and allowing the wafer tray to enter the slicer loading guide rail.

[0215] S13, the overhead rail robot drives the connecting tooling to move upward, so that the protruding end of the tail end of the strip structure moves upward and away from the handle at the tail end of the crystal tray; the first servo motor 412 drives the strip structure to move in the direction toward the connecting tooling (retract), and the overhead rail robot drives the connecting tooling to move downward, so that the protruding end of the front end of the strip structure moves downward so that the protruding end of the front end of the strip structure hooks the handle at the tail end of the crystal tray, thereby realizing the fixed connection between the front end of the strip structure and the silicon rod including the crystal tray.

[0216] S14, the first servo motor 412 drives the strip structure to move (extend) toward the cutting chamber so that the strip structure moves again toward the cutting chamber (extends again), thereby pushing the entire material into the cutting chamber of the single machine.

[0217] S15, the overhead rail robot drives the connection tooling to move upward, so that the protruding end of the front end of the strip structure moves upward and leaves the handle at the rear end of the crystal tray; then the first servo motor 412 drives the strip structure to move toward the connection tooling (retract) to the inside of the connection tooling.

[0218] Similarly, still based on the above structure, after the robot transports the silicon rod (along the length direction and width direction) to the position ( Fig.10 ) After that, the slicing and unloading process of the cutting room of a single machine mainly refers to Figures 10 to 14 , as in Fig.14 In the state shown, the strip structure moves away from the cutting chamber (gradually entering the interior of the connection tool), thereby pulling the entire material (including the silicon rods on the wafer support) into the space below the connection tool.

[0219] It can be seen that by setting the two protruding ends at the front and rear ends of the strip structure, combined with its cooperation with the crystal support and the corresponding movement mode, the loading and unloading operations of the cutting chamber of a single machine are reliably realized.

[0220] In one possible embodiment, a rear end loading and unloading port can be set on the rear wall of the cutting chamber (close to the feeding position of the unitized production line), and a rear end automatic loading and unloading door can be configured at a position corresponding to the rear end loading and unloading port, and an automatic loading and unloading auxiliary guide rail is set between the crystal support and the rear end automatic loading and unloading door, and the orientation and structure of the automatic loading and unloading auxiliary guide rail and the crystal support can be adapted (such as the height is roughly the same).

[0221] In a possible implementation, a front manual loading and unloading door may be provided on the front wall of the cutting chamber, and a manual loading and unloading auxiliary rail may be provided between the front manual loading and unloading door and the crystal tray, and the orientation and structure of the manual loading and unloading auxiliary rail and the crystal tray may be adapted (such as being roughly flush in height). In this way, with the aid of a loading trolley or other transport equipment, the silicon rods including the crystal tray may be loaded by the forearm through the front manual loading and unloading door and the manual loading and unloading auxiliary rail, or the silicon wafers including the crystal tray may be unloaded after the slicing operation is completed. For example, when the slicer is the smallest unit sold separately, the front manual loading and unloading door may be used to load and unload the slicer that is separated from the slicing unitized production line. Also, in the event of a loading failure in the slicing unitized production line, the front loading and unloading port may be used to load and unload the corresponding single slicer.

[0222] It can be seen that, on the one hand, the aforementioned transfer mechanism, loading / unloading components, and connecting fixtures can be connected in series with multiple slicer machines in the process to realize the unitization and automation of the slicing operation. On the other hand, the traditional manual loading and unloading operation in the scene of the unitization and automation operation can also be realized by manual loading and unloading. In this way, the slicer unit as the basic slicing operation unit in the slicing unitized production line of the present invention is expected to be sold as an element of the product constituting the production line, and can also be sold directly or through acceptable adjustments (such as under the premise of permission, the structural form and configuration orientation of the liquid circuit system, the electric control cabinet, the liquid supply cylinder, etc. are adjusted to an acceptable degree, such as based on the adjustment to a certain extent to remove the constraints set for adapting to the unitized production line scene, and more friendly to adapt to and corresponding to the single machine application scene) in the form of an independent single machine. Therefore, the slicer unit as the basic slicing operation unit in the slicing unitized production line of the present invention can be more friendly to adapt to different application scenes according to actual needs, and has good commercial prospects.

[0223] Embodiment 1:

[0224] Main reference Fig.15In a possible embodiment, the slicer 5 includes a liquid circuit part and an electric control part, in addition to the aforementioned slicer body 51 (including a frame, etc.), a cutting chamber 52, and a cutting mechanism 53 with a cutting line wound thereon to form a cutting line network. The liquid circuit part includes a liquid circuit system 54, a liquid supply cylinder 55, and a cutting liquid adding trolley (not shown). The electric control part mainly includes an electric control cabinet 57. The main functions of the cutting liquid continuously provided by the liquid circuit system include cooling, lubrication, and taking away silicon powder generated at the cutting seam during the slicing operation. In this embodiment, the liquid circuit system includes a separate internal circulation liquid circuit unit 541 and an external circulation liquid circuit unit 542. The electric control cabinet 57 is divided into two according to low pressure and high pressure (such as respectively recorded as a low-voltage electric control cabinet 571 and a high-voltage electric control cabinet 572). The liquid supply cylinder capable of providing and recovering the cutting liquid is arranged at the bottom space of the liquid circuit system.

[0225] In order to adapt to the necessary coordination of the slicer, connecting tooling and transfer mechanism required in the aforementioned slicing unit production line, in this embodiment, the liquid circuit system is roughly arranged on the rear side of the cutting chamber, and the inner circulation liquid circuit unit and the outer circulation liquid circuit unit are respectively placed at the rear of the cutting chamber and on both sides. The low-voltage electric control cabinet and the high-voltage electric control cabinet are respectively arranged above the inner circulation liquid circuit unit and the outer circulation liquid circuit unit. In this way, the space between the two electric control cabinets can construct the necessary avoidance space for the loading operation from the rear end (close to the rear loading and unloading port of the slicer) to the front end (close to the overhead rail), thereby forming an avoidance space that can ensure the automatic loading and unloading operation of the slicer.

[0226] The base of the inner circulation liquid circuit unit rises to reserve space for the liquid supply cylinder, so the liquid supply cylinder can be set below the inner circulation liquid circuit unit. Since the weight of the high-voltage electric control cabinet is heavier than that of the low-voltage electric control cabinet, the base of the outer circulation liquid circuit unit is directly placed on the ground. The cutting fluid filling trolley can be set on the side close to the outer circulation liquid circuit unit.

[0227] It is understandable that, under the premise of ensuring that the slicer can be adapted to the slicing unitized production line, those skilled in the art can flexibly adjust the elements of the slicer and the relative positions between the elements according to the actual situation. For example, the slicer can also be (including but not limited to) constructed in the following ways:

[0228] Embodiment 2:

[0229] Main reference Fig.16 , which is different from the first embodiment, in this embodiment, the liquid system and the electric control cabinet are placed at the rear of the cutting chamber and on both sides, and the liquid supply cylinder is placed between the liquid system and the electric control cabinet. In this way, the space between the liquid system and the electric control cabinet forms an avoidance space that can ensure the automatic loading and unloading operation of the slicer.

[0230] Embodiment three:

[0231] Main reference Fig.17 , which is different from the second embodiment, in this embodiment, the liquid circuit system and the electric control cabinet are arranged on one side behind the cutting chamber of the single slicer in a longitudinal stacking manner, wherein the liquid circuit system is located below the electric control cabinet. The liquid supply cylinder is placed beside the liquid circuit system and the electric control cabinet, and has no spatial overlap with the cutting chamber or has a certain overlap when viewed from the direction of automatic loading and unloading. In this way, since the height of the liquid supply cylinder is relatively low, the configuration of the liquid circuit system and the electric control cabinet will not interfere with the formation of the avoidance space that can ensure the automatic loading and unloading operation of the single slicer.

[0232] Embodiment 4:

[0233] Main reference Fig.18 , which is different from the third embodiment, in this embodiment, the liquid circuit system is arranged on one side behind the cutting chamber of the single slicer, and the liquid supply cylinder is placed beside the liquid circuit system, and there is a certain overlap with the cutting chamber in space when viewed from the direction of automatic loading and unloading. Among them, the electric control cabinet is arranged below a position far behind the cutting chamber (such as, but not limited to: a position far behind the liquid circuit system and the liquid supply cylinder; a position between two adjacent single slicers). In this way, the overall height of the relevant structures is relatively low, so there is sufficient avoidance space above the liquid circuit system, the electric control cabinet, and the liquid supply cylinder to ensure the automatic loading and unloading operation of the single slicer.

[0234] In the slicing unitized production line of the present invention, necessary adjustments are made to the single slicer relative to the traditional slicer so that it can be better adapted to the production line. Based on this, through the configuration of transfer mechanisms such as the overhead rail robot, the connection between the silicon rod containing the crystal support before slicing and the silicon wafer containing the crystal support after slicing can be realized between the loading assembly and the unloading assembly. Through the configuration of the connection tooling, the silicon rod before slicing and the single crystal silicon rod containing the crystal support after slicing can be flexibly and smoothly connected between the overhead rail robot and any single machine. On this basis, by analyzing the operation of the single machine, the operation between the single machine and the overhead rail robot, and the operation between the loading assembly and the unloading assembly, the corresponding control logic is given (such as through a group control system including field control and remote central control), and the unitized production of the slicing operation can be realized. On the basis of the unitization of the slicing operation, it is expected to better meet the market development needs of slicing products such as silicon wafers, such as better catering to the development trend of the photovoltaic industry.

[0235] So far, the technical solutions of the present invention have been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it is easy for those skilled in the art to understand that the protection scope of the present invention is obviously not limited to these specific embodiments. Without departing from the principle of the present invention, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will fall within the protection scope of the present invention.

Claims

1. A slicer, characterized in that: The slicer comprises: The microtome body, which forms a cutting chamber: A fluid path; and Electronic control department; Wherein, the liquid circuit part and the electric control part are arranged outside the cutting chamber, and The configuration of the liquid circuit unit and the electric control unit enables the slicer to construct an escape space so as to: The workpiece can be loaded and / or unloaded through the avoidance space.

2. The slicer according to claim 1, characterized in that: The electric control unit includes a first electric control cabinet and a second electric control cabinet, and the first electric control cabinet and the second electric control cabinet are centrally arranged or separately arranged.

3. The slicer according to claim 2, characterized in that: The liquid circuit section includes a liquid circuit system, and the liquid circuit system includes a first liquid circuit unit and a second liquid circuit unit. The first liquid circuit unit and the second liquid circuit unit are centrally arranged or separately arranged.

4. The slicer according to claim 3, characterized in that: The liquid path portion includes a liquid supply cylinder, and the liquid supply cylinder is arranged at a position adjacent to the first liquid path unit or the second liquid path unit.

5. The slicer according to claim 4, characterized in that: The first liquid circuit unit and the second liquid circuit unit are disposed on both sides of the cutting chamber, and the first electric control cabinet and the second electric control cabinet are disposed above the first liquid circuit unit and the second liquid circuit unit, respectively, so that: The avoidance space is formed between the first electric control cabinet and the second electric control cabinet.

6. The slicer according to claim 5, characterized in that: A reserved space is formed below the first liquid path unit, and the liquid supply cylinder is arranged in the reserved space.

7. The slicer according to claim 4, characterized in that: The first liquid circuit unit and the second liquid circuit unit are collectively arranged to form a first assembly, and the first electric control cabinet and the second electric control cabinet are collectively arranged to form a second assembly. The first component and the second component are disposed on two sides of the cutting chamber and thus form the avoidance space therebetween.

8. The slicer according to claim 7, characterized in that: The liquid supply cylinder is arranged between the second component and the second component.

9. The slicer according to claim 4, characterized in that: The first liquid circuit unit and the second liquid circuit unit are collectively arranged to form a first assembly, and the first electric control cabinet and the second electric control cabinet are collectively arranged to form a second assembly. The first component and the second component are arranged on one side of the cutting chamber along the loading and unloading direction of the workpiece in a longitudinally stacked manner, and thus an open avoidance space is formed between the cutting chamber and the one side.

10. The slicer according to claim 9, characterized in that: The liquid supply cylinder is arranged beside the structure formed by the longitudinal stacking of the first component and the second component, and Projected toward the cutting chamber along the direction of loading and unloading the workpiece, the cutting chamber and the liquid supply cylinder at least partially overlap.

11. The slicer according to claim 4, characterized in that: The first liquid circuit unit and the second liquid circuit unit are collectively arranged to form a first assembly, and the first electric control cabinet and the second electric control cabinet are collectively arranged to form a second assembly. The first component is arranged on one side of the cutting chamber along the loading and unloading direction of the workpiece, and the second component and / or the liquid supply cylinder are movably configured in the cutting chamber, thereby forming an open avoidance space above the first component.

12. A slicing unit production line, characterized in that: The production line comprises: The main body of the production line; At least one slicer according to any one of claims 1 to 11, which is arranged in the production line body; and The transfer mechanism can carry the workpiece and at least deliver the workpiece to / from the slicer through the avoidance space.

13. The slicing unitized production line according to claim 12, characterized in that: The main body of the production line is equipped with a loading component and a unloading component. The transfer mechanism is capable of moving between a loading area corresponding to the loading assembly and a unloading area corresponding to the unloading assembly; and / or The transfer mechanism can move in the loading area and / or the unloading area.

14. The slicing unitized production line according to claim 13, characterized in that: The transfer mechanism can move at a certain position between the loading area and the unloading area in a manner of approaching or moving away from the slicer.

15. The slicing unitized production line according to claim 12, characterized in that: The transfer mechanism can move in a vertical direction to approach or move away from the slicer.

16. The slicing unitized production line according to claim 12, characterized in that: The production line body is provided with a connection tool, and the connection tool can be arranged on the transfer mechanism, and the workpiece can be carried on the connection tool.

17. The slicing unitized production line according to claim 16, characterized in that: The connection tooling comprises: a first movable portion, which is movable in a direction approaching / away from a cutting chamber of the microtome, and The first movable part is provided with at least one docking structure capable of fixing the first movable part to a workpiece.

18. The slicing unitized production line according to claim 17, characterized in that: The workpiece is mounted on the wafer support, and the docking structure can cooperate with the wafer support to thereby achieve fixed connection between the workpiece and the first movable part.

19. The slicing unitized production line according to claim 18, characterized in that: The crystal support includes an operating end, and the docking structure can be fixedly connected to the crystal support by extending into the operating end.

20. The slicing unit production line according to claim 19, characterized in that: The first movable part is a strip-shaped structure, and a plurality of the docking structures are arranged on the strip-shaped structure along its length direction.

21. The slicing unitized production line according to claim 20, characterized in that: The strip structure has a first end and a second end, The strip structure is provided with the butt joint structure at the first end or a position close to the first end, and the strip structure is provided with the butt joint structure at the second end or a position close to the second end.

22. The slicing unitized production line according to claim 17, characterized in that: The connection tooling comprises: A first driving component is configured to drive the first movable portion to move toward or away from the cutting chamber.

23. The slicing unitized production line according to claim 22, characterized in that: The connection tooling comprises: The first driving component can drive the first movable part to move in a manner of approaching or moving away from the cutting chamber through the first screw nut mechanism.

24. The slicing unitized production line according to claim 17, characterized in that: The connection tooling comprises: The carrying part can carry the workpiece in order to: When a workpiece is mounted on the mounting portion, the mounting portion and the workpiece move along with the movement of the first movable portion.

25. The slicing unitized production line according to claim 24, characterized in that: The carrying part includes a second movable part, The second movable part includes a first part and a second part, and the first part and the second part can generate a relative movement in a direction of approaching or moving away from each other so as to hold the workpiece.

26. The slicing unitized production line according to claim 25, characterized in that: The connection tooling comprises: A second driving component, wherein the second driving component can drive the first part and / or the second part to move.

27. The slicing unitized production line according to claim 26, characterized in that: The connection tooling comprises: A second screw-nut mechanism, wherein the screw of the second screw-nut mechanism has two threaded sections with opposite rotation directions, and the second driving component can drive the first part and the second part to move toward / away from each other through the second screw-nut mechanism.

28. The slicing unitized production line according to claim 17, characterized in that: The connection tool comprises a tool base, and the first movable part is arranged on the tool base.

29. The slicing unitized production line according to claim 17, characterized in that: The transfer mechanism includes at least one overhead rail robot, which is capable of at least carrying a workpiece and delivering the workpiece to and / or removing the workpiece from the slicer through the avoidance space.

30. The slicing unitized production line according to claim 29, characterized in that: The transfer agencies include: A loading transfer mechanism capable of at least transferring the workpiece in the loading area toward or away from the slicer; and / or The material unloading transfer mechanism can at least transfer the workpiece in the material unloading area toward / away from the slicer.

31. The slicing unitized production line according to claim 30, characterized in that: The main body of the production line is provided with a transfer table, and the overhead robot can deliver workpieces to / from the transfer table; and / or The loading transfer mechanism and / or the unloading transfer mechanism can deliver the workpiece to / from the transfer table.

32. The slicing unitized production line according to claim 31, characterized in that: The transfer table can be arranged in the loading area and / or the unloading area.

33. The slicing unitized production line according to claim 31, characterized in that: The transfer table is movably arranged on the production line body.

34. The slicing unitized production line according to claim 30, characterized in that: The loading transfer mechanism and / or the unloading transfer mechanism include: An opening and closing assembly is capable of clamping and transporting a workpiece.

35. The slicing unitized production line according to claim 34, characterized in that: The production line body includes one or more, The loading transfer mechanism and / or the unloading transfer mechanism comprises a frame, and the opening and closing assembly can move along the frame. Wherein, in the case where the production line main body includes multiple ones, the opening and closing assembly can be switched between different production line main bodies by moving along the frame.

36. A control method for a slicing unit production line, characterized in that: The slicing unitized production line includes a transfer mechanism, a connection tool and at least one slicer, and the control method includes: enabling the transfer mechanism to deliver the workpiece to a target position compatible with the slicer or to remove the workpiece from the target position; The engaging tool delivers the workpiece to the cutting area of ​​the slicer or removes the workpiece from the cutting area.

37. The control method according to claim 36, characterized in that: The slicer can construct an avoidance space. In the step of "making the transfer mechanism deliver the workpiece to a target position compatible with the slicer or removing the workpiece from the target position", the workpiece at the target position can be loaded and / or unloaded from the cutting area of ​​the slicer through the avoidance space.

38. The control method according to claim 37, characterized in that: The slicer comprises a liquid circuit part and an electric control part, and the configuration of the liquid circuit part and the electric control part enables the slicer to construct an avoidance space.

39. The control method according to claim 38, characterized in that: The electric control part includes a first electric control cabinet and a second electric control cabinet, the first electric control cabinet and the second electric control cabinet are centrally arranged or separately arranged, the liquid circuit part includes a liquid circuit system, the liquid circuit system includes a first liquid circuit unit and a second liquid circuit unit, the first liquid circuit unit and the second liquid circuit unit are centrally arranged or separately arranged, The construction method of the avoidance space includes: The first liquid circuit unit and the second liquid circuit unit are disposed on both sides of the cutting chamber, and the first electric control cabinet and the second electric control cabinet are disposed above the first liquid circuit unit and the second liquid circuit unit, respectively, so that: the avoidance space is formed between the first electric control cabinet and the second electric control cabinet; or The first liquid circuit unit and the second liquid circuit unit are collectively arranged to form a first assembly, the first electric control cabinet and the second electric control cabinet are collectively arranged to form a second assembly, and the first assembly and the second assembly are respectively placed on both sides of the cutting chamber to form the avoidance space therebetween; or The first liquid circuit unit and the second liquid circuit unit are collectively arranged to form a first assembly, the first electric control cabinet and the second electric control cabinet are collectively arranged to form a second assembly, and the first assembly and the second assembly are arranged on one side of the cutting chamber along the loading and unloading direction of the workpiece in a longitudinally stacked manner, thereby forming an open avoidance space between the cutting chamber and the one side; or The first liquid circuit unit and the second liquid circuit unit are collectively arranged to form a first component, the first electric control cabinet and the second electric control cabinet are collectively arranged to form a second component, the first component is arranged on one side of the cutting chamber along the loading and unloading direction of the workpiece, and the second component is movably configured in the cutting chamber, thereby forming an open avoidance space above the first component.

40. The control method according to claim 36, characterized in that: The docking tool comprises a first movable part, on which at least one docking structure is provided. The “enabling the engaging tool to deliver the workpiece to the cutting area of ​​the slicer or remove the workpiece from the cutting area” includes: The docking structure is fixedly connected to the workpiece, and the first movable part is moved in a direction approaching / moving away from a cutting chamber of the slicer, so as to deliver the workpiece to the cutting area of ​​the slicer or remove the workpiece from the cutting area.

41. The control method according to claim 40, characterized in that: The workpiece is mounted on a wafer holder. In the step of "fixing the docking structure to the workpiece and moving the first movable part in a direction close to / away from a cutting chamber of the slicer, thereby delivering the workpiece to a cutting area of ​​the slicer or removing the workpiece from the cutting area", the step of "fixing the docking structure to the workpiece" includes: The butt joint structure is matched with the wafer support, thereby fixing the butt joint structure with the workpiece.

42. The control method according to claim 41, characterized in that: The crystal holder includes an operating end, and the “making the docking structure match the crystal holder and thereby making the docking structure fixedly connected to the workpiece” includes: The transfer mechanism drives the docking structure to move downward and extend into the operating end, thereby cooperating with the crystal support and thus making the docking structure fixedly connected to the workpiece.

43. The control method according to claim 41, characterized in that: The first movable part is a strip structure, and a plurality of the docking structures are arranged on the strip structure along its length direction. The “making the butt joint structure match the crystal support so that the butt joint structure is fixedly connected to the workpiece” includes: The first movable part is moved in a direction approaching or moving away from a cutting chamber of the slicer, so that one of the plurality of docking structures is matched with the wafer holder.

44. The control method according to claim 40, characterized in that: The engagement tooling comprises a first driving component, In the step of "fixing the docking structure to the workpiece and moving the first movable part in a direction approaching / moving away from the cutting chamber of the slicer, thereby delivering the workpiece to the cutting area of ​​the slicer or removing the workpiece from the cutting area", the step of "moving the first movable part in a direction approaching / moving away from the cutting chamber of the slicer" includes: The first driving component drives the first movable part to move in a manner of approaching or moving away from the cutting chamber of the slicer.

45. The control method according to claim 40, characterized in that: The docking fixture includes a carrying part. In the step of "fixing the docking structure to the workpiece and moving the first movable part in a direction close to / away from the cutting chamber of the slicer, thereby delivering the workpiece to the cutting area of ​​the slicer or removing the workpiece from the cutting area", the step of "moving the first movable part in a direction close to / away from the cutting chamber of the slicer" includes: When a workpiece is mounted on the mounting portion, the mounting portion and the workpiece move along with the movement of the first movable portion.

46. ​​The control method according to claim 45, characterized in that: The carrying portion includes a second movable portion, and the second movable portion includes a first portion and a second portion, In the step of "when the workpiece is mounted on the mounting portion, the mounting portion and the workpiece move with the movement of the first movable portion", the step of "mounting the workpiece on the mounting portion" includes: The first part and the second part are caused to move relative to each other in a direction of approaching or moving away from each other so as to clamp or release the workpiece.

47. The control method according to claim 46, characterized in that: The engagement tooling comprises a second driving component, The “causing the first part and the second part to generate relative movement in a direction of approaching or moving away from each other so as to tighten or loosen the workpiece” includes: The second driving component drives the first part and / or the second part to move, so that the first part and the second part generate a relative movement in a direction of approaching / moving away from each other, thereby clamping / relaxing the workpiece.

48. The control method according to claim 47, characterized in that: The connection tooling comprises a second screw-nut mechanism, wherein the screw of the second screw-nut mechanism has two threaded sections with opposite rotation directions, The “causing the second driving component to drive the first part and / or the second part to move” includes: The second driving component drives the second screw-nut mechanism, thereby causing the first portion and the second portion matching the two threaded sections with opposite rotation directions to move in a manner of approaching or moving away from each other.

49. The control method according to claim 36, characterized in that: The transfer mechanism includes a sky rail robot, The “enabling the transfer mechanism to deliver the workpiece to a target position compatible with the slicer or to remove the workpiece from the target position” includes: The overhead rail robot delivers the workpiece to a target position compatible with the slicer or removes the workpiece from the target position.

50. The control method according to claim 49, characterized in that: The production line includes a loading component and a unloading component. The “enabling the overhead rail robot to deliver the workpiece to a target position compatible with the slicer or to remove the workpiece from the target position” includes: The transfer mechanism drives the workpiece to move between a loading area corresponding to the loading component and a unloading area corresponding to the unloading component and delivers the workpiece to a target position matched with the slicer or removes the workpiece from the target position.

51. The control method according to claim 50, characterized in that: The production line includes a loading assembly and a unloading assembly, and the transfer mechanism includes a loading transfer mechanism and / or an unloading transfer mechanism. The “enabling the transfer mechanism to deliver the workpiece to a target position compatible with the slicer or to remove the workpiece from the target position” includes: The loading transfer mechanism at least transfers the workpieces in the loading area; and / or The material unloading transfer mechanism at least transfers the workpieces in the material unloading area.

52. The control method according to claim 51, characterized in that: The main body of the production line is equipped with a transfer table. The “enabling the transfer mechanism to deliver the workpiece to a target position compatible with the slicer or to remove the workpiece from the target position” includes: The overhead rail robot delivers the workpiece to / from the transfer table and delivers the workpiece to a target position compatible with the slicer or removes the workpiece from the target position; The loading transfer mechanism and / or the unloading transfer mechanism deliver the workpiece to / from the transfer table and transfer the workpiece in the loading area and / or the unloading area.

53. The control method according to claim 52, characterized in that: The transfer table is movably arranged on the main body of the production line. The “enabling the transfer mechanism to deliver the workpiece to a target position compatible with the slicer or to remove the workpiece from the target position” includes: Enable the overhead rail robot and / or the transfer table to deliver the workpiece to / from the transfer table and deliver the workpiece to a target position compatible with the slicer or remove the workpiece from the target position; The loading transfer mechanism and / or the unloading transfer mechanism and / or the transfer table deliver the workpiece to / from the transfer table and transfer the workpiece in the loading area and / or the unloading area.

54. The control method according to claim 51, characterized in that: The production line body includes one or more, The loading transfer mechanism and / or the unloading transfer mechanism comprises a frame and an opening and closing component. Wherein, in the case where the production line body includes multiple ones, the control method includes: The opening and closing assembly is moved along the frame, so that the opening and closing assembly is switched between different production line bodies.

55. A computer-readable storage medium, the storage medium comprising a memory, the memory being adapted to store a plurality of program codes, characterized in that: The program code is suitable for being loaded and run by a processor to execute the control method of the slicing unitization production line according to any one of claims 36 to 54.

56. A computer device, comprising a memory and a processor, wherein the memory is suitable for storing a plurality of program codes, wherein: The program code is suitable for being loaded and run by the processor to execute the control method of the slicing unitization production line according to any one of claims 36 to 54.

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