Transport vehicle

Abstract

A transport vehicle for transporting a container in a suspended state is provided with a lateral sway suppression device for suppressing lateral sway of the container by coming into contact with the outer surface of the container held in a suspended state. The lateral swing suppression device is provided with an abutting roller which abuts against the outer side surface of the container and can rotate freely. A groove continuously extending over the entire circumference is formed in a region of the outer peripheral surface of the contact roller corresponding to the convex portion of the container.

Description

Technical Field

[0001] The invention relates to a transport vehicle. Background Art

[0002] For example, in semiconductor manufacturing plants, etc., a transport vehicle for transporting containers containing wafers or intermediate masks is used. An example of such a transport vehicle is disclosed in Japanese Patent Publication No. 2017-88332 (Patent Document 1). The transport vehicle (ceiling transport vehicle 1) of Patent Document 1 is configured to travel along a track provided on the ceiling, and transports the container (FOUP 50) in a suspended state. In addition, the transport vehicle of Patent Document 1 is provided with a lateral sway suppression device (sway suppression device 30) for suppressing lateral swaying of the suspended container during transportation.

[0003] As described in Patent Document 1 Figures 4 to 10 As shown in the figure, the lateral sway suppression device of the patent document 1 includes an arm mechanism (a first arm 32, a second arm 34) and a contact mechanism (a force applying member 36, a pressing mechanism 37, a rotating part 40, and limiting parts 42a, 42b) provided on the arm mechanism. Moreover, the lateral sway suppression device is configured such that the contact mechanism is switched between a state of contact with the lower side surface of the container and a state of separation as the posture of the arm mechanism changes. In addition, the contact mechanism is configured such that the rotating part 40 rotates as the container sways in the width direction, and when the rotating part 40 is about to rotate more than a predetermined angle, the limiting parts 42a, 42b limit it.

[0004] Thus, in the lateral sway suppression device of Patent Document 1, the sway of the container is suppressed by the rotating part 40 abutting against the side of the container, but as described in paragraph 0036 of Patent Document 1, the rotating part 40 is made of a material such as urethane. Therefore, depending on the shape of the side of the container, there is a possibility that the rotating part 40 is worn and causes dust and the like. However, in Patent Document 1, such wear of the rotating part 40 is not particularly considered. Summary of the invention

[0005] Therefore, it is desired to realize a transport vehicle that can suppress lateral swaying of a suspended container and can minimize wear caused by contact between a mechanism for suppressing the lateral swaying and the container.

[0006] The transport vehicle involved in the present disclosure is a transport vehicle that transports containers in a suspended state. A lateral sway suppressing device is provided for suppressing lateral sway of the container by contacting with the outer side surface of the container held in suspension, The lateral sway suppression device includes a rotatable contact roller that contacts the outer side of the container. In the area corresponding to the convex portion on the outer peripheral surface of the aforementioned abutment roller, a groove is formed that extends continuously throughout the entire circumference. The convex portion is a portion that is distinguished from the aforementioned container outer surface of the aforementioned container and is a portion that protrudes outward compared to at least other adjacent portions on either the upper or lower side.

[0007] According to this structure, by rotatably setting an abutment roller that abuts against the outer side of the container, the lateral swaying of the suspended and held container during transportation can be suppressed. At this time, if there is a convex portion on the outer side of the container, there is a concern that the outer peripheral surface of the abutment roller contacts the convex portion and is partially worn, but since a groove that extends continuously throughout the entire circumference is formed in the area corresponding to the convex portion, the abutment roller does not contact the convex portion of the container. Therefore, the amount of dust and the like generated due to the wear of the abutment roller can be suppressed. As a result, the lateral swaying of the suspended and held container can be suppressed, and the wear of the abutment roller caused by the contact with the container can be suppressed, and the amount of dust and the like generated can be suppressed.

[0008] Further features and advantages of the technology according to the present disclosure will become more apparent from the following description of illustrative and non-limiting embodiments described with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a perspective view of the transport vehicle according to the embodiment. Figure 2 This is the front view of the transport vehicle. Figure 3 It is a side view of the transport vehicle. Figure 4 Is the main view of the container. Figure 5 is a side view of the container. Figure 6 is a top view of the holding device. Figure 7 It is a front view of the holding device. Figure 8 It is a side view showing the change in posture of the support portion and the shielding member. Fig. 9 It is a plan view showing the posture changes of the fall restricting device and the lateral swing suppression device. Fig.10 This is a diagram showing the fall restraining device and the lateral swing restraining device as viewed from the side. DETAILED DESCRIPTION

[0010] The embodiment of the transport vehicle will be described with reference to the accompanying drawings. For example, in order to transport a container 7 in a semiconductor manufacturing plant, etc., a transport vehicle 1 of this embodiment is used. Figures 1 to 3As shown, the transport vehicle 1 includes a travel portion 2 that travels along a moving path and a transfer mechanism 3 connected to the travel portion 2. In the present embodiment, the moving path of the transport vehicle 1 is physically formed by a track 92 that is suspended and supported from a ceiling 91. That is, the transport vehicle 1 of the present embodiment is a ceiling transport vehicle that moves along the track 92 formed along the ceiling 91. The transport vehicle 1 transports the container 7 in a suspended state.

[0011] The travel unit 2 travels along a pair of rails 92. The travel unit 2 includes a vehicle body 21, a travel drive unit 22, wheels 23, and guide wheels 24. The vehicle body 21 supports the travel drive unit 22, the wheels 23, and the guide wheels 24. The travel drive unit 22 includes an electric motor such as a servo motor, and drives at least one wheel 23. The wheel 23 rolls on the upper surface of the rail 92. The wheel 23 driven and connected by the travel drive unit 22 functions as a driving wheel. The guide wheel 24 rolls on the inner side of the rail 92. The travel unit 2 travels on the rail 92 along the rail 92 in a state where the guide wheel 24 is contacted and guided by the inner side of the rail 92.

[0012] In the following description, the direction along the extension direction of the rail 92, which is the direction in which the traveling unit 2 travels, is referred to as the front-rear direction X of the transport vehicle 1. In addition, the direction along the parallel direction of the pair of rails 92, which is a direction orthogonal to the front-rear direction X, is referred to as the width direction Y of the transport vehicle 1. In addition, the direction orthogonal to both the front-rear direction X and the width direction Y is referred to as the up-down direction Z. In addition, these directions are directions based on the transport vehicle 1, and when observed from a fixed point in the equipment, the front-rear direction X and the width direction Y may be different depending on the position of the transport vehicle 1 along the moving path.

[0013] The transfer mechanism 3 is disposed below the rail 92 and connected to the travel unit 2. The transfer mechanism 3 includes a holding device 30, a lifting device 40, and a cover 45. The transfer mechanism 3 of this embodiment further includes a drop restriction device 50 and a lateral swing suppression device 60.

[0014] The holding device 30 is a device for holding the container 7. The lifting device 40 is a device for lifting the holding device 30. The lifting device 40 enables the holding device 30 to be moved upward and downward. Figure 2 The cover 45 is raised and lowered between the raised position shown by the imaginary line and the lowered position shown by the solid line. The cover 45 accommodates the lifting device 40 and the holding device 30 in the raised position. Both sides of the inner space of the cover 45 in the front-to-back direction X are shielded, and at least one side (in this example, both sides) in the width direction Y is open.

[0015] The fall-restricting device 50 is a device for restricting the container 7 from falling when the holding device 30 in the raised position holds the container 7. The lateral sway suppressing device 60 is a device for suppressing the lateral sway of the container 7 when the holding device 30 in the raised position holds the container 7. Figure 3 As shown, the fall restricting device 50 and the lateral swing suppressing device 60 are provided near the lower end portion of the cover body 45 .

[0016] For example, the transport vehicle 1 moves to the position of the target processing device 94 while the holding device 30 holds the container 7. Figure 2 As shown, the lifting device 40 lowers the holding device 30 to the lowered position, thereby transporting the container 7 to the target processing device 94. Figure 2 , an example is shown in which the container 7 is supplied to the target processing device 94 by placing the container 7 on a placing table 95 arranged adjacent to the processing device 94. In addition, the transport vehicle 1 can transport the container 7 out of the processing device 94 where the processing has been completed by performing the reverse operation to the above.

[0017] like Figure 4 and Figure 5 As shown, the container 7 as the transport object transported by the transport vehicle 1 of the present embodiment comprises a bottom plate 71, a side wall 72 and an inclined top plate 73. They are formed integrally. The bottom plate 71 is a support plate provided at the lower end of the container 7, and in the present embodiment, is formed in a circular shape. The side wall 72 extends upward from the outer edge of the bottom plate 71, and in the present embodiment, is formed in a cylindrical shape having an opening 75. The inclined top plate 73 is provided at the upper end of the side wall 72, and in the present embodiment, is formed in the same circular shape as the bottom plate 71. In the present embodiment, the inclined top plate 73 is not arranged parallel to the bottom plate 71, in other words, it is inclined relative to the bottom plate 71. The degree of inclination of the inclined top plate 73 relative to the bottom plate 71 can be extremely small, and the inclination angle can be, for example, 1° to 10°.

[0018] In the present embodiment, a circumferential groove 71G is formed on the bottom plate 71. The circumferential groove 71G is formed in a manner that is recessed from the outer side surface 71a of the bottom plate 71 to the inner side. In addition, the circumferential groove 71G of the present embodiment is continuously formed throughout the entire circumference in a state with a certain width and a certain depth. The portion of the bottom plate 71 that is lower than the circumferential groove 71G becomes a portion that protrudes outward in the radial direction compared to the bottom surface (the surface facing the radial direction) of the circumferential groove 71G. In the following description, this portion is distinguished from the outer side surface 71a of the portion of the bottom plate 71 that is higher than the circumferential groove 71G and the outer side surface 72a of the side wall 72 and is referred to as a convex portion 71P. In the present embodiment, the convex portion 71P is continuously formed throughout the entire circumference in accordance with the formation form of the circumferential groove 71G. In addition, the outer side surface of the convex portion 71P is located on the same cylindrical surface as the outer side surface 71a of the bottom plate 71 and the outer side surface 72a of the side wall 72.

[0019] In addition, in the present embodiment, a recess 73E is formed on the outer edge side of the inclined top plate 73, which is more recessed inward than the side wall 72. The recess 73E is formed at two different positions in the circumferential direction of the inclined top plate 73 (specifically, at two completely opposite positions sandwiching the center of the container 7). The recess 73E of the container 7 on the outer edge side of the inclined top plate 73 is supported from below by the support portion 32 of the holding device 30 of the transport vehicle 1. More specifically, the container 7 is supported from below by a pair of support portions 32 of the holding device 30 of the transport vehicle 1 at a pair of recesses 73E formed on the outer edge side of the inclined top plate 73.

[0020] As described above, the container 7 of the present embodiment has an opening 75 on the side wall 72. In the present embodiment, as the opening 75, there are a front opening 75a formed on the front side and a rear opening 75b formed on the back side. The front opening 75a is formed with a wide width, at least wider than the maximum width of the contained object 8. The rear opening 75b is formed with a narrower width than the front opening 75a, and is formed with a narrower width than the maximum width of the contained object 8. In the present embodiment, three rear openings 75b are formed side by side at predetermined intervals.

[0021] The object 8 contained in the container 7 is accessed from the front opening 75a. That is, the front opening 75a formed in the opening 75 of the side wall 72 serves as an opening for accessing the object 8. In addition, as the object 8, for example, a semiconductor wafer or a reticle is exemplified. The container 7 is configured so that a plurality of objects 8 can be accommodated side by side in the upper and lower parts. In addition, the container 7 of this embodiment does not have a cover for closing the opening 75, and an open box, for example, can be used.

[0022] Return to the description of the transport vehicle 1, such as Figures 6 to 8As shown, the holding device 30 constituting the transfer mechanism 3 includes a holding body portion 31 , a support portion 32 , a holding drive portion 33 , and a shielding member 36 .

[0023] The holding body 31 is a part that serves as a base of the holding device 30. The holding body 31 supports the support portion 32 and the shielding member 36 slidably in the front-rear direction X. The holding body 31 also fixedly supports the holding driving portion 33 on its upper surface side.

[0024] The support portion 32 supports the recessed portion 73E of the inclined top plate 73 of the container 7. In the present embodiment, a pair of support portions 32 are provided in such a manner that a pair of recessed portions 73E located at different positions in the circumferential direction of the inclined top plate 73 can be supported simultaneously. The pair of support portions 32 are arranged side by side at a predetermined interval and in the front-rear direction X. Moreover, the pair of support portions 32 are respectively configured to slide freely in the front-rear direction X, and are driven by the holding drive portion 33 to move toward each other in the front-rear direction X, or to move away from each other in the front-rear direction X.

[0025] The holding drive unit 33 moves the pair of support parts 32 along the front-to-back direction X. The holding drive unit 33 is composed of, for example, a holding electric motor and a mechanism (such as a ball screw mechanism) that converts the rotation of the holding electric motor into a propulsion force in the front-to-back direction X. The holding drive unit 33 causes the pair of support parts 32 to move in opposite directions to each other in a manner of approaching movement in the front-to-back direction X or separating movement in the front-to-back direction X. In addition, in the case where the holding drive unit 33 includes a ball screw mechanism, by forming the direction of the spiral of the screw shaft in a manner that is opposite to the direction on one side and the other side of the front-to-back direction X, the above-mentioned approach movement and separation movement can be performed only by a single holding electric motor.

[0026] The holding drive unit 33 can hold the container 7 in a holding posture by moving the pair of support parts 32 closer to each other in the front-rear direction X, thereby supporting the recessed portion 73E of the inclined top plate 73. In addition, the holding drive unit 33 can hold the container 7 in a holding release posture by moving the pair of support parts 32 apart from each other in the front-rear direction X, thereby releasing the container 7 from the recessed portion 73E of the inclined top plate 73. In this way, the holding drive unit 33 can change the posture of the pair of support parts 32 between the holding posture and the holding release posture.

[0027] In the state where the holding device 30 holds the container 7, the shielding member 36 partially covers the front opening 75a of the container 7. In the present embodiment, a pair of shielding members 36 are provided in a manner that partially covers the areas on both sides of the front-rear direction X in the front opening 75a of the container 7. The pair of shielding members 36 are configured in a manner that changes their postures into a closed posture and an open posture. Here, the closed posture is a posture in which the pair of shielding members 36 at least partially oppose the front opening 75a in a state in which the pair of support parts 32 support the recessed portion 73E of the inclined top plate 73. The open posture is a posture in which the pair of shielding members 36 do not oppose the front opening 75a in a state in which the pair of support parts 32 support the recessed portion 73E of the inclined top plate 73.

[0028] In the present embodiment, the shielding member 36 is integrally connected to the support bracket to which the support portion 32 is fixed. One of the pair of shielding members 36 is connected to one of the pair of support portions 32 via the first support bracket, and they can be moved in a linked manner along the front-rear direction X. In addition, the other of the pair of shielding members 36 is connected to the other of the pair of support portions 32 via the second support bracket, and they can be moved in a linked manner along the front-rear direction X. Moreover, the pair of shielding members 36 is configured in the following manner: linked with the posture change of the pair of support portions 32, the pair of support portions 32 are in a holding posture and the door is closed, and the pair of support portions 32 are in a holding release posture and the door is opened. The pair of shielding members 36 prevent the contained object 8 from escaping from the container 7 in the closed posture.

[0029] The lifting device 40 lifts and lowers the holding device 30. Figure 2 As shown, the lifting device 40 includes a lifting body 41, a lifting drive 42, and a wire 43. The lifting body 41 is a part that becomes the base of the lifting device 40. The lifting body 41 fixedly supports the lifting drive 42 on its upper surface side. The lifting drive 42 is composed of, for example, an electric motor for lifting and a winding part that rotates integrally with the electric motor for lifting. One end of the wire 43 is connected to the winding part that constitutes the lifting drive 42, and the other end is connected to the holding device 30. The lifting device 40 winds or unwinds the wire by driving the lifting drive 42, so that the holding device 30 is lifted and lowered between the rising position and the falling position.

[0030] The fall-restricting device 50 restricts the container 7 from falling when the holding device 30 in the raised position holds the container 7. Fig. 9 and Fig.10 As shown, the fall restricting device 50 includes a fall restricting member 51 and an advance / retract drive unit 53 .

[0031] The drop limiting member 51 is a member disposed below the bottom surface of the container 7 (the lower surface of the bottom plate 71) and used to limit the drop of the container 7. When the holding device 30 in the raised position holds the container 7, the drop limiting member 51 is Fig. 9 As shown in the lower section of , a portion thereof is configured so as to overlap with the container 7 when viewed in the up and down direction.

[0032] The fall limiting component 51 of the present embodiment has a driven arm 51A, a parallel arm 51B, a first connecting arm 51C and a second connecting arm 51D. The driven arm 51A is bent at an obtuse angle so as to have a long side portion and a short side portion when viewed in the up-down direction. The driven arm 51A is connected to a driving shaft 53B constituting the advance-retract drive unit 53 at the position of the bent portion at the boundary between the long side portion and the short side portion. The driven arm 51A is driven by the advance-retract drive unit 53 and can rotate within a predetermined angle range. The parallel arm 51B is formed in the same shape as the driven arm 51A and is arranged parallel to the driven arm 51A at a position in the width direction Y different from that of the driven arm 51A. The parallel arm 51B is rotatably supported on the cover body 45 at the position of the bent portion at the boundary between the long side portion and the short side portion.

[0033] The first connecting arm 51C is formed in a straight line when viewed in the vertical direction. The first connecting arm 51C connects one end of each of the driven arm 51A and the parallel arm 51B (in this example, the end of the long side portion) to each other so that the angle can be changed freely. The second connecting arm 51D is formed in the same shape as the first connecting arm 51C, and connects the other end of each of the driven arm 51A and the parallel arm 51B (in this example, the end of the short side portion) to each other so that the angle can be changed freely. The first connecting arm 51C and the second connecting arm 51D are arranged parallel to each other.

[0034] The fall limiting member 51 is configured to change its posture into a retreat posture and a protruding posture. Fig. 9 As shown in the upper part of the figure, the retracted posture is a posture of retracting to a position that does not overlap with the container 7 held by the holding device 30 when viewed in the vertical direction. In this embodiment, in the retracted posture, the long side portion of the driven arm 51A, the long side portion of the parallel arm 51B, the first connecting arm 51C, and the second connecting arm 51D are all in a state along the width direction Y. Fig. 9 As shown in the lower section of FIG. 1 , the protruding posture is a posture in which the driven arm 51A and the parallel arm 51B are protruded to a position overlapping with the container 7 held by the holding device 30 when viewed in the vertical direction. In the present embodiment, in the protruding posture, the long side portions of the driven arm 51A and the parallel arm 51B are along the front-rear direction X, and the first connecting arm 51C and the second connecting arm 51D are along the width direction Y. Furthermore, a portion of the first connecting arm 51C and a portion of the parallel arm 51B overlap with the container 7 when viewed in the vertical direction.

[0035] like Fig.10 As shown, the advance-retract drive unit 53 includes an advance-retract electric motor 53A and a drive shaft 53B connected to the advance-retract electric motor 53A. The advance-retract electric motor 53A rotates the drive shaft 53B within a predetermined angle range, thereby causing the driven arm 51A connected to the drive shaft 53B to rotate within a predetermined angle range. As the driven arm 51A rotates, the parallel arm 51B also rotates, and the first connecting arm 51C connected to the terminal end of the long side portion of each of the driven arm 51A and the parallel arm 51B advances and retreats along the front-to-back direction X. As a result, the advance-retract drive unit 53 changes the posture of the drop limiting component 51 into a protruding posture and a retreating posture. When the drop limiting component 51 is in the protruding posture, when the container 7 is about to fall for some reason, the container 7 is blocked to prevent the container 7 from falling.

[0036] The lateral sway suppression device 60 suppresses the lateral sway of the container 7 when the holding device 30 in the raised position holds the container 7. Fig. 9 and Fig.10 As shown, the lateral swing suppression device 60 includes a support mechanism 61 , a contact roller 62 , a support drive unit 63 , and a brake 65 .

[0037] The support mechanism 61 supports the contact roller 62. The support mechanism 61 of the present embodiment includes a rotating arm assembly 61A, a support bracket 61B, and a linkage arm 61C. The rotating arm assembly 61A includes a base end side arm 61Aa and a terminal side arm 61Ab. The terminal side arm 61Ab is arranged to overlap with the base end side arm 61Aa in a state where the base end side end is rotatably connected to the base end side arm 61Aa. The rotating arm assembly 61A is rotatably connected to the drive shaft 53B constituting the forward and backward drive unit 53 at the base end portion of the base end side arm 61Aa. In addition, the rotating arm assembly 61A is integrally connected to the support bracket 61B at the terminal end portion of the terminal side arm 61Ab. The contact roller 62 is rotatably supported on the support bracket 61B.

[0038] In this embodiment, a force applying member 61D is provided between the base end arm 61Aa and the terminal end arm 61Ab constituting the rotating arm assembly 61A. The force applying member 61D is provided in a manner to apply a force to rotate the terminal end arm 61Ab relative to the base end arm 61Aa. The force applying member 61D applies a force to the terminal end arm 61Ab so as to approach the container 7 held by the holding device 30.

[0039] The interlocking arm 61C is rotatably connected to the second connecting arm 51D and the rotating arm assembly 61A (specifically, the end side arm 61Ab) constituting the fall limiting member 51. The interlocking arm 61C plays a role of rotating the rotating arm assembly 61A around the position of the driving shaft 53B according to the movement of the second connecting arm 51D.

[0040] The abutment roller 62 is rotatably supported by the support mechanism 61 (specifically, the support bracket 61B). The abutment roller 62 is configured so as to be able to abut against at least one of the outer side surface 71a of the bottom plate 71 and the outer side surface 72a of the side wall 72 of the container 7 held by the holding device 30 in the raised position. In the present embodiment, the abutment roller 62 is configured so as to be able to abut against the outer side surface 71a of the bottom plate 71 of the container 7 held by the holding device 30 in the raised position. In the present embodiment, the outer side surface 71a of the bottom plate 71 corresponds to the "outer side surface of the container". Fig.10 As shown in the figure, when the contact roller 62 contacts the outer side surface 71a of the container 7, the rotation axis 62x of the contact roller 62 is parallel to the central axis 7x of the container 7 (specifically, the central axis of the outer side surface 71a of the bottom plate 71). In addition, when the contact roller 62 is separated from the outer side surface 71a of the container 7, the rotation axis 62x of the contact roller 62 may not be parallel to the central axis 7x of the container 7.

[0041] At least the outer peripheral surface 62a of the contact roller 62 is formed of an elastic member. In the present embodiment, the portion (annular portion) having a predetermined thickness on the radially outer side of the contact roller 62 including the outer peripheral surface 62a is formed of an elastic member. The specific material of the elastic member forming the contact roller 62 is not particularly limited, and for example, a rubber material such as urethane rubber, silicone rubber, nitrile rubber, ethylene propylene rubber, butyl rubber, and chloroprene rubber can be used.

[0042] The contact roller 62 is configured to change its posture into a separation posture and a contact posture. Fig. 9 As shown in the upper section of FIG. 1 , the separation posture is a posture in which the outer side surface 71a of the bottom plate 71 of the container 7 held by the holding device 30 and the outer side surface 72a of the side wall 72 are separated. In the separation posture, the contact roller 62 is arranged close to the cover body 45 side in the front-rear direction X. Fig. 9 As shown in the lower section of FIG. 3 , the contact posture is a posture of contacting at least one of the outer side surface 71a of the bottom plate 71 and the outer side surface 72a of the side wall 72 of the container 7 held by the holding device 30 (in this example, the outer side surface 71a of the bottom plate 71). In the contact posture, the outer peripheral surface 62a of the contact roller 62 contacts the outer side surface 71a of the container 7 from the outside. In addition, the outer peripheral surface 62a of the contact roller 62 is a cylindrical surface parallel to the rotation axis 62x of the contact roller 62.

[0043] In the present embodiment, the support driving unit 63 is composed of the advance / retract drive unit 53, a part of the drop limiting member 51, and a part of the support mechanism 61. Specifically, the support driving unit 63 is composed of the advance / retract electric motor 53A, the drive shaft 53B, the driven arm 51A, the second connecting arm 51D, and the interlocking arm 61C.

[0044] As described above, the electric motor 53A for advancing and retreating rotates the drive shaft 53B within a predetermined angle range, thereby causing the driven arm 51A connected to the drive shaft 53B to rotate within a predetermined angle range. Along with the rotation of the driven arm 51A, the second connecting arm 51D connected to the driven arm 51A in a freely variable angle and the linkage arm 61C connected to the driven arm 51A in a freely variable angle are displaced respectively. Moreover, along with the displacement of the linkage arm 61C, the rotating arm assembly 61A, which is freely rotatably connected to the drive shaft 53B at the end on the side opposite to the abutment roller 62, swings around the position of the drive shaft 53B. As a result, the support driving portion 63 changes the posture of the abutment roller 62 between the abutment posture and the separation posture.

[0045] Thus, in the present embodiment, the advance / retract drive unit 53 and the support drive unit 63 share a driving force source (i.e., the advance / retract electric motor 53A) and a part of the link mechanism (i.e., the driven arm 51A and the second connecting arm 51D). Therefore, the contact roller 62 is linked to the posture change between the retreat posture and the protruding posture of the drop limiting component 51, and changes its posture between the separation posture and the contact posture. Specifically, the contact roller 62 is in the separation posture when the drop limiting component 51 is in the retreat posture, and is in the contact posture when the drop limiting component 51 is in the protruding posture.

[0046] Furthermore, as described above, the support mechanism 61 includes the biasing member 61D, and by the action of the biasing member 61D, the rotating arm assembly 61A (the end side arm 61Ab) is biased so as to approach the container 7 held by the holding device 30. Therefore, the contact roller 62 rotatably supported by the support bracket 61B integrally connected to the rotating arm assembly 61A is biased so as to be pressed toward the outer side surface 71a of the container 7 in the contact posture. The contact roller 62 stably contacts the outer side surface 71a of the suspended and held container 7 in the contact posture, thereby suppressing the lateral swing of the container 7.

[0047] In this embodiment, the contact roller 62 does not have an outer peripheral surface 62a which is entirely composed of a cylindrical surface without projections and depressions, but is Fig.10As shown, the groove 62G is recessed further inward than the outer peripheral surface 62a. The groove 62G is formed in the area corresponding to the convex portion 71P of the container 7 held by the holding device 30 on the outer peripheral surface 62a of the contact roller 62 in the contact posture. The groove 62G is formed in a manner that includes the area occupied by the convex portion 71P in the up-down direction Z of the outer peripheral surface 62a of the contact roller 62 in the contact posture. In addition, the groove 62G is formed in a manner that extends continuously throughout the entire circumference. In the present embodiment, the groove 62G is recessed from the outer peripheral surface 62a in a V-shape and has a triangular cross-sectional shape.

[0048] The brake 65 selectively limits the rotation of the abutment roller 62. As the brake 65, for example, an electromagnetic brake can be used. The electromagnetic brake constituting the brake 65 can be either an excitation-operated type or a non-excitation-operated type. The brake 65 is switched on and off, for example, in accordance with the driving state of the transport vehicle 1. In the present embodiment, it is constructed in the following manner: corresponding to the position in the moving path in which the transport vehicle 1 is traveling, for example, when traveling in a straight section, the brake 65 is not operated and the abutment roller 62 is allowed to rotate freely, and when traveling in a curved section, the brake 65 is operated and the rotation of the abutment roller 62 is stopped.

[0049] [Other implementation methods] (1) In the above-mentioned embodiment, the following configuration is described as an example: the contact roller 62 is urged in a manner of pressing toward the outer side surface 71a of the container 7 in the contact posture. However, the present invention is not limited to such a configuration, and the contact roller 62 may not be urged in a manner of pressing toward the outer side surface 71a of the container 7 in the contact posture. In such a case, the urging member 61D may not be provided, and the rotating arm assembly 61A may not be divided into the base end side arm 61Aa and the terminal side arm 61Ab, but may be integrated.

[0050] (2) In the above-mentioned embodiment, the contact roller 62 is described as an example in which the contact roller 62 is made of an elastic member. However, the present invention is not limited to such a structure, and the contact roller 62 may be made of a hard member.

[0051] (3) In the above-mentioned embodiment, the groove 62G formed in the contact roller 62 has a triangular cross-sectional shape as an example. However, the present invention is not limited to such a structure, and the groove 62G may be formed in a manner having various cross-sectional shapes such as a rectangular shape, a trapezoidal shape, a semicircular shape, an oblong shape, and an elliptical shape.

[0052] (4) In the above-mentioned embodiment, the following configuration is described as an example: when the contact roller 62 contacts the outer side surface 71a of the container 7, the rotation axis 62x of the contact roller 62 is parallel to the central axis 7x of the container 7. However, the present invention is not limited to such a configuration, and the rotation axis 62x of the contact roller 62 may not be parallel to the central axis 7x of the container 7 when the contact roller 62 contacts the outer side surface 71a of the container 7. For example, the rotation axis 62x of the contact roller 62 may be arranged to be inclined at an angle of 10° or less with respect to the central axis 7x of the container 7. In this way, the rotation axis 62x of the contact roller 62 may be arranged to be along the central axis 7x of the container 7.

[0053] (5) In the above-mentioned embodiment, the following configuration is described as an example: the contact roller 62 contacts only the outer side surface 71a of the bottom plate 71 of the container 7 held by the holding device 30 in the raised position. However, the present invention is not limited to such a configuration, and the contact roller 62 may be provided so as to contact both the outer side surface 71a of the bottom plate 71 and the outer side surface 72a of the side wall 72 of the container 7. Alternatively, the contact roller 62 may be provided so as to contact only the outer side surface 72a of the side wall 72 of the container 7.

[0054] (6) In the above-mentioned embodiment, the following configuration is described as an example: an electromagnetic brake is used as the brake 65 provided in the lateral sway suppression device 60. However, the configuration is not limited to this, and a brake of another driving method such as a mechanical brake or a hydraulic brake may be used as the brake 65. Alternatively, the lateral sway suppression device 60 may not be provided with the brake 65.

[0055] (7) In the above-mentioned embodiment, the following configuration is used as an example for explanation: the contact roller 62 and the drop limiting member 51 are linked to each other in the posture change between the retreat posture and the protruding posture, and the posture changes between the separation posture and the contact posture. However, the present invention is not limited to such a configuration, and the contact roller 62 and the drop limiting member 51 may be driven separately and change their postures independently of each other.

[0056] (8) In the above-mentioned embodiment, the following configuration is used as an example for explanation: the pair of shielding members 36 and the pair of supporting portions 32 are linked in posture change between the holding posture and the holding release posture, and the posture changes between the door closing posture and the door opening posture. However, the configuration is not limited to this, and the pair of shielding members 36 and the pair of supporting portions 32 may be driven separately and change their postures independently of each other.

[0057] (9) In the above embodiment, the holding device 30 is described as an example in which the holding device 30 includes the shielding member 36 that partially covers the front opening 75a of the container 7. However, the holding device 30 is not limited to such a structure, and the holding device 30 may not include the shielding member 36.

[0058] (10) In the above-mentioned embodiment, the pair of support parts 32 are arranged side by side in the front-back direction X. However, the present invention is not limited to such a configuration, and the pair of support parts 32 may be arranged side by side in the width direction Y. Alternatively, the pair of support parts 32 may be arranged side by side in a direction intersecting both the front-back direction X and the width direction Y.

[0059] (11) In the above-mentioned embodiment, the following configuration is described as an example: the holding drive unit 33 includes a holding electric motor and a mechanism for converting the rotation of the holding electric motor into a propulsion force in the front-rear direction X. However, the present invention is not limited to such a configuration, and the holding drive unit 33 may also include a mechanism that directly generates a propulsion force in the front-rear direction X, such as a fluid pressure cylinder mechanism.

[0060] (12) In the above-mentioned embodiment, the following configuration is described as an example: the holding device 30 supports the recessed portion 73E formed on the inclined top plate 73 of the container 7 by means of a pair of supporting portions 32. However, the present invention is not limited to such a configuration. For example, the inclined top plate 73 of the container 7 may be formed to protrude outward from the side wall 72 in a flange shape, and the holding device 30 may support the flange-shaped protrusion of the inclined top plate 73 by means of a pair of supporting portions 32. In addition, a handle-shaped protrusion may be provided on the side wall 72 of the container 7 at a position different from the inclined top plate 73 in the vertical direction, and the holding device 30 may support the handle-shaped protrusion by means of a pair of supporting portions 32. The handle-shaped protrusion may be formed integrally with the side wall 72, or may be formed by a member different from the side wall 72 and fixed to the side wall 72.

[0061] (13) In the above-mentioned embodiment, the following configuration is described as an example: the portion of the bottom plate 71 of the container 7 below the peripheral groove 71G (the portion on the lowermost end of the container 7) is the convex portion 71P. However, the configuration is not limited to this, and for example, the convex portion 71P may be located in the middle portion in the vertical direction of the container 7. In this case, for example, two peripheral grooves 71G may be provided at different positions in the vertical direction of the bottom plate 71 of the container 7, and the portion between the two peripheral grooves 71G may be the convex portion 71P.

[0062] (14) In the above-mentioned embodiment, the following configuration is described as an example: the outer side surface of the convex portion 71P of the container 7 is located on the same cylindrical surface as the outer side surface 71a of the bottom plate 71. However, the configuration is not limited to this, and the convex portion 71P of the container 7 may be formed in a flange shape, for example, so as to protrude further outward than the outer side surface 71a of the bottom plate 71.

[0063] (15) In the above-mentioned embodiment, the convex portion 71P of the container 7 is described as an example in which the convex portion 71P is formed continuously over the entire circumference. However, the present invention is not limited to such a configuration, and the convex portion 71P may be formed intermittently in the circumferential direction. In this case, for example, a plurality of protrusions may be arranged in the circumferential direction.

[0064] (16) In the above-mentioned embodiment, an open box without a cover for closing the opening 75 is used as an example of the structure of the container 7. However, the present invention is not limited to such a structure, and a container 7 (such as a FOUP or a reticle box) having a cover for closing the opening 75 may be used.

[0065] (17) The configurations disclosed in the above-mentioned embodiments (including the above-mentioned embodiments and other embodiments; the same applies below) can also be combined and applied with the configurations disclosed in other embodiments as long as no contradiction occurs. Regarding other configurations, the embodiments disclosed in this specification are also illustrative in all aspects and can be appropriately changed within the scope of the present disclosure.

[0066] [Summary of implementation methods] To summarize the above, the transport vehicle according to the present disclosure preferably includes the following configurations.

[0067] A conveyor vehicle is a conveyor vehicle for conveying containers in a suspended state. A lateral sway suppressing device is provided for suppressing lateral sway of the container by contacting with the outer side surface of the container held in suspension, The lateral sway suppression device includes a rotatable contact roller that contacts the outer side of the container. In the area corresponding to the convex portion on the outer peripheral surface of the aforementioned abutment roller, a groove is formed that extends continuously throughout the entire circumference. The convex portion is a portion that is distinguished from the aforementioned container outer surface of the aforementioned container and is a portion that protrudes outward compared to at least other adjacent portions on either the upper or lower side.

[0068] According to this structure, by rotatably setting an abutment roller that abuts against the outer side of the container, the lateral swaying of the suspended and held container during transportation can be suppressed. At this time, if there is a convex portion on the outer side of the container, there is a concern that the outer peripheral surface of the abutment roller contacts the convex portion and is partially worn, but since a groove that extends continuously throughout the entire circumference is formed in the area corresponding to the convex portion, the abutment roller does not contact the convex portion of the container. Therefore, the amount of dust and the like generated due to the wear of the abutment roller can be suppressed. As a result, the lateral swaying of the suspended and held container can be suppressed, and the wear of the abutment roller caused by the contact with the container can be suppressed, and the amount of dust and the like generated can be suppressed.

[0069] As a solution, it is preferred that When the contact roller contacts the outer side surface of the container, the rotation axis of the contact roller is parallel to the central axis of the outer side surface of the container.

[0070] According to this structure, the contact roller can be smoothly rotated in a state of contacting the outer side surface of the container, and from this point of view, the wear of the contact roller can be suppressed to a small extent. In addition, the concave groove of the contact roller and the convex portion of the container are in a positional relationship facing each other from the front, so that the wear of the contact roller can be appropriately suppressed to a small extent by only providing the concave groove with a necessary minimum size that is only slightly larger than the convex portion.

[0071] As a solution, it is preferred that The lateral sway suppression device comprises: a supporting mechanism that supports the aforementioned abutment roller; and a support driving unit that changes the posture of the contact roller to a contact posture in which the contact roller contacts the outer side surface of the container and a separation posture in which the contact roller separates from the outer side surface of the container, The supporting mechanism is configured to bias the contact roller toward a side that is pressed toward the outer side surface of the container in the contact posture.

[0072] According to this configuration, when the abutting roller is made to be in the state of separation posture, the action of starting or keeping the release of the container can be easily performed. In addition, the abutting roller of the abutting posture is urged in the mode of pushing to the outer side of the container, thereby the lateral swing of the container can be effectively suppressed.

[0073] As a solution, it is preferred that have: a fall limiting member disposed below the bottom surface of the container to limit the fall of the container; and an advance-retract drive unit that changes the posture of the drop-restricting member to a protruding posture in which the member protrudes to a position overlapping the container when viewed in the vertical direction and a retracted posture in which the member retracts to a position not overlapping the container, The drop restricting member is configured to be linked to a change in the posture of the contact roller, to be in the protruding posture as the contact roller is in the contact posture, and to be in the retracted posture as the contact roller is in the separated posture.

[0074] According to this structure, even if the container is mistakenly released from the hanging position for some reason, the drop-restricting member can block the container and prevent the container from falling. In addition, by linking the posture change between the protruding posture and the retreating posture of the drop-restricting member with the posture change between the contact posture and the separation posture of the contact roller, the lateral swing of the container can be suppressed and the container can be prevented from falling in an emergency with a relatively simple structure.

[0075] As a solution, it is preferred that The outer peripheral surface of the contact roller is formed of an elastic member.

[0076] According to this structure, the outer peripheral surface of the contact roller elastically contacts the outer side surface of the container, thereby effectively suppressing the lateral swing of the container. In addition, compared with the case where the outer peripheral surface of the contact roller is made of a material with high rigidity, it becomes a situation where wear caused by friction is easy to occur, but due to the presence of the groove, the outer side surface of the contact roller does not contact the convex part of the container, so there is no particular problem.

[0077] As a solution, it is preferred that The lateral swing suppression device includes a brake that selectively restricts rotation of the contact roller.

[0078] According to this configuration, by controlling the on / off state of the brake according to the travel state of the transport vehicle, etc., the swinging state of the container can be appropriately controlled.

[0079] The transport vehicle according to the present disclosure only needs to achieve at least one of the above-mentioned effects. Explanation of symbols

[0080] 1Conveyor vehicle 7 Container 7x Center Axis 30 Holding device 50 Fall restriction device 51 Falling restriction parts 53 forward and backward drive unit 60 Lateral sway suppression device 61 Support mechanism 62 contact roller 62a Outer surface 62G groove 62x Rotation Axis 63 Support drive unit 65 Brake 71 base plate 71a Outer side (outer side of container) 71P convex part.

Claims

1. A conveyor vehicle that conveys a container in a suspended state. The transport vehicle has the following features: A lateral sway suppression device is provided for suppressing lateral sway of the container by contacting with the outer side surface of the container held in suspension, The lateral sway suppression device includes a rotatable contact roller that contacts the outer side surface of the container. In the area corresponding to the convex portion on the outer peripheral surface of the abutment roller, a groove extending continuously throughout the entire circumference is formed. The convex portion is a portion distinguished from the outer surface of the container and is a portion protruding outward compared with other adjacent portions on either the upper or lower side.

2. The transport vehicle according to claim 1, wherein: When the contact roller contacts the outer surface of the container, the rotation axis of the contact roller is parallel to the central axis of the outer surface of the container.

3. The transport vehicle according to claim 1, wherein: The lateral sway suppression device comprises: a supporting mechanism that supports the abutment roller; and a support driving unit configured to change the posture of the contact roller to a contact posture in which the contact roller contacts the outer side surface of the container and a separation posture in which the contact roller separates from the outer side surface of the container, The support mechanism is configured to bias the contact roller toward a side that is pressed toward the outer side surface of the container in the contact posture.

4. The transport vehicle according to claim 3, wherein: have: a fall restricting member disposed below the bottom surface of the container to restrict the container from falling; and an advance / retract drive unit that changes the posture of the drop-restricting member into a protruding posture in which the member protrudes to a position overlapping the container when viewed in the vertical direction and a retracted posture in which the member retracts to a position not overlapping the container, The drop restricting member is configured to be linked to a change in the posture of the contact roller, to be in the protruding posture as the contact roller is in the contact posture, and to be in the retracted posture as the contact roller is in the separated posture.

5. The transport vehicle according to any one of claims 1 to 4, wherein: The outer peripheral surface of the contact roller is formed of an elastic member.

6. The transport vehicle according to any one of claims 1 to 4, wherein: The lateral swing suppression device includes a brake that selectively restricts rotation of the contact roller.

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