Linear motion axis microcosmic dynamic attitude error measurement method and device, medium and program product

Abstract

The invention discloses a linear motion shaft microscopic dynamic attitude error measurement method and device, a medium and a program product, and relates to the technical field of error measurement, the method is applied to a linear motion shaft, a first calibration plate and a second calibration plate are arranged around the linear motion shaft, and an included angle exists between the first calibration plate and the second calibration plate; the linear motion shaft is provided with a rotor; according to the method, a rotor is adopted to drive a visual assembly to perform point position motion, and the visual assembly is utilized to shoot markers of a first calibration plate and a second calibration plate; and the first image and the second image obtained by shooting are processed to obtain relative position information, and the relative position information is processed and is combined with curve fitting to obtain an attitude angle error and an offset position error of the rotor at any position on the linear motion axis. According to the method, markers on different calibration plates are shot based on a pure vision mode, the attitude angle error and the offset position error of the rotor are obtained through processing, and the cost of a measuring instrument required by a traditional measuring method is greatly reduced.

Description

Technical Field

[0001] The present application relates to the field of error measurement technology, and in particular to a method, device, medium and program product for measuring microscopic dynamic posture errors of a linear motion axis. Background Art

[0002] At present, the measurement of microscopic dynamic posture errors of linear motion axes mainly relies on Renishaw's four-head laser interferometer (XM-60).

[0003] Since the purchase cost of the four-head laser interferometer is high, for enterprises that have the demand for linear motion axis micro-dynamic posture error measurement, they need to purchase the four-head laser interferometer to perform linear motion axis micro-dynamic posture error measurement, which leads to the high cost of the measuring instrument required for linear motion axis micro-dynamic posture error measurement.

[0004] Therefore, there is an urgent need for a new method for measuring the microscopic dynamic posture error of a linear motion axis to solve the problem of high cost of the measuring instruments required by the existing method for measuring the microscopic dynamic posture error of a linear motion axis. Summary of the invention

[0005] The main purpose of this application is to provide a linear motion axis micro-dynamic posture error measurement method, equipment, medium and program product, aiming to solve the technical problem of high cost of measuring instruments required for existing linear motion axis micro-dynamic posture error measurement methods.

[0006] To achieve the above-mentioned purpose, the present application proposes a method for measuring the microscopic dynamic posture error of a linear motion axis, which is applied to a linear motion axis, wherein a first calibration plate and a second calibration plate are arranged around the linear motion axis, and an angle is formed between the first calibration plate and the second calibration plate; the linear motion axis is equipped with a movable mover; The method comprises: The mover is driven to perform point-to-point motion along the linear motion axis, and at each point, the visual component on the mover is used to photograph the markers on the first calibration plate and the second calibration plate, so as to obtain a first image corresponding to the first calibration plate and a second image corresponding to the second calibration plate at each point; wherein the markers are arranged at intervals along the axial direction parallel to the linear motion axis; Processing the first image and the second image to obtain relative position information between the visual component and the first calibration plate and the second calibration plate at each point; The relative position information is processed and combined with curve fitting to obtain the attitude angle error and offset position error corresponding to any position of the mover on the linear motion axis.

[0007] In one embodiment, the marker is a two-dimensional code, and the two-dimensional code includes coding information corresponding to the row and column number of the two-dimensional code; The visual component includes a plurality of first cameras and second cameras. The first cameras capture the first images, and the second cameras capture the second images.

[0008] In one embodiment, the step of processing the first image and the second image to obtain relative position information between the visual component and the first calibration plate and the second calibration plate at each point includes: Parsing the two-dimensional codes in the first image and the second image to obtain a first row and column number and a second row and column number; Based on the first row and column numbers and the second row and column numbers, determining a first position of the first camera relative to the first calibration plate and a second position of the second camera relative to the second calibration plate; The first position and the second position are combined into the relative position information.

[0009] In one embodiment, the step of determining a first position of the first camera relative to the first calibration plate and a second position of the second camera relative to the second calibration plate based on the first row and column numbers and the second row and column numbers includes: Calculate, based on a visual algorithm, a first relative distance between the two-dimensional code in the first image and an image reference point; Combining the first relative distance and the position corresponding to the first row and column number, obtaining a first position of the first camera relative to the first calibration plate; Calculate, based on a visual algorithm, a second relative distance between the two-dimensional code in the second image and an image reference point; The second relative distance and the position corresponding to the second row and column number are combined to obtain a second position of the second camera relative to the second calibration plate.

[0010] In one embodiment, the step of processing the relative position information and combining it with curve fitting to obtain the attitude angle error and offset position error corresponding to any position of the mover on the linear motion axis includes: Based on the relative position information and the positional relationship between the visual component and the mover, calculating the posture parameters and offset position parameters of the mover at each point; Fitting a motion state change curve based on the posture parameter and the offset position parameter, and drawing a motion state change curve graph; Based on the motion state change curve and the motion state change curve diagram, the attitude angle error and the offset position error corresponding to any position of the mover on the linear motion axis are obtained.

[0011] In one embodiment, the interval between two adjacent points is consistent with the interval between two adjacent markers.

[0012] In one embodiment, the visual component includes at least three of the first cameras and at least three of the second cameras; at least three of the first cameras are arranged in an array, and at least three of the second cameras are arranged in an array; the two-dimensional codes are arranged in an array on the first calibration plate and the second calibration plate, respectively, and each row of the two-dimensional codes is parallel to the axial direction of the linear motion axis; And / or, the visual component further includes a first light source and a second light source, the first light source is irradiated in a direction toward the first calibration plate, and the second light source is irradiated in a direction toward the second calibration plate.

[0013] In addition, to achieve the above-mentioned purpose, the present application also proposes a linear motion axis micro-dynamic posture error measurement device, which is applied to the linear motion axis, wherein a first calibration plate and a second calibration plate are arranged around the linear motion axis, and an angle exists between the first calibration plate and the second calibration plate; the linear motion axis is equipped with a movable mover; the linear motion axis micro-dynamic posture error measurement device comprises: A control module, used for driving the mover to perform point-to-point motion along the linear motion axis, and using the visual component on the mover to photograph the markers on the first calibration plate and the second calibration plate at each point, so as to obtain a first image corresponding to the first calibration plate and a second image corresponding to the second calibration plate at each point; wherein the markers are arranged at intervals along an axial direction parallel to the linear motion axis; A processing module, used for processing the first image and the second image to obtain relative position information between the visual component and the first calibration plate and the second calibration plate at each point; The fitting module is used to process the relative position information and combine it with curve fitting to obtain the attitude angle error and offset position error corresponding to any position of the mover on the linear motion axis.

[0014] In addition, to achieve the above purpose, the present application also proposes a linear motion axis micro-dynamic posture error measurement device, the device comprising: The first calibration plate; A second calibration plate, wherein the second calibration plate and the first calibration plate are arranged around the linear motion axis, an angle is formed between the second calibration plate and the first calibration plate, and markers are arranged on both the second calibration plate and the first calibration plate, and the markers are arranged at intervals along a direction parallel to the axial direction of the linear motion axis; A mover, the mover is mounted on the linear motion shaft; the mover is used to move along the axial direction of the linear motion shaft; A visual component, the visual component is mounted on the mover, and the visual component is used to photograph the markers located on the first calibration plate and the second calibration plate; A controller is respectively connected to the linear motion axis and the visual component for communication; the controller is used to execute the steps of the linear motion axis micro-dynamic posture error measurement method as described above.

[0015] In addition, to achieve the above-mentioned purpose, the present application also proposes a storage medium, which is a computer-readable storage medium, and a computer program is stored on the storage medium. When the computer program is executed by the processor, the steps of the linear motion axis micro-dynamic posture error measurement method as described above are implemented.

[0016] In addition, to achieve the above-mentioned purpose, the present application also provides a computer program product, which includes a computer program, and when the computer program is executed by a processor, it implements the steps of the linear motion axis micro-dynamic posture error measurement method as described above.

[0017] One or more technical solutions proposed in this application have at least the following technical effects: The present application adopts a method for measuring the micro-dynamic posture error of a linear motion axis. The method is applied to the linear motion axis, and a first calibration plate and a second calibration plate are arranged around the linear motion axis, and an angle exists between the first calibration plate and the second calibration plate; the linear motion axis is equipped with a movable mover; the method comprises: driving the mover to perform point-to-point movement along the linear motion axis, and using a visual component on the mover to shoot markers on the first calibration plate and the second calibration plate at each point, so as to obtain a first image corresponding to the first calibration plate and a second image corresponding to the second calibration plate at each point; wherein the markers are arranged at intervals along an axial direction parallel to the linear motion axis; processing the first image and the second image to obtain relative position information between the visual component and the first calibration plate and the second calibration plate at each point; processing the relative position information and combining it with curve fitting to obtain the posture angle error and offset position error corresponding to any position of the mover on the linear motion axis.

[0018] This application takes the first image and the second image based on a pure visual shooting method, processes the first image and the second image and combines it with curve fitting to obtain the attitude angle error and offset position error of the mover at any position. Since this measurement method only requires the purchase of low-cost visual components and corresponding calibration plates, it can greatly reduce the cost of the measuring instruments required for the micro-dynamic attitude error measurement method. In addition, since the markers are arranged in intervals along the axial direction parallel to the axis of the linear motion axis, it can ensure that the visual component is consistent with the theoretical distance of each calibration plate in the process of following the movement of the mover, avoiding the change in the distance between the visual component and each calibration plate caused by the system error in the design, thereby avoiding the final wrong attitude angle error and offset position error. This application also allows the angle between the first calibration plate and the second calibration plate to be established, so that the objects in the first image and the second image can contain information in the orthogonal direction, thereby improving the accuracy and reliability of the micro-dynamic attitude error measurement method based on the visual shooting method, and ensuring the reliability of the micro-dynamic attitude error measurement under high precision. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0020] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0021] Figure 1 A schematic diagram of a flow chart provided for the first embodiment of the method for measuring the microscopic dynamic posture error of a linear motion axis of the present application; Figure 2 A schematic diagram of a flow chart provided for Embodiment 3 of the method for measuring microscopic dynamic posture errors of a linear motion axis of the present application; Figure 3 A flow chart of a fourth embodiment of the method for measuring the microscopic dynamic posture error of a linear motion axis of the present application; Figure 4 This is a schematic diagram of the module structure of the device for measuring the microscopic dynamic posture error of a linear motion axis according to an embodiment of the present application; Figure 5 Schematic diagram of the device structure of the hardware operating environment involved in the linear motion axis micro-dynamic posture error measurement method in the embodiment of the present application.

[0022] Description of Figure Numbers: 1. First calibration plate; 2. Second calibration plate; 3. Linear motion axis; 31. Mover; 4. Vision component.

[0023] The purpose, features and advantages of this application will be further described in conjunction with the embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0024] It should be understood that the specific embodiments described herein are only used to explain the technical solutions of the present application and are not used to limit the present application.

[0025] In order to better understand the technical solution of the present application, a detailed description will be given below in conjunction with the accompanying drawings and specific implementation methods.

[0026] The main solution of the embodiment of the present application is: a first calibration plate and a second calibration plate are provided around the linear motion axis, and there is an angle between the first calibration plate and the second calibration plate; a movable mover is installed on the linear motion axis; the mover is driven to perform point-to-point motion along the linear motion axis, and at each point, the visual component on the mover is used to shoot the markers on the first calibration plate and the second calibration plate to obtain a first image of the first calibration plate corresponding to each point and a second image of the second calibration plate corresponding to each point; wherein the markers are arranged at intervals along the axial direction parallel to the linear motion axis; the first image and the second image are processed to obtain the relative position information between the visual component and the first calibration plate and the second calibration plate at each point; the relative position information is processed and combined with curve fitting to obtain the attitude angle error and offset position error corresponding to any position of the mover on the linear motion axis.

[0027] In this embodiment, for the convenience of description, the following description is made by taking the linear motion axis micro-dynamic posture error measurement device as the execution subject.

[0028] At present, the measurement of micro-dynamic posture errors of linear motion axes mainly relies on Renishaw's four-head laser interferometer (XM-60). Due to the high procurement cost of the four-head laser interferometer, for companies that need to measure the micro-dynamic posture errors of linear motion axes, they need to purchase the four-head laser interferometer to perform the measurement, which results in high cost of the measuring instrument required for the measurement of micro-dynamic posture errors of linear motion axes.

[0029] Therefore, there is an urgent need for a new method for measuring the microscopic dynamic posture error of a linear motion axis to solve the problem of high cost of the measuring instruments required by the existing method for measuring the microscopic dynamic posture error of a linear motion axis.

[0030] Based on this, the present application provides a solution by adopting a linear motion axis micro-dynamic posture error measurement method, which is applied to the linear motion axis, wherein a first calibration plate and a second calibration plate are arranged around the linear motion axis, and there is an angle between the first calibration plate and the second calibration plate; the linear motion axis is equipped with a movable mover; the method comprises: driving the mover to perform point-to-point movement along the linear motion axis, and using a visual component on the mover to shoot markers on the first calibration plate and the second calibration plate at each point, so as to obtain a first image of the first calibration plate corresponding to each point and a second image of the second calibration plate corresponding to each point; wherein the markers are arranged at intervals along an axial direction parallel to the linear motion axis; processing the first image and the second image to obtain relative position information between the visual component and the first calibration plate and the second calibration plate at each point; processing the relative position information and combining it with curve fitting to obtain the posture angle error and offset position error corresponding to any position of the mover on the linear motion axis.

[0031] This application takes the first image and the second image based on a pure visual shooting method, processes the first image and the second image and combines it with curve fitting to obtain the attitude angle error and offset position error of the mover at any position. Since this measurement method only requires the purchase of low-cost visual components and corresponding calibration plates, it can greatly reduce the cost of the measuring instruments required for the micro-dynamic attitude error measurement method. In addition, since the markers are arranged in intervals along the axial direction parallel to the axis of the linear motion axis, it can ensure that the visual component is consistent with the theoretical distance of each calibration plate in the process of following the movement of the mover, avoiding the change in the distance between the visual component and each calibration plate caused by the system error in the design, thereby avoiding the final wrong attitude angle error and offset position error. This application also allows the angle between the first calibration plate and the second calibration plate to be established, so that the objects in the first image and the second image can contain information in the orthogonal direction, thereby improving the accuracy and reliability of the micro-dynamic attitude error measurement method based on the visual shooting method, and ensuring the reliability of the micro-dynamic attitude error measurement under high precision.

[0032] It should be noted that the execution subject of this embodiment can be a linear motion axis micro-dynamic posture error measurement device, or a computing service device with data processing, network communication and program running functions and connected to the linear motion axis, such as a tablet computer, a personal computer, a mobile phone, etc. The following takes the linear motion axis micro-dynamic posture error measurement device as an example to illustrate this embodiment and the following embodiments.

[0033] Based on this, the embodiment of the present application provides a method for measuring the microscopic dynamic posture error of a linear motion axis, referring to Figure 1 , Figure 1 This is a flow chart of the first embodiment of the linear motion axis micro-dynamic posture error measurement method of the present application.

[0034] In this embodiment, the linear motion axis micro-dynamic posture error measurement method is applied to the linear motion axis, and a first calibration plate and a second calibration plate are arranged around the linear motion axis, and an angle is formed between the first calibration plate and the second calibration plate; the linear motion axis is equipped with a movable mover; The linear motion axis micro-dynamic posture error measurement method comprises steps S10 to S30: Step S10, driving the mover to perform point-to-point motion along the linear motion axis, and photographing the markers on the first calibration plate and the second calibration plate at each point using the visual component on the mover, so as to obtain a first image of the first calibration plate and a second image of the second calibration plate corresponding to each point; wherein the markers are arranged at intervals along the axial direction parallel to the linear motion axis; It should be noted that the mover moves in points along the linear motion axis, and the point motion means that after the mover moves to a point along the linear motion axis, it stops moving within a preset time, and then moves to the next point and stops moving according to a preset time period, and then repeats this process until the mover moves to the final point. Among them, as an optional implementation, the stop time of the mover at each point can be set to 2 seconds to ensure that the visual component has sufficient time to shoot after the mover stops moving.

[0035] It should also be noted that there is an angle between the first calibration plate and the second calibration plate, and the existence of this angle enables the objects in the first image and the second image to contain information in orthogonal directions, thereby improving the accuracy and reliability of the micro-dynamic posture error measurement method based on visual shooting, and ensuring the reliability of micro-dynamic posture error measurement under high precision. As an optional embodiment, the first calibration plate can be set on the side of the linear motion axis, and the second calibration plate can be set on the top of the first calibration plate and form a 90° angle with the first calibration plate, so that the objects on the first calibration plate and the second calibration plate are orthogonal to each other, simplifying the subsequent analysis and processing of the first image and the second image to obtain information in the orthogonal direction.

[0036] Step S20, processing the first image and the second image to obtain relative position information between the visual component and the first calibration plate and the second calibration plate at each point; Step S30, processing the relative position information and combining it with curve fitting to obtain the attitude angle error and offset position error corresponding to any position of the mover on the linear motion axis.

[0037] Among them, curve fitting refers to fitting the attitude angle error curve and offset position error curve corresponding to any position of the mover on the linear motion axis based on the attitude angle and offset position corresponding to the mover at each point.

[0038] This embodiment provides a method for measuring the microscopic dynamic posture error of a linear motion axis. By shooting a first image and a second image based on a pure visual shooting method, the first image and the second image are processed and combined with curve fitting to obtain the posture angle error and offset position error of the mover at any position. Since the measurement method only requires the purchase of low-cost visual components and corresponding calibration plates, the cost of the measuring instrument required for the microscopic dynamic posture error measurement method can be greatly reduced. In addition, since the markers are arranged in intervals along the direction parallel to the axial direction of the linear motion axis, it is possible to ensure that the visual component is consistent with the theoretical distance of each calibration plate in the process of following the movement of the mover, avoiding the change in the distance between the visual component and each calibration plate caused by the system error in the design, thereby avoiding the final wrong posture angle error and offset position error. This application also allows the angle between the first calibration plate and the second calibration plate to be set, so that the object being photographed in the first image and the second image can contain information in the orthogonal direction, thereby improving the accuracy and reliability of the microscopic dynamic posture error measurement method based on the visual shooting method, and ensuring the reliability of the microscopic dynamic posture error measurement under high precision.

[0039] Based on the first embodiment of the present application, in the second embodiment of the present application, the same or similar contents as those in the above-mentioned embodiment 1 can be referred to the above introduction, and will not be repeated later. On this basis, the marker is a two-dimensional code, and the two-dimensional code contains coding information corresponding to the row and column numbers of the two-dimensional code; the visual component includes a plurality of first cameras and second cameras, the first camera captures the first image, and the second camera captures the second image.

[0040] In this embodiment, by setting the marker as a QR code and allowing the QR code to contain encoding information corresponding to the row and column numbers of the QR code, it is convenient to obtain the corresponding row and column numbers by subsequently parsing the QR code, and to know the location information of the marker based on the row and column numbers.

[0041] In addition, as an optional implementation, the marker can also be set to include information about the row and column number of the marker, such as a combination of text and numbers. Exemplarily, the marker can be set to row and column numbers, the marker in the first row and first column is (1, 1), and the marker in the second row and third column is (2, 3); after the first camera and the second camera in the visual component capture the corresponding marker, they are processed by the linear motion axis micro-dynamic posture error measurement device (such as optical character recognition OCR, image recognition, etc.) to obtain the corresponding row and column numbers, so as to obtain the location information of the marker based on the row and column numbers.

[0042] In addition, as an optional implementation, the visual component includes at least three of the first cameras and at least three of the second cameras; at least three of the first cameras are arranged in an array, and at least three of the second cameras are arranged in an array; the two-dimensional codes are arranged in an array on the first calibration plate and the second calibration plate, respectively, and each row of the two-dimensional codes is parallel to the axial direction of the linear motion axis; And / or, the visual component further includes a first light source and a second light source, the first light source is irradiated in a direction toward the first calibration plate, and the second light source is irradiated in a direction toward the second calibration plate.

[0043] In this embodiment, by making the visual component include at least three first cameras and at least three second cameras, and making at least three first cameras arranged in array, at least three second cameras arranged in array, and two-dimensional codes arranged in array on the first calibration plate and the second calibration plate, respectively, at least three first cameras can shoot multiple two-dimensional codes on the first calibration plate at different positions and angles, and then simultaneously shoot from different angles to perform triangulation, and improve the accuracy of position and posture measurement through cross-validation of multiple perspectives. In addition, by using the first light source to illuminate the first calibration plate and the second light source to illuminate the second calibration plate, the lighting conditions are improved, and the visual component is prevented from capturing low-quality images under low-light conditions, thereby ensuring the shooting quality of the first image and the second image, and facilitating the subsequent processing of the first image and the second image to obtain relative position information.

[0044] Based on the second embodiment of the present application, in the third embodiment of the present application, the same or similar contents as those in the above-mentioned second embodiment can refer to the above introduction, and will not be repeated in the following. Figure 2 , step S20 includes steps S21 to S23: Step S21, parsing the two-dimensional codes in the first image and the second image to obtain a first row and column number and a second row and column number; Step S22, determining a first position of the first camera relative to the first calibration plate and a second position of the second camera relative to the second calibration plate based on the first row and column numbers and the second row and column numbers; In one feasible implementation, step S22 may include steps S221 to S224: Step S221, calculating a first relative distance between the two-dimensional code in the first image and an image reference point based on a visual algorithm; It should be noted that the image reference point can be set to the center of the image, or to a reference point such as the upper left initial point, and the pixel difference between the image reference point and the reference point of the QR code in the first image is detected and converted into the actual distance in the real world, i.e., the first relative distance, using a visual algorithm. The visual algorithm has pre-calibrated data built in to achieve the conversion between the pixel value and the actual distance in the real world; the pre-calibrated data can be obtained by calibrating the first calibration plate and the second calibration plate using a calibration method such as the Zhang Zhengyou calibration method, and is not specifically limited here.

[0045] Step S222, combining the first relative distance and the position corresponding to the first row and column number to obtain a first position of the first camera relative to the first calibration plate; It should be noted that the row and column numbers and the positions corresponding to the row and column numbers can be pre-stored in the linear motion axis micro-dynamic attitude error measurement device in the form of a mapping table. When the first row and column numbers are obtained, the linear motion axis micro-dynamic attitude error measurement device retrieves the actual position corresponding to the first row and column numbers according to the mapping table; in addition, the conversion relationship between the row and column numbers and the positions corresponding to the row and column numbers can also be pre-stored in the linear motion axis micro-dynamic attitude error measurement device. When the first row and column numbers are obtained, the linear motion axis micro-dynamic attitude error measurement device calculates the position corresponding to the first row and column numbers according to the conversion relationship.

[0046] Step S223, calculating a second relative distance between the two-dimensional code in the second image and the image reference point based on a visual algorithm; Similarly, by detecting the pixel difference between the image reference point and the reference point of the two-dimensional code in the second image, a visual algorithm is used to convert it into the actual distance in the real world, that is, the second relative distance.

[0047] Step S224: combining the second relative distance and the position corresponding to the second row and column number to obtain a second position of the second camera relative to the second calibration plate.

[0048] In this embodiment, a first relative distance between a QR code in a first image and an image reference point, as well as a second relative distance between a QR code in a second image and an image reference point are calculated based on a visual algorithm, and the first relative distance and the second relative distance are used in the calculation of the first position and the second position, so that the calculated first position and second position are closer to the actual position, thereby improving the accuracy of the first position and the second position.

[0049] Step S23: combining the first position and the second position into the relative position information.

[0050] In this embodiment, the row and column numbers of the marker are obtained by parsing the QR code, and then the first position and the second position are obtained according to the mapping relationship between the row and column numbers and the real position, thereby realizing efficient acquisition of relative position information. In addition, since the QR code has a certain error correction capability, the QR code in the first image and the second image is partially damaged or partially blocked, and the original information can still be correctly decoded; therefore, the method of obtaining the row and column numbers by parsing the QR code has strong security redundancy and fault tolerance, and can ensure the smooth acquisition of the row and column number information.

[0051] Based on the first embodiment of the present application, in the fourth embodiment of the present application, the same or similar contents as those in the first embodiment can refer to the above description, and will not be described in detail later. Figure 3 , step S30 includes steps S31 to S33: Step S31, calculating the posture parameters and offset position parameters of the mover at each point based on the relative position information and the positional relationship between the visual component and the mover; As an optional implementation, step S31 may include steps S311 to S313: Step S311, calculating a first offset distance of the first camera based on a first position of the first camera in the visual component relative to the first calibration plate and a point position corresponding to the first camera; Step S312, based on the second position of the second camera in the visual component relative to the second calibration plate and the point position corresponding to the second camera, calculate a second offset distance of the second camera; Step S313, based on the first offset distance, the second offset distance, the corresponding point positions, and the positional relationship between the mover and the visual component, determine the offset position parameters and posture parameters of the mover at each point position.

[0052] In this embodiment, the first offset distance of the first camera and the second offset distance of the second camera are first calculated, and then the offset position parameters and posture parameters of the mover at each point are determined based on the first offset distance, the second offset distance, the corresponding point positions, and the positional relationship between the mover and the visual component.

[0053] Step S32, fitting a motion state change curve based on the posture parameter and the offset position parameter, and drawing a motion state change curve graph; Among them, the motion change curve contains six curves, three of which are attitude angle change curves, the independent variables of the three attitude angle change curves are the position of the mover on the linear motion axis, and the dependent variables are the three attitude angles (pitch angle, yaw angle, roll angle) of the mover; the other three curves are offset position change curves in three directions, the independent variables of the offset position change curves in three directions are the position of the mover on the linear motion axis, and the dependent variables are the offset positions of the mover in three directions along the XYZ axis.

[0054] Step S33, based on the motion state change curve and the motion state change curve diagram, obtaining the attitude angle error and the offset position error corresponding to any position of the mover on the linear motion axis.

[0055] In this embodiment, the posture parameters and offset position parameters of the mover at each point are calculated based on the relative position information and the positional relationship between the visual component and the mover; then the motion change curve is fitted according to the posture parameters and the offset position parameters, and the motion change curve diagram is drawn; since the motion change curve is fitted, the independent variable of the motion change curve is the position of the mover, and the dependent variable is the posture angle and offset position of the mover; therefore, the posture angle error and offset position error of the mover at any point on the axial direction of the linear motion axis can be obtained according to the motion change curve, thereby achieving a high-precision linear motion axis micro-dynamic posture error measurement effect.

[0056] Based on any of the above embodiments of the present application, in the fifth embodiment of the present application, the same or similar content as any of the above embodiments can be referred to the above introduction, and will not be repeated later. On this basis, in order to solve the problem that the visual component may have incomplete markers captured at some points, in the fifth embodiment of the present application, the interval between two adjacent points is consistent with the interval between two adjacent markers.

[0057] As an optional implementation, the interval between two adjacent points and the interval between two adjacent markers can both be set to 5 mm, or can be set to other interval values.

[0058] In this embodiment, by making the interval between two adjacent points consistent with the interval between two adjacent markers, it is ensured that when the mover moves to any point, the visual component can capture the complete marker corresponding to the point, thereby avoiding the problem of incomplete markers captured by the visual component due to the inconsistency between the interval between two adjacent points and the interval between two adjacent markers.

[0059] The present application also provides a linear motion axis micro-dynamic posture error measurement device, which is applied to the linear motion axis. A first calibration plate and a second calibration plate are arranged around the linear motion axis, and an angle is formed between the first calibration plate and the second calibration plate; the linear motion axis is equipped with a movable mover; please refer to Figure 4 , the linear motion axis microscopic dynamic posture error measurement device comprises: The control module 10 is used to drive the mover to perform point-to-point motion along the linear motion axis, and to use the visual component on the mover to photograph the markers on the first calibration plate and the second calibration plate at each point, so as to obtain a first image corresponding to the first calibration plate and a second image corresponding to the second calibration plate at each point; wherein the markers are arranged at intervals along the axial direction parallel to the linear motion axis; A processing module 20, configured to process the first image and the second image to obtain relative position information between the visual component and the first calibration plate and the second calibration plate at each point; The fitting module 30 is used to process the relative position information and combine it with curve fitting to obtain the attitude angle error and offset position error corresponding to any position of the mover on the linear motion axis.

[0060] The linear motion axis micro-dynamic posture error measurement device provided by the present application adopts the linear motion axis micro-dynamic posture error measurement method in the above-mentioned embodiment, which can solve the technical problem of the high cost of the measuring instrument required by the existing linear motion axis micro-dynamic posture error measurement method. Compared with the prior art, the beneficial effects of the linear motion axis micro-dynamic posture error measurement device provided by the present application are the same as the beneficial effects of the linear motion axis micro-dynamic posture error measurement method provided by the above-mentioned embodiment, and the other technical features of the linear motion axis micro-dynamic posture error measurement device are the same as the features disclosed in the above-mentioned embodiment method, which will not be repeated here.

[0061] This application provides a linear motion axis micro-dynamic posture error measurement device, please refer to Figure 5 , the linear motion axis micro-dynamic posture error measurement equipment includes: The first calibration plate 1; A second calibration plate 2, wherein the second calibration plate 2 and the first calibration plate 1 are arranged around the linear motion shaft 3, an angle is formed between the second calibration plate 2 and the first calibration plate 1, and markers are arranged on both the second calibration plate 2 and the first calibration plate 1, and the markers are arranged at intervals along a direction parallel to the axial direction of the linear motion shaft; A mover 31, wherein the mover 31 is mounted on the linear motion shaft 3; the mover 31 is used to move along the axial direction of the linear motion shaft 3; A visual component 4, wherein the visual component 4 is mounted on the mover 31, and the visual component 4 is used to photograph the markers located on the first calibration plate 1 and the second calibration plate 2; A controller, wherein the controller is respectively connected to the linear motion axis 3 and the visual component 4 for communication; the controller is used to execute the steps of the linear motion axis micro-dynamic posture error measurement method in the above embodiment.

[0062] The linear motion axis micro-dynamic posture error measurement device provided by the present application adopts the linear motion axis micro-dynamic posture error measurement method in the above-mentioned embodiment, which can solve the technical problem of the high cost of the measuring instrument required by the existing linear motion axis micro-dynamic posture error measurement method. Compared with the prior art, the beneficial effects of the linear motion axis micro-dynamic posture error measurement device provided by the present application are the same as the beneficial effects of the linear motion axis micro-dynamic posture error measurement method provided by the above-mentioned embodiment, and the other technical features in the linear motion axis micro-dynamic posture error measurement device are the same as the features disclosed in the method of the previous embodiment, which will not be repeated here.

[0063] It should be understood that the various parts disclosed in this application can be implemented by hardware, software, firmware or a combination thereof. In the description of the above embodiments, specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.

[0064] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

[0065] The present application provides a computer-readable storage medium having computer-readable program instructions (ie, computer programs) stored thereon, and the computer-readable program instructions are used to execute the linear motion axis micro-dynamic posture error measurement method in the above-mentioned embodiment.

[0066] The computer-readable storage medium provided in the present application may be, for example, a USB flash drive, but is not limited to electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, systems or devices, or any combination of the above. More specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM: Random Access Memory), a read-only memory (ROM: Read Only Memory), an erasable programmable read-only memory (EPROM: Erasable Programmable Read Only Memory or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM: CD-Read Only Memory), an optical storage device, a magnetic storage device, or any suitable combination of the above. In this embodiment, the computer-readable storage medium may be any tangible medium containing or storing a program, which may be used by or in combination with an instruction execution system, system or device. The program code contained on the computer-readable storage medium may be transmitted using any appropriate medium, including but not limited to: wires, optical cables, RF (Radio Frequency: Radio Frequency), etc., or any suitable combination of the above.

[0067] The computer-readable storage medium may be included in the linear motion axis micro-dynamic posture error measurement device; or may exist independently without being assembled into the linear motion axis micro-dynamic posture error measurement device.

[0068] The above-mentioned computer-readable storage medium carries one or more programs. When the above-mentioned one or more programs are executed by the linear motion axis micro-dynamic posture error measurement device, the linear motion axis micro-dynamic posture error measurement device: drives the mover to perform point-to-point movement along the linear motion axis, and uses the visual component on the mover to shoot the markers on the first calibration plate and the second calibration plate at each point, so as to obtain a first image of the first calibration plate corresponding to each point and a second image of the second calibration plate corresponding to each point; wherein the markers are arranged at intervals along the axial direction parallel to the linear motion axis; processes the first image and the second image to obtain the relative position information between the visual component and the first calibration plate and the second calibration plate at each point; processes the relative position information and combines it with curve fitting to obtain the attitude angle error and offset position error corresponding to any position of the mover on the linear motion axis.

[0069] Computer program code for performing the operations of the present application may be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages ​​such as Java, Smalltalk, C++, and conventional procedural programming languages ​​such as "C" or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, as a separate software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0070] The flow chart and block diagram in the accompanying drawings illustrate the possible architecture, function and operation of the system, method and computer program product according to various embodiments of the present application. In this regard, each square box in the flow chart or block diagram can represent a module, a program segment or a part of a code, and the module, the program segment or a part of the code contains one or more executable instructions for realizing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the square box can also occur in a sequence different from that marked in the accompanying drawings. For example, two square boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each square box in the block diagram and / or flow chart, and the combination of the square boxes in the block diagram and / or flow chart can be implemented with a dedicated hardware-based system that performs a specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.

[0071] The modules involved in the embodiments described in this application may be implemented by software or hardware, wherein the name of the module does not constitute a limitation on the unit itself in some cases.

[0072] The readable storage medium provided by the present application is a computer-readable storage medium, which stores computer-readable program instructions (i.e., computer programs) for executing the above-mentioned linear motion axis micro-dynamic posture error measurement method, and can solve the technical problem of high cost of measuring instruments required by the existing linear motion axis micro-dynamic posture error measurement method. Compared with the prior art, the beneficial effects of the computer-readable storage medium provided by the present application are the same as the beneficial effects of the linear motion axis micro-dynamic posture error measurement method provided by the above-mentioned embodiment, and will not be repeated here.

[0073] The present application also provides a computer program product, including a computer program, which, when executed by a processor, implements the steps of the above-mentioned method for measuring the microscopic dynamic posture error of a linear motion axis.

[0074] The computer program product provided by the present application can solve the technical problem of the high cost of the measuring instruments required by the existing linear motion axis micro-dynamic posture error measurement method. Compared with the prior art, the beneficial effects of the computer program product provided by the present application are the same as the beneficial effects of the linear motion axis micro-dynamic posture error measurement method provided by the above embodiment, and will not be repeated here.

[0075] The above descriptions are only some embodiments of the present application, and are not intended to limit the patent scope of the present application. All equivalent structural changes made using the contents of the present application specification and drawings under the technical concept of the present application, or direct / indirect applications in other related technical fields are included in the patent protection scope of the present application.

Claims

1. A method for measuring microscopic dynamic posture error of a linear motion axis, characterized in that: Applied to a linear motion shaft, a first calibration plate and a second calibration plate are arranged around the linear motion shaft, and an angle exists between the first calibration plate and the second calibration plate; a movable mover is installed on the linear motion shaft; The method comprises: The mover is driven to perform point-to-point motion along the linear motion axis, and at each point, the visual component on the mover is used to photograph the markers on the first calibration plate and the second calibration plate, so as to obtain a first image corresponding to the first calibration plate and a second image corresponding to the second calibration plate at each point; wherein the markers are arranged at intervals along the axial direction parallel to the linear motion axis; Processing the first image and the second image to obtain relative position information between the visual component and the first calibration plate and the second calibration plate at each point; The relative position information is processed and combined with curve fitting to obtain the attitude angle error and offset position error corresponding to any position of the mover on the linear motion axis.

2. The method according to claim 1, characterized in that The marker is a two-dimensional code, and the two-dimensional code contains coding information corresponding to the row and column number of the two-dimensional code; The visual component includes a plurality of first cameras and second cameras. The first cameras capture the first images, and the second cameras capture the second images.

3. The method according to claim 2, characterized in that The step of processing the first image and the second image to obtain relative position information between the visual component and the first calibration plate and the second calibration plate at each point includes: Parsing the two-dimensional codes in the first image and the second image to obtain a first row and column number and a second row and column number; Based on the first row and column numbers and the second row and column numbers, determining a first position of the first camera relative to the first calibration plate and a second position of the second camera relative to the second calibration plate; The first position and the second position are combined into the relative position information.

4. The method according to claim 3, characterized in that The step of determining a first position of the first camera relative to the first calibration plate and a second position of the second camera relative to the second calibration plate based on the first row and column number and the second row and column number comprises: Calculate, based on a visual algorithm, a first relative distance between the two-dimensional code in the first image and an image reference point; Combining the first relative distance and the position corresponding to the first row and column number, obtaining a first position of the first camera relative to the first calibration plate; Calculate, based on a visual algorithm, a second relative distance between the two-dimensional code in the second image and an image reference point; The second relative distance and the position corresponding to the second row and column number are combined to obtain a second position of the second camera relative to the second calibration plate.

5. The method according to claim 1, characterized in that The step of processing the relative position information and combining it with curve fitting to obtain the attitude angle error and offset position error corresponding to any position of the mover on the linear motion axis includes: Based on the relative position information and the positional relationship between the visual component and the mover, calculating the posture parameters and offset position parameters of the mover at each point; Fitting a motion state change curve based on the posture parameter and the offset position parameter, and drawing a motion state change curve graph; Based on the motion state change curve and the motion state change curve diagram, the attitude angle error and the offset position error corresponding to any position of the mover on the linear motion axis are obtained.

6. The method according to any one of claims 1 to 5, characterized in that The interval between two adjacent points is consistent with the interval between two adjacent markers.

7. The method according to claim 2, characterized in that The visual component includes at least three of the first cameras and at least three of the second cameras; at least three of the first cameras are arranged in an array, and at least three of the second cameras are arranged in an array; the two-dimensional codes are arranged in an array on the first calibration plate and the second calibration plate, respectively, and each row of the two-dimensional codes is parallel to the axial direction of the linear motion axis; And / or, the visual component further includes a first light source and a second light source, the first light source is irradiated in a direction toward the first calibration plate, and the second light source is irradiated in a direction toward the second calibration plate.

8. A linear motion axis micro-dynamic posture error measurement device, characterized in that: The linear motion axis microscopic dynamic posture error measurement device comprises: The first calibration plate; A second calibration plate, wherein the second calibration plate and the first calibration plate are arranged around the linear motion axis, an angle is formed between the second calibration plate and the first calibration plate, and markers are arranged on both the second calibration plate and the first calibration plate, and the markers are arranged at intervals along a direction parallel to the axial direction of the linear motion axis; A mover, the mover is mounted on the linear motion shaft; the mover is used to move along the axial direction of the linear motion shaft; A visual component, the visual component is mounted on the mover, and the visual component is used to photograph the markers located on the first calibration plate and the second calibration plate; A controller, wherein the controller is communicatively connected to the linear motion axis and the visual component respectively; the controller is used to execute the steps of the linear motion axis micro-dynamic posture error measurement method as described in any one of claims 1 to 7.

9. A storage medium, characterized in that: The storage medium is a computer-readable storage medium, and a computer program is stored on the storage medium. When the computer program is executed by a processor, the steps of the linear motion axis micro-dynamic posture error measurement method according to any one of claims 1 to 7 are implemented.

10. A computer program product, characterized in that The computer program product comprises a computer program, and when the computer program is executed by a processor, the steps of the method for measuring the microscopic dynamic posture error of a linear motion axis according to any one of claims 1 to 7 are implemented.

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