Filtering device

Abstract

The invention provides a filtering device. The filtering device comprises a first shell, a second shell, a filtering piece and an ultrasonic transducer. Wherein the second shell is arranged in the first shell, and the second shell and the first shell are arranged at an interval; the filtering piece is arranged in the second shell; the ultrasonic transducer is arranged in the first shell and is in transmission connection with the second shell. The filter can solve the problems of high cleaning difficulty and long cleaning time of the filter when the filter screen is detached for cleaning.

Description

Technical Field

[0001] The present application relates to the technical field of silicon powder filtration, and in particular to a filtration device. Background Art

[0002] In the production of polysilicon, the chlorosilane liquid contains silicon powder. In order to avoid damage to the pump that transports the chlorosilane liquid, a filter is needed to filter the chlorosilane liquid to block the silicon powder in the chlorosilane liquid.

[0003] Silica powder is intercepted in the filter. As the filter runs longer, the silica powder will clog the filter screen. Therefore, the filter screen needs to be removed to clean the silica powder attached to the filter screen.

[0004] In the related art, the filter is disassembled for cleaning, but there are problems that the filter is difficult to clean and the cleaning time is long. Summary of the invention

[0005] The present application provides a filtering device for solving the problem that the filter needs to be removed for cleaning, but the cleaning of the filter is difficult and takes a long time.

[0006] The present application provides a filtering device, comprising:

[0007] a first shell;

[0008] The second shell is disposed in the first shell and is spaced apart from the first shell;

[0009] A filter element is disposed in the second housing;

[0010] The ultrasonic transducer is arranged in the first shell and is transmission-connected with the second shell.

[0011] It can be understood that the first shell is used to protect the second shell, the filter element and the ultrasonic transducer to extend the service life of the filter device and improve the safety performance of the filter device. The second shell is used to contain the liquid to be filtered. The filter element is used to filter the solid impurities in the liquid to be filtered. The ultrasonic transducer is used to convert the electrical power input to the ultrasonic transducer into mechanical power, that is, ultrasonic waves, and then transmit it out. The ultrasonic transducer is connected to the second shell in a transmission manner, so that the ultrasonic waves can be transmitted to the second shell. The cavitation effect generated by the ultrasonic waves in the second shell in the liquid causes the tiny bubbles in the liquid in the second shell to explode and generate impact force through high-frequency vibration, so that the solid impurities on the surface of the filter element fall off into the cleaning liquid. There is no need to disassemble the filter element for cleaning. While simplifying the cleaning steps, the cleaning time can be shortened, thereby reducing the difficulty of cleaning the filter device.

[0012] In a feasible implementation, it also includes:

[0013] The ultrasonic generator is disposed in the first housing and is conductively connected to the ultrasonic transducer;

[0014] A horn, one end of which is connected to the ultrasonic transducer, and the other end of which is connected to the second shell.

[0015] It can be understood that the ultrasonic generator is used to convert electrical energy into a high-frequency alternating current signal that matches the ultrasonic transducer. The horn is used to amplify the mechanical power of the ultrasonic transducer and transmit it to the second housing.

[0016] In a feasible implementation, it also includes:

[0017] The support member is connected to the second shell, and the filter member is connected to the second shell through the support member.

[0018] It can be understood that the support member is used to improve the connection strength between the filter element and the second shell, so as to improve the connection stability of the filter element and to provide safety protection for the filter device.

[0019] In a feasible embodiment, the second shell has a first opening and a second opening, and the first opening and the second opening are connected through the second shell;

[0020] The first opening is used for externally connecting to an input flow channel, and the input flow channel is disposed through the first shell;

[0021] The second opening is used for externally connecting to the first output flow channel, and the first output flow channel is disposed through the first shell.

[0022] It can be understood that the input flow channel is used to transport the liquid to be filtered to the first opening, and then transport it to the interior of the second shell after passing through the first opening. The second opening is used to discharge solid impurities in the second shell to the first output flow channel to reduce the volume of solid impurities in the second shell, and the solid impurities in the second shell can be discharged to the first output flow channel without opening the second shell, so as to reduce the difficulty of cleaning the second shell and shorten the cleaning time of the second shell.

[0023] In a feasible embodiment, the second shell has a third opening, and the third opening and the first opening are connected through the second shell;

[0024] The third opening is used for externally connecting to the second output flow channel; the second output flow channel is arranged through the first shell.

[0025] It can be understood that the third opening is used to guide the filtered liquid in the second shell to the second output channel, so that the solid impurities and liquid in the liquid to be filtered are separated, thereby completing the separation of solid impurities and liquid in the liquid to be filtered.

[0026] In a feasible implementation, along the height direction of the first housing, the highest position of the filter element is arranged higher than the highest position of the first opening;

[0027] Along the height direction of the first shell, the highest position of the first opening is arranged higher than the highest position of the third opening.

[0028] It is understandable that the highest position of the filter screen is higher than the highest position of the first opening, which can reduce the occurrence of liquid or solid impurities in the turbid liquid area splashing into the clear liquid area during ultrasonic vibration, thereby reducing the occurrence of solid impurities entering the clear liquid area, thereby reducing the occurrence of solid impurities entering the third opening. The highest position of the first opening is higher than the highest position of the third opening, which can reduce the volume of liquid in the clear liquid area, thereby facilitating the discharge of liquid in the clear liquid area to the external environment.

[0029] In a feasible implementation, it also includes:

[0030] A stamping pipe is arranged through the first shell and is connected with the second shell, and the stamping pipe is used for connecting to an external gas source;

[0031] The tail gas discharge pipe passes through the first shell and is communicated with the second shell. The tail gas discharge pipe is used for external connection to the next process.

[0032] It is understandable that the stamping pipe is used to spray gas toward the second shell so that the gas can enter the second shell and be guided to the tail gas exhaust pipe. The stamping pipe sprays gas toward the second shell, which will increase the pressure inside the second shell, thereby reducing the difficulty of conveying solid impurities through the first output flow channel to improve the extraction efficiency of solid impurities. The tail gas exhaust pipe can guide the gasified liquid or the sprayed gas to the next process to improve the filtering efficiency of the filtering device.

[0033] In a feasible implementation, it also includes:

[0034] The circulation channel is arranged in the first shell and is used for connecting an external cooling medium.

[0035] It is understandable that the cooling medium flows along the arrangement direction of the circulation channel to cool the first shell, thereby reducing the surface temperature of the filter device to extend the service life of the filter device. At the same time, it can avoid the internal overpressure of the second shell caused by the gasification of the chlorosilane liquid in the second shell during the ultrasonic process, thereby ensuring the smooth operation of the ultrasonic process.

[0036] In a feasible implementation, the circulation channel is spirally arranged in the first shell;

[0037] The circulation channel has a water inlet and a water outlet, and along the height direction of the first shell, the water outlet is located above the water inlet.

[0038] It can be understood that the circulation channel is spirally arranged in the first shell, and the outer peripheral wall of the first shell can be circulated to reduce the surface temperature of the first shell. The ultrasonic transducer is arranged in the first shell, the second shell is located above the ultrasonic transducer, and the water outlet is located above the water inlet, so that the water in the circulation channel can flow from the bottom of the first shell to the top of the first shell, thereby reducing the surface temperature of the first shell.

[0039] In a feasible implementation manner, the second shell has a first arcuate surface, the filter element has a second arcuate surface, and the first arcuate surface and the second arcuate surface are arranged in coordination.

[0040] It can be understood that the first shell and the second shell are connected by the first curved surface and the second curved surface, so that the filter element in the second shell can vibrate at high frequency along the longitudinal direction with the ultrasonic transformer. The curvature radius is beneficial to reduce the dispersion of the vibration frequency and also facilitates the transmission of ultrasonic waves to the interior of the second shell. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0042] Figure 1 The first schematic diagram of the main structure of the filtering device provided in the embodiment of the present application;

[0043] Figure 2 The second schematic diagram of the main structure of the filtering device provided in the embodiment of the present application;

[0044] Figure 3 The embodiments of the present application provide Figure 2 Sectional view of section AA;

[0045] Figure 4 A schematic diagram of a connection structure between a second housing and a filter element provided in an embodiment of the present application;

[0046] Figure 5 The second schematic diagram of the connection structure between the second housing and the filter element provided in the embodiment of the present application;

[0047] Figure 6 The embodiments of the present application provide Figure 5 Sectional view of the middle BB section;

[0048] Figure 7 The third schematic diagram of the main structure of the filtering device provided in the embodiment of the present application;

[0049] Figure 8 The fourth schematic diagram of the main structure of the filtering device provided in the embodiment of the present application;

[0050] Fig. 9 The embodiments of the present application provide Figure 8 Cross-sectional view of section CC.

[0051] Description of reference numerals:

[0052] 100-first housing;

[0053] 200 - second shell; 201 - first opening; 202 - second opening; 203 - input flow channel; 204 - first output flow channel; 205 - third opening; 206 - second output flow channel; 207 - first arc surface;

[0054] 300-filter element; 301-second arc-shaped surface;

[0055] 400-ultrasonic transducer; 401-ultrasonic generator; 402-horn;

[0056] 500-supporting member;

[0057] 600- stamping tube;

[0058] 700-exhaust pipe;

[0059] 800-circulating flow channel; 801-water inlet; 802-water outlet.

[0060] The above drawings have shown clear embodiments of the present application, which will be described in more detail later. These drawings and text descriptions are not intended to limit the scope of the present application in any way, but to illustrate the concept of the present application to those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0061] In order to enable those skilled in the art to better understand the scheme of the present invention, the present invention is further described in detail below. The specific implementation methods listed below are only for describing the principles and features of the present invention. The examples are only used to explain the present invention and are not intended to limit the scope of the present invention. Based on the embodiments of the present invention, all other implementation methods obtained by ordinary technicians in the field without creative work are within the scope of protection of the present invention.

[0062] The first shell provided in the embodiment of the present application is used to protect the second shell, the filter element and the ultrasonic transducer to extend the service life of the filter device and improve the safety performance of the filter device. The second shell is used to contain the liquid to be filtered. The filter element is used to filter the solid impurities in the liquid to be filtered. The ultrasonic transducer is used to convert the electrical power input to the ultrasonic transducer into mechanical power, that is, ultrasonic waves, and then transmit it out. The ultrasonic transducer is connected to the second shell in a transmission manner, so that the ultrasonic waves can be transmitted to the second shell. The cavitation effect generated by the ultrasonic waves in the second shell in the liquid causes the tiny bubbles in the liquid in the second shell to explode and generate impact force through high-frequency vibration, so that the solid impurities on the surface of the filter element fall off into the cleaning liquid. There is no need to disassemble the filter element for cleaning. While simplifying the cleaning steps, the cleaning time can be shortened, thereby reducing the difficulty of cleaning the filter device.

[0063] It should be noted that the liquid in the second shell can be a mixture of one or more of the liquid to be filtered or the cleaning liquid.

[0064] like Figure 1 As shown, the filtering device provided in the embodiment of the present application includes: a first housing 100, a second housing 200, a filter element 300 and an ultrasonic transducer 400. The second housing 200 is disposed in the first housing 100 and is spaced apart from the first housing 100; the filter element 300 is disposed in the second housing 200; and the ultrasonic transducer 400 is disposed in the first housing 100 and is transmission-connected to the second housing 200.

[0065] like Figure 2 and Figure 3 As shown, it should be noted that the filter element 300 includes a filter plate and filter holes, the filter holes are used to guide the flow of liquid in the liquid to be filtered, and the filter plate is used to block the flow of solid impurities in the liquid to be filtered.

[0066] like Figure 4 As shown, it can be understood that the filter element 300 is disposed in the second housing 200, and the second housing 200 can be divided into a clear liquid area and a turbid liquid area. The chlorosilane liquid in the liquid to be filtered enters the clear liquid area after passing through the filter hole, and the silicon powder in the liquid to be filtered is blocked by the filter plate to the turbid liquid area.

[0067] The filtering device provided in the embodiment of the present application also includes: an ultrasonic generator 401 and a horn 402, the ultrasonic generator 401 is arranged in the first shell 100 and is conductively connected to the ultrasonic transducer 400; one end of the horn 402 is connected to the ultrasonic transducer 400, and the other end of the horn 402 is connected to the second shell 200.

[0068] It is understandable that the ultrasonic generator 401 is used to convert electrical energy into a high-frequency alternating current signal that matches the ultrasonic transducer 400. The horn 402 is used to amplify the mechanical power of the ultrasonic transducer 400 and transmit it to the second housing 200.

[0069] like Figure 5 and Figure 6 As shown, the filter device provided in the embodiment of the present application further includes: a support member 500 , the support member 500 is connected to the second shell 200 , and the filter element 300 is connected to the inside of the second shell 200 through the support member 500 .

[0070] It can be understood that the support member 500 is used to improve the connection strength between the filter element 300 and the second shell 200, so as to improve the connection stability of the filter element 300 and to provide safety protection for the filter device.

[0071] It should be noted that the support member 500 has a variety of different configurations, and the configurations of the support member 500 are described below in turn with examples.

[0072] In a feasible implementation manner, the support member 500 may be a support frame, the filter element 300 is passed through the support frame, and the support frame is connected to the second shell 200 .

[0073] It can be understood that the provision of the support frame can support the filter element 300 and has the advantage of easy installation.

[0074] In another feasible implementation manner, the support member 500 may be a support rod, one end of the support rod is connected to the filter element 300 , and the other end of the support rod is connected to the second shell 200 .

[0075] It can be understood that the support rod is used to limit the relative movement between the second housing 200 and the filter element 300 to improve the connection stability of the filter element 300, thereby improving the safety and stability of the filter device.

[0076] It is understandable that there is no limitation on the configuration of the support member 500 , and it can be selected according to actual use requirements, as long as the support member 500 can be connected to the filter element 300 and the second shell 200 .

[0077] The second shell 200 provided in the embodiment of the present application has a first opening 201 and a second opening 202. The first opening 201 and the second opening 202 are connected through the second shell 200. The first opening 201 is used for an external input channel 203, and the input channel 203 is disposed in the first shell 100. The second opening 202 is used for an external first output channel 204, and the first output channel 204 is disposed in the first shell 100.

[0078] It can be understood that the input channel 203 is used to transport the liquid to be filtered to the first opening 201, and then transport it to the interior of the second shell 200 after passing through the first opening 201. The second opening 202 is used to export solid impurities in the second shell 200 to the first output channel 204 to reduce the volume of solid impurities in the second shell 200, and the solid impurities in the second shell 200 can be exported to the first output channel 204 without opening the second shell 200, so as to reduce the difficulty of cleaning the second shell 200 and shorten the cleaning time of the second shell 200.

[0079] It should be noted that the first opening 201 and the second opening 202 are respectively connected to the turbid liquid area, so that the solid impurities in the liquid to be filtered flowing into the turbid liquid area from the first opening 201 can be deposited at the bottom of the turbid liquid area under the action of gravity. The solid impurities deposited in the turbid liquid area can be guided to the first output channel 204 after passing through the second opening 202, so as to reduce the volume of the solid impurities in the turbid liquid area.

[0080] The second shell 200 provided in the embodiment of the present application has a third opening 205 , and the third opening 205 is connected to the first opening 201 through the second shell 200 ; the third opening 205 is used to externally connect to the second output channel 206 , and the second output channel 206 is disposed through the first shell 100 .

[0081] It is understandable that the third opening 205 is used to guide the filtered liquid in the second shell 200 to the second output channel 206 to separate the solid impurities and liquid in the liquid to be filtered, thereby completing the separation of solid impurities and liquid in the liquid to be filtered.

[0082] It should be noted that the first opening 201 , the turbid liquid area, the clear liquid area and the third opening 205 are connected, and the third opening 205 is provided in the clear liquid area to guide the liquid in the clear liquid area to the second output channel 206 .

[0083] It should be noted that, along the height direction of the first shell 100 , the highest position of the filter element 300 is higher than the highest position of the first opening 201 , and along the height direction of the first shell 100 , the highest position of the first opening 201 is higher than the highest position of the third opening 205 .

[0084] It is understandable that the highest position of the filter element 300 is higher than the highest position of the first opening 201, which can reduce the occurrence of liquid or solid impurities in the turbid liquid area being splashed to the clear liquid area during ultrasonic vibration, thereby reducing the occurrence of solid impurities entering the clear liquid area, and reducing the occurrence of solid impurities entering the third opening 205. The highest position of the first opening 201 is higher than the highest position of the third opening 205, which can reduce the volume of the liquid in the clear liquid area, thereby facilitating the discharge of the liquid in the clear liquid area to the external environment.

[0085] It should be noted that the second opening 202 is disposed at the bottom of the second shell 200 , which can reduce the difficulty of transporting solid impurities in the turbid liquid area through the second opening 202 into the first output channel 204 and reduce the volume of solid impurities deposited in the turbid liquid area.

[0086] The filter device provided in the embodiment of the present application further includes: a stamping pipe 600 and an exhaust gas discharge pipe 700. The stamping pipe 600 is provided through the first shell 100 and communicated with the second shell 200, and the stamping pipe 600 is used to connect to an external gas source; the exhaust gas discharge pipe 700 is provided through the first shell 100 and communicated with the second shell 200, and the exhaust gas discharge pipe 700 is used to connect to the next process.

[0087] It is understandable that the stamping tube 600 is used to spray gas toward the second shell 200 so that the gas can enter the second shell 200 and be guided to the tail gas exhaust pipe 700. The stamping tube 600 sprays gas toward the second shell 200, which will increase the pressure inside the second shell 200, thereby reducing the difficulty of transporting solid impurities through the first output flow channel 204, so as to improve the extraction efficiency of solid impurities. The tail gas exhaust pipe 700 can lead the gasified liquid or the sprayed gas to the next process to improve the filtering efficiency of the filtering device.

[0088] It should be noted that, when the ultrasonic transducer 400 is in use, heat is generated to vaporize part of the liquid in the second shell 200 , and the exhaust pipe 700 can discharge the vaporized gas.

[0089] It should be noted that there are many different ways to set up the injection gas, and the ways to set up the injection gas are described below with examples one by one.

[0090] In a feasible embodiment, the injection gas may be nitrogen, which enters the second shell 200 after passing through the stamping tube 600. The nitrogen entering the second shell 200 will increase the internal air pressure of the second shell 200, so that the solid impurities in the second shell 200 can be transported to the first output flow channel 204 under the impetus of the air pressure in the second shell 200.

[0091] It is understandable that the nitrogen will not chemically react with the liquid in the second shell 200, thereby improving the safety performance of the filter device. Nitrogen has the advantage of low cost, which can reduce the use cost of the filter device.

[0092] In another feasible embodiment, the injection gas may be an inert gas, which enters the second shell 200 after passing through the stamping tube 600. The inert gas entering the second shell 200 will increase the internal air pressure of the second shell 200, so that the solid impurities in the second shell 200 can be transported to the first output channel 204 under the impetus of the air pressure in the second shell 200.

[0093] It is understandable that the provision of the inert gas will not chemically react with the liquid in the second shell 200, thereby improving the safety performance of the filtering device.

[0094] It is understandable that there is no limitation on the specific configuration of the injection gas, and it can be selected according to actual use requirements, as long as it is ensured that the injection gas does not chemically react with the liquid in the second shell 200 .

[0095] like Figure 7 As shown, the filtering device provided in the embodiment of the present application includes: a circulating flow channel 800, which is arranged in the first shell 100 and is used for connecting an external cooling medium.

[0096] like Figure 8 and Fig. 9 As shown, it can be understood that the cooling medium flows along the arrangement direction of the circulation channel 800 to cool the first shell 100, thereby reducing the surface temperature of the filter device to extend the service life of the filter device. At the same time, it can avoid the chlorosilane liquid in the second shell 200 being vaporized during the ultrasonic process, resulting in an internal overpressure of the second shell 200, thereby ensuring the smooth operation of the ultrasonic process.

[0097] It should be noted that the ultrasonic transducer 400 generates heat when in operation, and the generated heat is conducted to the first housing 100 , thereby increasing the surface temperature of the first housing 100 .

[0098] It should be noted that the circulation channel 800 has a variety of different arrangement directions. The following will illustrate the arrangement methods of the circulation channel 800 in turn.

[0099] In a feasible implementation, the circulation channel 800 is spirally arranged in the first shell 100 , and the circulation channel 800 has a water inlet 801 and a water outlet 802 . Along the height direction of the first shell 100 , the water outlet 802 is located above the water inlet 801 .

[0100] It can be understood that the circulation channel 800 is spirally arranged in the first shell 100, and the outer peripheral wall of the first shell 100 can be circulated to reduce the surface temperature of the first shell 100. The ultrasonic transducer 400 is arranged in the first shell 100, the second shell 200 is located above the ultrasonic transducer 400, and the water outlet 802 is located above the water inlet 801, so that the water in the circulation channel 800 can flow from the bottom of the first shell 100 to the top of the first shell 100, thereby reducing the surface temperature of the first shell 100.

[0101] In another feasible implementation, the circulation channel 800 is disposed in the first shell 100 , and the circulation channel 800 has a water inlet 801 and a water outlet 802 . Along the height direction of the first shell 100 , the water outlet 802 is located above the water inlet 801 .

[0102] It can be understood that the ultrasonic transducer 400 is arranged in the first shell 100, the second shell 200 is located above the ultrasonic transducer 400, and the water outlet 802 is located above the water inlet 801, so that the water in the circulation channel 800 can flow from the bottom of the first shell 100 to the top of the first shell 100, thereby reducing the surface temperature of the first shell 100.

[0103] It is understandable that there is no limitation on the configuration of the circulation channel 800, and it can be selected according to actual usage requirements.

[0104] It should be noted that, when the circulation channel 800 is spirally arranged in the first shell 100, along the height direction of the first shell 100, the arrangement gap of the circulation channel 800 relatively close to the bottom of the first shell 100 may be smaller than the arrangement gap of the circulation channel 800 relatively close to the top of the first shell 100.

[0105] It should be noted that the arrangement gap may be an installation gap between the upper circulation channel 800 and the lower circulation channel 800 on the outer peripheral wall of the first shell 100 and along the height direction of the first shell 100 .

[0106] It is understandable that reducing the arrangement gap relative to the circulation channel 800 near the bottom of the first shell 100 can increase the length of the cooling channel below the first shell 100, thereby improving the cooling efficiency of the first shell 100 and improving the cooling efficiency of the filtering device.

[0107] It should be noted that there are many different ways to set the cooling medium. The following examples will be used to illustrate the ways to set the cooling medium.

[0108] In a feasible implementation manner, the cooling medium is water, and the water enters the circulation channel 800 through the water inlet 801 and is discharged to the outside through the water outlet 802 .

[0109] It should be noted that the initial temperature of the water entering the water inlet 801 is 7°C to 25°C, so that the temperature of the water is lower than the temperature of the first shell 100, thereby cooling the first shell 100. When the temperature of the first shell 100 is reduced, the surface temperature of the second shell 200 is higher than the surface temperature of the first shell 100, and heat exchange occurs between the first shell 100 and the second shell 200, so that the temperature of the second shell 200 can be reduced to cool the second shell 200.

[0110] In another feasible implementation manner, the cooling medium is polyvinyl alcohol, which enters the circulation channel 800 through the water inlet 801 and is discharged to the outside through the water outlet 802 .

[0111] It is understandable that there is no restriction on the setting method of the cooling medium, and it can be selected according to actual usage requirements.

[0112] The second shell 200 provided in the embodiment of the present application has a first arcuate surface 207 , and the filter element 300 has a second arcuate surface 301 . The first arcuate surface 207 and the second arcuate surface 301 are arranged in coordination.

[0113] It can be understood that the first shell 100 and the second shell 200 are connected by the first curved surface 207 and the second curved surface 301, so that the filter element 300 in the second shell 200 can vibrate at high frequency along the longitudinal direction with the ultrasonic transformer 402. The radius of curvature is beneficial to reducing the dispersion of the vibration frequency and also facilitates the transmission of ultrasonic waves to the interior of the second shell 200.

[0114] Those skilled in the art will readily appreciate other embodiments of the present application after considering the specification and practicing the invention disclosed herein. The present application is intended to cover any modification, use or adaptation of the present application, which follows the general principles of the present application and includes common knowledge or customary techniques in the art that are not disclosed in the present application. The specification and examples are intended to be exemplary only, and the true scope and spirit of the present application are indicated by the following claims.

[0115] It should be understood that the present application is not limited to the precise structures that have been described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof. The scope of the present application is limited only by the appended claims.

Claims

1. A filtering device, characterized in that: include: A first housing (100); A second shell (200) is disposed inside the first shell (100) and is spaced apart from the first shell (100); A filter element (300) is disposed in the second housing (200); The ultrasonic transducer (400) is disposed in the first shell (100) and is transmission-connected to the second shell (200).

2. A filtering device according to claim 1, characterized in that: Also includes: An ultrasonic generator (401) is disposed in the first housing (100) and is conductively connected to the ultrasonic transducer (400); A horn (402), one end of the horn (402) is connected to the ultrasonic transducer (400), and the other end of the horn (402) is connected to the second shell (200).

3. A filtering device according to claim 1, characterized in that: Also includes: The support member (500) is connected to the second shell (200), and the filter element (300) is connected to the inside of the second shell (200) through the support member (500).

4. A filtering device according to any one of claims 1 to 3, characterized in that: The second shell (200) has a first opening (201) and a second opening (202), and the first opening (201) and the second opening (202) are connected through the second shell (200); The first opening (201) is used to connect to an external input flow channel (203), and the input flow channel (203) is disposed through the first shell (100); The second opening (202) is used to externally connect to a first output flow channel (204), and the first output flow channel (204) is disposed through the first shell (100).

5. A filtering device according to claim 4, characterized in that: The second shell (200) has a third opening (205), and the third opening (205) and the first opening (201) are in communication with each other through the second shell (200); The third opening (205) is used to externally connect to a second output flow channel (206); the second output flow channel (206) is disposed through the first shell (100).

6. A filtering device according to claim 5, characterized in that: Along the height direction of the first housing (100), the highest position of the filter element (300) is arranged higher than the highest position of the first opening (201); Along the height direction of the first shell (100), the highest position of the first opening (201) is arranged higher than the highest position of the third opening (205).

7. A filtering device according to any one of claims 1 to 3, characterized in that: Also includes: A stamping pipe (600) is provided through the first shell (100) and is in communication with the second shell (200), and the stamping pipe (600) is used to connect to an external gas source; An exhaust gas discharge pipe (700) passes through the first shell (100) and is in communication with the second shell (200). The exhaust gas discharge pipe (700) is used to be externally connected to the next process.

8. A filtering device according to any one of claims 1 to 3, characterized in that: Also includes: A circulation channel (800) is provided in the first shell (100), and the circulation channel (800) is used for connecting an external cooling medium.

9. A filtering device according to claim 8, characterized in that: The circulation channel (800) is arranged in the first shell (100) in a spiral ring shape; The circulation channel (800) has a water inlet (801) and a water outlet (802), and along the height direction of the first shell (100), the water outlet (802) is located above the water inlet (801).

10. A filtering device according to any one of claims 1 to 3, characterized in that: The second shell (200) has a first arcuate surface (207), the filter element (300) has a second arcuate surface (301), and the first arcuate surface (207) and the second arcuate surface (301) are arranged in coordination.

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