Ionization decomposition air type vacuum pumping device

Abstract

The present invention relates to the field of vacuum suction, and in particular to an ionization decomposition air type vacuum pump. It includes a vacuum pump, and also includes: a decomposition unit, connected to the vacuum pump, including a transfer mechanism, a decomposition mechanism and a plurality of capillaries, the decomposition mechanism is arranged beside the vacuum pump, the decomposition mechanism includes a spiral pipe, one end of the spiral pipe is connected to the input end of the vacuum pump, the transfer mechanism is arranged on the side of the spiral pipe away from the vacuum pump, the transfer mechanism includes a connecting cone, the small end of the connecting cone is connected to the other end of the spiral pipe, and a plurality of capillaries are arranged in an array at equal angles along the circumferential direction of the large end of the connecting cone; an ionization mechanism, connected to the connecting cone, including a conical electric field, a filter screen and a plurality of cleaning brushes, the conical electric field is arranged at one end of the connecting cone away from the spiral pipe, the large end of the conical electric field is connected to the connecting cone, the filter screen is coaxially fixed with the small end of the conical electric field, and a plurality of cleaning brushes are arranged in a circumferential array rotationally beside the filter screen and against the filter screen.

Description

Technical Field

[0001] The invention relates to the field of vacuum suction, and in particular to an ionization decomposition air type vacuum pumping device. Background Art

[0002] With the continuous improvement of the level of industrial automation, the performance stability and measurement accuracy of pressure transmitters as key components in industrial automation systems are crucial to the operation of the entire system. Especially in high-precision and high-demand measurement environments, traditional vacuum pumps often cannot meet the needs of fast, efficient and accurate vacuum pumping. Take the traditional vacuum mechanical pump as an example, because its pumping speed is relatively slow and difficult to accurately control. When a high vacuum degree needs to be reached quickly, its pumping efficiency cannot meet the requirements. For example, in the semiconductor manufacturing process, the reaction chamber needs to be pumped to an extremely high vacuum degree in a short time, and the pumping speed of traditional mechanical pumps is far behind the production rhythm.

[0003] At the same time, many traditional vacuum pumps have limited ultimate vacuum, making it difficult to achieve the ultra-high vacuum required for high-precision measurement environments. For example, the ultimate vacuum of some common mechanical pumps is usually between tens of Pa and hundreds of Pa, which cannot meet the vacuum requirements of high-end manufacturing and other fields. -3 Pa or even lower requirements. If all the gas cannot be effectively extracted, the corresponding test data will be affected during the precision testing of some parts or materials.

[0004] Therefore, the present invention proposes an ionization decomposition air type vacuum pumping device, aiming to solve the problems in the prior art and improve the measurement accuracy and stability of vacuum pumping. Summary of the invention

[0005] Based on this, it is necessary to provide an ionization decomposition air type vacuum pumping device to address the existing technical problems.

[0006] In order to solve the problems of the prior art, the technical solution adopted by the present invention is:

[0007] An ionization decomposition air type vacuum pumping device, comprising a vacuum pump arranged above a workbench, and further comprising:

[0008] The decomposition unit is connected to the vacuum pump, and includes a transfer mechanism, a decomposition mechanism and a plurality of capillaries. The decomposition mechanism is arranged beside the vacuum pump, and the decomposition mechanism includes a spiral pipe, one end of which is connected to the input end of the vacuum pump, and the transfer mechanism is arranged on the side of the spiral pipe away from the vacuum pump. The transfer mechanism includes a connecting cone, and the small end of the connecting cone is connected to the other end of the spiral pipe. The plurality of capillaries are arranged in an array at equal angles along the circumferential direction of the large end of the connecting cone;

[0009] The ionization mechanism is connected to the connecting cone, and includes a conical electric field, a filter and a plurality of cleaning brushes. The conical electric field is arranged at the end of the connecting cone away from the spiral pipe, the large end of the conical electric field is connected to the connecting cone, the filter is coaxially fixed to the small end of the conical electric field, and a plurality of cleaning brushes are rotatably arranged in a circular array beside the filter and against the filter.

[0010] Furthermore, the conical electric field also includes a conical shell, a needle-shaped electrode and a plurality of annular electrodes. The conical shell is fixedly arranged on the side of the connecting cone away from the spiral pipe through a bracket. The needle-shaped electrode is fixedly connected to the small end of the conical shell and electrically connected to the positive pole of the high-voltage power supply. The plurality of annular electrodes are arranged in order from small to large in diameter along the inner side of the conical shell, and the annular electrodes are fixedly connected to the conical shell.

[0011] Furthermore, the ionization mechanism also includes a bellows, one end of which is fixedly connected to the conical shell, and the other end of which is fixedly connected to the connecting cone.

[0012] Furthermore, the transfer mechanism also includes a transfer frame and two damping rods. The transfer frame is rotatably connected to the connecting cone. The two damping rods are respectively arranged at the lower end of the transfer frame. The upper end of the damping rod is fixedly connected to the transfer frame, and the lower end is fixedly connected to the workbench.

[0013] Furthermore, the decomposition unit also includes a flexible tube and a positioning frame, one end of the flexible tube is coaxially rotatably connected to the spiral pipe, and the other end is connected to the input end of the vacuum pump. The positioning frame is fixedly connected to the workbench and to the lower end of the vacuum pump.

[0014] Furthermore, the decomposition mechanism also includes a central rotating disk, which is coaxially fixedly connected to the large end of the connecting cone, and a plurality of capillaries are arranged in an array at equal angles along the circumferential direction of the central rotating disk.

[0015] Furthermore, the ionization mechanism also includes a grid, a cleaning motor, a cleaning gear, a reduction gear, a cleaning gear ring and a plurality of bevel gear frames. The grid is fixedly connected to the small end of the conical shell through a disc, the cleaning motor is fixedly connected to the end of the grid away from the conical shell, the cleaning gear is rotatably connected to the grid and coaxially fixed to the output end of the cleaning motor, the reduction gear is rotatably connected to the grid and meshes with the cleaning gear, the cleaning gear ring is rotatably connected to the grid and meshes with the reduction gear, and a plurality of bevel gear frames are arranged in an array at equal angles along the circumferential direction of the cleaning gear ring, one end of the bevel gear frame is fixedly connected to the cleaning gear ring, and the other end is rotatably connected to the corresponding cleaning brush.

[0016] Furthermore, the ionization mechanism also includes a positioning gear ring, a plurality of driving gears, a plurality of main bevel teeth and a plurality of secondary bevel teeth. The positioning gear ring is coaxially arranged with the cleaning gear ring and is fixedly connected to the grid. The plurality of driving gears are respectively rotatably connected with the plurality of bevel gear racks. The plurality of driving gears are respectively meshed with the cleaning gear ring. The plurality of main bevel teeth are respectively rotatably connected with the plurality of bevel gear racks and are coaxially fixedly connected with the corresponding driving gears. The plurality of secondary bevel teeth are respectively rotatably connected with the plurality of bevel gear racks and meshed with the corresponding main bevel teeth. The plurality of secondary bevel teeth are respectively coaxially fixedly connected with the plurality of cleaning brushes.

[0017] Furthermore, the decomposition mechanism also includes a driving motor, a turning frame, a bearing, a bearing round frame, a frame, two first pulleys, two second pulleys, two driven pulleys, four tensioning pulleys, two bearing brackets, two bearing round frames, two main toothed discs and two main gears. The bearing round frame is fixedly sleeved on the outside of the spiral pipe, the turning frame is rotatably connected to the bearing round frame through the bearing, the turning frame is respectively fixedly connected to the two bearing brackets, the turning frame is fixedly connected to the upper end of the transfer frame through a pad, the two bearing brackets are respectively rotatably connected to the two ends of the bearing round frame, and the two main toothed discs are respectively connected to the bearing round frame. The two ends of the frame are coaxially fixedly connected, the two main gears are respectively meshed with the two main toothed discs and are rotatably connected to the corresponding bearing brackets, the two driven pulleys are respectively coaxially fixedly connected to the two main gears, the two first pulleys are respectively rotatably connected to the upper end of the frame, the two second pulleys are respectively rotatably connected to the lower end of the frame, a tensioning pulley is rotatably arranged on both sides of each driven pulley, the first pulley, the second pulley, the driven pulley and the two tensioning pulleys located on the same side of the frame are connected through belt transmission, the driving motor is fixedly connected to the frame and the output end is coaxially fixedly connected to the two first pulleys.

[0018] Furthermore, the decomposition mechanism also includes a main pulley, a secondary pulley, two cams, two tightening sleeves and two tightening rods. The main pulley is rotatably arranged at the lower part of the frame through a wheel seat and is coaxially fixed with the two second pulleys, the secondary pulley is rotatably arranged at the bottom of the flip frame through the wheel seat, the secondary pulley is connected to the main pulley transmission through a belt, one cam is rotatably arranged at the lower end of the flip frame through the wheel seat and is abutted against the flip frame, the other cam is rotatably arranged at the lower end of the intermediate frame through the wheel seat and is abutted against the intermediate frame, the two cams are coaxially fixed, the cam arranged at the lower end of the flip frame is coaxially fixedly connected with the secondary pulley, the two tightening sleeves are respectively fixedly connected to the two sides of the flip frame, the two tightening rods are respectively slidably connected to the two tightening sleeves through tension springs, and the two tightening rods are respectively fixedly connected to the frame.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] First, the device ionizes the air through a conical electric field attached by high-voltage electricity. When the air is drawn into the conical shell through the needle-shaped electrode, the high-voltage power supply applies a high voltage through the needle-shaped electrode. At this time, due to the tip effect, a high-intensity electric field is generated around the needle-shaped electrode to ionize the air, and the electric field lines start from the needle-shaped electrode and radiate to the surrounding annular electrodes. Since the potential of the annular electrode gradually decreases from the inside to the outside, the electric field lines will gradually spread from the small end of the conical shell to the large end along the direction of the potential decrease. This structure is similar to an electric field distribution system that spreads from the center to the outside, which can effectively guide ions and electrons to move in the direction close to the spiral pipe, thereby increasing the speed of vacuumization;

[0021] Second: This device ionizes the air into ions and electrons, and then extracts them through the spiral pipe. During this process, the ions and electrons in the plasma have high energy and activity. They will collide frequently with other gas molecules, making it easier for the gas molecules to be extracted by the vacuum pump. This collision increases the movement speed and diffusion rate of the gas molecules, thereby speeding up the exhaust process and improving the exhaust efficiency. At the same time, for some gases that are difficult to be extracted by conventional vacuum methods, such as rare gases, after ionization, the gas molecules of such gases have stronger chemical activity and physical properties, making them easier to be processed and extracted under the action of electromagnetic fields, etc., reducing the content of residual gas and further improving the quality of vacuum;

[0022] Third: This device filters the gas that needs to be ionized by setting a filter to ensure that the gas entering the vacuum pump is purer, reducing the impact of impurity gases on the vacuum degree. At the same time, when the vacuum pump handles pure gas, it can extract it more effectively, making it easier to achieve a higher vacuum degree and meet the needs of high-precision and high-demand vacuum environments. At the same time, the filter can effectively intercept solid particles, dust, impurities, etc. in the gas to prevent these substances from entering the vacuum equipment and affecting other components. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a schematic diagram of the three-dimensional structure of an embodiment;

[0024] Figure 2 is a three-dimensional structural schematic diagram of the embodiment from another angle;

[0025] Figure 3 is a top view of an embodiment;

[0026] Figure 4 yes Figure 3 Half-section view of the structure plane at AA in the middle;

[0027] Figure 5 yes Figure 3 A three-dimensional half-section view of the structure at AA in the middle;

[0028] Figure 6 yes Figure 5 A magnified view of the structure at B in the middle;

[0029] Figure 7 yes Figure 5 A magnified view of the structure at C in the middle;

[0030] Figure 8 yes Figure 5 A magnified view of the structure at D in the middle;

[0031] Fig. 9 is a three-dimensional structural schematic diagram of the decomposition mechanism in the embodiment;

[0032] Fig.10 yes Fig. 9 Enlarged view of the structure at E in the middle;

[0033] Fig.11 is a schematic diagram of the three-dimensional structure of several cleaning brushes in the embodiment;

[0034] Fig.12 It is a schematic diagram of the three-dimensional structure decomposition of several cleaning brushes in the embodiment.

[0035] The numbers in the figure are:

[0036] 1. Ionization mechanism; 2. Conical electric field; 3. Ring electrode; 4. Needle electrode; 5. Conical shell; 6. Corrugated cover; 7. Filter; 8. Grid; 9. Cleaning brush; 10. Cleaning motor; 11. Cleaning gear; 12. Reduction gear; 13. Cleaning gear ring; 15. Driving gear; 16. Positioning gear ring; 17. Main bevel gear; 18. Secondary bevel gear; 19. Bevel gear rack; 20. Decomposition unit; 21. Transfer mechanism; 22. Transfer plate; 23. Connecting cone; 24. Transfer rack; 25. Damping rod; 26 , capillary; 27, decomposition mechanism; 28, spiral pipe; 29, driving motor; 30, frame; 31, bearing; 32, turning frame; 33, first pulley; 34, second pulley; 35, driven pulley; 36, tensioning pulley; 37, bearing bracket; 38, bearing round frame; 39, main gear plate; 40, main gear; 41, main pulley; 42, secondary pulley; 43, cam; 44, tightening sleeve; 45, tightening rod; 46, vacuum pump; 47, flexible tube; 48, positioning frame; 49, workbench. DETAILED DESCRIPTION

[0037] In order to further understand the features, technical means, specific objectives and functions of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0038] refer to Figures 1 to 12 , an ionization decomposition air type vacuum pumping device, including a vacuum pump 46 arranged above a workbench 49, and also including:

[0039] The decomposition unit 20 is connected to the vacuum pump 46 and includes a transfer mechanism 21, a decomposition mechanism 27 and a plurality of capillaries 26. The decomposition mechanism 27 is arranged beside the vacuum pump 46. The decomposition mechanism 27 includes a spiral pipe 28. One end of the spiral pipe 28 is connected to the input end of the vacuum pump 46 (such as Figure 4 As shown in FIG. 1 , the transfer mechanism 21 is arranged on the side of the spiral pipe 28 away from the vacuum pump 46, and the transfer mechanism 21 includes a connecting cone 23, the small end of the connecting cone 23 is connected to the other end of the spiral pipe 28, and a plurality of capillaries 26 are arranged in an array at equal angles along the circumferential direction of the large end of the connecting cone 23;

[0040] The ionization mechanism 1 is connected to the connecting cone 23, and includes a conical electric field 2, a filter 7 and a plurality of cleaning brushes 9. The conical electric field 2 is arranged at one end of the connecting cone 23 away from the spiral pipe 28. The large end of the conical electric field 2 is connected to the connecting cone 23. The filter 7 is coaxially fixed to the small end of the conical electric field 2. A plurality of cleaning brushes 9 are rotatably arranged on the side of the filter 7 and are against the filter 7.

[0041] When the device is in operation, the vacuum pump 46 starts to draw air through the conical electric field 2. During this process, the conical electric field 2 ionizes the air into ions and electrons, which then pass through a number of capillaries 26 and move into the spiral pipe 28. The ions and electrons that move into the spiral pipe 28 collide with molecules in the air and are further decomposed into smaller molecules or atoms, thereby effectively reducing the pressure in the system. During this process, the spiral pipe 28 rotates around its own axis, thereby increasing the frequency of collisions between ions and electrons and molecules in the air. At the same time, the filter 7 is used to intercept small particles of impurities in the air to avoid affecting the ionization process.

[0042] In order to supplement the specific structure of the conical electric field 2, the following features are also specifically set:

[0043] The conical electric field 2 further comprises a conical shell 5, a needle electrode 4 and a plurality of annular electrodes 3. The conical shell 5 is fixedly arranged on the side of the connecting cone 23 away from the spiral pipe 28 by a bracket (refer to Figure 5 and Figure 6), the needle-shaped electrode 4 is fixedly connected to the small end of the conical shell 5 and is electrically connected to the positive pole of the high-voltage power supply. A plurality of annular electrodes 3 are arranged in order from small to large along the inner side of the conical shell 5, and the annular electrode 3 is fixedly connected to the conical shell 5. When the air is drawn into the conical shell 5 through the needle-shaped electrode 4, the high-voltage power supply will apply a high voltage through the needle-shaped electrode 4. At this time, due to the tip effect, a high-intensity electric field will be generated around the needle-shaped electrode 4, ionizing the air, and the electric field lines will radiate from the needle-shaped electrode 4 to the surrounding annular electrodes 3. Since the potential of the annular electrode 3 gradually decreases from the inside to the outside, the electric field lines will gradually diffuse from the small end to the large end of the conical shell 5 in the direction of the potential decrease. This structure is similar to an electric field distribution system that diffuses from the center to the outside, and can effectively guide ions and electrons to move in the direction close to the spiral pipe 28.

[0044] In order to ensure that the electrons and ions inside the conical housing 5 can move to the inside of the spiral pipe 28 through the capillaries 26 when the spiral pipe 28 moves, the following features are also specifically provided:

[0045] The ionization mechanism 1 further includes a bellows 6, one end of which is fixedly connected to the conical housing 5 (refer to Figure 7 ), and the other end is fixedly connected to the connecting cone 23. When the spiral pipe 28 moves, since the conical shell 5 remains fixed, the spiral pipe 28 will move relative to the conical shell 5. At this time, the bellows 6 can ensure that the conical shell 5 and the spiral pipe 28 are always connected, thereby preventing ions and electrons from passing through the capillaries 26 and moving into the spiral pipe 28.

[0046] In order to install a plurality of capillaries 26, the following features are also specifically provided:

[0047] The transfer mechanism 21 also includes a transfer frame 24 and two damping rods 25. The transfer frame 24 is rotatably connected to the connecting cone 23 (refer to Figure 7 ), two damping rods 25 are respectively arranged at the lower end of the intermediate transfer frame 24, and the upper end of the damping rod 25 is fixedly connected to the intermediate transfer frame 24 (refer to Figure 2 ), the lower end of which is fixedly connected to the workbench 49. When the spiral pipe 28 moves, the spiral pipe 28 drives the connecting cone 23 to rotate, and when the connecting cone 23 rotates, the capillaries 26 are driven to rotate along the center direction of the connecting cone 23. In this process, the damping rod 25 is used to reduce the movement of the capillaries 26 during the movement to prevent the capillaries 26 from affecting their guiding effect on ions and electrons.

[0048] In order to facilitate the communication between the vacuum pump 46 and the moving spiral pipe 28, the following features are also specifically provided:

[0049] The decomposition unit 20 further includes a flexible tube 47 and a positioning frame 48. One end of the flexible tube 47 is coaxially connected to the spiral pipe 28 for rotation, and the other end is connected to the input end of the vacuum pump 46. The positioning frame 48 is fixedly connected to the workbench 49 and to the lower end of the vacuum pump 46. After the vacuum pump 46 is started, the vacuum pump 46 will extract the ionized electrons and ions through the spiral pipe 28. However, since the spiral pipe 28 is in motion, the flexible tube 47 is used to connect the outlets of the vacuum pump 46 and the spiral pipe 28 to prevent the vacuum pump 46 and the spiral pipe 28 from being unable to communicate.

[0050] In order to install a plurality of capillaries 26, the following features are also specifically provided:

[0051] The decomposition mechanism 27 also includes a central rotating disk 22, which is coaxially connected to the large end of the connecting cone 23 (refer to Figure 7 ), a plurality of capillaries 26 are arranged in an array at equal angles along the circumference of the middle rotating disk 22. When the connecting cone 23 rotates, the connecting cone 23 drives the plurality of capillaries 26 to rotate through the middle rotating disk 22, ensuring that the plurality of capillaries 26 increase the contact frequency with electrons and ions during the rotation process, thereby improving the guiding rate of the plurality of capillaries 26 to ions and electrons.

[0052] In order to drive the cleaning brushes 9 to rotate in the circumferential direction, the following features are also specifically provided:

[0053] The ionization mechanism 1 also includes a grid frame 8, a cleaning motor 10, a cleaning gear 11, a reduction gear 12, a cleaning gear ring 13 and a plurality of bevel gear racks 19. The grid frame 8 is fixedly connected to the small end of the conical housing 5 through a disc (refer to Figure 6 , Fig.11 and Fig.12 ), the cleaning motor 10 is fixedly connected to one end of the grid 8 away from the conical housing 5, the cleaning gear 11 is rotationally connected to the grid 8 and is coaxially fixed to the output end of the cleaning motor 10, the reduction gear 12 is rotationally connected to the grid 8 and meshes with the cleaning gear 11, the cleaning gear ring 13 is rotationally connected to the grid 8 and meshes with the reduction gear 12, and a number of bevel gear racks 19 are arranged in an array at equal angles along the circumferential direction of the cleaning gear ring 13, one end of the bevel gear rack 19 is fixedly connected to the cleaning gear ring 13, and the other end is rotationally connected to the corresponding cleaning brush 9. After the cleaning motor 10 is started, the cleaning motor 10 will drive the reduction gear 12 to rotate through the cleaning gear 11, and the reduction gear 12 will drive the bevel gear racks 19 to move through the cleaning gear ring 13. After the movement of the bevel gear racks 19, the cleaning brushes 9 will be driven to rotate along the circumferential direction of the cleaning gear ring 13, thereby achieving continuous cleaning of the filter 7.

[0054] In order to realize that when the cleaning brushes 9 rotate along the circumferential direction of the cleaning gear ring 13, the cleaning brushes 9 can also rotate along their own axis direction, the following features are specifically provided:

[0055] The ionization mechanism 1 also includes a positioning gear ring 16, a plurality of driving gears 15, a plurality of main bevel teeth 17 and a plurality of secondary bevel teeth 18. The positioning gear ring 16 is coaxially arranged with the cleaning gear ring 13 and is fixedly connected to the grid 8. The plurality of driving gears 15 are rotatably connected with the plurality of bevel gear racks 19, respectively. The plurality of driving gears 15 are respectively meshed with the cleaning gear ring 13. The plurality of main bevel teeth 17 are respectively rotatably connected with the plurality of bevel gear racks 19 and are coaxially fixedly connected with the corresponding driving gears 15. The plurality of secondary bevel teeth 18 are respectively rotatably connected with the plurality of bevel gear racks 19 and mesh with the corresponding main bevel teeth 17. The plurality of secondary bevel teeth 18 are respectively coaxially fixedly connected with the plurality of cleaning brushes 9. When the cleaning brushes 9 rotate along the circumferential direction of the cleaning gear ring 13, the bevel gear racks 19 will drive the driving gears 15 to mesh with the positioning gear ring 16, and then the driving gear 15 will drive the secondary bevel gears 18 to rotate through the main bevel gears 17, and the secondary bevel gears 18 will drive the cleaning brushes 9 to rotate. During the rotation of the cleaning brushes 9, the impurities attached to the filter screen 7 will be brushed to avoid affecting the subsequent air ionization effect.

[0056] In order to drive the spiral pipe 28 to rotate around its own axis, the following features are also specifically provided:

[0057] The decomposition mechanism 27 also includes a driving motor 29, a turning frame 32, a bearing 31, a bearing frame 38, a frame 30, two first pulleys 33, two second pulleys 34, two driven pulleys 35, four tension pulleys 36, two bearing brackets 37, two bearing frames 38, two main toothed discs 39 and two main gears 40. The bearing frame 38 is fixedly sleeved on the outside of the spiral pipe 28 (refer to Fig. 9 and Fig.10 ), the flip frame 32 is rotatably connected to the supporting circular frame 38 through the bearing 31 (such as Figure 8As shown in the figure, the turning frame 32 is respectively connected to the two bearing brackets 37, and the turning frame 32 is respectively connected to the upper end of the transfer frame 24 through a pad. The two bearing brackets 37 are respectively connected to the two ends of the bearing circular frame 38 for rotation. The two main toothed discs 39 are respectively connected to the two ends of the bearing circular frame 38 coaxially. The two main gears 40 are respectively meshed with the two main toothed discs 39 and are connected to the corresponding bearing brackets 37 for rotation. The two driven pulleys 35 are respectively connected to the two main gears 40 coaxially. The two first pulleys 33 are respectively connected to the upper end of the frame 30 for rotation. The two second pulleys 34 are respectively connected to the lower end of the frame 30 for rotation. A tensioning pulley 36 is rotatably provided on both sides of each driven pulley 35. The first pulley 33, the second pulley 34, the driven pulley 35 and the two tensioning pulleys 36 on the same side of the frame 30 are connected by belt transmission. The drive motor 29 is connected to the frame 30 and the output end is connected to the two first pulleys 33 coaxially. After the driving motor 29 is started, the driving motor 29 will drive the two driven pulleys 35 to rotate through the two first pulleys 33, and the two driven pulleys 35 will drive the two main toothed discs 39 to rotate through the two main gears 40. After the two main toothed discs 39 rotate, they will drive the bearing round frame 38 fixed thereto to rotate. During the rotation of the bearing round frame 38, the spiral pipe 28 will be driven to rotate. When the spiral pipe 28 rotates, the ions, electrons and air molecules inside the spiral pipe 28 will be affected by the centrifugal force, thereby further increasing the degree of mixing and the probability of collision between them. The selection of the rotation speed should be comprehensively determined based on factors such as the movement speed of ions and electrons, the flow rate of air molecules and the size of the spiral pipe 28. Generally speaking, the rotation speed can be between tens and hundreds of revolutions per minute. For example, for a spiral pipe 28 with a diameter of ten centimeters, the rotation speed can be adjusted between fifty and two hundred revolutions per minute to achieve the best mixing and collision effect.

[0058] In order to achieve that the spiral pipe 28 can further increase the collision probability of ions, electrons and air molecules by vibration during the rotation process, the following features are specifically set:

[0059] The decomposition mechanism 27 also includes a primary pulley 41, a secondary pulley 42, two cams 43, two abutting sleeves 44 and two abutting inserts 45. The primary pulley 41 is rotatably disposed at the lower part of the frame 30 through a wheel seat and is coaxially fixedly connected to the two secondary pulleys 34 (refer to Fig. 9 ), the secondary pulley 42 is rotatably arranged below the flip frame 32 through the wheel seat, the secondary pulley 42 is connected to the primary pulley 41 through a belt, and a cam 43 is rotatably arranged at the lower end of the flip frame 32 through the wheel seat and abuts against the flip frame 32 (refer to Figure 8 ), another cam 43 is rotatably disposed at the lower end of the intermediate rotating frame 24 through a wheel seat and abuts against the intermediate rotating frame 24 (refer to Figure 4), the two cams 43 are coaxially fixedly connected, the cam 43 arranged at the lower end of the flip frame 32 is coaxially fixedly connected to the secondary pulley 42, the two tightening sleeves 44 are respectively fixedly connected to the two sides of the flip frame 32, the two tightening rods 45 are respectively slidably connected to the two tightening sleeves 44 through tension springs, and the two tightening rods 45 are respectively fixedly connected to the frame 30. When the two second pulleys 34 rotate, the two second pulleys 34 will drive the secondary pulleys 42 to rotate through the main pulley 41, and the secondary pulley 42 will drive the two cams 43 to rotate. When the two cams 43 rotate, they will respectively push the transfer frame 24 and the flip frame 32 to reciprocate in the vertical direction (in this process, the tight sleeve 44 and the tight plug rod 45 will undergo relative displacement, and then reset under the action of the tension spring, and the damping rod 25 is used to ensure the stability of the connecting cone 23). As can be seen from the above, when the driven pulley 35 reciprocates in the vertical direction, the two tensioning pulleys 36 set beside the driven pulley 35 can ensure that the belt and the driven pulley 35 remain taut. When the flip frame 32 reciprocates in the vertical direction, as can be seen from the above, at this time, since the spiral pipe 28 will also rotate, the ions, electrons and air molecules inside the spiral pipe 28 will be mixed more fully and evenly, further improving the mixing effect.

[0060] The working principle of the device is that when the device is in operation, the vacuum pump 46 starts to draw air through the conical electric field 2, and when the air is drawn into the conical shell 5 through the needle electrode 4, the high voltage power supply applies a high voltage through the needle electrode 4. At this time, due to the tip effect, a high-intensity electric field is generated around the needle electrode 4, ionizing the air, and the electric field lines start from the needle electrode 4 and radiate to the surrounding annular electrode 3. Since the potential of the annular electrode 3 gradually decreases from the inside to the outside, the electric field lines will gradually diffuse from the small end of the conical shell 5 to the large end along the direction of the potential decrease. This structure is similar to an electric field distribution system that diffuses from the center to the outside, and can effectively guide ions and electrons to move in the direction close to the spiral pipe 28. Then, the ions and electrons will pass through a number of capillaries 26 and move into the spiral pipe 28, and the ions and electrons that move into the spiral pipe 28 will collide with molecules in the air and further decompose into smaller molecules or atoms, thereby effectively reducing the pressure in the system. During this process, the driving motor 29 will drive the spiral pipe 28 to rotate after it is started, and the spiral pipe 28 will also reciprocate in the vertical direction during the rotation. At this time, the frequency of collision between ions and electrons in the spiral pipe 28 and molecules in the air increases.

[0061] The filter 7 is used to intercept small particles of impurities in the air to avoid affecting the ionization process. During the operation of the device, after the cleaning motor 10 is started, it will drive several cleaning brushes 9 to clean the filter 7 to avoid impurities clogging the filter 7 and affecting the vacuum efficiency.

[0062] The above embodiments only express one or several implementation modes of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present invention. It should be pointed out that, for a person of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention patent shall be subject to the attached claims.

Claims

1. An ionization decomposition air type vacuum pumping device, comprising a vacuum pump (46) arranged above a workbench (49), characterized in that: Also includes: The decomposition unit (20) is connected to the vacuum pump (46), and comprises a transfer mechanism (21), a decomposition mechanism (27) and a plurality of capillaries (26). The decomposition mechanism (27) is arranged beside the vacuum pump (46). The decomposition mechanism (27) comprises a spiral pipe (28). One end of the spiral pipe (28) is connected to the input end of the vacuum pump (46). The transfer mechanism (21) is arranged on a side of the spiral pipe (28) away from the vacuum pump (46). The transfer mechanism (21) comprises a connecting cone (23). The small end of the connecting cone (23) is connected to the other end of the spiral pipe (28). The plurality of capillaries (26) are arranged in an array at equal angles along the circumferential direction of the large end of the connecting cone (23). The ionization mechanism (1) is connected to the connecting cone (23), and comprises a conical electric field (2), a filter (7) and a plurality of cleaning brushes (9). The conical electric field (2) is arranged at an end of the connecting cone (23) away from the spiral pipe (28). The large end of the conical electric field (2) is connected to the connecting cone (23). The filter (7) is coaxially fixedly connected to the small end of the conical electric field (2). The plurality of cleaning brushes (9) are arranged in a circular array and rotated beside the filter (7) and abut against the filter (7). The conical electric field (2) further comprises a conical shell (5), a needle-shaped electrode (4) and a plurality of annular electrodes (3); the conical shell (5) is fixedly arranged on a side of the connecting cone (23) away from the spiral pipe (28) by a bracket; the needle-shaped electrode (4) is fixedly connected to the small end of the conical shell (5) and electrically connected to the positive electrode of the high-voltage power supply; the plurality of annular electrodes (3) are arranged in order from small to large in diameter along the inner side of the conical shell (5); and the annular electrode (3) is fixedly connected to the conical shell (5); The ionization mechanism (1) further comprises a bellows (6), one end of the bellows (6) being fixedly connected to the conical housing (5), and the other end of the bellows (6) being fixedly connected to the connecting cone (23).

2. The ionization decomposition air type vacuum pumping device according to claim 1, characterized in that: The transfer mechanism (21) further comprises a transfer frame (24) and two damping rods (25). The transfer frame (24) is rotatably connected to the connecting cone (23). The two damping rods (25) are respectively arranged at the lower end of the transfer frame (24). The upper end of the damping rod (25) is fixedly connected to the transfer frame (24), and the lower end is fixedly connected to the workbench (49).

3. The ionization decomposition air type vacuum pumping device according to claim 1, characterized in that: The decomposition unit (20) further comprises a flexible tube (47) and a positioning frame (48); one end of the flexible tube (47) is coaxially rotatably connected to the spiral pipe (28), and the other end is communicated with an input end of the vacuum pump (46); the positioning frame (48) is fixedly connected to the workbench (49) and to the lower end of the vacuum pump (46).

4. The ionization decomposition air type vacuum pumping device according to claim 1, characterized in that: The decomposition mechanism (27) further comprises a central rotating disk (22), the central rotating disk (22) being coaxially fixedly connected to the large end of the connecting cone (23), and a plurality of capillaries (26) being arranged in an array at equal angles along the circumferential direction of the central rotating disk (22).

5. The ionization decomposition air type vacuum pumping device according to claim 1, characterized in that: The ionization mechanism (1) further comprises a grid frame (8), a cleaning motor (10), a cleaning gear (11), a reduction gear (12), a cleaning gear ring (13) and a plurality of bevel gear racks (19); the grid frame (8) is fixedly connected to the small end of the conical housing (5) via a disc; the cleaning motor (10) is fixedly connected to one end of the grid frame (8) away from the conical housing (5); the cleaning gear (11) is rotationally connected to the grid frame (8) and is coaxially fixedly connected to the output end of the cleaning motor (10); the reduction gear (12) is rotationally connected to the grid frame (8) and meshes with the cleaning gear (11); the cleaning gear ring (13) is rotationally connected to the grid frame (8) and meshes with the reduction gear (12); a plurality of bevel gear racks (19) are arranged in an array at equal angles along the circumferential direction of the cleaning gear ring (13); one end of the bevel gear rack (19) is fixedly connected to the cleaning gear ring (13) and the other end is rotationally connected to a corresponding cleaning brush (9).

6. The ionization decomposition air type vacuum pumping device according to claim 5, characterized in that: The ionization mechanism (1) further comprises a positioning gear ring (16), a plurality of driving gears (15), a plurality of main bevel teeth (17) and a plurality of secondary bevel teeth (18); the positioning gear ring (16) is coaxially arranged with the cleaning gear ring (13) and is fixedly connected to the grid frame (8); the plurality of driving gears (15) are respectively rotatably connected to the plurality of bevel gear racks (19); the plurality of driving gears (15) are respectively meshed with the cleaning gear ring (13); the plurality of main bevel teeth (17) are respectively rotatably connected to the plurality of bevel gear racks (19) and are coaxially fixedly connected to the corresponding driving gears (15); the plurality of secondary bevel teeth (18) are respectively rotatably connected to the plurality of bevel gear racks (19) and are meshed with the corresponding main bevel teeth (17); and the plurality of secondary bevel teeth (18) are respectively coaxially fixedly connected to the plurality of cleaning brushes (9).

7. The ionization decomposition air type vacuum pumping device according to claim 2, characterized in that: The decomposition mechanism (27) further comprises a driving motor (29), a turning frame (32), a bearing (31), a bearing round frame (38), a frame (30), two first pulleys (33), two second pulleys (34), two driven pulleys (35), four tensioning pulleys (36), two bearing brackets (37), two bearing round frames (38), two main toothed discs (39) and two main gears (40). The bearing round frame (38) is fixedly sleeved on the outside of the spiral pipe (28). The turning frame (32) is rotatably connected to the bearing round frame (38) via the bearing (31). The turning frame (32) is respectively fixedly connected to the two bearing brackets (37). The turning frame (32) is fixedly connected to the upper end of the intermediate transfer frame (24) via a pad. The two bearing brackets (37) are respectively rotatably connected to the two ends of the bearing round frame (38). The two main toothed discs ( The two main gears (40) are respectively meshed with the two main toothed discs (39) and are rotatably connected to the corresponding supporting brackets (37). The two driven pulleys (35) are respectively coaxially connected to the two main gears (40). The two first pulleys (33) are respectively rotatably connected to the upper end of the frame (30). The two second pulleys (34) are respectively rotatably connected to the lower end of the frame (30). A tensioning pulley (36) is rotatably provided on both sides of each driven pulley (35). The first pulley (33), the second pulley (34), the driven pulley (35) and the two tensioning pulleys (36) located on the same side of the frame (30) are connected through belt transmission. The driving motor (29) is fixedly connected to the frame (30) and the output end is coaxially fixedly connected to the two first pulleys (33).

8. The ionization decomposition air type vacuum pumping device according to claim 7, characterized in that: The decomposition mechanism (27) further comprises a main pulley (41), a secondary pulley (42), two cams (43), two abutting sleeves (44) and two abutting insert rods (45); the main pulley (41) is rotatably arranged at the lower part of the frame (30) through a wheel seat and is coaxially fixedly connected to the two second pulleys (34); the secondary pulley (42) is rotatably arranged below the turning frame (32) through a wheel seat; the secondary pulley (42) is transmission-connected to the main pulley (41) through a belt; a cam (43) is rotatably arranged at the lower end of the turning frame (32) through a wheel seat and is coaxially fixedly connected to the two second pulleys (34); The turning frame (32) is abutted against the turning frame (32); another cam (43) is rotatably arranged at the lower end of the intermediate rotating frame (24) through a wheel seat and abuts against the intermediate rotating frame (24); the two cams (43) are coaxially fixedly connected; the cam (43) arranged at the lower end of the turning frame (32) is coaxially fixedly connected to the secondary pulley (42); the two abutting sleeves (44) are respectively fixedly connected to the two sides of the turning frame (32); the two abutting insert rods (45) are respectively coaxially slidably connected to the two abutting sleeves (44) through tension springs; and the two abutting insert rods (45) are respectively fixedly connected to the frame (30).

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