Sample support for cracking sample in vacuum and method for cracking sample in vacuum

Abstract

The invention discloses a sample support for cracking a sample in vacuum and a method for cracking the sample in vacuum. The sample support for cracking the sample in vacuum comprises a first support body, a second support body and a third support body, the first support body is provided with a first bearing surface for bearing a sample, the first bearing surface is provided with a mounting groove and a first clamping piece, and the first clamping piece is matched with the first bearing surface to clamp the sample; and the second support body is provided with a second bearing surface for bearing the sample, the second bearing surface is provided with a second clamping piece, and the second clamping piece is matched with the second bearing surface to clamp the sample. According to the device, a sample can be split in vacuum, and the sample can be fixed on the two support bodies respectively, so that the subsequent step of respectively treating the same sample is facilitated.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum equipment, and in particular relates to a sample holder for cracking a sample in a vacuum and a method for cracking a sample in a vacuum. Background Art

[0002] The vacuum environment provides a clean space without atmospheric pollution and low gas pressure, which helps to avoid impurity incorporation and oxidation reactions during material growth, thereby obtaining purer and higher quality materials, especially for the manufacture of semiconductor devices, solar cells and various sensors, by precisely controlling deposition parameters, thin films with specific thickness, composition and structure can be obtained. In addition, in a vacuum, the surface of the material can maintain its original state without interference from external gas molecules, allowing researchers to more accurately study the surface properties of the material, including surface structure, electronic state and chemical activity.

[0003] Samples in a vacuum often need to be fixed on a special sample holder, such as a flag-shaped sample holder. A sample on the sample holder can only choose one process for subsequent processing. Due to the lack of samples grown in the same environment, it is impossible to change the conditions to set up a control group, and it is impossible to achieve efficient use of samples, which limits human beings' deeper understanding of materials. If samples grown in a vacuum environment are to be processed and studied separately, the vacuum needs to be removed for cracking, but pollutants in the air will affect the surface of the sample.

[0004] The information disclosed in this background technology section is only intended to enhance the understanding of the overall background of the invention and should not be regarded as an acknowledgment or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art. Summary of the invention

[0005] The object of the present invention is to provide a sample holder for cracking samples in vacuum and a method for cracking samples in vacuum, which can crack the sample in vacuum and fix the sample on two holders respectively, so as to facilitate the subsequent steps of separately processing the same sample.

[0006] In order to achieve the above object, a specific embodiment of the present invention provides a technical solution as follows: a sample holder for lysing a sample in a vacuum, comprising:

[0007] A first support body, which has a first bearing surface for bearing the sample, wherein the first bearing surface is provided with a mounting groove and a first clamping member, and the first clamping member cooperates with the first bearing surface to clamp the sample;

[0008] A second bracket, wherein the second bracket has a second bearing surface for bearing the sample, a second clamping member is disposed on the second bearing surface, and the second clamping member cooperates with the second bearing surface to clamp the sample;

[0009] The third support body;

[0010] Wherein, in the first state, the second bracket is installed on the installation slot, and the first bearing surface and the second bearing surface are located in the same plane;

[0011] In the second state, the second bracket is installed on the third bracket.

[0012] In one or more embodiments of the present invention, the first bracket includes a protrusion disposed on the first bearing surface, and a portion of the protrusion is disposed on the installation groove and covers a portion of the installation groove.

[0013] In one or more embodiments of the present invention, a limiting groove is provided on the third bracket, and in the second state, the second bracket is installed on the limiting groove.

[0014] In one or more embodiments of the present invention, a third clamping member is disposed on the third bracket, and in the second state, the second bracket is clamped between the limiting groove and the third clamping member.

[0015] In one or more embodiments of the present invention, in the second state, the third clamping member is partially covered on the limiting groove and covers a portion of the limiting groove.

[0016] In one or more embodiments of the present invention, the third clamping member is provided with an avoidance groove, and in the second state, the second bracket is clamped between the limiting groove and the third clamping member, and a portion of the second clamping member is located in the avoidance groove.

[0017] In one or more embodiments of the present invention, the third clamping member has a mounting surface, the avoidance groove is arranged on the mounting surface, and a limiting portion is provided on an end of the third clamping member away from the avoidance groove. In the second state, the limiting portion abuts against a portion of the third clamping member located on the side of the mounting surface.

[0018] In one or more embodiments of the present invention, the third clamping member is detachably mounted on the third bracket.

[0019] In one or more embodiments of the present invention, the first clamping member is detachably mounted on the first bracket; and / or,

[0020] The second clamping member is detachably mounted on the second bracket.

[0021] A specific embodiment of the present invention further provides a method for cracking a sample in a vacuum, using the sample holder for cracking a sample in a vacuum as described above, the method for cracking a sample in a vacuum comprising:

[0022] Installing the second bracket on the first bracket, and fixing the sample on the first bearing surface and the second bearing surface;

[0023] Material growth is performed on the sample in a vacuum environment;

[0024] In a vacuum environment, cutting the sample with the material grown thereon, the cutting position being the boundary between the first supporting surface and the second supporting surface, and splitting the sample with the material grown thereon into a first sub-sample disposed on the first support body and a second sub-sample disposed on the second support body;

[0025] In a vacuum environment, the second support body carrying the second sub-sample is removed from the first support body, and the second support body carrying the second sub-sample is installed on the third support body.

[0026] Compared with the prior art, the sample holder for cracking samples in a vacuum and the method for cracking samples in a vacuum of the present invention, by first installing the second holder on the first holder, and fixing the sample on the first holder and the second holder, conduct a material growth experiment in a vacuum environment; after completing the experiment, use a diamond knife or other sharp tool to cut the grown sample along the boundary between the first holder and the second holder in a vacuum, split the sample into a first sub-sample arranged on the first holder and a second sub-sample arranged on the second holder, then remove the second holder carrying the second sub-sample from the first holder, and install the second holder carrying the second sub-sample on the third holder, thus realizing the cracking and separate fixation of the same sample in a vacuum environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 It is a schematic diagram of a first bracket and a first clamping member in one embodiment of the present invention;

[0029] Figure 2 is a schematic diagram of a second bracket and a second clamping member in one embodiment of the present invention;

[0030] Figure 3 is a schematic diagram of a third bracket and a third clamping member in one embodiment of the present invention;

[0031] Figure 4 is a schematic diagram of a sample holder in a first state according to an embodiment of the present invention;

[0032] Figure 5FIG. 4 is a schematic diagram of a sample holder in a second state according to an embodiment of the present invention.

[0033] Description of main reference numerals:

[0034] 1. First support body; 11. First bearing surface; 12. Mounting groove; 13. Protrusion; 2. Second support body; 21. Second bearing surface; 3. Third support body; 31. Limiting groove; 32. Mounting surface; 4. First clamping member; 5. Second clamping member; 6. Third clamping member; 61. Avoiding groove; 62. Limiting portion. DETAILED DESCRIPTION

[0035] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0036] like Figures 1 to 5 As shown, a sample holder for cracking samples in vacuum in an embodiment of the present invention comprises a first holder 1, a second holder 2 and a third holder 3; the first holder 1 has a first bearing surface 11 for bearing samples, the first bearing surface 11 is provided with a mounting groove 12 and a first clamping member 4, the first clamping member 4 cooperates with the first bearing surface 11 to clamp the sample; the second holder 2 has a second bearing surface 21 for bearing samples, the second bearing surface 21 is provided with a second clamping member 5, the second clamping member 5 cooperates with the second bearing surface 21 to clamp the sample; wherein, in a first state, the second holder 2 is mounted on the mounting groove 12, the first bearing surface 11 and the second bearing surface 21 are located in the same plane; in a second state, the second holder 2 is mounted on the third holder 3.

[0037] It can be understood that the present invention first installs the second support body 2 on the first support body 1 (after the second support body 2 is installed on the third support body 3, it is in the first state), and fixes the sample on the first support body 1 and the second support body 2, and conducts a material growth experiment in a vacuum environment; after completing the experiment, the grown sample is cut along the boundary between the first support body 1 and the second support body 2 in a vacuum using a diamond knife or other sharp tool to split the sample into a first sub-sample arranged on the first support body 1 and a second sub-sample arranged on the second support body 2, and then the second support body 2 carrying the second sub-sample is removed from the first support body 1, and the second support body 2 carrying the second sub-sample is installed on the third support body 3 (after the second support body 2 is installed on the third support body 3, it is in the second state), thereby realizing the cracking and separate fixation of the same sample in a vacuum environment.

[0038] It should be noted that, in the above process, fixing the sample on the first support body 1 and the second support body 2 means fixing a complete sample on the first support body 1 and the second support body 2, that is, a part of the sample is located on the first support body 1, and the other part of the sample is located on the second support body 2, that is, after the sample is split at a later stage, the formed sub-samples are directly fixed on the first support body 1 and the second support body 2 respectively.

[0039] Fixing the sample on the first support body 1 and the second support body 2 can be considered as clamping the sample between the first clamping member 4 and the first bearing surface 11, and between the second clamping member 5 and the second bearing surface 21. When the sample is split, the formed sub-samples are respectively clamped between the first clamping member 4 and the first bearing surface 11, and between the second clamping member 5 and the second bearing surface 21.

[0040] Before the material grows, the sample fixed on the first support 1 and the second support 2 may include a substrate; after the material grows, the sample fixed on the first support 1 and the second support 2 may include a substrate and a material attached to the substrate; when splitting the sample, the substrate and the material are decomposed into at least two parts together, thereby facilitating subsequent multiple analytical tests on the same sample.

[0041] In this embodiment, the sample holder of the present invention only includes a first holder 1, a second holder 2 and a third holder 3. In other embodiments, a plurality of second holders 2 can be installed at intervals on a first holder 1 of the sample holder of the present invention, and a plurality of sub-samples (also called sample fragments) can be obtained after cutting, and each second holder 2 is fixedly installed on a third holder 3, so that a plurality of sub-samples of the same batch can be obtained, which is convenient for various analytical tests and as blank samples, etc.

[0042] Specifically, Figure 1 and 4As shown, the first support body 1 includes a protrusion 13 provided on the first bearing surface 11, and a portion of the protrusion 13 is provided on the mounting groove 12 and covers a portion of the mounting groove 12. The protrusion 13 cooperates with the mounting groove 12 to clamp or limit the second support body 2. In addition, the mounting groove 12 can also limit and locate the position of the second support body 2 on the first support body 1, and can also make the first bearing surface 11 and the second bearing surface 21 located in the same plane in the first state.

[0043] like Figure 3 and 5 As shown, the third support body 3 is provided with a limiting groove 31, and in the second state, the second support body 2 is installed on the limiting groove 31. The limiting groove 31 serves to limit and locate the position of the second support body 2 on the first support body 1.

[0044] Furthermore, the third bracket 3 is provided with a third clamping member 6, and in the second state, the second bracket 2 is clamped between the limiting groove 31 and the third clamping member 6. That is, in the second state, the second clamping member 5 is in direct contact with the second bracket 2, and cooperates with the third bracket 3 to clamp and fix the second bracket 2.

[0045] like Figure 3 and 5 As shown, in this embodiment, in the second state, the third clamping member 6 is partially covered on the limiting groove 31 and covers part of the limiting groove 31. The third clamping member 6 cooperates with the limiting groove 31 of the third bracket 3 to clamp and fix the second bracket 2. Two third clamping members 6 can be provided on the third bracket 3, so that the second bracket 2 can be clamped and fixed more stably.

[0046] In this embodiment, the third clamping member 6 has a mounting surface 32, and the avoidance groove 61 is provided on the mounting surface 32. In other embodiments, the third clamping member 6 can also be installed in the limiting groove 31, and in the second state, the limiting groove 31 and the third clamping member 6 cooperate to clamp and fix the second bracket 2.

[0047] Furthermore, the third clamping member 6 is provided with an avoidance groove 61. In the second state, the second bracket 2 is clamped between the limiting groove 31 and the third clamping member 6, and the second clamping member 5 is partially located in the avoidance groove 61. Since the second bracket 2 is provided with the second clamping member 5, the above arrangement can make the third clamping member 6 avoid the second clamping member 5, that is, in the direction perpendicular to the second bearing surface 21, due to the existence of the avoidance groove 61, the third clamping member 6 and the second clamping member 5 can be partially overlapped, thereby ensuring that the third clamping member 6 can stably clamp the second bracket 2.

[0048] Further, the third clamping member 6 has a mounting surface 32, the avoidance groove 61 is provided on the mounting surface 32, and a limiting portion 62 is provided on one end of the third clamping member 6 away from the avoidance groove 61, and in the second state, the limiting portion 62 abuts against a portion of the third clamping member 6 located on the side of the mounting surface 32. That is, the limiting portion 62 abuts against a portion of the third clamping member 6 located on the side of the mounting surface 32, thereby playing a role in mutual positioning and limiting between the third clamping member 6 and the third bracket 3.

[0049] Specifically, the third clamping member 6 is detachably mounted on the third bracket 3. Figure 3 As shown, in this embodiment, the third clamping member 6 may be in a sheet shape and may be detachably mounted on the third bracket 3 by bolts or screws.

[0050] Specifically, the first clamping member 4 is detachably mounted on the first bracket 1; the second clamping member 5 is detachably mounted on the second bracket 2. Figure 1 and 2 As shown, in this embodiment, the first clamping member 4 and the second clamping member 5 can be in sheet form and can be detachably mounted on the first support body 1 and the second support body 2 respectively by bolts or screws. A specific embodiment of the present invention also provides a method for cracking a sample in a vacuum, using the sample holder for cracking a sample in a vacuum as described above, and the method for cracking a sample in a vacuum includes:

[0051] S1. In a first state, fix the sample on a first carrying surface and a second carrying surface.

[0052] S2. Grow material on the sample in a vacuum environment.

[0053] S3. In a vacuum environment, the sample on which the material is grown is cut, and the cutting point is the boundary between the first supporting surface and the second supporting surface, so that the sample on which the material is grown is split into a first sub-sample arranged on the first support body and a second sub-sample arranged on the second support body.

[0054] S4. In a vacuum environment, remove the second support body carrying the second sub-sample from the first support body, and install the second support body carrying the second sub-sample on the third support body.

[0055] It is understandable that the method for lysing a sample in a vacuum of the present invention, through the cooperation of the sample holder of the present invention, can make steps S2 to S4 all be operated in a vacuum environment, avoiding the contamination problem caused by lysing the sample in the air. The vacuum environment can be considered to be the vacuum environment provided by the vacuum interconnection equipment available on the market.

[0056] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0057] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A sample holder for lysing samples in vacuum, characterized in that: include: A first support body, which has a first bearing surface for bearing the sample, wherein the first bearing surface is provided with a mounting groove and a first clamping member, and the first clamping member cooperates with the first bearing surface to clamp the sample; A second bracket, wherein the second bracket has a second bearing surface for bearing the sample, a second clamping member is disposed on the second bearing surface, and the second clamping member cooperates with the second bearing surface to clamp the sample; The third support body; Wherein, in the first state, the second bracket is installed on the installation slot, and the first bearing surface and the second bearing surface are located in the same plane; In the second state, the second bracket is installed on the third bracket.

2. The sample holder for lysing samples in vacuum according to claim 1, characterized in that: The first bracket includes a protrusion disposed on the first bearing surface, wherein a portion of the protrusion is disposed on the installation slot and covers a portion of the installation slot.

3. The sample holder for lysing samples in vacuum according to claim 1, characterized in that: The third bracket is provided with a limiting groove, and in the second state, the second bracket is installed on the limiting groove.

4. The sample holder for lysing samples in vacuum according to claim 3, characterized in that: The third bracket is provided with a third clamping member, and in the second state, the second bracket is clamped between the limiting groove and the third clamping member.

5. The sample holder for lysing samples in vacuum according to claim 4, characterized in that: In the second state, a portion of the third clamping member is disposed on the limiting groove and covers a portion of the limiting groove.

6. The sample holder for lysing samples in vacuum according to claim 5, characterized in that: The third clamping member is provided with an avoidance groove. In the second state, the second bracket is clamped between the limiting groove and the third clamping member, and a portion of the second clamping member is located in the avoidance groove.

7. The sample holder for lysing samples in vacuum according to claim 5, characterized in that: The third clamping member has a mounting surface, the avoidance groove is arranged on the mounting surface, and a limiting portion is arranged on one end of the third clamping member away from the avoidance groove. In the second state, the limiting portion abuts against a portion of the third clamping member located on the side of the mounting surface.

8. The sample holder for lysing samples in vacuum according to claim 4, characterized in that: The third clamping member is detachably mounted on the third bracket.

9. The sample holder for lysing samples in vacuum according to claim 1, characterized in that: The first clamping member is detachably mounted on the first bracket; and / or, The second clamping member is detachably mounted on the second bracket.

10. A method for lysing a sample in a vacuum, using the sample holder for lysing a sample in a vacuum as claimed in any one of claims 1 to 9, characterized in that: The method for lysing a sample in a vacuum comprises: In a first state, the sample is fixed on the first carrying surface and the second carrying surface; Material growth is performed on the sample in a vacuum environment; In a vacuum environment, cutting the sample with the material grown thereon, the cutting position being the boundary between the first supporting surface and the second supporting surface, and splitting the sample with the material grown thereon into a first sub-sample disposed on the first support body and a second sub-sample disposed on the second support body; In a vacuum environment, the second support body carrying the second sub-sample is removed from the first support body, and the second support body carrying the second sub-sample is installed on the third support body.

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