Laser micro-hole machining method and laser micro-hole machining equipment

Abstract

The invention relates to a laser micro-hole machining method and laser micro-hole machining device.The laser micro-hole machining device comprises a workbench, a removing module, clamping assemblies and a drilling device.The two clamping assemblies can clamp and fix a workpiece and determine the drilling position, a sealing assembly ascends, deformation adjustment is conducted according to the shape of the bottom of the workpiece, and then the workpiece is removed; a coating area of a workpiece is surrounded, a material spraying unit conducts self-adjusting fixed-distance spraying on the coating area, then drilling equipment conducts laser drilling on the coating area of the workpiece, laser drilling can generate adhering slag on the bottom face of the workpiece, and the adhering slag can be attached to the surface of a chemical coating. The wiping unit wipes the chemical solvent on the inner side wall of the sealing assembly and the coating area, the adhering slag is cleaned up while the chemical coating is wiped, and finally the cleaning operation of the wiping unit is completed through the washing assembly, the water spraying assembly and the compression assembly.

Description

Technical Field

[0001] The present application relates to the technical field of laser drilling processing, and in particular to a laser micro-hole processing method and laser micro-hole processing equipment. Background Art

[0002] Laser micro-hole processing is a high-precision and high-efficiency processing method, which is widely used in many fields, including but not limited to semiconductor manufacturing, aerospace, biomedical engineering, optical device manufacturing, etc. Laser micro-hole processing has been widely used in many fields due to its advantages of high precision, low thermal impact, non-contact processing, wide range of processing materials and strong flexibility.

[0003] The Chinese patent with publication number CN214054051U and title “A laser processing device” includes a laser processing module and a workpiece fixing mechanism. The laser processing module is arranged above the workpiece to be processed, and the laser emitted by the laser processing module irradiates the workpiece to be processed; the workpiece fixing mechanism is used to fix the workpiece to be processed; the lower surface of the to-be-processed area of ​​the workpiece to be processed is in contact with the liquid medium below it. The laser processing device of the present application can avoid sparks and recast layers during processing by contacting the lower surface of the to-be-processed area of ​​the workpiece to be processed with the liquid medium below it, and at the same time plays a role in cooling, removing dust generated by processing, eliminating slag, and avoiding microcracks, thereby improving the processing effect.

[0004] The prior art of the above patent can also realize the function of laser micro-hole processing on metal workpieces. However, during the process of laser processing on the workpiece, the above technology cannot determine the contact area between the bottom surface of the special-shaped workpiece and the liquid, and the lower surface of the workpiece is in direct contact with the liquid medium, and it is impossible to ensure that the liquid medium adheres evenly to the surface of the workpiece, which affects the laser drilling of the workpiece, and it is impossible to clean the liquid medium attached to the surface of the workpiece, which affects the efficiency of the laser micro-hole processing of the workpiece.

[0005] Based on this, there is still room for improvement on the basis of existing laser micro-hole processing equipment. Summary of the invention

[0006] In order to accurately realize the function of laser micro-hole processing on a workpiece, the present application provides a laser micro-hole processing device.

[0007] A laser micro-hole processing equipment provided in the present application adopts the following technical solution: a laser micro-hole processing equipment, comprising: support feet are evenly arranged at the lower end of the workbench, a removal module is slidably installed on the workbench, the number of clamping components is two, the clamping components are symmetrically installed on the left and right sides of the middle of the base frame, the clamping components are configured to clamp the workpiece that needs to be punched, and a punching device is installed at the upper end of the base frame, and laser drilling is performed on the workpiece that needs to be punched through the punching device.

[0008] Furthermore, the removal module includes a working box, a fixed frame, a sealing assembly, a cleaning assembly, an electric rotating frame, a spraying unit, a placement box, a fixed column, a wiping unit, and a scrubbing unit. A sliding platform is provided on the workbench for sliding left and right, and a working box is provided on the sliding platform for sliding back and forth. A rotating shaft is installed inside the working box, a fixed frame is installed on the upper end of the rotating shaft, a sealing assembly is installed on the right end of the fixed frame, a cleaning assembly is installed on the left end of the fixed frame, an electric rotating frame is rotatably provided in the middle of the rotating shaft, a spraying unit is installed on the right end of the electric rotating frame, a placement box is installed on the left end of the electric rotating frame, a wiping unit is provided in the middle of the placement box through a fixed column, and the scrubbing unit mounted on the outside of the wiping unit is installed in the placement box.

[0009] Furthermore, the sealing assembly includes an annular fixing frame, an electric push rod, an annular support frame, a protective piece, a protective film, and a molding frame. The left end of the fixing frame is connected to the outer frame through a lifting assembly. The upper end of the annular fixing frame is provided with an electric push rod, and the output end of the electric push rod is connected to the annular support frame. The upper end of the annular support frame is provided with a protective piece of plastic material, and the surface of the protective piece is provided with a protective film. The inner side of the protective film is connected to the annular fixing frame through an elastic cloth. The upper end of the annular fixing frame is provided with a molding frame that cooperates with the protective piece.

[0010] Furthermore, the cleaning assembly includes an outer frame, a telescopic rod, a brush plate, a gear shaft, a rack plate, and an extrusion column. The outer frame is installed on the left end of the fixed frame, and the bottom end of the outer frame is evenly provided with storage grooves along its circumference. The storage grooves are connected to the middle part of the brush plate through the telescopic rod. The inner side of the brush plate is connected to the gear shaft. The outer frame and the gear shaft are rotatably connected. A rack plate meshing with the gear shaft is provided in the middle part of the bottom end of the outer frame for sliding up and down, and the extrusion column is installed at the lower end of the rack plate.

[0011] Furthermore, the spraying unit includes a fixed plate, an electric cylinder, a material storage box, a limiting sleeve, and a spraying assembly. A fixed plate is installed on the right end of the electric rotating frame. Electric cylinders are respectively arranged on both sides of the upper end of the fixed plate. The output end of the electric cylinder is connected to the material storage box. Limiting sleeves are evenly arranged on the upper end of the material storage box. A spraying assembly is elastically and slidingly arranged inside the limiting sleeve, and the spraying assembly and the material storage box are in a connected state.

[0012] Furthermore, the spraying assembly includes a telescopic tube, a spraying head, and an ejector pin. The upper end of the material storage box is connected to the spraying head through the telescopic tube, and the upper end of the spraying head is equipped with an ejector pin.

[0013] Furthermore, the wiping unit includes a fixed storage rack, a connecting cylinder, an extrusion cylinder, a connecting tube, a connecting rack 1, a connecting rack 2, a trigger member 1, a trigger member 2, a cleaning brush 1, a cleaning brush 2, a sliding column, an extrusion sleeve, and a cleaning plate. An electric turntable is arranged on the upper end of the fixed column, a fixed storage rack is arranged on the upper end of the electric turntable, a connecting cylinder is installed on the upper end of the fixed storage rack, an extrusion cylinder is fixedly installed on the middle part of the upper end of the fixed storage rack, an output end of the connecting cylinder is connected to the bottom end of the connecting tube, and a connecting rack 1, a connecting rack 2, a connecting rack 3, a connecting rack 4, a connecting rack 5, a connecting rack 6, a connecting rack 7, a connecting rack 8, a connecting rack 9, a connecting rack 10, a connecting rack 11, a connecting rack 12, a connecting rack 13, a connecting rack 14, a connecting rack 15, a connecting rack 16, a connecting rack 17, a connecting rack 18, a connecting rack 19, a connecting rack 20, a connecting rack 21, a connecting rack 22, a connecting rack 23, a connecting rack 24, a connecting rack 25, a connecting rack 26, a connecting rack 27, a connecting rack 28, a connecting rack 29, a connecting rack 30, a connecting rack 31, a connecting rack 32, a connecting rack 33, a connecting rack 34, a connecting rack 35, a connecting rack 36, a connecting rack 37, a connecting rack 38, a connecting rack 39, a connecting rack 31, a connecting rack 31, a connecting rack 32, a connecting rack 34, a connecting rack 35, a connecting rack 36 Connecting frame two, the upper end of connecting frame one is equipped with trigger piece one, the lower end of connecting frame two is equipped with trigger piece two, the outer side of connecting frame one is connected with cleaning brush one through a fixed rod, the outer side of connecting frame two is equipped with cleaning brush two through a working rod, the cleaning brush one and the cleaning brush two are arranged alternately with each other at upper and lower intervals, a sliding column is provided in the middle of the connecting cylinder for sliding up and down, an extrusion sleeve is fixedly provided in the middle of the sliding column, the upper end of the sliding column is slidably provided in a through groove opened in the middle of the cleaning plate, the cleaning plate is installed at the upper end of the connecting cylinder, and a sponge layer is elastically installed on the upper end of the cleaning plate.

[0014] Furthermore, the washing unit includes a placement shell, a washing assembly, a water spray assembly, a compression assembly, a sliding rod, a rotating disk, a chassis, an arc-shaped guide groove, an arc-shaped member, and a sewage collection box. The interior of the placement box is fixedly connected to the placement shell through a connecting member. The interior of the placement shell is sequentially provided with a washing assembly, a water spray assembly, and a compression assembly along its circumference. The lower end of the washing assembly is connected to the rotating disk through a sliding rod. The upper end of the fixed column is fixedly provided with a chassis. The upper end of the chassis is provided with an arc-shaped guide groove corresponding to the position of the compression assembly. The upper end of the rotating disk is provided with an arc-shaped member used in conjunction with the compression assembly. The arc-shaped member is a structure that gradually tilts downward from the outside to the inside. The sewage collection box is provided at the lower end of the interior of the placement box, and the placement shell is connected to the sewage collection box through a drain pipe.

[0015] Furthermore, the washing assembly includes a storage box, a washing plate, an opening, and a push-pull piece. The storage box is slidably arranged on the inner side of the placement shell, and the washing plate is slidably arranged inside the storage box. The lower end of the washing plate is connected to the rotating disk through a sliding rod. An opening corresponding to the washing plate is opened on the inner side of the storage box, and a push-pull piece is arranged at the outer front end of the storage box.

[0016] Furthermore, the water spray assembly includes a water tank, a water spray plate, a water inlet, an opening and closing plate, an opening and closing port, a water pipe opening, and a contact head. Water tanks with pump body structures are arranged on both sides of the interior of the placement box. The water tank is connected to the water spray plate through a water pipe. The inner side of the water cavity opened in the upper part of the water spray plate is connected to a plurality of water spray holes. A water inlet is opened at the bottom of the water cavity. An opening and closing plate is horizontally slidably arranged in the middle part of the water spray plate. An opening and closing port corresponding to the position of the water inlet is opened in the middle part of the opening and closing plate. The position between the opening and closing port and the water pipe opening corresponds to each other. A contact head is arranged on the opening and closing port and the front end side of the opening and closing plate. The opening and closing plate and the water spray plate are elastically connected.

[0017] Furthermore, the extrusion assembly includes a support plate, a slider, an extrusion plate, an extrusion piece, a connecting rod, an extrusion head, and a guide column. A support plate is slidably arranged on the inner side of the placement shell, a slider is slidably arranged in a slide groove opened on the inner side of the support plate, an extrusion plate is connected to the inner side of the slider, a plurality of scraping grooves are opened on the surface of the extrusion plate, an upper end face of the slider is elastically connected to the inner wall of the slide groove, an extrusion piece is slidably arranged in the slide groove, the left upper end face of the extrusion piece is a structure gradually inclined upward from left to right, the extrusion piece is connected to the inner wall of the slide groove by a tension spring, a connecting rod is arranged at the lower end of the extrusion piece, an extrusion head is arranged at the lower end of the connecting rod, the connecting rod is slidably arranged inside the support plate, a guide column cooperating with the arc-shaped piece is arranged at the lower end of the support plate, and the extrusion head is slidably arranged inside the guide column.

[0018] In addition, the present invention also provides a processing method of a laser micro-hole processing device, and a testing method of the processing method of the laser micro-hole processing device comprises the following steps:

[0019] S1. Workpiece fixing: The workpiece is clamped and positioned by two clamping components;

[0020] S2. Workpiece spraying: Determine the punching position, the sealing component rises to fit the bottom of the workpiece, thereby determining the coating area, and the coating area is automatically sprayed by the spray unit:

[0021] S3, workpiece punching: laser punching the workpiece through a punching device;

[0022] S4, wiping solvent: wiping the chemical solvent on the inner wall of the sealing component and the coating area through the wiping unit;

[0023] S5. Scrubbing the wiping sponge: cleaning the wiping unit by means of the scrubbing unit.

[0024] In the above technical scheme, the present invention provides a laser micro-hole processing equipment. The two clamping components provided by the present invention can clamp and fix the workpiece to determine the position of the hole. The sealing component rises and deforms and adjusts according to the shape of the bottom of the workpiece to surround the coating area of ​​the workpiece. The spray unit self-adjusts the coating area and sprays at a fixed distance to ensure that the chemical coating can be evenly attached to the bottom of the workpiece. Subsequently, the punching equipment performs laser drilling on the area of ​​the workpiece that has been painted. The laser drilling will produce slag on the bottom surface of the workpiece, and the slag will adhere to the surface of the chemical coating. The wiping unit wipes the chemical solvent on the inner wall of the sealing component and the coating area. While wiping the chemical coating, the slag is also cleaned up, thereby obtaining a workpiece with a clean and smooth bottom surface. Finally, the cleaning operation of the wiping unit is completed by the washing component, the water spray component, and the compression component, thereby improving the effect of the wiping unit in wiping the residual chemical coating on the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0026] Figure 1 It is a three-dimensional structural schematic diagram of the present invention;

[0027] Figure 2 It is a schematic diagram of the structure of the removal module of the present invention;

[0028] Figure 3 It is a schematic cross-sectional structure diagram of the sealing assembly and the spraying unit of the present invention;

[0029] Figure 4 The present invention Figure 3 A local enlarged schematic diagram of point A;

[0030] Figure 5 It is a three-dimensional structural schematic diagram of the wiping unit and the scrubbing unit of the present invention;

[0031] Figure 6 It is a schematic diagram of the first cross-sectional structure of the wiping unit and the scrubbing unit of the present invention;

[0032] Figure 7 It is a schematic cross-sectional structure diagram of the cleaning component, the wiping unit, and the scrubbing unit of the present invention;

[0033] Figure 8 The present invention Figure 7 A local enlarged schematic diagram of point B;

[0034] Fig. 9 It is a second cross-sectional structural schematic diagram of the wiping unit and the scrubbing unit of the present invention;

[0035] Fig.10 It is a schematic diagram of the three-dimensional structure of the arc-shaped member of the present invention;

[0036] Fig.11 It is a schematic diagram of the planar structure of the cleaning component of the present invention;

[0037] Fig.12 It is a schematic diagram of the cross-section structure of the washing assembly of the present invention;

[0038] Fig.13 It is a three-dimensional structural schematic diagram of the water spray assembly of the present invention;

[0039] Fig.14 The present invention Fig.13 A local enlarged schematic diagram of point C;

[0040] Fig.15 It is a schematic diagram of the cross-sectional structure of the extrusion assembly of the present invention.

[0041] Description of reference numerals: 1. workbench; 2. removal module; 3. clamping assembly; 4. punching device; 20. work box; 21. fixing frame; 22. sealing assembly; 23. cleaning assembly; 24. electric rotating frame; 25. spray unit; 26. placement box; 27. fixing column; 28. wiping unit; 29. ​​washing unit; 220. annular fixing frame; 221. electric push rod; 222. annular support frame; 223. protective member; 224, protective film; 225, shaping frame; 230 outer frame; 231, telescopic rod; 232, brush plate; 233, gear shaft; 234, rack plate; 235, extrusion column; 250, fixed plate; 251, electric cylinder; 252, storage box; 253, limit sleeve; 254, spray assembly; 2541, telescopic tube; 2542, spray head; 2543, ejector; 280, fixed storage rack; 281, connection Cylinder; 282, extrusion cylinder; 283, connecting tube; 284, connecting frame 1; 285, connecting frame 2; 286, trigger member 1; 287, trigger member 2; 288, cleaning brush 1; 289, cleaning brush 2; 2810, sliding column; 2811, extrusion collar; 2812, cleaning plate; 290, placement shell; 291, washing assembly; 292, water spray assembly; 293, compression assembly; 294, slide rod; 295 , rotating disk; 296, chassis; 297, arc-shaped guide groove; 298, arc-shaped member; 299, sewage collection box; 2921, water storage tank; 2922, water spray plate; 2923, opening and closing plate; 2924, opening and closing mouth; 2925, contact head; 2931, support plate; 2932, slider; 2933, extrusion plate; 2934, extrusion member; 2935, connecting rod; 2936, extrusion head; 2937, guide column. DETAILED DESCRIPTION

[0042] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0043] See also Figures 1 to 15 As shown, a laser micro-hole processing equipment provided in an embodiment of the present invention includes: a workbench 1, and support feet are evenly arranged at the lower end of the workbench 1; a removal module 2 is slidably installed on the workbench 1; the number of clamping components 3 is two, and the clamping components 3 are symmetrically installed on the left and right sides of the middle of the base frame 1, and the clamping components 3 are configured to clamp the workpiece that needs to be punched, and a punching device 4 is installed at the upper end of the base frame 1, and the workpiece that needs to be punched is laser punched through the punching device 4.

[0044] See also Figures 2 to 15 As shown, a laser micro-hole processing equipment is provided in an embodiment of the present invention, wherein the removal module 2 comprises a working box 20, a fixing frame 21, a sealing assembly 22, a cleaning assembly 23, an electric rotating frame 24, a spraying unit 25, a placing box 26, a fixing column 27, a wiping unit 28, and a scrubbing unit 29. A sliding platform is provided on the working table 1 for sliding left and right, and a working box 20 is provided on the sliding platform for sliding back and forth. A rotating shaft is installed inside the working box 20, a fixing frame 21 is installed on the upper end of the rotating shaft, a sealing assembly 22 is installed on the right end of the fixing frame 21, and a cleaning assembly 23 is installed on the left end of the fixing frame 21. An electric rotating frame 24 is rotatably provided in the middle of the rotating shaft, a spraying unit 25 is installed on the right end of the electric rotating frame 24, and a placing box 26 is installed on the left end of the electric rotating frame 24. A wiping unit 28 is provided in the middle of the placing box 26 through a fixing column 27, and a scrubbing unit 29 sleeved on the outside of the wiping unit 28 is installed in the placing box 26.

[0045] In the above technical scheme, a mixture of metal powder and binder is injection molded into a metal structural part of a predetermined shape on an injection molding machine; the metal structural part is catalytically degreased to generate a degreased embryo; the degreased embryo is sintered at high temperature to generate a sintered embryo (workpiece), the workpiece is clamped and positioned by two clamping components 3, and after the punching position is determined, the sealing component 22 rises to fit with the bottom of the workpiece, thereby determining the coating area, and the electric rotating frame 24 is rotated to drive the spraying unit 25 to rotate so that it corresponds to the coating area position, and the spraying unit 25 automatically adjusts the coating area to spray; the punching device 4 performs laser drilling on the workpiece; then the electric rotating frame 24 rotates, and the placement box 26 rotates synchronously to drive the wiping unit 28 to rotate so that it corresponds to the coating area position, and the wiping unit 28 wipes the inner wall of the sealing component 22 and the chemical solvent in the coating area; finally, the washing unit 29 completes the cleaning operation of the wiping unit 28.

[0046] It should be noted that when the workpiece is laser drilled, the high energy of the laser beam will cause the metal workpiece to melt and vaporize, and the heat concentration on the inside of the hole will cause slag. Chemical coating is applied on the back of the metal workpiece, which can adsorb the slag. After drilling, it is cooled naturally and then scrubbed to remove the slag, so as to obtain a metal workpiece with a smooth bottom surface and no slag.

[0047] See also Figure 2 , Figure 3 As shown, a laser micro-hole processing device provided in an embodiment of the present invention, the sealing assembly 22 includes an annular fixing frame 220, an electric push rod 221, an annular support frame 222, a protective member 223, a protective film 224, and a molding frame 225. The right end of the fixing frame 21 is equipped with an annular fixing frame 220, and the upper end of the annular fixing frame 220 is provided with an electric push rod 221. The output end of the electric push rod 221 is connected to the annular support frame 222, and the upper end of the annular support frame 222 is provided with a plastic The protective member 223 is made of a flexible material. The protective member 223 is made of a plastic material and can be made of a flexible rubber material. A protective film 224 is provided on the surface of the protective member 223. The inner side of the protective film 224 is connected to the annular fixing frame 220 through an elastic cloth. The elastic cloth can surround the punching area to ensure that the spraying unit 25 does not overflow when spraying the bottom surface of the workpiece, thereby ensuring the uniformity of the spraying. A molding frame 225 that cooperates with the protective member 223 is provided on the upper end of the annular fixing frame 220.

[0048] In the above technical solution, when it is necessary to punch holes in the workpiece, the annular support frame 222 is pushed up by the electric push rod 221 until the protective part 223 is in contact with the bottom surface of the workpiece. The protective part 223 made of plastic material can be adjusted according to the shape of the bottom surface of the workpiece so that the protective part 223 is tightly in contact with the bottom surface of the workpiece. At this time, the coating area is determined. When the spray unit 25, the punching device 4, and the wiping unit 28 complete the operation, the electric push rod 221 drives the annular support frame 222 to descend.

[0049] See also Figure 3 , Figure 4 As shown, a laser micro-hole processing equipment is provided in an embodiment of the present invention, the spraying unit 25 includes a fixed plate 250, an electric cylinder 251, a material storage box 252, a limiting sleeve 253, and a spraying assembly 254. The fixed plate 250 is installed on the right end of the electric rotating frame 24, and the electric cylinder 251 is respectively arranged on both sides of the upper end of the fixed plate 250, and the output end of the electric cylinder 251 is connected to the material storage box 252, and the limiting sleeve 253 is evenly arranged on the upper end of the material storage box 252. The spraying assembly 254 is elastically slidably arranged inside the limiting sleeve 253, and the spraying assembly 254 and the material storage box 252 are in a connected state.

[0050] See also Figure 4As shown, a laser micro-hole processing equipment is provided in an embodiment of the present invention, the spray assembly 254 includes a telescopic tube 2541, a spray head 2542, and a ejector pin 2543. The upper end of the storage box 252 is connected to the spray head 2542 through the telescopic tube 2541. The ejector pin 2543 is installed on the upper end of the spray head 2542. The limiting sleeve 253 ensures the stability of the ejector pin 2543 when adjusting the position of the spray head 2542.

[0051] In the above technical solution, the electric turntable 24 rotates, and the fixed plate 250 rotates synchronously to the position directly below the coating area. The electric cylinder 251 drives the storage box 252 to rise to a specified height. At this time, the spray heads 2542 at various positions are supported by the ejector pins 2543 and are arranged at equal intervals from the bottom surface of the workpiece, ensuring the uniformity of the spray head 2542 spraying the paint on the bottom surface of the workpiece. The paint is transported to the bottom surface of the spray head 2542 through the storage box 252, thereby forming a uniform coating. The slag generated by subsequent drilling adheres to the surface of the coating (not to the surface of the workpiece). After the drilling is completed, the slag can be eliminated by simply cleaning the coating.

[0052] See also Figures 5 to 9As shown, a laser micro-hole processing device provided in an embodiment of the present invention, the wiping unit 28 includes a fixed storage rack 280, a connecting cylinder 281, an extrusion cylinder 282, a connecting tube 283, a connecting rack 1 284, a connecting rack 285, a trigger member 1 286, a trigger member 287, a cleaning brush 1 288, a cleaning brush 289, a sliding column 2810, an extrusion collar 2811, and a cleaning plate 2812. The upper end of the fixed column 27 is provided with an electric turntable, and the upper end of the electric turntable is provided with a fixed storage rack 28 0, a connecting cylinder 281 is installed at the upper end of the fixed storage rack 280, an extrusion cylinder 282 is fixedly installed at the middle of the upper end of the fixed storage rack 280, the output end of the connecting cylinder 281 is connected to the bottom end of the connecting cylinder 283, and the middle part of the connecting cylinder 283 is provided with a connecting rack 1 284 and a connecting rack 2 285 along its circumferential horizontal sliding, a triggering member 1 286 is installed at the upper end of the connecting rack 1 284, and a triggering member 287 is installed at the lower end of the connecting rack 285, and the outer side of the connecting rack 1 284 is connected to The cleaning brush 1 288 and the cleaning brush 2 289 are arranged on the outer side of the connecting frame 285 through the working rod. The cleaning brush 1 288 and the cleaning brush 2 289 are arranged alternately at intervals. During the ascending process, the cleaning brush 1 288 performs a cleaning operation. During the descending process, the cleaning brush 2 289 performs a cleaning operation. The cleaning brush 1 288 and the cleaning brush 2 289 perform cleaning operations alternately to improve the cleaning efficiency and integrity of the workpiece. The middle part of the connecting cylinder 283 is provided with a sliding column 2810 and the sliding column 2810 slides up and down. 0 is fixedly provided with an extrusion collar 2811 (the extrusion collar 2811 and the trigger member 1 286 and the trigger member 2 287 are extruded and matched with each other), the upper end of the sliding column 2810 is slidably set in the through groove opened in the middle of the cleaning plate 2812, and the cleaning plate 2812 is installed at the upper end position of the connecting cylinder 283. The upper end of the cleaning plate 2812 is elastically installed with a sponge layer. The elastically arranged sponge layer can be deformed according to the shape of the bottom surface of the workpiece, so as to achieve a better cleaning effect on the chemical coating on the bottom surface of the workpiece.

[0053] In the above technical solution, the electric rotating frame 24 is rotated to drive the placement box 26 to move synchronously, so that the wiping unit 28 rotates to the position directly below the sealing assembly 22, and the electric turntable drives the fixed storage rack 280 to rotate. When the connecting cylinder 281 drives the connecting cylinder 283 to rise, the extrusion collar 2811 and the trigger member 286 are in an extrusion state (when the connecting cylinder 283 is in the initial position, the sliding column 2810 is in a high position relative to the position of the connecting cylinder 283. At this time, the extrusion collar 2811 is in a high position, so that it is in an extrusion state with the trigger member 286. During the rising process of the connecting cylinder 283, the extrusion collar 2811 and the trigger member 286 maintain the extrusion state and rise synchronously). At this time, the connecting frame 284 drives the cleaning brush 288 to slide outward (reach the cleaning position), and the cleaning brush 288 cleans the inner wall of the protective member 223 and the chemical coating on the inner wall of the elastic cloth. When the connecting cylinder 283 rises to When in the highest position, the cleaning plate 2812 brushes the chemical coating on the bottom surface of the workpiece, the upper end of the sliding column 2810 is squeezed with the bottom of the workpiece, the sliding column 2810 slides downward relative to the position of the connecting tube 283, and the extrusion ring 2811 squeezes the trigger member 287. At this time, the connecting frame 1 284 contracts inward, the connecting frame 285 drives the cleaning brush 2 289 to slide outward, the connecting cylinder 281 drives the connecting tube 283 to descend, and the cleaning brush 2 289 cleans the chemical coating on the protective member 223 and the elastic cloth. The cleaning brush 1 288 and the cleaning brush 2 289 are staggered cleaning. During the lifting process of the connecting tube 283, the inner wall of the sealing component 22 and the chemical solvent in the coating area can be reciprocated and double wiped, so as to achieve a better cleaning effect. When the cleaning plate 2812 cleans the coating area, the slag produced by laser drilling will be cleaned together with the chemical coating, so that a workpiece with a clean bottom surface can be obtained.

[0054] See also Figure 7 , Fig.11 As shown, a laser micro-hole processing equipment is provided in an embodiment of the present invention, the cleaning component 23 includes an outer frame 230, a telescopic rod 231, a brush plate 232, a gear shaft 233, a rack plate 234, and an extrusion column 235. The left end of the fixed frame 21 is connected to the outer frame 230 through a lifting component. The lifting component is electrically driven and can drive the outer frame 230 to lift and lower. The bottom end of the outer frame 230 is evenly provided with storage grooves along its circumference. The storage grooves are connected to the middle part of the brush plate 232 through the telescopic rod 231 (in the initial position, the brush plate 232 is a structure that gradually tilts upward from the inside to the outside), the inner side of the brush plate 232 is connected to the gear shaft 233, the outer frame 230 and the gear shaft 233 are rotatably connected, and a rack plate 234 meshing with the gear shaft 233 is provided in the middle part of the bottom end of the outer frame 230 for sliding up and down, and an extrusion column 235 is installed at the lower end of the rack plate 234.

[0055] See also Figures 5 to 10 As shown, a laser micro-hole processing device provided in an embodiment of the present invention, the scrubbing unit 29 includes a placement shell 290, a scrubbing assembly 291, a water spray assembly 292, a compression assembly 293, a slide bar 294, a rotating disk 295, a bottom plate 296, an arc-shaped guide groove 297, an arc-shaped member 298, and a sewage collection box 299. The interior of the placement box 26 is fixedly connected to the placement shell 290 through a connecting member. The interior of the placement shell 290 is sequentially provided with a scrubbing assembly 291, a water spray assembly 292, and a compression assembly 293 along its circumference. The lower end of the scrubbing assembly 291 is connected to the bottom plate 299 through a slide bar 294. The rotating disk 295 is connected, and a chassis 296 is fixedly provided on the upper end of the fixed column 27. An arc guide groove 297 corresponding to the position of the compression component 293 is opened on the upper end of the chassis 296. An arc member 298 which cooperates with the compression component 293 is provided on the upper end of the rotating disk 295. The upper end surface of the outer half of the arc member 298 is a horizontal plane structure, and the upper end inclined surface of the inner half of the arc member 298 is a structure which gradually tilts downward from the outside to the inside. A sewage collection tank 299 is provided at the lower end of the inner part of the placement box 26, and the placement shell 290 is connected to the sewage collection tank 299 through a drain pipe.

[0056] In the above technical scheme, after the wiping unit 28 has finished cleaning the bottom coating of the workpiece and the coating on the inner wall of the sealing component 22, there is residual paint on the cleaning brush 1 288, the cleaning brush 289, and the cleaning plate 2812, which need to be cleaned to maintain the subsequent cleaning effect. The specific steps are as follows: the electric rotating frame 24 drives the placement box 26 to rotate until the wiping unit 28 rotates to the position directly below the cleaning component 23. At this time, the connecting cylinder 281 drives the connecting tube 283 to rise and slide a short distance until the extrusion collar 2811 is in the position between the trigger member 1 286 and the trigger member 287 (there is no extrusion effect with the trigger member 1 286 and the trigger member 2 287). At this time, the cleaning brush The first cleaning brush 288 and the second cleaning brush 289 are on the same curved surface (the first cleaning brush 288 and the second cleaning brush 289 form a complete cylinder, which is convenient for subsequent cleaning). The outer frame 230 is driven downward by the lifting assembly to slide, and the extrusion column 235 slides upward under the extrusion force of the sliding column 2810, and the rack plate 234 slides upward to drive the gear shaft 233 to rotate, and the brush plate 232 rotates synchronously to brush the cleaning plate 2812; at the same time, the rotating disk 295 rotates, driving the washing assembly 291, the water spray assembly 292, and the compression assembly 293 to clean and wash the cleaning brushes 1 288 and the second cleaning brush 289 arranged in the cylinder, and the sewage generated by the cleaning is discharged to the sewage collection tank 299 through the drain pipe.

[0057] See also Fig.12As shown, a laser micro-hole processing device is provided in an embodiment of the present invention, the washing component 291 includes a storage box 2911, a washing plate 2912, an opening 2913, and a push-pull member 2914. The storage box 2911 is slidably arranged on the inner side of the placement shell 290, and the washing plate 2912 is slidably arranged inside the storage box 2911. The lower end of the washing plate 2912 is connected to the rotating disk 295 through a sliding rod 294. An opening 2913 corresponding to the washing plate 2912 is opened on the inner side of the storage box 2911, and a push-pull member 2914 is arranged on the outer front end of the storage box 2911.

[0058] See also Fig.13 , Fig.14 As shown, a laser micro-hole processing device provided in an embodiment of the present invention, the water spray assembly 292 includes a water storage tank 2921, a water spray plate 2922, a water inlet 2933, an opening and closing plate 2924, an opening and closing port 2925, a water pipe opening 2926, and a contact head 2927. The water storage tank 2921 with a pump body structure is arranged on both sides of the interior of the placement box 26. The water storage tank 2921 is connected to the water spray plate 2922 through a water pipe. The inner side of the water cavity opened in the upper part of the water spray plate 2922 is connected to the inner side of the water cavity 2933. A plurality of water spray holes are provided, a water inlet 2933 is provided at the bottom of the water cavity, an opening and closing plate 2924 is horizontally slidably provided in the middle of the water spray plate 2922, an opening and closing opening 2925 corresponding to the position of the water inlet 2934 is provided in the middle of the opening and closing plate 2924, the position of the opening and closing opening 2925 corresponds to the position of the water pipe opening 2926, a contact head 2927 is provided on one side of the opening and closing opening 2925 and the front end of the opening and closing plate 2924, and the opening and closing plate 2924 and the water spray plate 2922 are elastically connected.

[0059] See also Fig.15As shown, a laser micro-hole processing device provided in an embodiment of the present invention, the extrusion assembly 293 includes a support plate 2931, a slider 2932, an extrusion plate 2933, an extrusion piece 2934, a connecting rod 2935, an extrusion head 2936, and a guide column 2937. A support plate 2931 is slidably arranged on the inner side of the placement shell 290. The support plate 2931 and the placement shell 290 are elastically connected. The elastically arranged support plate 2931 always maintains a tendency to be pulled back to the outside. A slider 2932 is slidably arranged in a slide groove opened on the inner side of the support plate 2931. The inner side of the slider 2932 is connected to the extrusion plate 2933. The surface of the extrusion plate 2933 is opened. There are several scraping grooves, the upper end surface of the slider 2932 is elastically connected to the inner wall of the slide groove, an extrusion piece 2934 is horizontally slidably arranged in the slide groove, the left upper end surface of the extrusion piece 2934 is a structure that gradually tilts upward from left to right, the extrusion piece 2934 is connected to the inner wall of the slide groove by a tension spring, a connecting rod 2935 is arranged at the lower end of the extrusion piece 2934, an extrusion head 2936 is arranged at the lower end of the connecting rod 2935, the connecting rod 2935 is slidably arranged inside the support plate 2931, the lower end of the support plate 2931 is provided with a guide column 2937 that cooperates with the arc-shaped piece 298, and the extrusion head 2936 is slidably arranged inside the guide column 2937.

[0060] In the above technical solution, the rotating disk 295 rotates, and the washing plate 2912 rotates synchronously. When the washing plate 2912 rotates to the opening 2913, the brush on the washing plate 2912 extends to scrub the cleaning brush 1 288 and the cleaning brush 289. The washing plate 2912 continues to rotate to drive the storage box 2911 to rotate. When the push-pull member 2914 and the contact head 2927 are pressed against each other, the contact head 2927 drives the opening and closing plate 2927 to slide, so that the opening and closing port 2935 is aligned with the water pipe opening. At this time, water will flow into the water cavity through the water inlet 2923, and the water will be sprayed out from the water spray hole to rinse the cleaning brush 1 288 and the cleaning brush 289. The rotating disk 295 continues to rotate, and the arc-shaped member 298 squeezes the guide column 2937, driving the support plate 2931 to slide inward along the trajectory of the arc-shaped guide groove 297, and the squeezing plate 2933 slides inward synchronously. At the same time, the arc-shaped member 298 squeezes the squeezing head 2936, and the squeezing head 2936 drives the connecting rod 2935, The extrusion piece 2934 slides horizontally inside the support plate 2931. With the cooperation of the slider 2932 and the inclined surface of the extrusion piece 2934, the slider 2932 drives the extrusion plate 2933 to slide downward synchronously, and is driven by the support plate 2931 in the inward state to squeeze inward synchronously, thereby squeezing out the moisture in the cleaning brush 1 288 and the cleaning brush 2 289. When the guide column 2937 slides to the innermost side of the arc-shaped guide groove 297, the lower end surface of the guide column 2937 is higher than the upper end surface of the inner half of the arc-shaped component 298. The current height of the end bevel makes the arc-shaped member 298 no longer guide and extrude the guide column 2937. As the rotating disk 295 continues to rotate, the support plate 2931 moves outward and resets under the action of elasticity, and the extrusion head 2936 is no longer subjected to the extrusion force. The extrusion member 2934 squeezes the slider 2932 due to the elastic action, and the extrusion plate 2933 rebounds. The scraper groove scrapes and cleans the residual paint on the cleaning brush 1 288 and the cleaning brush 2 289, and the support plate 2931 moves outward and resets under the action of elasticity.

[0061] In addition, the present invention also provides a processing method of a laser micro-hole processing device, and a testing method of the processing method of the laser micro-hole processing device comprises the following steps:

[0062] S1, workpiece fixing: clamping and positioning the workpiece by two clamping components 3;

[0063] S2, workpiece spraying: determine the punching position, the sealing assembly 22 rises to fit the bottom of the workpiece, thereby determining the coating area, and the coating area is automatically sprayed by the spraying unit 25:

[0064] S3, workpiece punching: laser punching the workpiece by punching device 4;

[0065] S4, wiping solvent: wiping the chemical solvent on the inner wall of the sealing component 22 and the coating area through the wiping unit 28;

[0066] S5 , scrubbing the wiping sponge: the scrubbing unit 29 cleans the wiping unit 28 .

[0067] The above description is only by way of illustration of certain exemplary embodiments of the present invention. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A laser micro-hole processing device, characterized in that: include: A workbench (1) having support legs evenly arranged at its lower end; A removal module (2) is slidably mounted on the workbench (1); The clamping assemblies (3) are two in number, and the clamping assemblies (3) are symmetrically mounted on the left and right sides of the middle of the base frame (1). The clamping assemblies (3) are configured to clamp the workpiece that needs to be punched; A punching device (4) is installed at the upper end of the base frame (1), and laser punches holes in the workpiece that needs to be punched through the punching device (4); The removal module (2) comprises a working box (20), a fixing frame (21), a sealing component (22), a cleaning component (23), an electric rotating frame (24), a spraying unit (25), a placing box (26), a fixing column (27), a wiping unit (28), and a washing unit (29). A sliding platform is provided on the working table (1) for sliding left and right, and a working box (20) is provided on the sliding platform for sliding back and forth. A rotating shaft is installed inside the working box (20), and a fixing frame (21) is installed on the upper end of the rotating shaft. The fixing frame A sealing assembly (22) is installed at the right end of the fixed frame (21), a cleaning assembly (23) is installed at the left end of the fixed frame (21), an electric rotating frame (24) is rotatably installed in the middle of the rotating shaft, a spraying unit (25) is installed at the right end of the electric rotating frame (24), a placement box (26) is installed at the left end of the electric rotating frame (24), a wiping unit (28) is installed in the middle of the placement box (26) through a fixed column (27), and a washing unit (29) sleeved on the outside of the wiping unit (28) is installed in the placement box (26).

2. The laser micro-hole processing equipment according to claim 1, characterized in that: The sealing component (22) comprises an annular fixing frame (220), an electric push rod (221), an annular support frame (222), a protective piece (223), a protective film (224), and a molding frame (225). The right end of the fixing frame (21) is provided with an annular fixing frame (220), the upper end of the annular fixing frame (220) is provided with an electric push rod (221), the output end of the electric push rod (221) is connected to the annular support frame (222), the upper end of the annular support frame (222) is provided with a protective piece (223) made of a plastic material, the surface of the protective piece (223) is provided with a protective film (224), the inner side of the protective film (224) is connected to the annular fixing frame (220) through an elastic cloth, and the upper end of the annular fixing frame (220) is provided with a molding frame (225) used in conjunction with the protective piece (223).

3. The laser micro-hole processing equipment according to claim 1, characterized in that: The cleaning assembly (23) comprises an outer frame (230), a telescopic rod (231), a brush plate (232), a gear shaft (233), a rack plate (234), and an extrusion column (235). The left end of the fixed frame (21) is connected to the outer frame (230) through a lifting assembly. The bottom end of the outer frame (230) is evenly provided with storage grooves along its circumference. The storage grooves are connected to the middle part of the brush plate (232) through the telescopic rod (231). The inner side of the brush plate (232) is connected with a gear shaft (233). The outer frame (230) and the gear shaft (233) are rotatably connected. The middle part of the bottom end of the outer frame (230) is provided with a rack plate (234) meshing with the gear shaft (233) so as to slide up and down. The lower end of the rack plate (234) is provided with an extrusion column (235).

4. The laser micro-hole processing equipment according to claim 1, characterized in that: The spraying unit (25) comprises a fixing plate (250), an electric cylinder (251), a material storage box (252), a limiting sleeve (253), and a spraying assembly (254); the fixing plate (250) is installed at the right end of the electric rotating frame (24); the electric cylinders (251) are respectively arranged on both sides of the upper end of the fixing plate (250); the output end of the electric cylinder (251) is connected to the material storage box (252); the limiting sleeves (253) are evenly arranged at the upper end of the material storage box (252); the spraying assembly (254) is elastically slidably arranged inside the limiting sleeve (253), and the spraying assembly (254) and the material storage box (252) are in a connected state; The spraying assembly (254) comprises a telescopic tube (2541), a spraying head (2542), and an ejector pin (2543); the upper end of the material storage box (252) is connected to the spraying head (2542) via the telescopic tube (2541); and the ejector pin (2543) is installed at the upper end of the spraying head (2542).

5. The laser micro-hole processing equipment according to claim 1, characterized in that: The wiping unit (28) comprises a fixed storage rack (280), a connecting cylinder (281), an extrusion cylinder (282), a connecting tube (283), a connecting rack 1 (284), a connecting rack 2 (285), a trigger member 1 (286), a trigger member 2 (287), a cleaning brush 1 (288), a cleaning brush 2 (289), a sliding column (2810), an extrusion sleeve (2811), and a cleaning plate (2812). An electric turntable is arranged at the upper end of the fixed column (27), a fixed storage rack (280) is arranged at the upper end of the electric turntable, a connecting cylinder (281) is installed at the upper end of the fixed storage rack (280), an extrusion cylinder (282) is fixedly installed at the middle part of the upper end of the fixed storage rack (280), an output end of the connecting cylinder (281) is connected to the bottom end of the connecting tube (283), and a connecting rack 1 (283) is arranged at the middle part of the connecting tube (283) so as to slide horizontally along its circumference. 84), a second connecting frame (285), a trigger member (286) is installed at the upper end of the first connecting frame (284), a trigger member (287) is installed at the lower end of the second connecting frame (285), a cleaning brush (288) is connected to the outer side of the first connecting frame (284) through a fixed rod, and a cleaning brush (289) is installed on the outer side of the second connecting frame (285) through a working rod, the cleaning brushes (288) and the cleaning brushes (289) are arranged alternately at intervals, a sliding column (2810) is slidably arranged in the middle of the connecting tube (283), an extrusion ring (2811) is fixedly arranged in the middle of the sliding column (2810), the upper end of the sliding column (2810) is slidably arranged in a through groove opened in the middle of a cleaning plate (2812), the cleaning plate (2812) is installed at the upper end of the connecting tube (283), and a sponge layer is elastically installed on the upper end of the cleaning plate (2812).

6. The laser micro-hole processing equipment according to claim 1, characterized in that: The scrubbing unit (29) comprises a placement shell (290), a scrubbing assembly (291), a water spray assembly (292), a compression assembly (293), a sliding rod (294), a rotating disk (295), a bottom plate (296), an arc-shaped guide groove (297), an arc-shaped member (298), and a sewage collection box (299). The interior of the placement box (26) is fixedly connected to the placement shell (290) via a connecting member. The interior of the placement shell (290) is provided with a scrubbing assembly (291), a water spray assembly (292), and a compression assembly (293) in sequence along its circumferential direction. The lower end of the scrubbing assembly (291) is connected via a connecting member. The slide bar (294) is connected to the rotating disk (295); a chassis (296) is fixedly arranged at the upper end of the fixed column (27); an arc-shaped guide groove (297) corresponding to the position of the compression assembly (293) is opened at the upper end of the chassis (296); an arc-shaped member (298) for use with the compression assembly (293) is arranged at the upper end of the rotating disk (295); the arc-shaped member (298) is a structure that gradually tilts downward from the outside to the inside; a sewage collection box (299) is arranged at the lower end of the interior of the placement box (26); and the placement shell (290) is connected to the sewage collection box (299) through a drainage pipe.

7. The laser micro-hole processing equipment according to claim 6, characterized in that: The scrubbing assembly (291) comprises a storage box (2911), a scrubbing plate (2912), an opening (2913), and a push-pull member (2914); the storage box (2911) is slidably arranged on the inner side of the placement shell (290); the scrubbing plate (2912) is slidably arranged inside the storage box (2911); the lower end of the scrubbing plate (2912) is connected to the rotating disk (295) through a sliding rod (294); the inner side of the storage box (2911) is provided with an opening (2913) corresponding to the scrubbing plate (2912); and the outer front end of the storage box (2911) is provided with a push-pull member (2914).

8. The laser micro-hole processing equipment according to claim 6, characterized in that: The water spray assembly (292) comprises a water storage tank (2921), a water spray plate (2922), a water inlet (2933), an opening and closing plate (2924), an opening and closing port (2925), a water pipe opening (2926), and a contact head (2927). The water storage tank (2921) with a pump structure is arranged on both sides of the interior of the placement box (26). The water storage tank (2921) is connected to the water spray plate (2922) through a water pipe. The water cavity provided in the upper part of the water spray plate (2922) is connected to a plurality of water spray holes. A water inlet (2933) is provided at the bottom, an opening and closing plate (2924) is horizontally slidably provided in the middle of the water spray plate (2922), an opening and closing opening (2925) corresponding to the position of the water inlet (2934) is provided in the middle of the opening and closing plate (2924), the position of the opening and closing opening (2925) corresponds to the position of the water pipe opening (2926), a contact head (2927) is provided on one side of the opening and closing opening (2925) and the front end of the opening and closing plate (2924), and the opening and closing plate (2924) and the water spray plate (2922) are elastically connected.

9. The laser micro-hole processing equipment according to claim 6, characterized in that: The extrusion assembly (293) comprises a support plate (2931), a slider (2932), an extrusion plate (2933), an extrusion piece (2934), a connecting rod (2935), an extrusion head (2936), and a guide column (2937). The support plate (2931) is slidably arranged on the inner side of the placement shell (290). A slider (2932) is slidably arranged in a slide groove provided on the inner side of the support plate (2931) so as to slide up and down. The inner side of the slider (2932) is connected to the extrusion plate (2933). A plurality of scraping grooves are provided on the surface of the extrusion plate (2933). The upper end surface of the slider (2932) is elastically connected to the inner wall of the slide groove. An extrusion piece (2934) is provided for horizontal sliding. The upper end surface of the left side of the extrusion piece (2934) is a structure that gradually tilts upward from left to right. The extrusion piece (2934) is connected to the inner wall of the slide groove through a tension spring. A connecting rod (2935) is provided at the lower end of the extrusion piece (2934). An extrusion head (2936) is provided at the lower end of the connecting rod (2935). The connecting rod (2935) is slidably provided inside the support plate (2931). A guide column (2937) that cooperates with the arc-shaped component (298) is provided at the lower end of the support plate (2931). The extrusion head (2936) is slidably provided inside the guide column (2937).

10. A processing method of a laser micro-hole processing device, comprising a laser micro-hole processing device as claimed in any one of claims 1 to 9, characterized in that: The test method includes the following steps: S1, workpiece fixing: clamping and positioning the workpiece by two clamping assemblies (3); S2, workpiece spraying: determine the punching position, the sealing component (22) rises to fit the bottom of the workpiece, thereby determining the coating area, and the coating area is automatically sprayed by the spraying unit (25): S3, workpiece drilling: laser drilling is performed on the workpiece by using a drilling device (4); S4, wiping solvent: wiping the inner wall of the sealing component (22) and the chemical solvent in the coating area by using the wiping unit (28); S5, scrubbing and wiping the sponge: cleaning the wiping unit (28) by means of the scrubbing unit (29).

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