Six-degree-of-freedom self-adaptive active and passive composite space electromagnetic array damper

Abstract

A six-degree-of-freedom adaptive active and passive composite space electromagnetic array damper belongs to the technical field of precise vibration isolation, and uses six sets of electromagnetic vibration isolation dampers which are connected with an upper plate and a substrate and are arranged in a Stewart mode to generate low-frequency high damping and high-frequency low damping characteristics in six degrees of freedom, so as to comprehensively and effectively isolate tiny vibration interference of different frequencies. Each set of electromagnetic vibration isolation damper adopts 4n (n is greater than or equal to 1, n belongs to N +) layers which are arranged in an array along the axial direction, vertical magnetized uniform-section magnetic rings between adjacent layers are used for constructing a high-damping excitation magnetic field, the change of external excitation frequency is responded in real time, the magnitude and direction of coil current are precisely regulated and controlled through a speed feedback control method, the damping force is dynamically adjusted to adapt to different working conditions, and the vibration isolation effect is good. And the optimal vibration isolation effect is ensured. Due to the adaptability and the stability of the self-adaptive active and passive composite space electromagnetic array damper, the self-adaptive active and passive composite space electromagnetic array damper still keeps high vibration isolation performance in a multi-degree-of-freedom and frequency-diversified vibration environment, and stable operation of precise instruments and equipment is guaranteed.

Description

Technical Field

[0001] The invention belongs to the technical field of precision vibration isolation, in particular to a six-degree-of-freedom adaptive active-passive composite space electromagnetic array damper. Background Art

[0002] During the installation, testing and experiment of precision instruments and equipment, low-frequency micro-vibration interference in the environment has become one of the key issues affecting the research results. Equipping precision instruments and equipment with low-frequency vibration isolation platforms has gradually become the main technical means to suppress environmental micro-vibrations in the field of precision engineering. Damping, as a key indicator to measure the vibration isolation effect, is directly related to the ability of the micro-vibration isolation platform to handle vibrations in various frequency bands. The impact of damping on the vibration isolation effect is mainly reflected in two aspects: on the one hand, high damping can effectively reduce the resonance area and reduce the amplification effect on low-frequency vibrations, which is crucial for suppressing low-frequency micro-vibrations; on the other hand, low damping helps to accelerate the dissipation of high-frequency vibrations and improve the adaptability of the vibration isolation system to high-frequency vibrations. Therefore, for vibrations of different frequencies, the required damping values ​​are different, which requires the vibration isolation system to be able to achieve effective regulation of damping.

[0003] However, the damping coefficients of most vibration isolators remain unchanged when facing vibrations of different frequencies, which greatly limits their adaptability and practicality in different vibration environments. In order to improve the vibration isolation performance, the damping control problem must be solved so that the damping coefficient can be automatically adjusted according to the different vibration frequencies. In addition, most current research focuses on single-degree-of-freedom vibration isolation, while in the field of six-degree-of-freedom vibration isolation, which is closer to actual working conditions, research on damping control is relatively scarce. The six-degree-of-freedom vibration isolation system can simultaneously suppress the vibration of the equipment in six directions, which is of great significance for improving the stability and precision of precision equipment. Therefore, research on dampers in six-degree-of-freedom vibration isolation systems should be strengthened, and variable damping technology suitable for six-degree-of-freedom vibration isolation should be explored to provide more efficient and reliable vibration isolation solutions for precision instruments and equipment, and promote the development of the field of precision engineering.

[0004] Patent No. CN202210957290.3 discloses a magnetorheological damper with a toothed flow channel. The toothed piston adopts a gear-like design, and the excitation coils are evenly distributed in three groups and wound around the inner layer of the piston cylinder to increase the utilization rate of the magnetic flux. Patent No. CN202210441343.6 discloses a multi-excitation multi-disc magnetorheological broadband vibration isolator, which replaces the liquid environment in the flow working mode with a composite matrix magnetorheological material based on non-woven fabric to expand the adjustable range of the damping force and reduce the hardening effect under medium and high frequency excitation. In order to adjust the damping force, Patent No. CN202111522940.3 discloses a multi-stage excitation double-cylinder magnetorheological damper and its control method, which constructs (2N-1) magnetorheological fluid flow paths by alternating N yokes and (N-1) coils in the axial direction of the inner cylinder and coaxially nesting with the outer cylinder; and by regulating the magnetic field, the number of flow gaps is dynamically changed to ensure adjustable damping. The above technical solution is characterized by: 1) damping vibration isolation can only be achieved in a single degree of freedom, and the vibration isolation effect is poor when faced with multi-directional vibration interference in a complex environment; 2) the damping coefficient is positively correlated with the coil current, and its amplitude-frequency characteristic is constant, and the damping effect is stable within a certain frequency range; however, when faced with vibration interference of different frequencies or within a wider frequency range, it cannot provide an effective vibration isolation effect; 3) the properties of magnetorheological fluid are unstable and are easily affected by external environmental factors such as temperature and humidity. In high or low temperature environments, its damping performance may change, and it may even fail to work normally; 4) long-term use or improper use may cause residue to form inside the magnetorheological damper, affecting the damping effect and service life.

[0005] Guangxi University of Science and Technology proposed a damper that is a composite of electromagnetic energy feeding and magnetorheological fluid (1. "An electromagnetic energy feeding stepped magnetorheological damper", CN202310051772.7; 2. "A double-tube embedded hybrid electromagnetic energy feeding damper", CN202210120495.6; 3. "A hybrid energy feeding electromagnetic vibration isolation damper", CN202210120558.8; 4. "A hybrid electromagnetic energy feeding damper", CN202210120502.2). By setting a stepped magnetorheological fluid damping gap between the inner side of the cylinder body and the piston head, the effective damping channel length is increased; at the same time, the electromagnetic energy feeding damping structure composed of a permanent magnet array and a coil is composited to dissipate the vibration energy in the form of heat energy, thereby increasing the damping amplitude and realizing the adjustment of the damping. The above technical solution is characterized by: 1) it can only achieve damping vibration isolation in a single degree of freedom, and the vibration isolation effect is poor when faced with multi-directional vibration interference in a complex environment; 2) the damping coefficient is positively correlated with the coil current, and its amplitude-frequency characteristic is constant, and the damping force cannot be adjusted in real time according to the dynamic changes of the external excitation frequency, which limits its ability to provide the best vibration isolation effect under different working conditions.

[0006] In summary, how to develop a six-degree-of-freedom electromagnetic damper that can adapt to changes in excitation frequency through structural and principle innovation, respond to changes in external excitation frequency in real time, and dynamically adjust the damping force to effectively eliminate or attenuate micro-vibration interference of various frequencies in the environment from the six degrees of freedom in space (translation along the x, y, and z axes and rotation around the x, y, and z axes), and ensure the optimal working environment of precision instruments and equipment. This innovation not only marks a new leap in the technology of optimizing the working environment of precision instruments and equipment, but will also directly promote its working accuracy to a new height, meeting the urgent needs of today's and even future scientific research and industrial fields for high-precision and high-stability equipment. Summary of the invention

[0007] In view of the lack of six-degree-of-freedom vibration isolation dampers in existing research and the problem that the adaptability and vibration isolation performance of traditional vibration isolators are limited in different vibration environments due to the fixed damping coefficient under vibration interference of diverse frequencies, this invention proposes a six-degree-of-freedom adaptive active-passive composite space electromagnetic array damper. This device uses six sets of electromagnetic vibration isolation dampers to produce adjustable damping characteristics, effectively isolating vibration interference from multiple degrees of freedom and different frequencies. Each set of electromagnetic vibration isolation dampers uses 4n (n≥1, n∈N + ) layers are arranged in an axial array, and the inner and outer magnetic ring arrays are composed of equal-section magnetic rings with perpendicular magnetization between adjacent layers, and are coaxially nested to form a high magnetic density excitation magnetic field. When the conductor plate moves relative to the magnetic field, an unadjustable high damping characteristic is generated; when the external excitation frequency changes, the damping force is dynamically adjusted by precisely controlling the current in the coil coaxially nested on the outside of the conductor plate, thereby effectively isolating vibration interference of different frequencies. The adaptability and stability of the adaptive active-passive composite space electromagnetic array damper enable it to maintain high vibration isolation performance in a multi-degree-of-freedom, complex and changeable vibration environment, ensuring that all kinds of precision instruments and equipment operate in the optimal working environment, thereby promoting a double leap in their accuracy and performance.

[0008] The technical solution of the present invention is:

[0009] The six-degree-of-freedom adaptive active-passive composite space electromagnetic array damper can accurately adapt to the change of excitation frequency, generate adjustable high damping characteristics in real time, and effectively isolate micro-vibration interference of different frequencies in multiple degrees of freedom; it includes six sets of electromagnetic vibration isolation dampers arranged in a Stewart manner between an upper plate, a base plate and a connection between the two. The upper plate has three translational degrees of freedom and three rotational degrees of freedom relative to the base plate. The top of the electromagnetic vibration isolation damper is connected to the fixing part at the bottom of the upper plate through an upper flexible hinge, and the bottom is connected to the fixing part at the top of the base plate through a lower flexible hinge; the electromagnetic vibration isolation damper is composed of a vertically magnetized space electromagnetic array damping structure and a coil spring in parallel; the vertical The magnetized space electromagnetic array damping structure includes an inner magnetic ring array, an inner magnetic array mounting part, a coil, a conductor plate, an outer magnetic array fixing part, an outer magnetic ring array, an upper actuator and a lower connecting part, and the overall structure is axially symmetrical; the inner magnetic ring array, the conductor plate and the outer magnetic ring array are coaxially nested, and are arranged in sequence with equal gaps from the axis along the radius outward; the inner magnetic ring array is coaxially nested, tightly matched, and fixedly installed on the inner magnetic array mounting part, and a gap is provided with the conductor plate in the radial direction; the inner magnetic array mounting part is a cylindrical structure with an inverted T-shaped cross-section, the bottom of which is fixedly connected to the outer magnetic array fixing part by a thread, a gap is provided between the top and the conductor plate, and a gap is provided with the outer magnetic array fixing part in the radial direction; the conductor plate The invention is an annular sleeve, the top of which is fixedly connected to the upper actuator by a thread, the bottom of which is provided with an annular boss, and an annular groove is provided in the boss; the top of the spiral spring is coaxially nested and fixedly installed in the annular groove at the bottom of the conductor plate, and the bottom of the spiral spring is coaxially nested and fixedly installed in the annular groove on the bottom surface of the outer magnetic array fixing part; the coil is symmetrical about the axial height center of the inner magnetic ring array, and is coaxially nested, tightly fitted, and fixedly installed on the outer side surface of the conductor plate, and a gap is provided with the outer magnetic array fixing part in the radial direction; the magnitude and direction of the current flowing through the coil are adaptively adjusted according to the frequency of external micro-vibration interference by the controller using a speed feedback control algorithm; the outer magnetic array fixing part is a circular outer side surface. An annular sleeve with deep grooves arranged around it has a gap between its top and the upper flexible hinge in the axial direction, and its bottom is fixedly connected to the lower connecting piece by a thread; the outer magnetic ring array is coaxially nested, tightly matched, and fixedly installed in the deep groove on the outside of the outer magnetic array fixing piece, and the inner magnetic ring array and the outer magnetic ring array are both composed of multiple layers of equal-section magnetic rings arranged in an axial array and vertically magnetized between adjacent layers, and the heights of the odd-numbered layers of magnetic rings are equal, and the heights of the even-numbered layers of magnetic rings are equal; the first layers of the inner magnetic ring array and the outer magnetic ring array are magnetized in the same direction in the radial direction, and on the right half of the front section view, with each additional layer, the magnetization direction of the inner magnetic ring rotates 90° clockwise, and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise.

[0010] Preferably, the number of layers of the inner magnetic ring array and the outer magnetic ring array satisfies 4n, where n≥1, n∈N + .

[0011] Preferably, the heights of the magnetic rings in the same layer in the inner magnetic ring array and the outer magnetic ring array are equal.

[0012] Preferably, the bottom surface of the first layer of magnetic rings in the inner magnetic ring array overlaps with the bottom surface of the first layer of magnetic rings in the outer magnetic ring array.

[0013] Preferably, the conductor plate is made of a metal material with high electrical conductivity and high magnetic permeability, such as copper, iron, cobalt, and nickel.

[0014] Preferably, the radially magnetized magnetic rings in the inner magnetic ring array and the outer magnetic ring array are spliced ​​by multiple tile-shaped magnets that are uniformly magnetized along the radius. The number of tile-shaped magnets can be 4, 6, 8, 10, 12 and 15, and the gap between adjacent tile-shaped magnets does not exceed 3°.

[0015] Preferably, the inner magnetic array mounting member and the outer magnetic array fixing member are made of non-magnetic or weakly magnetic conductive metal materials such as aluminum alloy, titanium alloy, etc.

[0016] The technical innovation and good effects of the present invention are:

[0017] (1) The present invention innovatively proposes a vertical magnetization space electromagnetic array damping technology with adjustable high damping characteristics. Multiple layers of equal-section magnetic rings arranged in an axial array and magnetized vertically between adjacent layers are coaxially nested to form an inner magnetic ring array and an outer magnetic ring array, thereby forming a high-magnetic-density excitation magnetic field around the conductor plate, and preliminarily achieving a high-intensity but originally non-adjustable damping characteristic; further, the magnitude and direction of the current in the coil coaxially nested on the outside of the conductor plate are precisely controlled by a speed feedback control algorithm, thereby dynamically adjusting the excitation magnetic field and damping force to effectively attenuate vibration interference; this innovation not only improves the utilization rate of the magnetic field, but also realizes the adjustability of the damping. This is one of the innovative points that distinguish the present invention from the prior art.

[0018] (2) The present invention can achieve the best precision micro-vibration isolation effect under different working conditions of six degrees of freedom. Six sets of electromagnetic vibration isolation dampers composed of vertically magnetized space electromagnetic array damping structures and helical springs in parallel are used. It can sense and analyze in real time the frequency changes of micro-vibration interference of the load in the three linear directions of x, y, and z and the rotational directions around the three axes of x, y, and z. The speed feedback control algorithm is used to control the magnitude and direction of the current coaxially nested in the outer coil of the conductor plate. The dynamic regulation of the six-degree-of-freedom vibration isolation damping can be achieved without changing the load. It can not only enhance the stability of the micro-vibration isolation system, but also maintain a high vibration isolation effect in a complex and changeable vibration environment with multiple degrees of freedom, providing a "super-quiet" working environment for cutting-edge instruments and equipment, thereby effectively promoting a leap-forward improvement in the accuracy of precision instruments and equipment. This is the second innovation that distinguishes the present invention from the prior art.

[0019] (3) The present invention has high stability and is not affected by the external environment. The design of the magnetic levitation structure fundamentally eliminates the nonlinear problem introduced by friction. The vertically magnetized space electromagnetic array damping structure uses the principle of electromagnetic induction to produce an eddy current damping effect. It not only has an instant and sensitive response speed, but also has high stability. Its damping force is almost not affected by the external environment (such as temperature fluctuations and humidity changes). In addition, the non-contact magnetic levitation design has no mechanical friction, avoiding the nonlinearity caused by friction, which not only extends the service life of the device, but also reduces the subsequent maintenance costs and improves the economy of the device. This is the third innovation that distinguishes the present invention from the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 The three-dimensional view of the six-degree-of-freedom adaptive active-passive composite space electromagnetic array damper;

[0021] Figure 2 is a three-dimensional cross-sectional schematic diagram of an electromagnetic vibration isolation damper;

[0022] Figure 3 It is a front cross-sectional view of the electromagnetic vibration isolation damper;

[0023] Figures 4 to 10 Schematic diagram of the relative position and magnetization direction of the inner magnetic ring array and the outer magnetic ring array when 4, 5, 6, 8, 10, 12 and 15 tile-shaped magnets are spliced ​​together to form a radially magnetized magnetic ring.

[0024] Explanation of the part numbers in the figure: 1 inner magnetic ring array, 2 inner magnetic array mounting part, 3 coil, 4 conductor plate, 5 outer magnetic array fixing part, 6 outer magnetic ring array, 71 upper actuator, 72 lower connecting part, 8 coil spring, 9 upper plate, 10 base plate, 11 vertical magnetization space electromagnetic array damping structure, 12 fixing part, 13 electromagnetic vibration isolation damper, 14 upper flexible hinge, 15 lower flexible hinge. DETAILED DESCRIPTION

[0025] The specific implementation modes of the present invention are described in detail below with reference to the accompanying drawings.

[0026] The six-degree-of-freedom adaptive active-passive composite space electromagnetic array damper can accurately adapt to the change of the excitation frequency, generate adjustable high damping characteristics in real time, and effectively isolate the micro-vibration interference of different frequencies in multiple degrees of freedom; it includes an upper plate 9, a base plate 10 and six sets of electromagnetic vibration isolation dampers 13 connected to the two in a Stewart manner. The upper plate 9 has three translational degrees of freedom and three rotational degrees of freedom relative to the base plate 10. The top of the electromagnetic vibration isolation damper 13 is connected to the fixing part 12 at the bottom of the upper plate 9 through an upper flexible hinge 14, and its bottom is connected to the fixing part 12 at the top of the base plate 10 through a lower flexible hinge 15; the electromagnetic vibration isolation damper 13 is composed of a vertically magnetized space electromagnetic array damping structure 11 and a coil spring 8 The vertical magnetization space electromagnetic array damping structure 11 comprises an inner magnetic ring array 1, an inner magnetic array mounting part 2, a coil 3, a conductor plate 4, an outer magnetic array fixing part 5, an outer magnetic ring array 6, an upper actuator 71 and a lower connecting part 72, and the overall structure is axially symmetrical; the inner magnetic ring array 1, the conductor plate 4 and the outer magnetic ring array 6 are coaxially nested, and are arranged in sequence with equal gaps along the radius from the axis to the outside; the inner magnetic ring array 1 is coaxially nested, tightly matched, and fixedly installed on the inner magnetic array mounting part 2, and a gap is provided with the conductor plate 4 along the radial direction; the inner magnetic array mounting part 2 is a cylindrical structure with an inverted T-shaped cross-section, the bottom of which is fixedly connected to the outer magnetic array fixing part 5 by a thread, and a gap is provided with the conductor plate 4 at the top, and is radially connected to the outer magnetic array The fixing part 5 is provided with a gap; the conductor plate 4 is an annular sleeve, the top of which is fixedly connected to the upper actuator 71 by a thread, and an annular boss is provided at the bottom, and an annular groove is provided in the boss; the top of the spiral spring 8 is coaxially nested and fixedly installed in the annular groove at the bottom of the conductor plate 4, and the bottom of the spiral spring 8 is coaxially nested and fixedly installed in the annular groove on the bottom surface of the external magnetic array fixing part 5; the coil 3 is symmetrical about the axial height center of the inner magnetic ring array 1, and is coaxially nested, tightly fitted, and fixedly installed on the outer side surface of the conductor plate 4, and a gap is provided with the external magnetic array fixing part 5 along the radial direction; the magnitude and direction of the current flowing through the coil 3 are adaptively adjusted by the controller using a speed feedback control algorithm according to the frequency of external micro-vibration interference; the external magnetic array fixing part 5 is an annular sleeve with deep grooves provided along the circumference of the outer side surface, a gap is provided between the top and the upper flexible hinge 14 in the axial direction, and the bottom is fixedly connected to the lower connecting piece 72 by a thread; the outer magnetic ring array 6 is coaxially nested, tightly matched, and fixedly installed in the deep groove on the outer side of the outer magnetic array fixing piece 5, and the inner magnetic ring array 1 and the outer magnetic ring array 6 are both composed of multiple layers of equal-section magnetic rings arranged in an axial array and vertically magnetized between adjacent layers, and the heights of the odd-numbered layers of magnetic rings are equal, and the heights of the even-numbered layers of magnetic rings are equal; the first layers of the inner magnetic ring array 1 and the outer magnetic ring array 6 are magnetized in the same direction in the radial direction, and on the right half of the front cross-sectional view, with each additional layer, the magnetization direction of the inner magnetic ring rotates 90° clockwise, and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise.

[0027] As a specific implementation, the number of layers of the inner magnetic ring array 1 and the outer magnetic ring array 6 satisfies 4n, where n≥1, n∈N+ .

[0028] As a specific implementation, the heights of the magnetic rings in the same layer in the inner magnetic ring array 1 and the outer magnetic ring array 6 are equal.

[0029] As a specific implementation, the bottom surface of the first layer of magnetic rings in the inner magnetic ring array 1 coincides with the bottom surface of the first layer of magnetic rings in the outer magnetic ring array 6 .

[0030] As a specific implementation, the conductor plate 4 is made of a metal material with high electrical conductivity and high magnetic permeability, such as copper, iron, cobalt, and nickel.

[0031] As a specific implementation, the radially magnetized magnetic rings in the inner magnetic ring array 1 and the outer magnetic ring array 6 are composed of multiple tile-shaped magnets that are uniformly magnetized along the radius. The number of tile-shaped magnets can be 4, 6, 8, 10, 12 and 15, and the gap between adjacent tile-shaped magnets does not exceed 3°.

[0032] As a specific implementation, the inner magnetic array mounting member 2 and the outer magnetic array fixing member 5 are made of non-magnetic or weakly magnetic conductive metal materials such as aluminum alloy, titanium alloy, etc.

[0033] Combine the following Figure 1 to Figure 3 An embodiment of the present invention is given.

[0034] The six-degree-of-freedom adaptive active-passive composite space electromagnetic array damper is composed of an upper plate 9, a base plate 10, and six sets of electromagnetic vibration isolation dampers 13 connected to the upper plate 9 and arranged in a Stewart manner. It can accurately adapt to changes in the excitation frequency, produce adjustable high damping characteristics in real time, and effectively isolate micro-vibration interferences of different frequencies in multiple degrees of freedom. The upper plate 9 has three degrees of freedom of translation along the x, y, and z axes and three degrees of freedom of rotation around the x, y, and z axes relative to the base plate 10. In each set of electromagnetic vibration isolation dampers 13, the top of the upper actuator 71 is connected to the fixing part 12 at the bottom of the upper plate 9 through four threaded holes evenly distributed on the upper flexible hinge 14, and the bottom of the lower connecting part 72 is connected to the fixing part 12 on the base plate 10 through four threaded holes evenly distributed on the lower flexible hinge 15. The axes of the two adjacent sets of low-frequency electromagnetic vibration isolators 13 are perpendicular to each other.

[0035] The electromagnetic vibration isolation damper 13 is composed of a vertical magnetization space electromagnetic array damping structure 11 and a coil spring 8 in parallel. The vertical magnetization space electromagnetic array damping structure 11 includes an inner magnetic ring array 1, an inner magnetic array mounting part 2, a coil 3, a conductor plate 4, an outer magnetic array fixing part 5, an outer magnetic ring array 6, an upper actuator 71 and a lower connecting part 72. The overall structure is axially symmetrical. The inner magnetic ring array 1, the conductor plate 4 and the outer magnetic ring array 6 are coaxially nested and arranged in sequence with equal gaps along the radius from the axis to the outside. The inner magnetic ring array 1 is coaxially nested, tightly fitted, and fixedly installed on the inner magnetic array mounting part 2, and a gap is provided with the conductor plate 4 in the radial direction. The inner magnetic array mounting part 2 and the outer magnetic array fixing part 5 are non-magnetic or weakly magnetic aluminum alloy, titanium alloy and other metal conductive materials. The inner magnetic array mounting part 2 is a cylindrical structure with an inverted T-shaped cross section. Its bottom is fixedly connected to the outer magnetic array fixing part 5 through four evenly distributed threaded holes. The top maintains a gap of 3mm to 10mm with the conductor plate 4, and a gap is provided with the outer magnetic array fixing part 5 in the radial direction. The conductor plate 4 is an annular sleeve made of high conductivity and high magnetic permeability metal materials such as copper, iron, cobalt, and nickel. Its top is fixedly connected to the upper actuator 71 through threads, and an annular boss is provided at the bottom, and an annular groove is provided in the boss; the top of the coil spring 8 is coaxially nested and fixedly installed in the annular groove at the bottom of the conductor plate 4, and its bottom is coaxially nested and fixedly installed in the annular groove on the bottom surface of the outer magnetic array fixing part 5.

[0036] The coil 3 is formed by winding a copper wire in a circle, the diameter of the copper wire is not less than 0.25mm and not more than 2mm, and each layer or each section of the copper wire is insulated with insulating paint, insulating paper or insulating sleeves to prevent short circuits. The height of the coil 3 is equal to the inner magnetic ring array 1 and the outer magnetic ring array 6, and the current does not exceed 10A. The heat dissipation efficiency can be improved by increasing the heat dissipation area (such as using a heat sink or increasing air circulation), and liquid cooling or phase change cooling and other efficient cooling methods can also be used to quickly and effectively dissipate the heat generated during operation to prevent overheating. The coil 3 is symmetrical about the axial height center of the inner magnetic ring array 1, and is coaxially nested, tightly fitted, and fixedly installed on the conductor plate 4, with a gap provided in the radial direction with the outer magnetic array fixing part 5; the magnitude and direction of the current flowing through the coil 3 are adaptively adjusted according to the frequency of external micro-vibration interference by the controller using a speed feedback control algorithm; the outer magnetic array fixing part 5 is an annular sleeve with deep grooves opened along the circumference of the outer side surface, and its top end maintains a gap of 3mm to 10mm in the axial direction with the upper flexible hinge 14, and the bottom is fixedly connected to the lower connecting part 72 by a thread; the outer magnetic ring array 6 is coaxially nested, tightly fitted, and fixedly installed in the deep groove on the outside of the outer magnetic array fixing part 5.

[0037] The inner magnetic ring array 1 and the outer magnetic ring array 6 are both composed of multiple layers of equal-section magnetic rings arranged in an axial array and magnetized perpendicularly between adjacent layers, and the heights of the magnetic rings in the same layer in the inner magnetic ring array 1 and the outer magnetic ring array 6 are equal. The magnetic rings are all N44H brand Ru-Fe-B permanent magnets, with a remanence of 13.54 kGs, an intrinsic coercive force of 12.66 kOe, and a relative magnetic permeability μ r =1.23. The inner radius and outer radius of the inner magnetic ring array are 2mm and 4.3mm respectively, the height of the inner magnetic rings in odd layers is 2.5mm, and the height of the inner magnetic rings in even layers is 3.7mm. The inner radius and outer radius of the outer magnetic ring array 6 are 14mm and 16.5mm respectively, the height of the outer magnetic rings in odd layers is 2.5mm, and the height of the outer magnetic rings in even layers is 3.7mm. The first layer of inner and outer magnetic rings are magnetized from the axis along the radius outward, and their bottom surfaces coincide. On the right half of the front section view, with each additional layer of magnetic rings, the magnetization direction of the inner magnetic ring rotates 90° clockwise, and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise. The radially magnetized magnetic rings in the inner magnetic ring array 1 and the outer magnetic ring array 6 are both made of 8 42° tile-shaped magnets spliced ​​together, and the gap between adjacent tile-shaped magnets is 3°. When the heights of the magnetic rings in the same layer in the inner magnetic ring array 1 and the outer magnetic ring array 6 are equal, the damping value generated by the vertical magnetization space electromagnetic array damping structure 11 is the highest.

[0038] The spiral spring 8 stably supports the vibration isolation load placed on the top of the upper plate 9, and effectively isolates the micro-vibration in the medium and high frequency bands, providing a solid support foundation for precision equipment. When the vibration isolation load vibrates up and down due to interference, it will drive the conductor plate 4 to produce relative movement relative to the strong excitation magnetic field generated by the inner magnetic ring array 1 and the outer magnetic ring array 6. In this process, the conductor plate 4 cuts the magnetic flux lines, causing its internal magnetic flux to change, thereby exciting annular eddy currents on the surface of the conductor. These eddy currents then apply a damping force to the conductor plate 4 that is opposite to its direction of movement and proportional to the relative movement speed. This damping force effectively converts the kinetic energy of the vibration isolation load into electrical energy inside the conductor plate 4. Subsequently, the electrical energy is dissipated in the form of heat energy, achieving the effect of energy consumption and vibration reduction. When the frequency of external micro-vibration interference changes, the size and direction of the current in the coil coaxially nested on the outside of the conductor plate 4 are precisely regulated through the speed feedback control algorithm, which can immediately respond to changes in the external excitation frequency and dynamically adjust the damping force to ensure that the best vibration isolation effect can be provided under different working conditions. Specifically, for high-frequency vibrations, by precisely controlling the size and direction of the current in the coil 3, the magnetic field generated by the energized coil can partially offset the strong excitation magnetic field generated by the inner magnetic ring array 1 and the outer magnetic ring array 6, thereby reducing the damping force of the electromagnetic vibration isolation damper 13 and accelerating the attenuation of high-frequency vibrations; and for low-frequency vibrations or vibrations close to the natural frequency of the coil spring 8, by precisely controlling the size and direction of the current in the coil, the magnetic field generated by the energized coil can enhance the strong excitation magnetic field generated by the inner magnetic ring array 1 and the outer magnetic ring array 6, thereby increasing the damping force generated by the electromagnetic vibration isolation damper 13 and effectively attenuating vibration interference in the low-frequency or resonant range.

[0039] The vertical magnetized space electromagnetic array damping structure 11 uses magnetic levitation to produce high damping characteristics, and dynamically adjusts the damping size by precisely controlling the electromagnetic field, effectively attenuating micro-vibrations of different frequencies. Its rapid response capability and high-precision control characteristics can still maintain stability in the face of complex and changeable vibration environments; as a non-contact high-stability adjustable damping structure, it is characterized by no mechanical friction, thereby avoiding nonlinear problems caused by friction, and also preventing the introduction of additional stiffness, without affecting the stiffness characteristics of the vibration isolation system, and fully ensuring the vibration isolation bandwidth. The vertical magnetized space electromagnetic array damping structure 11 and the coil spring 8 are used in parallel to support the load, which can improve the vibration isolation performance without affecting the load-bearing mass, and provide an "ultra-quiet" working environment for cutting-edge instruments and equipment such as ultra-precision lithography machines, high-resolution satellite cameras, and ultra-precision machine tools.

[0040] The magnetization process of radially magnetized magnetic rings is complicated and the magnetization effect cannot be guaranteed. Therefore, multiple tile-shaped magnets that are uniformly magnetized radially are often spliced ​​together. Figures 4 to 10Schematic diagram of the relative position and magnetization direction of the inner magnetic ring array 1 and the outer magnetic ring array 6 when 4, 5, 6, 8, 10, 12 and 15 tile-shaped magnets are respectively spliced ​​to form a radial magnetization magnetic ring. The gap between adjacent tile-shaped magnets is usually no more than 3° to ensure the continuity and uniformity of the magnetic field.

Claims

1. A six-degree-of-freedom adaptive active-passive composite space electromagnetic array damper, which can accurately adapt to changes in excitation frequency, generate adjustable high damping characteristics in real time, and effectively isolate micro-vibration interferences of different frequencies in multiple degrees of freedom; comprising an upper plate (9), a base plate (10), and six sets of electromagnetic vibration isolation dampers (13) connected to the upper plate (9) and arranged in a Stewart manner, wherein the upper plate (9) has three translational degrees of freedom and three rotational degrees of freedom relative to the base plate (10), the top of the electromagnetic vibration isolation damper (13) is connected to a fixing member (12) at the bottom of the upper plate (9) through an upper flexible hinge (14), and the bottom thereof is connected to a fixing member (12) at the top of the base plate (10) through a lower flexible hinge (15); characterized in that: The electromagnetic vibration isolation damper (13) is composed of a vertical magnetization space electromagnetic array damping structure (11) and a coil spring (8) in parallel; the vertical magnetization space electromagnetic array damping structure (11) comprises an inner magnetic ring array (1), an inner magnetic array mounting member (2), a coil (3), a conductor plate (4), an outer magnetic array fixing member (5), an outer magnetic ring array (6), an upper actuator (71) and a lower connecting member (72), and the overall structure is axially symmetrical; the inner magnetic ring array (1), the conductor plate (4) and the outer magnetic ring array (6) are coaxially nested and arranged in sequence with equal gaps from the axis along the radius outward; the inner magnetic ring array (1) is coaxially nested , tightly fitted and fixedly mounted on the inner magnetic array mounting member (2), with a gap being provided in the radial direction with the conductor plate (4); the inner magnetic array mounting member (2) is a cylindrical structure with an inverted T-shaped cross-section, the bottom of which is fixedly connected to the outer magnetic array mounting member (5) by means of threads, the top of which is provided with a gap with the conductor plate (4), and the gap being provided in the radial direction with the outer magnetic array mounting member (5); the conductor plate (4) is an annular sleeve, the top of which is fixedly connected to the upper actuator (71) by means of threads, the bottom of which is provided with an annular boss, and the boss is provided with an annular groove; the top of the coil spring (8) is coaxially nested and fixedly mounted in the annular groove at the bottom of the conductor plate (4), and the The bottom is coaxially nested and fixedly installed in the annular groove on the bottom surface of the outer magnetic array fixing part (5); the coil (3) is symmetrical about the axial height center of the inner magnetic ring array (1), and is coaxially nested, tightly matched, and fixedly installed on the outer side surface of the conductor plate (4), and a gap is provided with the outer magnetic array fixing part (5) in the radial direction; the magnitude and direction of the current flowing through the coil (3) are adaptively adjusted according to the frequency of external micro-vibration interference by the controller using a speed feedback control algorithm; the outer magnetic array fixing part (5) is an annular sleeve with deep grooves on the outer side surface along the circumference, and a gap is provided between the top end and the upper flexible hinge (14) in the axial direction, and the bottom is connected by a screw The groove is fixedly connected to the lower connecting piece (72); the outer magnetic ring array (6) is coaxially nested, tightly matched, and fixedly installed in the deep groove outside the outer magnetic array fixing piece (5); the inner magnetic ring array (1) and the outer magnetic ring array (6) are both composed of multiple layers of equal-section magnetic rings arranged in an axial array and magnetized perpendicularly between adjacent layers, and the heights of the odd-numbered layers of magnetic rings are equal, and the heights of the even-numbered layers of magnetic rings are equal; the first layers of the inner magnetic ring array (1) and the outer magnetic ring array (6) are magnetized in the same direction in the radial direction, and on the right half of the front cross-sectional view, with each additional layer, the magnetization direction of the inner magnetic ring rotates 90° clockwise, and the magnetization direction of the outer magnetic ring rotates 90° counterclockwise.

2. The six-degree-of-freedom adaptive active-passive composite space electromagnetic array damper according to claim 1, characterized in that: The number of layers of the inner magnetic ring array (1) and the outer magnetic ring array (6) satisfies 4n, where n≥1, n∈N + .

3. The six-degree-of-freedom adaptive active-passive composite space electromagnetic array damper according to claims 1 and 2, characterized in that: The heights of the magnetic rings in the same layer in the inner magnetic ring array (1) and the outer magnetic ring array (6) are equal.

4. The six-degree-of-freedom adaptive active-passive composite space electromagnetic array damper according to claims 1 to 3, characterized in that: The bottom surface of the first layer of magnetic rings in the inner magnetic ring array (1) overlaps with the bottom surface of the first layer of magnetic rings in the outer magnetic ring array (6).

5. The six-degree-of-freedom adaptive active-passive composite space electromagnetic array damper according to claim 1, characterized in that: The conductor plate (4) is made of a metal material with high electrical conductivity and high magnetic permeability, such as copper, iron, cobalt, nickel, etc.

6. The six-degree-of-freedom adaptive active-passive composite space electromagnetic array damper according to claims 1 to 4, characterized in that: The radially magnetized magnetic rings in the inner magnetic ring array (1) and the outer magnetic ring array (6) are formed by splicing a plurality of tile-shaped magnets uniformly magnetized along the radius. The number of tile-shaped magnets can be 4, 6, 8, 10, 12 or 15, and the gap between adjacent tile-shaped magnets does not exceed 3°.

7. The six-degree-of-freedom adaptive active-passive composite space electromagnetic array damper according to claim 1, characterized in that: The inner magnetic array mounting piece (2) and the outer magnetic array fixing piece (5) are made of non-magnetic or weakly magnetic conductive metal materials such as aluminum alloy, titanium alloy, etc.

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