High-speed optical rotation module

Abstract

The invention relates to a high-speed optical rotation module. The high-speed optical rotation module comprises a substrate and a rotating mirror assembly mounted on the substrate, the driving end of the front end of the servo motor is connected with a second synchronous wheel installed at the front end of the rotating shaft through a first synchronous wheel and a synchronous belt in sequence, a first lens is installed on the inner side of the rear end of the first lens fixing block, a middle block is installed at the rear end of the first lens fixing block, and a second lens is installed on the inner side of the rear end of the second lens fixing block. Compared with a traditional machining mode, more semiconductor industry materials such as high-strength metal, glass, ceramics, crystals and some high-brittleness materials can be machined, and high-precision micropores, taper holes and the like can be machined more easily.

Description

Technical Field

[0001] The present invention relates to the technical field related to laser processing, and in particular to a high-speed optical rotation module. Background Art

[0002] With the rapid development of industrial technology, high-precision micro-holes are used in various industries. The development trend is small aperture, large depth, high accuracy, and a wide range of application materials (such as high-strength, high-hardness, high-toughness, high-melting-point metals, ceramics, glass, polymer materials, crystals and other substances). Traditional micro-hole processing technologies mainly include mechanical processing, electric spark, chemical corrosion, ultrasonic drilling and other technologies. These technologies have their own characteristics, but they can no longer meet the higher micro-hole processing needs. For example, mechanical processing is very inefficient for high-hardness and high-brittle materials, and it is difficult to process holes smaller than 0.2mm; electric spark can only process metal materials. Laser drilling has the advantages of high efficiency, small limit aperture, high accuracy, low cost, and almost no material selectivity. It has now become one of the mainstream technologies for micro-hole processing.

[0003] The most commonly used processing method for laser drilling is galvanometer scanning, which can be performed layer by layer in a circular or spiral manner. However, the disadvantage of galvanometer scanning is that taper cannot be avoided. During the hole making process, due to the divergence and multiple reflections of the focused laser beam, the material ablation rate will drop sharply as the hole making depth increases. Therefore, it is more difficult to prepare microholes with a larger aspect ratio on thicker materials.

[0004] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a high-speed optical rotation module to make it more valuable for industrial use. Summary of the invention

[0005] In order to solve any of the above technical problems, the present invention aims to provide a high-speed optical rotation module.

[0006] To achieve the above object, the present invention adopts the following technical solutions:

[0007] A high-speed optical rotation module comprises a substrate and a rotating mirror assembly mounted on the substrate;

[0008] A servo motor is installed on the substrate on the right side of the rotating mirror assembly through a motor fixing plate, and the rotating mirror assembly includes a rotating shaft, a first lens fixing block and a second lens fixing block;

[0009] The driving end at the front end of the servo motor is connected to the second synchronous wheel installed at the front end of the rotating shaft through the first synchronous wheel and the synchronous belt in sequence, the rear end of the rotating shaft is connected to the front end of the first lens fixing block, the first lens is installed on the inner side of the rear end of the first lens fixing block, the middle block is installed on the rear end of the first lens fixing block, the front end of the second lens fixing block is rotatably installed on the rear end of the middle block, and the second lens is installed on the inner side of the rear end of the second lens fixing block.

[0010] As a further improvement of the present invention, a shock absorbing plate is installed at the bottom of the base plate.

[0011] As a further improvement of the present invention, the shock absorbing plate is a rubber block.

[0012] As a further improvement of the present invention, the second synchronous wheel is located between two bearing seats, both bearing seats are mounted on the base plate, and the rotating shaft is mounted on the two bearing seats on both sides along the front-to-back direction through the first bearings respectively.

[0013] As a further improvement of the present invention, a spacer ring is installed on the rotating shaft between the second synchronous wheel and the two bearing seats.

[0014] As a further improvement of the present invention, the front end of the first lens fixing block is mounted on the rotating shaft through a nut locking block.

[0015] As a further improvement of the present invention, the second lens fixing block is mounted on the intermediate block via at least one second bearing.

[0016] As a further improvement of the present invention, the second bearing is mounted on the intermediate block via a locking ring.

[0017] By means of the above scheme, the present invention has at least the following advantages:

[0018] Compared with traditional processing methods, the present invention can process more semiconductor industry materials, such as high-strength metals, glass, ceramics, crystals and some highly brittle materials, and can more easily process high-precision microholes, tapered holes, etc.

[0019] The present invention has higher processing efficiency and lower NG rate.

[0020] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0022] Figure 1 It is a structural schematic diagram of a high-speed optical rotation module of the present invention;

[0023] Figure 2 yes Figure 1 Schematic diagram of the internal structure of the transfer mirror assembly.

[0024] The meanings of the various reference numerals in the figures are as follows.

[0025] Base plate 1, shock absorbing plate 2, servo motor 3, motor fixing plate 4, first synchronous wheel 5, synchronous belt 6, bearing seat 7, second synchronous wheel 8, rotating shaft 9, rotating mirror assembly 10, first bearing 11, spacer ring 12, nut locking block 13, first lens fixing block 14, intermediate block 15, second lens fixing block 16, first lens 17, second lens 18, second bearing 19, locking ring 20. DETAILED DESCRIPTION

[0026] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0027] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the described embodiment is only a part of the embodiment of the present invention, rather than all the embodiments. The components of the embodiment of the present invention generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the present invention provided in the drawings is not intended to limit the scope of the invention claimed for protection, but merely represents the selected embodiment of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present invention.

[0028] like Figure 1-2 As shown, a high-speed optical rotation module includes a substrate 1 and a rotating mirror assembly 10 installed on the substrate 1. A servo motor 3 is installed on the substrate 1 on the right side of the rotating mirror assembly 10 through a motor fixing plate 4. The rotating mirror assembly 10 includes a rotating shaft 9, a first lens fixing block 14 and a second lens fixing block 16.

[0029] The driving end at the front end of the servo motor 3 is connected to the second synchronous wheel 8 installed at the front end of the rotating shaft 9 through the first synchronous wheel 5 and the synchronous belt 6 in sequence. The rear end of the rotating shaft 9 is connected to the front end of the first lens fixing block 14. A first lens 17 is installed on the inner side of the rear end of the first lens fixing block 14, and an intermediate block 15 is installed on the rear end of the first lens fixing block 14. The front end of the second lens fixing block 16 is rotatably installed on the rear end of the intermediate block 15, and a second lens 18 is installed on the inner side of the rear end of the second lens fixing block 16.

[0030] A damping plate 2 is installed at the bottom of the base plate 1, and the damping plate 2 is a rubber block.

[0031] The second synchronous wheel 8 is located between the two bearing seats 7, both bearing seats 7 are installed on the base plate 1, and the rotating shaft 9 is installed on the two bearing seats 7 through the first bearings 11 on both sides along the front-to-back direction. Spacer rings 12 are installed on the rotating shaft 9 between the second synchronous wheel 8 and the two bearing seats 7.

[0032] The front end of the first lens fixing block 14 is mounted on the rotating shaft 9 through the nut locking block 13 , and the second lens fixing block 16 is mounted on the intermediate block 15 through at least one second bearing 19 , and the second bearing 19 is mounted on the intermediate block 15 through a locking ring 20 .

[0033] The installation structure of the present invention is briefly described as follows:

[0034] The servo motor 3 is installed on the base plate 1 through the motor fixing plate 4. The large-diameter first synchronous wheel 5 is directly sleeved through the motor shaft and locked with a top screw. The synchronous belt 6 is sleeved on the first synchronous wheel 5 and the small-diameter second synchronous wheel 8. Two deep groove ball bearings (first bearings 11) are fixed on the two bearing seats 7 and fixed by retaining springs. The second synchronous wheel 8 is placed between the two bearings, and then the rotating shaft 9 is inserted into the two deep groove ball bearings. The first lens fixing block 14 is fixed on the rotating shaft 9, and the first lens 17 is installed on the first lens fixing block 14 by screws. Two thrust needle bearings (second bearings 19) are installed in the middle block 15, and 12

[0035] The second lens 18 is installed in the second lens fixing block 16 .

[0036] Working principle of the present invention:

[0037] After the equipment is powered on, the PLC controls the servo motor 3 to rotate at 1200 rpm, driving the first synchronous wheel 5 to rotate, and the second synchronous wheel 8 is driven by the synchronous belt 6. The ratio of the large and small synchronous wheels is 2.5:1, and the second synchronous wheel 8 rotates at 3000 rpm. The laser beam enters this optical tube, passes through the first lens 17 first, and then passes through the second lens 18. The lens is driven by the motor synchronous wheel in the optical tube and rotates at 3000 rpm, thereby achieving the optical rotation cutting effect.

[0038] The present invention can process more semiconductor industry materials, such as high-strength metals, glass, ceramics, crystals and some highly brittle materials, and is more likely to process high-precision micro-holes, tapered holes, etc. The processing efficiency is higher and the NG rate is lower.

[0039] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implying the number of technical features indicated. Thus, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0040] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principles of the present invention, and these improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A high-speed optical rotation module, comprising a substrate (1) and a rotating mirror assembly (10) mounted on the substrate (1); characterized in that: A servo motor (3) is mounted on a base plate (1) on the right side of the rotating mirror assembly (10) via a motor fixing plate (4); the rotating mirror assembly (10) comprises a rotating shaft (9), a first lens fixing block (14) and a second lens fixing block (16); The driving end at the front end of the servo motor (3) is connected to a second synchronous wheel (8) installed at the front end of a rotating shaft (9) in sequence through a first synchronous wheel (5) and a synchronous belt (6); the rear end of the rotating shaft (9) is connected to the front end of a first lens fixing block (14); a first lens (17) is installed on the inner side of the rear end of the first lens fixing block (14); an intermediate block (15) is installed on the rear end of the first lens fixing block (14); the front end of the second lens fixing block (16) is rotatably installed on the rear end of the intermediate block (15); and a second lens (18) is installed on the inner side of the rear end of the second lens fixing block (16).

2. A high-speed optical rotation module as claimed in claim 1, characterized in that: A shock absorbing plate (2) is installed at the bottom of the base plate (1).

3. A high-speed optical rotation module as claimed in claim 2, characterized in that: The shock absorbing plate (2) is a rubber block.

4. A high-speed optical rotation module as claimed in claim 1, characterized in that: The second synchronous wheel (8) is located between two bearing seats (7), the two bearing seats (7) are both mounted on the base plate (1), and the rotating shaft (9) is mounted on the two bearing seats (7) along both sides of the front-back direction through first bearings (11).

5. A high-speed optical rotation module as claimed in claim 4, characterized in that: A spacer ring (12) is installed on the rotating shaft (9) between the second synchronous wheel (8) and the two bearing seats (7).

6. A high-speed optical rotation module as claimed in claim 1, characterized in that: The front end of the first lens fixing block (14) is mounted on the rotating shaft (9) via a nut locking block (13).

7. A high-speed optical rotation module as claimed in claim 1, characterized in that: The second lens fixing block (16) is mounted on the intermediate block (15) via at least one second bearing (19).

8. A high-speed optical rotation module as claimed in claim 7, characterized in that: The second bearing (19) is mounted on the intermediate block (15) via a locking ring (20).

Images