Mask management system and management method, electronic equipment and readable storage medium

Abstract

The invention provides a mask management system and method, electronic equipment and a readable storage medium. The mask management system comprises an acquisition module, a data storage module, a determination module and an output module. The acquisition module is used for acquiring identification information of target equipment, and the target equipment is equipment to use a mask; the data storage module stores information of a plurality of masks and information of a plurality of devices using the masks, and the information of each device comprises identification information and target process data; the target equipment is one of a plurality of pieces of equipment using the mask; the determining module is used for determining a target process parameter of the target equipment according to the identification information of the target equipment, and determining a target mask matched with the target equipment according to the target process parameter of the target equipment and the information of each mask; and the output module is used for outputting the identification information of the target mask.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a mask management system and management method, an electronic device and a readable storage medium. Background Art

[0002] In the semiconductor manufacturing process, the mask plays a vital role. The mask is a transparent glass plate with a microscopic pattern. The pattern of the mask can be transferred to the photoresist using photolithography technology, and the film layer of the semiconductor structure is etched with the photoresist to form a pattern.

[0003] Selecting a mask that matches the lithography equipment is very important for the yield of semiconductor products. Summary of the invention

[0004] The present application provides a mask management system and management method, electronic equipment and readable storage medium.

[0005] According to a first aspect of an embodiment of the present application, a mask management system is provided. The mask management system includes:

[0006] An acquisition module, used to acquire identification information of a target device; the target device is a device to use a mask;

[0007] A data storage module stores information of a plurality of masks and information of a plurality of devices using the masks, wherein the information of each device includes identification information and target process data; the target device is one of the plurality of devices using the masks;

[0008] A determination module, configured to determine a target process parameter of the target device according to the identification information of the target device, and determine a target mask matching the target device according to the target process parameter of the target device and the information of each mask;

[0009] The output module is used to output the identification information of the target mask.

[0010] In one embodiment, the information of each mask includes specification information and historical process data; the historical process data includes information on the number of times the mask has been used and whether the process steps corresponding to each number of uses are qualified; the target process data includes target specification parameters of the mask and target qualified rate of the process steps using the mask;

[0011] The determination module is specifically used to: determine the pass rate of the process steps of each mask according to the number of times each mask has been used and whether the process steps corresponding to each number of uses are qualified; determine the mask that is in a ready-to-use state, whose specification parameters match the target specification parameters and whose pass rate is greater than or equal to the target pass rate as the target mask.

[0012] In one embodiment, the information of each mask also includes current state information; the determination module is further used to determine whether the mask is in a state to be used according to the current state information of each mask; the target mask determined by the determination module is a mask in a state to be used.

[0013] In one embodiment, the current state information of the mask includes current position information and cleaning state information;

[0014] The determination module is specifically used to: determine whether the corresponding mask is in the device according to the current position information of each mask, and determine whether the corresponding mask is in a clean state according to the cleaning state information of each mask; determine that the mask that is not in the device and is in a clean state is a mask to be used.

[0015] In one embodiment, the historical process data includes information on the number of times the mask has been used and whether the process steps corresponding to each number of uses are qualified; the mask management system also includes a data recording module; the data recording module is used to modify the number of times the target mask has been used after the acquisition module obtains information that the target device has finished using the target mask, and store the information on whether the process steps of the target device using the target mask are qualified in the data storage module.

[0016] In one embodiment, the data storage module further stores the remaining usage count of each of the mask plates, and the remaining usage count of the mask plate matched with the target device determined by the determination module is greater than or equal to 1;

[0017] The data recording module is further used to modify the remaining number of times the target mask is used after the acquisition module acquires the information that the target device ends using the target mask.

[0018] In one embodiment, the acquisition module is further used to acquire a state modification instruction; the mask management system further includes a state modification module, and the state modification module is used to modify the current state information of the corresponding mask according to the state modification instruction.

[0019] In one embodiment, the state modification instruction includes a scrap instruction, and the state modification module modifies the current state information of the corresponding mask into a scrap state according to the scrap instruction.

[0020] In one embodiment, the determination module is also used to determine whether each mask in a scrapped state can match at least one device based on information of each mask in a scrapped state when target process data of at least one device changes; when it is determined that at least one mask in a scrapped state can match at least one target device, modification information is sent to the state modification module so that the state modification module modifies the current state information of the corresponding mask in a scrapped state to cancel the scrapped state.

[0021] In one embodiment, the acquisition module is also used to acquire maintenance information of the mask plate, and the mask plate management system also includes a data recording module; the data recording module is used to store the corresponding mask plate maintenance information in the data storage module after the acquisition module acquires the mask plate maintenance information.

[0022] In one embodiment, the output module is also used to: when the determination module determines that the number of target masks matching the target device is more than two, output at least partial information of each of the target masks; the acquisition module is also used to obtain a selection instruction, the selection instruction includes at least partial information of one of the target masks; the output module outputs identification information of the target mask corresponding to the selection instruction.

[0023] In one embodiment, a mask management system includes a display panel;

[0024] The display panel is used to display a first interface, wherein the first interface displays at least part of the information related to the target mask; and / or,

[0025] The acquisition module is further used to acquire a query instruction, which includes identification information of the mask to be queried; the display panel is further used to display a second interface, which displays at least part of the information of the mask corresponding to the query instruction.

[0026] In one embodiment, the mask management system includes a data receiving module, which is used to receive information about the mask and / or information about the device, and store the received information in the data storage module according to the hierarchy.

[0027] According to a second aspect of an embodiment of the present application, a method for managing a mask is provided, comprising:

[0028] Obtaining identification information of a target device; the target device is a device for which a mask is to be used;

[0029] Determining a target process parameter of the target device according to the identification information of the target device, and determining a target mask matching the target device according to the target process parameter of the target device and the information of each mask;

[0030] Output the identification information of the target mask.

[0031] According to a third aspect of an embodiment of the present application, an electronic device is provided, including a memory and a processor, wherein the memory stores a program, and the processor is configured to execute the above-mentioned mask management method through the program.

[0032] According to a fourth aspect of an embodiment of the present application, a readable storage medium is provided, wherein the readable storage medium stores a computer program, wherein the computer program implements the above-mentioned mask management method when executed by a processor.

[0033] The embodiments of the present application provide a mask management system and management method, an electronic device and a readable storage medium. The determination module of the management system can determine the target process parameters of the target device according to the identification information of the target device and the identification information and target process parameters of multiple devices stored in the data storage module, and then can determine the target mask matching the target device according to the target process parameters and the information of multiple masks stored in the data storage module, so that the user can select the target mask according to the identification information of the target mask output by the output module; compared with the solution of manually selecting the mask matching the target device based on experience and recorded data, the time required for selecting the mask can be greatly reduced, and the selected target mask has a high degree of matching with the target device, which helps to improve production efficiency and improve the yield and reliability of products prepared by the target device using the target mask. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 is a block diagram of a mask management system provided by an exemplary embodiment of the present application;

[0035] Figure 2 is another block diagram of a mask management system provided by an exemplary embodiment of the present application;

[0036] Figure 3 is a schematic diagram of a first interface displayed by a client provided by an exemplary embodiment of the present application;

[0037] Figure 4 is a schematic diagram of a second interface displayed by a client provided by an exemplary embodiment of the present application;

[0038] Figure 5is a schematic diagram of a third interface displayed by a client provided by an exemplary embodiment of the present application;

[0039] Figure 6 is a schematic diagram of a fourth interface displayed by a client provided by an exemplary embodiment of the present application;

[0040] Figure 7 is a schematic diagram of a fifth interface displayed by a client provided by an exemplary embodiment of the present application;

[0041] Figure 8 is a schematic diagram of a sixth interface displayed by a client provided by an exemplary embodiment of the present application;

[0042] Fig. 9 is a schematic diagram of a seventh interface displayed by a client provided by an exemplary embodiment of the present application;

[0043] Fig.10 is a schematic diagram of an eighth interface displayed by a client provided by an exemplary embodiment of the present application;

[0044] Fig.11 is a schematic diagram of a ninth interface displayed by a client provided by an exemplary embodiment of the present application;

[0045] Fig.12 is a schematic diagram of a tenth interface displayed by a client provided by an exemplary embodiment of the present application;

[0046] Fig.13 It is a schematic diagram of the architecture of a mask management system provided by an exemplary embodiment of the present application. DETAILED DESCRIPTION

[0047] Here, the technical solutions in the embodiments (or "implementations") of the present application will be described clearly and completely in conjunction with the accompanying drawings. The following embodiments and features in the embodiments may be combined with each other without conflict. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements.

[0048] If there are terms involving directional indications or positional relationships in the embodiments of the present application (such as up, down, left, right, front, back, inside, outside, top, bottom, center, vertical, horizontal, longitudinal, transverse, length, width, counterclockwise, clockwise, axial, radial, circumferential, etc.), such terms are only used to explain the relative positional relationship, movement, etc. between the components in a certain specific posture; if the specific posture changes, the directional indication or positional relationship will also change accordingly. In addition, the terms "first", "second", etc. involved in the embodiments of the present application are only used for the purpose of convenience of description and cannot be understood as indicating or implying relative importance.

[0049] Masks play an important role in the chip manufacturing process. Masks are usually used by circuit designers using computer-aided design software (such as CAD software) to design the circuit diagram of the integrated circuit. The circuit diagram determines the pattern of the mask used to prepare the circuit layer. The mask can be obtained by drawing the pattern on a glass substrate or quartz substrate coated with a photosensitive material using electron beam or laser direct writing technology according to the designed circuit diagram.

[0050] The chip includes multiple wiring layers stacked in layers. The process of preparing the wiring layers using a mask is as follows: first, a metal layer with a thickness of several nanometers is arranged on the substrate; the substrate here can be a silicon wafer, or other metal layers or dielectric layers, such as a glass substrate, a sapphire substrate, etc.; then a photoresist film layer is coated on the metal; then the mask is placed on the photoresist film layer, and light (usually ultraviolet light) is used for exposure processing, and the light passing through the through holes on the mask is incident on the photoresist film layer and the area corresponding to the through holes, so that this part of the photoresist film layer Part of the area is denatured, and the area of ​​the photoresist film layer blocked by the mask is not denatured; then the photoresist film layer is developed with a developer, the area of ​​the photoresist film layer that has been denatured is developed away, and the area that has not been denatured is retained, or the area that has not been denatured is developed away, and the area that has been denatured is retained; then, the area of ​​the photoresist film layer that is retained is dried; then, the metal layer is etched, the area of ​​the metal layer that is not covered by the photoresist film layer is etched away, and the area covered by the photoresist film layer is retained, and the retained metal layer is the wiring layer; then, the photoresist film layer is removed.

[0051] Generally, the entire process of manufacturing semiconductor devices involves many photolithography processes. The preparation process of some more complex chips requires up to 50 photolithography processes using masks. Therefore, choosing a matching mask is crucial to the quality of semiconductor devices.

[0052] The present application embodiment provides a mask management system. Figure 1 As shown, the mask management system includes an acquisition module 10 , a data storage module 20 , a determination module 30 and an output module 40 .

[0053] The acquisition module is used to acquire the identification information of the target device; the target device is a device to be used with a mask. The data storage module 20 stores information of multiple masks and information of multiple devices using the masks, and the information of each device includes identification information and target process data. The target device is one of the multiple devices using the mask. The determination module 30 is used to determine the target process parameters of the target device according to the identification information of the target device, and determine the target mask matching the target device according to the target process parameters of the target device and the information of each mask. The output module 40 is used to output the identification information of the target mask.

[0054] The mask management system provided in the embodiment of the present application can determine the target process parameters of the target device according to the identification information of the target device and the identification information and target process parameters of multiple devices stored in the data storage module 20 by the determination module 30, and further determine the target mask matching the target device according to the target process parameters and the information of multiple masks stored in the data storage module 20, so that the user can select the target mask according to the identification information of the target mask output by the output module; compared with the solution of manually selecting the mask matching the target device based on experience and recorded data, the time required for selecting the mask can be greatly reduced, and the selected target mask has a higher degree of matching with the target device, which helps to improve production efficiency and improve the yield and reliability of products prepared by the target device using the target mask.

[0055] In one embodiment, Figure 2 As shown, the mask management system includes a server 100 and a client 200, wherein the server 100 includes the data storage module 20, and the client 200 includes the acquisition module 10, the determination module 30, and the output module 40. In this way, a part of the functional modules are set on the client, which can reduce the pressure on the server, improve the response speed of the application, ensure the stable operation of the system and the smoothness of the client display interface, thereby improving the user experience.

[0056] In one embodiment, the information of each mask includes specification information and historical process data. The identification information of the mask includes the material number of the mask and the serial number of the mask. The material number of the mask may include the product model, version number, manufacturing batch, serial number, etc. The specification information of the mask includes the size, thickness, transmittance, etc. of the mask. The historical process data includes information on the number of times the mask has been used and whether the process steps corresponding to each number of uses are qualified. Whether the process steps corresponding to each number of uses are qualified refers to whether the film layer structure prepared by the equipment in the process steps of each use of the mask is qualified.

[0057] In one embodiment, the target process data includes target specification parameters of the mask and target pass rate of the process steps using the mask. The determination module 30 is specifically used to: determine the pass rate of the process steps of each mask according to the number of times each mask has been used and whether the process steps corresponding to each number of uses are qualified; determine the mask whose specification parameters match the target specification parameters and whose pass rate is greater than or equal to the target pass rate as the target mask. The pass rate of the process steps of the mask refers to the pass rate of the film layer structure prepared by the process steps corresponding to all the times the mask has been used.

[0058] Furthermore, the information of each mask also includes current state information; the determination module is further used to determine whether the mask is in a state to be used according to the current state information of each mask; and the target mask determined by the determination module is a mask in a state to be used.

[0059] In one embodiment, the current status information of the mask includes current position information and cleaning status information. The determination module 30 is specifically used to: determine whether the corresponding mask is in the device according to the current position information of each mask, and determine whether the corresponding mask is in a clean state according to each cleaning state information; determine that the mask that is not in the device and is in a clean state is a mask in a state to be used. The current position information may include in the storage warehouse, in the equipment, and in the online side warehouse. The storage warehouse generally refers to a large warehouse dedicated to storing equipment and various fixtures. Generally, the mask will be stored in the storage warehouse after entering the factory. In the equipment means that it is being used by the equipment. The line side warehouse refers to a small warehouse next to the production line. After the equipment finishes using the mask, the mask will be stored in the online side warehouse. The mask is not in the device when it is in the storage warehouse and the online side warehouse. The cleaning status information of the mask includes the cleaning status and the state to be cleaned.

[0060] In one embodiment, the mask management system includes a display panel, and the display panel is used to display an interface, so that the user can understand various information through the interface displayed by the display panel. In some embodiments, the client 200 includes the display panel.

[0061] In one embodiment, the display panel is used to display a first interface, and the first interface displays at least part of the information of the target mask. In this way, the user can learn at least part of the information of the mask matching the target device through the first interface. Figure 3 As shown, the information of the target mask displayed on the first interface includes the material number of the mask, the serial number of the mask, the current position, the number of times used, the specification type, etc.

[0062] In one embodiment, when the current location information of the mask is in a storage warehouse, the location information displayed on the first interface may include the number or name of the storage warehouse where the mask is located, the shelf number in the storage warehouse, and the number of the shelf location; when the current location information of the mask is in a device, the location information displayed on the first interface may include identification information of the device where the mask is located; when the current location information of the mask is in an online side warehouse, the location information displayed on the first interface may include identification information of the online side warehouse where the mask is located.

[0063] In one embodiment, the identification information of the target device can be obtained by scanning the target device with a scanning device, the scanning device can be connected to the management system signal, the scanning device sends the identification information of the target device to the management system, and the acquisition module receives the identification information of the target device sent by the scanning device. In another embodiment, the user can input the identification information of the target device through a keyboard.

[0064] In one embodiment, the mask management system further includes a data recording module; the data recording module is used to modify the number of uses of the corresponding target mask after the acquisition module acquires the information that the target device has finished using the target mask, and store the information whether the process steps of the target device using the target mask are qualified in the data storage module. In this way, after each use of the mask, the information whether the process steps of the mask used that time are qualified will be stored in the data storage module, and this part of the data will also become the historical process data of the mask, that is, the historical process data of the mask has been updated, and the reliability of the mask matching it is determined according to the identification information of the target device in the future. In some embodiments, after the target device finishes using the mask, the user can modify the number of uses of the mask through the keyboard and mouse of the client, and input the information whether the process steps of the mask used that time are qualified to the client, and the client sends the modification information and the information whether the process steps of the mask used that time are qualified to the server, and the server updates the historical process data of the mask. In some embodiments, the client includes the data recording module.

[0065] In one embodiment, the data storage module further stores the remaining usage count of each mask, and the remaining usage count of the target mask matching the target device determined by the determination module is greater than or equal to 1. The data recording module is also used to modify the remaining usage count of the corresponding target mask after the acquisition module acquires information that the target device has finished using the target mask. Figure 3 As shown, the first interface of the client also displays the remaining number of uses of the mask.

[0066] In one embodiment, the data storage module further stores the standard life of each mask, where the standard life of the mask is the total number of times the mask can be used.

[0067] In one embodiment, the output module is further used to: when the number of target masks matched with the target device determined by the determination module is more than two, output at least part of the information of each target mask; the acquisition module is further used to acquire a selection instruction, the selection instruction indicating at least part of the information of one of the target masks; the output module outputs the identification information of the target mask corresponding to the selection instruction. The selection instruction may be input by the user to the client. The selection instruction may be the identification information of the selected target mask. In this way, the user can select the target mask in combination with other situations, for example, the target mask closest to the target device can be selected, or the target mask with the highest pass rate of the process step can be selected.

[0068] In one embodiment, the acquisition module is further used to acquire a query instruction, the query instruction includes the identification information of the mask; the display panel is further used to display a second interface, the second interface displays at least part of the information of the mask corresponding to the query instruction. In this way, the user can learn the information of the queried mask through the information displayed on the second interface. Figure 4 As shown, the second interface displays the material number, serial number, current position, number of times used, specification type, etc. of the queried mask.

[0069] In one embodiment, the acquisition module is also used to acquire a state modification instruction; the mask management system also includes a state modification module, and the state modification module is used to modify the current state information of the corresponding mask according to the state modification instruction. In this way, when the current state of the mask changes, the management system will be modified, so that the user can query the accurate current state information of the mask in the management system. The state modification instruction may include a position information modification instruction and a cleaning state modification instruction. When the position information of the mask changes, the state modification module modifies the position information of the mask; when the cleaning state of the mask changes, the state modification module modifies the cleaning state of the mask.

[0070] In one embodiment, when the acquisition module acquires the state modification instruction indicating that the position information of the mask is changed to being in the device, the display panel can display the third interface. Figure 5As shown, the upper left corner of the third interface displays "Mask on the machine" to indicate that the mask is bound to the equipment, and the mask is transported to the equipment to perform the lithography process. The third interface also displays information related to the equipment and information related to the mask bound to the equipment. The information related to the equipment includes: the equipment group and equipment number of the equipment; the information related to the mask includes: mask type, mask material number and mask code. The third interface can also display a list of equipment, and the equipment list may include the following information of all stored equipment: equipment description, equipment status, port name, port type, material type and port description. The third interface can also display a list of masks that have been put on the machine, and the list of masks that have been put on the machine includes the following information of the masks that have been put on the machine: mask code, mask material number, mask type, supplier, mask cleaning status, and binding time with the equipment. The third interface can also display a list of masks to be put on the machine, and the list of masks includes the following information of the masks to be put on the machine: mask code, mask material number, mask type, supplier, cleaning status, and standard life. In some embodiments, the state modification instruction may be input by a user.

[0071] In one embodiment, after the device finishes using the mask, the mask needs to be cleaned. After the acquisition module acquires the information that the mask is removed from the device, the display panel can display the fourth interface. Figure 6 As shown, the upper left corner of the fourth interface displays "Mask Off the Machine" to indicate that the mask has been removed from the device. The fourth interface also displays information related to the device and information related to the mask. The information related to the device includes: the device group and device number of the device; the information related to the mask includes: mask type, mask material number, mask code, field name, supplier, mask status, standard life, and remaining number of uses. The fourth interface can also display a mask list, which includes the following information of all masks that have been removed from the machine: the device number using the mask, mask code, mask material number, mask type, supplier, standard life, remaining number of uses, binding time with the device, and device type using the mask. In some embodiments, the information that the mask is removed from the device can be input by the user.

[0072] In one embodiment, when the position information of the mask is changed to an online side warehouse, after the acquisition module acquires the state modification instruction, the display panel can display the fifth interface. Figure 7As shown, the upper left corner of the fifth interface displays "Mask withdraws from the line edge" to indicate that the mask has moved to the line edge bin. The fifth interface also displays the following information of the mask moved to the line edge bin: mask type, mask material number, and mask code. The fifth interface can also display a list of masks that have withdrawn from the line edge, and the mask list includes the following information: mask code, mask material number, mask type, supplier, number of times used, standard life, number of remaining uses, and mask status. In some embodiments, the status modification instruction can be input by the user.

[0073] In one embodiment, after the mask is removed from the equipment, it is necessary to perform inspection and cleaning operations. If it is found that the mask can no longer meet the production requirements after inspection, the mask needs to be repaired. The acquisition module is also used to obtain the repair information of the mask, and the management system of the mask also includes a data recording module; the data recording module is used to store the corresponding mask repair information in the data storage module after the acquisition module obtains the repair information of the mask. The repair information may include repair items. In this way, the user can learn whether the mask has been repaired and the repair items performed through the management system.

[0074] In some embodiments, the repair information of the mask can be input to the client by the user. The display panel is also used to display the sixth interface. Figure 8 As shown, the upper left corner of the sixth interface displays "Mask Repair" to indicate that the mask has been repaired. The sixth interface can display the following information about the mask: mask type, mask material number, mask code, repair items, number of uses, standard life, remaining number of uses, and current location (e.g., already on the machine, back-offline side warehouse, etc.). The sixth interface can also display a list of repaired masks, which includes the following information about the repaired masks: mask code, mask material number, mask type, repair time, repair items, number of uses, supplier, standard life, and remaining number of uses.

[0075] In one embodiment, in some embodiments, if the mask plate is checked after cleaning and it is determined that the mask plate can still meet the production process requirements, the user can input a state modification instruction to the client, and the state modification module is also used to modify the cleaning state information of the mask plate to a clean state according to the state modification instruction. In some embodiments, after receiving the state modification instruction, the client displays the seventh interface on the display panel. Fig. 9As shown, the upper left corner of the seventh interface displays "Modify mask cleaning status" to indicate that the status of the mask has been changed to a clean state. The seventh interface can display the following information of the mask: mask type, mask material number, and mask code. The seventh interface can also display a list of all masks stored in the data storage module, which includes the following information of the mask: mask code, mask material number, mask status, mask cleaning status, number of times used, and current position.

[0076] In one embodiment, the state modification instruction includes a scrap instruction, and the state modification module modifies the current state information of the corresponding mask to a scrap state according to the scrap instruction. If the mask is checked after cleaning and it is determined that the mask cannot meet the production process requirements, and it is determined that even after repair, it cannot meet the production process requirements, then the mask is scrapped. The user can input the scrap instruction to the client. In some embodiments, after the client receives the scrap instruction, the display panel can display the eighth interface. Fig.10 As shown, the upper left corner of the eighth interface displays "Mask scrapped" to indicate that the status of the mask has been changed to scrapped status. The eighth interface can display the following information of the mask: mask type, mask code and mask scrapped status. The eighth interface can also display a list of all masks stored in the data storage module, which includes the following information of the masks in scrapped status: mask code, mask material number, mask type, supplier, standard life and remaining number of uses.

[0077] In one embodiment, the determination module is also used to determine whether each scrapped mask can match at least one device based on the information of each scrapped mask when the target process data of at least one device changes; when it is determined that at least one scrapped mask can match at least one target device, the state modification module sends modification information to the state modification module so that the state modification module modifies the state of the corresponding scrapped mask to cancel the scrapped state. If the production process conditions change, or the production mode is updated, the mask that did not meet the production conditions and was scrapped may meet the new production process requirements. This helps to improve the utilization rate of the mask and reduce production costs. In some embodiments, such as Fig.11 As shown, the display panel can display the ninth interface, and the upper left corner of the ninth interface displays "Mask Cancelled and Scrapped" to indicate that the status of the mask has been modified to the canceled and scrapped state. The ninth interface can display the following information of the mask: mask type and mask code. The ninth interface can also display a list of all canceled and scrapped masks stored in the data storage module, and the list includes the following information of the canceled and scrapped masks: mask code, mask material number, mask type, supplier, standard life and remaining number of uses.

[0078] In one embodiment, the mask management system includes a data receiving module, which is used to receive information about the mask and / or the equipment, and store the received information in the data storage module according to the hierarchy. The data receiving module can receive data transmitted by ERP (Enterprise Resource Planning), and store the received data in the data storage module according to the hierarchical structure. For example, the top-level folder represents a factory, and the folder representing the factory includes multiple subfolders representing factory areas, and the subfolders representing factory areas include multiple subfolders representing equipment, and the subfolders representing equipment include multiple subfolders: a folder storing equipment capability data, a subfolder storing equipment logical parameters, a subfolder storing material information, a subfolder storing fixture information used by the equipment, a subfolder storing product information, a subfolder storing packaging data information, and a subfolder storing digital acquisition information; the subfolder storing material information can store data such as material specifications and material types; the subfolder storing fixture information can store information such as fixture specifications and fixture life.

[0079] In one embodiment, when a new mask is available for production line, the data receiving module stores the information of the new mask in the data storage module, so that the management system manages the mask. Fig.12 The tenth interface shown in FIG. 10 displays “Create Mask” in the upper left corner to indicate receiving the information of the new mask. The tenth interface is used to input the information of the new mask. Fig.12 As shown, the tenth interface displays the following information of the new mask: mask type, mask material number, mask code, description and supplier. The tenth interface can also display "Template", "Add" and "Import" buttons. Click the "Template" button to export the Excel template. After the user enters the information of the new mask in the Excel template, click the "Import" button to upload the Excel template with the entered information. The data receiving module reads the information of the new mask from the Excel template with the entered information and stores it in the data storage module. Click the "Add" button to add a new template.

[0080] In one embodiment, Fig.13As shown, the management system includes a presentation layer 101, an access layer 102, an application layer 103, a CICD layer 104 and a resource layer 105. The presentation layer 101 is responsible for interacting with users, displaying information to users and receiving user input, and can use C# language and winform framework. The access layer 102 can use TIBCO Rendezvous or RabbitMQ message middleware. The application layer 103 is mainly responsible for processing business logic and data processing. The connection pool implementation used by the application layer 103 can be HikariCP or DBCP2; the object-relational mapping framework used can be MyBatis or ziORM; the log framework used can be Log4j2; the relational database used can be Oracle or GaussDB; the message queue used can be TIBCORendezvous (TIBRV) or RabbitMQ; the business process tool used can be ziFlow Designer&Engine, which can use Java language and be built based on the spring boot 2 framework; the timed task framework used can be SpringScheduler and Quartz. CICD layer 104 can use Maven for compilation and packaging, and Jenkins for automated building and publishing processes; the monitoring tool used can be Zabbix; when deploying Java Web applications, Apache Tomcat can be directly packaged as part of the application server. Resource layer 105 can select physical machines, virtual machines, and resources provided by cloud service providers, such as Amazon RDS (Relational Database Service) and other managed database services, and can use physical disks or cloud virtual storage to store data and applications. The operating system used can be HPUX, Linux, or Windows. The front and back ends of the system can communicate through data in XML format.

[0081] The embodiment of the present application further provides a mask management method, which is applied to the mask management system described in any of the above embodiments. The mask management method comprises the following steps:

[0082] Obtaining identification information of a target device; the target device is a device for which a mask is to be used;

[0083] Determining a target process parameter of the target device according to the identification information of the target device, and determining a target mask matching the target device according to the target process parameter of the target device and the information of each mask;

[0084] Output identification information of the mask that matches the target device.

[0085] The mask management system and the mask management method provided in the embodiments of the present application belong to the same inventive concept, and the description of relevant details and beneficial effects can be referred to each other, which will not be repeated here.

[0086] The embodiment of the present application further provides an electronic device, which includes a memory and a processor, wherein a program is stored in the memory, and the processor is configured to execute the mask management method described in the above embodiment through the program.

[0087] An embodiment of the present application further provides a readable storage medium, wherein the readable storage medium stores a computer program, wherein when the computer program is executed by a processor, the mask management method described in the above embodiment is implemented.

[0088] It should be noted that the technical solutions or technical features described in the above embodiments can be combined or supplemented with each other without causing conflicts. The scope of protection of this application is not limited to the precise structures described in the above embodiments and shown in the drawings; all modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of this application should be included in the scope of protection of this application.

Claims

1. A mask management system, characterized in that: The mask management system includes: An acquisition module, used to acquire identification information of a target device; the target device is a device to use a mask; A data storage module stores information of a plurality of masks and information of a plurality of devices using the masks, wherein the information of each device includes identification information and target process data; the target device is one of the plurality of devices using the masks; A determination module, configured to determine a target process parameter of the target device according to the identification information of the target device, and determine a target mask matching the target device according to the target process parameter of the target device and the information of each mask; The output module is used to output the identification information of the target mask.

2. The mask management system according to claim 1, characterized in that: The information of each mask includes specification information and historical process data; the historical process data includes information on the number of times the mask has been used and whether the process steps corresponding to each number of uses are qualified; the target process data includes target specification parameters of the mask and target qualified rate of the process steps using the mask; the determination module is specifically used to: determine the qualified rate of the process steps of each mask according to the number of times each mask has been used and whether the process steps corresponding to each number of uses are qualified; A mask whose specification parameters match the target specification parameters and whose pass rate is greater than or equal to the target pass rate is determined as the target mask.

3. The mask management system according to claim 2, characterized in that: The information of each mask also includes current state information; the determination module is further used to determine whether the mask is in a state to be used according to the current state information of each mask; the target mask determined by the determination module is a mask in a state to be used.

4. The mask management system according to claim 3, characterized in that: The current state information of the mask includes current position information and cleaning state information; The determination module is specifically used to: determine whether the corresponding mask is in the device according to the current position information of each mask, and determine whether the corresponding mask is in a clean state according to the cleaning state information of each mask; The mask that is not in the device and is in a clean state is determined to be the mask to be used.

5. The mask management system according to claim 2, characterized in that: The historical process data includes information on the number of times the mask has been used and whether the process steps corresponding to each number of uses are qualified; the mask management system also includes a data recording module; the data recording module is used to modify the number of times the target mask has been used after the acquisition module obtains information that the target device has finished using the target mask, and store the information on whether the process steps of the target device using the target mask are qualified in the data storage module.

6. The mask management system according to claim 5, characterized in that: The data storage module further stores the remaining usage count of each of the mask plates, and the remaining usage count of the mask plate matched with the target device determined by the determination module is greater than or equal to 1; The data recording module is further used to modify the remaining number of uses of the target mask after the acquisition module acquires the information that the target device ends using the target mask.

7. The mask management system according to claim 1, characterized in that: The acquisition module is also used to acquire a state modification instruction; the mask management system also includes a state modification module, and the state modification module is used to modify the current state information of the corresponding mask according to the state modification instruction.

8. The mask management system according to claim 7, characterized in that: The state modification instruction includes a scrap instruction, and the state modification module modifies the current state information of the corresponding mask into a scrap state according to the scrap instruction.

9. The mask management system according to claim 8, characterized in that: The determination module is also used to determine whether each mask in a scrapped state can match at least one device based on information of each mask in a scrapped state when target process data of at least one device changes; when it is determined that at least one mask in a scrapped state can match at least one target device, the state modification module sends modification information to the state modification module so that the state modification module modifies the current state information of the corresponding mask in a scrapped state to cancel the scrapped state.

10. The mask management system according to claim 1, characterized in that: The acquisition module is also used to acquire maintenance information of the mask plate, and the mask plate management system also includes a data recording module; the data recording module is used to store the corresponding mask plate maintenance information in the data storage module after the acquisition module acquires the mask plate maintenance information.

11. The mask management system according to claim 1, characterized in that: The output module is also used to: when the determination module determines that the number of target masks matching the target device is more than two, output at least partial information of each of the target masks; the acquisition module is also used to obtain a selection instruction, the selection instruction includes at least partial information of one of the target masks; the output module outputs identification information of the target mask corresponding to the selection instruction.

12. The mask management system according to claim 1, characterized in that: The mask management system includes a display panel; The display panel is used to display a first interface, wherein the first interface displays at least part of the information related to the target mask; and / or, The acquisition module is further used to acquire a query instruction, which includes identification information of the mask to be queried; the display panel is further used to display a second interface, which displays at least part of the information of the mask corresponding to the query instruction.

13. A method for managing a mask, characterized in that: include: Obtaining identification information of a target device; the target device is a device for which a mask is to be used; Determining a target process parameter of the target device according to the identification information of the target device, and determining a target mask matching the target device according to the target process parameter of the target device and the information of each mask; Output the identification information of the target mask.

14. An electronic device, characterized in that: The method comprises a memory and a processor, wherein the memory stores a program, and the processor is configured to execute the mask management method according to claim 13 through the program.

15. A readable storage medium, characterized in that: The readable storage medium stores a computer program, wherein the computer program implements the mask management method of claim 13 when executed by a processor.

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