Current stabilizer and silicon wafer cutting equipment

Abstract

The invention relates to a flow stabilizing device and silicon wafer cutting equipment, the flow stabilizing device comprises a first-stage flow stabilizing pipe, the first-stage flow stabilizing pipe is provided with a liquid injection pipe, and the first-stage flow stabilizing pipe is transversely connected to the liquid injection pipe; the second-stage flow stabilizing pipe is arranged on the lower portion of the first-stage flow stabilizing pipe, and the second-stage flow stabilizing pipe and the first-stage flow stabilizing pipe are communicated through a first communicating hole; the liquid outlet channel is arranged below the second-stage flow stabilizing pipe, and the liquid outlet channel is communicated with the second-stage flow stabilizing pipe through a second communicating hole; wherein the first-stage flow stabilizing pipe is a square pipe with an opening in the bottom wall, the second-stage flow stabilizing pipe is a round pipe, part of the peripheral wall of the round pipe extends into an inner cavity of the square pipe and seals the opening, and the first communicating hole and the second communicating hole are formed in the second-stage flow stabilizing pipe and are oppositely arranged in the radial direction. Under the action of buffering and pressure reducing, the impact force of the cutting fluid flowing out of the fluid outlet channel is weakened, the fluid outlet uniformity can be guaranteed, the problems that in the silicon rod cutting process, the waterline deviation of a liquid falling point is too large, cooling and lubricating are not in place are effectively solved, and the TTV defect of cut silicon wafers is avoided.

Description

Technical Field

[0001] The present application relates to the technical field of silicon wafer cutting, and in particular, to a flow stabilizing device and silicon wafer cutting equipment. Background Art

[0002] During the silicon wafer processing, the silicon wafer is cut by the intense friction between the diamond wire and the silicon rod. A lot of heat is generated during the diamond wire cutting of the silicon rod. It is necessary to use a mortar tube to guide the cutting fluid and bring the cutting fluid into the cutting gap through the diamond wire to play a cooling and lubricating role. Each silicon rod can be cut into thousands of silicon wafers, and each silicon wafer is very thin. How to ensure that the cutting fluid has the same force on the silicon wafer and the diamond wire during the cooling and lubrication process is the key to ensuring that the cut silicon wafer meets the process requirements.

[0003] In the related art, the cutting fluid flows through a circular tube with an inner diameter of φ28 into a horizontally connected circular tube with the same inner diameter and length of 700-800mm, and a perforated diverter plate is installed in the horizontal circular tube, and finally flows out through the bottom plate and the flow regulating plate. In the above process, the cutting fluid flows from the longitudinal circular tube into the transverse circular tube, and the pressure difference varies greatly. At the same time, affected by the aperture and deformation of the flow regulating plate, the waterline deviation of the mortar tube at the drop point is greater than 12mm under the flow rate of 130-200L / min. In addition, due to the fluidity of water, the liquid discharge conditions of mortar tubes with the same structure are completely different, resulting in a low qualified rate of less than 50% for newly purchased mortar tubes. The silicon rods are not cooled and lubricated properly during the cutting process, and the forces acting on different parts of the silicon rods are different, resulting in poor process of line mark TTV (Total Thickness Variation).

[0004] In addition, improper operation and bumps during the use of the mortar pipe may cause deformation of various components, resulting in uneven liquid discharge. At the same time, when the cutting fluid flow rate is reduced from 200L / min to 110L / min, the liquid outlet waterline will also change accordingly. Generally, the waterline deviation will become larger and larger, and even flow interruption may occur. Summary of the invention

[0005] The purpose of the present application is to provide a flow stabilizing device and a silicon wafer cutting device using the flow stabilizing device to solve the problems of large waterline deviation at the liquid falling point, uneven liquid discharge, and easy flow interruption.

[0006] In order to achieve the above-mentioned purpose, the present application provides a flow stabilizing device, comprising:

[0007] A primary flow stabilizing tube, wherein the primary flow stabilizing tube is provided with a liquid injection tube, and the primary flow stabilizing tube is transversely connected to the liquid injection tube;

[0008] A secondary flow stabilizing tube, wherein the secondary flow stabilizing tube is arranged at the lower part of the primary flow stabilizing tube, and the secondary flow stabilizing tube is connected with the primary flow stabilizing tube through a first communicating hole;

[0009] A liquid outlet channel, the liquid outlet channel is arranged below the secondary flow stabilizing tube, and the liquid outlet channel and the secondary flow stabilizing tube are connected through a second communicating hole;

[0010] Among them, the first-level flow stabilizing tube is a square tube with an opening at the bottom wall, and the second-level flow stabilizing tube is a circular tube. Part of the outer peripheral wall of the circular tube extends into the inner cavity of the square tube and closes the opening. The first connecting hole and the second connecting hole are respectively opened on the second-level flow stabilizing tube and arranged opposite to each other in the radial direction.

[0011] Optionally, the length of the primary flow stabilizing tube is smaller than that of the secondary flow stabilizing tube, the first connecting hole is provided within the length range of the secondary flow stabilizing tube overlapping with the primary flow stabilizing tube, and there are a plurality of the first connecting holes which are arranged at intervals along the axial direction.

[0012] Optionally, the diameter of the first connecting hole is greater than the diameter of the second connecting hole, the second connecting holes are arranged in a plurality of rows at intervals along the circumferential direction, each row includes a plurality of second connecting holes arranged at intervals along the axial direction, and the second connecting holes in two adjacent rows are staggered.

[0013] Optionally, the flow stabilizing device further comprises a flow stabilizing strip arranged in the liquid outlet channel, and an extension direction of the flow stabilizing strip and a liquid outlet direction of the liquid in the liquid outlet channel are arranged at an angle to each other.

[0014] Optionally, a bottom plate and a flow regulating plate are fixed below the secondary flow stabilizing tube, and the secondary flow stabilizing tube, the bottom plate and the flow regulating plate together form the liquid outlet channel, the flow regulating plate and the liquid outlet edge of the bottom plate are arranged at intervals to form a liquid outlet, and the flow stabilizing strip is fixed on the bottom plate and arranged close to the liquid outlet.

[0015] Optionally, the bottom plate is constructed as an L-shaped structure, one end of the L-shaped structure is fixed on the secondary flow stabilizing tube, and the other end extends obliquely downward, the flow regulating plate includes a V-shaped plate and a guide plate fixedly connected to the V-shaped plate, one side of the V-shaped plate is fixedly connected to the secondary flow stabilizing tube, and the other side is connected to the guide plate, the lower end of the guide plate and the bottom plate are arranged at intervals to form the liquid outlet.

[0016] Optionally, end plates are fixed on both sides of the flow stabilization device, and quick-release assemblies are respectively provided on the end plates on both sides. The quick-release assemblies include a fixing part for installation at the position to be fixed and a movable part rotatably connected to one side of the end plate, and the movable part has a buckle that can be engaged with a slot on the fixing part.

[0017] Optionally, a cleaning port is provided at a position of the end plate corresponding to the secondary flow stabilizing tube, the movable part is constructed as a plate-like structure for blocking the cleaning port, and a sealing member is provided on a surface of the plate-like structure facing the cleaning port.

[0018] Optionally, the liquid outlet length of the flow stabilizing device is between 700-800 mm, and the width of the liquid outlet of the liquid outlet channel is 3-3.5 mm.

[0019] According to a second aspect of the present application, a silicon wafer cutting device is provided, comprising the above-mentioned flow stabilizing device.

[0020] Through the above technical scheme, in the flow stabilization device provided by the present application, during the process that the cutting fluid of the injection tube flows into the square first-level flow stabilization tube and is gradually filled, the cavity weakens part of the pressure of the cutting fluid, playing the role of the first-level buffering and decompression; the cutting fluid in the first-level flow stabilization tube flows out through the first connecting hole and enters the circular second-level flow stabilization tube, playing the role of the second-level buffering and decompression; it flows into the liquid outlet channel through the second connecting hole, and flows out from the liquid outlet of the liquid outlet channel. After the above-mentioned multi-stage buffering and decompression effect, the impact force of the cutting fluid flowing out of the liquid outlet channel is weakened, which can ensure the uniformity of the liquid outlet, effectively solve the problem of excessive waterline deviation of the liquid landing point during silicon rod cutting, insufficient cooling and lubrication, and avoid TTV defects in the cut silicon wafer. In addition, the circular second-level flow stabilization tube is stably fixed below the square first-level flow stabilization tube, which can improve the overall structural strength and solve the problem of easy deformation of the mortar tube in the prior art.

[0021] Other features and advantages of the present application will be described in detail in the subsequent detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings are used to provide a further understanding of the present application and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present application but do not constitute a limitation to the present application. In the accompanying drawings:

[0023] Figure 1 It is a schematic structural diagram of a flow stabilizing device provided by an exemplary embodiment of the present application.

[0024] Figure 2 It is a cross-sectional view of a flow stabilizing device provided by an exemplary embodiment of the present application.

[0025] Figure 3 It is a side view of a flow stabilizing device provided by an exemplary embodiment of the present application.

[0026] Figure 4 It is a schematic diagram of the structure of a secondary flow stabilizing tube in a flow stabilizing device provided by an exemplary embodiment of the present application.

[0027] Figure 5It is a schematic structural diagram of a quick-release assembly in a flow stabilizing device provided by an exemplary embodiment of the present application.

[0028] Figure 6 and Figure 7 It is a structural schematic diagram from different perspectives of a movable part of a quick-release assembly in a flow stabilizing device provided by an exemplary embodiment of the present application when the movable parts are in an open state.

[0029] Description of Reference Numerals

[0030] 1-primary flow stabilizing tube; 11-liquid inlet; 2-secondary flow stabilizing tube; 21-first connecting hole; 22-second connecting hole; 3-flow stabilizing strip; 4-liquid outlet channel; 40-liquid outlet; 41-bottom plate; 42-flow regulating plate; 421-V-shaped plate; 422-guide plate; 5-liquid injection tube; 6-quick release assembly; 61-fixing part; 62-moving part; 621-fixing part; 622-sealing part; 623-buckle; 7-end plate; 70-cleaning port. DETAILED DESCRIPTION

[0031] The specific implementation of the present application is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described here is only used to illustrate and explain the present application, and is not used to limit the present application.

[0032] In this application, unless otherwise stated, the directional words used, such as "upper", "lower", "top", and "bottom", are defined when the flow stabilizing device provided in this application is normally installed. Figure 3 In the drawing directions shown, "circumferential", "axial" and "radial" are defined relative to the axial direction of the circular secondary flow stabilizer, and "inside" and "outside" refer to the inside and outside of the corresponding component contours. The terms "first", "second" and the like are used to distinguish different components and do not have order and importance. In addition, in the following description, when referring to the drawings, unless otherwise explained, the same reference numerals in different drawings represent the same or similar elements.

[0033] like Figures 1 to 3 As shown, the present application provides a flow stabilizing device, which includes a primary flow stabilizing tube 1, a secondary flow stabilizing tube 2 and a liquid outlet channel 4, wherein the primary flow stabilizing tube 1 is provided with a liquid injection tube 5, the primary flow stabilizing tube 1 is transversely connected to the liquid injection tube 5, and the primary flow stabilizing tube 1 is provided with a liquid inlet 11, which is connected to the liquid injection tube 5 for liquid inlet; the secondary flow stabilizing tube 2 is arranged at the lower part of the primary flow stabilizing tube 1, and the secondary flow stabilizing tube 2 and the primary flow stabilizing tube 1 are connected through a first connecting hole 21; the liquid outlet channel 4 is arranged below the secondary flow stabilizing tube 2, and the liquid outlet channel 4 and the secondary flow stabilizing tube 2 are connected through a second connecting hole 22; in this embodiment, as Figure 2 and Figure 3As shown, the first-level flow stabilizing tube 1 is a square tube with an open bottom wall, and the second-level flow stabilizing tube 2 is a circular tube. Part of the outer peripheral wall of the circular tube extends into the inner cavity of the square tube and closes its opening. The first connecting hole 21 and the second connecting hole 22 are respectively opened on the second-level flow stabilizing tube 2 and arranged opposite to each other in the radial direction.

[0034] Here, it should be noted that the flow stabilization device is not limited to the flow stabilization of the cutting fluid described below, but can also be applied to other fields, such as hydraulic transportation, workpiece grinding, polishing process, etc. Specifically, the cutting fluid in the silicon wafer cutting operation will be taken as an example for detailed introduction below. The injection tube 5 is a longitudinal tube, and the first-level flow stabilization tube 1 is a transverse tube, and the two can be arranged vertically. The present application does not limit the cross-sectional shape of the injection tube 5. It only needs to ensure that the inner diameter of the first-level flow stabilization tube 1 is larger than the inner diameter of the injection tube 5. The cutting fluid slows down at the liquid inlet 11 and gradually fills the square first-level flow stabilization tube 1. The embodiments belong to the protection scope of this application and play a primary buffer and liquid storage role.

[0035] Through the above technical scheme, in the flow stabilizing device provided by the present application, during the process of the cutting fluid from the injection tube 5 flowing into the square first-level flow stabilizing tube 1 and gradually filling up, the cavity weakens part of the pressure of the cutting fluid, playing the first-level buffering and decompression role; the cutting fluid in the first-level flow stabilizing tube 1 flows out through the first connecting hole 21 and enters the second-level flow stabilizing tube 2, playing the second-level buffering and decompression role; it flows into the liquid outlet channel 4 through the second connecting hole 22, and flows out from the liquid outlet of the liquid outlet channel 4. After the above-mentioned multi-stage buffering and decompression effect, the impact force of the cutting fluid flowing out of the liquid outlet channel 4 is weakened, which can ensure the uniformity of the liquid outlet, effectively solve the problem of excessive waterline deviation of the liquid landing point during silicon rod cutting, insufficient cooling and lubrication, and avoid TTV defects in the cut silicon wafers.

[0036] In addition, in this application, if Figure 3 As shown, the bottom wall of the primary flow stabilizing tube 1 is open, and part of the outer peripheral wall of the secondary flow stabilizing tube 2 extends into the inner cavity of the square tube and closes the opening of the primary flow stabilizing tube 1. The two can be fixed by welding, which can solve the problem of easy deformation of the mortar tube in the related technology and improve the overall structural strength. Of course, in other embodiments, the bottom wall of the primary flow stabilizing tube 1 can be closed, and the top wall of the secondary flow stabilizing tube 2 can be open. The secondary flow stabilizing tube 2 can also be a square tube, all of which belong to the protection scope of this application.

[0037] The flow stabilization device provided in the present application also includes a flow stabilization strip 3 arranged in the liquid outlet channel 4, and the extension direction of the flow stabilization strip 3 is arranged at an angle to the liquid outlet direction of the liquid outlet channel 4. In the liquid outlet channel 4, the third level of flow stabilization can be performed on the cutting fluid in the liquid outlet channel 4 through the blocking and buffering effect of the flow stabilization strip 3. The flow stabilization strip 3 can be made of rubber material and can be pasted and fixed in the liquid outlet channel 4. Its extension direction can be arranged perpendicular to the liquid outlet direction of the liquid outlet channel 4, or it can be arranged at any angle.

[0038] Through the above design, on the one hand, due to the large volume of the square tube, the cutting fluid flowing into the injection tube 5 has a process of gradual filling, which can play a buffering role; the square cavity also has the function of storing liquid. In the process of cutting silicon rods, due to the cutting process requirements, the flow rate of the cutting fluid is reduced from 200L / min to 110L / min in a short period of time. It is necessary to ensure that the cutting fluid supply is sufficient and continuous. Designing the first-level flow stabilizer 1 as a square tube can effectively ensure this. On the other hand, in the present application, the first-level flow stabilizer 1 is welded and fixed on the upper side of the second-level flow stabilizer 2, and a bottom plate 41 and a flow regulating plate 42 are fixed below the second-level flow stabilizer 2. The second-level flow stabilizer 2, the bottom plate 41 and the flow regulating plate 42 together form a liquid outlet channel 4, and the flow regulating plate 42 and the liquid outlet edge of the bottom plate 41 are arranged at intervals to form a liquid outlet 40, and the flow stabilizing strip 3 is fixed on the bottom plate 41 and arranged close to the liquid outlet 40. In the present application, the primary flow stabilizing tube 1 and the liquid outlet channel 4 are respectively fixed on the upper and lower sides of the secondary flow stabilizing tube 2. The integrity of the flow stabilizing device is improved. By improving the processing technology, the welding deformation and surface roughness are reduced, the qualified rate of the flow stabilizing device is improved, and the deformation of the flow stabilizing device affects the uniformity of the cutting fluid outlet.

[0039] In this application, if Figure 1 and Figure 2As shown, the length of the primary flow stabilizing tube 1 can be less than the length of the secondary flow stabilizing tube 2, and the first connecting hole 21 is provided within the length range of the secondary flow stabilizing tube 2 overlapping with the primary flow stabilizing tube 1. There can be multiple first connecting holes 21, and multiple first connecting holes 21 are arranged at intervals along the axial direction. For example, four circular holes can be provided, and the diameter of the first connecting hole 21 can be 18-20 mm, preferably 19 mm. The function of multiple first connecting holes 21 is equivalent to increasing the diameter of the water outlet, thereby achieving a pressure reducing effect. The diameter of the first connecting hole 21 is greater than the diameter of the second connecting hole 22. The first connecting hole 21 and the second connecting hole 22 are arranged opposite to each other along the radial direction of the secondary flow stabilizing tube 2. The second connecting hole 22 can be multiple rows arranged at intervals along the circumferential direction, and each row includes multiple second connecting holes 22 arranged at intervals along the axial direction, and the second connecting holes 22 in two adjacent rows are staggered. Taking the embodiment shown in the figure as an example, the first connecting hole 21 and the second connecting hole 22 are both designed as circular holes, and can also be square holes, elliptical holes, etc. Two rows of second connecting holes 22 can be set, and the diameter of the second connecting hole 22 can be 2-4mm, preferably 3mm, the inner diameter of the injection tube 5 can be 25-30mm, preferably 28mm, the cross-sectional size of the square tube can be 37mm*26mm, and the length can be 440mm. The specific length can be designed according to the length of the secondary flow stabilizing tube 2. The cutting fluid flows into the square primary flow stabilizing tube 1 from the injection tube 5, flows into the secondary flow stabilizing tube 2 through the four first connecting holes 21, and then flows out through the double-row staggered second connecting holes 22 with a diameter of 2-4mm, and flows out through the buffering effect of the flow stabilizing strip 3. The pressure of the cutting fluid at the outlet 40 is significantly reduced, which can ensure the uniformity of the liquid discharge.

[0040] Specifically, in Figure 3 In the embodiment shown, the bottom plate 41 can be constructed as an L-shaped structure, one end of the L-shaped structure is fixed on the secondary flow stabilizing tube 2, and the other end extends obliquely downward. The flow regulating plate 42 includes a V-shaped plate 421 and a guide plate 422 fixedly connected to the V-shaped plate 421. One side of the V-shaped plate 421 is fixedly connected to the secondary flow stabilizing tube 2, and the other side is connected to the guide plate 422. The lower end of the guide plate 422 and the bottom plate 41 are arranged at intervals to form a liquid outlet 40. By adjusting the angle between the two side plates of the V-shaped plate 421, the interval between the lower end of the guide plate 422 and the bottom plate 41 can be adjusted, thereby adjusting the width of the liquid outlet 40. The liquid outlet length of the flow stabilizing device is between 700-800 mm, and the width of the liquid outlet 40 of the liquid outlet channel 4 is 3-3.5 mm, which can be adjusted according to the process requirements.

[0041] In the related art, impurities accumulate inside the mortar pipe after use, causing abnormalities such as jumper wires and broken wires, which affects the product yield. To ensure the internal cleanliness, the side panels are disassembled with an Allen wrench to clean the impurities. Due to the use of bolts for fastening, the disassembly and cleaning time is long. A skilled worker needs 15 minutes to use each pair of mortar pipes, which is time-consuming and labor-intensive.

[0042] Furthermore, to solve the above problems, Figures 5 to 7 As shown, the two sides of the flow stabilizing device provided by the present application are respectively fixed with end plates 7, and the end plates 7 on both sides are respectively provided with quick-release components 6, and the quick-release components 6 include a fixing member 61 for installation at the position to be fixed and a movable member 62 rotatably connected to one side of the end plate 7, and the movable member 62 has a buckle 623 that can be engaged with the slot on the fixing member 61. The fixing member 61 can be fixed at the position to be fixed by a fastener, and the two ends of the flow stabilizing device are connected to the fixing member 61 by the movable member 62, so that the flow stabilizing device can be stably installed at the position to be fixed. When it needs to be disassembled for cleaning, the movable member 62 can be rotated to disassemble the flow stabilizing device as a whole for cleaning without using tools, and the cleaning can be carried out quickly, and the average disassembly and cleaning time can be reduced to less than 5 minutes. In other embodiments, the quick-release component 6 can also be designed in the form of a matching method of a pin and a socket, magnetic adsorption, etc., all of which belong to the protection scope of the present application.

[0043] like Figure 5 and Figure 7 As shown, a cleaning port 70 is provided at a position of the end plate 7 corresponding to the secondary flow stabilizing tube 2, and the movable member 62 is configured as a plate-like structure for blocking the cleaning port 70, and a sealing member 622 is provided on the surface of the plate-like structure facing the cleaning port 70. Figure 5 and Figure 6 As shown, the movable part 62 is rotatably connected through the fixing part 621 fixed on one side of the end plate 7. After the movable part 62 is rotated to an appropriate position, the buckle 623 is engaged with the card slot to fix the flow stabilizing device. Since the secondary flow stabilizing tube 2 is a completely closed structure and the number of the second connecting holes 22 is large, the movable part 62 is opened to clean the secondary flow stabilizing tube 2 separately, thereby improving the overall cleaning effect. When the movable part 62 is closed, the sealing part 622 can block the cleaning port 70 to prevent the cutting fluid from leaking from the end when the liquid is discharged, thereby ensuring the overall sealing.

[0044] In the flow stabilization device provided by the present application, three-level flow stabilization is performed. The first-level flow stabilization tube 1 adopts a square cavity liquid storage pressure reduction, and the second-level flow stabilization tube 2 adopts a double row of second connecting holes staggered arrangement, and the liquid outlet is stabilized. The flow stabilization strip 3 plays a blocking and buffering role to achieve the effect of flow stabilization. Through the flow stabilization device provided by the present application, the liquid outlet length of the cutting fluid is in the range of 700-800mm, the width of the liquid outlet 40 can be 3-3.5mm, and the bottom plate 41 is 3-5mm away from the wire mesh. The deviation of the liquid outlet waterline is within the range of 8mm. During the process of reducing the flow rate from 200L / min to 110L / min, the mortar pipe has sufficient and continuous liquid supply, which fully meets the current demanding cutting process requirements and effectively improves the product yield and the qualified rate of the flow stabilization device.

[0045] According to the second aspect of the present application, a silicon wafer cutting device is also provided, comprising the flow stabilizing device described above. The silicon wafer cutting device has all the beneficial effects of the above-mentioned flow stabilizing device, which will not be described in detail here. The flow stabilizing device can be used to be set at an appropriate position of the silicon wafer cutting device. During the cutting operation of the silicon wafer cutting device, the stabilizing device can be used to continuously and stably output uniform cutting fluid to the cutting area of ​​the silicon wafer cutting device to ensure the quality of the silicon wafer cutting by the silicon wafer cutting device and avoid TTV defects on the silicon wafer.

[0046] The preferred embodiments of the present application are described in detail above in conjunction with the accompanying drawings; however, the present application is not limited to the specific details in the above embodiments. Within the technical concept of the present application, a variety of simple modifications can be made to the technical solution of the present application, and these simple modifications all fall within the protection scope of the present application.

[0047] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, this application will not further describe various possible combinations.

[0048] In addition, the various implementation modes of the present application may be arbitrarily combined, and as long as they do not violate the concept of the present application, they should also be regarded as the contents disclosed in the present application.

Claims

1. A flow stabilizing device, characterized in that: include: A primary flow stabilizing tube, wherein the primary flow stabilizing tube is provided with a liquid injection tube, and the primary flow stabilizing tube is transversely connected to the liquid injection tube; A secondary flow stabilizing tube, wherein the secondary flow stabilizing tube is arranged at the lower part of the primary flow stabilizing tube, and the secondary flow stabilizing tube is connected with the primary flow stabilizing tube through a first communicating hole; A liquid outlet channel, the liquid outlet channel is arranged below the secondary flow stabilizing tube, and the liquid outlet channel and the secondary flow stabilizing tube are connected through a second connecting hole; Among them, the first-level flow stabilizing tube is a square tube with an opening at the bottom wall, and the second-level flow stabilizing tube is a circular tube. Part of the outer peripheral wall of the circular tube extends into the inner cavity of the square tube and closes the opening. The first connecting hole and the second connecting hole are respectively opened on the second-level flow stabilizing tube and arranged opposite to each other in the radial direction.

2. The flow stabilizing device according to claim 1, characterized in that: The length of the primary flow stabilizing tube is smaller than that of the secondary flow stabilizing tube, the first communicating hole is opened within the length range of the secondary flow stabilizing tube overlapping with the primary flow stabilizing tube, and there are a plurality of the first communicating holes which are arranged at intervals along the axial direction.

3. The flow stabilizing device according to claim 1, characterized in that: The diameter of the first connecting hole is greater than that of the second connecting hole. The second connecting holes are arranged in a plurality of rows at intervals along the circumferential direction. Each row includes a plurality of second connecting holes arranged in an axial direction at intervals. The second connecting holes in two adjacent rows are staggered.

4. The flow stabilizing device according to claim 1, characterized in that: The flow stabilizing device further comprises a flow stabilizing strip arranged in the liquid outlet channel, wherein an extending direction of the flow stabilizing strip and a liquid outlet direction of the liquid in the liquid outlet channel are arranged at an angle to each other.

5. The flow stabilizing device according to claim 4, characterized in that: A bottom plate and a flow regulating plate are fixed below the secondary flow stabilizing tube. The secondary flow stabilizing tube, the bottom plate and the flow regulating plate together form the liquid outlet channel. The flow regulating plate and the liquid outlet edge of the bottom plate are arranged at intervals to form a liquid outlet. The flow stabilizing strip is fixed on the bottom plate and arranged close to the liquid outlet.

6. The flow stabilizing device according to claim 5, characterized in that: The bottom plate is constructed as an L-shaped structure, one end of the L-shaped structure is fixed on the secondary flow stabilizing tube, and the other end extends obliquely downward. The flow regulating plate includes a V-shaped plate and a guide plate fixedly connected to the V-shaped plate. One side of the V-shaped plate is fixedly connected to the secondary flow stabilizing tube, and the other side is connected to the guide plate. The lower end of the guide plate and the bottom plate are arranged at intervals to form the liquid outlet.

7. The flow stabilizing device according to any one of claims 1 to 6, characterized in that: End plates are fixed on both sides of the flow stabilizing device, and quick-release components are respectively arranged on the end plates on both sides. The quick-release components include a fixing part for installation at a position to be fixed and a movable part rotatably connected to one side of the end plate, and the movable part has a buckle that can be engaged with a slot on the fixing part.

8. The flow stabilizing device according to claim 7, characterized in that: A cleaning port is provided at a position of the end plate corresponding to the secondary flow stabilizing tube, the movable part is constructed as a plate-like structure for blocking the cleaning port, and a sealing member is provided on a surface of the plate-like structure facing the cleaning port.

9. The flow stabilizing device according to claim 1, characterized in that: The liquid outlet length of the flow stabilizing device is between 700-800 mm, and the width of the liquid outlet of the liquid outlet channel is 3-3.5 mm.

10. A silicon wafer cutting device, characterized in that: The invention comprises the flow stabilizing device according to any one of claims 1 to 9.

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