Magnetic control nitriding device and nitriding method

Abstract

The invention discloses a magnetic control nitriding device and a nitriding method. The magnetic control nitriding device comprises a furnace body assembly, a magnetic pole assembly, a workpiece mounting assembly, a gas conveying assembly, a source electrode power supply and a cathode power supply. Wherein the furnace body assembly is used for heating a workpiece and providing a sealed environment for ion nitriding; the magnetic pole assembly is used for generating a magnetic field to improve the ion nitriding effect through magnetic force. The workpiece mounting assembly is used for fixing a workpiece and enabling the workpiece to extend into the furnace body assembly; the gas conveying assembly is used for conveying gas required by ion nitriding into the furnace body assembly; and the source power supply and the cathode power supply are both used for outputting high-voltage electricity into the furnace body assembly. Nitriding is assisted by using the acting force of a magnetic field formed by the two magnetic pole assemblies, the working temperature of ion nitriding is reduced on the premise that the nitriding effect is achieved, and therefore the probability that a workpiece deforms at the high temperature is reduced; and the magnetic field position and the magnetic field intensity can be physically changed by moving the magnetic pole main body, so that the nitriding effect is adjusted.

Description

Technical Field

[0001] The invention relates to the field of vacuum heat treatment, and in particular to a magnetron nitriding device and a nitriding method. Background Art

[0002] Ion nitriding is a surface treatment technology that uses ion beams or plasma under high temperature and vacuum conditions to inject nitrogen into the surface of the material, combining it with metal elements to form compounds, thereby improving the material's hardness, wear resistance, corrosion resistance or other properties. This process is used to improve the surface quality of metal parts, enhance their engineering properties, extend their service life, and is applicable to various industrial fields.

[0003] In the field of mobile phone manufacturing, mobile phone frame parts have high requirements for strength, weight and corrosion resistance to meet the daily use needs of consumers. Generally speaking, the mobile phone frame parts on the market are made of titanium alloy, which has a low hardness of only 340HV. 0.025 It is about 300 square meters and not wear-resistant, so it needs surface strengthening treatment.

[0004] The existing strengthening method for such parts is mainly ion nitriding. However, in operation, since the ion nitriding temperature of titanium alloy needs to be above 850℃, and the phase transition temperature of titanium alloy is 882℃, thin-walled titanium alloy parts such as mobile phone frames are very easy to deform during the ion nitriding process. Therefore, how to ensure the normal operation of the ion nitriding process and reduce the nitriding temperature to prevent the deformation of titanium alloy parts is an urgent problem to be solved in the current mobile phone frame production process. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a magnetron nitriding device that can reduce the nitriding temperature to prevent deformation of parts at high temperatures.

[0006] The present invention also provides a nitriding method based on the above-mentioned magnetron nitriding device.

[0007] The magnetron nitriding device according to the first embodiment of the present invention comprises:

[0008] A furnace body assembly, comprising a furnace body and a heating wire, wherein the furnace body is provided with a source interface, a cavity is provided in the furnace body, and the heating wire is provided in the cavity;

[0009] There are two magnetic pole assemblies, which are symmetrically installed on both sides of the furnace body, and the magnetic pole assemblies include a magnetic pole body and a magnet, the magnet is installed at the end of the magnetic pole body, and the magnetic pole body is slidably connected to the furnace body to drive the magnet to penetrate into the cavity; wherein the magnetic poles of the magnets in the two magnetic pole assemblies are opposite;

[0010] A workpiece mounting assembly, comprising a workpiece rack, the end of which is used to fix the workpiece, and the workpiece rack is slidably connected to the furnace body to drive the workpiece to penetrate between the two magnetic pole assemblies;

[0011] a gas delivery assembly including a hydrogen tank, an argon tank, and a nitrogen tank connected to the cavity;

[0012] A source power supply electrically connected to the source interface;

[0013] A cathode power supply is electrically connected to the workpiece holder.

[0014] The magnetron nitriding device according to the embodiment of the present invention has at least the following beneficial effects: by utilizing the magnetic field force formed by the two magnetic pole components to assist nitriding, the working temperature of ion nitriding is reduced while achieving the nitriding effect, thereby reducing the probability of deformation of the workpiece at high temperature; and by moving the magnetic pole body, the magnetic field position and magnetic field strength can be physically changed, thereby adjusting the nitriding effect.

[0015] According to some embodiments of the present invention, the furnace body is further provided with a thermal insulation layer, which is arranged on the inner wall of the furnace body and covers the cavity; the interior of the thermal insulation layer is hollow, and the furnace body is provided with a furnace water inlet and a furnace water outlet connected to the interior of the thermal insulation layer, and the furnace water inlet and the furnace water outlet are connected to an external coolant storage device for guiding the coolant into the thermal insulation layer to cool the furnace body.

[0016] According to some embodiments of the present invention, the furnace body is further provided with a heat insulating layer, and the heat insulating layer is arranged between the temperature insulating layer and the cavity to block heat transfer between the temperature insulating layer and the cavity.

[0017] According to some embodiments of the present invention, the magnetic pole assembly also includes a guide sleeve and an adjusting nut, the guide sleeve is connected to the furnace body, the magnetic pole body slides in the inner hole of the guide sleeve, the outer side of the magnetic pole body is provided with a thread, the adjusting nut is rotatably connected to the guide sleeve and is threadedly connected to the magnetic pole body, so that screwing the adjusting nut can drive the magnetic pole body to move.

[0018] According to some embodiments of the present invention, the magnetic pole assembly further comprises a guide block, which is connected to the furnace body and slidably connected to the side of the magnetic pole body, so as to limit the rotation of the magnetic pole body.

[0019] According to some embodiments of the present invention, a cooling channel is provided inside the magnetic pole body, and two ports of the cooling channel are connected to an external cooling liquid storage device, and the cooling liquid can flow into the cooling channel to cool the magnet.

[0020] According to some embodiments of the present invention, the magnetic pole assembly also includes a magnet mounting plate and a fixing plate, the magnet is mounted on the magnet mounting plate, the magnet mounting plate and the fixing plate are both mounted at the end of the magnetic pole body and a gap is formed therebetween, and the gap constitutes a part of the cooling channel.

[0021] According to some embodiments of the present invention, the workpiece mounting assembly also includes a mounting frame, a mounting plate and an insulating block, the mounting frame is fixedly installed in the cavity of the furnace body, the mounting plate is fixedly connected to the mounting frame and an insulating block is arranged between the two to isolate the flow of charge; the mounting plate is provided with a threaded hole, the side of the workpiece frame is provided with a thread and is threadedly connected to the mounting plate, and the workpiece frame is screwed to adjust the position of the workpiece on the workpiece frame in the cavity.

[0022] According to some embodiments of the present invention, the magnetron nitriding device further comprises a vacuum pump, which is connected to the furnace body via a pipeline and is used for depressurizing the furnace after the ion nitriding is completed.

[0023] The nitriding method according to the second aspect of the present invention is carried out based on the above-mentioned magnetron nitriding device, and comprises the following steps:

[0024] Installing the workpiece on the workpiece rack and adjusting the position of the workpiece rack in the furnace body;

[0025] Moving the two magnetic pole assemblies to adjust the distance between the magnet and the workpiece;

[0026] Open the hydrogen tank, the argon tank and the nitrogen tank, so that the volume ratio of the gas filled into the furnace body is H2:N2:Ar=1:3:1;

[0027] Turning on the heating wire to heat the furnace body and maintain the temperature of the cavity at 500 to 550° C.;

[0028] Maintaining the air pressure of the cavity at 100 to 120 Pa;

[0029] Turning on the source power supply and the cathode power supply, wherein the output voltage of the source power supply is 800V to 900V, and the output voltage of the cathode power supply is 400V to 500V;

[0030] The nitriding time is 6 hours to 8 hours. After the nitriding is completed, the magnetron nitriding device is turned off and the workpiece on the workpiece rack is taken out.

[0031] The nitriding method according to the embodiment of the present invention has at least the following beneficial effects: the nitriding temperature can be lowered to avoid thermal deformation of the workpiece, and the position and size of the magnetic field can be changed by adjusting the position of the magnetic pole assembly, thereby adjusting the nitriding effect.

[0032] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0034] Figure 1 A cross-sectional view of a magnetron nitriding device according to an embodiment of the first aspect of the present invention;

[0035] Figure 2 for Figure 1 A partial enlarged view of the middle A;

[0036] Figure 3 for Figure 2 Sectional view at the middle BB;

[0037] Figure 4 for Figure 2 A partial enlarged view of point C in the middle;

[0038] Figure 5 for Figure 1 A partial enlarged view of point D in the middle;

[0039] Figure 6 It is a connection diagram of the magnetron nitriding device according to the first embodiment of the present invention.

[0040] Reference numerals: 100-furnace body assembly, 110-furnace body, 111-source electrode interface, 112-hydrogen interface, 113-argon interface, 114-nitrogen interface, 115-vacuum interface, 116-temperature measuring probe, 120-heating wire, 130-thermal insulation layer, 131-furnace body water inlet, 132-furnace body water outlet, 140-insulation layer, 200-magnetic pole assembly, 210-magnetic pole body, 211-cooling channel, 220-magnet, 230-guide sleeve, 231-dynamic sealing ring, 240 -adjusting nut, 250-nut limit block, 260-guide block, 270-magnet mounting plate, 280-fixing plate, 290-gap 300-workpiece mounting assembly, 310-workpiece rack, 320-mounting rack, 330-mounting plate, 340-insulating block, 410-hydrogen tank, 420-argon tank, 430-nitrogen tank, 500-source power supply, 600-cathode power supply, 710-vacuum pump, 720-gas storage tank, 730-check valve, 740-barometer, 800-temperature controller. DETAILED DESCRIPTION

[0041] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0042] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0043] In the description of the present invention, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0044] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0045] In the description of the present invention, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0046] In the field of mobile phone manufacturing, mobile phone frame parts have high requirements for strength, weight and corrosion resistance to meet the daily use needs of consumers. Generally speaking, the mobile phone frame parts on the market are made of titanium alloy, which has a low hardness of only 340HV. 0.025 It is about 300 square meters and not wear-resistant, so it needs surface strengthening treatment.

[0047] The existing strengthening method for such parts is mainly ion nitriding. However, in operation, since the ion nitriding temperature of titanium alloy needs to be above 850℃, and the phase transition temperature of titanium alloy is 882℃, thin-walled titanium alloy parts such as mobile phone frames are very easy to deform during the ion nitriding process. Therefore, how to ensure the normal operation of the ion nitriding process and reduce the nitriding temperature to prevent the deformation of titanium alloy parts is an urgent problem to be solved in the current mobile phone frame production process.

[0048] In this regard, the present application proposes a magnetron nitriding device, which assists nitriding by utilizing the magnetic field force formed by two magnetic pole assemblies 200, thereby reducing the working temperature of ion nitriding while achieving the nitriding effect, thereby reducing the probability of deformation of the workpiece at high temperature; and by moving the magnetic pole body 210, the magnetic field position and magnetic field strength can be physically changed, thereby adjusting the nitriding effect.

[0049] In addition, the present application also proposes a nitriding method based on the above-mentioned magnetron nitriding device, which can reduce the nitriding temperature to avoid thermal deformation of the workpiece, and can adjust the position and size of the magnetic field by adjusting the position of the magnetic pole assembly 200, thereby adjusting the nitriding effect.

[0050] Reference Figure 1 and Figure 6 The magnetron nitriding device in the embodiment of the first aspect of the present application comprises a furnace assembly 100, a magnetic pole assembly 200, a workpiece mounting assembly 300, a gas delivery assembly, a source power supply 500 and a cathode power supply 600. The furnace assembly 100 is used to heat the workpiece and provide a sealed environment for ion nitriding; the magnetic pole assembly 200 is used to generate a magnetic field to enhance the effect of ion nitriding by magnetic force; the workpiece mounting assembly 300 is used to fix the workpiece and extend it into the furnace assembly 100; the gas delivery assembly is used to deliver the gas required for ion nitriding into the furnace assembly 100; the source power supply 500 and the cathode power supply 600 are both used to output high voltage electricity to the furnace assembly 100.

[0051] Specifically, the furnace assembly 100 includes a furnace body 110 and a heating wire 120. The furnace body 110 is provided with a source interface 111 to connect with the source power supply 500. A cavity is provided in the furnace body 110, and the heating wire 120 is provided in the cavity. When current is passed through the heating wire 120, it can generate heat and increase the temperature of the cavity.

[0052] There are two magnetic pole assemblies 200 and they are symmetrically installed on both sides of the furnace body 110. Figure 2The magnetic pole assembly 200 includes a magnetic pole body 210 and a magnet 220. The magnet 220 is installed at the end of the magnetic pole body 210. The magnetic pole body 210 is slidably connected to the furnace body 110 to drive the magnet 220 to penetrate into the cavity. The magnetic poles of the magnets 220 in the two magnetic pole assemblies 200 are opposite, so that a stable magnetic field is formed between the two magnetic pole assemblies 200.

[0053] Reference Figure 5 The workpiece mounting assembly 300 includes a workpiece rack 310 , the end of which is used to fix the workpiece. The workpiece rack 310 is slidably connected to the furnace body 110 to drive the workpiece deep into between the two magnetic pole assemblies 200 , so that the workpiece is in the magnetic field generated by the two magnetic pole assemblies 200 .

[0054] The gas delivery assembly includes a hydrogen tank 410, an argon tank 420 and a nitrogen tank 430 connected to the cavity. Accordingly, the furnace body 110 is also provided with a hydrogen interface 112 docking with the hydrogen tank 410, an argon interface 113 docking with the argon tank 420 and a nitrogen interface 114 docking with the nitrogen tank 430.

[0055] The source power supply 500 is electrically connected to the source interface 111 and transmits high voltage to the source interface 111. Specifically, the positive electrode of the source power supply 500 is connected to the furnace wall of the furnace body 110 and to the ground, and the negative electrode is connected to the source interface 111.

[0056] The cathode power supply 600 is electrically connected to the workpiece rack 310 and transmits high voltage to the workpiece rack 310. Specifically, the positive electrode of the cathode power supply 600 is connected to the furnace wall of the furnace body 110 and to the ground, and the negative electrode is connected to the workpiece rack 310.

[0057] Furthermore, the furnace body 110 is also equipped with a temperature measuring probe 116 , which is electrically connected to the temperature controller 800 for monitoring the temperature in the cavity, thereby controlling the heating temperature of the heating wire 120 in a closed loop.

[0058] Optionally, the furnace body 110 is further provided with a thermal insulation layer 130, which is provided on the inner wall of the furnace body 110 and covers the cavity, and is used to prevent the internal heat from diffusing outward, and reduce the damage of the high temperature to the shell of the furnace body 110. The interior of the thermal insulation layer 130 is hollow, and the furnace body 110 is provided with a furnace body water inlet 131 and a furnace body water outlet 132 connected to the interior of the thermal insulation layer 130. The furnace body water inlet 131 and the furnace body water outlet 132 are connected to an external coolant storage device, and are used to guide the coolant into the thermal insulation layer 130 to cool the furnace body.

[0059] Furthermore, the furnace body 110 is also provided with a heat insulating layer 140, which is arranged between the thermal insulation layer 130 and the cavity to block the heat transfer between the thermal insulation layer 130 and the cavity, thereby reducing the heat loss in the cavity.

[0060] Furthermore, the magnetic pole assembly 200 further includes a guide sleeve 230 and an adjusting nut 240. The guide sleeve 230 is connected to the furnace body 110, and the magnetic pole body 210 slides in the inner hole of the guide sleeve 230. At the same time, in order to prevent heat and gas from flowing out from the gap between the magnetic pole body 210 and the guide sleeve 230, a dynamic sealing ring 231 is further provided in the guide sleeve 230 to fill the gap. The outer side surface of the magnetic pole body 210 is provided with a thread, and the adjusting nut 240 is rotatably connected to the guide sleeve 230 and is threadedly connected to the magnetic pole body 210, so that screwing the adjusting nut 240 can drive the magnetic pole body 210 to move.

[0061] Specifically, the magnetic pole assembly 200 further includes a nut limiting block 250 . The adjusting nut 240 is disposed between the nut limiting block 250 and the guide sleeve 230 . The nut limiting block 250 serves to limit the axial displacement of the adjusting nut 240 .

[0062] Furthermore, the magnetic pole assembly 200 further includes a guide block 260, referring to Figure 3 The guide block 260 is connected to the furnace body 110 and is slidably connected to the side of the magnetic pole body 210 to limit the rotation of the magnetic pole body 210 and prevent the magnetic pole body 210 from rotating when the adjusting nut 240 is screwed.

[0063] Optionally, a cooling channel 211 is provided inside the magnetic pole body 210, and two ports of the cooling channel 211 are connected to an external coolant storage device. The coolant can flow into the cooling channel 211 and transfer cold energy to the magnet 220 located at the end of the magnetic pole body 210, thereby completing the cooling work of the magnet 220 and preventing the magnet 220 from demagnetizing at high temperature.

[0064] Further, refer to Figure 4 , the magnetic pole assembly 200 further includes a magnet mounting plate 270 and a fixing plate 280, and the number of magnets 220 is multiple and is mounted on the magnet mounting plate 270 in an array. In this embodiment, the number of magnets 220 is 27 to 38. The magnet mounting plate 270 and the fixing plate 280 are both mounted at the end of the magnetic pole body 210 and a gap 290 is formed between the two. The gap 290 constitutes a part of the cooling channel 211. The coolant can flow through the gap 290 and transfer the cold to the magnet 220 through the magnet mounting plate 270. In order to prevent the coolant from leaking out from the joint between the magnet mounting plate 270 and the magnetic pole body 210, a sealing ring is also provided between the two.

[0065] Specifically, the workpiece mounting assembly 300 further includes a mounting frame 320, a mounting plate 330 and an insulating block 340. The mounting frame 320 is fixedly mounted in the cavity of the furnace body 110, the mounting plate 330 is fixedly connected to the mounting frame 320 and an insulating block 340 is arranged between the two to isolate the flow of electric charge. The mounting plate 330 is provided with a threaded hole, the side of the workpiece rack 310 is provided with a thread and is threadedly connected to the mounting plate 330, and the position of the workpiece on the workpiece rack 310 in the cavity is adjusted by screwing the workpiece rack 310.

[0066] Furthermore, the magnetron nitriding device further includes a vacuum pump 710, which is connected to the furnace body 110 through a pipeline and is used to relieve the pressure in the furnace after the ion nitriding is completed. In order to store the gas discharged from the furnace body 110, the magnetron nitriding device further includes a gas storage tank 720, and the vacuum pump 710 is connected to the gas storage tank 720 and extracts the gas in the furnace body 110 into the gas storage tank 720; and a one-way valve 730 is provided between the furnace body 110 and the gas storage tank 720, the gas release pipe from the furnace body 110 to the external environment, and between the gas storage tank 720 and the vacuum pump 710, which is used to control the gas flow to be discharged only from the furnace body 110 to the outside. A barometer 740 is also provided between the furnace body 110 and the gas storage tank 720, which is used to detect the gas pressure in the furnace body 110.

[0067] A nitriding method in an embodiment of the second aspect of the present application is performed based on the above-mentioned magnetron nitriding device, comprising the following steps:

[0068] S100. The workpiece is mounted on the workpiece rack 310, and the position of the workpiece rack 310 is adjusted within the furnace body 110;

[0069] S200. Move the two magnetic pole assemblies 200 to adjust the distance between the magnet 220 and the workpiece;

[0070] S300. Open the hydrogen tank 410, the argon tank 420 and the nitrogen tank 430, so that the volume ratio of the gas filled into the furnace body 110 is H2:N2:Ar=1:3:1;

[0071] S400. Turn on the heating wire 120 to heat the furnace body 110 and maintain the temperature of the cavity at 500 to 550°C;

[0072] S500. Maintain the air pressure of the cavity at 100 to 120 Pa;

[0073] S600. Turn on the source power supply 500 and the cathode power supply 600, the output voltage of the source power supply 500 is 800V to 900V, and the output voltage of the cathode power supply 600 is 400V to 500V;

[0074] S700. The nitriding time is 6 to 8 hours. After the nitriding is completed, the magnetron nitriding device is turned off and the workpiece on the workpiece rack 310 is taken out.

[0075] The following describes the specific parameter settings of the nitriding method in conjunction with a specific implementation case:

[0076] First embodiment: the workpiece material is TC4 titanium alloy, and the surface hardness requirement is 650HV 0.025 The thickness of the nitriding layer is required to be above 3μm. Nitriding is performed according to the following process and parameters: the number of magnets 220 on the magnet mounting plate 270 is 27; the magnetic pole distance is adjusted so that the shortest distance from the fixing plate 280 to the outer edge of the workpiece holder 310 is 100mm; the volume ratio of the gas filled is H 2 :N 2 :Ar=1:3:1; nitriding temperature is 550℃; nitriding gas pressure is 120Pa; vacuum degree of vacuum pump 710 is 1Pa; source power supply 500 voltage is 900V; cathode power supply 600 voltage is 500V; nitriding time is 8h.

[0077] Second embodiment: the workpiece material is TA1 titanium alloy, and the surface hardness requirement is 600HV 0.025 The thickness of the nitriding layer is required to be above 2.5 μm. Nitriding is performed according to the following process and parameters: the number of magnets 220 on the magnet mounting plate 270 is 31; the magnetic pole distance is adjusted so that the shortest distance from the fixing plate 280 to the outer edge of the workpiece holder 310 is 100 mm; the volume ratio of the gas filled is H 2 :N 2 :Ar=1:3:1; nitriding temperature is 525℃; nitriding gas pressure is 110Pa; vacuum degree of vacuum pump 710 is 5Pa; source power supply 500 voltage is 850V; cathode power supply 600 voltage is 450V; nitriding time is 7h.

[0078] The third embodiment: the workpiece material is TA2 titanium alloy, and the surface hardness requirement is 600HV 0.025 The thickness of the nitriding layer is required to be above 2.5 μm. Nitriding is performed according to the following process and parameters: the number of magnets 220 on the magnet mounting plate 270 is 38; the magnetic pole distance is adjusted so that the shortest distance from the fixing plate 280 to the outer edge of the workpiece rack 310 is 100 mm; the volume ratio of the gas filled is H 2 :N 2 :Ar=1:3:1; nitriding temperature is 500℃; nitriding gas pressure is 100Pa; vacuum degree of vacuum pump 710 is 10Pa; source power supply 500 voltage is 800V; cathode power supply 600 voltage is 400V; nitriding time is 6h.

[0079] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the present invention. In addition, the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

Claims

1. A magnetron nitriding device, characterized in that: include: A furnace body assembly, comprising a furnace body and a heating wire, wherein the furnace body is provided with a source interface, a cavity is provided in the furnace body, and the heating wire is provided in the cavity; There are two magnetic pole assemblies, which are symmetrically installed on both sides of the furnace body, and the magnetic pole assemblies include a magnetic pole body and a magnet, the magnet is installed at the end of the magnetic pole body, and the magnetic pole body is slidably connected to the furnace body to drive the magnet to penetrate into the cavity; wherein the magnetic poles of the magnets in the two magnetic pole assemblies are opposite; A workpiece mounting assembly, comprising a workpiece rack, the end of which is used to fix the workpiece, and the workpiece rack is slidably connected to the furnace body to drive the workpiece to penetrate between the two magnetic pole assemblies; a gas delivery assembly including a hydrogen tank, an argon tank, and a nitrogen tank connected to the cavity; A source power supply electrically connected to the source interface; A cathode power supply is electrically connected to the workpiece holder.

2. The magnetron nitriding device according to claim 1, characterized in that: The furnace body is also provided with a thermal insulation layer, which is arranged on the inner wall of the furnace body and covers the cavity; the interior of the thermal insulation layer is hollow, and the furnace body is provided with a furnace water inlet and a furnace water outlet connected to the interior of the thermal insulation layer, and the furnace water inlet and the furnace water outlet are connected to an external coolant storage device for guiding the coolant into the thermal insulation layer to cool the furnace body.

3. The magnetron nitriding device according to claim 2, characterized in that: The furnace body is further provided with a heat insulating layer, which is arranged between the temperature insulating layer and the cavity to block heat transfer between the temperature insulating layer and the cavity.

4. The magnetron nitriding device according to claim 1, characterized in that: The magnetic pole assembly also includes a guide sleeve and an adjusting nut, wherein the guide sleeve is connected to the furnace body, the magnetic pole body slides in the inner hole of the guide sleeve, the outer side of the magnetic pole body is provided with a thread, and the adjusting nut is rotatably connected to the guide sleeve and is threadedly connected to the magnetic pole body, so that screwing the adjusting nut can drive the magnetic pole body to move.

5. The magnetron nitriding device according to claim 4, characterized in that: The magnetic pole assembly further comprises a guide block, which is connected to the furnace body and slidably connected to the side surface of the magnetic pole body, and is used to limit the rotation of the magnetic pole body.

6. The magnetron nitriding device according to claim 1, characterized in that: A cooling channel is arranged inside the magnetic pole body, and two ports of the cooling channel are connected to an external cooling liquid storage device, and the cooling liquid can flow into the cooling channel to cool the magnet.

7. The magnetron nitriding device according to claim 6, characterized in that: The magnetic pole assembly also includes a magnet mounting plate and a fixing plate, the magnet is mounted on the magnet mounting plate, the magnet mounting plate and the fixing plate are both mounted at the end of the magnetic pole body and a gap is formed therebetween, and the gap constitutes a part of the cooling channel.

8. The magnetron nitriding device according to claim 1, characterized in that: The workpiece mounting assembly also includes a mounting frame, a mounting plate and an insulating block. The mounting frame is fixedly mounted in the cavity of the furnace body, the mounting plate is fixedly connected to the mounting frame and an insulating block is arranged between the two to isolate the flow of charge; the mounting plate is provided with a threaded hole, the side of the workpiece frame is provided with a thread and is threadedly connected to the mounting plate, and the position of the workpiece on the workpiece frame in the cavity is adjusted by screwing the workpiece frame.

9. The magnetron nitriding device according to any one of claims 1 to 8, characterized in that: The magnetron nitriding device further comprises a vacuum pump, which is connected to the furnace body through a pipeline and is used for depressurizing the furnace after the ion nitriding is completed.

10. A nitriding method, carried out based on the magnetron nitriding device according to any one of claims 1 to 9, characterized in that: include: Installing the workpiece on the workpiece rack and adjusting the position of the workpiece rack in the furnace body; Moving the two magnetic pole assemblies to adjust the distance between the magnet and the workpiece; Open the hydrogen tank, the argon tank and the nitrogen tank, so that the volume ratio of the gas filled into the furnace body is H2:N2:Ar=1:3:1; Turning on the heating wire to heat the furnace body and maintain the temperature of the cavity at 500 to 550° C.; Maintaining the air pressure of the cavity at 100 to 120 Pa; Turning on the source power supply and the cathode power supply, wherein the output voltage of the source power supply is 800V to 900V, and the output voltage of the cathode power supply is 400V to 500V; The nitriding time is 6 hours to 8 hours. After the nitriding is completed, the magnetron nitriding device is turned off and the workpiece on the workpiece rack is taken out.

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