Combined clamp for sputter coating of optical filter and assembly method of combined clamp

Abstract

The invention belongs to the field of optical filter coating fixtures, and particularly relates to a combined fixture for sputter coating of an optical filter and an assembly method of the combined fixture, and the combined fixture comprises a replaceable slide glass disc (1) and a universal base (2); a substrate placing groove (3) is formed in the middle area of the replaceable substrate carrying disc (1); a substrate bearing surface (101) is arranged in the substrate placing groove (3); a threaded hole (102) is formed in the edge area of the replaceable slide glass disc (1); a slide tray supporting surface (201) is arranged in the universal base (2); and a positioning hole (202) is formed in the position, corresponding to the threaded hole (102), of the slide tray supporting surface (201). On the premise that the supporting base is kept unchanged, waste caused by overall replacement due to the fact that the shape and the size of the wafer support in the wafer carrying disc are replaced can be greatly reduced, and time cost and expenditure cost of proofing can be saved.

Description

Technical Field

[0001] The invention belongs to the field of filter coating fixtures, and in particular relates to a combined fixture used for filter sputtering coating and an assembly method thereof. Background Art

[0002] During the preparation of the filter, the transparent substrate needs to be coated. The process is to place the filter substrate in the coating fixture, and then place the fixture in the rotating platform of the coating machine for coating via a conveyor. Different types of filters require different coating fixtures, which will increase the time and cost of proofing. For example, patent number CN215856301U is a fixture cover for sputtering coating of narrow-band filters. The filter is placed by opening an empty slot, but the coating fixture needs to be replaced as a whole when replacing filters of different sizes and models. For example, patent number CN218824777U is a narrow-band filter and its fixture, which is a fixture that clamps the filter through a carrier. This design also requires the coating fixture to be replaced as a whole when replacing filters of different sizes and models. Summary of the invention

[0003] The present invention aims to overcome the shortcomings of the prior art and provide a combined fixture for filter sputtering coating. Under the premise of keeping the supporting base unchanged, it can greatly reduce the waste of replacing the entire plate due to changing the shape and size of the plate holder in the plate carrier, and can save the time cost and cost of proofing.

[0004] Another object of the present invention is to provide an assembly method of the above-mentioned combined fixture for sputtering coating of optical filters.

[0005] To solve the above technical problems, the present invention is achieved as follows: A combined fixture for sputter coating of optical filters comprises a replaceable carrier plate and a universal base; the replaceable carrier plate is embedded on the universal base; a substrate placement groove is provided in the middle area of ​​the replaceable carrier plate; a substrate receiving surface is provided in the substrate placement groove; a threaded hole is provided in the edge area of ​​the replaceable carrier plate; a carrier plate supporting surface is provided in the universal base; a positioning hole is provided on the carrier plate supporting surface at a position corresponding to the threaded hole; the universal base is fixedly connected to the replaceable carrier plate via the positioning hole and the threaded hole.

[0006] Furthermore, a wafer support bearing surface is provided at the outer bottom of the replaceable wafer carrier; the wafer support bearing surface is connected to the wafer carrier support surface of the universal base.

[0007] Furthermore, a first direction identification notch is provided on the outer circumferential side of the replaceable wafer carrier; and a second direction identification notch is provided on the outer circumferential side of the universal base.

[0008] Furthermore, a limiting edge is laterally provided on the outer circle of the universal base.

[0009] Furthermore, a transmission hole is provided at the bottom of the universal base.

[0010] The assembly method of the above-mentioned combined fixture for filter sputtering coating includes the following steps: aligning the first direction identification notch of the replaceable carrier plate with the second direction identification notch of the universal base in the same direction, and then locking and vertically fixing them from bottom to top through the threaded holes of the replaceable carrier plate and the positioning holes of the universal base with screws.

[0011] Furthermore, the number of the transmission holes is 3, and they are arranged in a triangle.

[0012] Most of the existing technologies are one-piece coating fixtures, which need to be replaced as a whole when coating substrates of different sizes and shapes, which easily leads to waste of production time and production costs. The combined fixture for filter coating of the present invention is introduced through the two-part combined film holder of the carrier plate and the support base. Under the premise of keeping the support base unchanged, the waste of overall replacement due to changing the size of the film holder in the carrier plate can be greatly reduced, which can save the time cost and cost of proofing. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The present invention is further described below in conjunction with the accompanying drawings and specific implementation methods. The protection scope of the present invention is not limited to the following description.

[0014] Figure 1 It is a schematic diagram of the overall assembly of the present invention; Figure 2 A top view of a replaceable wafer carrier of the present invention; Figure 3 It is a front cross-sectional view of a replaceable wafer carrier of the present invention; Figure 4 A top view of the universal base of the present invention; Figure 5 It is a bottom view of the universal base of the present invention.

[0015] In the figure: 1. replaceable wafer carrier; 101. substrate receiving surface; 102. threaded hole; 103. wafer support bearing surface; 104. first direction identification notch; 2. universal base; 201. wafer carrier supporting surface; 202. positioning hole; 203. second direction identification notch; 204. limiting edge; 205. transfer hole; 206. edge protective chamfer; 3. substrate placement groove. DETAILED DESCRIPTION

[0016] The following is combined with Figures 1 to 5The principles and features of the present invention are described, and the examples are only used to explain the present invention and are not used to limit the scope of the present invention. The present invention is described in more detail in the following paragraphs by way of example with reference to the accompanying drawings. According to the following description and claims, the advantages and features of the present invention will be clearer. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention. It should be noted that when a component is referred to as "fixed to" another component, it can be directly on the other component or there can also be a central component. When a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a central component at the same time. When a component is considered to be "set on" another component, it can be directly set on the other component or there may be a central component at the same time. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by technicians in the technical field of the present invention. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0017] See also Figures 1 to 5 As shown, a combined fixture for sputtering and coating of optical filters comprises a replaceable carrier plate 1 and a universal base 2; the replaceable carrier plate 1 is embedded on the universal base 2; a substrate placement groove 3 is provided in the middle area of ​​the replaceable carrier plate 1; a substrate receiving surface 101 is provided in the substrate placement groove 3; a threaded hole 102 is provided in the edge area of ​​the replaceable carrier plate 1; a carrier plate support surface 201 is provided in the universal base 2; a positioning hole 202 is provided on the carrier plate support surface 201 at a position corresponding to the threaded hole 102; the universal base 2 is fixedly connected to the replaceable carrier plate 1 through the positioning hole 202 and the threaded hole 102. The present invention provides a film support bearing surface 103 at the outer bottom of the replaceable carrier plate 1; the film support bearing surface 103 is connected to the carrier plate support surface 201 of the universal base 2. The present invention provides a first direction identification notch 104 on the outer circumference side of the replaceable carrier plate 1; and a second direction identification notch 203 is provided on the outer circumference side of the universal base 2. The present invention provides a limiting edge 204 in the transverse direction on the outer circle of the universal base 2. The present invention provides a transmission hole 205 at the bottom of the universal base 2. The number of the transmission holes 205 is 3, and they are arranged in a triangle.

[0018] like Figure 1The figure shows an assembly diagram of a combined fixture for sputter coating of optical filters, which includes a replaceable carrier plate 1 and a universal base 2. The assembly can be completed by aligning the first direction identification notch 104 of the replaceable carrier plate 1 with the second direction identification notch 203 of the universal base 2 in the same direction, and then locking and vertically fixing them from bottom to top through the threaded hole 102 of the replaceable carrier plate 1 and the positioning hole 202 of the universal base 2 with screws. Film holders of different shapes and sizes can be replaced by only replacing the replaceable carrier plate 1. The film holder is introduced by a two-part combination of the replaceable carrier plate and the universal base. Under the premise of keeping the universal base unchanged, the waste of overall replacement due to changing the shape and size of the film holder in the carrier plate can be greatly reduced, which can save the time cost and expense cost of proofing. Figure 2 The figure shows a top view of the replaceable wafer carrier of the present invention, which includes a first direction identification notch 104, a threaded hole 102, a substrate placement slot 3, and a wafer support bearing surface 103. The first direction identification notch 104 is used to facilitate the identification of the transmission direction and to facilitate alignment with the second direction identification notch 203 of the universal base 2 in the same direction. The threaded hole 102 is used for screws to lock and fix vertically from top to bottom, the substrate placement slot 3 is used to place the filter substrate, and the substrate receiving surface 101 is used to support the substrate in the substrate placement slot 3. Figure 3 As shown in FIG. 1 , it is a front cross-sectional view of the replaceable wafer carrier 1, including a wafer support surface 103. The wafer support surface 103 is used to support and bear against the wafer carrier support surface 201 of the universal base when assembled. Figure 4 As shown, it is a top view of the universal base 3, which includes a second direction identification notch 203, a positioning hole 202, a carrier plate support surface 201, and a limiting edge 204. The second direction identification notch 203 is used for the same direction alignment, the positioning hole 202 is used for the screw to lock and fix vertically from top to bottom, and the carrier plate support surface 201 is used to support and bear against the support surface 103 of the replaceable carrier plate 1. The limiting edge 204 can fix the fixture in direction to prevent shaking. Figure 5As shown, it is a top view of the universal base 3, which includes a second direction identification notch 203, a positioning hole 202, a limiting edge 204, a transmission hole 205, and an edge protection chamfer 206. The second direction identification notch 203 is aligned in the same direction, the positioning hole 202 is used for the screw to lock and fix vertically from top to bottom, and the limiting edge 204 can fix the fixture in direction to prevent shaking. The transmission hole 205 is used for the mechanical device to embed into the hole and support and transmit. The edge protection chamfer 206 is used to prevent scratches during contact. The present invention can replace the carrier plate 1, and the universal base 3 has a direction identification notch mark to facilitate alignment and fixation. The three annular transmission holes 205 form a triangular shape, which has good support stability, and is convenient for the mechanical device to embed into the hole and support and transmit, and the number of holes in different directions is different, which is convenient for identification and determination in the transmission direction. The positioning hole of the universal base 3 and the threaded hole of the replaceable carrier plate 1 are locked by a screw nail, which not only satisfies the convenience of the most accurate positioning of the screw, but also can effectively tighten the thread. The screw is tightened from the positioning hole of the universal base 3 to the threaded hole of the replaceable carrier plate 1, which ensures that the screw cap is on one side of the universal base 3 and not on the coating surface. Therefore, the phenomenon of easy film falling caused by the screw cap being on the upper side can be effectively reduced.

[0019] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A combined fixture for filter sputtering coating, characterized in that: The invention comprises a replaceable wafer carrier (1) and a universal base (2); the replaceable wafer carrier (1) is embedded on the universal base (2); a substrate placement groove (3) is provided in the middle region of the replaceable wafer carrier (1); a substrate receiving surface (101) is provided in the substrate placement groove (3); a threaded hole (102) is provided in the edge region of the replaceable wafer carrier (1); a wafer carrier support surface (201) is provided in the universal base (2); a positioning hole (202) is provided on the wafer carrier support surface (201) at a position corresponding to the threaded hole (102); and the universal base (2) is fixedly connected to the replaceable wafer carrier (1) via the positioning hole (202) and the threaded hole (102).

2. The combined fixture for sputtering and coating of optical filters according to claim 1, characterized in that: A film support bearing surface (103) is provided on the outer bottom of the replaceable film carrier plate (1); the film support bearing surface (103) is connected to the film carrier plate supporting surface (201) of the universal base (2).

3. The combined fixture for sputtering coating of optical filters according to claim 2, characterized in that: A first direction identification notch (104) is provided on the lateral side of the outer circle of the replaceable wafer carrier (1); and a second direction identification notch (203) is provided on the lateral side of the outer circle of the universal base (2).

4. The combined fixture for filter sputtering coating according to claim 3, characterized in that: A limiting edge (204) is laterally provided on the outer circle of the universal base (2).

5. The combined fixture for sputtering coating of optical filters according to claim 4, characterized in that: A transmission hole (205) is provided at the bottom of the universal base (2).

6. The combined fixture for sputtering coating of optical filters according to claim 5, characterized in that: The number of the transmission holes (205) is 3, and they are arranged in a triangle.

7. An assembly method of a combined fixture for filter sputtering coating as claimed in any one of claims 3 to 6, characterized in that: The method comprises the following steps: aligning a first direction identification notch (104) of a replaceable carrier plate (1) and a second direction identification notch (203) of a universal base (2) in the same direction, and then locking and vertically fixing them from bottom to top by means of a threaded screw through a threaded hole (102) of the replaceable carrier plate (1) and a positioning hole (202) of the universal base (2).

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