High-precision hydrogen flame recognition ultraviolet detection device

Abstract

The invention provides a high-precision hydrogen flame recognition ultraviolet detection device, and the device comprises a housing which is provided with a camera at one side; the ultraviolet detection module is arranged in the shell and is used for identifying hydrogen flames; the connecting base is arranged at the bottom of the shell; the ultraviolet detection module comprises a photoelectric sensor with an ultraviolet detection chip, the photoelectric sensor further comprises a pixel circuit and a circuit control board, the ultraviolet detection chip is used for receiving and detecting a hydrogen flame signal and converting the hydrogen flame signal into an electric signal, and the pixel circuit processes the received electric signal and sends the processed electric signal to the circuit control board; the circuit control board collects and transmits the processed electric signals and transmits the electric signals to the camera for imaging, and then detection of the hydrogen leakage condition sensed by the flame form is completed. According to the invention, based on the MOCVD growth theory, the contact area of light sensation is increased through the 3D nano-column structure, so that the detection range is widened, recognition and detection of extremely early stage, middle distance and high pixel of hydrogen flames are realized, and accurate detection and false alarm rate lt are improved; and 10%.

Description

Technical Field

[0001] The invention relates to the technical field of hydrogen energy safety, and in particular to a high-precision hydrogen flame identification ultraviolet detection device for detecting hydrogen leakage. Background Art

[0002] Hydrogen energy is a clean secondary energy with zero pollution, zero carbon and no secondary pollution, and is gradually becoming one of the important carriers of energy transformation and development. Hydrogen is flammable and explosive, has a low combustion range (4% to 75%), a low ignition energy, a large diffusion coefficient, and is easy to deteriorate the mechanical properties of materials. It has potential leakage and explosion hazards during storage and transportation. Hydrogen energy is known as the most promising new energy in the 21st century due to its wide sources, high combustion efficiency, and clean and pollution-free characteristics. It has received widespread attention internationally. However, while hydrogen has attracted much attention, it also brings potential safety hazards, because hydrogen has the characteristics of easy leakage and diffusion, colorless and odorless, and it is difficult to detect after leakage. If it leaks in a confined space, it is easy to form hydrogen accumulation, and there is a potential threat of fire and explosion.

[0003] Conducting research on hydrogen equipment leakage detection and monitoring technology is an important guarantee for the development of basic equipment for early warning and emergency support systems. Liquid hydrogen has a high energy density and a low boiling point. After leakage, it will cause condensation of the surrounding air and easily form a liquid pool on the ground. After evaporation and diffusion, it will mix with the air to form a flammable gas cloud, increasing the possibility of fire and explosion. Therefore, research on the safe application of hydrogen energy has far-reaching significance.

[0004] At present, the mainstream hydrogen leak detection methods at home and abroad include catalytic sensors, semiconductor sensors, electrochemical hydrogen sensors, etc. Catalytic sensors have high power consumption and the risk of ignition and explosion, semiconductor sensors are greatly affected by the environment and have poor stability, and electrochemical hydrogen sensors are easily interfered and affected by the working environment temperature. These shortcomings limit the application of such sensors.

[0005] Therefore, it is necessary to provide a highly stable, low-power, and high-precision hydrogen leak detection technology to solve the above-mentioned technical problems, which has important practical significance for the safety protection of hydrogen energy storage and transportation. Summary of the invention

[0006] In view of the technical problem of potential explosion of hydrogen energy affecting safety, a high-precision ultraviolet detection device for hydrogen flame identification is provided. The present invention mainly adopts ultraviolet detection module to identify hydrogen flame, wherein the ultraviolet detection chip is based on MOCVD growth theory, and the contact area of ​​light sensing is increased through 3D nanocolumn structure, so that the detection range is widened, and the three-dimensional photosensitive array is optimized in the structure of the light sensor, so as to realize the very early stage (weak light 1μw / cm 2The invention has the ability to detect hydrogen flames with high accuracy, is simple and convenient to operate, and has great significance for the wide application of hydrogen energy.

[0007] The technical means adopted by the present invention are as follows:

[0008] A high-precision hydrogen flame identification ultraviolet detection device, comprising:

[0009] A housing, one side of which is provided with a camera;

[0010] An ultraviolet detection module, installed in the housing, for identifying hydrogen flames;

[0011] A connecting base, arranged at the bottom of the housing, for connecting to an external tripod to fix the detection device;

[0012] The ultraviolet detection module includes a photoelectric sensor with an ultraviolet detection chip, and the photoelectric sensor also includes a pixel circuit and a circuit control board. The ultraviolet detection chip is used to receive and detect hydrogen flame signals and convert them into electrical signals. The pixel circuit amplifies and processes the received electrical signals, and the circuit control board collects and transmits the processed electrical signals to the camera for imaging, thereby completing the flame morphology perception and hydrogen leakage detection.

[0013] Furthermore, the ultraviolet detection module is fixed on the inner wall of the shell, and an opening connected to a display screen is provided at the contact point between the ultraviolet detection module and the inner wall of the shell for displaying the combustion state of the hydrogen flame.

[0014] Furthermore, the shell is made of frosted material, the outer wall is smooth, and the color is pure black to avoid interference with the detection signal.

[0015] Furthermore, the ultraviolet detection chip is prepared based on zinc oxide modified materials using wafer-level 3D stacked heterogeneous sensor integration technology.

[0016] Furthermore, the ultraviolet detection chip is a nanocolumn grown on a silicon wafer by a hydration method, and the nanocolumn increases the sensitivity of the silicon wafer by 1 μw / cm 2 Finally, 3D stacking is achieved through 3D printing technology, and the devices are closely fitted together to achieve the splicing of the UV detection chip without damaging the nanocolumns, thereby realizing the photosensitivity function.

[0017] Furthermore, the ultraviolet detection chip is made by preparing a zinc oxide nanocolumn array through a sol-gel method, which specifically includes the following steps: selecting a silicon wafer as a substrate, and growing a layer of zinc oxide film on the silicon wafer substrate using MOCVD; then coating a layer of photoresist on the silicon wafer with the zinc oxide film grown and uniformly etching holes on the photoresist; injecting aluminum into the etched uniform holes, and then cleaning the photoresist after the holes are filled with aluminum; baking zinc oxide with argon gas to obtain zinc oxide nanocolumns, and the aluminum remaining on the zinc oxide film is used as an electrode to receive signals.

[0018] Furthermore, a protective cover is provided on the outside of the camera to protect the camera.

[0019] The conventional ultraviolet light multiplier tubes, imaging ultraviolet transistors, ultraviolet enhancers and silicon-based ultraviolet detectors are commonly used to detect hydrogen flames. However, these flame detectors can only detect the presence of hydrogen flames through radiation and cannot see the hydrogen flames. Therefore, manual identification of the flame area is required.

[0020] Compared with the prior art, the present invention has the following advantages:

[0021] The ultraviolet detection module provided by the present invention can automatically adjust the working state according to the external light intensity. It is a photoelectric sensor with an ultraviolet detection chip, wherein the ultraviolet detection chip is a nanocolumn array made of the third-generation zinc oxide semiconductor technology. Compared with the existing zinc oxide pixel film, the nanocolumn array is grown on the original zinc oxide pixel film, and the spacing of the zinc oxide nanocolumn array is controlled by concentration. It has the ability of high-precision hydrogen flame recognition and reduces the false alarm rate of the flame.

[0022] The present invention is manufactured using three key technologies: high-performance back-illuminated photoelectric sensing technology, wafer-level 3D stacked heterogeneous sensor integration technology, large-size device photolithography splicing technology, and high-definition image sensor manufacturing technology based on zinc oxide modification, thereby improving the detection accuracy of hydrogen flames.

[0023] In summary, based on the above reasons, the present invention has a simple structure, is easy to operate, has a moderate size, is easy to carry, and is of great significance to the wide application of hydrogen energy. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0025] Figure 1It is a structural schematic diagram of the high-precision hydrogen flame identification ultraviolet detection device of the present invention.

[0026] Figure 2 This is a partial enlarged view of the connection base of the high-precision hydrogen flame identification ultraviolet detection device of the present invention.

[0027] Figure 3 This is a technical process schematic diagram of the detection module of the high-precision hydrogen flame identification ultraviolet detection device of the present invention.

[0028] Figure 4 The high-precision hydrogen flame identification ultraviolet detection device of the present invention detects hydrogen flame images within a distance of 20m under sunlight, wherein (a) is a distance of 5m; (b) is a distance of 10m; (c) is a distance of 15m; and (d) is a distance of 20m.

[0029] In the figure: 1. Shell; 2. UV detection module; 3. Protective cover; 4. Connecting base; 5. Camera. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] like Figure 1 As shown, the present invention provides a high-precision hydrogen flame identification ultraviolet detection device, which specifically includes: a housing 1, a camera 5 is arranged on one side, and a protective cover 3 is also arranged outside the camera 5 to protect the camera 5. The housing 1 is made of frosted material, the outer wall is smooth, and the color is pure black to avoid interference with the detection signal. Figure 2 As shown, a connecting base 4 is arranged at the bottom of the housing 1 and is used to connect an external tripod to fix the detection device.

[0032] The ultraviolet detection module 2 is fixed on the inner wall of the shell 1 and is used to identify the hydrogen flame. The contact point between the ultraviolet detection module 2 and the inner wall of the shell 1 is provided with an opening connected to a display screen, which is used to display the combustion state of the hydrogen flame.

[0033] The ultraviolet detection module 2 includes a photoelectric sensor with an ultraviolet detection chip, and the photoelectric sensor also includes a pixel circuit and a circuit control board. The ultraviolet detection chip is used to receive and detect hydrogen flame signals and convert them into electrical signals. The pixel circuit amplifies and processes the received electrical signals, and the circuit control board collects and transmits the processed electrical signals to the camera for imaging, thereby completing the flame morphology perception and hydrogen leakage detection.

[0034] The UV detection chip adopts wafer-level 3D stacked heterogeneous sensor integration technology and is made based on zinc oxide modified materials. Nanopillars are grown on silicon wafers by hydration method, and the nanopillars increase the sensitivity of silicon wafers by 1μw / cm 2 Finally, 3D stacking is achieved through 3D printing technology, and the devices are closely fitted together to achieve the splicing of the UV detection chip without damaging the nanocolumns, thereby realizing the photosensitivity function.

[0035] Specifically, Figure 3 As shown, the ultraviolet detection chip is made by preparing a zinc oxide nanocolumn array by a sol-gel method, which specifically includes the following steps: selecting a silicon wafer as a substrate, and growing a layer of zinc oxide film on the silicon wafer substrate by MOCVD; then coating a layer of photoresist on the silicon wafer with the zinc oxide film grown and performing uniform hole etching on the photoresist; injecting aluminum into the etched uniform holes, and then cleaning the photoresist after the holes are filled with aluminum; baking zinc oxide with argon gas to obtain zinc oxide nanocolumns, and the aluminum remaining on the zinc oxide film is used as an electrode to receive signals.

[0036] Furthermore, in the process of preparing nanopillars, the spacing of the zinc oxide nanopillar array can be controlled by concentration. For example, when growing zinc oxide nanopillar arrays, a zinc acetate dihydrate solution with dimethylformamide as solvent is used, and four solutions with concentrations of 0.01mol / L, 0.025mol / L, 0.05mol / L, and 0.075mol / L are configured, and the materials in the printing preparation stage are sequentially supplied to perform the three processes of printing, annealing, and growth, respectively. On a high-precision nanoscale 3D printing control platform, the zinc oxide nanowire array is prepared by electrospinning technology by optimizing the printing voltage, printing gap, and solution extrusion rate. To ensure the quality of the seed layer, the obtained sample is annealed in an environment of 350 degrees Celsius for two hours to promote uniform distribution of zinc oxide particles. Subsequently, zinc acetate dihydrate and hexamethylenetetramine with a concentration of 0.01mol / L are mixed in an equimolar ratio, and deionized water is used as a solvent to prepare a precursor solution. Next, the silicon wafer was immersed in the above solution at an inverted angle of 45° and hydrothermally treated in a vacuum drying oven at 90°C for 4 hours to grow a high-quality zinc oxide nanocolumn array. The ultraviolet visible detection signals were compared and it was found that the crystallinity of the ZnO nanocolumns gradually increased with the increase of solution concentration. When the solution concentration was 0.05 mol / L, the photoelectric response performance of the prepared ultraviolet detection chip was the best.

[0037] Furthermore, for the ZnO nanorod array, an anti-reflection layer is introduced through surface modification to improve its photoelectric conversion efficiency; a protective film is coated on its surface through chemical vapor deposition (CVD) to improve its environmental corrosion resistance. For the ZnO nanorod array, surface hydrogen passivation treatment can effectively reduce the surface defect state density and improve its photoelectric performance.

[0038] Through the above method, the hydrogen flame detector is constructed based on a zinc oxide nanoarray grown on a silicon wafer, which exhibits significant ultraviolet absorption characteristics in the wavelength range of 300nm to 380nm and slight visible light absorption in the wavelength range of 400nm to 800nm. With the help of high-speed camera to capture the image of these absorption characteristics, it is proved that the nanocolumn array prepared on the zinc oxide film has excellent ultraviolet response performance and is suitable for detecting the outer flame part of the hydrogen flame. The detection system uses the third-generation zinc oxide (ZnO) semiconductor material and processes it into a nanocolumn array structure. This specific configuration not only allows ultraviolet light to penetrate, but also is very suitable for capturing ultraviolet radiation generated by the flame, thereby realizing efficient detection of hydrogen flames. In addition, this method is simple to operate, easy to implement, and due to its strong specificity, it significantly reduces the possibility of false alarms.

[0039] The detection device proposed in the present invention utilizes the wide bandgap characteristics of the third-generation broadband semiconductor materials (covering the energy range of 2.5eV to 6.2eV), making it possible to efficiently detect hydrogen flames in the ultraviolet region. Zinc oxide (ZnO), as a direct bandgap semiconductor, exhibits excellent ultraviolet response capabilities due to its lattice structure and optical properties similar to gallium nitride (GaN), and is therefore selected as the key material of the detector.

[0040] At the same time, zinc oxide (ZnO) has greater development potential than gallium nitride due to its advantages of high melting point, low epitaxial growth temperature, low cost, non-toxic material, easy etching, and convenient process processing. Therefore, the development prospects of zinc oxide ultraviolet detectors are very broad.

[0041] In addition, in the preparation process of nanopillar arrays, the post-treatment step is crucial. The post-treatment step can not only further optimize the performance of the nanopillars, but also improve their stability and durability in practical applications. Common post-treatment methods include surface modification, cleaning and drying. Surface modification is one of the effective means to improve the performance and functionality of nanopillar arrays. The stability and functionality of nanopillars can be significantly enhanced by chemical modification or coating with a protective layer. By introducing functional molecules or polymer layers on the surface of nanopillars, their selective adsorption capacity for specific chemicals can be improved, thereby improving detection sensitivity and selectivity in sensor applications. Surface modification can also improve the photoelectric properties of nanopillars. Coating a layer of metal nanoparticles on the surface of nanopillars can form a local surface plasmon resonance effect, thereby enhancing light absorption and photoelectric conversion efficiency. Surface modification can also provide additional protection by forming a stable protective layer to prevent chemical corrosion and physical wear in the external environment, thereby extending the service life of the nanopillar array.

[0042] Cleaning and drying are another key step in post-processing. During the preparation of the nanopillar array, there may be residual reactants, solvents and by-products, which may affect the purity and performance of the nanopillars. Through effective cleaning methods, these residues can be removed to ensure the purity of the nanopillar array. Common cleaning methods include solvent cleaning, ultrasonic cleaning and plasma cleaning. Solvent cleaning can effectively dissolve and remove residual organic matter and solvents on the surface, while ultrasonic cleaning uses ultrasonic vibration to remove surface particles and impurities to achieve a cleaning effect. Plasma cleaning uses high-energy plasma to remove organic pollutants and oxides on the surface, thereby further improving the surface purity.

[0043] The drying step is also critical. The solvents and cleaning fluids used in the cleaning process need to be thoroughly dried to prevent residual liquid from affecting the performance of the nanocolumns. Common drying methods include hot air drying, vacuum drying, and freeze drying. Hot air drying accelerates the evaporation of the solvent by heating the air, while vacuum drying increases the evaporation rate of the solvent under low pressure, thereby achieving rapid drying. Freeze drying achieves drying by first freezing the solvent and then sublimating the solvent under low temperature and low pressure conditions. This method is suitable for heat-sensitive nanomaterials.

[0044] Example 1

[0045] The high-precision hydrogen flame identification ultraviolet detection device designed by the present invention can detect hydrogen flames. Figure 4 The figure shows the experimental phenomenon of hydrogen flame detected by the device at a distance of 20m under sunlight, where (a) is 5m away; (b) is 10m away; (c) is 15m away; (d) is 20m away. The experimental results are shown in the figure. The ZnO-based camera can detect hydrogen leakage conditions by flame morphology at a distance of 20m under sunlight.

[0046] The above embodiments are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the above embodiments, a person of ordinary skill in the art should understand that any modification, equivalent substitution, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A high-precision hydrogen flame identification ultraviolet detection device, characterized in that: include: A housing, one side of which is provided with a camera; An ultraviolet detection module, installed in the housing, for identifying hydrogen flames; A connecting base, arranged at the bottom of the housing, for connecting to an external tripod to fix the detection device; The ultraviolet detection module includes a photoelectric sensor with an ultraviolet detection chip, and the photoelectric sensor also includes a pixel circuit and a circuit control board. The ultraviolet detection chip is used to receive and detect hydrogen flame signals and convert them into electrical signals. The pixel circuit amplifies and processes the received electrical signals, and the circuit control board collects and transmits the processed electrical signals to the camera for imaging, thereby completing the flame morphology perception and hydrogen leakage detection.

2. The high-precision hydrogen flame identification ultraviolet detection device according to claim 1 is characterized in that: The ultraviolet detection module is fixed on the inner wall of the shell, and an opening connected to a display screen is provided at the contact point between the ultraviolet detection module and the inner wall of the shell for displaying the combustion state of the hydrogen flame.

3. The high-precision hydrogen flame identification ultraviolet detection device according to claim 1 is characterized in that: The shell is made of frosted material, has a smooth outer wall, and is pure black in color to avoid interference with detection signals.

4. The high-precision hydrogen flame identification ultraviolet detection device according to claim 2 is characterized in that: The ultraviolet detection chip is prepared based on zinc oxide modified materials using wafer-level 3D stacked heterogeneous sensor integration technology.

5. The high-precision hydrogen flame identification ultraviolet detection device according to claim 4 is characterized in that: The UV detection chip is a nanocolumn grown on a silicon wafer by hydration method. The nanocolumn increases the sensitivity of the silicon wafer by 1 μw / cm 2 Finally, 3D stacking is achieved through 3D printing technology, and the devices are closely fitted together to achieve the splicing of the UV detection chip without damaging the nanocolumns, thereby realizing the photosensitivity function.

6. The high-precision hydrogen flame identification ultraviolet detection device according to claim 5 is characterized in that: The ultraviolet detection chip is made by preparing a zinc oxide nanocolumn array by a sol-gel method, and specifically includes the following steps: selecting a silicon wafer as a substrate, and growing a layer of zinc oxide film on the silicon wafer substrate by using MOCVD; then coating a layer of photoresist on the silicon wafer with the zinc oxide film grown, and uniformly etching holes on the photoresist; injecting aluminum into the etched uniform holes, and then cleaning the photoresist after the holes are filled with aluminum; baking zinc oxide with argon gas to obtain zinc oxide nanocolumns, and the aluminum remaining on the zinc oxide film is used as an electrode to receive signals.

7. The high-precision hydrogen flame identification ultraviolet detection device according to claim 1 is characterized in that: A protective cover is also provided on the outside of the camera.

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