Multimodal field negative hydrogen ion source and adjusting method thereof

Abstract

According to the multi-peak field negative hydrogen ion source and the adjusting method thereof, the filtering magnet is connected to the annular rotating flange plate, the built-in and external modes of the filtering magnet are flexibly adjusted by adjusting the annular rotating flange plate, and the filtering magnet can be replaced by replacing the annular rotating flange plate; under the condition that other structures and parameters are not changed, the intensity and the brightness of the extraction beam of the multi-peak field negative hydrogen ion source are greatly improved, and the filtering magnetic field can be adjusted to a certain extent so as to research the influence of the filtering magnetic field on the multi-peak field negative hydrogen ion source.

Description

Technical Field

[0001] The present invention relates to the technical field of ion sources, and in particular to a multi-peak field negative hydrogen ion source and a regulating method thereof. Background Art

[0002] When existing ion sources generate negative hydrogen ions, there are three main channels for the extinction of negative hydrogen ions, namely mutual neutralization, electron desorption and compound desorption. In addition to using the filtering magnetic field in the extraction zone to suppress the "electron desorption" process to a certain extent, the ion sources in related technologies do not have a good solution to the above three extinction processes, which has become a bottleneck restricting the further development of the intensity and brightness of the extracted beam of the current ion source, and is also a drawback of existing ion sources. Summary of the invention

[0003] The present invention aims to solve one of the technical problems in the related art at least to a certain extent. To this end, the present invention provides a multi-peak field negative hydrogen ion source and a method for adjusting the same.

[0004] Based on the above purpose, in a first aspect, the present invention provides a multi-peak field negative hydrogen ion source, which includes a discharge chamber component and a particle extraction component, wherein the discharge chamber component and the particle extraction component are connected via a first insulator; an ion source filament is provided at one end of the discharge chamber component away from the particle extraction component, the ion source filament is externally connected to a voltage source, and the ion source filament emits electrons under the action of the voltage source, and the electrons are used to bombard the hydrogen in the discharge chamber to generate high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules; an annular rotating flange is provided at one end of the discharge chamber component close to the particle extraction component, and a filtering magnet is detachably provided on the inner ring of the annular rotating flange, and the filtering magnet is used to form a filtering magnetic field, and the filtering magnetic field is used to The motion of high-temperature electrons and low-speed hydrogen molecules is deviated and filtered out, and low-temperature electrons and high-speed hydrogen molecules are extracted; wherein the annular rotating flange is constructed to allow the tangential direction of the extended discharge chamber assembly to rotate, and the filtering magnet is constructed to allow the adjustment of the setting position on the inner ring of the annular rotating flange; the low-temperature electrons and high-speed hydrogen molecules form a negative hydrogen ion beam during the extraction process; the extraction component includes an extraction partition and an extraction electrode, the extraction partition and the extraction electrode are connected by a second insulator, a first extraction hole is arranged on the extraction partition, a second extraction hole is arranged on the extraction electrode, and the first extraction hole and the second extraction hole are coaxially arranged; the negative hydrogen ions are extracted from the first extraction hole and the second extraction hole under the action of the extraction electrode.

[0005] In addition, the multi-peak field negative hydrogen ion source according to the above embodiment of the present invention may also have the following additional technical features:

[0006] As an optional embodiment, the sizes of the annular rotating flange and the filtering magnet are adjustable.

[0007] As an optional embodiment, the discharge chamber assembly further includes:

[0008] A cylindrical chamber wall, the cylindrical chamber wall comprising an inner chamber wall, an outer chamber wall, and a permanent magnet array disposed between the inner chamber wall and the outer chamber wall;

[0009] The permanent magnet array is used to form a confining magnetic field, and the confining magnetic field is used to spatially confine high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules generated in the discharge cavity.

[0010] As an optional embodiment, the cylindrical chamber wall further comprises:

[0011] The water circulation inner cavity is arranged around the permanent magnet array and is used to contain cooling water to cool the permanent magnet array.

[0012] As an optional embodiment, the discharge chamber assembly further includes:

[0013] The cover plate is arranged at one end of the discharge chamber component away from the particle extraction component, and the ion source filament is arranged at a side of the cover plate facing the discharge chamber.

[0014] As an optional embodiment, the cover plate is further provided with an air inlet channel, and the air inlet channel is used to provide hydrogen to the discharge chamber.

[0015] As an optional embodiment, the filtering magnets are arranged on the inner ring of the annular rotating flange at preset intervals, and the polarities of any two filtering magnets that are symmetrical about the center of the annular rotating flange are opposite.

[0016] As an optional embodiment, the extraction electrode is used to absorb high-temperature electrons and low-speed hydrogen molecules whose motion is deviated, and accelerate and extract the negative hydrogen ion beam.

[0017] In a second aspect, the present invention provides a method for regulating a multi-peak field negative hydrogen ion source, which is applied to the multi-peak field negative hydrogen ion source as described above, and the method comprises:

[0018] Adjust the size of the annular rotating flange according to target requirements;

[0019] or / and, adjusting the position of the annular rotating flange;

[0020] Or / and, adjust the position of the filter magnet on the annular rotating flange.

[0021] In addition, the method for adjusting the multi-peak field negative hydrogen ion source according to the above embodiment of the present invention may also have the following additional technical features:

[0022] As an optional embodiment, adjusting the position of the annular rotating flange further includes:

[0023] The annular rotating flange is rotated in the tangential direction of the discharge chamber component to change the position of the filtering magnet relative to the discharge chamber, thereby adjusting the magnetic field direction of the filtering magnetic field.

[0024] As can be seen from the above, the present invention provides a multi-peak field negative hydrogen ion source and a method for regulating the same. The multi-peak field negative hydrogen ion source includes a discharge chamber component and a particle extraction component. The discharge chamber component and the particle extraction component are connected through a first insulator; an ion source filament is provided at one end of the discharge chamber component away from the particle extraction component. The ion source filament is externally connected to a voltage source. The ion source filament emits electrons under the action of the voltage source. The electrons are used to bombard the hydrogen in the discharge chamber to generate high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules; an annular rotating flange is provided at one end of the discharge chamber component close to the particle extraction component. The inner ring of the annular rotating flange is detachably provided with a filtering magnet. The filtering magnet is used to form a filtering magnetic field. The filtering magnetic field is used to The invention is used to deviate the motion of high-temperature electrons and low-speed hydrogen molecules and filter them out, and to extract low-temperature electrons and high-speed hydrogen molecules; wherein, the annular rotating flange is constructed to allow rotation in the tangential direction of the extended discharge chamber assembly, and the filtering magnet is constructed to allow adjustment of the setting position on the inner ring of the annular rotating flange; the low-temperature electrons and high-speed hydrogen molecules form a negative hydrogen ion beam during the extraction process; the extraction assembly includes an extraction partition and an extraction electrode, the extraction partition and the extraction electrode are connected by a second insulator, a first extraction hole is arranged on the extraction partition, a second extraction hole is arranged on the extraction electrode, and the first extraction hole and the second extraction hole are arranged coaxially; the negative hydrogen ions are extracted from the first extraction hole and the second extraction hole under the action of the extraction electrode. The multi-peak field negative hydrogen ion source proposed in the present invention connects the filtering magnet to the annular rotating flange, and the internal and external modes of the filtering magnet can be flexibly adjusted by adjusting the annular rotating flange. The filtering magnet can also be replaced by replacing the annular rotating flange. When other structures and parameters remain unchanged, the intensity and brightness of the beam extracted by the multi-peak field negative hydrogen ion source are greatly improved, and the filtering magnetic field can be adjusted to a certain extent to study the influence of the filtering magnetic field on the multi-peak field negative hydrogen ion source.

[0025] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 A schematic diagram of the cross-sectional structure of a multi-peak field negative hydrogen ion source provided in an embodiment of the present invention.

[0028] Figure 2 Schematic diagram of an annular rotating flange provided in an embodiment of the present invention.

[0029] Figure 3 A schematic diagram of the functional areas of a multi-peak field negative hydrogen ion source provided in an embodiment of the present invention.

[0030] Figure 4 A schematic flow chart of a method for regulating a multi-peak field negative hydrogen ion source provided in an embodiment of the present invention.

[0031] Reference numerals:

[0032] Discharge chamber component 1, particle extraction component 2, first insulator 3, cylindrical chamber wall 4, inner chamber wall 4-1, outer chamber wall 4-2, permanent magnet array 4-3, cover plate 5, ion source filament 6, air inlet channel 7, voltage source 8, discharge chamber 9, annular rotating flange 10, filter magnet 11, extraction partition 12, first extraction hole 12-1, second insulator 13, extraction electrode 14, second extraction hole 14-1, high temperature area a, filtration area b and low temperature area c. DETAILED DESCRIPTION

[0033] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0034] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0035] As described in the background technology section, when the existing ion source produces negative hydrogen ions, there are mainly three channels for the extinction of negative hydrogen ions, namely mutual neutralization, electron desorption and composite desorption processes. In addition to being able to use the filtering magnetic field in the extraction zone to suppress the "electron desorption" process to a certain extent, the ion source in the related art does not have a good solution to the above three extinction processes, which has become a bottleneck restricting the further development of the current ion source extraction beam intensity and brightness, and is also a drawback of the existing ion source. In order to solve the destruction of the negative hydrogen ions formed by high-energy electrons, the multi-peak field negative hydrogen ion source usually sets a transverse filtering magnetic field in the extraction zone, which can allow low-temperature electrons to diffuse through and prevent high-temperature electrons from diffusing to the extraction zone. The structure of the multi-peak magnet is very compact, which is conducive to improving the confinement effect of the magnetic field on the plasma, but because of its compactness, the space left for the design of the transverse filtering magnetic field is limited. Moreover, this structure usually needs to maintain the relative position between the fan-shaped magnetic blocks in some way, such as bonding or adding tooling. Once assembled, it will be difficult to readjust the structure.

[0036] The applicant discovered in the process of realizing the present invention that during the operation of the multi-peak field negative hydrogen ion source, the electron binding energy of the hydrogen anion is very small (about 0.75 eV), and therefore it is very easy to be destroyed by high-energy electrons. In order to reduce the electron temperature, reduce the loss of hydrogen anions, and reduce the accompanying electrons, it is necessary to introduce a filtering magnetic field. The filtering magnet can be built-in or external. The main problem of the built-in method is the cooling and damage of the magnet, and the main difficulty of the external method is the magnetic field design and processing.

[0037] There is no definite technical solution for the selection of internal and external sources of the filtering magnetic field in the related art. Some related technologies use a built-in filtering magnetic field, and the arc current intensity drawn out from the ion source outlet can reach 41mA. The advantages of this solution are simple and compact structure, the magnet is close to the reaction ions, and it can better suppress low-energy electrons, but the magnet is severely damaged by ion impact and requires a better water cooling design; there are also related technologies that place the filtering magnets side by side near the Cusp field magnet. The advantage of this solution is that the external magnet will not be affected by ion impact, and the position of the magnet can be relatively easily adjusted to change the magnetic field distribution, but the external magnet requires more space and may increase the volume of the entire device. The magnetic field it generates decays faster in space, and the uniformity problem in spatial distribution will gradually appear, resulting in the magnetic field at the center of the extraction area being too small and the extraction beam density of hydrogen anions being reduced.

[0038] From the above, it can be seen that good filtering magnetic field parameters can not only increase the extraction beam density of the hydrogen negative ion source, but also effectively suppress the co-extracted electrons. Therefore, it is necessary to optimize the structure of the filtering magnetic field.

[0039] The technical solution of the present invention is further described in detail below through specific embodiments.

[0040] An ion source is a device or apparatus that can convert neutral substances into charged ions. These ions are often used in laboratory instruments such as ion beam processing, electron microscopes, and mass spectrometers. The function of an ion source is to produce a highly directed, high-energy ion beam, which has made it very widely used in materials science, surface physics, chemistry, biology, and other fields.

[0041] The multi-peak field negative hydrogen ion source, namely the Cusp ion source, is a special form of magnetic field distribution. In a static magnetic field, the movement of electrons is affected by the magnetic field, and the CUSP magnetic field has a unique magnetic field distribution characteristic, which makes the magnetic field strength or direction have a specific regularity in certain areas. This magnetic field is usually generated by a specific magnet configuration or electromagnetic device.

[0042] The channels for the extinction of negative hydrogen ions mainly include mutual neutralization, electron desorption and composite desorption processes, among which mutual neutralization is one of the main ways for the extinction of negative hydrogen ions. The mutual neutralization process refers to the process in which negative hydrogen ions collide with positive ions (such as H+) and are transformed into neutral particles (such as H2) through charge exchange. In this process, negative hydrogen ions and positive ions capture opposite charges from each other, thereby transforming into an electrically neutral state. The electron desorption process refers to the process in which negative hydrogen ions collide with electrons, causing negative hydrogen ions to lose electrons and transform into neutral hydrogen atoms. In this process, the collision between negative hydrogen ions and electrons causes charge separation, and negative hydrogen ions lose negative charges and become neutral. The composite desorption process refers to the process in which negative hydrogen ions collide with hydrogen atoms or other neutral particles and are transformed into other neutral substances through charge transfer or chemical reactions. In this process, the collision between negative hydrogen ions and neutral particles causes charge redistribution or the formation of chemical bonds, thereby transforming into new neutral substances.

[0043] refer to Figure 1 , is a schematic diagram of the cross-sectional structure of a multi-peak field negative hydrogen ion source.

[0044] The multi-peak field negative hydrogen ion source 100 proposed in the embodiment of the present invention comprises: a discharge chamber component 1 and a particle extraction component 2, wherein the discharge chamber component 1 and the particle extraction component 2 are connected via a first insulator 3; an ion source filament 6 is arranged at one end of the discharge chamber component 1 away from the particle extraction component 2, and the ion source filament 6 is externally connected to a voltage source 8, and the ion source filament 6 emits electrons under the action of the voltage source 8, and the electrons are used to bombard the hydrogen in the discharge chamber 9 to generate high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules; an annular rotating flange 10 is arranged at one end of the discharge chamber component 1 close to the particle extraction component 2, and a filter magnet 11 is detachably arranged on the inner ring of the annular rotating flange 10, and the filter magnet 11 is used to form a filter magnetic field, and the filter magnetic field is used to cause the movement of high-temperature electrons and low-speed hydrogen molecules to deviate. And be filtered out, and low-temperature electrons and high-speed hydrogen molecules are extracted; wherein, the annular rotating flange 10 is constructed to allow the tangential direction of the extended discharge chamber component 1 to rotate, and the filtering magnet 11 is constructed to allow the setting position to be adjusted in the inner ring of the annular rotating flange 10; the low-temperature electrons and the high-speed hydrogen molecules form a negative hydrogen ion beam during the extraction process; the extraction component 2 includes an extraction partition 12 and an extraction electrode 14, the extraction partition 12 and the extraction electrode 14 are connected by a second insulator 13, a first extraction hole 12-1 is provided on the extraction partition 12, and a second extraction hole 14-1 is provided on the extraction electrode 14, and the first extraction hole 12-1 and the second extraction hole 14-1 are coaxially arranged; negative hydrogen ions are extracted from the first extraction hole 12-1 and the second extraction hole 14-1 under the action of the extraction electrode 14.

[0045] The discharge chamber component 1 and the particle extraction component 2 are connected via the first insulator 3. This connection ensures electrical isolation between the discharge chamber component 1 and the particle extraction component 2, prevents direct conduction of current, and thus ensures the normal operation and safety of the multi-peak field negative hydrogen ion source 100.

[0046] refer to Figure 2 , is a schematic diagram of an annular rotating flange provided in an embodiment of the present invention.

[0047] In the embodiment of the present application, the annular rotating flange 10 is usually made of high-strength, corrosion-resistant materials to ensure that it can operate stably in a harsh plasma environment. Its structure mainly includes an annular main body, and a plurality of mounting holes or slots are provided on the inner ring of the main body for mounting and fixing the filter magnet 11. In addition, the annular rotating flange 10 also has a rotating mechanism, allowing it to rotate along the tangential direction of the discharge chamber component 1, so as to adjust the relative position of the filter magnet. The tangential direction of the discharge chamber component 1 is a direction perpendicular to the axial direction of the discharge chamber component 1.

[0048] Further, one of the main functions of the annular rotating flange 10 is to support and fix the filter magnet. Through reasonable design and layout, the filter magnet 11 can be firmly mounted on the inner ring of the annular rotating flange 10 to ensure that it will not loosen or fall off during operation. Since the annular rotating flange 10 can rotate along the tangential direction of the discharge chamber assembly 1, the relative position of the filter magnet 11 can be easily adjusted, thereby changing the distribution and intensity of the filter magnetic field. This adjustment capability is crucial for optimizing the generation and confinement process of ions. In the extraction process of the negative hydrogen ion beam, the annular rotating flange 10 works together with the extraction assembly 2 to ensure that the negative hydrogen ion beam can efficiently pass through the extraction hole (the first extraction hole 12-1, the second extraction hole 14-1) and be extracted. By adjusting the position and angle of the annular rotating flange 10, the purpose of optimizing the extraction efficiency and directionality of ions is achieved.

[0049] In addition, in addition to carrying the filtering magnet 11, the annular rotating flange 10 can also be designed in other ways as needed to achieve additional functions. For example, an adjustment mechanism (not shown in the figure) can be set on the annular rotating flange 10 to adjust the position and angle of the filtering magnet 11, so as to optimize the filtering effect of ions. Alternatively, a sensor and a monitoring device (not shown in the figure) can be set on the annular rotating flange 10 to monitor the state and filtering effect of ions in real time.

[0050] As an optional embodiment, the filter magnets 11 are arranged on the inner ring of the annular rotating flange 10 at preset intervals, and any two filter magnets 11 that are symmetrical about the center of the annular rotating flange 10 have opposite polarities.

[0051] Specifically, the filtering magnets 11 are arranged at preset intervals and polarities on the annular rotating flange 10. This arrangement can form a specific magnetic field distribution, thereby achieving effective confinement and filtering of the negative hydrogen ion beam.

[0052] In addition, when adapting the discharge chamber component 1 and the particle extraction component 2, the size, quantity, position and polarity of the annular rotating flange 10 can be set according to actual needs. Similarly, the configuration and effect of the filtering magnetic field can be further optimized by adjusting the size, quantity, position and polarity of the filtering magnet 11.

[0053] As an optional embodiment, the discharge chamber assembly 1 also includes: a cylindrical chamber wall 4, the cylindrical chamber wall 4 includes an inner chamber wall 4-1, an outer chamber wall 4-2 and a permanent magnet array 4-3 arranged around the inner chamber wall 4-1 and the outer chamber wall 4-2; the permanent magnet array 4-3 is used to form a confining magnetic field, and the confining magnetic field is used to spatially confine high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules generated in the discharge chamber 9.

[0054] In the design of the multi-peak field negative hydrogen ion source 100 of the embodiment of the present invention, the structure of the discharge chamber assembly 1 plays a vital role in the generation, confinement and extraction process of ions, and its structure is shaped like a "barrel". The cylindrical chamber wall 4 of the discharge chamber assembly 1 is the main part of the discharge chamber, which provides the physical space required for ion generation and confinement. The cylindrical chamber wall 4 is composed of multiple parts, including an inner chamber wall 4-1, an outer chamber wall 4-2, and a permanent magnet array 4-3 arranged between the inner chamber wall 4-1 and the outer chamber wall 4-2. Among them, the inner chamber wall 4-1 is the inner surface of the cylindrical chamber wall 4, which directly faces the internal space of the discharge chamber 9. The material selection and design of the inner chamber wall 4-1 have an important influence on the generation and confinement efficiency of ions. In the specific implementation, the inner chamber wall 4-1 is usually made of a material with high conductivity and high corrosion resistance to ensure that no excessive impurities and pollutants are generated during the discharge process. The outer chamber wall 4-2 is the outer surface of the cylindrical chamber wall 4, which mainly plays a role of protection and support. The material and structure of the outer cavity wall 4-2 are usually stronger and more durable than the inner cavity wall 4-1 to withstand the high temperature and high pressure environment generated during the discharge process. The permanent magnet array 4-3 is a key component in the discharge chamber assembly 1, which is arranged around the inner cavity wall 4-1 and the outer cavity wall 4-2. The main function of the permanent magnet array 4-3 is to generate a confining magnetic field, which performs spatial confinement on the high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules generated in the discharge chamber. The confining magnetic field generated by the permanent magnet array 4-3 can affect the motion trajectory of particles in the discharge chamber 9, so that these particles are confined within a certain spatial range under the action of the confining magnetic field. This confining effect helps to reduce the loss and escape of ions and improve the efficiency and stability of ion generation.

[0055] In addition, each permanent magnet in the permanent magnet array 4-3 has a clear magnetic pole direction. In an embodiment of the present invention, these magnetic pole directions are generally designed to alternate with each other to form a specific magnetic field distribution. For example, adjacent permanent magnets may have opposite magnetic pole directions, thereby generating a magnetic field gradient between them. This magnetic field gradient helps to guide the movement trajectory of ions in the discharge chamber 9 and enhance the confinement effect on ions. The number and spacing of the permanent magnets in the permanent magnet array 4-3 can be determined according to the size, shape and required magnetic field strength of the discharge chamber. Increasing the number of permanent magnets or reducing the spacing between them can enhance the strength and uniformity of the magnetic field. The permanent magnets in the permanent magnet array 4-3 need to be firmly fixed in the cylindrical chamber wall 4 of the discharge chamber assembly 1, which can be achieved by a specific mounting structure or fixture. These mounting structures or fixtures need to be able to withstand the high temperature and high pressure environment generated during the discharge process, and ensure that the permanent magnets will not loosen or fall off during long-term operation. Further, the permanent magnet array 4-3 can also have a magnetic field adjustment function, which can be achieved by changing the relative position of the permanent magnets, the magnetic pole direction or adding additional magnetic field adjustment elements. By adjusting the distribution and strength of the confining magnetic field, the ion generation and confinement process can be further optimized and the ion generation efficiency and stability can be improved.

[0056] It can be seen that the ion generation process can be further optimized by adjusting the arrangement of the permanent magnet array 4-3, the magnetic pole direction, the magnetic field strength and other parameters. For example, by increasing the strength of the confining magnetic field and changing the magnetic pole direction of the permanent magnet array 4-3, the confinement effect on the ions can be enhanced, thereby improving the ion generation density and purity.

[0057] As an optional embodiment, the cylindrical chamber wall 4 also includes: a water circulation inner cavity 4-4, which is arranged around the permanent magnet array 4-3 and is used to contain cooling water to cool the permanent magnet array 4-3.

[0058] Specifically, in the design of the discharge chamber assembly 1, in order to ensure that the permanent magnet array 4-3 can maintain stable performance during long-term operation, especially under high load or continuous operation, it is crucial to effectively control its temperature. Therefore, in an embodiment of the present invention, the cylindrical chamber wall 4 is further designed to include a water circulation inner cavity 4-4, which is designed to reduce the temperature of the permanent magnet array 4-3 by circulating cooling water. The water circulation inner cavity 4-4 is arranged around the permanent magnet array 4-3 to form a cooling channel surrounding the permanent magnet array. This design ensures that the cooling water can flow evenly through each part of the permanent magnet array 4-3, thereby effectively taking away the heat generated by the magnetic field generation and maintenance process. The cooling water circulates in the water circulation inner cavity 4-4, and its main function is to absorb and take away the heat generated by the permanent magnet array 4-3. By keeping the temperature of the permanent magnet array 4-3 within a suitable range, the stability of its magnetic properties can be ensured, and the performance degradation or damage caused by overheating can be prevented. In addition, a stable temperature environment also helps to improve the overall performance and reliability of the discharge chamber assembly.

[0059] Furthermore, the water circulation system may include components such as a cooling water source, a water pump, a radiator (or a heat exchanger), and connecting pipes (not shown in the figure). After the cooling water is pumped out from the water source, it is pressurized and sent into the water circulation cavity 4-4 through the water pump. After flowing through the permanent magnet array 4-3, the cooling water that has absorbed heat is guided to the radiator for cooling, and then returned to the water source through the pipe, forming a complete cycle.

[0060] It should be noted that when designing the water circulation inner cavity 4-4, the size, shape and required cooling effect of the permanent magnet array can be considered according to actual needs. At the same time, it is also necessary to ensure the sealing and reliability of the water circulation system to prevent cooling water leakage from damaging the discharge cavity components.

[0061] As an optional embodiment, the discharge chamber assembly 1 further includes: a cover plate 5 , which is arranged at one end of the discharge chamber assembly 1 away from the particle extraction assembly 2 , and the ion source filament 6 is arranged on a side of the cover plate 5 facing the discharge chamber 9 .

[0062] Specifically, the cover plate 5 is arranged at one end of the discharge chamber assembly 1 away from the particle extraction assembly 2, and its main function is to close one end of the discharge chamber 9 to prevent external impurities and pollutants from entering the discharge chamber. At the same time, the cover plate 5 also provides a platform for installing and fixing other components (such as the ion source filament 6).

[0063] When the discharge chamber assembly 1 starts working, the ion source filament 6 is heated and generates electrons. These electrons are accelerated under the action of the electric field and injected into the discharge chamber 9. In the discharge chamber, the electrons collide with hydrogen molecules, ionizing the hydrogen molecules and generating negative hydrogen ions. Subsequently, these negative hydrogen ions are confined in the discharge chamber under the action of the confining magnetic field until they are effectively extracted by the particle extraction assembly 2.

[0064] It should be noted that the size and shape of the discharge chamber and the required ion generation efficiency need to be comprehensively considered when designing the cover plate 5 and the ion source filament 6. At the same time, it is also necessary to ensure the sealing and insulation between the cover plate 5 and the ion source filament 6 to prevent arc discharge and short circuit during the discharge process.

[0065] As an optional embodiment, the cover plate 5 is further provided with a gas inlet channel 7 , and the gas inlet channel 7 is used to provide hydrogen to the discharge chamber 9 .

[0066] Specifically, in the design of the discharge chamber assembly 1, in order to ensure that ions can be continuously and stably generated in the discharge chamber, it is necessary to provide sufficient reaction gas (such as hydrogen) in the discharge chamber 9. In an embodiment of the present invention, the cover plate 5 is further designed to include an air inlet channel 7, which is designed to optimize the supply method of hydrogen and improve the efficiency of ion generation. Through the air inlet channel 7, hydrogen can be continuously and stably introduced into the discharge chamber 9. This supply method can ensure that a suitable hydrogen concentration is always maintained in the discharge chamber 9, thereby optimizing the efficiency of ion generation. In practical applications, hydrogen can be supplied by external equipment such as gas cylinders and gas pipelines (not shown in the figure), and enter the discharge chamber through the air inlet channel 7.

[0067] In addition, in addition to providing hydrogen to the discharge chamber 9, the gas inlet channel 7 can also be designed in other ways according to actual needs to achieve additional functions. For example, a filtering device (not shown in the figure) can be provided in the gas inlet channel 7 to remove impurities and pollutants in the hydrogen; or a flow control device (not shown in the figure) can be provided to adjust the flow of hydrogen entering the discharge chamber.

[0068] It should be noted that the size, shape and required hydrogen flow rate of the discharge chamber 9 need to be comprehensively considered when designing the air inlet channel 7. At the same time, the airtightness and smoothness of the air inlet channel 7 need to be ensured to prevent hydrogen leakage or blockage.

[0069] As an optional embodiment, the extraction electrode 14 is used to absorb high-temperature electrons and low-speed hydrogen molecules whose motion is deviated, and accelerate and extract the negative hydrogen ion beam.

[0070] Specifically, in a multi-peak field negative hydrogen ion source device, effectively extracting a negative hydrogen ion beam is one of the keys to achieving its high performance. In order to achieve this goal, it is necessary to accurately control the motion trajectory of the ions and simultaneously remove particles that may have a negative impact on the quality of the ion beam. In an embodiment of the present invention, the extraction electrode 14 is designed to adsorb high-temperature electrons and low-speed hydrogen molecules whose motion is offset, and accelerate the extraction of the negative hydrogen ion beam, thereby improving the purity and energy of the ion beam. During the discharge process, a portion of high-temperature electrons will be generated, and the energy of these electrons is relatively high, which may interfere with the stability and directionality of the ion beam. The extraction electrode 14 can effectively adsorb these high-temperature electrons through its special material structure and potential configuration, thereby reducing their impact on the ion beam. In addition to ions, there will be a portion of low-speed hydrogen molecules in the discharge chamber. If these molecules are not removed, they may collide with the ions, resulting in scattering and energy loss of the ion beam. The extraction electrode 14 can exclude these low-speed hydrogen molecules from the ion beam through its electric field, thereby maintaining the purity of the ion beam. On the basis of completing the above two functions, the extraction electrode 14 also undertakes the task of accelerating the extraction of the negative hydrogen ion beam. The extraction electrode 14 designed by the present invention can provide a strong acceleration force for the negative hydrogen ions, so that they can efficiently leave the discharge chamber 9 and enter the subsequent analysis, processing or application links. Among them, in order to achieve effective adsorption and removal of high-temperature electrons and low-speed hydrogen molecules, the extraction electrode 14 can be selected from materials with excellent conductivity and heat resistance.

[0071] In addition, the extraction electrode 14 can also be functionally expanded according to actual needs. For example, a sensor (not shown in the figure) can be set on the extraction electrode 14 to monitor the state and performance of the ion beam in real time; or the potential and shape of the extraction electrode 14 can be adjusted to further optimize the directionality and focusing of the ion beam.

[0072] It can be seen from the above that a multi-peak field negative hydrogen ion source provided by the present invention includes a discharge chamber component and a particle extraction component, and the discharge chamber component and the particle extraction component are connected through a first insulator; an ion source filament is arranged at one end of the discharge chamber component away from the particle extraction component, and the ion source filament is externally connected to a voltage source, and the ion source filament emits electrons under the action of the voltage source, and the electrons are used to bombard the hydrogen in the discharge chamber to generate high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules; an annular rotating flange is arranged at one end of the discharge chamber component close to the particle extraction component, and a filtering magnet is detachably arranged on the inner ring of the annular rotating flange, and the filtering magnet is used to form a filtering magnetic field, and the filtering magnetic field is used to make the high The movement of warm electrons and low-speed hydrogen molecules is deviated and filtered out, and low-temperature electrons and high-speed hydrogen molecules are extracted; wherein, the annular rotating flange is constructed to allow the tangential direction of the extended discharge chamber assembly to rotate, and the filtering magnet is constructed to allow the setting position to be adjusted on the inner ring of the annular rotating flange; the low-temperature electrons and high-speed hydrogen molecules form a negative hydrogen ion beam during the extraction process; the extraction component includes an extraction partition and an extraction electrode, the extraction partition and the extraction electrode are connected by a second insulator, a first extraction hole is arranged on the extraction partition, a second extraction hole is arranged on the extraction electrode, and the first extraction hole and the second extraction hole are coaxially arranged; the negative hydrogen ions are extracted from the first extraction hole and the second extraction hole under the action of the extraction electrode. The multi-peak field negative hydrogen ion source proposed in the present invention connects the filtering magnet to the annular rotating flange, and the internal and external modes of the filtering magnet can be flexibly adjusted by adjusting the annular rotating flange. The filtering magnet can also be replaced by replacing the annular rotating flange. When other structures and parameters remain unchanged, the intensity and brightness of the beam extracted by the multi-peak field negative hydrogen ion source are greatly improved, and the filtering magnetic field can be adjusted to a certain extent to study the influence of the filtering magnetic field on the multi-peak field negative hydrogen ion source.

[0073] Corresponding to the above-mentioned embodiment, the present invention also proposes a method for adjusting a multi-peak field negative hydrogen ion source.

[0074] The following is a specific example to illustrate the adjustment method of the multi-peak field negative hydrogen ion source provided in the embodiment of the present application.

[0075] refer to Figure 3 , which is a schematic diagram of the functional area of ​​the multi-peak field negative hydrogen ion source provided in an embodiment of the present invention.

[0076] According to the above content, the multi-peak field negative hydrogen ion source 100 provided by the present invention is suitable for generating and extracting high-purity negative hydrogen ions. For ease of understanding, it can be considered that the unique design of the filter magnet 11 cleverly divides the discharge chamber 9 and the extraction component 2 into three functional areas, namely the high temperature area a, the filtering area b and the low temperature area c, so as to achieve efficient generation, filtering and extraction of ions.

[0077] refer to Figure 4 , is a schematic flow chart of a method for regulating a multi-peak field negative hydrogen ion source provided in an embodiment of the present invention.

[0078] During the use of the multi-peak field negative hydrogen ion source, the working gas (hydrogen) is introduced into the discharge chamber 9 at the beginning of the discharge chamber 9, i.e., the high temperature region a. After the voltage source 8 is applied to the ion source filament 6, electrons are released. These electrons collide with the H2 molecules, causing them to oscillate rapidly. In this region, there are low-speed H2 molecules, rapidly oscillating H2 molecules, high-temperature electrons e-, and low-temperature electrons e- (the influence of other particles at this stage is small and can be ignored).

[0079] The filter area is the core part of the multi-peak field negative hydrogen ion source. The filter magnet 11 is connected to the detachable and rotatable annular rotating flange 10 to form a flexible filtering system. The parameters of the filter magnet 11 (such as position, thickness, magnetic field strength, etc.) are optimized to increase the extraction beam density of the negative hydrogen ion source and effectively suppress the accompanying electrons.

[0080] In a specific implementation, the angle of the filter magnet 11 can be easily adjusted by rotating the annular rotating flange 10. This is crucial for finding the optimal hydrogen negative ion beam intensity. The annular rotating flange 10 can be easily disassembled, which is convenient for replacing the size and thickness of the filter magnet 11 and adjusting parameters such as the magnetic field strength. Through repeated experiments, the magnet parameters that maximize the hydrogen negative ion beam intensity can be found. Using annular rotating flanges 10 of different sizes, the position of the filter magnet 11 can be further adjusted to make it farther away from the central area. Although this will cause the magnetic field strength to weaken, it can extend the life of the filter magnet and allow more ions to pass through the filter area. Hydrogen negative ion beams of different intensities can be obtained in this way.

[0081] At the end of the discharge chamber 9, i.e., the low-temperature region, the main particles are low-temperature electrons e- and rapidly oscillating H2 molecules. The two collide in this region to produce the required H- ions. The more H- ions there are, the greater the final beam intensity of negative hydrogen ions.

[0082] The structural innovation of the multi-peak field negative hydrogen ion source of the present invention lies in its flexible filter magnet and detachable annular rotating flange design. This not only makes the parameter adjustment of the filter magnet simple and quick, but also can significantly improve the generation and extraction efficiency of H- ions while ensuring the stable operation of the ion source, thereby enhancing the intensity of the negative hydrogen ion beam.

[0083] In the embodiment of the present invention, the adjustment method of the multi-peak field negative hydrogen ion source can be summarized as follows:

[0084] In step S401, hydrogen is first introduced into the discharge chamber through the air inlet channel, and the voltage source acts on the ion source filament to emit electrons. Further, in step S402, electrons bombard the hydrogen in the discharge chamber to generate high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules. In step S403, the high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules pass through the filtering magnetic field. At this time, in step S404, it is determined whether the filtering effect of the filtering magnet is optimal according to the passing condition of the ion beam. In step S407, if the filtering effect meets the preset requirements at this time, the low-temperature electrons and the high-speed hydrogen molecules form a negative hydrogen ion beam, and the negative hydrogen ion beam is controlled to be drawn out. In step S4 05. If the filtering effect does not meet the preset requirements, execute step S4051, and the annular rotating flange can be rotated in the tangential direction of the discharge chamber assembly to change the position of the filtering magnet, or / and, execute step S4052, adjust the size of the filtering magnet and the magnetic field strength, or / and, execute step S4053, adjust the size of the annular rotating flange to change the distance between the filtering magnet and the central area, step S406, further confirm whether the filtering effect of the filtering magnet is optimal, step S407, if the filtering effect meets the preset requirements at this time, the low-temperature electrons and the high-speed hydrogen molecules form a negative hydrogen ion beam, step S408, control the extraction of the negative hydrogen ion beam.

[0085] From the above, it can be seen that the present invention provides a method for regulating a multi-peak field negative hydrogen ion source, wherein the multi-peak field negative hydrogen ion source comprises a discharge chamber component and a particle extraction component, wherein the discharge chamber component and the particle extraction component are connected via a first insulator; an ion source filament is arranged at one end of the discharge chamber component away from the particle extraction component, wherein the ion source filament is externally connected to a voltage source, and the ion source filament emits electrons under the action of the voltage source, and the electrons are used to bombard the hydrogen in the discharge chamber to generate high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules; an annular rotating flange is arranged at one end of the discharge chamber component close to the particle extraction component, and a filtering magnet is detachably arranged on the inner ring of the annular rotating flange, and the filtering magnet is used to form a filtering magnetic field, and the filtering magnetic field is used to The invention is used to deviate the motion of high-temperature electrons and low-speed hydrogen molecules and filter them out, and to extract low-temperature electrons and high-speed hydrogen molecules; wherein, the annular rotating flange is constructed to allow rotation in the tangential direction of the extended discharge chamber assembly, and the filtering magnet is constructed to allow adjustment of the setting position on the inner ring of the annular rotating flange; the low-temperature electrons and high-speed hydrogen molecules form a negative hydrogen ion beam during the extraction process; the extraction assembly includes an extraction partition and an extraction electrode, the extraction partition and the extraction electrode are connected by a second insulator, a first extraction hole is arranged on the extraction partition, a second extraction hole is arranged on the extraction electrode, and the first extraction hole and the second extraction hole are arranged coaxially; the negative hydrogen ions are extracted from the first extraction hole and the second extraction hole under the action of the extraction electrode. The multi-peak field negative hydrogen ion source proposed in the present invention connects the filtering magnet to the annular rotating flange, and the internal and external modes of the filtering magnet can be flexibly adjusted by adjusting the annular rotating flange. The filtering magnet can also be replaced by replacing the annular rotating flange. When other structures and parameters remain unchanged, the intensity and brightness of the beam extracted by the multi-peak field negative hydrogen ion source are greatly improved, and the filtering magnetic field can be adjusted to a certain extent to study the influence of the filtering magnetic field on the multi-peak field negative hydrogen ion source.

[0086] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The "first", "second" and similar words used in the embodiments of the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0087] Although the spirit and principle of the present invention have been described with reference to several specific embodiments, it should be understood that the present invention is not limited to the disclosed specific embodiments, and the division of various aspects does not mean that the features in these aspects cannot be combined to benefit, and this division is only for the convenience of expression. The present invention is intended to cover various modifications and equivalent arrangements included in the spirit and scope of the attached claims. The scope of the attached claims conforms to the broadest interpretation, thereby including all such modifications and equivalent structures and functions.

Claims

1. A multi-peak field negative hydrogen ion source, characterized in that: It comprises a discharge chamber component (1) and a particle extraction component (2), wherein the discharge chamber component (1) and the particle extraction component (2) are connected via a first insulator (3); An ion source filament (6) is arranged at one end of the discharge chamber component (1) away from the particle extraction component (2); the ion source filament (6) is externally connected to a voltage source (8); the ion source filament (6) emits electrons under the action of the voltage source (8); the electrons are used to bombard hydrogen in the discharge chamber (9) to generate high-temperature electrons, low-temperature electrons, low-speed hydrogen molecules and high-speed hydrogen molecules; An annular rotating flange (10) is provided at one end of the discharge chamber component (1) close to the particle extraction component (2); a filtering magnet (11) is detachably provided on the inner ring of the annular rotating flange (10); the filtering magnet (11) is used to form a filtering magnetic field, the filtering magnetic field is used to deviate the movement of the high-temperature electrons and the low-speed hydrogen molecules so as to filter them out, and to extract the low-temperature electrons and the high-speed hydrogen molecules; wherein the annular rotating flange (10) is configured to allow rotation along the tangential direction of the discharge chamber component (1); the filtering magnet (11) is configured to allow adjustment of the setting position on the inner ring of the annular rotating flange (10); the low-temperature electrons and the high-speed hydrogen molecules form a negative hydrogen ion beam during the extraction process; The extraction component (2) comprises an extraction partition (12) and an extraction electrode (14); the extraction partition (12) and the extraction electrode (14) are connected via a second insulator (13); a first extraction hole (12-1) is provided on the extraction partition (12); a second extraction hole (14-1) is provided on the extraction electrode (14); the first extraction hole (12-1) and the second extraction hole (14-1) are coaxially arranged; the negative hydrogen ions are extracted from the first extraction hole (12-1) and the second extraction hole (14-1) under the action of the extraction electrode (14).

2. The multi-peak field negative hydrogen ion source according to claim 1, characterized in that: Also includes: The sizes of the annular rotating flange (10) and the filtering magnet (11) are adjustable.

3. The multi-peak field negative hydrogen ion source according to claim 2, characterized in that: The discharge chamber assembly (1) further comprises: A cylindrical chamber wall (4), the cylindrical chamber wall (4) comprising an inner chamber wall (4-1), an outer chamber wall (4-2), and a permanent magnet array (4-3) disposed between the inner chamber wall (4-1) and the outer chamber wall (4-2); The permanent magnet array (4-3) is used to form a confining magnetic field, and the confining magnetic field is used to spatially confine the high-temperature electrons, the low-temperature electrons, the low-speed hydrogen molecules and the high-speed hydrogen molecules generated in the discharge chamber (9).

4. The multi-peak field negative hydrogen ion source according to claim 3, characterized in that: The cylindrical chamber wall (4) further comprises: A water circulation inner cavity (4-4), wherein the water circulation inner cavity (4-4) is arranged around the permanent magnet array (4-3) and is used to contain cooling water to cool the permanent magnet array (4-3).

5. The multi-peak field negative hydrogen ion source according to claim 4, characterized in that: The discharge chamber assembly (1) further comprises: A cover plate (5), the cover plate (5) being arranged at one end of the discharge chamber component (1) away from the particle extraction component (2), and the ion source filament (6) being arranged on a side of the cover plate (5) facing the discharge chamber (9).

6. The multi-peak field negative hydrogen ion source according to claim 5, characterized in that: The cover plate (5) is also provided with an air inlet channel (7), and the air inlet channel (7) is used to provide hydrogen to the discharge chamber (9).

7. The multi-peak field negative hydrogen ion source according to claim 6, characterized in that: The filtering magnets (11) are arranged at preset intervals on the inner ring of the annular rotating flange (10), and any two filtering magnets (11) that are symmetrical about the center of the annular rotating flange (10) have opposite polarities.

8. The multi-peak field negative hydrogen ion source according to claim 7, characterized in that: The extraction electrode (14) is used to absorb the high-temperature electrons and the low-speed hydrogen molecules whose motion is deviated, and to accelerate and extract the negative hydrogen ion beam.

9. A method for adjusting a multi-peak field negative hydrogen ion source, characterized in that: Applied to the multi-peak field negative hydrogen ion source as described in any one of claims 1 to 8 above, the method comprises: Adjust the size of the annular rotating flange according to target requirements; or / and, adjusting the position of the annular rotating flange; Or / and, adjusting the position of the filter magnet on the annular rotating flange.

10. The method for adjusting the multi-peak field negative hydrogen ion source according to claim 9, characterized in that: The method of adjusting the position of the annular rotating flange further comprises: The annular rotating flange is rotated in the tangential direction of the discharge chamber component to change the position of the filtering magnet relative to the discharge chamber, thereby adjusting the magnetic field direction of the filtering magnetic field.

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