Preparation method of compact coating on surface of part

Abstract

The invention provides a preparation method of a compact coating on the surface of a part. The preparation method comprises the following steps: providing a spare part base material and coating powder; roughness treatment is conducted on the spare part base material, and the treated spare part base material is obtained; adjusting equipment parameters; and coating powder is used for conducting spraying operation on the treated spare part base metal, and a compact coating is obtained. According to the method, the dense coating is formed by controlling the spraying of the introduced gas and the coating powder on the treated spare part base metal, and the porosity of the powder coating is reduced to 2% or below, so that plasma permeation caused by too large porosity is prevented, the electrifying probability of a vacuum cavity is reduced to the maximum extent, and the service life of the vacuum cavity is prolonged. And the plasma is effectively prevented from etching the inner wall of the cavity and other components.

Description

Technical Field

[0001] The invention relates to the technical field of coating processing, and in particular to a method for preparing a dense coating on the surface of a component. Background Art

[0002] The wafer manufacturing process is to etch the wafer quantitatively and directionally through plasma and etching gas inside the vacuum chamber. During the etching process, the plasma will also etch the inner wall of the actual chamber and other components. At the same time, the internal reaction of the chamber is often electrified. Once the chamber is electrified, high-cost wafers and LCD panels will be scrapped.

[0003] In order to protect the service life of the base material and the vacuum environment, and to prevent the internal cavity from being electrified, the industry currently generally processes plasma-resistant ceramic coatings on the internal parts of the vacuum cavity. However, after plasma spraying using the traditional plasma spraying method, there are many pores on the surface of the ceramic coating that are invisible to the naked eye. Too high a porosity will increase the probability of electrification of the vacuum cavity, and it will not be able to effectively prevent the plasma from etching the inner wall of the cavity and other components. Therefore, too high a porosity cannot meet the needs of special vacuum cavities.

[0004] In order to prevent plasma penetration due to excessive porosity, minimize the probability of power-on in the vacuum chamber, and effectively prevent plasma from etching the inner wall of the chamber and other components, a new coating technology is urgently needed to minimize the porosity of the powder coating and form a dense coating. Summary of the invention

[0005] In view of the shortcomings of the prior art, the present invention aims to provide a method for preparing a dense coating on the surface of a component, by controlling the equipment parameters such as the gas introduced, the spraying of the coating powder on the treated spare part base material, etc., to form a dense coating, and reduce the porosity of the powder coating to a minimum to prevent plasma penetration due to excessive porosity, minimize the probability of power-on of the vacuum chamber, and effectively prevent plasma from etching the inner wall of the chamber and other components.

[0006] The present invention provides a method for preparing a dense coating on the surface of a component, comprising the following steps:

[0007] Provide spare parts base material and coating powder;

[0008] Performing roughness treatment on the spare part base material to obtain the treated spare part base material;

[0009] Adjust equipment parameters;

[0010] The treated spare parts base material is sprayed with coating powder to obtain a dense coating.

[0011] As a further improvement of the present invention, the coating powder comprises Y2O3, the particle size is 20 to 50 μm, and the preparation method comprises: yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing, and packaging processes.

[0012] As a further improvement of the present invention, the roughness treatment of the spare part base material includes cleaning, sandblasting and preheating the spare part base material.

[0013] As a further improvement of the present invention, the cleaning operation includes: cleaning the spare part base material by chemical immersion and physical grinding cleaning.

[0014] As a further improvement of the present invention, the sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.2-0.6 MPa, the particle size is 46-400 mesh, and the surface roughness Ra is 2-8 μm.

[0015] As a further improvement of the present invention, the preheating temperature of the preheating operation is 60-80°C.

[0016] As a further improvement of the present invention, the equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0017] As a further improvement of the present invention, the flow rate of the gas Ar is 35-45NLPM, the flow rate of the gas H2 is 7-10NLPM, the voltage of the spraying operation is 65-80V, the current of the spraying operation is 550-650a, the spraying speed is 5000-8000mm / s, and the spraying distance is 9-16mm.

[0018] As a further improvement of the present invention, the flow rate of the gas Ar is 40NLPM, the flow rate of the gas H2 is 7-9NLPM, the voltage of the spraying operation is 70-75V, the current of the spraying operation is 600A, the spraying speed is 6000-7000mm / s, and the spraying distance is 10-12mm.

[0019] As a further improvement of the present invention, the flow rate of the gas Ar is 40NLPM, the flow rate of the gas H2 is 9NLPM, the voltage of the spraying operation is 75V, the current is 600A, the spraying speed is 7000mm / s, and the spraying distance is 10mm.

[0020] As a further improvement of the present invention, the porosity of the dense coating is below 2%.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] The present invention provides a method for preparing a dense coating on the surface of a component. By controlling equipment parameters such as the gas introduced and the spraying of the coating powder on the treated spare part base material, a dense coating is formed, and the porosity of the powder coating is reduced to below 2% to prevent plasma penetration due to excessive porosity, minimize the probability of power-on of the vacuum cavity, and effectively prevent plasma from etching the inner wall of the cavity and other components. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A flow chart of a method for preparing a dense coating on a component surface disclosed in an embodiment of the present invention;

[0024] Figure 2 This is a microscopic image of the porosity of a dense coating on the surface of a component disclosed in Example 5 of the present invention, obtained by scanning electron microscope. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solution and advantages of the embodiments of the present invention more clear, the present invention will be combined with the attached Figure 1 and attached Figure 2 , a clear and complete description of the technical solutions in the embodiments of the present invention is given. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments, wherein steps S1, S2... in the embodiments described in the present invention do not limit the only execution steps of the present invention; the basic principles of the present invention defined in the description of the present invention can be applied to other implementation schemes, variations, improvements, equivalent schemes, and other technical solutions that do not deviate from the spirit and scope of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0026] According to the research of the present invention, the parameters of the APS plasma spraying equipment during spraying have a significant direct impact on the porosity of the coating, and then affect the porosity of the coating. The coating porosity is affected by the process parameters as follows: with the change of argon flow rate, the coating porosity first decreases and then increases; with the change of hydrogen flow rate, the coating porosity first decreases and then remains almost unchanged; with the change of the spraying distance from the plasma gun head to the product, the coating porosity first decreases and then increases; with the change of spraying speed, the coating porosity gradually decreases.

[0027] Based on the above research, the present invention controls equipment parameters such as argon flow rate, hydrogen flow rate, spraying distance, and spraying speed, and finally calculates the optimal equipment parameters for the coating porosity of 2%, and accordingly provides a method for preparing a dense coating on the surface of a component.

[0028] like Figure 1As shown, the present invention provides a method for preparing a dense coating on the surface of a component, comprising the following steps:

[0029] S1: Provide spare parts base material and coating powder;

[0030] Preferably, the coating powder comprises Y2O3, the particle size is 20 to 50 μm, and the preparation method comprises: yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing, packaging and other processes.

[0031] S2: performing roughness treatment on the spare part base material to obtain the treated spare part base material;

[0032] Preferably, the roughness treatment of the spare part base material includes cleaning, sandblasting and preheating the spare part base material.

[0033] Preferably, the cleaning operation includes: cleaning the spare part base material by chemical immersion and physical grinding cleaning.

[0034] Preferably, the sandblasting particles used in the sandblasting operation are composed of industrial alumina, the sandblasting pressure is 0.2-0.6 MPa, the particle size is 46-400 mesh, and the surface roughness Ra is 2-8 μm.

[0035] Preferably, the preheating temperature of the preheating operation is 60-80°C.

[0036] S3: Adjust equipment parameters;

[0037] Preferably, the equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, the spraying distance, etc.

[0038] Preferably, the flow rate of the gas Ar is 35-45 NLPM, the flow rate of the gas H2 is 7-10 NLPM, the voltage of the spraying operation is 65-80 V, the current of the spraying operation is 550-650 A, the spraying speed is 5000-8000 mm / s, and the spraying distance is 9-16 mm.

[0039] Preferably, the flow rate of the gas Ar is 40NLPM, the flow rate of the gas H2 is 7-9NLPM, the voltage of the spraying operation is 70-75V, the current of the spraying operation is 600A, the spraying speed is 6000-7000mm / s, and the spraying distance is 10-12mm.

[0040] Preferably, the flow rate of the Ar gas is 40 NLPM, the flow rate of the H2 gas is 9 NLPM, the voltage of the spraying operation is 75 V, the current is 600 A, the spraying speed is 7000 mm / s, and the spraying distance is 10 mm.

[0041] S4: Use coating powder to spray the treated spare parts base material to obtain a dense coating.

[0042] Preferably, the porosity of the dense coating is below 2%.

[0043] The following is specifically described by examples:

[0044] Example 1

[0045] S1: Provide aluminum sheets and coating powder;

[0046] The coating powder comprises Y2O3, the particle size is 40 μm, and the preparation method comprises the steps of yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal treatment, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

[0047] S2: performing roughness treatment on the aluminum sheet to obtain a treated aluminum sheet;

[0048] The roughness treatment of the aluminum sheet includes cleaning, sandblasting and preheating the aluminum sheet.

[0049] The cleaning operation includes: cleaning the aluminum sheet by grinding and high-pressure cleaning.

[0050] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.6 MPa, the particle size is 80 mesh, and the surface roughness Ra is 5 to 7 μm.

[0051] Wherein, the preheating temperature of the preheating operation is 60°C.

[0052] S3: Adjust equipment parameters;

[0053] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0054] Wherein, the flow rate of the gas Ar is 40NLPM, and the flow rate of the gas H2 is 9NLPM.

[0055] The voltage of the spraying operation is 75V, the current is 600A, the spraying speed is 7000mm / s, and the spraying distance is 12mm.

[0056] S4: spraying the treated aluminum sheet with coating powder to obtain a dense coating.

[0057] Example 2

[0058] S1: Provide aluminum sheets and coating powder;

[0059] The coating powder comprises Y2O3, the particle size is 40 μm, and the preparation method comprises the steps of yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal treatment, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

[0060] S2: performing roughness treatment on the aluminum sheet to obtain a treated aluminum sheet;

[0061] The roughness treatment of the aluminum sheet includes cleaning, sandblasting and preheating the aluminum sheet.

[0062] The cleaning operation includes: cleaning the aluminum sheet by grinding and high-pressure cleaning.

[0063] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.6 MPa, the particle size is 60 mesh, and the surface roughness Ra is 6 to 8 μm.

[0064] Wherein, the preheating temperature of the preheating operation is 60°C.

[0065] S3: Adjust equipment parameters;

[0066] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0067] Wherein, the flow rate of the gas Ar is 40NLPM, and the flow rate of the gas H2 is 9NLPM.

[0068] The voltage of the spraying operation is 70V, the current is 600A, the spraying speed is 7000mm / s, and the spraying distance is 12mm.

[0069] S4: spraying the treated aluminum sheet with coating powder to obtain a dense coating.

[0070] Example 3

[0071] S1: Provide aluminum sheets and coating powder;

[0072] The coating powder comprises Y2O3, the particle size is 40 μm, and the preparation method comprises the steps of yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal treatment, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

[0073] S2: performing roughness treatment on the aluminum sheet to obtain a treated aluminum sheet;

[0074] The roughness treatment of the aluminum sheet includes cleaning, sandblasting and preheating the aluminum sheet.

[0075] The cleaning operation includes: cleaning the aluminum sheet by grinding and high-pressure cleaning.

[0076] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.6 MPa, the particle size is 80 mesh, and the surface roughness Ra is 5 to 7 μm.

[0077] Wherein, the preheating temperature of the preheating operation is 80°C.

[0078] S3: Adjust equipment parameters;

[0079] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0080] Wherein, the flow rate of the gas Ar is 40NLPM, and the flow rate of the gas H2 is 9NLPM.

[0081] The voltage of the spraying operation is 70V, the current is 600A, the spraying speed is 6000mm / s, and the spraying distance is 11mm.

[0082] S4: spraying the treated aluminum sheet with coating powder to obtain a dense coating.

[0083] Example 4

[0084] S1: Provide aluminum sheets and coating powder;

[0085] The coating powder comprises Y2O3, the particle size is 40 μm, and the preparation method comprises the steps of yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal treatment, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

[0086] S2: performing roughness treatment on the aluminum sheet to obtain a treated aluminum sheet;

[0087] The roughness treatment of the aluminum sheet includes cleaning, sandblasting and preheating the aluminum sheet.

[0088] The cleaning operation includes: cleaning the aluminum sheet by grinding and high-pressure cleaning.

[0089] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.6 MPa, the particle size is 80 mesh, and the surface roughness Ra is 5 to 7 μm.

[0090] Wherein, the preheating temperature of the preheating operation is 80°C.

[0091] S3: Adjust equipment parameters;

[0092] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0093] Wherein, the flow rate of the gas Ar is 40NLPM, and the flow rate of the gas H2 is 7NLPM.

[0094] The voltage of the spraying operation is 75V, the current is 600A, the spraying speed is 6000mm / s, and the spraying distance is 10mm.

[0095] S4: spraying the treated aluminum sheet with coating powder to obtain a dense coating.

[0096] Example 5

[0097] S1: Provide aluminum sheets and coating powder;

[0098] The coating powder comprises Y2O3, the particle size is 40 μm, and the preparation method comprises the steps of yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal treatment, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

[0099] S2: performing roughness treatment on the aluminum sheet to obtain a treated aluminum sheet;

[0100] The roughness treatment of the aluminum sheet includes cleaning, sandblasting and preheating the aluminum sheet.

[0101] The cleaning operation includes: cleaning the aluminum sheet by grinding and high-pressure cleaning.

[0102] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.6 MPa, the particle size is 80 mesh, and the surface roughness Ra is 5 to 7 μm.

[0103] Wherein, the preheating temperature of the preheating operation is 80°C.

[0104] S3: Adjust equipment parameters;

[0105] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0106] Wherein, the flow rate of the gas Ar is 40NLPM, and the flow rate of the gas H2 is 9NLPM.

[0107] The voltage of the spraying operation is 75V, the current is 600A, the spraying speed is 7000mm / s, and the spraying distance is 10mm.

[0108] S4: spraying the treated aluminum sheet with coating powder to obtain a dense coating.

[0109] Comparative Example 1

[0110] S1: Provide aluminum sheets and coating powder;

[0111] The coating powder comprises Y2O3, the particle size is 40 μm, and the preparation method comprises the steps of yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal treatment, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

[0112] S2: performing roughness treatment on the aluminum sheet to obtain a treated aluminum sheet;

[0113] The roughness treatment of the aluminum sheet includes cleaning, sandblasting and preheating the aluminum sheet.

[0114] The cleaning operation includes: cleaning the aluminum sheet by grinding and high-pressure cleaning.

[0115] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.4 MPa, the particle size is 80 mesh, and the surface roughness Ra is 3 to 6 μm.

[0116] Wherein, the preheating temperature of the preheating operation is 60°C.

[0117] S3: Adjust equipment parameters;

[0118] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0119] Wherein, the flow rate of the gas Ar is 40NLPM, and the flow rate of the gas H2 is 7NLPM.

[0120] The voltage of the spraying operation is 75V, the current is 600A, the spraying speed is 7000mm / s, and the spraying distance is 18mm.

[0121] S4: spraying the treated aluminum sheet with coating powder to obtain a coating.

[0122] Comparative Example 2

[0123] S1: Provide aluminum sheets and coating powder;

[0124] The coating powder comprises Y2O3, the particle size is 40 μm, and the preparation method comprises the steps of yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal treatment, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

[0125] S2: performing roughness treatment on the aluminum sheet to obtain a treated aluminum sheet;

[0126] The roughness treatment of the aluminum sheet includes cleaning, sandblasting and preheating the aluminum sheet.

[0127] The cleaning operation includes: cleaning the aluminum sheet by grinding and high-pressure cleaning.

[0128] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.4 MPa, the particle size is 60 mesh, and the surface roughness Ra is 4 to 7 μm.

[0129] Wherein, the preheating temperature of the preheating operation is 60°C.

[0130] S3: Adjust equipment parameters;

[0131] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0132] Wherein, the flow rate of the gas Ar is 40NLPM, and the flow rate of the gas H2 is 8NLPM.

[0133] The voltage of the spraying operation is 70V, the current is 600A, the spraying speed is 7000mm / s, and the spraying distance is 18mm.

[0134] S4: spraying the treated aluminum sheet with coating powder to obtain a coating.

[0135] Comparative Example 3

[0136] S1: Provide aluminum sheets and coating powder;

[0137] The coating powder comprises Y2O3, the particle size is 40 μm, and the preparation method comprises the steps of yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal treatment, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

[0138] S2: performing roughness treatment on the aluminum sheet to obtain a treated aluminum sheet;

[0139] The roughness treatment of the aluminum sheet includes cleaning, sandblasting and preheating the aluminum sheet.

[0140] The cleaning operation includes: cleaning the aluminum sheet by grinding and high-pressure cleaning.

[0141] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.6 MPa, the particle size is 80 mesh, and the surface roughness Ra is 5 to 7 μm.

[0142] Wherein, the preheating temperature of the preheating operation is 60°C.

[0143] S3: Adjust equipment parameters;

[0144] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0145] Wherein, the flow rate of the gas Ar is 40NLPM, and the flow rate of the gas H2 is 7NLPM.

[0146] The voltage of the spraying operation is 70V, the current is 600A, the spraying speed is 6000mm / s, and the spraying distance is 18mm.

[0147] S4: spraying the treated aluminum sheet with coating powder to obtain a coating.

[0148] Comparative Example 4

[0149] S1: Provide aluminum sheets and coating powder;

[0150] The coating powder comprises Y2O3, the particle size is 40 μm, and the preparation method comprises the steps of yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal treatment, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

[0151] S2: performing roughness treatment on the aluminum sheet to obtain a treated aluminum sheet;

[0152] The roughness treatment of the aluminum sheet includes cleaning, sandblasting and preheating the aluminum sheet.

[0153] The cleaning operation includes: cleaning the aluminum sheet by grinding and high-pressure cleaning.

[0154] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.4 MPa, the particle size is 80 mesh, and the surface roughness Ra is 4 to 5 μm.

[0155] Wherein, the preheating temperature of the preheating operation is 80°C.

[0156] S3: Adjust equipment parameters;

[0157] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0158] Wherein, the flow rate of the gas Ar is 40NLPM, and the flow rate of the gas H2 is 7NLPM.

[0159] The voltage of the spraying operation is 75V, the current is 600A, the spraying speed is 6000mm / s, and the spraying distance is 18mm.

[0160] S4: spraying the treated aluminum sheet with coating powder to obtain a coating.

[0161] Comparative Example 5

[0162] S1: Provide aluminum sheets and coating powder;

[0163] The coating powder comprises Y2O3, the particle size is 40 μm, and the preparation method comprises the steps of yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal treatment, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

[0164] S2: performing roughness treatment on the aluminum sheet to obtain a treated aluminum sheet;

[0165] The roughness treatment of the aluminum sheet includes cleaning, sandblasting and preheating the aluminum sheet.

[0166] The cleaning operation includes: cleaning the aluminum sheet by grinding and high-pressure cleaning.

[0167] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.4 MPa, the particle size is 80 mesh, and the surface roughness Ra is 4 to 6 μm.

[0168] Wherein, the preheating temperature of the preheating operation is 80°C.

[0169] S3: Adjust equipment parameters;

[0170] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0171] Wherein, the flow rate of the gas Ar is 40NLPM, and the flow rate of the gas H2 is 6NLPM.

[0172] The voltage of the spraying operation is 80V, the current is 600A, the spraying speed is 7000mm / s, and the spraying distance is 16mm.

[0173] Comparative Example 6

[0174] S1: Provide aluminum sheets and coating powder;

[0175] The coating powder comprises Y2O3, the particle size is 40 μm, and the preparation method comprises the steps of yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal treatment, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

[0176] S2: performing roughness treatment on the aluminum sheet to obtain a treated aluminum sheet;

[0177] The roughness treatment of the aluminum sheet includes cleaning, sandblasting and preheating the aluminum sheet.

[0178] The cleaning operation includes: cleaning the aluminum sheet by grinding and high-pressure cleaning.

[0179] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.4 MPa, the particle size is 80 mesh, and the surface roughness Ra is 4 to 6 μm.

[0180] Wherein, the preheating temperature of the preheating operation is 80°C.

[0181] S3: Adjust equipment parameters;

[0182] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0183] Wherein, the flow rate of the gas Ar is 40NLPM, and the flow rate of the gas H2 is 6NLPM.

[0184] The voltage of the spraying operation is 80V, the current is 600A, the spraying speed is 7000mm / s, and the spraying distance is 17mm.

[0185] S4: spraying the treated aluminum sheet with coating powder to obtain a dense coating.

[0186] The porosity of the coatings obtained in the above examples and comparative examples was tested, and the test results are shown in Table 1:

[0187] Table 1:

[0188] Example / Comparative Example Porosity (%) Example 1 1.73 Example 2 1.79 Example 3 1.81 Example 4 1.64 Example 5 1.57 Comparative Example 1 4.87 Comparative Example 2 4.56 Comparative Example 3 4.01 Comparative Example 4 4.28 Comparative Example 5 3.82 Comparative Example 6 4.31

[0189] Refer to Table 1 above and Figure 2 , Figure 2 This is a microscopic image of the porosity of a dense coating on the surface of a component disclosed in Example 5 of the present invention, obtained by scanning electron microscope. The gray part in the image is the dense coating part, and the white (Defect) part is the pore part, where the coating is missing. The percentage of this part to the whole is the porosity.

[0190] The spraying distances of Comparative Examples 1-4 are all 18 mm, exceeding 16 mm, and the other parameters are all within the corresponding parameter ranges of the present invention. As can be seen from Table 1, the porosity of Examples 1-5 is significantly reduced compared with Comparative Examples 1-4, and the porosity is controlled below 2%. It can be seen that the preparation method of the dense coating on the surface of the component provided by the present invention can reduce the porosity of the powder coating to below 2% by controlling the spraying distance parameter within the parameter range disclosed in the present invention.

[0191] The flow rate of gas H2 in comparative example 5 is 6NLPM, which is lower than 7NLPM, and the other parameters are within the corresponding parameter range of the present invention. As can be seen from Table 1, the porosity of Examples 1-5 is significantly reduced compared with that of comparative example 5, and the porosity is controlled below 2%. It can be seen that the method for preparing a dense coating on the surface of a component provided by the present invention can reduce the porosity of the powder coating to below 2% by controlling the flow rate parameter of gas H2 within the parameter range disclosed in the present invention.

[0192] The spraying distance of Comparative Example 6 is 17 mm, which is more than 16 mm, the flow rate of gas H2 is 6 NLPM, which is less than 7 NLPM, and the other parameters are within the corresponding parameter range of the present invention. As can be seen from Table 1, the porosity of Examples 1-5 is significantly reduced compared with Comparative Example 6, and the porosity is controlled below 2%. It can be seen that the preparation method of the dense coating on the surface of the component provided by the present invention can reduce the porosity of the powder coating to below 2% by simultaneously controlling the spraying distance and the flow rate parameters of gas H2 within the parameter range disclosed in the present invention.

[0193] The present invention provides a method for preparing a dense coating on the surface of a component. The dense coating is formed by controlling equipment parameters such as the gas introduced and the spraying of the coating powder on the treated spare part base material, and the porosity of the powder coating is reduced to below 2% to prevent plasma penetration due to excessive porosity, minimize the probability of power-on of the vacuum chamber, and effectively prevent plasma from etching the inner wall of the chamber and other components.

Claims

1. A method for preparing a dense coating on the surface of a component, characterized in that: The following steps are involved: Provide spare parts base material and coating powder; Performing roughness treatment on the spare part base material to obtain the treated spare part base material; Adjust equipment parameters; The treated spare parts base material is sprayed with coating powder to obtain a dense coating.

2. The method for preparing a dense coating on a component surface according to claim 1, characterized in that: The coating powder comprises Y2O3, and the particle size is 20 to 50 μm. The preparation method comprises the following steps: yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing, and packaging.

3. The method for preparing a dense coating on a component surface according to claim 1, characterized in that: The roughness treatment of the spare part base material includes cleaning, sandblasting and preheating the spare part base material.

4. The method for preparing a dense coating on a component surface according to claim 3, characterized in that: The cleaning operation includes: cleaning the spare part base material by chemical immersion and physical grinding cleaning.

5. The method for preparing a dense coating on a component surface according to claim 3, characterized in that: The sandblasting particles used in the sandblasting operation are industrial aluminum oxide, the sandblasting pressure is 0.2-0.6 MPa, the particle size is 46-400 meshes, and the surface roughness Ra is 2-8 μm.

6. The method for preparing a dense coating on a component surface according to claim 3, characterized in that: The preheating temperature of the preheating operation is 60-80°C.

7. The method for preparing a dense coating on a component surface according to claim 1, characterized in that: The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

8. The method for preparing a dense coating on a component surface according to claim 7, characterized in that: The flow rate of the Ar gas is 35-45 NLPM, the flow rate of the H2 gas is 7-10 NLPM, the voltage of the spraying operation is 65-80 V, the current of the spraying operation is 550-650 A, the spraying speed is 5000-8000 mm / s, and the spraying distance is 9-16 mm.

9. The method for preparing a dense coating on a component surface according to claim 7, characterized in that: The flow rate of the Ar gas is 40NLPM, the flow rate of the H2 gas is 7-9NLPM, the voltage of the spraying operation is 70-75V, the current of the spraying operation is 600A, the spraying speed is 6000-7000mm / s, and the spraying distance is 10-12mm.

10. The method for preparing a dense coating on a component surface according to claim 7, characterized in that: The flow rate of the Ar gas is 40 NLPM, the flow rate of the H2 gas is 9 NLPM, the voltage of the spraying operation is 75 V, the current is 600 A, the spraying speed is 7000 mm / s, and the spraying distance is 10 mm.

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