Composite waterproof membrane manufacturing equipment and use method

Abstract

The invention discloses composite waterproof membrane manufacturing equipment and a using method. The composite waterproof membrane manufacturing equipment comprises a carrier gas pipeline, a tail gas pipeline, an ALD / CVD pipeline, a Parylene pipeline, a sample table and a heating device, and the carrier gas pipeline, the tail gas pipeline, the ALD / CVD pipeline and the Parylene pipeline are arranged in order to form a gas path unit. An open type coating chamber is arranged between the sample table and the gas circuit unit, and a sample can pass through the open type coating chamber repeatedly. The Parylene coating ALD / CVD coating process is combined, so that the technical problem of preparation of the ALD and Parylene composite waterproof coating is solved, the waterproof effect and coating efficiency of the coating are improved, and the high time consumption of cavity replacement and the high cost of temperature rise and fall in the traditional preparation process are avoided.

Description

Technical Field

[0001] The invention relates to the field of film coating, and is a composite waterproof film manufacturing device and a use method. Background Art

[0002] Parylene coating is a transparent film that can form a uniform protective layer on the surface of objects of various complex shapes. The working principle of Parylene coating: Parylene raw materials (usually in dimer form) are pyrolyzed at a high temperature of 600-700°C and cracked into reactive monomer molecules. The gaseous monomer molecules produced by pyrolysis are transmitted to the deposition chamber through a vacuum pipe. In the deposition chamber, the gaseous monomer molecules are deposited on the surface of the target object at room temperature and undergo polymerization during the deposition process to form a thin film coating. During the deposition process, the gaseous monomer molecules are polymerized into solid Parylene polymers through chemical reactions. Thus, a uniform, non-porous coating is formed. This 0.1-100 micron thin film coating prepared by room temperature deposition has uniform thickness, is dense and pinhole-free, transparent and stress-free, has excellent electrical insulation and protection, and is an effective moisture-proof, mildew-proof, anti-corrosion, and salt spray-proof coating material.

[0003] Atomic layer deposition (ALD) is a technology that precisely controls the deposition of thin films and can achieve the growth of thin films at the atomic layer level. Its principle is based on chemical vapor deposition (CVD) technology, but it uses a step-by-step reaction so that only one atomic layer is grown each time.

[0004] Due to the different deposition temperatures of Parylene and ALD processes, when preparing a waterproof coating that is alternately superimposed of the two, the traditional coating process requires switching back and forth between the Parylene vacuum vapor deposition equipment and the ALD deposition equipment to complete the preparation of the thin film coating. This method is not only inefficient, but also significantly increases the time and economic costs of the preparation process. Summary of the invention

[0005] Based on the above problems in the prior art, the present invention provides a composite waterproof membrane manufacturing device and a method of use. By combining the Parylene coating ALD / CVD coating process, the technical problems of preparing the ALD and Parylene composite waterproof coating are solved, the waterproof effect and coating efficiency of the coating are improved, and the high time consumption of changing the cavity and the high cost of temperature rise and fall in the traditional preparation process are avoided.

[0006] The technical solution adopted by the present invention is: A composite waterproof membrane manufacturing device and a use method, comprising a carrier gas pipeline, an exhaust gas pipeline, an ALD / CVD pipeline, a Parylene pipeline, a sample table, and a heating device, wherein the carrier gas pipeline, the exhaust gas pipeline, the ALD / CVD pipeline, and the Parylene pipeline are arranged in order to form a group of gas circuit units.

[0007] Furthermore, the carrier gas pipeline in the present invention is introduced with an inert gas, including but not limited to one of nitrogen and oxygen.

[0008] Furthermore, the precursor mode introduced into the ALD / CVD pipeline includes but is not limited to one of CVD, ALD, and PEALD.

[0009] Furthermore, a group of gas line units can set the number and position of carrier gas pipelines, tail gas pipelines, ALD / CVD pipelines, and Parylene pipelines according to requirements.

[0010] Furthermore, an open coating chamber is located between the sample stage and the gas path unit.

[0011] Furthermore, the sample passes through the open coating chamber repeatedly.

[0012] Furthermore, the samples were coated with films through ALD / CVD pipelines and Parylene pipelines.

[0013] The present invention achieves the following technical effects: The present invention is a composite waterproof membrane manufacturing device and a method for using the same. The sample is transferred on the sample stage and passes through the Parylene pipeline and the ALD / CVD pipeline in sequence. When passing through the Parylene pipeline, a Parylene film is plated, and when passing through the ALD / CVD pipeline, a metal oxide, such as aluminum oxide, is plated. After the sample is repeatedly passed, a film of Parylene film-oxide-Parylene film-oxide is formed on the surface.

[0014] The oxide film grown by ALD / CVD has excellent flexibility and water barrier properties, but it is easy to produce particles in an open chamber and cannot form a uniform film; Parylene has a high coating rate, can easily achieve micron-level coating, and has certain waterproof properties. The composite film layer synthesized by this invention is a layer of Parylene film and a layer of oxide particles superimposed to form a film with excellent waterproof properties and suitable for flexible materials.

[0015] By adding the ALD deposition process on the basis of the Parylene vacuum vapor deposition process, the repeated laminated waterproof coating of ALD coating plus Parylene can be prepared. Compared with the single Parylene thin film coating, the waterproof effect of the coating can be greatly improved, and the coating efficiency can be greatly improved compared with the ALD / CVD coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a set of gas path unit diagrams in the present invention.

[0017] Figure 2 It is a cross-sectional view of the composite membrane layer of the present invention.

[0018] In the figure: 1. carrier gas pipeline; 2. exhaust gas pipeline; 3. ALD / CVD pipeline; 4. Parylene pipeline; 5. sample; 6. sample stage; 7. heating device; 8. metal oxide particles; 9. Parylene film. DETAILED DESCRIPTION

[0019] The technical solution of the present invention is further described below in conjunction with the accompanying drawings.

[0020] An embodiment of a composite waterproof membrane manufacturing device provided by the present invention is as follows Figure 1 As shown, it includes 1 carrier gas pipeline, 2 tail gas pipeline, 3 ALD / CVD pipeline, 4 Parylene pipeline, 5 sample, 6 sample stage, 7 heating device. The carrier gas pipeline, tail gas pipeline, ALD / CVD pipeline, and Parylene pipeline are arranged in order to form a group of gas circuit units, and the arrangement order is set as needed. Figure 1 The case shows: carrier gas pipeline-exhaust gas pipeline-ALD / CVD pipeline-exhaust gas pipeline-Parylene pipeline-exhaust gas pipeline-carrier gas pipeline. There is an open coating chamber between the sample stage and the gas line unit. A sample passes through the chamber, and the sample is coated with a composite film layer composed of a layer of ALD / CVD film and a layer of Parylene film through a set of gas line units.

[0021] The principle of the invention is: the sample is transported on the sample stage, passing through the Parylene pipeline and the ALD / CVD pipeline in turn. When passing through the Parylene pipeline, the pyrolyzed gaseous monomer molecules are sprayed on the sample surface. The sample is coated with a layer of Parylene film. When passing through the ALD / CVD pipeline, the ALD scheme or the CVD scheme can be used for coating. Both schemes can coat a layer of metal oxide (such as aluminum oxide) on the basis of Parylene. During the coating process, a carrier gas is introduced into the air inlet, and the reaction byproducts of the Parylene coating and the ALD / CVD coating and the excess precursors are discharged through the exhaust pipeline. After the sample passes repeatedly, a composite film of Parylene film-oxide-Parylene film-oxide is formed on the surface, as shown in the following example. Figure 2 As shown. By adding the ALD deposition process on the basis of the Parylene vacuum vapor deposition process, the repeated lamination waterproof coating of ALD coating plus Parylene can be prepared. Compared with the single Parylene film coating, the waterproof effect of the coating can be greatly improved, and the coating efficiency can be greatly improved compared with the ALD / CVD coating.

[0022] It can be seen from the above embodiments of the present invention that the present invention provides a composite waterproof membrane manufacturing device and a method of use. By combining the Parylene coating ALD / CVD coating process, the technical problems of preparing the ALD and Parylene composite waterproof coating are solved, the waterproof effect and coating efficiency of the coating are improved, and the high time consumption of replacing the cavity and the high cost of temperature rise and fall in the traditional preparation process are avoided. Among them, the carrier gas pipeline 1, the exhaust gas pipeline 2, the ALD / CVD pipeline 3, and the Parylene pipeline 4 are arranged in order to form a gas circuit unit. The sample moves in the open chamber between the gas circuit unit and the sample stage 6 and passes through the ALD / CVD pipeline 3 and the Parylene pipeline 4 successively, thereby forming a thin film of Parylene film-oxide-Parylene film-oxide on the surface. In the above technical concept of the present invention, there is no special restriction on the arrangement method of the gas circuit unit and the number of gas circuits used, and any reasonable adjustment can be made to any structure or feature that can achieve the purpose of the present invention.

[0023] It should be further explained that the above embodiments of the present invention are merely illustrative of the technical concept of the present invention and are used to understand the technical solution of the present invention, and are not intended to limit the scope of protection of the present invention. Any obvious changes made to the embodiments of the present invention that fall within the technical concept of the present invention shall fall within the scope of protection of the present invention.

Claims

1. A composite waterproof membrane manufacturing device and a method of use, characterized in that:

1. A composite waterproof membrane manufacturing device and a method for using the same, characterized in that it comprises a carrier gas pipeline (1), an exhaust gas pipeline (2), an ALD / CVD pipeline (3), a Parylene pipeline (4), a sample stage (6), and a heating device (7), wherein the carrier gas pipeline, the exhaust gas pipeline, the ALD / CVD pipeline, and the Parylene pipeline are orderly arranged into a group of gas circuit units, and the arrangement order is set as required.

2. The carrier gas pipeline according to claim 1, characterized in that: An inert gas is introduced into the carrier gas pipeline, including but not limited to one of nitrogen and oxygen.

3. The ALD / CVD pipeline according to claim 1, characterized in that: The precursor mode introduced into the ALD / CVD pipeline includes but is not limited to one of CVD, ALD, and PEALD.

4. The gas circuit unit according to claim 1, characterized in that: A set of gas line units can set the number and position of carrier gas pipelines, exhaust gas pipelines, ALD / CVD pipelines, and Parylene pipelines according to requirements.

5. The composite waterproof membrane manufacturing equipment according to claim 1 is characterized in that: There is an open coating chamber between the sample stage and the gas path unit, through which the sample can pass repeatedly.

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