Ultrafine defect automatic detection module and method and defect automatic detection system and method

Abstract

The invention provides a module and a method for automatically detecting Pt-derived superfine defects of ultra-thin glass, and a system and a method for automatically detecting poor appearance of ultra-thin glass by using the module. The automatic inspection system for appearance defects comprises: an edge inspection module for inspecting peeling or wedge-shaped defects when physically cutting ultra-thin glass in units of units; the surface inspection module is used for inspecting scratches, cracks or foreign matters on the surface area of the ultra-thin glass; the phase measurement light deflection inspection module is used for measuring and inspecting stains or recesses in the surface area of the ultra-thin glass through phase change; and a Pt-derived ultrafine defect inspection module for inspecting Pt-derived ultrafine defects generated in the production process of the ultra-thin glass mother substrate. The Pt derivative superfine defect inspection module comprises a holographic restoration device; the scanning device is used for moving the holographic restoration device to a preset scanning path; and an ultra-fine defect determination means for determining Pt-derived ultra-fine defects by a machine learning algorithm using the inherent Moore pattern of the image obtained from the holographic restoration means.

Description

Technical Field

[0001] The present invention relates to an automatic detection module and method for Pt-derived ultrafine defects of ultrathin glass and an automatic appearance defect inspection system and method for ultrathin glass using the same. More specifically, the present invention relates to an automatic detection module and method for Pt-derived ultrafine defects of ultrathin glass that can automatically inspect ultrafine Pt foreign matter of 1 μm to 50 μm inside the ultrathin glass that causes surface damage when the ultrathin glass is stretched, and ensures mass producibility so that all ultrathin glasses can be automatically inspected, as well as an automatic appearance defect inspection system and method for ultrathin glass using the same. Background Art

[0002] In recent years, as the demand for smartphones has increased, a new industry of electronic products related to flexible displays has been developed in earnest. In order to manufacture flexible displays, ultrathin glass (Ultrathin Glass; shown as UTG in the drawings) is used.

[0003] Here, ultra-thin glass is tempered glass with a thickness of less than 100 microns, and is very thin, so compared with ordinary glass, it will not break even if it is folded or bent with less impact.

[0004] This ultra-thin glass is not only difficult to manufacture but also has a high defect rate compared to general tempered glass. Therefore, related companies are expanding research on stabilizing the manufacturing process, reducing the defect rate, and cutting labor costs.

[0005] In particular, in order to ensure the quality of ultra-thin glass, an inspection system must be used to inspect the surface condition (for example, whether bubbles, foreign matter, cracks, chipping, etc. have been generated).

[0006] However, even if the above inspection system is passed, Figure 1a As shown, cracks were generated in the ultra-thin glass (in the attached figure, the abbreviation of Ultra Thin Glass is shown as UTG) shipped from the factory. The result of precise analysis of the cause confirmed that the cause of the cracks was that ultra-fine (0μm~50μm↓) Pt (Platinum) foreign matter in the ultra-thin glass caused folding pressure to be applied when the ultra-thin glass was folded or bent, causing the cracks to grow and resulting in surface damage of the ultra-thin glass.

[0007] like Figure 1bAs shown, the ultrafine Pt foreign matter that is not detected in the automatic machine vision system for glass inspection in this prior art can be listed as the following substances, namely, when processing ultra-thin glass mother substrates, Pt (melting point is above 1700°C) with excellent heat resistance and wear resistance is used as the material of the piping that moves the 1600°C high-temperature glass solution to the injection nozzle in the furnace. The inside of the piping is oxidized and grows and precipitates into ultrafine Pt crystals, or oxygen forms needle-shaped bubbles, which will become ultrafine foreign matter.

[0008] Compared with general tempered glass, the manufacturing process of ultra-thin glass is very complicated. Figure 1b As shown, if the glass mother substrate is injection molded, the thickness of the glass mother substrate is checked, and for protection, a UV resin layer and a dummy glass layer are formed by a dispenser, and ten glass mother substrates are rolled. If the resin layer is UV cured, the unit unit is cut and chamfered, and in order to improve the edge defects of the chamfer, the edge is repaired, and UV over-hardening is performed to reduce the adhesion of the resin layer. After immersion and peeling, it is unloaded into a dark box for cleaning, first front surface repair, unloading before strengthening, strengthening, changing the dark box to unload after strengthening, cleaning after strengthening, and second front surface repair. Then, the unit unit is automatically inspected, and then the unit is sampled for folding inspection, and the film is removed and cleaned. Then, a protective film is attached to the upper and lower parts of the unit unit, and the edge inspection is performed again. The bracket is vacuum packaged, the foam packaging is wire-welded, and the box is packaged and shipped. Therefore, it is not only complicated and difficult, but also has a high defect rate. Therefore, research on stabilization of the manufacturing process, reduction of the defect rate, and reduction of labor costs is being expanded.

[0009] In particular, in order to ensure the quality of ultra-thin glass, precise automatic inspection is performed on the surface of ultra-thin glass units for foreign matter scratches, edges, dents and other appearance defects.

[0010] However, current automatic inspections for appearance defects in ultra-thin glass initially developed optical system designs and detection methods with an upper limit of foreign matter detection of 150 μm or more in mind, resulting in the following problem: ultra-thin glass is shipped without detecting ultra-fine foreign matter with a size of 0 μm to 50 μm or less.

[0011] To solve this problem, the upper limit of ultrafine Pt foreign matter detection is intended to be corrected to 1 μm or more. However, due to the limitations of optical system detection, it is still impossible to set conditions for detecting ultrafine Pt foreign matter of 0 μm to 50 μm or less.

[0012] In particular, if one wants to inspect the surface condition of ultra-thin glass (for example, whether bubbles, foreign matter, cracks, chipping, etc. are generated) through the current glass automatic inspection system, in order to prevent the central part from bending and deforming due to its own weight, the frame should be stretched and fixed. However, in this case, wrinkles will be formed on the top, bottom, left and right sides, resulting in a decrease in inspection accuracy or the problem of sliding, detaching or breaking due to the characteristics of the ultra-thin glass material. Summary of the invention

[0013] The present invention is proposed to solve these problems. The purpose of the present invention is to provide an automatic detection module and method for Pt-derived ultrafine defects of ultra-thin glass and an automatic appearance inspection system and method for ultra-thin glass using the same, which can automatically inspect ultra-fine Pt foreign matter of 1μm to 50μm inside the ultra-thin glass that becomes the cause of surface damage when the ultra-thin glass is stretched, and ensure mass production so that all ultra-thin glasses can be automatically inspected.

[0014] An embodiment of one aspect of the present invention relates to an automatic inspection system for appearance defects of ultra-thin glass, characterized in that it includes: an edge inspection module, which inspects chipping or wedge-shaped defects when the ultra-thin glass is physically cut in units using a laser; a surface inspection module, which inspects scratches, cracks or foreign matter in the surface area of ​​the ultra-thin glass; a phase measurement light deflection (PMD) inspection module, which inspects stains or depressions in the surface area of ​​the ultra-thin glass by measuring phase changes; and a Pt-derived ultra-fine defect inspection module, which inspects Pt-derived ultra-fine defects generated during the production process of the mother substrate of the ultra-thin glass, the Pt-derived ultra-fine defect inspection module including: a holographic restoration device; a scanning device, which moves the holographic restoration device to a predetermined scanning path; and an ultra-fine defect judgment device, which judges Pt-derived ultra-fine defects by using a machine learning algorithm of an inherent moiré pattern of an image obtained from the holographic restoration device.

[0015] An embodiment of another aspect of the present invention relates to an automatic detection module for Pt-derived ultrafine defects in ultrathin glass, which is characterized in that it includes: a holographic restoration device; a scanning device, which moves the holographic restoration device to a predetermined scanning path; and an ultrafine defect judgment device, which uses the inherent moiré pattern of the image obtained from the holographic restoration device to judge Pt-derived ultrafine defects, and controls the magnification of the objective lens of the holographic restoration device to a low magnification of 2X, and the scanning device is controlled to have a scanning speed of 2 seconds to 5 seconds and a viewing angle of 10 mm relative to each scan of the ultrathin glass.

[0016] The ultrafine defect judgment device is characterized in that it includes: an image acquisition unit, which acquires a moiré-specific characteristic image of the Pt-derived ultrafine defects of the ultrathin glass and stores it in an image storage device; a Pt-derived ultrafine defect judgment unit, which inputs the captured image acquired from the image acquisition unit into a Pt-derived ultrafine defect judgment model, and judges the presence or absence of the Pt-derived ultrafine defects based on the estimated results output from the Pt-derived ultrafine defect judgment model; and a machine learning unit, which learns the inherent characteristics of the moiré pattern of the Pt-derived ultrafine defects of the ultrathin glass.

[0017] An embodiment of another aspect of the present invention relates to an automatic inspection method for the appearance of ultra-thin glass with poor appearance, which is characterized in that it includes: a surface appearance inspection step of inspecting scratches, foreign matter, punctures and stains on a predetermined surface area of ​​the ultra-thin glass if the ultra-thin glass is loaded into the automatic inspection system for the appearance of ultra-thin glass in unit units from a dark box; a step of performing Pt-derived ultra-fine defect inspection on the ultra-thin glass using a holographic restoration device and a scanning device that moves the holographic restoration device to a predetermined scanning path; a step of performing edge defect detection to detect edge defects using multiple sheets of the ultra-thin glass as units or inspecting surface stains or depressions of the ultra-thin glass by phase change measurement; a bending inspection step of bending or folding multiple sheets of the ultra-thin glass as units for inspection; and a step of cleaning the ultra-thin glass that has passed the surface appearance inspection, the Pt-derived ultra-fine defect inspection, the edge defect inspection, the phase change measurement and the bending inspection, and packaging and shipping it.

[0018] Another aspect of the present invention relates to a method for inspecting ultra-thin glass for Pt-derived ultrafine defects, which may include: a step of feeding the ultra-thin glass into an inspection module; a step of scanning a first line of a dummy portion formed at one end of the ultra-thin glass using a holographic restoration device; a step of determining a unit area that can be photographed by the holographic restoration device at one time, a resolution, depth, speed, and a working cycle time of the holographic restoration device based on a measurement value obtained by scanning the first line of the dummy portion; a step of determining and controlling a predetermined scanning path of a scanning device that moves the holographic restoration device to a predetermined scanning path, an objective lens magnification of the holographic restoration device, and a working cycle time; a step of determining the number of the unit areas for scanning the second line to the Nth line for all areas of the ultra-thin glass according to the predetermined scanning path of the scanning device. Steps; a step of restoring the entire shape of the ultra-thin glass by storing a partial image of the ultra-thin glass that has passed the scanning from the second line to the Nth line in an image sensor; a step of determining a two-dimensional Pt-derived defect-specific moire pattern for the restored three-dimensional glass shape using a depth algorithm; and a step of amplifying the Pt-derived defect-specific moire pattern to identify the core of the Pt foreign matter, wherein the scanning device ensures 10mm recognition at a low magnification of the objective lens 2X, ensures mass production with a working cycle time of 2 seconds to 5 seconds, effectively utilizes the wide depth of the three-dimensional holographic technology, and targets the surface distortion phenomenon of ultra-fine Pt foreign matter defects associated with the surface of the ultra-thin glass, and two-dimensionally images the moire phenomenon, which is a characteristic of the ultra-fine Pt foreign matter defects on the surface of the ultra-thin glass, to detect the phase of the ultra-thin glass surface.

[0019] According to an embodiment of the present invention, an automatic detection module and method for Pt-derived ultrafine defects of ultra-thin glass and an automatic appearance defect inspection system and method for ultra-thin glass using the same, a method for inspecting Pt-derived ultra-fine defects of ultra-thin glass (shown as "Ultrathin Defect Inspection" UDI in the accompanying drawings) is used, thereby eliminating the need to stretch the frame of the ultra-thin glass and then restore it.

[0020] According to an embodiment of the present invention, an automatic detection module and method for Pt-derived ultrafine defects of ultra-thin glass and an automatic appearance defect inspection system and method for ultra-thin glass using the same can utilize a holographic restoration device, a scanning device, and a machine learning algorithm for the moiré-inherent defect pattern of Pt-derived ultra-fine defects to detect Pt-derived ultra-fine defects below 50 μm that were previously unable to be detected due to limitations in the optical design of edge inspection modules, surface inspection modules, and phase measurement light deflection inspection modules, errors in inspection algorithms, etc., and thus were eliminated.

[0021] According to an embodiment of the present invention, the automatic detection module and method for Pt-derived ultrafine defects of ultra-thin glass and the automatic appearance inspection system and method for ultra-thin glass using the same do not require automatic focusing function or optical system limitations, high-brightness lighting, and do not have vibration and data storage problems. They can fully detect Pt-derived ultrafine internal foreign matter in the depth of ultra-thin glass.

[0022] The Pt-derived ultrafine defect automatic detection module and method for ultra-thin glass and the ultra-thin glass appearance defect automatic inspection system and method using the same according to one embodiment of the present invention have the following advantages, namely, if the Pt-derived ultra-fine defect inspection module for ultra-thin glass is used, the moire pattern as an inherent defect characteristic can be identified during the holographic restoration of the Pt-derived ultra-fine defect, and the Pt nucleus can also be identified when the moire pattern is magnified. It is a non-contact measurement method, so there is no need to specially consider vibration, and no separate lighting is required. The wide depth of three-dimensional holographic technology is effectively utilized. For the surface distortion phenomenon associated with the ultra-fine Pt foreign matter defect on the surface of ultra-thin glass, the Moire phenomenon as the ultra-fine Pt foreign matter defect characteristic on the surface of ultra-thin glass is two-dimensionally imaged to perform defect detection on the phase of each surface.

[0023] According to an embodiment of the present invention, an automatic detection module and method for Pt-derived ultrafine defects of ultra-thin glass and an automatic appearance defect inspection system and method for ultra-thin glass using the same can ensure 10mm recognition under objective lens 2X through the Moire phenomenon, which is a defective characteristic of ultra-fine Pt foreign matter, and can also ensure mass production with a working cycle time of 2 to 5 seconds.

[0024] According to an embodiment of the present invention, a Pt-derived ultrafine defect automatic detection module and method for ultra-thin glass, and an ultra-thin glass appearance defect automatic inspection system and method using the same, it can be known that ultra-fine defects derived from or caused by Pt (for example, Pt foreign matter or needle-shaped objects) will form a unique moiré pattern, so oxygen bubble defects and Pt foreign matter defects (for example, crystals and precipitates from refractory materials, etc.) can be distinguished and their sizes can be measured, thereby reducing the problem of false detection by considering the impact on the quality of ultra-thin glass, and eliminating the problem of discarding ultra-thin glass produced through a difficult and complicated process due to false detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1a This is a diagram for explaining the cause of surface breakage when stretching ultra-thin glass in the prior art;

[0026] Figure 1b This is a diagram illustrating the origin of ultrafine Pt foreign matter that causes surface breakage when ultra-thin glass is stretched in the prior art;

[0027] Figure 2 1. It is a diagram showing an automatic inspection system for appearance defects of ultra-thin glass according to an embodiment of the present invention;

[0028] Figure 3a A diagram showing the optical system configuration and features of an edge inspection module, a surface inspection module, and a phase measurement light deflection inspection module of an automatic inspection system for appearance defects of ultra-thin glass according to an embodiment of the present invention;

[0029] Figure 3b 1. It is a diagram showing the optical system structure and features of a Pt-derived ultrafine defect inspection module of an automatic inspection system for appearance defects of ultra-thin glass according to an embodiment of the present invention;

[0030] Figure 4 1 is a diagram showing a detailed configuration diagram of a Pt-derived ultrafine defect inspection module for ultra-thin glass according to an embodiment of the present invention;

[0031] Figure 5 is a flow chart showing an automatic inspection method for the appearance of ultra-thin glass according to an embodiment of the present invention;

[0032] Figure 6 is a flow chart of a method for inspecting Pt-derived ultrafine defects of ultra-thin glass according to an embodiment of the present invention;

[0033] Figures 7a to 8b The figures are respectively for explaining the effects of the automatic inspection system and method for appearance defects of ultra-thin glass according to one embodiment of the present invention in comparison with a comparative example;

[0034] Fig. 9 This is a diagram illustrating the applicability of a Pt-derived ultrafine defect inspection module for ultrathin glass according to an embodiment of the present invention.

[0035] Explanation of symbols:

[0036] 100: edge inspection module; 200: surface inspection module; 300: PMD inspection module; 400: Pt-derived ultrafine foreign matter detection module; 410: holographic restoration device; 419: hybrid objective lens; 420: control device; 430: scanning device; 450: ultrafine defect judgment device; 470: image storage device; 451: image acquisition unit; 453: Pt-derived ultrafine defect judgment unit; 457: machine learning unit. DETAILED DESCRIPTION

[0037] Hereinafter, with reference to the accompanying drawings, a machine vision system and method for automatic detection of ultra-fine defects in ultra-thin glass according to an embodiment of the present invention will be described in detail.

[0038] Hereinafter, the same reference numerals are given to technical elements that perform the same function, and repeated detailed descriptions are omitted to avoid duplication of descriptions.

[0039] In addition, the embodiments described below are exemplified in order to effectively disclose the preferred embodiments of the present invention, and should not be construed as limiting the scope of rights of the present invention.

[0040] Figure 2 1 is a diagram showing an automatic inspection system for appearance defects of ultra-thin glass according to an embodiment of the present invention. Figure 3a A diagram showing the optical system configuration and features of an edge inspection module, a surface inspection module, and a phase measurement light deflection inspection module of an automatic inspection system for appearance defects of ultra-thin glass according to an embodiment of the present invention, Figure 3b This is a diagram showing the optical system configuration and features of a Pt-derived ultrafine defect inspection module of an automatic inspection system for appearance defects of ultra-thin glass according to an embodiment of the present invention.

[0041] An automatic inspection system 1 for appearance defects of ultra-thin glass according to an embodiment of the present invention includes: an edge inspection module 100 for inspecting defects such as chipping or wedges of finely cut chips when the ultra-thin glass is physically cut in units using a laser having a femtosecond or other pulse width; a surface inspection module (Area Measuring Optics) 200 for inspecting scratches, cracks or foreign matter on the surface of the ultra-thin glass; a phase measuring light deflection (PMD: Phase Measuring deflectometry, shown as PMD in the accompanying drawings) inspection module 300 for measuring phase changes to inspect stains or depressions on the surface of the ultra-thin glass; and a Pt-derived ultra-fine defect inspection module 400 for inspecting Pt-derived ultra-fine defects that cannot be measured by the edge inspection module 100, the surface inspection module 200 and the PMD inspection module 300, which are caused by the internal oxidation of the Pt pipe used in the injection molding of the ultra-thin glass mother substrate and grow and precipitate as ultra-fine Pt crystals, or the oxygen generated at this time forms needle-shaped bubbles.

[0042] like Figure 3aAs shown, when the edge inspection module 100 inspects a sheet of ultra-thin glass, it may be broken during the inspection because it is too thin. Therefore, measurement is performed on a plurality of sheets of ultra-thin glass as a unit. In this case, the UVW alignment stage 110 is provided to support the ultra-thin glass unit from the bottom so that the edge of the ultra-thin glass unit is exposed; at least two lightings 130 are configured to illuminate the upper part of the edge of the ultra-thin glass unit; a mirror 150 is provided at the bottom of the edge of the ultra-thin glass unit to reflect light emitted from the at least two lightings 130 and transmitted through the edge of the ultra-thin glass unit; and an optical system 170 is provided at the upper part of the edge of the ultra-thin glass unit and configured to obtain an image of the edge of the ultra-thin glass unit reflected by the mirror 150.

[0043] The edge inspection module 100 should be designed to have a resolution of 2.5 μm by including at least two illuminations 130 and an optical system 170 corresponding to the edge of the ultra-thin glass unit. However, due to the use of the UVW alignment stage 110 , the module is easily affected by vibration.

[0044] The surface inspection module 200 may include lighting such as a strobe light 210 and an analog camera 230 that work together to identify defects (e.g., scratches, foreign matter, bubbles, cracks) on the surface or inside the body of the ultra-thin glass, so that the strobe light 210 can emit light to illuminate a portion of the ultra-thin glass, and the analog camera 230 located on the other side of the ultra-thin glass can take a photo of the illuminated portion of the ultra-thin glass, including a photo analysis unit 250 that analyzes the photo to determine what kind of defects are present in the portion of the ultra-thin glass.

[0045] The strobe light 210 emits light to illuminate a wide area and is therefore excellent in speed. However, the resolution of the analog camera 230 is 18.1 μm, so there is a problem that non-defects such as dust may be judged as defects by the photo analysis unit 250, thereby reducing accuracy.

[0046] In addition, the phase measurement light deflection inspection module 300 may include: a screen 310, which, based on the principle that the texture reflected by the sample is affected by the surface shape, causes a predetermined pattern light to be phase-shifted and output to the ultra-thin glass; a camera 330, which measures the reflected light reflected by the ultra-thin glass; a shape measurement unit 350, which generates surface shape information of the ultra-thin glass based on the measured reflected light; and a surface inspection unit 370, which uses a phase measurement light deflection method to measure the surface shape of the ultra-thin glass.

[0047] The phase measurement light deflection inspection module 300 can form a three-dimensional image with a resolution of 46μm, and has a higher defect detection accuracy than the surface inspection module 200, so that it can detect defects such as stains or dents that are particularly problematic in ultra-thin glass. However, the surface inspection unit 370 has the problem of being unable to inspect Pt-derived ultrafine defects.

[0048] like Figure 3b As shown, an automatic inspection system 1 for appearance defects of ultra-thin glass involved in one embodiment of the present invention is characterized in that it can include a Pt-derived ultra-fine defect inspection module 400 for inspecting Pt-derived ultra-fine defects below 50 μm that cannot be detected based on the optical system or the inspection environment by the edge inspection module 100, the surface inspection module 200 and the phase measurement light deflection inspection module 300.

[0049] The Pt-derived ultrafine defect inspection module 400 of the ultrathin glass appearance defect automatic inspection system 1 according to an embodiment of the present invention utilizes the inherent characteristics of moiré defects that are not easily scattered on the surface and are hardly used in transparent ultrathin glass.

[0050] Generally, the moiré interference method is mostly used for objects whose surfaces do not easily scatter or have opaque material properties.

[0051] The Pt-derived ultrafine defect inspection module 400 may include a holographic restoration device 410, a scanning device 430 that moves the holographic restoration device 410 to a predetermined scanning path, and an ultrafine defect judgment device 450 that uses the inherent moiré pattern of the Pt-derived ultrafine defects appearing in the holographic image restored by the holographic restoration device 410 to judge the Pt-derived ultrafine defects.

[0052] Table 1 shows the results of the duty cycle time (Tact Time) (system logistics time) of the scanning process of the scanning device 430 when the magnification of the hybrid objective lens 419 described below is changed.

[0053] It can be seen that when the scanning device 430 is used at a low magnification of 2X to scan a 10mm area of ​​the folding portion of the ultra-thin glass, one scan takes 2.4 seconds and a 10mm viewing angle FOV can be obtained, thus achieving mass production.

[0054]

Table 1

[0055] Table showing the working cycle time of the scanning process of the scanning device 430

[0056]

[0057] The ultrafine defect judgment device 450 includes an image acquisition unit 451, a Pt-derived ultrafine defect judgment unit 453 and a machine learning unit 457. The image acquisition unit 451 can acquire the Pt-derived ultrafine defect molar inherent characteristic image taken in the ultra-thin glass, and classify and store it in the image storage device 470.

[0058] The Pt-derived ultrafine defect determination unit 453 inputs the captured image acquired from the image acquisition unit 451 to the Pt-derived ultrafine defect determination model 453 a , and determines the presence or absence of defects based on the estimation result output from the Pt-derived ultrafine defect determination model 453 a .

[0059] The Pt-derived ultrafine defect determination model 453 a is a model obtained by learning the intrinsic characteristics of the moiré pattern of the Pt-derived ultrafine defects of the ultrathin glass by the machine learning unit 457 .

[0060] The Pt-derived ultrafine defect judgment model 453a can be constructed by machine learning of the machine learning unit 457 using teaching data that matches the inherent characteristics of the moiré pattern of Pt-derived ultrafine defects in ultrathin glass (for example, interference fringes, distance from the nucleus, periodicity of the unsharpness of the ripple density, etc.) to correct data.

[0061] In addition, for ultrafine defects derived from Pt or caused by Pt (for example, Pt foreign matter or needle-shaped objects), it is known that a unique moiré pattern will be formed. Therefore, the Pt-derived ultrafine defect judgment unit 453 can be constructed by using the machine learning of the machine learning unit 457, which uses the teaching data that matches the Pt-derived ultrafine defect type judgment model 453b such as oxygen bubble defects and Pt foreign matter defects (for example, crystals, precipitates, etc. from refractory materials, etc.) and the size judgment model 453c of oxygen bubble defects and Pt foreign matter defects to correct data based on the unique moiré pattern (for example, interference fringes, distance from the nucleus, periodicity of the unsharpness of the ripple density, etc.).

[0062] like Figure 4 As shown, the holographic restoration device 410 uses a laser 411 that generates light of a single wavelength as a light source, and uses a spectrometer 413 to split the light generated by the laser 411 into two beams of light. At this time, one beam of light (hereinafter referred to as reference light) is directed toward the image sensor 415, and the other beam of light (hereinafter referred to as object light) is reflected by the ultra-thin glass and directed toward the aforementioned image sensor 415, thereby generating interference between the reference light and the object light.

[0063] The image sensor 415 records interference fringes based on the interference phenomenon as a digital image, and the three-dimensional shape restoration unit 417 can restore the three-dimensional shape of the object to be measured from the recorded interference fringes.

[0064] Usually, due to the material properties of ultra-thin glass, scattering is not easily produced on the surface and it is transparent, so the surface inspection device of ultra-thin glass does not use the moiré method. However, the present invention utilizes the point where Pt foreign matter in the ultra-thin glass interferes or diffracts the femtosecond laser beam.

[0065] The holographic restoration device 410 can check the surface of the ultra-thin glass corresponding to the unit area by one measurement. Here, the unit area is formed by a quadrilateral shape, and the size of the unit area can be x mm×y mm. For example, the size of the unit area can be 10±5mm×160mm. However, this is only one embodiment, and the technical idea of ​​the present invention is not limited to this. The unit area can accurately divide the surface of the ultra-thin glass with a certain area relative to the xy plane direction into n×m (n, m are integers). However, since the unit area is equivalent to the performance of the holographic restoration device 410 that can be photographed at one time, the unit area may not correspond to an integer multiple of the area of ​​the holographic restoration device 410.

[0066] As mentioned above, since the holographic restoration device 410 has a unit area that can be photographed at one time, there is a problem that the entire area of ​​the ultra-thin glass cannot be inspected. However, the scanning device 430 can solve this problem in the following way, that is, after the holographic restoration device 410 scans +y mm, it moves x mm along a cross section of the ultra-thin glass, and then moves -y mm again, and moves x mm along the opposite cross section. In this way, the holographic restoration device 410 is moved in a zigzag shape.

[0067] The image obtained by the holographic restoration device 410 may generate noise in the area adjacent to the edge position due to the interference of the laser, so a part of the unit area can be overlapped for scanning, so that the entire surface of the ultra-thin glass can be inspected.

[0068] In the present invention, even if an image is obtained for a unit area, the effective area where three-dimensional shape information can be obtained may be smaller than the unit area. Therefore, the area of ​​this effective area and the area of ​​the ultra-thin glass can be used and noise can be taken into consideration to determine the effective scanning path of the scanning device 430 into a zigzag shape so that they overlap.

[0069] The Pt-derived ultrafine defect inspection module 400 may include a control device 420 that controls the magnification of the hybrid objective lens 419 for the second unit area, the speed of the scanning device 430, and the effective scanning path by linking with virtual sensors 431 and 433 (i.e., measuring speed and resolution related to speed) after photographing the first unit area corresponding to the end of the ultra-thin glass.

[0070] The hybrid objective lens 419 can magnify the portion where the moiré-specific pattern is formed to identify the Pt nucleus.

[0071] Below, refer to Figure 5 and Figure 6 The following describes an automatic inspection method for the appearance of ultra-thin glass according to an embodiment of the present invention and a method for inspecting Pt-derived ultra-fine defects of ultra-thin glass according to an embodiment of the present invention.

[0072] Figure 5 is a flow chart showing an automatic inspection method for the appearance of ultra-thin glass according to an embodiment of the present invention. Figure 6 The present invention is a flowchart of a method for inspecting Pt-derived ultrafine defects in ultra-thin glass according to an embodiment of the present invention.

[0073] like Figure 5 As shown, in an embodiment of the present invention, if the ultra-thin glass is loaded from a dark box into an automatic appearance defect inspection system for ultra-thin glass in unit units, a surface appearance AMO inspection step (S110) is performed on the ultra-thin glass horizontally supplied from the dark box. The inspection step S110 can perform a low-accuracy but fast inspection on a predetermined area of ​​the ultra-thin glass, and inspect scratches, foreign matter, punctures and stains in the predetermined area.

[0074] The method for automatically inspecting the appearance of ultra-thin glass according to an embodiment of the present invention performs Pt-derived ultra-fine defect inspection on the ultra-thin glass using the holographic restoration device 410 and the scanning device 430 ( S120 ).

[0075] For Bin1 that has passed the surface appearance AMO inspection and the Pt-derived ultrafine defect inspection, edge defect detection (S130) is performed in the edge inspection module 100 to detect edge defects such as wedges or peeling in units of multiple ultra-thin glasses, or, in the phase measurement light deflection inspection module 300, phase changes can be measured to inspect stains or depressions on the surface of the ultra-thin glass (S140).

[0076] In the edge defect inspection or the phase measurement light deflection inspection, when there is a wedge, peeling, depression or protrusion, it is put into Bin 2 to perform automatic re-inspection (Auto Review) (S150).

[0077] Since the ultra-thin glass is manufactured through a very rigorous and complicated process, the automatic re-inspection step S150 is to prevent the ultra-thin glass from being discarded, which may be caused by dust or instability of the inspection device.

[0078] When edge defects such as wedges or peeling of the ultra-thin glass unit are detected in the edge inspection module 100, or when scratches, foreign matter, punctures and stains are detected in the PMD inspection, Bin2 is used for automatic re-inspection and the glass is again classified and loaded into Bin1 to Bin3.

[0079] When the ultra-thin glass is unloaded from the ultra-thin glass appearance defect automatic inspection system 1 by unloading (S160), Bin2 is visually inspected to determine whether it is truly defective (S170), and is discarded if it is ultimately defective.

[0080] However, in the case where the defect is caused by external dust or by the optical system of the edge inspection module 100, the surface inspection module 200, the phase measurement light deflection inspection module 300, the Pt-derived ultrafine defect inspection module 400 or other errors during the visual inspection, Bin 1 is placed to perform a folding or bending inspection (shown as AGB in the accompanying drawings) (S180).

[0081] The bending test (S180) is a bending test (bending test) in which the bending area of ​​the ultra-thin glass is repeatedly bent to confirm the peeling phenomenon between the films set in the bending area and whether the film is damaged (cracked) or not, so as to test the mechanical reliability performance of the ultra-thin glass suitable for flexible displays.

[0082] In the folding (bending) test of the ultra-thin glass, if the ultra-thin glass is broken (or cracked), the ultra-thin glass will be discarded. Bin1 that has passed the folding (bending) test and has been cleaned (S190) and packaged (S200) is attached with protective films on the upper and lower parts of the unit and shipped (S210). Bin3 is inspected at the edge again (S220), and vacuum-packed in units of brackets for plastic packaging, followed by wire welding for box packaging and shipment (S210).

[0083] like Figure 6As shown, a method for inspecting Pt-derived ultrafine defects of ultra-thin glass according to an embodiment of the present invention may include: step S101 of feeding the ultra-thin glass into an inspection module; step S102 of having the holographic restoration device 410 scan a first line on a dummy portion formed at one end of the ultra-thin glass; step S103 of determining a unit area that can be photographed by the holographic restoration device 410 at one time and a resolution, depth, speed, and working cycle time of the holographic restoration device 410 based on a measurement value obtained by scanning the first line of the dummy portion; and step S104 of determining a scanning time. The invention further comprises a step S104 of determining a predetermined scanning path of the scanning device 430 and a magnification and a working cycle time of the hybrid objective lens 419 of the holographic restoration device 410; a step S105 of determining the number of effective areas for all areas of the ultra-thin glass according to the predetermined scanning path of the scanning device 430 to scan the second line to the N-th line; a step S106 of storing a partial image of the ultra-thin glass that has passed the scanning from the second line to the N-th line in the image sensor 415; and a step S107 of restoring the shape of all ultra-thin glasses.

[0084] The method may further include detecting a Pt-derived defect-specific moiré pattern using a depth algorithm in the restored three-dimensional glass shape ( S108 ) and a step of amplifying the Pt-derived defect-specific moiré pattern to identify high-resolution Pt foreign matter ( S109 ).

[0085] Below, refer to Figures 7a to 8b , compared with a comparative example, to illustrate the significant effects of an automatic inspection system and method for appearance defects of ultra-thin glass involved in one embodiment of the present invention.

[0086] like Figure 7a As shown, in the prior art, ultra-thin glass is loaded into an automatic appearance defect inspection system for ultra-thin glass, and a surface inspection module 200 is used to inspect cracks and the like. In order to inspect the surface state of the ultra-thin glass (for example, whether bubbles, foreign matter, cracks, chipping, etc. are generated) using an edge inspection module 100 and a phase measurement light deflection inspection module 300 and to prevent the central portion from bending and deforming due to its own weight, the frame needs to be stretched and fixed. However, in this case, wrinkles will be generated on the top, bottom, left, and right sides, thereby causing a decrease in inspection accuracy or the ultra-thin glass may slide, detach, or break due to material properties. However, by using a method for inspecting Pt-derived ultrafine defects of ultra-thin glass according to an embodiment of the present invention (shown as "Ultrathin Defect Inspection" (UDI) in the accompanying drawings), there is no need to stretch the frame of the ultra-thin glass and then restore it.

[0087] Figure 7b to Figure 8bEach of the figures is a diagram for explaining the effects of the automatic inspection system and method for appearance defects of ultra-thin glass according to an embodiment of the present invention, in comparison with a comparative example.

[0088] like Figure 7b As shown, Comparative Example 1 shows an image of Pt-derived foreign matter taken by the surface inspection module 200, and Comparative Example 2 shows an image of Pt-derived foreign matter taken using an optical microscope.

[0089] Table 2 shows the results of verifying the Pt foreign matter detection capability of the surface inspection module 200.

[0090]

Table 2

[0091] Pt foreign body detection capability of surface inspection module 200

[0092] Surface Inspection Module_ID Bad Type Verify quantity Number of tests Detection rate SVI#3 Pt 11 0 0％

[0093] As shown in Table 2, when the resolution of the surface inspection module 200 is 18 μm, Figure 7b As shown in the left image of , the number of detections is 0 and the detection rate is 0%, but as Figure 7b As shown on the right side of , the number of Pt foreign matter verified by microscopy is 11. Figure 7c The results of the first and second evaluations showing the detection capability of the conventional surface inspection module SVI with respect to the size of Pt-derived foreign matter on ultra-thin glass verified by a microscope.

[0094] When the Pt size is x:3.38, y:11.03 (unit (μm)), it was not detected the first time and was tested as a candidate for the second time; when the Pt size is x:3.60, y:2.33 (unit (μm)), it was not detected the first time and was not detected the second time; when the Pt size is x:2.98, y:7.88 (unit (μm)), it was not detected the first time and was tested as a candidate for the second time; when the Pt size is x:4.50, y:4.50, it was not detected the first time and was tested as a candidate for the second time; when the Pt size is x:4.28, y:4.50, it was not detected the first time and was not detected the second time. It can be seen that when the Pt size is below 50μm, Pt-derived ultrafine defects can be detected, but it is also possible that the product is shipped without detecting Pt-derived ultrafine defects.

[0095] Refer again Figure 7b It can be seen that the size that can be detected by the surface inspection module 200 is 54 μm, but Figure 7c It can be seen that, depending on the inspection environment, most defects flow out without being detected.

[0096] As described above, since the initial upper limit of the Pt foreign matter of the surface inspection module 200 is set to 150 μm or more for optical detection and reflection of the detection algorithm, there is a high possibility that most of the ultra-fine Pt foreign matter may not be detected and flow out.

[0097] In recent years, the upper limit of the Pt foreign matter detection of the surface inspection module 200 has been revised to more than 1 μm. However, for ultrafine Pt, due to the limitation of the detection conditions set by the optical system detection, it can be seen that the ultrafine Pt is all outflowed. Figure 8a As shown, according to the Pt-derived ultrafine defect inspection module for ultra-thin glass involved in one embodiment of the present invention, the pixel resolution of the holographic restoration device 410 varies with different lenses, but when it is set to 1, the resolution of the surface inspection module 200 is 18.1, and when the two-dimensional microscope is set to 0.225, it can be seen from the observation of Pt recognition of several microns that the surface inspection module 200 cannot recognize Pt.

[0098] The surface inspection module 200 uses a mixed shooting method of surface area illumination and line scanning, a two-dimensional microscope method uses a line scanning method, and a holographic restoration method uses a mixed holographic restoration method and line scanning method.

[0099] The surface inspection module 200 cannot identify Pt foreign matter, and also requires a separate granite table to prevent vibration. The detection power of internal foreign matter is reduced for the depth of ultra-thin glass, and a large amount of lighting is required.

[0100] In contrast, when using a two-dimensional microscope, anti-vibration components must be used. To detect Pt foreign matter inside the ultra-thin glass, the autofocus function is limited or its optical system is limited, high-brightness lighting is required, and there are problems with vibration and poor data storage.

[0101] When using a two-dimensional microscope, there is a trade-off between depth and resolution, and the problem of blurred focus (defocus) will occur when trying to ensure a wide viewing angle. This is a problem in microscopic optical inspection that cannot confirm clear information on adverse phenomena caused by ultra-fine Pt foreign matter inside ultra-thin glass.

[0102] In comparison, if the Pt-derived ultrafine defect inspection module 400 for ultra-thin glass involved in an embodiment of the present invention is used, when performing holographic restoration of Pt-derived ultrafine defects, a moiré pattern as an inherent defective characteristic can be identified, and even the Pt nucleus can be identified when the moiré pattern is magnified.

[0103] The Pt-derived ultrafine defect inspection module 400 for ultra-thin glass according to an embodiment of the present invention does not use a direct measurement method like a two-dimensional microscope, but uses a non-contact measurement method, so there is no need to consider vibration too much, and has the advantage of not requiring separate lighting.

[0104] In particular, the Pt-derived ultrafine defect inspection module 400 for ultra-thin glass involved in one embodiment of the present invention can effectively utilize the wide depth of three-dimensional holographic technology to target the surface distortion phenomenon associated with ultra-fine Pt foreign matter defects on the surface of ultra-thin glass, and can two-dimensionally image the Moire phenomenon, which is a characteristic of ultra-fine Pt foreign matter defects on the surface of ultra-thin glass, to perform defect detection on the phases of each surface.

[0105] like Figure 8b As shown, in fact, if you want to detect a conical flaw of 1 μm in size (real Pt) through an optical system, you must use an objective lens 20X, which consumes a working cycle time of 436.8 seconds, needs to be scanned more than 20 times, and the field of view is about 1 mm, so mass production is reduced. However, an ultra-thin glass Pt-derived ultra-fine defect inspection module 400 involved in an embodiment of the present invention can ensure 10 mm recognition under an objective lens 2X through the Moire phenomenon, which is a defective characteristic of ultra-fine Pt foreign matter, and the working cycle time is also 5.1 seconds, so mass production can be ensured.

[0106] The Pt-derived ultrafine defect inspection module 400 for ultra-thin glass according to one embodiment of the present invention can consider the working cycle time of the holographic restoration device 410 to apply the objective lens 2X or apply the magnification change according to the purpose of use, so it is preferably provided with the hybrid objective lens 419 that can change the objective lens according to the working cycle time and the purpose of use, and the control device 420 is preferably referred to. Figure 6 to control.

[0107] Fig. 9 This is a diagram for explaining the applicability of the Pt-derived ultrafine defect inspection module for ultrathin glass according to an embodiment of the present invention.

[0108] Reference Fig. 9 According to the Pt-derived ultra-fine defect inspection module 400 for ultra-thin glass involved in one embodiment of the present invention, although it is difficult to automatically detect punctures, circular depressions, other depressions, conical punctures, other stains, sticking marks, and scratches, it is known that ultra-fine defects derived from Pt or caused by Pt (for example, Pt foreign matter or needle-shaped objects) will form a unique moiré pattern, so oxygen bubble defects and Pt foreign matter defects (for example, crystals, precipitates, etc. from refractory materials, etc.) can be distinguished.

[0109] If the Pt-derived ultrafine defect inspection module 400 for ultra-thin glass involved in one embodiment of the present invention distinguishes between oxygen bubble defects and foreign matter defects (for example, crystal precipitation from refractory materials, etc.), then since these defects have different effects on the quality of the ultra-thin glass, the allowable size of foam bonding or the allowable size of Pt foreign matter can be modeled through machine learning to make the allowable size of bubble defects and the allowable size of Pt foreign matter defects different based on an algorithm. Even for defects of the same size, the pass or fail criteria can be different depending on the type of defect.

[0110] That is, if the presence or absence of defects is simply checked based on the change in light captured by the camera of the surface inspection module 200 or the phase measurement light deflection module 300, Pt-derived ultrafine defects may flow out, and even allowable bubble defects may be misdetected. However, such misdetection is better than discarding the ultra-thin glass produced through a difficult and complicated process.

Claims

1. An automatic inspection system for appearance defects of ultra-thin glass, comprising: Edge inspection module, which detects peeling or wedge-shaped defects when ultra-thin glass is physically cut by laser in units; A surface inspection module to inspect scratches, cracks or foreign matter on the surface of the ultra-thin glass; A phase measurement light deflection inspection module for inspecting stains or depressions on the surface area of ​​the ultra-thin glass by measuring phase changes; as well as The Pt-derived ultra-fine defect inspection module inspects the Pt-derived ultra-fine defects generated during the production process of the mother substrate of the ultra-thin glass.

2. The automatic inspection system for appearance defects of ultra-thin glass according to claim 1, wherein: The Pt-derived ultrafine defects have a size of 50 μm or less, The Pt-derived ultrafine defect inspection module performs inspection by utilizing the inherent characteristics of the moiré method, which is not easily scattered on the surface and is rarely used in transparent ultra-thin glass.

3. The automatic inspection system for appearance defects of ultra-thin glass according to claim 1, wherein: The Pt-derived ultrafine defect inspection module includes: Holographic restoration device; A scanning device moves the holographic restoration device to a predetermined scanning path; and An ultrafine defect judgment device judges Pt-derived ultrafine defects by using a machine learning algorithm of the inherent moiré pattern of the image obtained from the holographic restoration device.

4. The automatic inspection system for appearance defects of ultra-thin glass according to claim 3, wherein: The holographic restoration device comprises: Lasers; a beam splitter for splitting the light generated by the laser into two lights; an image sensor that records interference fringes associated with interference shapes of a reference light split by the beam splitter and a reflected light reflected by the ultra-thin glass as a digital image; and The three-dimensional shape restoration unit restores the three-dimensional shape of the ultra-thin glass from the recorded interference fringes.

5. The automatic inspection system for appearance defects of ultra-thin glass according to claim 3, wherein: The size of the unit area that can be measured by the holographic restoration device in one measurement is 10±5mm×160mm. After the holographic restoration device scans +y mm once, the scanning device moves it by x mm along a section of the ultra-thin glass, performs another scan of -y mm, and repeatedly moves the holographic restoration device along the sawtooth pattern by x mm along the opposite section of the ultra-thin glass.

6. The automatic inspection system for appearance defects of ultra-thin glass according to claim 5, wherein: The Pt-derived ultrafine defect inspection module includes: a control device, after taking a picture along a first unit area along a cross section of the ultra-thin glass, determines the magnification of the hybrid objective lens for the second unit area, the speed of the scanning device, the effective scanning times and the path, The control device controls the magnification of the hybrid objective lens to be a low magnification of 2X, and when the scanning device scans a 10mm area of ​​the ultra-thin glass, the scanning device controls each scan to have a scanning speed of 2 seconds to 5 seconds and a viewing angle of 10mm. The control device collects the intrinsic moiré pattern and amplifies the intrinsic moiré pattern, thereby identifying Pt in the Pt-derived ultrafine defects.

7. The automatic inspection system for appearance defects of ultra-thin glass according to claim 3, wherein: The ultra-fine defect judgment device comprises: An image acquisition unit, which acquires and photographs a Pt-derived ultrafine defect moiré-specific characteristic image of the ultra-thin glass and stores it in an image storage device; a Pt-derived ultrafine defect determination unit that inputs the captured image acquired from the image acquisition unit into a Pt-derived ultrafine defect determination model, and determines the presence or absence of the Pt-derived ultrafine defect based on an estimated result output from the Pt-derived ultrafine defect determination model; and The machine learning part learns the intrinsic properties of the moiré pattern of Pt-derived ultrafine defects in the ultra-thin glass.

8. The automatic inspection system for appearance defects of ultra-thin glass according to claim 7, wherein: The Pt-derived ultrafine defect determination unit comprises: A Pt-derived ultrafine defect type determination model that determines the types of bubble defects and Pt foreign matter defects as inherent patterns; and The size determination model determines the sizes of the bubble defect and the Pt foreign matter defect as a unique pattern.

9. An automatic detection module for ultra-thin glass Pt-derived ultra-fine defects, comprising: Holographic restoration device; A scanning device, which moves the holographic restoration device to a predetermined scanning path; as well as The ultrafine defect judgment device uses the inherent moiré pattern of the image obtained from the holographic restoration device to judge Pt-derived ultrafine defects.

10. The Pt-derived ultrafine defect automatic detection module for ultra-thin glass according to claim 9, wherein: The holographic restoration device comprises: Lasers; a beam splitter for splitting the light generated by the laser into two lights; an image sensor that records interference fringes associated with interference shapes of a reference light split by the beam splitter and a reflected light reflected by the ultra-thin glass as a digital image; and The three-dimensional shape restoration unit restores the three-dimensional shape of the ultra-thin glass from the recorded interference fringes.

11. The Pt-derived ultrafine defect automatic detection module for ultra-thin glass according to claim 9, wherein: The size of the unit area that can be measured by the holographic restoration device in one measurement is 10±5mm×160mm. After the holographic restoration device scans +y mm once, the scanning device moves it by x mm along a section of the ultra-thin glass, performs another scan of -y mm, and repeatedly moves the holographic restoration device along the sawtooth pattern by x mm along the opposite section of the ultra-thin glass.

12. The Pt-derived ultrafine defect automatic detection module for ultra-thin glass according to claim 11, wherein: The Pt-derived ultrafine defect inspection module includes: a control device, after taking a picture along a first unit area along a cross section of the ultra-thin glass, determines the magnification of the hybrid objective lens for the second unit area, the speed of the scanning device, the effective scanning times and the path, The control device controls the magnification of the hybrid objective lens to be a low magnification of 2X, and when the scanning device scans a 10mm area of ​​the ultra-thin glass, the scanning device controls each scan to have a scanning speed of 2 seconds to 5 seconds and a viewing angle of 10mm. The control device collects the intrinsic moiré pattern and amplifies the intrinsic moiré pattern, thereby identifying Pt in the Pt-derived ultrafine defects.

13. The Pt-derived ultrafine defect automatic detection module for ultra-thin glass according to claim 11, wherein: The ultra-fine defect judgment device comprises: An image acquisition unit, which acquires an image of the Pt-derived ultrafine defect moiré inherent characteristics of the ultra-thin glass and stores it in an image storage device; a Pt-derived ultrafine defect determination unit that inputs the captured image acquired from the image acquisition unit into a Pt-derived ultrafine defect determination model, and determines the presence or absence of the Pt-derived ultrafine defect based on an estimated result output from the Pt-derived ultrafine defect determination model; and The machine learning part learns the intrinsic properties of the moiré pattern of Pt-derived ultrafine defects in the ultra-thin glass.

14. The Pt-derived ultrafine defect automatic detection module for ultra-thin glass according to claim 13, wherein: The Pt-derived ultrafine defect determination unit comprises: A Pt-derived ultrafine defect type determination model that determines the types of bubble defects and Pt foreign matter defects as inherent patterns; and The size determination model determines the sizes of the bubble defect and the Pt foreign matter defect as a unique pattern.

15. An automatic inspection method for appearance defects of ultra-thin glass, comprising: If the ultra-thin glass is loaded into the ultra-thin glass appearance defect automatic inspection system in units from the dark box, a surface appearance inspection step is performed to inspect a predetermined surface area of ​​the ultra-thin glass for scratches, foreign matter, punctures and stains; The step of performing Pt-derived ultrafine defect inspection on the ultra-thin glass by using a holographic restoration device and a scanning device that moves the holographic restoration device to a predetermined scanning path; A step of performing edge defect detection to detect edge defects using a plurality of sheets of the ultra-thin glass as a unit or inspecting surface stains or depressions of the ultra-thin glass by phase change measurement; A bending inspection step of bending or folding a plurality of the ultra-thin glasses as units for inspection; as well as The ultra-thin glass that has passed the surface appearance inspection, the Pt-derived ultra-fine defect inspection, the edge defect detection, the phase change measurement, and the bending inspection is cleaned and packaged for shipment.

16. The method for automatically inspecting the appearance of ultra-thin glass according to claim 15, wherein: The edge defect detection, the surface appearance inspection, and the phase change measurement do not include the stretching and recovery of the ultra-thin glass for detecting the Pt-derived ultra-fine defects.

17. The method for automatically inspecting the appearance of ultra-thin glass according to claim 15, wherein: Automatic re-inspection is performed in the edge defect detection, the surface appearance inspection, and the phase change measurement even in the presence of wedges, peeling, depressions, or protrusions, When the ultra-thin glass is unloaded from the automatic inspection system for appearance defects of ultra-thin glass, a visual inspection is performed.

18. A method for inspecting ultra-thin glass for Pt-derived ultra-fine defects, comprising: Step of feeding the ultra-thin glass into the inspection module; The step of scanning a first line on a dummy portion formed at one end of the ultra-thin glass by using a holographic restoration device; A step of determining a unit area that can be photographed at one time by the holographic restoration device, a resolution, a depth, a speed, and a working cycle time of the holographic restoration device based on a measurement value obtained by first line scanning of the dummy portion; The step of determining and controlling a predetermined scanning path of a scanning device that moves the holographic restoration device to a predetermined scanning path, an objective lens magnification of the holographic restoration device, and a working cycle time; The step of determining the number of the unit areas for all areas of the ultra-thin glass according to a predetermined scanning path of the scanning device to scan the second line to the Nth line; The step of restoring the entire shape of the ultra-thin glass by storing a partial image of the ultra-thin glass that has been scanned from the second line to the Nth line in an image sensor; The step of determining a two-dimensional Pt-derived defect-specific moiré pattern based on the restored three-dimensional glass shape using a deep algorithm; as well as The step of amplifying the characteristic moiré pattern of the Pt derivatization to identify the nuclei of the Pt foreign bodies.

19. The method for inspecting Pt-derived ultrafine defects in ultra-thin glass according to claim 18, wherein: By utilizing the wide depth of three-dimensional holographic technology, the surface distortion phenomenon associated with the ultra-fine Pt foreign matter defect on the ultra-thin glass surface is detected by two-dimensionally imaging the moiré phenomenon, which is a characteristic of the ultra-fine Pt foreign matter defect on the ultra-thin glass surface, to detect the phase of the ultra-thin glass surface.

20. The method for inspecting Pt-derived ultrafine defects in ultra-thin glass according to claim 19, wherein: The scanning device ensures 10mm recognition at a low magnification of the objective lens 2X and ensures mass production with a working cycle time of 2 to 5 seconds. The method for inspecting ultra-thin glass for Pt-derived ultra-fine defects further comprises: The step of obtaining a Pt-derived ultrafine defect mole intrinsic characteristic image of the ultra-thin glass; The step of inputting the acquired captured image into a Pt-derived ultrafine defect determination model, and determining the presence or absence of the Pt-derived ultrafine defect based on an estimation result output from the Pt-derived ultrafine defect determination model; and The steps of machine learning to learn the intrinsic characteristics of the moiré pattern of Pt-derived ultrafine defects in the ultrathin glass, The steps of determining the Pt-derived ultrafine defects include: a step of determining the types of bubble defects and Pt foreign matter defects as moiré-specific patterns; and A step of determining the sizes of the bubble defects and the Pt foreign matter defects among the Pt-derived ultrafine defects as a moiré-specific pattern.

Images