Dual-lens detection device

Abstract

The invention discloses a double-lens detection device which is used for inspecting wafer processing quality. Comprising a low-power lens group which is provided with a plurality of lenses so as to satisfy the condition value that the magnification is greater than or equal to 3.0 and greater than or equal to 1.0; the high-power lens group is provided with a plurality of lenses so as to satisfy the condition value that the magnification is greater than or equal to 15.0 and smaller than or equal to 25.0; the light source module projects an illumination light source to the low-power lens group and the high-power lens group; the light splitting element is positioned on the light path of the illumination light source so as to generate a first light path and a second light path which pass through the low-power lens group and the high-power lens group, and the first light path and the second light path are projected on an object positioned on the same plane; the first / second light-passing module is used for controlling the light inlet quantity of the first light path and the second light path and realizing dark field illumination of the first light path and the second light path; the camera enables the first light path and the second light path to turn through the light splitting element, so that the camera shoots an image of an object; therefore, the low-magnification lens group marks the detection point of the object, and then the device is moved to enable the high-magnification lens group to accurately inspect the detection point of the object, so that small-size and high-precision detection is achieved.

Description

Technical Field

[0001] The present invention relates to a detection device, in particular to a dual-lens detection device which uses a low-power lens group for rough positioning and a high-power lens group for precise detection, and configures internal coaxial light as illumination to realize a small-sized machine and a high-precision optical path system. Background Art

[0002] In the semiconductor manufacturing process, since photolithography technology allows more parts to be loaded into a smaller wafer, the potential defects in the wafer are usually in the sub-micron range. Secondly, semiconductor wafers must be inspected to detect defects, such as surface particles, flaws, undulations or other irregularities. Since such defects will affect the final performance of the semiconductor wafer, it is critical to eliminate or remove defective semiconductor wafers during the semiconductor wafer manufacturing process.

[0003] The use of optical lens magnification to inspect wafer defects has been around for many years, and even the use of dual lenses with high and low magnifications to inspect wafer defects has become mainstream; however, the current dual-lens device is very large and does not use a light-through module to control the amount of light entering, so dark field illumination composed of internal coaxial light cannot be achieved, resulting in serious stray light in the image capture and reduced contrast, which in turn leads to insufficient accuracy in defect inspection. Summary of the invention

[0004] Therefore, the main purpose of the present invention is to provide a dual-lens inspection device with a magnification difference of up to 12 times, and use its low-magnification lens group to inspect a large range and locate the defect position, and then use a high-magnification lens group to perform precise inspection of the position.

[0005] Another object of the present invention is to apply a light-transmitting module in a dual-lens detection device to control the opening and closing of the light path and the type of illumination, and at the same time, to achieve dark field illumination using internal coaxial light through the light-transmitting module, thereby improving the image capture quality.

[0006] Another object of the present invention is to use a beam splitter to achieve a light path turning point, and to make the low-power lens group, high-power lens group and light source module share the light path, thereby realizing a dual-lens detection device with a small volume and high-precision light path system.

[0007] To achieve the above-mentioned purpose, the present invention provides a dual-lens inspection device for inspecting wafer processing quality, comprising: a body, a low-magnification lens group, a high-magnification lens group, a light source module, a spectrometer, a first / second light-transmitting module and a camera; wherein the low-magnification lens group is arranged on one side of the inner edge of the body, and the low-magnification lens group has a plurality of lenses to meet the condition value of 3.0 ≥ magnification ≥ 1.0; the high-magnification lens group is arranged on the inner edge of the body and adjacent to the side of the low-magnification lens group, and the high-magnification lens group has a plurality of lenses to meet the condition value of 25.0 ≥ magnification ≥ 15.0; the light source module is arranged on the outer edge of the body to project an illumination light source onto the low-magnification lens group and the high-magnification lens group; the spectrometer is arranged on the inner edge of the body and located at The optical path of the illumination light source is used to generate a first optical path passing through the low-power lens group and a second optical path passing through the high-power lens group, and the first optical path and the second optical path are projected onto an object located on the same plane; the first light-transmitting module is arranged between the low-power lens group and the beam splitter and is located on the first optical path; the second light-transmitting module is arranged between the high-power lens group and the beam splitter and is located on the second optical path, and the first and second light-transmitting modules are used to control the amount of light entering the first optical path and the second optical path, and thus achieve the dark field illumination effect; the camera is arranged at the outer edge of the body and adjacent to the side of the light source module, and the camera uses the beam splitter to make the first optical path and the second optical path achieve a turning effect, and then captures the image of the object.

[0008] Thus, the low-power lens group will mark the detection point of the object, and then the device will be moved to allow the high-power lens group to accurately inspect the detection point of the object, thereby achieving a small-volume and high-precision detection effect.

[0009] According to the above-mentioned features, the present invention further includes a first reflector, which is disposed between the light splitting element and the camera and is located on the first light path and the second light path.

[0010] According to the above-mentioned features, the present invention also includes a third light-transmitting module, which is arranged between the light source module and the spectroscopic element and located on the light path of the illumination light source, so as to control the amount of light entering the spectroscopic element projected by the illumination light source and thereby achieve its dark field illumination effect.

[0011] According to the above-mentioned features, the low-power lens group in the present invention has 5 lenses, and the first lens, the second lens, the third lens, the fourth lens, and the fifth lens are sequentially from the object side to the image side, and the diopter thereof is positive, negative, positive, negative, and positive respectively; a first light barrier is arranged behind the fifth lens; thereby the magnification of the low-power lens group reaches 1.5, the aperture value is ≥8, and the object-image distance is between 125 and 165 mm; and the high-power lens group has 9 lenses, and the sixth lens, the seventh lens, the eighth lens, the ninth lens, the tenth lens, the eleventh lens, the twelfth lens, the thirteenth lens, and the fourteenth lens are sequentially from the object side to the image side, and the diopter thereof is positive, negative, positive, positive, negative, positive, negative, positive, negative, positive, and negative respectively; a second light barrier is arranged between the eighth lens and the ninth lens; thereby the magnification of the high-power lens group reaches 18, the aperture value is ≥15, and the object-image distance is between 90 and 130 mm.

[0012] According to the above-mentioned features, the present invention further includes a second reflector, which is disposed between the first lens and the second lens and is located on the first optical path.

[0013] According to the aforementioned features, the low-magnification lens assembly in the present invention can be equipped with a ring-shaped light source to provide dark field lighting with different effects.

[0014] With the aforementioned features, the "dual-lens detection device" of the present invention has the following benefits:

[0015] (1) The low-magnification lens group of the present invention has a magnification of 1.5 times, while the high-magnification lens group has a magnification of 18 times. Since the magnification difference of the dual lens group is as high as 12 times, the low-magnification lens group can be used to inspect a large range and locate the defect position, and then the high-magnification lens group can be used to perform a dual lens inspection device for precise inspection of the position, thereby improving the efficiency of wafer inspection.

[0016] (2) The present invention uses the first / second / third light-transmitting modules to control the opening and closing of the light path and the type of illumination. At the same time, the light-transmitting modules are used to achieve dark field illumination using internal coaxial light, thereby improving the image capture quality.

[0017] (3) The present invention uses a beam splitter and a first / second reflector to achieve a light path turning, and enables the low-power lens group, high-power lens group and light source module to share the light path, thereby realizing a small-volume, high-precision light path system detection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a combined stereogram of the dual-lens detection device of the present invention.

[0019] Figure 2 It is a schematic diagram of the optical component configuration of the dual-lens detection device of the present invention.

[0020] Figure 3 Schematic diagram of the optical path of the dual-lens detection device of the present invention.

[0021] Figure 4A A schematic diagram showing a fully enclosed light module.

[0022] Figure 4B A schematic diagram showing the fully open state of the light-transmitting module.

[0023] Figure 4C A schematic diagram showing a light-through module with an irregular opening shape.

[0024] Figure 5 It is a combined stereogram of another embodiment of the dual-lens detection device of the present invention.

[0025] Figure 6 It is a lens structure diagram of the low-power lens group of the present invention.

[0026] Figure 7 It is a lens structure diagram of the high-power lens group in the present invention.

[0027] Description of reference numerals: 10-body; 20-low-power lens group; 30-high-power lens group; 40-light source module; 41-ring light source; 50-spectrometric element; 61-first light-transmitting module; 62-second light-transmitting module; 63-third light-transmitting module; 70-camera; 81-first reflector; 82-second reflector; 100-dual-lens detection device; D1-first optical path; D2-second optical path; L-illumination light source; LG1-first lens; LG2-third Second lens; LG3-third lens; LG4-fourth lens; LG5-fifth lens; LS1-first light barrier; HG1-sixth lens; HG2-seventh lens; HG3-eighth lens; HG4-ninth lens; HG5-tenth lens; HG6-eleventh lens; HG7-twelfth lens; HG8-thirteenth lens; HG9-fourteenth lens; HS2-second light barrier; Im-image; IS-image side; Ob-object; OS-object side. DETAILED DESCRIPTION

[0028] First see Figure 1 to Figure 3As shown, the dual-lens inspection device 100 for inspecting wafer processing quality provided by the present invention comprises: a body 10, a low-power lens group 20, a high-power lens group 30, a light source module 40, a beam splitter 50, a first / second / third light-transmitting module 61 / 62 / 63, and a camera 70; wherein the body 10 is used to accommodate the required optical components; the low-power lens group 20 is arranged on one side of the inner edge of the body 10, and the low-power lens group 20 has five lenses LG-LG5, so as to meet the condition value of 3.0≥magnification≥1.0; the high-power lens group 3 0, disposed at the inner edge of the body 10 and adjacent to the side of the low-power lens group 20, the high-power lens group 30 has 9 lenses HG1-HG9, so as to meet the condition value of 25.0≥magnification≥15.0; the light source module 40, disposed at the outer edge of the body 10, projects an illumination light source L to the low-power lens group 20 and the high-power lens group 30; the beam splitter 50, disposed at the inner edge of the body 10 and located on the optical path of the illumination light source L, to generate a first optical path D1 passing through the low-power lens group 20, and a second optical path D2 passing through the high-power lens group 30, and the first optical path D2 passing through the low-power lens group 20. The optical path D1 and the second optical path D2 are projected onto an object Ob located on the same plane; the first light-transmitting module 61 is disposed between the low-power lens group 20 and the beam splitter 50, and is located on the first optical path D1; the second light-transmitting module 62 is disposed between the high-power lens group 30 and the beam splitter 50, and is located on the second optical path D2, and the first light-transmitting module 61 and the second light-transmitting module 62 are used to control the amount of light entering the first optical path D1 and the second optical path D2, and thus achieve the effect of dark field illumination; the third light-transmitting module 63 is disposed between the light source module 40 and the beam splitter The camera 70 is disposed at the outer edge of the body 10 and adjacent to the side of the light source module 40, and a first reflector 81 is applied, which is disposed between the beam splitter element 50 and the camera 70 and is located on the first light path D1 and the second light path D2, so that the camera 70 can achieve a turning effect of the first light path D1 and the second light path D2 through the beam splitter element 50, thereby capturing the image Im of the object Ob.

[0029] The aforementioned light source module 40 projects a light source L of visible light, which can use R / G / B monochromatic light of LED, or LED white light, but is not limited thereto; further, the light splitting element 50 can use a cubic beam splitter (double prism glued) element, or can be adjusted to a single-chip beam splitter, and there is no limitation as long as the element can achieve the light splitting effect; furthermore, the light-transmitting module used in the present invention includes the aforementioned first light-transmitting module 61, the second light-transmitting module 62 and the third light-transmitting module 63, and its structure is a mask-type light control mechanism; and the purpose of setting the light-transmitting module is to adjust the amount of light entering and change the light distribution pattern, including a fully closed type (such as Figure 4A as shown), fully open (as shown Figure 4B As shown), and special-shaped opening type (such as Figure 4C As shown); therefore, the present invention uses a third light-transmitting module 63 disposed between the light source module 40 and the beam splitter 50 to control the amount of light entering the beam splitter 50 from the illumination light source L; and uses a first light-transmitting module 61 and a second light-transmitting module 62 disposed behind the beam splitter 50 to control the amount of light entering the first light path D1 and the second light path D2; in other words, the provision of the first / second / third light-transmitting modules 61 / 62 / 63 will enable the dual-lens detection device to achieve its dark field illumination effect. Furthermore, another embodiment of the present invention is to install a ring-shaped light source 41 on the inner edge of the lens of the low-magnification lens group 20, such as Figure 5 As shown, dark field lighting with different effects can be further provided.

[0030] The structure of the low-power lens group 20 in the present invention is as follows: Figure 6 As shown, it has 5 lenses, and from the object side Os to the image side Is, they are the first lens LG1, the second lens LG2, the third lens LG3, the fourth lens LG4, and the fifth lens LG5, and their refractive powers are positive, negative, positive, negative, and positive respectively; and includes a first light barrier LS1, which is arranged behind the fifth lens LG5, and a beam splitter 50, which is arranged behind the first light barrier LS1; so that the magnification of the low-power lens group 20 reaches 1.5, the aperture value ≥ 8, and the object-image distance is between 125 and 165 mm; in order to reduce the volume of the device, the present invention also uses a second reflector 82, which is arranged between the first lens LG1 and the second lens LG2 and is located on the first optical path D1, please refer to Figure 3 As shown; the curvature radius (Radius) and thickness (Thickness) and other parameter values ​​of each mirror surface of the low-power lens group 20 of the present invention are recorded in the column of Table 1.

[0031] Table 1

[0032]

[0033]

[0034] The structure of the high-power lens group 30 in the present invention is as follows: Figure 7 As shown, it has 9 lenses, and from the object side Os to the image side Is, the sixth lens HG1, the seventh lens HG2, the eighth lens HG3, the ninth lens HG4, the tenth lens HG5, the eleventh lens HG6, the twelfth lens HG7, the thirteenth lens HG8, and the fourteenth lens HG9, whose refractive powers are positive, negative, positive, positive, negative, positive, negative, positive, negative, positive, and negative, respectively. It also includes a second light barrier HS2 disposed between the eighth lens HG3 and the ninth lens HG4, and a beam splitter 50 disposed behind the fourteenth lens HG9; so that the magnification of the high-power lens group 30 reaches 18, the aperture value ≥ 15, and the object-image distance is between 90 and 130 mm; the parameters of the curvature radius (Radius) and thickness (Thickness) of each mirror surface of the high-power lens group 30 in the present invention are recorded in the column of Table 2.

[0035] Table 2

[0036]

[0037]

[0038] In the present invention, the low-power lens group 20 has a magnification of 1.5 times, and the high-power lens group 30 has a magnification of 18 times; since the magnification difference of the dual lens group is as high as 12 times, the low-power lens group 20 can be used to inspect a large range and locate the defect position, and then the high-power lens group 30 can be used to perform precise inspection of the position to improve the efficiency of wafer inspection. Secondly, the present invention uses the first / second / third light-transmitting module 61 / 62 / 63 to control the opening and closing of the illumination light source L, the first optical path D1 and the second optical path D2, and the type of illumination. At the same time, the first / second / third light-transmitting module 61 / 62 / 63 is used to achieve dark field illumination using internal coaxial light, thereby improving the image acquisition quality. Furthermore, the present invention uses a beam splitter 50 and a first / second reflector 81 / 82 to achieve a light path turning, and makes the low-power lens group 20, the high-power lens group 30 and the light source module 40 share the light path, thereby realizing a small-volume, high-precision light path system detection device.

[0039] The drawings and descriptions provided above are only preferred embodiments of the present invention. Any modifications or equivalent changes made by a person skilled in the art in accordance with the spirit and scope of the present invention should still be included in the scope of the claims of the present invention.

Claims

1. A dual-lens detection device, characterized in that: include: One organism; A low-power lens group is disposed on one side of the inner edge of the body, and the low-power lens group has a plurality of lenses to meet the condition value of 3.0 ≥ magnification ≥ 1.0; a high-power lens group, disposed at the inner edge of the body and adjacent to the side of the low-power lens group, the high-power lens group having a plurality of lenses to meet the condition value of 25.0 ≥ magnification ≥ 15.0; A light source module is disposed at the outer edge of the body to project an illumination light source to the low-power lens group and the high-power lens group; A beam splitter element is disposed at the inner edge of the body and located on the optical path of the illumination light source to generate a first optical path passing through the low-power lens group and a second optical path passing through the high-power lens group, and the first optical path and the second optical path are projected onto an object located on the same plane; A first light-transmitting module is disposed between the low-power lens group and the light-splitting element and is located on the first light path; a second light-transmitting module is disposed between the high-power lens group and the light-splitting element and is located on the second light path, and the first light-transmitting module and the second light-transmitting module are used to control the amount of light entering the first light path and the second light path, thereby achieving the effect of dark field illumination; a camera, disposed at the outer edge of the body and adjacent to the side of the light source module, the camera achieves a turning effect of the first light path and the second light path through the light splitting element, thereby capturing an image of the object; In this way, the low-power lens group will mark the position of the detection point of the object, and then move the device to allow the high-power lens group to accurately inspect the detection point of the object, thereby achieving a small-volume and high-precision detection effect.

2. A dual-lens detection device, characterized in that: include: One organism; A low-power lens group is disposed on one side of the inner edge of the body, and the low-power lens group has a plurality of lenses to meet the condition value of 3.0 ≥ magnification ≥ 1.0; a high-power lens group, disposed at the inner edge of the body and adjacent to the side of the low-power lens group, the high-power lens group having a plurality of lenses to meet the condition value of 25.0 ≥ magnification ≥ 15.0; A light source module is disposed at the outer edge of the body to project an illumination light source to the low-power lens group and the high-power lens group; A beam splitter element is disposed at the inner edge of the body and located on the optical path of the illumination light source to generate a first optical path passing through the low-power lens group and a second optical path passing through the high-power lens group, and the first optical path and the second optical path are projected onto an object located on the same plane; A first light-transmitting module is disposed between the low-power lens group and the light-splitting element and is located on the first optical path; a second light-transmitting module is disposed between the high-power lens group and the light-splitting element and is located on the second optical path, and the first light-transmitting module and the second light-transmitting module are used to control the amount of light entering the first optical path and the second optical path, thereby achieving the effect of dark field lighting; a third light-transmitting module is disposed between the light source module and the light-splitting element and is located on the optical path of the illumination light source, thereby controlling the amount of light entering the illumination light source projected onto the light-splitting element, thereby achieving the effect of dark field lighting; a camera, disposed at the outer edge of the body and adjacent to the side of the light source module, the camera achieves a turning effect of the first light path and the second light path through the light splitting element, thereby capturing an image of the object; In this way, the low-power lens group will mark the position of the detection point of the object, and then move the device to allow the high-power lens group to accurately inspect the detection point of the object, thereby achieving a small-volume and high-precision detection effect.

3. The dual-lens detection device according to claim 1 or 2, characterized in that: The invention also comprises a first reflecting mirror, which is arranged between the light splitting element and the camera and located on the first light path and the second light path.

4. The dual-lens detection device according to claim 1 or 2, characterized in that: The low-power lens group has 5 lenses, and from the object side to the image side, they are the first lens, the second lens, the third lens, the fourth lens, and the fifth lens, and their refractive powers are positive, negative, positive, negative, and positive respectively. A first light barrier is set behind the fifth lens; accordingly, the aperture value of the low-power lens group is ≥8 and the object-image distance is between 125 and 165 mm.

5. The dual-lens detection device according to claim 1 or 2, characterized in that: The high-power lens group has 9 lenses, and from the object side to the image side, they are the sixth lens, the seventh lens, the eighth lens, the ninth lens, the tenth lens, the eleventh lens, the twelfth lens, the thirteenth lens, and the fourteenth lens, and their refractive powers are positive, negative, positive, positive, negative, positive, negative, positive, negative, positive, and negative respectively. A second light barrier is arranged between the eighth lens and the ninth lens; accordingly, the aperture value of the high-power lens group is ≥15 and the object-image distance is between 90 and 130 mm.

6. The dual-lens detection device according to claim 1 or 2, characterized in that: The light splitting element has an adjustable mechanism, and through appropriate translation and rotation, the first light path and the second light path can be aligned and calibrated.

7. The dual-lens detection device according to claim 4, characterized in that: The invention also comprises a second reflecting mirror which is arranged between the first lens and the second lens and is located on the first optical path.

8. The dual-lens detection device according to claim 4, characterized in that: The low-power lens assembly is equipped with a ring-shaped light source to provide dark field lighting with different effects.

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