Solid-state source bottle for ALD (atomic layer deposition) equipment

Abstract

The invention belongs to the technical field of precursor source bottles, and relates to a solid-state source bottle for ALD (atomic layer deposition) equipment, which comprises a storage bottle body for storing solid-state source powder; the heating assembly is used for heating the solid-state source powder in the storage bottle body to sublimate the solid-state source powder to obtain gaseous-state source powder; the heating assembly is arranged on the storage bottle body; the feeding assembly is used for conveying solid source powder into the storage bottle body; the feeding assembly is arranged on the storage bottle body; the gas outlet assembly is used for discharging gaseous source powder; the air outlet assembly is arranged on the storage bottle body. According to the solid-state source bottle for the ALD equipment, the heating mode of the heating rod is more uniform than that of a wound heating wire, maintenance is more convenient, a solid-state precursor can be heated more uniformly through the heat conduction pieces, and the utilization rate is higher; the device has the excellent characteristics that the solid precursor is uniformly heated, the filling amount is large, and the utilization rate is high.

Description

Technical Field

[0001] The present invention relates to the technical field of precursor source bottles, and in particular to a solid-state source bottle for ALD equipment. Background Art

[0002] Atomic layer deposition (ALD) is a special chemical vapor deposition technology. It is a method of forming a thin film by alternately passing gaseous precursor pulses into the reaction chamber and causing chemical adsorption reaction on the surface of the deposition substrate. As an excellent coating technology, ALD technology still attracts much attention because of its high purity, uniformity and good durability of the deposited thin film, and it can also accurately control the thickness and composition of the film. It is widely used in many fields such as semiconductors, optics, optoelectronics, solar energy, etc.

[0003] Common precursors (such as diethyl zinc, trimethyl aluminum, etc.) exist in liquid form. Due to their high vapor pressure, liquid precursors generally do not need to be heated or heated at low temperatures, and are relatively easy to be transported to the reaction chamber. In addition, there are many precursors that exist in solid or solid powder form, such as: copper (hexafluoroacetylacetonate), trimethyl indium, lithium tert-butoxide, etc., which are generally called solid sources. They are a type of precursor substance with a relatively low saturated vapor pressure. The lower the saturated vapor pressure, the more difficult it is to transport the precursor in gaseous form to the reaction chamber. Therefore, its utilization efficiency is extremely low and the process difficulty is greatly increased.

[0004] When the solid precursor in the prior art enters the reaction chamber for reaction, due to the low saturated vapor pressure of the solid precursor, it is difficult for the solid precursor to enter the reaction chamber for reaction, and the solid precursor is easily retained in the source bottle or the corresponding pipeline, and the solid precursor is easy to block the corresponding pipeline, and cause cross contamination between the precursor sources, and make the precursor source react insufficiently or unable to participate in the reaction. In addition, the current heating device for the solid precursor has the phenomenon of uneven heating, and the solid precursor is heated unevenly, which leads to the solid precursor being compacted and agglomerated, resulting in low utilization of the solid precursor, unstable source output, and less precursor dosage loaded into the deposition chamber in the later stage of deposition, which cannot be completely adsorbed on the substrate surface, causing abnormal film growth. Summary of the invention

[0005] In view of this, the present invention provides a solid source bottle for an ALD device.

[0006] Specifically, the present invention is achieved through the following technical solutions:

[0007] According to a first aspect of the present invention, there is provided a solid source bottle for an ALD device, comprising:

[0008] A storage bottle body, used for storing solid source powder;

[0009] A heating component, used for heating the solid source powder in the storage bottle to sublime the solid source powder to obtain gaseous source powder; the heating component is arranged on the storage bottle;

[0010] A feeding assembly, used for conveying solid source powder into the storage bottle; the feeding assembly is arranged on the storage bottle;

[0011] The gas outlet component is used to discharge the gaseous source powder; the gas outlet component is arranged on the storage bottle body.

[0012] Optionally, the storage bottle body comprises: a bottle body and a cover plate, wherein the cover plate is sealed at the opening of the bottle body, the heating component, the feeding component and the gas outlet component are all arranged on the cover plate, and the heating component extends into the bottle body.

[0013] Optionally, the storage bottle body further comprises: a fastener, wherein the fastener passes through the cover plate and is fastened to the bottle body.

[0014] Optionally, a fastening cavity is provided at the open end of the bottle body, and the fastener is tightened in the fastening cavity.

[0015] Optionally, a through hole is provided on the cover plate, and the fastener passes through the through hole.

[0016] Optionally, the storage bottle body further comprises: a sealing ring, wherein the sealing ring is sealingly disposed between the bottle body and the cover plate.

[0017] Optionally, the feed assembly includes: a feed pipe and a sealing plug, wherein the feed pipe is arranged on the cover plate, and a first end of the feed pipe is connected to the interior of the bottle body, and the sealing plug is detachably arranged on the second end of the feed pipe.

[0018] Optionally, the air outlet assembly includes: an air outlet pipe and a sealing valve, wherein the air outlet pipe is arranged on the cover plate and a first end thereof is connected to the interior of the bottle body, and the sealing valve is arranged at a second end of the air outlet pipe.

[0019] Optionally, the heating assembly includes: a heating rod and a heat conductive sheet, wherein the heating rod is arranged on the cover plate, and the bottom end thereof extends into the bottle body, and the heat conductive sheet is arranged in the bottle body, surrounds the heating rod, and is in direct contact with the heating rod.

[0020] Optionally, the outer wall of the bottle body is wrapped with a heat-insulating sleeve, and the parts of the feed assembly and the gas outlet assembly located outside the bottle body are wrapped with a heating sleeve.

[0021] The technical solution provided by the present invention brings at least the following beneficial effects:

[0022] The solid source bottle for ALD equipment provided in the present application adopts a heating rod, which is more uniform in heating than a wound heating wire and is more convenient to maintain. The heat conductive sheet can make the solid precursor heated more uniformly and have a higher utilization rate. The present application has the excellent characteristics of uniform heating of the solid precursor, large filling volume and high utilization rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or related technical descriptions are briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0025] Figure 1 A schematic structural diagram of a solid-state source bottle for an ALD device provided in an embodiment of the present invention;

[0026] Figure 2 A schematic structural diagram of a solid-state source bottle for an ALD device provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] Figure 1 A solid source bottle for an ALD device suitable for an embodiment of the present invention is schematically shown.

[0029] Reference Figure 1-2 As shown, the present application provides a solid source bottle for an ALD device, comprising:

[0030] A storage bottle 10, used for storing solid source powder;

[0031] A heating component 20 is used to heat the solid source powder in the storage bottle 10 to sublime the solid source powder to obtain gaseous source powder; the heating component 20 is disposed on the storage bottle 10;

[0032] A feeding assembly 30 is used to transport solid source powder into the storage bottle body 10; the feeding assembly 30 is arranged on the storage bottle body 10;

[0033] The gas outlet component 40 is used to discharge the gaseous source powder; the gas outlet component 40 is arranged on the storage bottle body 10.

[0034] In an embodiment of the present application, a solid precursor source enters the storage bottle 10 through a feed assembly 30 and is stored in the storage bottle 10. The heating assembly 20 generates heat to heat the solid precursor source in the storage bottle 10, vaporizing it and discharging it into the thin film deposition chamber through a gas outlet assembly 40.

[0035] Exemplarily, the storage bottle body 10 includes: a bottle body 11 and a cover plate 12, wherein the cover plate 12 is sealed at the opening of the bottle body 11, the heating component 20, the feeding component 30 and the gas outlet component 40 are all arranged on the cover plate 12, and the heating component 20 extends into the bottle body 11.

[0036] In the embodiment of the present application, the cover plate 12 is disposed on the opening of the bottle body 11 and can completely seal the opening. The bottle body 11 and the cover plate 12 are both made of stainless steel or aluminum alloy, and the two are connected by a clamp or screws.

[0037] Exemplarily, the storage bottle body 10 further includes a fastener 13 , wherein the fastener 13 passes through the cover plate 12 and is fastened to the bottle body 11 .

[0038] In the embodiment of the present application, the fastener 13 passes through the cover plate 12 and is fastened to the bottle body 11 , thereby connecting the bottle body 11 and the cover plate 12 .

[0039] Exemplarily, a fastening cavity is provided at the open end of the bottle body 11, and the fastener 13 is tightened in the fastening cavity.

[0040] In the embodiment of the present application, the fastening cavity matches the shape and size of the fastener 13 and is used to accommodate the fastener 13 .

[0041] Exemplarily, a through hole 14 is provided on the cover plate 12 , and the fastener 13 passes through the through hole 14 .

[0042] In the embodiment of the present application, the through hole 14 is used for the fastener 13 to pass through.

[0043] Exemplarily, the storage bottle body 10 further includes a sealing ring 15 , which is sealingly disposed between the bottle body 11 and the cover plate 12 .

[0044] In the embodiment of the present application, the sealing ring 15 is sealed between the cover plate 12 and the upper wall of the bottle body 11 .

[0045] Exemplarily, the feed assembly 30 includes: a feed pipe 31 and a sealing plug 32, wherein the feed pipe 31 is arranged on the cover plate 12, and the first end is connected to the interior of the bottle body 11, and the sealing plug 32 is detachably arranged on the second end of the feed pipe 31.

[0046] In the embodiment of the present application, a feed tube 31 is provided on the cover plate 12 on the top of the storage bottle body 10, and the lower end of the feed tube 31 terminates at the lower end surface of the cover plate 12. A sealing plug 32 is detachably provided at the upper end of the feed tube 31. When the sealing plug 32 is opened, a solid precursor source can be added into the feed tube 31.

[0047] Exemplarily, the air outlet assembly 40 includes: an air outlet pipe 41 and a sealing valve 42 , wherein the air outlet pipe 41 is arranged on the cover plate 12 and a first end is connected to the interior of the bottle body 11 , and the sealing valve 42 is arranged at a second end of the air outlet pipe 41 .

[0048] In the embodiment of the present application, an air outlet pipe 41 is provided on the cover plate 12 at the top of the storage bottle body 10, the lower end of the air outlet pipe 41 terminates at the lower end surface of the cover plate 12, and the upper end of the air outlet pipe 41 is connected to the thin film deposition chamber through a sealing valve 42 and a pipeline. When the sealing valve 42 is opened, the sublimated gaseous precursor source enters the thin film deposition chamber.

[0049] Exemplarily, the heating assembly 20 includes: a heating rod 21 and a heat conductive sheet 22, wherein the heating rod 21 is arranged on the cover plate 12, and the bottom end thereof extends into the bottle body 11, and the heat conductive sheet 22 is arranged in the bottle body 11, and is arranged around the heating rod 21, and is in direct contact with the heating rod 21.

[0050] In the embodiment of the present application, the material of the heating rod 21 is stainless steel, and the heating rod 21 can be heated to 300°C and the heating is stable. A thermocouple is provided inside the heating rod 21 to monitor the temperature of the solid precursor source during sublimation in real time, so as to provide temperature feedback and adjust the temperature of the heating rod 21 in real time, so that the sublimation of the solid source reaches a most suitable and balanced temperature, thereby achieving precise temperature control. The heating rod 21 is fixed to the cover plate 12 through the threaded hole 16 on the cover plate 12, and the heating rod 21 is in direct contact with the heat conducting sheet 22 for heat conduction. The cover plate 12 is fixed to the bottle body 11 through the through hole 14 and the sealing ring 15 to ensure the overall airtightness of the storage bottle body 10, facilitate the disassembly and cleaning of the heat conducting sheet 22, and reduce maintenance costs.

[0051] Exemplarily, the outer wall of the bottle body 11 is wrapped with a heat-insulating sleeve, and the parts of the feeding assembly 30 and the gas outlet assembly 40 located outside the bottle body 11 are wrapped with a heat-insulating sleeve.

[0052] In the embodiment of the present application, an insulation sleeve is provided on the outside of the bottle body 11, and the insulation sleeve can reduce the heat generated by the heating rod 21 inside the bottle body 11, so that the temperature inside the bottle body 11 is constant, and not too much heat is lost, thereby ensuring the temperature balance when the solid precursor source inside the bottle body 11 sublimates. The insulation sleeve plays the role of internal heat preservation, and can prevent the temperature of the outside of the storage bottle body 10 from being too high to prevent burns. The feed pipe 31 and the outlet pipe 41 are wrapped with a heating sleeve to reduce heat spillage. The heat sleeve continuously heats the feed pipe 31 and the outlet pipe 41 to reduce the condensation and deposition of solid source vapor in the pipeline.

[0053] During operation, the heating rod 21 heats the storage bottle 10 at a constant and uniform high temperature, and the insulation sleeve is wrapped around the outside of the bottle 11 to keep the inside warm and prevent scalding on the outside. The temperature generated by the heating rod 21 is evenly transmitted to the solid precursor through the heat conducting sheet 22, which continuously sublimates the solid source powder in the storage bottle 10 and is evenly and gradually discharged through the sealing valve 42 of the outlet pipe 41, so that the solid source is more efficiently transported to the thin film deposition chamber, and the transport pipeline can be kept clean, so that the utilization efficiency of the solid source is increased to more than 20%, which greatly saves production costs.

[0054] The solid source bottle for ALD equipment provided in the present application adopts a heating rod, which is more uniform in heating than a wound heating wire and is more convenient to maintain. The heat conductive sheet can make the solid precursor heated more uniformly and have a higher utilization rate. The present application has the excellent characteristics of uniform heating of the solid precursor, large filling volume and high utilization rate.

[0055] It should be noted that, in the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0056] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0057] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0058] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.

[0059] The foregoing is merely a specific embodiment of the present invention, which enables those skilled in the art to understand or implement the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A solid source bottle for an ALD device, characterized in that: include: A storage bottle body, used for storing solid source powder; A heating component, used for heating the solid source powder in the storage bottle to sublime the solid source powder to obtain gaseous source powder; the heating component is arranged on the storage bottle; A feeding assembly, used for conveying solid source powder into the storage bottle; the feeding assembly is arranged on the storage bottle; The gas outlet component is used to discharge the gaseous source powder; the gas outlet component is arranged on the storage bottle body.

2. The solid source bottle for ALD equipment according to claim 1, characterized in that: The storage bottle body comprises: a bottle body and a cover plate, wherein the cover plate is sealed on the opening of the bottle body, the heating component, the feeding component and the gas outlet component are all arranged on the cover plate, and the heating component extends into the bottle body.

3. The solid source bottle for ALD equipment according to claim 2, characterized in that: The storage bottle body further comprises: a fastener, which passes through the cover plate and is fastened to the bottle body.

4. The solid source bottle for ALD equipment according to claim 3, characterized in that: The open end of the bottle body is provided with a fastening cavity, and the fastener is tightened in the fastening cavity.

5. The solid source bottle for ALD equipment according to claim 3, characterized in that: The cover plate is provided with a through hole, and the fastener passes through the through hole.

6. The solid source bottle for ALD equipment according to claim 2, characterized in that: The storage bottle body further comprises: a sealing ring, which is sealingly arranged between the bottle body and the cover plate.

7. The solid source bottle for ALD equipment according to claim 2, characterized in that: The feed assembly comprises: a feed pipe and a sealing plug, wherein the feed pipe is arranged on the cover plate, and a first end of the feed pipe is communicated with the interior of the bottle body, and the sealing plug is detachably arranged on the second end of the feed pipe.

8. The solid source bottle for ALD equipment according to claim 2, characterized in that: The air outlet assembly comprises: an air outlet pipe and a sealing valve, wherein the air outlet pipe is arranged on the cover plate, and a first end of the air outlet pipe is communicated with the interior of the bottle body, and the sealing valve is arranged at a second end of the air outlet pipe.

9. The solid source bottle for ALD equipment according to claim 2, characterized in that: The heating assembly includes: a heating rod and a heat conductive sheet, wherein the heating rod is arranged on the cover plate, and the bottom end thereof extends into the bottle body, and the heat conductive sheet is arranged in the bottle body, surrounds the heating rod, and is in direct contact with the heating rod.

10. The solid source bottle for ALD equipment according to claim 2, characterized in that: The outer wall of the bottle body is wrapped with a heat preservation sleeve, and the parts of the feeding assembly and the gas outlet assembly located outside the bottle body are wrapped with a heating sleeve.

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