Molecular pump heat dissipation structure and molecular pump heat dissipation system

Abstract

The invention relates to the technical field of object fluid equipment, and discloses a molecular pump heat dissipation structure and a molecular pump heat dissipation system.The molecular pump heat dissipation structure comprises a shell, a bearing seat, a sealing assembly and a heat dissipation air channel. The shell is provided with a hollow inner cavity. And the bearing seat is connected with the shell. The sealing assembly is arranged between the inner wall of the shell and the bearing seat, and the hollow inner cavity is divided into a motor cavity and a bearing cavity with the interior being vacuum. The heat dissipation air channel penetrates through the shell, and the two opposite sides of the motor cavity communicate with the heat dissipation air channel through the air inlet and the air outlet correspondingly. Therefore, the heat of the hollow inner cavity can be greatly reduced, the heat dissipation efficiency is improved, the working efficiency of the motor is improved, and the service life of the motor is prolonged.

Description

Technical Field

[0001] The invention relates to the technical field of physical fluid equipment, and in particular to a molecular pump heat dissipation structure and a molecular pump heat dissipation system. Background Art

[0002] Molecular pumps are widely used in chemical or physical experimental equipment, aerospace and industrial industries that require a vacuum environment. For small molecular pumps, high-speed operation is conducive to achieving higher performance in a smaller volume, and then higher speeds will increase the heat generated by bearing friction and the heat generated by the motor. Since the internal chamber of the molecular pump is a vacuum environment, the heat dissipation problem of the molecular pump's bearings and motors is difficult to solve, which seriously affects the performance and service life of the molecular pump.

[0003] In order to solve the problem of heat dissipation of molecular pumps, the heat dissipation methods of conventional molecular pumps are mainly air cooling and water cooling. The air cooling method mainly installs a fan and uses air to take away the heat on the surface of the pump body to achieve the effect of heat dissipation. For the same reason, water cooling is also mainly to take away the heat on the surface of the molecular pump shell. However, since the inner cavity of the molecular pump is in a vacuum environment, the heat of the motor and the heat generated by the friction of the bearings are difficult to conduct to the surface of the molecular pump shell, resulting in the inability of both methods to effectively dissipate heat. Summary of the invention

[0004] In view of this, the present invention provides a molecular pump heat dissipation structure and a molecular pump heat dissipation system to solve the problem that the conventional molecular pump heat dissipation method is difficult to effectively dissipate the heat of the molecular pump cavity.

[0005] In a first aspect, the present invention provides a molecular pump heat dissipation structure, comprising:

[0006] A housing having a hollow interior;

[0007] A bearing seat connected to the housing;

[0008] A sealing assembly is disposed between the inner wall of the housing and the bearing seat to separate the hollow inner cavity into a motor cavity and a bearing cavity with a vacuum inside;

[0009] The heat dissipation duct runs through the shell, and the opposite sides of the motor cavity are connected to the heat dissipation duct through an air inlet and an air outlet respectively.

[0010] Optionally, the heat dissipation air duct includes an air inlet channel and an air outlet channel, the air inlet channel is connected to the air inlet, and the air outlet channel is connected to the air outlet.

[0011] Optionally, the inner diameter of the air outlet channel is greater than the inner diameter of the air inlet channel, and the size of the air outlet is greater than the size of the air inlet.

[0012] Optionally, a first guide channel is formed between the outer wall of the bearing seat and the inner wall of the shell, and the first guide channel is located between the air inlet and the motor cavity and extends along the axial direction of the bearing cavity.

[0013] Optionally, the air inlet is narrowed in the direction of airflow movement, and the air outlet is widened in the direction of airflow movement.

[0014] Optionally, a first filter is provided at a port of the air inlet channel close to the outer wall of the shell, and a second filter is provided at a port of the air outlet channel close to the outer wall of the shell.

[0015] Optionally, the sealing assembly includes a spacer, which is arranged along the extension direction of the main shaft, with one end connected to the bearing seat and the opposite end connected to the inner wall of the shell.

[0016] Optionally, a first annular groove is provided at the connection between the spacer and the bearing seat, a first sealing ring is provided in the first annular groove, and a second annular groove is provided at the connection between the spacer and the housing, a second sealing ring is provided in the second annular groove.

[0017] Optionally, a third sealing ring is arranged in a third annular groove between the bearing seat and the housing.

[0018] In a second aspect, the present invention further provides a molecular pump heat dissipation system, comprising the molecular pump heat dissipation structure described above, and also comprising an air supply unit, wherein the air supply port of the air supply unit faces the heat dissipation air duct.

[0019] Beneficial effects:

[0020] The present invention provides a molecular pump heat dissipation structure, comprising: a housing, a bearing seat, a sealing assembly and a heat dissipation air duct. The housing has a hollow inner cavity. The bearing seat is connected to the housing. The sealing assembly is arranged between the inner wall of the housing and the bearing seat, and the hollow inner cavity is divided into a motor cavity and a bearing cavity with a vacuum inside. The heat dissipation air duct runs through the housing, and opposite sides of the motor cavity are connected to the heat dissipation air duct through an air inlet and an air outlet respectively.

[0021] The hollow inner cavity of the shell is used to accommodate the spindle and the motor. The hollow inner cavity runs through the shell from bottom to top. The bearing seat is installed at the bottom of the shell. The spindle is rotatably installed on the bearing seat. The sealing assembly can be arranged along the extension direction of the spindle to separate the hollow inner cavity into a bearing cavity and a motor cavity. The bearing cavity can be evacuated to a vacuum, and the spindle rotates in the bearing cavity. The vacuum environment can reduce the resistance encountered when the spindle rotates, ensuring that the spindle can rotate at a high speed. The motor is installed in the motor cavity. The motor can drive the spindle to rotate through the principle of electromagnetic induction. When the motor is working, it will emit heat to the motor cavity. The heat dissipation duct is connected to the motor cavity through the air inlet and the air outlet, which changes the structure of the motor in the vacuum environment in the traditional molecular pump. The external air can flow along one of the ports of the heat dissipation duct, the air inlet, the motor cavity, the air outlet and the other port of the heat dissipation duct in sequence. When the low-temperature air passes through the motor cavity, it exchanges heat with the motor housing, continuously absorbs the heat of the motor housing, and sends the heat to the external environment through the air outlet.

[0022] The above structure can greatly reduce the heat in the motor and the motor cavity. The motor is the main heat-generating component, and such a configuration can greatly reduce the heat in the hollow inner cavity. In addition, when low-temperature air passes through the motor cavity, it can also exchange heat with the inner wall of the shell, the sealing assembly and the outer wall of the bearing seat, thereby reducing the heat of the above structure, achieving the purpose of overall heat dissipation, improving the heat dissipation efficiency, and improving the working efficiency and service life of the motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 It is a structural schematic diagram of a molecular pump heat dissipation structure according to an embodiment of the present invention;

[0025] Figure 2 for Figure 1 A local enlarged schematic diagram of point A in the middle.

[0026] Description of reference numerals:

[0027] 1. Shell; 11. Motor cavity; 111. Air inlet; 112. Air outlet; 113. First guide channel; 114. Second guide channel; 12. Bearing cavity; 2. Bearing seat; 201. First bearing; 21. Boss; 22. Third ring groove; 23. Third sealing ring; 24. Fourth sealing ring; 31. Air inlet channel; 32. Air outlet channel; 41. Spacer; 42. Second bearing; 43. First sealing ring; 44. Second sealing ring; 5. Main shaft; 51. Magnetic part; 6. Motor; 7. Base; 8. Air supply unit. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0029] like Figure 1 As shown, in an embodiment of the present application, a molecular pump heat dissipation structure is provided, comprising: a housing 1, a bearing seat 2, a sealing assembly and a heat dissipation duct.

[0030] The housing 1 has a hollow inner cavity, and the hollow inner cavity of the housing 1 is used to accommodate the main shaft 5 and the motor 6 .

[0031] The bearing seat 2 is connected to the shell 1, and the hollow inner cavity passes through the shell 1 from bottom to top. The bearing seat 2 is installed at the bottom of the shell 1. A first bearing 201 is arranged on the bearing seat 2, and a second bearing 42 is arranged on the top of the hollow inner cavity. The first bearing 201 and the second bearing 42 jointly support the rotation of the main shaft 5.

[0032] The sealing assembly is arranged between the inner wall of the housing 1 and the bearing seat 2, and the hollow inner cavity is divided into a motor cavity 11 and a bearing cavity 12 with a vacuum inside. The sealing assembly can be arranged along the extension direction of the main shaft 5, and the hollow inner cavity is divided into a bearing cavity 12 and a motor cavity 11. The bearing cavity 12 can be evacuated to a vacuum, and the main shaft 5 rotates in the bearing cavity 12. The vacuum environment can reduce the resistance encountered by the main shaft 5 when rotating, and ensure that the main shaft 5 can rotate at a high speed. The motor 6 is installed in the motor cavity 11, and the motor 6 can drive the main shaft 5 to rotate through the principle of electromagnetic induction. For example, a magnetic part 51 is arranged at a position corresponding to the motor 6 on the main shaft 5. When the motor 6 is powered on, a magnetic field can be generated, thereby driving the main shaft 5 to rotate through the magnetic part 51.

[0033] The heat dissipation duct runs through the shell 1, and the opposite sides of the motor cavity 11 are connected to the heat dissipation duct through the air inlet 111 and the air outlet 112 respectively. For example, the two ports of the heat dissipation duct are respectively opened on the two opposite side walls of the shell 1, the air inlet 111 is close to one of the ports of the heat dissipation duct and is connected to the heat dissipation duct, and the air outlet 112 is close to the other port of the heat dissipation duct and is connected to the heat dissipation duct, so that the external air can pass through the air inlet 111, the motor cavity 11 and the air outlet 112 in sequence, thereby diffusing the heat in the motor cavity 11 to the external air.

[0034] When the molecular pump is working, both the motor 6 and the spindle 5 will generate heat, among which the motor 6 is the main heat-generating part. When the motor 6 is working, it will dissipate heat to the motor cavity 11. The heat dissipation duct is connected with the motor cavity 11 through the air inlet 111 and the air outlet 112, which changes the structure in which the motor in the traditional molecular pump is in a vacuum environment. The external air can flow along one of the ports of the heat dissipation duct, the air inlet 111, the motor cavity 11, the air outlet 112 and the other port of the heat dissipation duct in sequence. When the low-temperature air passes through the motor cavity 11, it exchanges heat with the outer casing of the motor 6, continuously absorbs the heat of the motor outer casing, and sends the heat to the external environment through the air outlet 112.

[0035] The above structure can greatly reduce the heat in the motor 6 and the motor cavity 11. The motor 6 is the main heat-generating component, and such a configuration can greatly reduce the heat in the hollow inner cavity. In addition, when the low-temperature air passes through the motor cavity 11, it can also exchange heat with the inner wall of the shell 1, the sealing assembly and the outer wall of the bearing seat 2, thereby reducing the heat of the above structure, achieving the purpose of overall heat dissipation, improving the heat dissipation efficiency, and improving the working efficiency and service life of the motor.

[0036] In this embodiment, air can be blown to the ports corresponding to the heat dissipation duct and the air inlet 111 by an external air supply device, thereby increasing the air flow speed in the heat dissipation duct and further improving the heat dissipation efficiency.

[0037] like Figure 1 As shown, in the present embodiment, the heat dissipation air duct includes an air inlet channel 31 and an air outlet channel 32, the air inlet channel 31 is connected with the air inlet 111, and the air outlet channel 32 is connected with the air outlet 112, the air inlet channel 31 and the air outlet channel 32 are respectively arranged at the opposite ends of the shell 1, corresponding to the air inlet 111 and the air outlet 112 respectively, so that the opposite ends of the shell 1 maintain a relatively low temperature and a relatively high temperature respectively, and the low-temperature air enters the motor cavity 11 through the air inlet channel 31 and the air inlet 111, and the low-temperature air obtains high-temperature air after heat exchange, and the high-temperature air leaves the shell 1 from the air outlet 112 and the air outlet channel 32. Such an arrangement is conducive to ensuring that the air can efficiently dissipate heat from the motor cavity 11.

[0038] like Figure 1As shown, in this embodiment, the inner diameter of the air outlet channel 32 is larger than the inner diameter of the air inlet channel 31. For example, the cross-sections of the air outlet channel 32 and the air inlet channel 31 are both circular, the inner diameter of the air inlet channel 31 is D1, and the inner diameter of the air outlet channel 32 is D2, D2>D1, the air inlet channel 31 with a smaller inner diameter can increase the air flow rate, and the air outlet channel 32 with a larger inner diameter can ensure that the air after heat exchange can be discharged efficiently. The size of the air outlet 112 is larger than the size of the air inlet 111. For the same reason, the smaller size of the air inlet 111 can increase the wind speed of the air entering the motor cavity 11, and the larger size of the air outlet 112 can improve the discharge efficiency of the air after heat exchange. Increasing the wind speed of the air entering the motor cavity 11 is conducive to further improving the heat dissipation efficiency.

[0039] like Figure 1 As shown, in the present embodiment, a first guide channel 113 is formed between the outer wall of the bearing seat 2 and the inner wall of the shell 1, the first guide channel 113 is located between the air inlet 111 and the motor cavity 11, and extends along the axial direction of the bearing cavity 12, the top of the bearing seat 2 has a boss 21, and a first guide channel 113 is formed between the outer wall of the boss 21 and the inner wall of the shell 1, after the air passes through the air inlet 111, it will move along the axial direction of the bearing cavity 12 under the guidance of the first guide channel 113, the motor 6 can be set at a position opposite to the first guide channel 113, so that the low-temperature air will move directly toward the outer casing of the motor 6, the air pressure on the side of the air inlet 111 increases, pushing the air to flow in the direction of the air outlet 112, thereby performing heat exchange on the entire outer casing of the motor 6 and improving the heat dissipation efficiency.

[0040] Similarly, on one side of the air outlet 112 , a second guide channel 114 is formed between the boss 21 and the inner wall of the housing 1 , and the heat-exchanged air moves toward one side of the air outlet 112 under the guidance of the second guide channel 114 .

[0041] like Figure 1 As shown, in this embodiment, the air inlet 111 is narrowed in the direction of air flow movement, further increasing the flow rate of low-temperature air entering the motor cavity 11, and the air outlet 112 is expanded in the direction of air flow movement, further increasing the efficiency of air discharged from the motor cavity 11 after heat exchange.

[0042] like Figure 1 As shown, in this embodiment, a first filter is provided at a port of the air inlet channel 31 close to the outer wall of the shell 1, and a second filter is provided at a port of the air outlet channel 32 close to the outer wall of the shell 1. The first filter and the second filter can be filter nets to prevent dust or other impurities from entering the motor cavity 11.

[0043] like Figure 1As shown, in this embodiment, the sealing assembly includes a spacer 41, which is arranged along the extension direction of the main shaft, one end of which is connected to the bearing seat 2, and the opposite end is connected to the inner wall of the shell 1. The spacer divides the hollow inner cavity into a bearing cavity 12 and a motor cavity 11. A partial bearing cavity 12 is formed inside the spacer 41, and the motor 6 can be installed on the outer wall of the spacer 41. The outside of the spacer 41 is the motor cavity 11 connected to the external environment.

[0044] like Figure 1 and Figure 2 As shown, in this embodiment, a first annular groove is provided at the connection between the spacer 41 and the bearing seat 2, a first sealing ring 43 is provided in the first annular groove, a second annular groove is provided at the connection between the spacer 41 and the housing 1, a second sealing ring 44 is provided in the second annular groove, thereby increasing the sealing performance of the connection between the spacer 41 and the bearing seat 2 and the inner wall of the housing 1, and ensuring that the bearing cavity 12 is in a stable vacuum environment.

[0045] like Figure 1 As shown, in this embodiment, a third annular groove 22 is formed between the connection between the bearing seat 2 and the housing 1 , and a third sealing ring 23 is arranged in the third annular groove 22 , thereby increasing the sealing performance of the connection between the housing 1 and the bearing seat 2 .

[0046] like Figure 1 As shown, in this embodiment, a base 7 is provided at the bottom of the bearing seat 2, and the base 7 is used to seal the channel below the bearing seat 2. A fourth ring groove is provided at the connection between the base 7 and the bearing seat 2, and a fourth sealing ring 24 is provided in the fourth ring groove.

[0047] like Figure 1 As shown, a molecular pump heat dissipation system is also provided in an embodiment of the present application, including the molecular pump heat dissipation structure mentioned above, and also including an air supply unit 8, wherein the air supply port of the air supply unit 8 faces the heat dissipation air duct.

[0048] The air supply unit 8 can blow air into the heat dissipation duct through the air supply port, thereby increasing the wind speed and further improving the heat dissipation effect. In addition, the air supply port of the air supply unit 8 can simultaneously blow air toward the outer wall of the shell 1, thereby increasing the speed of air flowing through the outer wall of the shell 1 and improving the heat dissipation efficiency of the shell 1.

[0049] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A molecular pump heat dissipation structure, characterized in that: include: A housing (1) having a hollow inner cavity; A bearing seat (2) connected to the housing (1); A sealing assembly is arranged between the inner wall of the housing (1) and the bearing seat (2) to separate the hollow inner cavity into a motor cavity (11) and a bearing cavity (12) with a vacuum inside; A heat dissipation duct runs through the housing (1), and opposite sides of the motor cavity (11) are connected to the heat dissipation duct via an air inlet (111) and an air outlet (112) respectively.

2. The molecular pump heat dissipation structure according to claim 1, characterized in that: The heat dissipation air duct comprises an air inlet channel (31) and an air outlet channel (32); the air inlet channel (31) is in communication with the air inlet (111), and the air outlet channel (32) is in communication with the air outlet (112).

3. The molecular pump heat dissipation structure according to claim 2, characterized in that: The inner diameter of the air outlet channel (32) is greater than the inner diameter of the air inlet channel (31), and the size of the air outlet (112) is greater than the size of the air inlet (111).

4. The molecular pump heat dissipation structure according to claim 2, characterized in that: A first guide channel (113) is formed between the outer wall of the bearing seat (2) and the inner wall of the housing (1); the first guide channel (113) is located between the air inlet (111) and the motor cavity (11), and extends along the axial direction of the bearing cavity (12).

5. The molecular pump heat dissipation structure according to claim 2, characterized in that: The air inlet (111) is a contraction in the direction of airflow movement, and the air outlet (112) is an expansion in the direction of airflow movement.

6. The molecular pump heat dissipation structure according to claim 2, characterized in that: A first filter is provided at a port of the air inlet channel (31) close to the outer wall of the shell (1), and a second filter is provided at a port of the air outlet channel (32) close to the outer wall of the shell (1).

7. The molecular pump heat dissipation structure according to claim 1, characterized in that: The sealing assembly comprises a spacer (41), which is arranged along the extension direction of the main shaft (5), one end of which is connected to the bearing seat (2) and the opposite end of which is connected to the inner wall of the housing (1).

8. The molecular pump heat dissipation structure according to claim 7, characterized in that: A first annular groove is provided at the connection between the spacer (41) and the bearing seat (2), a first sealing ring (43) is provided in the first annular groove, and a second annular groove is provided at the connection between the spacer (41) and the housing (1), a second sealing ring (44) is provided in the second annular groove.

9. The molecular pump heat dissipation structure according to claim 1, characterized in that: A third annular groove (22) is formed between the bearing seat (2) and the housing (1), and a third sealing ring (23) is arranged in the third annular groove (22).

10. A molecular pump cooling system, characterized in that: It comprises the molecular pump heat dissipation structure according to any one of claims 1 to 9, and further comprises an air supply unit (8), wherein the air supply port of the air supply unit (8) faces the heat dissipation air duct.

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