Automatic cleaning system for ALD special steel cylinder

Abstract

The invention discloses an automatic cleaning system for ALD special steel cylinders. The automatic cleaning system comprises a cleaning medium supply unit, a steel cylinder cleaning pipeline unit, an ultrasonic cleaning unit and a waste output unit. By means of the mode, the automatic cleaning system for the ALD special steel cylinder can avoid the problem of cross contamination of metal particles in different product steel cylinders caused by circulating cleaning agents through one-way flow feeding, can ensure that the steel cylinders are always kept in a positive pressure environment, avoids introduction of air and particle pollution, and improves the cleaning efficiency. The cleaning effect, the cleaning efficiency and the safety of the special steel cylinder are improved, in addition, modular design is adopted, the expansibility is high, the compatibility is high, and use is convenient.

Description

Technical Field

[0001] The invention relates to the technical field of ALD special steel cylinders, and in particular to an automatic cleaning system for ALD special steel cylinders. Background Art

[0002] With the widespread application of Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) technologies in modern semiconductor manufacturing and materials science, the demand for highly pure and precisely controlled special steel cylinders for storing and transporting high-purity gases is also increasing.

[0003] After repeated use, special steel cylinders will have residues attached to their inner walls, affecting gas purity and delivery efficiency, so they need to be cleaned regularly. Traditional methods of cleaning steel cylinders mainly include manual cleaning and simple mechanical cleaning. However, these methods generally have problems such as low efficiency, incomplete cleaning, long time consumption, and the possibility of secondary pollution.

[0004] In recent years, automatic cleaning devices have gradually been used in the field of cylinder cleaning to improve cleaning efficiency and effect. However, the existing automatic cleaning devices still have many shortcomings in handling high-purity gas cylinders, mainly including:

[0005] 1. It is not possible to automatically detect whether the liquid in the cylinder is full or completely emptied;

[0006] 2. It is impossible to achieve independent automatic liquid inlet or outlet switching to avoid contamination of residual substances in cylinders of different products;

[0007] 3. Lack of automated backup liquid storage system and waste liquid system;

[0008] 4. The non-fully sealed positive pressure cleaning process cannot effectively prevent the introduction of particulate contamination in the air;

[0009] 5. The non-modular design is not very expandable.

[0010] Therefore, the existing automated cleaning equipment is difficult to meet the high requirements of the ALD process for the cleanliness of the inner wall of the cylinder and the ease of operation in terms of automation and key step detection, and further improvement is needed. Summary of the invention

[0011] In order to solve the above technical problems, a technical solution adopted by the present invention is:

[0012] Provided is an ALD special steel cylinder automatic cleaning system, which includes: a cleaning medium feeding unit, a steel cylinder cleaning pipeline unit, an ultrasonic cleaning unit, and a waste output unit.

[0013] The cleaning medium feeding unit includes a cleaning agent feeding unit, an ultrapure water feeding unit and a nitrogen feeding unit, so as to independently convey different cleaning media;

[0014] The cleaning agent feeding unit comprises a cleaning agent storage barrel, a cleaning agent output return pipe, and a steel cylinder cleaning agent outlet. One end of the cleaning agent output return pipe is connected to the bottom of the cleaning agent storage barrel, and the other end is connected to the top of the cleaning agent storage barrel. The cleaning agent output return pipe is provided with a plurality of steel cylinder cleaning agent outlets, and the steel cylinder cleaning agent outlet is connected to the steel cylinder cleaning pipeline unit to transport cleaning agent into the steel cylinder.

[0015] The ultrapure water feeding unit comprises an ultrapure water tank, an ultrapure water input pipeline, and an ultrapure water output pipeline, wherein the ultrapure water input pipeline extends to the bottom of the ultrapure water tank, and the ultrapure water output pipeline is connected to the bottom of the ultrapure water tank, and an ultraviolet sterilization lamp and a filter are arranged on the ultrapure water output from the ultrapure water tank to perform ultraviolet sterilization and filtration on the ultrapure water;

[0016] The nitrogen feeding unit comprises a nitrogen storage tank, a nitrogen input pipeline, and a nitrogen output pipeline, wherein the nitrogen input pipeline is arranged at the lower part of the nitrogen storage tank, and the nitrogen output pipeline is arranged at the upper part of the nitrogen storage tank and connected to the cylinder cleaning pipeline unit;

[0017] The cleaning medium supply unit is connected to a plurality of the steel cylinder cleaning pipeline units, and a group of the steel cylinder cleaning pipeline units is correspondingly connected to a special steel cylinder, so that the cleaning medium output by the cleaning medium supply unit is delivered to the steel cylinder for cleaning, and the waste after cleaning is delivered to the waste output unit, so as to avoid internal cross contamination caused by the steel cylinders of different products sharing the cleaning agent, and to ensure that the steel cylinder maintains a positive pressure environment during the fully sealed cleaning process to avoid the introduction of external contamination;

[0018] The steel cylinder cleaning pipeline unit comprises a cleaning medium access pipe, a cleaning agent inlet, an ultrapure water inlet, a nitrogen inlet, a cleaning input pipe, a cleaning output pipe, a liquid level detection component, an exhaust gas pipe, a waste liquid pipe, a waste agent outlet, a waste water outlet, and a direct discharge outlet. The cleaning medium access pipe is provided with the cleaning agent inlet, the ultrapure water inlet, and the nitrogen inlet for independently receiving and conveying the cleaning medium. The cleaning input pipe and the cleaning output pipe are provided with stop valves. One end of the cleaning input pipe is connected to the cleaning medium. The cleaning outlet pipe is connected to the inlet pipe, and the other end is connected to the interface on the steel cylinder to transport the cleaning medium into the steel cylinder. One end of the cleaning outlet pipe extends to the bottom of the steel cylinder, and the other end is connected to the liquid level detection component outside the steel cylinder. The liquid level detection component is respectively connected to the exhaust gas pipe and the waste liquid pipe. The exhaust gas pipe is provided with an exhaust valve. The waste liquid pipe is provided with the waste agent outlet, the waste water outlet, the direct drainage outlet and the drain valves corresponding to the outlets to discharge the waste liquid generated after the steel cylinder is cleaned.

[0019] The liquid level detection assembly includes a U-shaped detection pipe connected to the cleaning output pipe, the exhaust gas pipe and the exhaust liquid pipe, so as to create a drop through the U-shaped detection pipe to accurately detect whether there is a liquid level in the cylinder, and a low liquid level switch is arranged at an upstream position close to the cylinder on the U-shaped detection pipe, and a high liquid level switch is arranged at a downstream position away from the cylinder on the U-shaped detection pipe, a first valve body is arranged on the U-shaped detection pipe upstream of the low liquid level switch, and a second valve body is arranged on the U-shaped detection pipe downstream of the high liquid level switch;

[0020] The waste output unit includes a waste gas buffer box, a waste liquid storage tank, a waste water storage tank, a direct drainage storage tank, a waste liquid input pipeline, a waste liquid transfer output pipeline, and a mobile waste liquid barrel. The waste gas buffer box is provided with a plurality of air inlets corresponding to the cylinder cleaning pipeline unit to discharge the waste gas generated during the cleaning process into and store it in the waste gas buffer box. The waste gas buffer box is provided with one or more exhaust ports. The waste liquid storage tank is connected to the waste agent outlet through the waste liquid input pipeline to receive and store the waste gas discharged after cleaning the cylinder. The waste cleaning agent discharged, the wastewater storage tank is connected to the wastewater outlet through the waste liquid input pipe to receive and store the wastewater discharged after cleaning the cylinder, the straight water discharge storage tank is connected to the straight water discharge outlet through the waste liquid input pipe to receive and store the straight water discharged after cleaning the cylinder, the waste liquid storage tank and the wastewater storage tank are connected with the waste liquid transfer output pipe, and the waste liquid transfer output pipe is connected to the mobile waste liquid barrel to transport the waste liquid and wastewater in the storage tank out for centralized treatment.

[0021] In a preferred embodiment of the present invention, when the cleaning medium starts to be input into the steel cylinder, the feed valve on the corresponding feeding unit, the first valve body and the exhaust valve on the exhaust pipe are opened, and the other valves are closed. When the steel cylinder is filled with liquid and the overflow of the cleaning output pipe enters the U-shaped detection pipe and is detected by the high liquid level switch, the feed valve is automatically closed;

[0022] When using nitrogen to pressurize the material and discharge the liquid, open the air inlet valve on the nitrogen output pipeline, the first valve body and the corresponding discharge valve on the waste liquid discharge pipe to open the corresponding liquid outlet, and close other valves. When the low liquid level switch does not detect the liquid level, it means that all the waste liquid in the cylinder has been drained, and close the air inlet valve and the discharge valve.

[0023] In a preferred embodiment of the present invention, the nitrogen inlet pipeline is connected to the upper part of the ultrapure water tank via a nitrogen inlet pipeline to transport nitrogen into the ultrapure water tank for material pressing and drainage, and a nitrogen discharge pipeline is provided at the bottom of the ultrapure water tank to discharge the nitrogen in the ultrapure water tank.

[0024] In a preferred embodiment of the present invention, a water pump, a ball valve, a stop valve and a flow meter are connected to the cleaning agent output return pipe upstream of the cleaning agent outlet of the cylinder, and a pressure gauge and a ball valve are connected to the cleaning agent output return pipe downstream of the cleaning agent outlet of the cylinder.

[0025] In a preferred embodiment of the present invention, a pure water inlet pipe is connected to the cleaning agent storage barrel, and the access end of the pure water inlet pipe is connected to an ultrapure water supply unit or an external pure water equipment pipeline to transport pure water into the cleaning agent storage barrel.

[0026] In a preferred embodiment of the present invention, the ultrapure water output pipeline is provided with a ball valve, a water pump, a regulating valve, a shut-off valve, a flow meter, and a pressure gauge.

[0027] In a preferred embodiment of the present invention, a pure water reflux pipe is connected to the ultrapure water tank, and the pure water reflux pipe extends to the bottom of the ultrapure water tank.

[0028] In a preferred embodiment of the present invention, liquid level sensors are provided in the ultrapure water tank, the cleaning agent storage barrel, the direct discharge water storage tank, and the mobile waste liquid barrel.

[0029] In a preferred embodiment of the present invention, the cleaning medium access pipe is provided with a plurality of spare liquid / gas inlets, and the waste liquid discharge pipe is provided with a plurality of spare liquid outlets.

[0030] In a preferred embodiment of the present invention, the ultrasonic cleaning unit includes an ultrasonic cleaning tank to promote the cleaning of the cylinder by ultrasonic waves.

[0031] The beneficial effects of the present invention are: not only can the problem of cross-contamination of metal particles in different product cylinders caused by circulating cleaning agents be avoided through unidirectional flow feeding, but also it can ensure that the cylinders always maintain a positive pressure environment, avoiding the introduction of air and particle pollution, and improving the cleaning effect, cleaning efficiency and safety of special cylinders. In addition, the modular design is adopted, which has strong expandability, high compatibility and is easy to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work, among which:

[0033] Figure 1 This is a schematic diagram of the pipeline connection structure of a preferred embodiment of an ALD special steel cylinder automatic cleaning system of the present invention;

[0034] Figure 2 It is a structural schematic diagram of a preferred embodiment of an ALD special steel cylinder automatic cleaning system of the present invention;

[0035] Figure 3 It is a structural schematic diagram of an acid cleaning agent feeding unit of a preferred embodiment of an ALD special steel cylinder automatic cleaning system of the present invention;

[0036] Figure 4 It is a structural schematic diagram of an ultrapure water supply unit of a preferred embodiment of an ALD special steel cylinder automatic cleaning system of the present invention;

[0037] Figure 5 It is a structural schematic diagram of a nitrogen supply unit of a preferred embodiment of an ALD special steel cylinder automatic cleaning system of the present invention;

[0038] Figure 6 It is a schematic diagram of the structure of a waste liquid storage tank and a waste water storage tank of a preferred embodiment of an ALD special steel cylinder automatic cleaning system of the present invention;

[0039] Figure 7 It is a schematic diagram of the structure of an exhaust gas buffer box of a preferred embodiment of an ALD special steel cylinder automatic cleaning system of the present invention;

[0040] Figure 8 It is a schematic diagram of the structure of a direct drainage storage tank of a preferred embodiment of an ALD special steel cylinder automatic cleaning system of the present invention. DETAILED DESCRIPTION

[0041] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] See also Figure 1-8 , the embodiment of the present invention includes:

[0043] An ALD special steel cylinder automatic cleaning system, the structure of which includes: a cleaning medium feeding unit 2, a steel cylinder cleaning pipeline unit, an ultrasonic cleaning unit, and a waste output unit. The modular design of the units can improve the scalability of the entire system and facilitate construction and maintenance.

[0044] (1) Cleaning medium supply unit: used to supply pure water, nitrogen and acid cleaning agent to the cylinder 1, which includes an acid cleaning agent supply unit, an ultrapure water supply unit and a nitrogen supply unit.

[0045] The acid cleaning agent feeding unit includes a cleaning agent storage barrel 201, a cleaning agent output return pipe 202, and a steel cylinder cleaning agent outlet 203. One end of the cleaning agent output return pipe 202 is connected to the bottom of the cleaning agent storage barrel 201, and the other end is connected to the return port at the top of the cleaning agent storage barrel 201. Because of the circulating liquid supply, the cleaning agent circulating through the cleaning agent output return pipe 202 is clean and has not been in contact with the inside of the steel cylinder 1. All the liquid entering the inside of the steel cylinder 1 is discharged by nitrogen pressure and does not participate in the circulation. A plurality of steel cylinder cleaning agent outlets 203 are provided on the cleaning agent output return pipe 201, and the steel cylinder cleaning agent outlet 203 is connected to the steel cylinder cleaning pipeline unit to transport the cleaning agent into the steel cylinder. Among them, one steel cylinder 1 corresponds to a group of steel cylinder cleaning pipeline units.

[0046] Further preferably, the cleaning agent storage barrel 201 may be equipped with a common storage barrel and a spare storage barrel to adapt to different usage situations.

[0047] Further preferably, the cleaning agent output reflux pipe 202 upstream of the cylinder cleaning agent outlet 203 is connected with control equipment such as a water pump, a ball valve, a stop valve, and a flow meter, and the cleaning agent output reflux pipe 202 downstream of the cylinder cleaning agent outlet 203 is connected with a pressure gauge, a ball valve, etc.

[0048] Further preferably, a pure water access pipe 204 is connected to the cleaning agent storage barrel 201, and the access end of the pure water access pipe 204 is connected to an ultrapure water supply unit or an external pure water device / pipeline to transport pure water into the cleaning agent storage barrel 201 for cleaning.

[0049] Further preferably, a liquid level sensor is provided in the cleaning agent storage barrel 201 .

[0050] The ultrapure water supply unit comprises an ultrapure water tank 211 , an ultrapure water input pipeline 212 , an ultrapure water output pipeline 213 , a nitrogen inlet pipeline 214 , and a nitrogen discharge pipeline 215 .

[0051] An ultrapure water tank 211 for storing ultrapure water is provided with a liquid level sensor, one end of the ultrapure water input pipe 212 is connected to an external ultrapure water delivery device, and the other end extends to the bottom of the ultrapure water tank 211, and an ultrapure water output pipe 213 is connected to the bottom of the ultrapure water tank 211, and an ultraviolet sterilization lamp 217 and a filter 218 are provided thereon. The ultrapure water output from the ultrapure water tank 211 is first sterilized by the ultraviolet sterilization lamp 217, and then sent to the filter 218 for filtration. The filtered ultrapure water can be sent to the water use point / pipeline.

[0052] Further preferably, the ultrapure water output pipeline 213 is provided with a ball valve, a water pump, a regulating valve, a shut-off valve, a flow meter, a pressure gauge and other equipment for detecting or regulating the ultrapure water output state.

[0053] Further preferably, the ultrapure water output pipeline 213 can be provided with a group of common groups and a group of standby groups, which can not only deliver ultrapure water to the cylinder cleaning pipeline unit, but also deliver ultrapure water to other production systems.

[0054] Further preferably, a pure water reflux pipe 216 is connected to the ultrapure water tank 211 , and the pure water reflux pipe 216 extends to the bottom of the ultrapure water tank 211 .

[0055] The nitrogen inlet pipe 214 is connected to the upper part of the ultrapure water tank 211 to accelerate the output of ultrapure water by conveying nitrogen into the ultrapure water tank 211. The nitrogen discharge pipe 215 is connected to the bottom of the ultrapure water tank 211 to discharge the nitrogen in the ultrapure water tank 211.

[0056] Further preferably, the nitrogen inlet pipeline 214 and the nitrogen discharge pipeline 215 are respectively connected to the nitrogen supply and discharge water seal cylinders, wherein the nitrogen inlet pipeline 214 is connected to the ultrapure water tank 211 through the nitrogen supply and discharge water seal cylinders.

[0057] The nitrogen feeding unit includes a nitrogen storage tank 221, a nitrogen input pipeline 222, and a nitrogen output pipeline 223. The nitrogen input pipeline 222 is arranged at the lower part of the nitrogen storage tank 221, and the nitrogen output pipeline 223 is arranged at the upper part of the nitrogen storage tank 221 and connected to the cylinder cleaning pipeline unit.

[0058] A nitrogen shut-off valve and a check valve are provided on the nitrogen input pipeline 222 to adjust the input flow rate of nitrogen, and a nitrogen shut-off valve is provided on the nitrogen output pipeline 223 to adjust the output flow rate of nitrogen.

[0059] Further preferably, two groups of nitrogen supply units can be provided, one group for directly supplying gas to the cylinder for cleaning, and the other group for supplying gas to the ultrapure water supply unit or the pneumatic valve to meet different usage requirements.

[0060] (2) Cylinder cleaning pipeline unit: used to deliver the cleaning medium delivered by the cleaning medium supply unit into the cylinder, and to deliver the cleaned waste to the waste output unit.

[0061] One special steel cylinder corresponds to a set of steel cylinder cleaning pipeline units, and the cleaning agent, pure water and nitrogen used in the cleaning process are all transported separately and independently, which can effectively avoid cross-contamination of metal particles, etc. caused by the recycling of cleaning agents when cleaning cylinders of different products at the same time.

[0062] The steel cylinder cleaning pipeline unit includes a cleaning medium access pipe 31, a cleaning agent inlet 32, an ultrapure water inlet 33, a nitrogen inlet 34, a cleaning input pipe 35, a cleaning output pipe 36, a liquid level detection component, an exhaust gas pipe 37, a waste liquid pipe 38, a waste agent outlet 39, a waste water outlet 310, and a direct water outlet 311. The cleaning medium access pipe 31 is provided with a cleaning agent inlet 32, an ultrapure water inlet 33, and a nitrogen inlet 34, so as to independently receive the cleaning agent, ultrapure water and nitrogen delivered by the cleaning medium feeding unit. One end of the cleaning input pipe 35 is connected to the cleaning medium access pipe 31, and the other end is connected to the interface (liquid inlet) on the steel cylinder 1 to deliver the cleaning medium into the steel cylinder 1. A stop valve is provided on the cleaning input pipe 35. Among them, the cleaning input pipe 35 can be manually connected to the steel cylinder to match a variety of different models of interfaces.

[0063] One end of the cleaning output pipe 36 passes through the drain port on the steel cylinder 1 and extends to the bottom of the steel cylinder 1, and the other end is located outside the steel cylinder 1 and is connected to the liquid level detection component, and the liquid level detection component is respectively connected to the exhaust gas pipe 37 and the waste liquid pipe 38. The waste liquid pipe 38 is provided with a waste agent outlet 39, a waste water outlet 310, and a direct water outlet 311 to discharge the waste liquid generated after the steel cylinder 1 is cleaned.

[0064] Since the diameter of the pipe on the ALD special steel cylinder 1 is relatively small, it is difficult to judge whether the waste liquid in the steel cylinder is completely emptied by human eyes or existing detection devices. Therefore, a liquid level detection component is used to accurately detect the liquid level of the steel cylinder. The liquid level detection component includes a U-shaped detection pipeline 301 connected to the cleaning output pipe 36, the exhaust gas pipe 37 and the waste liquid pipe 38. That is, an inverted U-shaped hard pipeline is connected to the cleaning output pipe 36 to form a U-shaped water trap with the horizontally arranged waste liquid pipe 38. A drop is created in the detection pipe 301 to detect whether there is a liquid level, and a low liquid level switch LS0101L302 is set at the upstream (A) position of the U-shaped detection pipe 301, and a high liquid level switch LS0101H303 is set at the downstream (B) position of the U-shaped detection pipe. A first valve body 304 is set on the U-shaped detection pipe upstream of the low liquid level switch 302, and a second valve body 305 is set on the U-shaped detection pipe downstream of the high liquid level switch 303, so as to more accurately detect whether there is residual liquid in the cylinder:

[0065] When liquid starts to be fed, the feed valve on the corresponding medium delivery pipeline, the first valve body 304 and the exhaust valve on the exhaust pipe 37 are opened, and other valves are closed. When the cylinder 1 is filled with liquid and the overflow of the cleaning output pipe 36 is detected by the high liquid level switch 303, the feed valve is automatically closed;

[0066] When nitrogen is used to pressurize the material and discharge the liquid, open the air inlet valve on the nitrogen output pipeline 223, the first valve body 304 and the corresponding discharge valve on the waste liquid discharge pipe 38 to open the corresponding liquid outlet, and close other valves. When the low liquid level switch 302 does not detect the waste liquid level, it means that all the waste liquid in the cylinder 1 has been emptied, and close the air inlet valve and the discharge valve.

[0067] The liquid level detection component improves the accuracy of liquid level detection, thereby ensuring that the entire cleaning process is fully automated without the need for human intervention, and can ensure a positive pressure environment for the cleaning process system, avoiding the introduction of air particle contamination, and improving the cleaning effect of the special steel cylinder 1.

[0068] Further preferably, the cleaning medium access pipe 31 is provided with a plurality of spare liquid / gas inlets, and the waste liquid discharge pipe 38 is provided with a plurality of spare liquid outlets, so as to meet different production lines and production requirements.

[0069] (3) Ultrasonic cleaning unit: used to generate ultrasonic waves to clean the cylinders with cleaning agents and ultrapure water, thereby improving the cleaning efficiency and quality.

[0070] The ultrasonic cleaning unit includes an ultrasonic cleaning pool 4, in which multiple cylinders can be placed at one time, so that the cylinders to be cleaned are fully in contact with the ultrasonic medium in the ultrasonic cleaning pool 4 (the cylinder bodies are immersed). The ultrasonic cleaning pool 4 can adopt an existing ultrasonic pool, and this case does not involve any improvement thereto.

[0071] Further preferably, a fixing frame for fixing the steel cylinder is provided in or above the ultrasonic cleaning tank 4 to prevent the steel cylinder from tipping over. When the fixing frame is located at the top, the steel cylinder cleaning pipeline unit can be installed on the fixing frame to facilitate connection with the steel cylinder. Alternatively, the steel cylinder can be directly hoisted on the existing conveying flow line, and when the steel cylinder is sent to the top of the ultrasonic cleaning tank 4, the steel cylinder is lowered into the ultrasonic cleaning tank 4.

[0072] (4) Waste output unit: used to output and collect waste gas and waste liquid generated after cylinder cleaning.

[0073] The waste output unit includes a waste gas buffer box 51 , a waste acid (liquid) storage tank 52 , a waste water storage tank 53 , a direct discharge water storage tank 54 , a waste liquid input pipeline 55 , a waste liquid transfer output pipeline 56 , and a mobile waste liquid barrel 57 .

[0074] The waste gas buffer box 51 is provided with multiple air inlets, and one air inlet is connected to an exhaust port in a group of cylinder cleaning pipeline units through a pipe to discharge and store the waste gas generated during the cleaning process in the waste gas buffer box 51. The waste gas buffer box 51 is provided with one or more exhaust ports.

[0075] The waste acid storage tank 52 is connected to the waste agent outlet 39 in the cylinder cleaning pipeline unit through the waste liquid input pipe 55 to receive and store the waste cleaning agent discharged after cleaning the cylinder 1. The waste water storage tank 53 is connected to the waste water outlet 310 in the cylinder cleaning pipeline unit through the waste liquid input pipe 55 to receive and store the waste water discharged after cleaning the cylinder 1. The direct drainage storage tank 54 is connected to the direct drainage outlet 311 in the cylinder cleaning pipeline unit through the waste liquid input pipe 55 to receive and store the direct drainage water discharged after cleaning the cylinder 1.

[0076] Further preferably, a liquid level sensor is provided in the direct drainage storage tank 54, and a submersible sewage pump 58 is provided at the bottom thereof, and the output end of the submersible sewage pump is connected to the nearest wastewater discharge pipeline.

[0077] The waste acid storage tank 52 and the waste water storage tank 53 are connected with a waste liquid transfer output pipeline 56, and the waste liquid transfer output pipeline 56 is connected with a mobile waste liquid barrel 57 to transfer the waste acid and waste water in the storage tank for centralized treatment.

[0078] Further preferably, the waste liquid transfer output pipeline 56 is provided with regulating devices such as a ball valve, a water pump, a stop valve, a pressure gauge, etc.

[0079] Further preferably, the mobile waste liquid barrel 57 is equipped with a liquid level sensor.

[0080] The beneficial effects of the automatic cleaning system for ALD special steel cylinders of the present invention are:

[0081] 1. Automatic cleaning can be performed without human intervention during the entire cleaning process, which not only improves the cleaning efficiency of special steel cylinders, but also reduces the potential risk of personnel contact during cleaning and improves the safety of operation;

[0082] 2. During cleaning, it can ensure that the cylinder always maintains a positive pressure environment, avoiding the introduction of air and particle pollution, and improving the cleaning effect of special cylinders;

[0083] 3. The automatic circulation and rotation backup system for liquid supply and drainage improves the reliability of the public system.

[0084] 4. The one-way flow cleaning medium feeding unit is adopted to avoid the problem of cross contamination of metal particles in different product cylinders caused by circulating cleaning agents, and improve the cleaning quality;

[0085] 5. Modular design, strong expandability, high compatibility and good flexibility.

[0086] The above descriptions are merely embodiments of the present invention and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. An automatic cleaning system for ALD special steel cylinders, characterized in that: include: Cleaning medium feeding unit, cylinder cleaning pipeline unit, ultrasonic cleaning unit, waste output unit, The cleaning medium feeding unit includes a cleaning agent feeding unit, an ultrapure water feeding unit and a nitrogen feeding unit, so as to independently convey different cleaning media; The cleaning agent feeding unit comprises a cleaning agent storage barrel, a cleaning agent output return pipe, and a steel cylinder cleaning agent outlet. One end of the cleaning agent output return pipe is connected to the bottom of the cleaning agent storage barrel, and the other end is connected to the top of the cleaning agent storage barrel. The cleaning agent output return pipe is provided with a plurality of steel cylinder cleaning agent outlets, and the steel cylinder cleaning agent outlet is connected to the steel cylinder cleaning pipeline unit to transport cleaning agent into the steel cylinder. The ultrapure water feeding unit comprises an ultrapure water tank, an ultrapure water input pipeline, and an ultrapure water output pipeline, wherein the ultrapure water input pipeline extends to the bottom of the ultrapure water tank, and the ultrapure water output pipeline is connected to the bottom of the ultrapure water tank, and an ultraviolet sterilization lamp and a filter are arranged on the ultrapure water output from the ultrapure water tank to perform ultraviolet sterilization and filtration on the ultrapure water; The nitrogen feeding unit comprises a nitrogen storage tank, a nitrogen input pipeline, and a nitrogen output pipeline, wherein the nitrogen input pipeline is arranged at the lower part of the nitrogen storage tank, and the nitrogen output pipeline is arranged at the upper part of the nitrogen storage tank and connected to the cylinder cleaning pipeline unit; The cleaning medium supply unit is connected to a plurality of the steel cylinder cleaning pipeline units, and a group of the steel cylinder cleaning pipeline units is correspondingly connected to a special steel cylinder, so that the cleaning medium output by the cleaning medium supply unit is delivered to the steel cylinder for cleaning, and the waste after cleaning is delivered to the waste output unit, so as to avoid internal cross contamination caused by the steel cylinders of different products sharing the cleaning agent, and to ensure that the steel cylinder maintains a positive pressure environment during the fully sealed cleaning process to avoid the introduction of external contamination; The steel cylinder cleaning pipeline unit comprises a cleaning medium access pipe, a cleaning agent inlet, an ultrapure water inlet, a nitrogen inlet, a cleaning input pipe, a cleaning output pipe, a liquid level detection component, an exhaust gas pipe, a waste liquid pipe, a waste agent outlet, a waste water outlet, and a direct discharge outlet. The cleaning medium access pipe is provided with the cleaning agent inlet, the ultrapure water inlet, and the nitrogen inlet for independently receiving and conveying the cleaning medium. The cleaning input pipe and the cleaning output pipe are provided with stop valves. One end of the cleaning input pipe is connected to the cleaning medium. The cleaning outlet pipe is connected to the inlet pipe, and the other end is connected to the interface on the steel cylinder to transport the cleaning medium into the steel cylinder. One end of the cleaning outlet pipe extends to the bottom of the steel cylinder, and the other end is connected to the liquid level detection component outside the steel cylinder. The liquid level detection component is respectively connected to the exhaust gas pipe and the waste liquid pipe. The exhaust gas pipe is provided with an exhaust valve. The waste liquid pipe is provided with the waste agent outlet, the waste water outlet, the direct drainage outlet and the drain valves corresponding to the outlets to discharge the waste liquid generated after the steel cylinder is cleaned. The liquid level detection assembly includes a U-shaped detection pipe connected to the cleaning output pipe, the exhaust gas pipe and the exhaust liquid pipe, so as to create a drop through the U-shaped detection pipe to accurately detect whether there is a liquid level in the cylinder, and a low liquid level switch is arranged at an upstream position close to the cylinder on the U-shaped detection pipe, and a high liquid level switch is arranged at a downstream position away from the cylinder on the U-shaped detection pipe, a first valve body is arranged on the U-shaped detection pipe upstream of the low liquid level switch, and a second valve body is arranged on the U-shaped detection pipe downstream of the high liquid level switch; The waste output unit includes a waste gas buffer box, a waste liquid storage tank, a waste water storage tank, a direct drainage storage tank, a waste liquid input pipeline, a waste liquid transfer output pipeline, and a mobile waste liquid barrel. The waste gas buffer box is provided with a plurality of air inlets corresponding to the cylinder cleaning pipeline unit to discharge the waste gas generated during the cleaning process into and store it in the waste gas buffer box. The waste gas buffer box is provided with one or more exhaust ports. The waste liquid storage tank is connected to the waste agent outlet through the waste liquid input pipeline to receive and store the waste gas discharged after cleaning the cylinder. The waste cleaning agent discharged, the wastewater storage tank is connected to the wastewater outlet through the waste liquid input pipe to receive and store the wastewater discharged after cleaning the cylinder, the straight water discharge storage tank is connected to the straight water discharge outlet through the waste liquid input pipe to receive and store the straight water discharged after cleaning the cylinder, the waste liquid storage tank and the wastewater storage tank are connected with the waste liquid transfer output pipe, and the waste liquid transfer output pipe is connected to the mobile waste liquid barrel to transport the waste liquid and wastewater in the storage tank out for centralized treatment.

2. The ALD special steel cylinder automatic cleaning system according to claim 1 is characterized in that: When the cleaning medium starts to be input into the steel cylinder, the feed valve on the corresponding feeding unit, the first valve body and the exhaust valve on the exhaust pipe are opened, and other valves are closed. When the steel cylinder is filled with liquid and the overflow of the cleaning output pipe enters the U-shaped detection pipe and is detected by the high liquid level switch, the feed valve is automatically closed; When using nitrogen to pressurize the material and discharge the liquid, open the air inlet valve on the nitrogen output pipeline, the first valve body and the corresponding discharge valve on the waste liquid discharge pipe to open the corresponding liquid outlet, and close other valves. When the low liquid level switch does not detect the liquid level, it means that all the waste liquid in the cylinder has been drained, and close the air inlet valve and the discharge valve.

3. The ALD special steel cylinder automatic cleaning system according to claim 1 is characterized in that: The nitrogen inlet pipeline is connected to the upper part of the ultrapure water tank to transport nitrogen into the ultrapure water tank for material pressing and drainage. The bottom of the ultrapure water tank is provided with a nitrogen discharge pipeline to discharge the nitrogen in the ultrapure water tank.

4. The ALD special steel cylinder automatic cleaning system according to claim 1 is characterized in that: A water pump, a ball valve, a stop valve and a flow meter are connected to the cleaning agent output return pipe upstream of the cleaning agent outlet of the steel cylinder, and a pressure gauge and a ball valve are connected to the cleaning agent output return pipe downstream of the cleaning agent outlet of the steel cylinder.

5. The ALD special steel cylinder automatic cleaning system according to claim 1 is characterized in that: The cleaning agent storage barrel is connected with a pure water inlet pipe, and the inlet end of the pure water inlet pipe is connected to an ultrapure water supply unit or an external pure water equipment pipeline to transport pure water into the cleaning agent storage barrel.

6. The ALD special steel cylinder automatic cleaning system according to claim 1, characterized in that: The ultrapure water output pipeline is provided with a ball valve, a water pump, a regulating valve, a cut-off valve, a flow meter and a pressure gauge.

7. The ALD special steel cylinder automatic cleaning system according to claim 1, characterized in that: The ultrapure water tank is connected with a pure water reflux pipe, and the pure water reflux pipe extends to the bottom of the ultrapure water tank.

8. The ALD special steel cylinder automatic cleaning system according to claim 1, characterized in that: Liquid level sensors are arranged in the ultrapure water tank, the cleaning agent storage barrel, the direct drainage storage tank, and the mobile waste liquid barrel.

9. The automatic cleaning system for ALD special steel cylinders according to claim 1, characterized in that: The cleaning medium access pipe is provided with a plurality of spare liquid / gas inlets, and the waste liquid discharge pipe is provided with a plurality of spare liquid outlets.

10. The ALD special steel cylinder automatic cleaning system according to claim 1, characterized in that: The ultrasonic cleaning unit includes an ultrasonic cleaning tank to promote the cleaning of the cylinder by ultrasonic waves.

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