Shielding mold and positioning device for ceramic ring meltallizing

Abstract

The invention discloses a shielding mold and a positioning device for ceramic ring meltallizing, a ceramic ring comprises a ceramic ring body, the ceramic ring body is sequentially provided with an arc-shaped part, a step part and an L-shaped part from inside to outside, the arc-shaped part is composed of a top surface part and an arc surface part, the joint of the top surface part and the arc surface part is a meltallizing inner boundary, and the arc surface part is an L-shaped part. The L-shaped part is composed of a horizontal part and a vertical part, a concave ring groove is formed in the top of the vertical part, and a meltallizing outer boundary is arranged at the joint of the side, away from the arc-shaped part, of the concave ring groove and the top face of the vertical part; the outer side wall of the inner boundary shielding mold is provided with a first step matched with the top face part and the side wall, within the meltallizing inner boundary, of the arc-shaped part, and the inner side wall of the outer boundary shielding mold is provided with a second step matched with the top face and the side wall, outside the meltallizing outer boundary, of the L-shaped part. It can be guaranteed that the meltallizing boundary of the ceramic ring is clear and accurate, and the yield of the ceramic ring is guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of surface spraying of ceramic rings, and in particular to a shielding mold and a positioning device used for the spraying of ceramic rings. Background Art

[0002] Spray coating is a surface thermal spraying technology. After a series of pre-treatments such as sandblasting and cleaning, the surface of the substrate is sprayed with molten spray coating droplets through an airflow. The mechanical bonding force of the coating cooling and spreading is used to cover the surface of the substrate with a relatively uniform and rough coating.

[0003] The semiconductor physical vapor deposition (sputter) process will adsorb a certain thickness of metal, oxide, organic matter and other sputtering materials on the surface of the parts. In order to increase the adsorption capacity of the parts to these attachments and reduce the film peeling (peeling) and particle abnormalities in the later stage of the process, the melting spraying treatment will be used in the cleaning and regeneration process of the parts. ARC melting spraying is arc spraying. Its principle is to use two aluminum wires with positive and negative charges respectively, which contact each other to generate an arc. The high temperature of the arc instantly melts the wires, and then sprays them onto the surface of the substrate after being atomized by compressed air.

[0004] Ceramic rings are a commonly used material in semiconductor reaction chambers. The control of dust particles in semiconductor reaction chambers is very strict. Therefore, before using ceramic rings, in addition to high-quality cleaning, they must also be covered with a layer of aluminum spraying layer by spraying to strengthen the control of dust particles.

[0005] like Figure 1 As shown, the ceramic ring includes a ceramic ring body 1, which is provided with an arc portion 11, a step portion 12 and an L-shaped portion 13 from the inside to the outside, the arc portion 11 is composed of a top surface portion and an arc surface portion, and the junction of the top surface portion and the arc surface portion is a spraying inner boundary, the L-shaped portion 13 is composed of a horizontal portion and a vertical portion, a concave annular groove is provided on the top of the vertical portion, and the junction of the side of the concave annular groove away from the arc portion 11 and the top surface of the vertical portion is a spraying outer boundary, and the area between the spraying inner boundary and the spraying outer boundary is a spraying area, and the spraying area of ​​the ceramic ring body 1 needs to be sprayed; Therefore, the ceramic ring does not need to be fully sprayed with aluminum. In order to prevent the spraying of parts that should not be sprayed during the spraying process, resulting in unnecessary repeated operations, and in order to ensure the quality of the ceramic ring, the areas that do not need spraying must be masked.

[0006] The traditional masking method is to use spray tape, which is attached to the area of ​​the ceramic ring that does not need spraying as a way of isolation. Spray tape has the characteristics of low viscosity, impact resistance, and high temperature resistance, and is suitable for spraying, but this method has the following disadvantages: 1. Since the adhesive tape has low viscosity, it may be blown away during the spraying process, resulting in loss of shielding effect and contamination of the non-sprayed parts, resulting in repeated operations; 2. The tape masking operation is all done manually. Due to the complex internal structure of the ceramic ring, manual masking operation takes a lot of time and cannot be done in large quantities in a short time, resulting in low efficiency in manpower utilization; 3. Although the spray tape has low viscosity, there will still be residual adhesive when the tape is removed. If the subsequent removal operation is not complete, arc effect is likely to occur when using ceramic rings, which will cause the dust particles to lose control; 4. The material of the ceramic ring is ceramic, which is much weaker than that of metal. The spraying operation uses high temperature and high pressure to spray aluminum powder on the ceramic ring. Even if the shielding area is protected by spraying tape, the ceramic ring cannot withstand the high temperature and high pressure of the spraying operation. The ceramic ring is often damaged during the spraying operation, and the safety of the ceramic ring during the spraying operation cannot be guaranteed; 5. Since the tape is easily blown away and deformed, once the tape is blown away during the spraying process, it is easy to cause the spraying boundary of the ceramic ring to be unclear and inaccurate, and the yield rate of the ceramic ring cannot be guaranteed; 6. During the spraying process, there will be many tip grains on the surface of the sprayed layer, which is what we often call burrs. When the tip grains adsorb the film layer, due to the small contact area, the film layer molecules tend to gather at the tip. In severe cases, it will cause excessive particles or abnormal tip arcing during the use of the equipment, affecting the normal service life of the components. Therefore, after the ceramic ring is sprayed, the surface of the sprayed layer will be deburred. If the spraying boundary is not clear and accurate, it will lead to too many burrs. The operator needs to spend a lot of time on deburring (including inspection and trimming), which increases the labor intensity of the operator.

[0007] In order to prevent the ceramic ring from moving during the spraying process, the ceramic ring will be limited by a positioning device. The traditional positioning device directly contacts the outer wall of the ceramic ring. Since the ceramic ring is made of ceramic, direct contact with the positioning device may cause wear on the surface of the ceramic ring and affect the service life of the ceramic ring.

[0008] Therefore, the applicant provides a shielding mold and a positioning device for use in the spraying of ceramic rings to solve the above-mentioned problems. The shielding mold is used to shield the areas of the ceramic ring that do not require spraying, thereby ensuring the safety of the ceramic ring and the clarity and accuracy of the spraying boundaries. The positioning device is contacted with the shielding mold to limit the ceramic ring, thereby avoiding direct contact between the positioning device and the ceramic ring, thereby increasing the service life of the ceramic ring and ensuring the yield rate of the ceramic ring. Summary of the invention

[0009] In view of the deficiencies in the prior art, the present invention aims to provide a shielding mold and a positioning device for ceramic ring spraying.

[0010] In order to achieve the above object, the present invention adopts the following technical solutions: A shielding mold for ceramic ring during spraying, the ceramic ring comprises a ceramic ring body, the ceramic ring body is provided with an arc portion, a step portion and an L-shaped portion in sequence from the inside to the outside, the arc portion is composed of a top surface portion and an arc surface portion, the junction of the top surface portion and the arc surface portion is the spraying inner boundary, the L-shaped portion is composed of a horizontal portion and a vertical portion, a concave annular groove is provided on the top of the vertical portion, the junction of the side of the concave annular groove away from the arc portion and the top surface of the vertical portion is the spraying outer boundary, the area between the spraying inner boundary and the spraying outer boundary is the spraying area, the shielding mold comprises an inner boundary shielding mold and an outer boundary shielding mold in the shape of an annulus, the outer side wall of the inner boundary shielding mold is provided with a first step matching the top surface portion and the side wall within the spraying inner boundary on the arc portion, the inner side wall of the inner boundary shielding mold is a vertical surface, the inner side wall of the outer boundary shielding mold is provided with a second step matching the top surface and the side wall outside the spraying outer boundary on the L-shaped portion, and the outer side wall of the outer boundary shielding mold is a vertical surface; A plurality of upwardly protruding positioning blocks are evenly arranged on the arc portion of the ceramic ring body along the circumferential direction, and a plurality of positioning grooves matching the positioning blocks are evenly arranged on the outer side wall of the inner boundary shielding mold along the circumferential direction.

[0011] Furthermore, the shielding mold is made of LG mold steel.

[0012] A positioning device for ceramic rings during spraying, comprising any one of the above-mentioned shielding molds for ceramic rings during spraying, the positioning device comprising a protection box, a motor installed in the protection box, a rotating shaft installed on the output end of the motor, the rotating shaft passes through the top of the protection box, and extends to the top of the protection box and is rotatably connected to the bottom of a rotating disk, a plurality of placement tables are evenly arranged on the rotating disk along the circumference, a plurality of inner linear slide grooves are evenly opened along the circumference near the center of the rotating disk, a plurality of outer linear slide grooves are evenly opened along the circumference away from the center of the rotating disk, and the inner linear slide The groove and the outer linear slide are arranged at intervals with each other, and an inner rotating component is installed below the rotating disk and outside the rotating shaft, and an inner positioning component is slidably provided in the inner linear slide and slidably cooperates with the inner rotating component. An outer rotating component is installed above the protective box and outside the rotating shaft, and the outer rotating component is located below the inner rotating component, and an outer positioning component is slidably provided in the outer linear slide and slidably cooperates with the outer rotating component. Clamping components that can be mutually engaged with the inner rotating component and the outer rotating component are installed on both sides of the rotating shaft, and a connecting component that can be interconnected with the rotating shaft is installed at the bottom of the rotating disk.

[0013] Furthermore, the inner rotating component includes an inner annular plate located outside the rotating shaft, a first sleeve is provided on the top of the inner annular plate, and the first sleeve is rotatably connected to the bottom of the rotating disk, a plurality of inner arc plates are evenly arranged along the circumferential direction on the outer wall of the inner annular plate, an inner arc groove is opened on the inner arc plate, and inner limit grooves connected to the inner arc groove are provided on both sides of the inner arc plate.

[0014] Furthermore, the inner positioning assembly includes an inner moving rod slidably arranged in an inner linear slide groove, an inner positioning plate is installed on the top of the inner moving rod, the bottom of the inner moving rod extends into the inner arc groove, and inner limit blocks slidingly matched with the inner limit groove are installed on both sides of the lower part of the inner moving rod.

[0015] Further, the outer rotating assembly includes an outer ring plate located outside the rotating shaft, a second sleeve is provided at the bottom of the outer ring plate, and the second sleeve is rotatably connected to the top of the protection box, a plurality of outer arc plates are evenly provided on the outer side wall of the outer ring plate along the circumferential direction, an outer arc groove is provided on the outer arc plate, and outer limit grooves communicating with the outer arc groove are provided on both sides of the outer arc plate; Wherein, the arc deflection directions of the outer arc plate and the inner arc plate are opposite; A plurality of clamping grooves are evenly arranged on the inner side walls of the outer annular plate and the inner annular plate along the circumferential direction.

[0016] Furthermore, the external positioning assembly includes an external moving rod slidably arranged in an external linear slide groove, an external positioning plate is installed on the top of the external moving rod, the bottom of the external moving rod extends into the external arc groove, and external limit blocks slidingly cooperating with the external arc groove are installed on both sides of the lower part of the external moving rod.

[0017] Furthermore, the clamping assembly includes a mounting tube installed on both sides of the rotating shaft, a movable groove is provided in the mounting tube, a slider is slidably provided in the movable groove, a sliding rod is installed on one side of the slider, and a clamping block that engages with the clamping groove is installed on one end of the sliding rod extending to the outside of the mounting tube, and a spring is connected between the other side of the slider and the inner wall of the mounting tube.

[0018] Furthermore, an annular groove is provided on the upper portion of the rotating shaft, the connecting assembly is located in the first sleeve, and the connecting assembly can clamp the rotating shaft through the annular groove.

[0019] Furthermore, the connecting assembly includes a connecting rod installed at the bottom of the rotating disk, a telescopic member is installed on the connecting rod on the side facing the rotating shaft, and an arc-shaped clamping block capable of extending into the annular groove is installed on the telescopic end of the telescopic member.

[0020] Compared with the prior art, the present invention provides a shielding mold and a positioning device for ceramic ring spraying, which has the following beneficial effects: 1. The present invention will not cause the tape to be blown away during the spraying process, and will not generate repeated operations. It can ensure that the spraying boundary of the ceramic ring is clear and accurate, ensuring the yield rate of the ceramic ring. Since the spraying boundary of the ceramic ring is clear and accurate, the time for subsequent deburring operations will be greatly reduced (from the original deburring time of a single ceramic ring of 20 minutes to 5 minutes), which greatly reduces the labor intensity of the operators; 2. The masking mold of the present invention can be directly assembled with the ceramic ring, without the need to stick the spray tape one by one in the area for masking, which greatly reduces the working time of the operators (from the original single ceramic ring assembly time of 1 hour to 5 minutes), improves the working efficiency of the operators, and increases the production efficiency; 3. The present invention adopts a hardware device shielding method to completely eliminate the doubt that the residual glue is not completely removed, greatly reducing the possibility of arc effect during use, which is obviously helpful for maintaining the stability of production equipment; 4. The present invention adopts a hardware device shielding method to protect the ceramic ring, thereby reducing the damage to the ceramic ring caused by the high temperature and high pressure external force during the spraying process, and ensuring the safety of the ceramic ring during the spraying operation; 5. The masking mold of the present invention adopts a hardware device, the masking mold will not be deformed and can be reused; 6. After the ceramic ring of the present invention is installed with the shielding mold, the positioning device contacts the shielding mold to limit the ceramic ring, thereby avoiding direct contact between the positioning device and the ceramic ring, increasing the service life of the ceramic ring and ensuring the yield rate of the ceramic ring. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the cross-sectional structure of the ceramic ring body of the present invention; Figure 2 It is a schematic diagram of the structure of the ceramic ring body and the shielding mold of the present invention; Figure 3 It is a schematic cross-sectional structure diagram of the cooperation between the ceramic ring body and the shielding mold of the present invention; Figure 4 yes Figure 3 A schematic diagram of the enlarged structure at A in the middle; Figure 5 It is a schematic diagram of the rendering structure of the ceramic ring body and the masking mold of the present invention; Figure 6 is a schematic diagram of the front cross-sectional structure of the positioning device of the present invention; Figure 7 is a front view structural schematic diagram of the positioning device of the present invention; Figure 8 It is a schematic diagram of the top view of the rotating disk of the present invention; Fig. 9It is a schematic diagram of the top view of the structure of the inner rotating assembly of the present invention; Fig.10 yes Fig. 9 A schematic diagram of the enlarged structure at B in the middle; Fig.11 It is a schematic diagram of the top view of the structure of the outer rotating assembly of the present invention; Fig.12 is a schematic diagram of the top view of the connecting assembly of the present invention; Fig.13 It is a schematic diagram of the structure of the positioning component in the present invention; Fig.14 It is a structural schematic diagram of the external positioning component of the present invention.

[0022] Markings in the figure: 1. Ceramic ring body; 11. Arc-shaped portion; 12. Step portion; 13. L-shaped portion; 14. Clamping block; 2. Inner boundary shielding mold; 21. First step; 22. Clamping groove; 3. Outer boundary shielding mold; 31. Second step; 4. Protective box; 5. Motor; 6. Rotating shaft; 7. Rotating disk; 8. Placement table; 9. Inner linear slide; 10. Outer linear slide; 15. Inner rotating assembly; 151. Inner annular plate; 152. First sleeve; 153. Inner arc-shaped plate; 154. Inner arc groove; 155. Inner limit groove; 16. Inner positioning assembly; 161. Inner moving rod; 16 2. Inner positioning plate; 163. Inner limiting block; 17. Outer rotating assembly; 171. Outer annular plate; 172. Second sleeve; 173. Outer arc plate; 174. Outer arc groove; 175. Outer limiting groove; 18. Outer positioning assembly; 181. Outer moving rod; 182. Outer positioning plate; 183. Outer limiting block; 19. Clamping assembly; 191. Mounting cylinder; 192. Movable groove; 193. Sliding block; 194. Sliding rod; 195. Clamping block; 196. Spring; 20. Connecting assembly; 201. Connecting rod; 202. Telescopic member; 203. Arc clamping block; 23. Clamping groove; 24. Ring groove. DETAILED DESCRIPTION

[0023] The present invention will be further described below in conjunction with the accompanying drawings and embodiments: The standard parts used in the present invention can all be purchased from the market, and special-shaped parts can be customized according to the instructions and the drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the prior art. Machinery, parts and equipment all adopt conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be described in detail here.

[0024] It should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0025] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] In the description of the present invention, “plurality” means two or more than two, unless otherwise clearly and specifically defined.

[0027] The embodiment of the present invention provides a shielding mold for ceramic ring spraying, referring to Figures 1 to 5 The ceramic ring comprises a ceramic ring body 1, which is provided with an arc portion 11, a step portion 12 and an L-shaped portion 13 from the inside to the outside, the arc portion 11 is composed of a top surface portion and an arc surface portion, the junction of the top surface portion and the arc surface portion is a spraying inner boundary, the L-shaped portion 13 is composed of a horizontal portion and a vertical portion, a concave annular groove is provided on the top of the vertical portion, the side of the concave annular groove away from the arc portion 11 and the junction of the top surface of the vertical portion is a spraying outer boundary, the area between the spraying inner boundary and the spraying outer boundary is a spraying area, the spraying area of ​​the ceramic ring body 1 needs to be sprayed, the shielding mold comprises an inner boundary shielding mold 2 in the shape of a circular ring and an outer boundary shielding mold Mold 3, the outer side wall of the inner boundary shielding mold 2 is provided with a first step 21 matching the top surface and side wall within the inner boundary of the arc portion 11, the inner side wall of the inner boundary shielding mold 2 is a vertical surface, the inner side wall of the outer boundary shielding mold 3 is provided with a second step 31 matching the top surface and side wall outside the outer boundary of the L-shaped portion 13, the outer side wall of the outer boundary shielding mold 3 is a vertical surface, the arc portion 11 of the ceramic ring body 1 is uniformly provided with a plurality of upwardly protruding locking blocks 14 along the circumferential direction, and the outer side wall of the inner boundary shielding mold 2 is uniformly provided with a plurality of locking grooves 22 matching the locking blocks 14 along the circumferential direction.

[0028] Specifically, the end of the outer wall of the inner boundary shielding mold 2 contacts the inner boundary of the spraying; the end of the inner wall of the outer boundary shielding mold 3 contacts the outer boundary of the spraying; the shape of the outer wall of the inner boundary shielding mold 2 and the inner wall of the outer boundary shielding mold 3 are matched accordingly according to the shape of the inner wall and the shape of the outer wall of the ceramic ring body 1; so that the sprayed inner boundary and the sprayed outer boundary are shielded completely and smoothly, without damage and burrs, and the overall shape and position accuracy is checked to be ≤0.05mm; the installation clearance of the installation reference of the inner boundary shielding mold 2 and the outer boundary shielding mold 3 is ≤0.05mm; in this embodiment, the number of the positioning blocks 14 is 5, and similarly, the number of the positioning grooves 22 is also 5, which are adjusted according to the actual manufactured ceramic ring body 1. Through the positioning cooperation of the positioning blocks 14 and the positioning grooves 22, when assembling the inner boundary shielding mold 2, the structural characteristics of the ceramic ring body 1 itself are utilized to realize the rapid positioning of the inner boundary shielding mold 2.

[0029] Finally, the ceramic ring body 1 with the masking mold installed is placed on the positioning device. After limiting the position, the spraying operation is carried out by a robot. During the spraying process, the positioning device rotates, thereby driving the ceramic ring body 1 to rotate, and the melt-spraying area of ​​the ceramic ring body 1 is evenly sprayed to ensure the spraying effect.

[0030] Reference Figures 1 to 5 In this embodiment, the shielding mold is made of LG mold steel.

[0031] Specifically, LG mold steel is a high-grade cold working mold steel. By changing the existing soft masking (such as tape or other soft masking materials) into a metal hard masking, the ceramic ring is protected, which reduces the damage to the ceramic ring caused by the external force of high temperature and high pressure during the spraying process, ensuring the safety of the ceramic ring during the spraying operation, and the masking mold will not be deformed and can be reused.

[0032] Reference Figures 6 to 14, a positioning device for ceramic ring during spraying, comprising any of the above-mentioned shielding molds for ceramic ring during spraying, the positioning device comprising a protection box 4, a motor 5 is installed in the protection box 4, a rotating shaft 6 is installed on the output end of the motor 5, the rotating shaft 6 passes through the top of the protection box 4, and extends to the top of the protection box 4 and is rotatably connected to the bottom of a rotating disk 7, a plurality of placement tables 8 are evenly arranged on the rotating disk 7 along the circumferential direction, a plurality of inner linear slide grooves 9 are evenly opened along the circumferential direction near the center of the rotating disk 7, a plurality of outer linear slide grooves 10 are evenly opened along the circumferential direction away from the center of the rotating disk 7, the inner linear slide grooves 9 and the outer linear slide grooves 10 are evenly opened, and the inner linear slide grooves 9 and the outer linear slide grooves 10 are evenly opened. They are arranged at intervals with each other, and an inner rotating component 15 is installed below the rotating disk 7 and outside the rotating shaft 6. An inner positioning component 16 that slides with the inner rotating component 15 is slidably provided in the inner linear slide groove 9. An outer rotating component 17 is installed above the protective box 4 and outside the rotating shaft 6. The outer rotating component 17 is located below the inner rotating component 15. An outer positioning component 18 that slides with the outer rotating component 17 is slidably provided in the outer linear slide groove 10. Clamping components 19 that can be mutually engaged with the inner rotating component 15 and the outer rotating component 17 are installed on both sides of the rotating shaft 6. A connecting component 20 that can be interconnected with the rotating shaft 6 is installed at the bottom of the rotating disk 7.

[0033] Specifically, the motor 5 is protected by the protection box 4 to prevent damage to the motor 5 caused by spraying; the motor 5 is preferably a servo motor, which is a prior art and will not be described in detail here; the rotating shaft 6 is vertically arranged, and the rotating shaft 6 is rotatably connected to the protection box 4; the rotating shaft 6 is rotatably connected to the rotating disk 7; in this embodiment, the placement table 8 is a rectangular parallelepiped, and there are 3 of them, which support the ceramic ring body 1; the cross-sections of the inner linear slide 9 and the outer linear slide 10 are both rectangular, and there are 3 of them, and the inner linear slide 9 and the outer linear slide 10 are mutually The interval setting is designed to prevent the inner positioning component 16 and the outer positioning component 18 from being in the same straight line, so that the inner rotating component 15 interferes with the outer positioning component 18; the inner rotating component 15 drives the inner positioning component 16 to slide in the inner linear slide groove 9, and contacts and resists the inner side wall of the inner boundary shielding mold 2, so as to prevent the positioning block 14 and the positioning groove 22 from being separated under the action of external force during the spraying process, resulting in unclear and inaccurate inner boundary of the spraying, and prevent the ceramic ring body 1 from moving during the spraying process; the outer rotating component 17 drives the inner positioning component 16 to slide in the inner linear slide groove 9, and contacts and resists the inner side wall of the inner boundary shielding mold 2, so as to prevent the positioning block 14 and the positioning groove 22 from being separated under the action of external force during the spraying process, so as to prevent the ceramic ring body 1 from moving during the spraying process. The outer positioning component 18 slides in the outer linear slide groove 10, contacts and resists the outer side wall of the outer boundary shielding mold 3, limits the ceramic ring body 1, prevents the ceramic ring body 1 from moving during the spraying process, and prevents the outer boundary shielding mold 3 from moving under the action of external force, resulting in unclear and inaccurate spraying outer boundary; the inner boundary shielding mold 2 and the outer boundary shielding mold 3 are positioned simultaneously by the inner positioning component 16 and the outer positioning component 18, thereby improving the positioning effect and ensuring that the spraying boundary of the ceramic ring body 1 (referring to the spraying inner boundary and the spraying inner boundary) is clear and accurate. The outer boundary) is clear and accurate; the clamping assembly 19 can be clamped with the inner rotating assembly 15 and the outer rotating assembly 17. When the rotating shaft 6 rotates, the inner rotating assembly 15 and the outer rotating assembly 17 can be driven to rotate at the same time, thereby driving the inner positioning assembly 16 and the outer positioning assembly 18 to move, and the inner boundary masking mold 2 and the outer boundary masking mold 3 are positioned; the connecting assembly 20 can be connected to the rotating shaft 6. When the rotating shaft 6 rotates, it can drive the rotating disk 7 to rotate, thereby driving the ceramic ring body 1 to rotate, thereby ensuring the spraying effect.

[0034] Reference Fig. 9 In this embodiment, the inner rotating component 15 includes an inner annular plate 151 located outside the rotating shaft 6, a first sleeve 152 is provided on the top of the inner annular plate 151, and the first sleeve 152 is rotatably connected to the bottom of the rotating disk 7, a plurality of inner arc plates 153 are evenly arranged on the outer wall of the inner annular plate 151 along the circumferential direction, an inner arc groove 154 is opened on the inner arc plate 153, and inner limit grooves 155 connected to the inner arc groove 154 are provided on both sides of the inner arc plate 153.

[0035] Specifically, refer to Fig. 9In this embodiment, the number of the inner arc plates 153 is 3, which is consistent with the number of the inner linear slide grooves 9; similarly, the number of the inner arc grooves 154 is also 3; the inner limit grooves 155 run through both sides of the inner arc plate 153.

[0036] Reference Fig. 9 and Fig.13 In this embodiment, the inner positioning assembly 16 includes an inner moving rod 161 slidably arranged in the inner linear slide groove 9, an inner positioning plate 162 is installed on the top of the inner moving rod 161, the bottom of the inner moving rod 161 extends into the inner arc groove 154, and inner limit blocks 163 that slide with the inner limit groove 155 are installed on both sides of the lower part of the inner moving rod 161.

[0037] Specifically, the inner moving rod 161 is arranged vertically; the inner positioning assembly 16 is provided with 3 groups, namely, one group of inner positioning assembly 16 corresponds to an inner linear slide groove 9 and an inner arc plate 153; the bottom surface of the inner positioning plate 162 is flush with the top surface of the placement table 8, and the inner positioning plate 162 contacts and resists the inner side wall of the inner boundary shielding mold 2, and the side of the inner positioning plate 162 close to the inner boundary shielding mold 2 is an outwardly convex arc, which reduces the damage to the inner boundary shielding mold 2; the inner moving rod 161 is slidably arranged between the inner moving rod 161 and the inner arc groove 154; through the sliding cooperation between the inner limit block 163 and the inner limit groove 155, the movement of the inner moving rod 161 is more stable.

[0038] Reference Fig.11 In this embodiment, the outer rotating assembly 17 includes an outer annular plate 171 located outside the rotating shaft 6, a second sleeve 172 is provided at the bottom of the outer annular plate 171, and the second sleeve 172 is rotatably connected to the top of the protection box 4, and a plurality of outer arc plates 173 are evenly provided on the outer wall of the outer annular plate 171 along the circumferential direction, and an outer arc groove 174 is opened on the outer arc plate 173, and outer limit grooves 175 connected to the outer arc groove 174 are provided on both sides of the outer arc plate 173; Specifically, refer to Fig.10 and Fig.11 In this embodiment, the number of the outer arc plates 173 is 3, which is consistent with the number of the outer linear slide grooves 10; similarly, the number of the outer arc grooves 174 is also 3; the outer limiting grooves 175 run through both sides of the outer arc plate 173.

[0039] The outer arc plate 173 and the inner arc plate 153 have arc deflection directions opposite to each other; A plurality of engaging grooves 23 are evenly disposed on the inner side walls of the outer annular plate 171 and the inner annular plate 151 along the circumferential direction.

[0040] Specifically, the number of the clamping grooves 23 is 4-8, and corresponding to the clamping assembly 19, the number of the clamping grooves 23 on the outer annular plate 171 and the number of the clamping grooves 23 on the inner annular plate 151 are 2-4 respectively.

[0041] Reference Fig.11 and Fig.14 In this embodiment, the external positioning assembly 18 includes an external moving rod 181 slidably arranged in the external linear slide groove 10, an external positioning plate 182 is installed on the top of the external moving rod 181, the bottom of the external moving rod 181 extends into the outer arc groove 174, and external limit blocks 183 that slide and cooperate with the outer arc groove 174 are installed on both sides of the lower part of the external moving rod 181.

[0042] Specifically, the outer moving rod 181 is arranged vertically; the outer positioning assembly 18 is provided with 3 groups, namely, one group of outer positioning assemblies 18 corresponds to an outer linear slide groove 10 and an outer arc plate 173; the bottom surface of the outer positioning plate 182 is flush with the top surface of the placement table 8, and the outer positioning plate 182 is in contact with the outer side wall of the outer boundary shielding mold 3, and the side of the outer positioning plate 182 close to the outer boundary shielding mold 3 is concave in shape, reducing damage to the outer boundary shielding mold 3; the outer moving rod 181 is slidingly arranged between the outer arc groove 174; through the sliding cooperation between the outer limit block 183 and the outer arc groove 174, the movement of the outer moving rod 181 is more stable.

[0043] Specifically, refer to Fig. 9 and Fig.11 By setting the arc deflection directions of the outer arc plate 173 and the inner arc plate 153 in opposite directions, when the rotating shaft 6 rotates, the inner annular plate 151 and the outer annular plate 171 rotate in the same direction, so that the inner arc plate 153 and the outer arc plate 173 rotate in the same direction, and then the inner moving rod 161 moves toward the inner boundary shielding mold 2, and the outer moving rod 181 moves toward the outer boundary shielding mold 3, so as to clamp and position the inner boundary shielding mold 2 and the outer boundary shielding mold 3; through reasonable design, it is possible to avoid collision and interference between the outer moving rod 181 and the inner arc plate 153.

[0044] Reference Fig.10 In this embodiment, the clamping assembly 19 includes a mounting cylinder 191 installed on both sides of the rotating shaft 6, and a movable groove 192 is provided in the mounting cylinder 191. A slider 193 is slidably provided in the movable groove 192. A slide bar 194 is installed on one side of the slider 193. A clamping block 195 that is clamped with the clamping groove 23 is installed on one end of the slide bar 194 extending to the outside of the mounting cylinder 191, and a spring 196 is connected between the other side of the slider 193 and the inner wall of the mounting cylinder 191.

[0045] Specifically, the clamping assembly 19 is provided with 4-8 groups, which are respectively located on both sides of the upper and lower parts of the rotating shaft 6, the upper part corresponds to the clamping groove 23 of the inner annular plate 151; the lower part corresponds to the clamping groove 23 of the outer annular plate 171; the slide rod 194 passes through the mounting tube 191, and the slide rod 194 and the mounting tube 191 are slidably matched; the shapes of the clamping groove 23 and the clamping block 195 match each other, preferably, the clamping groove 23 and the clamping block 195 are both trapezoidal, and the inclination angle between the inclined surfaces on both sides and the horizontal direction is 10°-15°; and the connection between the inclined surface and the short side is smoothly arranged to reduce the wear between the clamping block 195, the inner annular plate 151 and the outer annular plate 171.

[0046] In the initial state, the engaging groove 23 and the engaging block 195 engage with each other. When the rotating shaft 6 rotates, the inner annular plate 151 and the outer annular plate 171 rotate in the same direction, and finally drive the inner moving rod 161 and the outer moving rod 181 to move. If one of the inner positioning plate 162 or the outer positioning plate 182 contacts the masking mold first and is blocked, the rotating shaft 6 continues to rotate, and the blocked moving rod cannot move. The engaging block 195 will withdraw from the engaging groove 23 due to the setting of the inclined surface, release the engaging fit, and the spring 196 is compressed, while the other The movable moving rod continues to move until the other moving rod is blocked and the rotating shaft 6 stops rotating; when the positioning needs to be released, the rotating shaft 6 rotates in the opposite direction, and when the clamping block 195 is realigned with the clamping groove 23, under the elastic force of the spring 196, the clamping block 195 is re-engaged with the clamping groove 23, thereby driving the inner moving rod 161 and the outer moving rod 181 to release the positioning of the masking mold; through this structural design, the device can position ceramic ring bodies 1 of different diameters, which is convenient to use and improves practicality.

[0047] Reference Fig.12 In this embodiment, an annular groove 24 is formed on the upper portion of the rotating shaft 6 , the connecting assembly 20 is located in the first sleeve 152 , and the connecting assembly 20 can clamp the rotating shaft 6 through the annular groove 24 .

[0048] Reference Fig.12 In this embodiment, the connecting assembly 20 includes a connecting rod 201 installed at the bottom of the rotating disk 7, and a telescopic member 202 is installed on the side of the connecting rod 201 facing the rotating shaft 6, and an arc-shaped clamping block 203 that can extend into the annular groove 24 is installed on the telescopic end of the telescopic member 202.

[0049] Specifically, the connection assembly 20 is provided with two groups, which are located on both sides of the rotating shaft 6; the connecting rod 201 is located in the first sleeve 152; the telescopic member 202 includes but is not limited to a small cylinder, a small electric push rod, etc.

[0050] When the inner positioning plate 162 and the outer positioning plate 182 complete the positioning, the rotating shaft 6 stops rotating, the telescopic member 202 extends, and extends into the annular groove 24 through the arc-shaped clamping block 203 to clamp the rotating shaft 6. During the spraying process, the rotating shaft 6 rotates (in the same direction as the initial rotation), driving the rotating disk 7 to rotate, thereby driving the ceramic ring body 1 to rotate, thereby ensuring the spraying effect. After the spraying is completed, the rotating shaft 6 stops rotating, the telescopic member 202 retracts, driving the arc-shaped clamping block 203 to retract from the annular groove 24 and separate from the rotating shaft 6.

[0051] Working principle: through the locking cooperation of the locking block 14 and the locking groove 22, and the first step 21 provided on the outer side wall of the inner boundary shielding mold 2 to match the top surface part and the side wall within the inner boundary of the arc-shaped part 11, the inner boundary shielding mold 2 is assembled on the ceramic ring body 1, and the second step 31 provided on the inner side wall of the outer boundary shielding mold 3 to match the top surface and the side wall outside the outer boundary of the L-shaped part 13 is assembled on the ceramic ring body 1; Then place the ceramic ring body 1 with the masking mold installed on the placement table 8, and start the motor 5 to drive the rotating shaft 6 to rotate, so that the inner annular plate 151 and the outer annular plate 171 rotate in the same direction, so that the inner arc plate 153 and the outer arc plate 173 rotate in the same direction, and then the inner moving rod 161 moves toward the inner boundary of the masking mold 2, and the outer moving rod 181 moves toward the outer boundary of the masking mold 3. If one of the inner positioning plate 162 or the outer positioning plate 182 contacts the masking mold first and is blocked, the rotating shaft 6 continues to rotate, and the blocked moving rod cannot move. The clamping block 195 will withdraw from the clamping groove 23 due to the setting of the inclined surface, release the clamping fit, and the spring 196 is compressed, while the other movable moving rod continues to move until the other moving rod is blocked and the rotating shaft 6 stops rotating. At this time, the ceramic ring body 151 and the outer annular plate 171 rotate in the same direction, so that the inner arc plate 153 and the outer arc plate 173 rotate in the same direction, and then the inner moving rod 161 moves toward the inner boundary of the masking mold 2, and the outer moving rod 181 moves toward the outer boundary of the masking mold 3. The ceramic ring body 1 is positioned, and then the telescopic member 202 extends out, extends into the annular groove 24 through the arc clamping block 203, and clamps the rotating shaft 6. During the spraying process, the rotating shaft 6 rotates (in the same direction as the initial rotation), driving the rotating disk 7 to rotate, thereby driving the ceramic ring body 1 to rotate, thereby ensuring the spraying effect. After the spraying is completed, the rotating shaft 6 stops rotating, and the telescopic member 202 retracts, driving the arc clamping block 203 to retract from the annular groove 24 and separate from the rotating shaft 6, and then the rotating shaft 6 rotates in the opposite direction. When the clamping block 195 is realigned with the clamping groove 23, under the elastic force of the spring 196, the clamping block 195 is re-clamped and matched with the clamping groove 23, thereby driving the inner moving rod 161 and the outer moving rod 181 to release the positioning of the shielding mold, making it convenient for the operator to remove the ceramic ring body 1 with the shielding mold installed.

[0052] In summary, the present invention will not cause the tape to be blown away during the spraying process, and will not generate repeated operations. It can ensure that the spraying boundary of the ceramic ring is clear and accurate, and ensure the yield rate of the ceramic ring. Since the spraying boundary of the ceramic ring is clear and accurate, the time for subsequent deburring operations will be greatly reduced (from the original deburring time of a single ceramic ring of 20 minutes to 5 minutes), which greatly reduces the labor intensity of the operators. The masking mold of the present invention can be directly assembled with the ceramic ring, and there is no need to stick the spray tape one by one in the area for masking, which greatly reduces the working time of the operators (from the original single ceramic ring assembly time of 1 hour to 5 minutes), improves the working efficiency of the operators, and increases the production efficiency; The present invention adopts a hardware device shielding method to completely eliminate the doubt that the residual glue is not completely removed, greatly reduce the possibility of arc effect during use, and is significantly helpful for maintaining the stability of production equipment; The present invention adopts a hardware device shielding method to protect the ceramic ring, thereby reducing the damage to the ceramic ring caused by the high temperature and high pressure external force during the spraying process, and ensuring the safety of the ceramic ring during the spraying operation; The masking mold of the present invention adopts a hardware device, the masking mold will not be deformed, and can be reused; After the ceramic ring of the present invention is installed with the shielding mold, the positioning device contacts the shielding mold to limit the ceramic ring, thereby avoiding direct contact between the positioning device and the ceramic ring, increasing the service life of the ceramic ring and ensuring the yield rate of the ceramic ring.

[0053] The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0054] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the scope of protection of the invention. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on these embodiments, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in this field can still combine, add, delete or make other adjustments to the features in the various embodiments of the present invention according to the circumstances without conflict, without making creative work, so as to obtain different other technical solutions that do not deviate from the concept of the present invention in essence, and these technical solutions also belong to the scope of protection of the present invention.

Claims

1. A shielding mold for ceramic ring during spraying, the ceramic ring comprising a ceramic ring body (1), the ceramic ring body (1) being provided with an arc portion (11), a step portion (12) and an L-shaped portion (13) in sequence from the inside to the outside, the arc portion (11) being composed of a top surface portion and an arc portion, the junction of the top surface portion and the arc portion being the spraying inner boundary, the L-shaped portion (13) being composed of a horizontal portion and a vertical portion, the top of the vertical portion being provided with a concave annular groove, the side of the concave annular groove away from the arc portion (11) being connected to the top surface of the vertical portion being the spraying outer boundary, the area between the spraying inner boundary and the spraying outer boundary being the spraying area, characterized in that: The shielding mold comprises an inner boundary shielding mold (2) and an outer boundary shielding mold (3) in the shape of an annulus, the outer side wall of the inner boundary shielding mold (2) is provided with a first step (21) matching the top surface and side wall within the melt-sprayed inner boundary on the arc-shaped portion (11), the inner side wall of the inner boundary shielding mold (2) is a vertical surface, the inner side wall of the outer boundary shielding mold (3) is provided with a second step (31) matching the top surface and side wall outside the melt-sprayed outer boundary on the L-shaped portion (13), and the outer side wall of the outer boundary shielding mold (3) is a vertical surface; A plurality of upwardly protruding positioning blocks (14) are evenly arranged along the circumference on the arc-shaped portion (11) of the ceramic ring body (1), and a plurality of positioning grooves (22) matching the positioning blocks (14) are evenly arranged along the circumference on the outer side wall of the inner boundary shielding mold (2).

2. The shielding mold for ceramic ring spraying according to claim 1 is characterized in that: The masking mold is made of LG mold steel.

3. A positioning device for ceramic ring during melt spraying, comprising the shielding mold for ceramic ring during melt spraying according to any one of claims 1 or 2, characterized in that: The positioning device comprises a protection box (4), a motor (5) is installed in the protection box (4), a rotating shaft (6) is installed on the output end of the motor (5), the rotating shaft (6) passes through the top of the protection box (4), and extends to the top of the protection box (4) and is rotatably connected to the bottom of the rotating disk (7), a plurality of placement platforms (8) are evenly arranged on the rotating disk (7) along the circumference, a plurality of inner linear slide grooves (9) are evenly opened along the circumference near the center of the rotating disk (7), a plurality of outer linear slide grooves (10) are evenly opened along the circumference away from the center of the rotating disk (7), the inner linear slide grooves (9) and the outer linear slide grooves (10) are arranged at intervals from each other, and the rotating disk (7) is located below the rotating disk (7) and at the rotating shaft (6). An inner rotating component (15) is installed on the outside, and an inner positioning component (16) that is slidably matched with the inner rotating component (15) is slidably provided in the inner linear slide groove (9). An outer rotating component (17) is installed above the protection box (4) and outside the rotating shaft (6). The outer rotating component (17) is located below the inner rotating component (15). An outer positioning component (18) that is slidably matched with the outer rotating component (17) is slidably provided in the outer linear slide groove (10). Clamping components (19) that can be mutually clamped with the inner rotating component (15) and the outer rotating component (17) are installed on both sides of the rotating shaft (6). A connecting component (20) that can be mutually connected with the rotating shaft (6) is installed at the bottom of the rotating disk (7).

4. The positioning device for ceramic ring spraying according to claim 3 is characterized in that: The inner rotating assembly (15) comprises an inner annular plate (151) located outside the rotating shaft (6); a first sleeve (152) is provided on the top of the inner annular plate (151), and the first sleeve (152) is rotatably connected to the bottom of the rotating disk (7); a plurality of inner arc plates (153) are evenly provided on the outer wall of the inner annular plate (151) along the circumferential direction; an inner arc groove (154) is provided on the inner arc plate (153); and inner limit grooves (155) connected to the inner arc groove (154) are provided on both sides of the inner arc plate (153).

5. The positioning device for ceramic ring spraying according to claim 4 is characterized in that: The inner positioning assembly (16) comprises an inner moving rod (161) slidably arranged in the inner linear slide groove (9), an inner positioning plate (162) is installed on the top of the inner moving rod (161), the bottom of the inner moving rod (161) extends into the inner arc groove (154), and inner limit blocks (163) slidably matched with the inner limit groove (155) are installed on both sides of the lower part of the inner moving rod (161).

6. The positioning device for ceramic ring spraying according to claim 4, characterized in that: The outer rotating assembly (17) comprises an outer annular plate (171) located outside the rotating shaft (6); a second sleeve (172) is provided at the bottom of the outer annular plate (171), and the second sleeve (172) is rotatably connected to the top of the protection box (4); a plurality of outer arc-shaped plates (173) are evenly provided on the outer side wall of the outer annular plate (171) along the circumferential direction; an outer arc-shaped groove (174) is provided on the outer arc-shaped plate (173); and outer limit grooves (175) connected to the outer arc-shaped groove (174) are provided on both sides of the outer arc-shaped plate (173); Wherein, the arc deflection directions of the outer arc plate (173) and the inner arc plate (153) are opposite; A plurality of clamping grooves (23) are evenly arranged along the circumferential direction on the inner side walls of the outer annular plate (171) and the inner annular plate (151).

7. The positioning device for ceramic ring spraying according to claim 6, characterized in that: The external positioning assembly (18) includes an external moving rod (181) slidably arranged in the external linear slide groove (10), an external positioning plate (182) is installed on the top of the external moving rod (181), the bottom of the external moving rod (181) extends into the external arc groove (174), and external limit blocks (183) slidably matched with the external arc groove (174) are installed on both sides of the lower part of the external moving rod (181).

8. The positioning device for ceramic ring spraying according to claim 6, characterized in that: The clamping assembly (19) comprises a mounting tube (191) mounted on both sides of the rotating shaft (6); a movable groove (192) is provided in the mounting tube (191); a slider (193) is slidably provided in the movable groove (192); a slide bar (194) is mounted on one side of the slider (193); a clamping block (195) is mounted on one end of the slider (194) extending to the outside of the mounting tube (191) and is clamped with the clamping groove (23); and a spring (196) is connected between the other side of the slider (193) and the inner wall of the mounting tube (191).

9. The positioning device for ceramic ring spraying according to claim 4, characterized in that: An annular groove (24) is provided on the upper portion of the rotating shaft (6); the connecting assembly (20) is located in the first sleeve (152), and the connecting assembly (20) can clamp the rotating shaft (6) through the annular groove (24).

10. The positioning device for ceramic ring during spraying according to claim 9, characterized in that: The connecting assembly (20) comprises a connecting rod (201) mounted on the bottom of the rotating disk (7), a telescopic member (202) being mounted on the side of the connecting rod (201) facing the rotating shaft (6), and an arc-shaped clamping block (203) capable of extending into the annular groove (24) being mounted on the telescopic end of the telescopic member (202).

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